JP5406925B2 - 被覆研磨材物品とその製造及び使用方法 - Google Patents

被覆研磨材物品とその製造及び使用方法 Download PDF

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Publication number
JP5406925B2
JP5406925B2 JP2011518785A JP2011518785A JP5406925B2 JP 5406925 B2 JP5406925 B2 JP 5406925B2 JP 2011518785 A JP2011518785 A JP 2011518785A JP 2011518785 A JP2011518785 A JP 2011518785A JP 5406925 B2 JP5406925 B2 JP 5406925B2
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Japan
Prior art keywords
layer
presize
weight percent
precursor
abrasive
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2011518785A
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English (en)
Japanese (ja)
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JP2011528287A (ja
JP2011528287A5 (enExample
Inventor
ドン， エイチ． キンカイド，
アーネスト， エル． サーバー，
スティーブン， ジェイ． カイパート，
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of JP2011528287A publication Critical patent/JP2011528287A/ja
Publication of JP2011528287A5 publication Critical patent/JP2011528287A5/ja
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Publication of JP5406925B2 publication Critical patent/JP5406925B2/ja
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
JP2011518785A 2008-07-16 2009-07-02 被覆研磨材物品とその製造及び使用方法 Expired - Fee Related JP5406925B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/173,923 2008-07-16
US12/173,923 US20100011672A1 (en) 2008-07-16 2008-07-16 Coated abrasive article and method of making and using the same
PCT/US2009/049478 WO2010008940A1 (en) 2008-07-16 2009-07-02 Coated abrasive article and method of making and using the same

Publications (3)

Publication Number Publication Date
JP2011528287A JP2011528287A (ja) 2011-11-17
JP2011528287A5 JP2011528287A5 (enExample) 2012-08-02
JP5406925B2 true JP5406925B2 (ja) 2014-02-05

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ID=41120010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011518785A Expired - Fee Related JP5406925B2 (ja) 2008-07-16 2009-07-02 被覆研磨材物品とその製造及び使用方法

Country Status (5)

Country Link
US (1) US20100011672A1 (enExample)
EP (1) EP2326460B1 (enExample)
JP (1) JP5406925B2 (enExample)
CN (1) CN102099156B (enExample)
WO (1) WO2010008940A1 (enExample)

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CN103072096A (zh) * 2011-10-26 2013-05-01 湖北天马研磨材料有限公司 一种高精密研磨涂附磨具及其生产工艺方法
AR091282A1 (es) * 2012-06-06 2015-01-21 Saint Gobain Abrasives Inc Herramienta de corte de pequeño diametro
CN203210208U (zh) * 2013-04-03 2013-09-25 淄博理研泰山涂附磨具有限公司 一种拉毛网眼砂布
CN203210209U (zh) 2013-04-03 2013-09-25 淄博理研泰山涂附磨具有限公司 一种防堵塞网眼砂布
CN106030711B (zh) * 2013-12-20 2019-02-22 科思创德国股份有限公司 具有改进的光敏性的全息介质
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US10399201B2 (en) 2014-10-17 2019-09-03 Applied Materials, Inc. Advanced polishing pads having compositional gradients by use of an additive manufacturing process
US9776361B2 (en) 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
US10875145B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US10821573B2 (en) 2014-10-17 2020-11-03 Applied Materials, Inc. Polishing pads produced by an additive manufacturing process
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
KR102436416B1 (ko) 2014-10-17 2022-08-26 어플라이드 머티어리얼스, 인코포레이티드 애디티브 제조 프로세스들을 이용한 복합 재료 특성들을 갖는 ｃｍｐ 패드 구성
US10618141B2 (en) 2015-10-30 2020-04-14 Applied Materials, Inc. Apparatus for forming a polishing article that has a desired zeta potential
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
EP3397426B1 (en) * 2015-12-30 2021-06-23 3M Innovative Properties Company Abrasive articles and related methods
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
WO2019032286A1 (en) 2017-08-07 2019-02-14 Applied Materials, Inc. ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME
WO2020050932A1 (en) 2018-09-04 2020-03-12 Applied Materials, Inc. Formulations for advanced polishing pads
CN109278147B (zh) * 2018-11-28 2020-12-29 福建农林大学 一种仿实木年轮炭的加工方法
US11806829B2 (en) 2020-06-19 2023-11-07 Applied Materials, Inc. Advanced polishing pads and related polishing pad manufacturing methods
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ
WO2023180877A1 (en) * 2022-03-21 2023-09-28 3M Innovative Properties Company Curable composition, treated backing, coated abrasive articles including the same, and methods of making and using the same

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US5314513A (en) * 1992-03-03 1994-05-24 Minnesota Mining And Manufacturing Company Abrasive product having a binder comprising a maleimide binder
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MX9702267A (es) * 1994-09-30 1997-06-28 Minnesota Mining & Mfg Articulo abrasivo revestido, metodo para preparar el mismo y metodo para utilizar un articulo abrasivo revestido para someter a abrasion una pieza de trabajo dura.
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TWI309606B (en) * 2003-11-12 2009-05-11 Mitsui Chemicals Inc Resin composition, prepreg and laminate using the composition
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US7344575B2 (en) * 2005-06-27 2008-03-18 3M Innovative Properties Company Composition, treated backing, and abrasive articles containing the same
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EP2111326A4 (en) * 2006-12-20 2013-01-16 3M Innovative Properties Co COATED GRINDING WHEEL AND METHOD FOR THE PRODUCTION THEREOF

Also Published As

Publication number Publication date
EP2326460B1 (en) 2014-05-07
US20100011672A1 (en) 2010-01-21
JP2011528287A (ja) 2011-11-17
WO2010008940A1 (en) 2010-01-21
CN102099156B (zh) 2016-01-27
CN102099156A (zh) 2011-06-15
EP2326460A1 (en) 2011-06-01

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