JP5406785B2 - Double-sided pressure-sensitive adhesive tape for fixing abrasive and method for producing the same - Google Patents

Description

  The present invention relates to an abrasive fixing double-sided pressure-sensitive adhesive tape for fixing an abrasive to a surface plate of a polishing machine, and a method for producing the same.

  Conventionally, a double-sided pressure-sensitive adhesive tape for fixing an abrasive is used to fix an abrasive called a polishing cloth or a polishing pad to a surface plate of a polishing machine (see Patent Documents 1 to 3).

  Such a polishing machine is also used for polishing a glass substrate of a liquid crystal display (see Patent Document 4).

  On the other hand, in recent years, with the increase in the size of the display screen of a display device, a large square glass substrate having a side of 1.5 m or more has come to be used. In the case of tape, there are the following problems.

  That is, when polishing a large glass substrate, the abrasive used for polishing the glass substrate and the double-sided adhesive tape for fixing the abrasive to fix the abrasive on the surface plate must be large enough to match the substrate. is there.

  However, the double-sided pressure-sensitive adhesive tape for fixing the abrasive material needs to have a thickness accuracy considering the influence on the polishing accuracy, but a large-sized pressure-sensitive adhesive tape exceeding 2 m can be used for fixing the abrasive material. It was extremely difficult to manufacture with accuracy.

  Therefore, a plurality of narrow conventional double-sided adhesive tapes for fixing abrasives are prepared, and each double-sided adhesive tape for fixing abrasives is affixed to the abrasive in advance so that the end faces thereof are in contact, and then the abrasives are defined. A method of attaching to a board, or a conventional method of connecting a plurality of narrow adhesive double-sided adhesive tapes in the width direction and joining the end faces of a base film by an adhesive or fusion. A method for producing a wide double-sided pressure-sensitive adhesive tape for fixing an abrasive material corresponding to a large glass substrate can be considered, but both methods have the following problems.

  That is, in the case of the former method, it is necessary to repeat the operation of attaching the adhesive tape to the abrasive material a plurality of times, which takes time, and it is almost impossible to apply the adhesive tape adjacent to each other without gaps or steps. Therefore, a slight gap or a step is inevitably generated, which may cause a problem in polishing accuracy.

  On the other hand, in the case of the latter method, it is very difficult to accurately match the end faces of the base film, and even if the end faces of the base film can be accurately butted together, There is a problem that the adhesive is easily damaged and bent, is extremely inferior in handleability, and the adhesive is altered by the adhesive and heat of fusion.

JP 2000-190213 A JP 2000-77366 A JP 2001-354926 A JP 2004-122351 A

  It is an object of the present invention to provide a large-sized abrasive-fixing double-sided pressure-sensitive adhesive tape that can accurately polish a large-sized material to be polished such as a large-sized glass substrate and has excellent handling properties, and a method for producing the same. Yes.

  The double-sided pressure-sensitive adhesive tape for fixing abrasives according to the present invention is a double-sided pressure-sensitive adhesive tape for fixing abrasives, in which adhesive layers are laminated and integrated on both sides of a base film, and the base film consists of a single film. The pressure-sensitive adhesive layer is characterized in that two or more narrow pressure-sensitive adhesive layer portions are arranged in parallel on the base film.

  The method for producing a double-sided pressure-sensitive adhesive tape for fixing an abrasive according to the present invention comprises a plurality of transfers in which a transfer pressure-sensitive adhesive layer is releasably laminated on a transfer film on each of both surfaces of a single film. The transfer adhesive layer is laminated in parallel so that the transfer adhesive layer faces the substrate film, and the transfer adhesive layer of the transfer adhesive film is transferred onto the substrate film and laminated. It is characterized by forming a narrow pressure-sensitive adhesive layer part, and forming the pressure-sensitive adhesive layer by the narrow pressure-sensitive adhesive layer parts in parallel.

  In the method for producing a double-sided pressure-sensitive adhesive tape for fixing an abrasive according to the present invention, a plurality of transfer pressure-sensitive adhesive films in which a transfer pressure-sensitive adhesive layer is releasably laminated on a transfer film are overlapped with each other at opposite edges. And an overlapping portion forming step for forming overlapping portions by sequentially arranging them in the width direction, and cutting the transfer adhesive film in the thickness direction at the overlapping portion between the transfer adhesive films, thereby cutting and transferring the adhesive film portion. A step of dividing into a cut piece portion, a step of removing the cut piece portion, joining the cut surfaces of the cut transfer adhesive film portion to obtain a wide transfer pressure sensitive adhesive film, and a single film Laminate the wide transfer pressure-sensitive adhesive film on both sides of the base film so that the transfer pressure-sensitive adhesive layer faces the base material film. Characterized in that it comprises a step of integrating transferring the transfer PSA layer laminate.

  In the present invention, the term “single film” refers to a film in which no joint is formed by adhesion or fusion in a direction parallel to the surface (surface direction). The single film may be a laminated film formed by laminating and integrating a plurality of films as long as no joining portion is formed in the plane direction. In the case of a laminated film, at least one film may be a single film among a plurality of films constituting the laminated film.

  The material of the base film is not particularly limited, but a synthetic resin is preferable, and ethylene-vinyl acetate copolymer (EVA), polyvinyl chloride, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethylene (PE) Polypropylene (PP) and the like are mentioned, and polyethylene terephthalate is preferable because a film having excellent chemical resistance and strength and having a wide width and excellent thickness accuracy can be obtained.

  Although the thickness of a base film is not specifically limited, 20-200 micrometers is preferable. If the substrate film is too thin, the effect of improving the polishing accuracy may be insufficient, and if the substrate film is too thick, there may be a problem in the attaching operation to the polishing pad or productivity.

  Furthermore, the surface of the base film may be subjected to easy adhesion treatment such as corona discharge treatment and primer treatment to improve wettability, if necessary.

  Although the adhesive which comprises an adhesive layer is not specifically limited, Acrylic adhesive and a rubber adhesive are preferable. One of the pressure-sensitive adhesive layers provided on both sides of the base film is an abrasive-fixing pressure-sensitive adhesive layer, and the other is a surface-plate fixing pressure-sensitive adhesive layer. The pressure-sensitive adhesive layers laminated and integrated on both surfaces of the base film may be the same pressure-sensitive adhesive, or may be different.

  As the acrylic pressure-sensitive adhesive, a pressure-sensitive adhesive containing an acrylic copolymer and, if necessary, a tackifying resin can be used. Although it does not specifically limit as an acryl-type copolymer, It is obtained by polymerizing the monomer containing the (meth) acrylic-acid alkylester whose carbon number of an alkyl group is 1-12, and (meth) acrylic acid (meta). ) Acrylic acid alkyl ester copolymer (hereinafter simply referred to as “(meth) acrylic acid alkyl ester copolymer”) is preferred. In the present invention, “(meth) acrylic acid” means “methacrylic acid or acrylic acid”.

  If the weight average molecular weight of the acrylic copolymer is small, it may not be able to withstand the heat generated during polishing, and if it is large, the initial tackiness may be lowered. Therefore, 300,000 to 800,000 is preferable. In addition, the weight average molecular weight of an acryl-type copolymer says the value calculated | required from the polystyrene conversion value by tetrahydrofuran (THF) by gel permeation chromatography (GPC).

  Examples of the alkyl ester having 1 to 12 carbon atoms in the alkyl group include, for example, methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, and isopropyl (meth) acrylate. , (Meth) acrylic acid-n-butyl, (meth) acrylic acid-t-butyl, (meth) acrylic acid-2-ethylhexyl, octyl (meth) acrylate, etc., (meth) acrylic acid-2- Ethylhexyl is preferred. The (meth) acrylic acid alkyl ester having 1 to 12 carbon atoms in the alkyl group may be used alone or in combination of two or more.

  The (meth) acrylic acid alkyl ester copolymer includes (meth) acrylic acid alkyl ester having 1 to 12 carbon atoms in the alkyl group and other vinyl monomers copolymerizable with (meth) acrylic acid. It may be contained as a copolymerization component. Examples of such vinyl monomers include 2-hydroxyethyl (meth) acrylate, glycidyl (meth) acrylate, allyl glycidyl ether, crotonic acid, maleic acid, itaconic acid, n-methylolacrylamide, maleic anhydride, acetic acid. Examples include vinyl and styrene.

  When the (meth) acrylic acid alkyl ester copolymer contains a butyl (meth) acrylate component, if the content of butyl (meth) acrylate is small, the heat resistance of the pressure-sensitive adhesive layer decreases. In many cases, if it is large, it may be impossible to follow the waviness of the polishing pad, so 10 to 50% by weight is preferable.

  When the (meth) acrylic acid alkyl ester copolymer contains a 2-ethylhexyl (meth) acrylate component, if the content of 2-ethylhexyl (meth) acrylate is small, the pressure-sensitive adhesive layer is flexible. In some cases, the heat resistance of the pressure-sensitive adhesive layer may decrease, and therefore, 30 to 90% by weight is preferable, and 50 to 80% by weight is more preferable.

  In the (meth) acrylic acid alkyl ester copolymer, if the content of the (meth) acrylic acid alkyl ester having 1 to 12 carbon atoms in the alkyl group is small, the adhesive strength and tack of the pressure-sensitive adhesive layer are lowered. 70% by weight or more is preferable, 80% by weight or more is more preferable, and if too much, the crosslinking of the (meth) acrylic acid alkyl ester copolymer becomes insufficient and the cohesive force decreases, Since the pressure-sensitive adhesive layer may cause cohesive failure, 80 to 95% by weight is preferable.

  In order to obtain a (meth) acrylic acid alkyl ester copolymer, a (meth) acrylic acid alkyl ester having 1 to 12 carbon atoms in the alkyl group and (meth) acrylic acid are blended as necessary. What is necessary is just to carry out the radical reaction with the other monomer mentioned above in presence of a polymerization initiator. In addition, it does not specifically limit as a polymerization method, A conventionally well-known method is used, For example, solution polymerization, emulsion polymerization, suspension polymerization, block polymerization, etc. are mentioned.

  The polymerization initiator is not particularly limited. For example, 1,1-bis (t-hexylperoxy) -3,3,5-trimethylcyclohexane, t-hexylperoxypivalate, t-butylperoxypi Valet, 2,5-dimethyl-2,5-bis (2-ethylhexanoylperoxy) hexane, t-hexylperoxy-2-ethylhexanoate, t-butylperoxy-2-ethylhexanoate, Examples include t-butyl peroxyisobutyrate, t-butyl peroxy-3,5,5-trimethylhexanoate, t-butyl peroxylaurate, and the like. 1,1-bis (t-hexylperoxy) -3,3,5-trimethylcyclohexane and t-hexyl peroxypivalate are preferred. In addition, a polymerization initiator may be used independently or 2 or more types may be used together.

  If the thickness of the pressure-sensitive adhesive layer is thin, the pressure-sensitive adhesive force of the pressure-sensitive adhesive layer becomes insufficient, and the abrasive may peel off during polishing, and if it is thick, the cohesive force of the pressure-sensitive adhesive layer may decrease. 30-100 micrometers is preferable, 40-80 micrometers is more preferable, 50-70 micrometers is especially preferable.

  Further, when an acrylic pressure-sensitive adhesive is used as the pressure-sensitive adhesive constituting the pressure-sensitive adhesive layer, if the 180 ° peel force with respect to the stainless steel plate measured in accordance with JIS Z0237 is low, the slurry liquid is polished during polishing. The adhesive and adhesive strength of the acrylic adhesive may deteriorate due to the acid or alkali contained in the adhesive, and the abrasive may be peeled off from the adhesive layer. 7-40 N / 25 mm is preferable and 10-30 N / 25 mm is more preferable because it may be inconvenient when it is desired to re-paste.

  The tackifying resin is not particularly limited, and examples thereof include xylene resins, phenol resins, rosin resins, terpene resins, and the like. These may be used alone or in combination of two or more.

  Since the adhesive layer for fixing the polishing cloth is required to have strong adhesion, it is preferable to contain a tackifying resin. As the tackifier resin, a xylene resin is preferable, and an alkylphenol reaction product of the xylene resin is more preferable. As a commercial item of such an alkylphenol reaction product of xylene resin, for example, it is commercially available under the trade name “Nikanol T series” from Fudou.

  When the abrasive cloth fixing pressure-sensitive adhesive layer is composed of an alkyl (meth) acrylate copolymer, the amount of tackifying resin contained in the abrasive cloth fixing pressure-sensitive adhesive layer is the alkyl (meth) acrylate. 5-20 weight part is preferable with respect to 100 weight part of ester-type copolymers, and 10-17 weight part is more preferable. If the amount of the tackifying resin is small, the pressure-sensitive adhesive layer may cause cohesive failure, and if it is large, the pressure-sensitive adhesive force and tack of the pressure-sensitive adhesive layer may be reduced.

  The pressure-sensitive adhesive layer for fixing the platen is required to be peeled off from the platen without any adhesive residue. If the pressure-sensitive adhesive layer for fixing the platen is composed of a (meth) acrylic acid alkyl ester copolymer, the re-peelability may be inferior if the amount of the tackifier is large. The amount is preferably 10 parts by weight or less with respect to 100 parts by weight of the acrylic acid alkyl ester copolymer.

  As said rubber adhesive, it is marketed by the brand name "YK glue" from Sekisui Chemical Co., Ltd., for example. The rubber-based adhesive may contain a petroleum-based resin. The petroleum-based resin is commercially available from Arakawa Chemical Company under the trade name “Arcon”, for example.

  As one of the methods for producing the above-mentioned double-sided pressure-sensitive adhesive tape for fixing abrasives, first, a base film comprising a single film having the same width as or wider than the width of the double-sided pressure-sensitive adhesive tape for fixing abrasives to be obtained. Prepare.

  Next, a plurality of transfer films having a width narrower than the width of the base film are prepared. The number of transfer films may be adjusted so that the total width of the transfer films is substantially the same as the width of the abrasive-fixing double-sided pressure-sensitive adhesive tape to be obtained. The transfer film may be any film conventionally used as a release film, coated paper, or coated film, but a polyethylene resin film is laminated and integrated on both sides of a high-quality paper and each polyethylene resin is used. A transfer film obtained by applying a release agent to the surface of the film is preferred.

If the basis weight of the quality paper constituting the transfer film is low, the quality paper may be destroyed when the transfer film is peeled off from the adhesive layer when using the double-sided adhesive tape for fixing the abrasive. / M ² or more is preferable, and 100 to 130 g / m ² is more preferable.

  Next, a pressure-sensitive adhesive is applied onto each transfer film, and the solvent is completely dried and removed, and a transfer pressure-sensitive adhesive layer having a predetermined thickness is laminated and integrated in a peelable manner to produce a transfer pressure-sensitive adhesive film. After that, on both sides of the base film, a plurality of transfer adhesive films are arranged in parallel in the width direction of the transfer adhesive film so that the transfer adhesive layer faces the base film. The transfer pressure-sensitive adhesive layer is transferred onto the base film and laminated and integrated, and the transfer pressure-sensitive adhesive layer transferred onto the base film is used as a narrow pressure-sensitive adhesive layer part. A double-sided pressure-sensitive adhesive tape for fixing an abrasive can be produced by laminating and integrating pressure-sensitive adhesive layers formed by a plurality of narrow pressure-sensitive adhesive layer portions.

  When laminating a plurality of transfer adhesive films on a substrate film, the opposing end surfaces of the transfer adhesive layers of adjacent transfer adhesive films are completely joined together, and a gap is formed between the transfer adhesive layers. Alternatively, a gap may be formed between the opposing end surfaces of the transfer pressure-sensitive adhesive layers of the transfer pressure-sensitive adhesive films adjacent to each other.

  When a gap is formed between the opposing end faces of the transfer adhesive layers of the adjacent transfer adhesive films, if the size between the opposing end faces of the transfer adhesive layer is wide, the double-sided adhesive tape for fixing the abrasive material Since unevenness occurs in the adhered abrasive and the object to be polished may not be uniformly polished, it is preferably 1 mm or less.

  In addition, when a gap is formed between the opposing end surfaces of the transfer adhesive layers of the transfer adhesive films adjacent to each other, pressure is applied to the transfer adhesive layer transferred onto the base film as necessary. By deforming the transfer adhesive layer, a gap formed between the opposing end surfaces of the transfer adhesive layer may be filled. As a method of applying pressure to the transfer adhesive layer of the transfer film, a method of applying pressure to the transfer adhesive layer when laminating the transfer adhesive film on the substrate film, transfer onto the substrate film For example, there may be mentioned a method of applying pressure to the transfer pressure-sensitive adhesive layer by a winding pressure when winding the base film after laminating the pressure-sensitive adhesive film.

  On the other hand, another manufacturing method of the double-sided pressure-sensitive adhesive tape for fixing an abrasive material is such that a plurality of transfer pressure-sensitive adhesive films in which a transfer pressure-sensitive adhesive layer is detachably laminated on a transfer film are overlapped at edge portions facing each other. In this manner, the overlapping part forming step of sequentially forming the overlapping parts by arranging them in the width direction, and cutting the transfer adhesive film in the thickness direction at the overlapping part between the transfer adhesive films, the cut transfer adhesive film From a single film, a dividing step of dividing into a cut portion and a cut piece portion, a step of removing the cut piece portion, joining the cut surfaces of the cut transfer adhesive film portion to obtain a wide transfer adhesive film, and a single film Laminate the wide transfer adhesive film on both sides of the base film so that the transfer adhesive layer faces the base film, and Characterized in that it comprises a step of transferring the serial transfer PSA layer integrally laminated.

  When forming overlapping portions by sequentially arranging a plurality of transfer adhesive films in the width direction so as to overlap each other at the edge portions facing each other, forming a stable overlapping portion if the size of the overlapping portion is narrow Or the transfer film may not be cut smoothly in the subsequent dividing step, and even if it is wide, only waste is generated. 0.5 to 10% of the width is preferred.

  Each process may be carried out batchwise, but when trying to obtain a long double-sided adhesive tape for fixing abrasives, at least the process of obtaining a wide transfer adhesive film is continuously performed and wound up It is preferable to continuously wind up the machine. In addition, when manufacturing in a continuous type, although the cutting of an overlapping part is not specifically limited, Use of a slitter (slit processing machine) is suitable.

  The time until the cut surfaces of the adhesive film part for cutting and transferring are joined after removing the cut piece part is generally less than 1 m after separating the cut piece part, although it depends on the winding speed when manufacturing continuously. (Preferably less than 0.5 m). That is, when the length exceeds 1 m, a gap may be formed between the cut-and-transfer adhesive film portion and the cut-and-transfer adhesive film portion that are arranged in parallel without gap immediately after removal of the divided pieces. In addition, although a cutting | disconnection small piece part is not specifically limited, In the case of a continuous type, it is preferable to isolate | separate, winding up with a winder.

  The wide transfer pressure-sensitive adhesive film wound on the winder may be laminated on the base film directly after the transfer pressure-sensitive adhesive layer and then wound on the winder. A release film is laminated on the pressure-sensitive adhesive layer of the pressure-sensitive adhesive film so as to be peeled off. After the release film is peeled to expose the pressure-sensitive adhesive layer for transfer, a wide-width transfer film is laminated on the base film. It may be.

  Further, immediately after removing the cut piece from the transfer film, the two cut transfer adhesive films to be joined are shifted in the vertical direction around the cutting line, but cut in an overlapping state. Therefore, there is no level difference on the cut surface, and the upper cut-off transfer adhesive film portion is smoothly aligned with the cut surface of the lower cut-transfer adhesive film portion. Therefore, when joining the cut surfaces of both the cut and transfer adhesive film parts, it is not necessary to apply pressure from the vertical direction and the width direction, but in order to obtain more certainty, while providing a pressing roller in the vertical direction, You may make it provide a control roller also in the width direction.

  By the above process, the adhesive film part for cutting transfer that has been displaced in the vertical direction is joined to the cut end face to form a smooth wide film for transfer, but the adhesive film part for cutting transfer that becomes the joining surface The cut surfaces do not need to be completely bonded to each other, and may be joined without a gap.

  After joining the cut surfaces of the adhesive film part for cutting and transferring, the adhesive tape for maintaining the joining state is stuck on the joining part of the adhesive film part for cutting and transferring so as to straddle both adhesive film parts for cutting and transferring. It doesn't matter. That is, it is possible to more reliably prevent the gap between the bonding surfaces of the cut and transfer adhesive film portions from being shifted.

  The width of the adhesive tape for maintaining the bonded state is not particularly limited, but is preferably 1 to 40 cm. That is, if the width of the adhesive tape for maintaining the bonded state is too narrow, there is almost no effect, and if it is too wide, it may cause wrinkles.

  The double-sided pressure-sensitive adhesive tape for fixing abrasives according to the present invention is a double-sided pressure-sensitive adhesive tape for fixing abrasives, in which adhesive layers are laminated and integrated on both sides of a base film, and the base film consists of a single film. The pressure-sensitive adhesive layer is constituted by two or more narrow pressure-sensitive adhesive layer portions arranged in parallel on the base film, so that it can correspond to polishing of an object to be polished such as a large glass substrate, A large object to be polished can be accurately polished and is easy to handle.

  And since the base film of the double-sided pressure-sensitive adhesive tape for fixing an abrasive is composed of a single film, the base film is not bent or broken during handling.

  Moreover, the adhesive layer of the double-sided pressure-sensitive adhesive tape for fixing the abrasive is formed by juxtaposing the narrow adhesive layer portions, and the narrow adhesive layer portions can be manufactured with high thickness accuracy. Therefore, the pressure-sensitive adhesive layer of the double-sided pressure-sensitive adhesive tape for fixing the abrasive has excellent thickness accuracy, and the abrasive can be stuck as smooth as possible on the pressure-sensitive adhesive layer, so that the object to be polished can be made uniform. Can be polished.

It is 1st Embodiment of the manufacturing method of the double-sided adhesive tape for abrasive | polishing agent fixation which concerns on this invention, Comprising: It is a figure which illustrates the primary process typically. It is the schematic of the cross section of the transfer tape with the adhesive layer for transcription | transfer obtained at the primary process of FIG. It is 1st Embodiment of the manufacturing method of the double-sided adhesive tape for abrasive | polishing material fixation which concerns on this invention, Comprising: It is a figure which illustrates the secondary process typically. It is the schematic of the cross section of the semi-finished product obtained at the secondary process of FIG. It is 1st Embodiment of the manufacturing method of the double-sided adhesive tape for abrasive | polishing agent fixation which concerns on this invention, Comprising: It is a figure which illustrates the tertiary process typically. It is the schematic of the cross section of the double-sided adhesive tape for abrasive | polishing material fixation obtained at the tertiary process of FIG. It is the schematic of the cross section in another example of the double-sided adhesive tape for abrasive | polishing agent fixation which concerns on this invention. It is 2nd Embodiment of the manufacturing method of the double-sided adhesive tape for abrasive | polishing material fixation which concerns on this invention, Comprising: It is a figure which illustrates the semi-finished product manufacturing apparatus typically. It is the VV sectional view taken on the line of FIG. It is the WW sectional view taken on the line of FIG. It is the XX sectional view taken on the line of FIG. It is the YY sectional view taken on the line of FIG. It is the ZZ sectional view taken on the line of FIG. It is 2nd Embodiment of the manufacturing method of the double-sided adhesive tape for abrasive | polishing material fixation which concerns on this invention, Comprising: It is sectional drawing of the double-sided adhesive tape for abrasive | polishing material fixation obtained. It is 3rd Embodiment of the manufacturing method of the double-sided adhesive tape for abrasive | polishing agent fixation which concerns on this invention, Comprising: It is sectional drawing of the semi-finished product obtained. It is the model front view which made the cross section the part which showed the use condition of the double-sided adhesive tape for abrasive | polishing material fixation.

  Hereinafter, the present invention will be described in detail with reference to the drawings showing embodiments thereof.

  1-6 represents 1st Embodiment of the manufacturing method of the double-sided adhesive tape for abrasive | polishing agent fixation which concerns on this invention in order of the process.

  As shown in FIG. 1, the manufacturing method of the double-sided pressure-sensitive adhesive tape for fixing an abrasive material is first manufactured by a conventional manufacturing method and wound into a roll. For example, a transfer adhesive film 1a having a width of 1500 mm, for example, which is accurately laminated so as to be peeled off is prepared and set on the supply side of the primary process.

  Then, while continuously feeding the transfer adhesive film 1a from the supply side to the winder (not shown) side, both end edges in the width direction of the transfer adhesive film 1a have a width of, for example, 1225 mm by the slitter blades 4. After cutting in such a manner, a long-width-adjusted transfer pressure-sensitive adhesive film (primary process raw material) 1b having a fixed width and wound in a roll shape by a winder is produced. As shown in FIG. 2, the transfer adhesive film 1 b has a transfer adhesive layer 3 a laminated on the release surface of the transfer film 2.

  Next, as shown in FIG. 3, on the supply side of the secondary process, a long base film 5 wound in a roll shape having a constant width (for example, a width of 2500 mm) made of a single PET film is provided. The two transfer adhesive films 1b prepared as described above are arranged in the width direction and prepared so that the transfer adhesive layer 3a side faces the base film 5 side.

  Then, the base film 5 and the two transfer adhesive films 1b are pulled out from the supply side, and the opposite end faces in the width direction of the transfer adhesive layer 3a of the two transfer adhesive films 1b are joined together, while the base film The transfer adhesive films 1b and 1b are laminated on the upper surface of the sheet 5, and the transfer adhesive layers 3a and 3a are pressed against the base film 5 through the transfer films 2 and 2 by the laminating roll 6 to transfer the transfer adhesive film. The transfer pressure-sensitive adhesive layers 3a and 3a of 1b and 1b are transferred onto the base film 5 and laminated and integrated, and the transfer pressure-sensitive adhesive layers 3a and 3a are taken up as a narrow pressure-sensitive adhesive layer portion (not shown). As shown in FIG. 4, the pressure sensitive adhesive layer 3 is formed by bonding the opposite end faces of the narrow pressure sensitive adhesive layer portions 3a and 3a to each other in close contact with each other as shown in FIG. Rolled semi-finished product Obtaining a secondary step raw) 7a.

  Next, as shown in FIG. 5, the roll-shaped semi-finished product 7a obtained as described above is prepared on the supply side of the tertiary process, and the two transfer adhesive films 1b produced as described above are prepared. It arranges in the width direction and prepares so that the adhesive layer 3a for transfer may face the semi-finished product 7a side.

  Then, the semi-finished product 7a and the two transfer adhesive films 1b and 1b are pulled out from the supply side, and the opposite end surfaces in the width direction of the transfer adhesive layers 3a and 3a of the two transfer adhesive films 1b and 1b are joined together. The transfer adhesive films 1b and 1b are laminated on the base film 5 on which the adhesive layer of the semi-finished product 7a is not provided, and the transfer adhesive layer 3a is transferred via the transfer films 2 and 2 by the laminate roll 6. 3a is pressed against the base film 5, the transfer adhesive layers 3a and 3a of the transfer adhesive films 1b and 1b are transferred onto the base film 5 and laminated and integrated, and this transfer adhesive layer 3a, After making 3a into a narrow pressure-sensitive adhesive layer portion, the transfer film 2 on the semi-finished product 7a side is removed, and then continuously wound up by a winder (not shown). As shown in FIG. That on both sides of film 5 In addition, a roll-shaped wide abrasive in which two adhesive layers 3a and 3a are joined together in a state in which the opposing end faces are in close contact with each other without gaps. The fixing double-sided pressure-sensitive adhesive tape 7 can be obtained. In the double-sided pressure-sensitive adhesive tape 7 for fixing an abrasive material, the case where the pressure-sensitive adhesive layer 3 is formed by two small-width pressure-sensitive adhesive layer portions 3a and 3a has been described. However, three or more small-width pressure-sensitive adhesive layer portions 3a, 3a,. The adhesive layer 3 may be formed by.

  In the double-sided pressure-sensitive adhesive tape 7 for fixing an abrasive obtained as described above, the base film 5 is formed from a single film. The double-sided pressure-sensitive adhesive tape 7 for fixing an abrasive obtained as described above may be trimmed at both ends in the width direction.

  In the above-mentioned double-sided pressure-sensitive adhesive tape 7 for fixing an abrasive material, the joint portion of the narrow pressure-sensitive adhesive layer portions 3 a and 3 a laminated and integrated on one surface of the base film 5 and the other surface of the base film 5 were stacked and integrated. The narrow adhesive layer portions 3a and 3a are joined to each other in the thickness direction of the base film 5 (direction perpendicular to the surface of the base film 5). The joint portion between the integrated small-width pressure-sensitive adhesive layer portions 3 a and 3 a and the joint portion between the small-width pressure-sensitive adhesive layer portions 3 a and 3 a integrated and laminated on the other surface of the base film 5 It is good also as a structure which mutually shifted | deviated to the surface direction of the base film, without making it match | combine with the thickness direction.

  Bonding of the narrow adhesive layer portions 3a and 3a laminated and integrated on one surface of the base film 5 and bonding of the narrow adhesive layer portions 3a and 3a stacked and integrated on the other surface of the base film 5 The abrasive material stuck on the double-sided pressure-sensitive adhesive tape 7 for fixing the abrasive material is made to be a small-width adhesive by making the part and the structure shifted from each other in the surface direction of the base film without matching the thickness direction of the base film 5 The agent layer 3 can be received almost evenly, and the object to be polished can be polished with high accuracy.

  As described above, the narrow adhesive layer portions 3a and 3a laminated and integrated on one surface of the base film 5, and the narrow adhesive layer portion 3a stacked and integrated on the other surface of the base film 5, When manufacturing the double-sided pressure-sensitive adhesive tape for fixing an abrasive having a structure shifted from each other in the surface direction of the base film without matching the joining portion of 3a with the thickness direction of the base film 5, the base film 5 The transfer adhesive films 1b, 1b,... Laminated on both surfaces of the base film 5 have different widths, and the transfer adhesive films 1b, 1b laminated on one surface of the base film 5 are joined together with the base film. What is necessary is just to adjust so that the junction part of transfer adhesive films 1b and 1b laminated | stacked on the other surface of 5 may not match the thickness direction of the base film 5. FIG. In addition, 10% or more of the width | variety of the base film 5 is preferable, as for the width | variety of the adhesive film 1b for transcription | transfer, 20% or more is more preferable, and 33% or more is especially preferable.

  In the manufacturing method described above, when the transfer adhesive films 1b and 1b are laminated on both surfaces of the base film 5, the opposing end surfaces of the transfer adhesive layers 3a and 3a of the transfer adhesive films 1b and 1b are formed without gaps. Although the case where it joined is demonstrated, as shown in FIG. 7, it covers the full length of the adhesive films 1b and 1b for transfer between the opposing end surfaces of the adhesive layers 3a and 3a for transfer of the adhesive films 1b and 1b for transfer. The transfer adhesive films 1b and 1b may be laminated on the base film 5 while the gap 3A having a constant width is formed. The other points are the same as those in the manufacturing method described above, and the description thereof is omitted.

  In the above-mentioned double-sided pressure-sensitive adhesive tape 7 for fixing an abrasive, the gap 3A formed between the opposing surfaces of the narrow adhesive layer portions 3a and 3a laminated and integrated on one surface of the base film 5, and the other surface of the base film 5 The gap 3A formed between the opposing surfaces of the narrow adhesive layer portions 3a and 3a laminated and integrated with each other matches the thickness direction of the base film 5 (direction perpendicular to the surface of the base film 5). The gap 3A formed between the opposing surfaces of the narrow adhesive layer portions 3a and 3a laminated and integrated on one surface of the base film 5, and the small width stacked and integrated on the other surface of the base film 5 The gap 3 </ b> A formed between the opposing surfaces of the pressure-sensitive adhesive layer portions 3 a and 3 a may be structured so as to be shifted from each other in the surface direction of the base film without overlapping the thickness direction of the base film 5.

  A gap 3A formed between the opposing surfaces of the narrow adhesive layer portions 3a and 3a laminated and integrated on one surface of the base film 5, and a narrow adhesive layer portion stacked and integrated on the other surface of the base film 5 A double-sided pressure-sensitive adhesive tape for fixing an abrasive material by making the gap 3A formed between the opposing surfaces of 3a and 3a deviate from each other in the surface direction of the base film without overlapping in the thickness direction of the base film 5 7 can be received as uniformly as possible by the narrow pressure-sensitive adhesive layer portion 3, and the object to be polished can be polished with high accuracy.

  Thus, the gap 3A formed between the opposing surfaces of the narrow adhesive layer portions 3a and 3a laminated and integrated on one surface of the base film 5, and the small width stacked and integrated on the other surface of the base film 5 Double-sided pressure-sensitive adhesive for fixing an abrasive having a structure in which the gap 3A formed between the opposing surfaces of the pressure-sensitive adhesive layer portions 3a and 3a is not overlapped in the thickness direction of the base film 5 and is shifted in the plane direction of the base film When manufacturing a tape, the width of the transfer adhesive films 1b, 1b,... Laminated on both surfaces of the base film 5 is made different from each other, and the small width adhesive is laminated and integrated on one surface of the base film 5. A gap 3A formed between the opposing surfaces of the agent layer portions 3a and 3a, and a gap 3A formed between the opposing surfaces of the narrow adhesive layer portions 3a and 3a laminated and integrated on the other surface of the base film 5 Is adjusted so that it does not overlap in the thickness direction of the base film 5 Good. In addition, 10% or more of the width | variety of the base film 5 is preferable, as for the width | variety of the adhesive film 1b for transcription | transfer, 20% or more is more preferable, and 33% or more is especially preferable.

  The obtained abrasive fixing double-sided pressure-sensitive adhesive tape 7 is for fixing the abrasive shown in FIG. 6 except that a gap 3A is formed between the narrow adhesive layer portions 3a and 3a of the adhesive layers 3 and 3. Since it is the same as the structure of a double-sided adhesive tape, description is abbreviate | omitted.

  In addition, a gap 3A having a constant width is formed between the opposing end faces of the transfer adhesive layers 3a and 3a of the transfer adhesive films 1b and 1b so as to cover the entire length of the transfer adhesive films 1b and 1b. After the adhesive films 1b and 1b are laminated on the base film 5, pressure is applied to the transfer adhesive layers 3a and 3a of the transfer adhesive films 1b and 1b to deform the transfer adhesive layers 3a and 3a. Alternatively, the double-sided pressure-sensitive adhesive 7 for fixing an abrasive having the structure shown in FIG. 6 may be manufactured by filling the gap between the pressure-sensitive adhesive layers 3a and 3a for transfer.

  In the above-mentioned double-sided pressure-sensitive adhesive tape for fixing an abrasive, the opposing end faces of the narrow adhesive layer part laminated and integrated on one surface of the base film are joined together, and the other side of the base film is laminated and integrated. A gap may be formed between the opposing end surfaces of the narrow pressure-sensitive adhesive layer portion.

  In such a double-sided pressure-sensitive adhesive tape for fixing an abrasive, a joint portion between the narrow adhesive layer portions laminated and integrated on one surface of the base film, and a narrow adhesive layer laminated and integrated on the other surface of the base film The gap formed between the opposing end faces in the part may overlap in the thickness direction of the base film, or may be configured not to overlap.

  What is necessary is just to laminate | stack the adhesive film for transcription | transfer on each of both surfaces of a base film combining the point mentioned above for manufacture of the said double-sided adhesive tape for abrasive | polishing material fixation.

  FIGS. 8-14 represents 2nd Embodiment of the manufacturing method of the double-sided adhesive tape for abrasive | polishing agent fixation which concerns on this invention.

  As shown in FIG. 8, the double-sided pressure-sensitive adhesive tape for fixing an abrasive is manufactured by a conventional manufacturing method and wound into a roll, and the pressure-sensitive adhesive layer 11 is transferred to the transfer film 11a by a conventional manufacturing method. Two adhesive films for transfer 1a, which are laminated on one side so as to be peeled accurately, are prepared and set on the supply side of the primary process.

  Then, while continuously feeding the two transfer adhesive films 1a, 1a from the supply side to the winder (not shown) side, as shown in FIGS. 8 and 9, the width of one transfer adhesive film 1a The direction edge is overlapped with the edge of the other transfer adhesive film 1a so as to overlap with a certain width. At this time, the widthwise direction of the two transfer adhesive films 1a and 1a so that the transfer adhesive layer 11 of one transfer adhesive film 1a and the transfer film 11a of the other transfer adhesive film 1a face each other. Overlapping edges of each other.

  Thereafter, the transfer adhesive films 1a and 1a are sandwiched from both sides in the thickness direction by the pressing rollers R1 and R1, and then, as shown in FIG. 10 and FIG. The transfer adhesive film 1a is cut into a cut transfer adhesive film portion 14 and a cut small piece portion 15 by continuously cutting the entire thickness along the dividing line 13 by the slitter blade 4 at the central portion in the direction. .

  Next, as shown in FIG. 8 and FIG. 11, the cut piece 15 is continuously separated from the adhesive film part 14 for cutting and transferring, and then the adhesive film part 14 for cutting and transferring is sandwiched between upper and lower pressing rollers R2 and R2. 8 and 12, the cut surfaces of the two adhesive films 14 for cutting and transferring are joined together, that is, the transfer film parts 11a 'and 11a' of the adhesive films 14 and 14 for cutting and transferring. And the transfer adhesive layer portions 11 ′ and 11 ′ are joined to each other, and then the cut surfaces of the adhesive film portion for cut transfer 14 are pressed against each other by two press rollers R3 and R3 from both sides in the width direction. An example of forming a wide transfer pressure-sensitive adhesive film 1d by applying pressure and forming a single PET film on the transfer pressure-sensitive adhesive layer portions 11 ′ and 11 ′ of the wide transfer pressure-sensitive adhesive film 1d. For example, a semi-finished product in which a wide transfer adhesive film 1d is laminated on one side of a base film 5 as shown in FIG. 7b is continuously wound on a winder (not shown). The transfer pressure-sensitive adhesive layer portions 11 ′ and 11 ′ of the wide transfer pressure-sensitive adhesive film 1d are transferred onto the base film 5 by forming a pressure-sensitive adhesive layer in a state in which they are closely bonded to each other between their opposing end surfaces. Are stacked and integrated.

  And as shown in FIG. 14, the base material of the semi-finished product 7b which obtained the adhesive layer parts 11 'and 11' for transfer of the wide transfer adhesive film 1d obtained in the same manner as the above in another line as described above A double-sided pressure-sensitive adhesive tape 70 for fixing an abrasive is obtained by laminating on the opposite surface of the film 5 in the same manner as described above.

  Since the manufacturing method of this double-sided pressure-sensitive adhesive tape for fixing the abrasive is configured as described above, the cut surfaces of the adhesive film part 14 for cutting and transferring are in close contact with each other easily and accurately, and the abrasive of the present invention is stable. The fixing double-sided pressure-sensitive adhesive tape 70 can be obtained.

  FIG. 15 shows a third embodiment of the method for producing a double-sided pressure-sensitive adhesive tape for fixing an abrasive according to the present invention.

  As shown in FIG. 15, this manufacturing method includes both the cut and transfer adhesive film portion 14 on the joint between the cut and transfer adhesive film portion 14 and the cut and transfer adhesive film portion 14 of the wide transfer adhesive film 1 d. 14 except that the semi-finished product 7c having the adhesive state holding adhesive tape 1f having a width of 1 to 10% of the width of the adhesive film for transfer 1a so as to straddle 14 is obtained. It has become the same.

  As described above, the manufacturing method of the double-sided adhesive tape for fixing the abrasive material includes the adhesive film portions 14 and 14 for both cutting and transfer on the joint portion between the adhesive film portion 14 for cutting and transferring and the adhesive film portion 14 for cutting and transferring. In addition to the effects of the second embodiment, the adhesive tape 1f for maintaining the bonded state having a width of 1 to 40% of the width of the transfer adhesive film 1a is attached so as to extend over the width of the adhesive film. Thus, it is possible to more reliably prevent the transfer adhesive layer portions 11 ′ and 11 ′ of the semi-finished product 7c from being displaced from each other and generating a gap.

  The present invention is not limited to the above embodiment. For example, in the second embodiment, the cut piece 15 is separated and then sandwiched from above and below by the pressing rollers R2 and R2. However, the pressing rollers R2 and R2 may be omitted.

  Also in the double-sided pressure-sensitive adhesive tape 70 for fixing an abrasive manufactured by the above-described manufacturing method, the joint portion between the narrow pressure-sensitive adhesive layer portions 11 ′ and 11 ′ laminated and integrated on one surface of the base film 5, and the base film The joint of the narrow adhesive layer portions 11 ′, 11 ′ laminated and integrated on the other surface of 5 matches the thickness direction of the base film 5 (direction perpendicular to the surface of the base film 5). However, the narrow adhesive layer portions 11 ′ and 11 ′ laminated and integrated on one surface of the base film 5, and the narrow adhesive layer portion integrated and stacked on the other surface of the base film 5. It is good also as a structure where 11 'and 11' joint part shifted | deviated mutually in the surface direction of the base film, without matching with the thickness direction of the base film 5. FIG.

  In order to produce such a double-sided pressure-sensitive adhesive tape 70 for fixing an abrasive, in the above dividing step, when the adhesive film for transfer is cut in the thickness direction at the overlapping portion between the adhesive films for transfer, Transfer adhesive layer portions 11 ′ and 11 ′ in the wide transfer adhesive film laminated and integrated on one surface, and transfer adhesive in the wide transfer adhesive film laminated and integrated on the other surface of the base film 5 The adhesive film for transfer is cut so that the joint portions between the agent layer portions 11 ′ and 11 ′ do not match the thickness direction of the base film 5 and are shifted from each other in the surface direction of the base film. do it. The transfer adhesive film may be cut so that the width of the transfer adhesive film 1b is preferably 10% or more, more preferably 20% or more, and particularly preferably 33% or more of the width of the base film 5. .

  The abrasive-fixing double-sided pressure-sensitive adhesive tape manufactured as described above is used for detachably fixing the polishing pad C on the surface plate B of the polishing machine A.

  As shown in FIG. 16, the polishing machine A has a drive shaft B1 integrally provided on the lower surface, rotates in a predetermined direction, and an arrangement surface B2 on which the polishing cloth C can be detachably arranged on the upper surface. A disk-shaped surface plate B, and a rotating plate D that is disposed above the surface plate B and fixes an object to be polished E such as a wafer.

  The rotating plate D has a drive shaft D1 integrally provided on the upper surface thereof, and is configured to be rotatable in a predetermined direction. The general purpose member (not shown) can be used to attach and detach the workpiece E to the lower surface. It is configured to be able to adhere to.

  Then, double-sided pressure-sensitive adhesive tapes 7 and 70 for fixing the abrasive material are prepared, and the transfer film part 11a ′ of the transfer film 2 or the wide-film pressure-sensitive adhesive film 1d is peeled off and removed from the double-sided pressure-sensitive adhesive tapes 7 and 70 for fixing the abrasive material. Thus, the pressure-sensitive adhesive layers 3a and 11 'are exposed.

  An abrasive cloth laminate F is prepared by laminating the abrasive cloth C on the abrasive-fixing adhesive layer of the abrasive-fixing double-sided pressure-sensitive adhesive tapes 7 and 70 and pressing them in the thickness direction from both sides to stick them together. Next, the abrasive cloth C is placed on the arrangement surface B2 and pressed so that the pressure-sensitive adhesive layer for fixing the surface plate faces the arrangement surface B2 of the surface plate B. The double-sided pressure-sensitive adhesive tape 1 for fixing the abrasive is attached and integrated on the arrangement surface B2 of the surface plate B. On the other hand, an object to be polished E such as a wafer is detachably fixed to the lower surface of the rotating plate D using general-purpose means.

  Thereafter, the drive shaft B1 of the surface plate B is driven to rotate the surface plate B in a certain direction, and the rotation shaft D1 is driven to rotate the rotating plate D in a certain direction. Then, the lower surface of the workpiece E disposed on the lower surface of the rotating plate is polished by the polishing cloth C disposed on the surface plate B.

  The double-sided pressure-sensitive adhesive tape for fixing an abrasive of the present invention can be used not only for polishing large glass substrates but also for polishing small glass substrates and silicon wafers.

DESCRIPTION OF SYMBOLS 1 Double-sided adhesive tape 1a for abrasive | polishing material fixation, 1b Adhesive film 1d for transfer Wide adhesive film 1f for wide transfer Adhesive tape 2 Transfer film 3 Adhesive layer 3A Gap 3a Adhesive layer for transfer, Narrow adhesive layer part 5 Base film 7 Double-sided pressure-sensitive adhesive tape for fixing abrasive material 11 Transfer adhesive layer 11a Transfer film 12 Overlapping portion 14 Cutting transfer pressure-sensitive adhesive film portion 15 Cut small piece portion

Claims (2)

An adhesive fixing double-sided pressure-sensitive adhesive tape in which pressure-sensitive adhesive layers are laminated and integrated on both surfaces of a base film, wherein the base film is composed of a single film, and the pressure-sensitive adhesive layer comprises two or more narrow-width adhesives. The agent layer portion is configured by juxtaposing on the base film , a gap is formed between the opposing end surfaces of the narrow adhesive layer portion, and the layer integrated on one surface of the base film The gap formed between the narrow adhesive layer portions of the adhesive layer and the gap formed between the narrow adhesive layer portions of the adhesive layer laminated and integrated on the other surface of the base film are the above. A double-sided pressure-sensitive adhesive tape for fixing an abrasive, characterized by not overlapping in the thickness direction of the base film . A plurality of transfer adhesive films in which a transfer adhesive layer is peelably laminated on each of both surfaces of a base film made of a single film, the transfer adhesive layer being the base film A gap is formed between the opposing end faces of the transfer adhesive film and the gap formed between the opposing end faces of the transfer adhesive film laminated on one side of the base film; The transfer adhesive layer of the transfer adhesive film is laminated in parallel so that the gap formed between the opposing end faces of the transfer adhesive film laminated on the surface does not overlap in the thickness direction of the base film. Abrasive material fixing both characterized in that it is transferred onto the base film and laminated and integrated to form a narrow adhesive layer portion, and the adhesive layer is formed by these parallel narrow adhesive layer portions. Method of producing a pressure-sensitive adhesive tape.

Images