JP5396950B2 - Color filter inspection apparatus and method, and color filter manufacturing method - Google Patents

Description

  The present invention relates to a color filter inspection apparatus, a color filter inspection method, and a manufacturing method having a color unevenness adjusting function of a color filter manufactured by an inkjet method.

  In recent years, color filters are often used as means for increasing the number of colors in liquid crystal display devices, and there is an increasing demand for cost reduction of color filters. Along with this, in the production of color filters, the substrate size has been increasing, and the pigment dispersion method that repeats the conventional photolithography process uses a large amount of colored coating liquid, which further reduces costs. A method using an ink jet apparatus that uses a small amount of coloring coating liquid has been developed.

  Color unevenness of the color filter may appear as display unevenness on the liquid crystal display screen, resulting in poor display quality. When manufacturing color filters using the inkjet method, there are various causes of color unevenness, but color unevenness in the nozzle array direction of the inkjet head is mostly caused by variations in the discharge amount of each nozzle. Therefore, it is necessary to detect a phenomenon at an early stage with respect to the occurrence of color unevenness, collect defective products, adjust the discharge amount of each nozzle, and reduce color unevenness.

  As a method for measuring color unevenness of a color filter, there is a method of converting color unevenness into a numerical value by measuring luminance data or lightness data with a spectrophotometric device, as disclosed in Patent Document 1. However, when the color filter is imaged, the luminance value or brightness value varies randomly due to background noise generated in the imaging camera, and therefore the brightness value or brightness value may vary depending on the measurement timing. If noise from the imaging camera occurs, accurate brightness or brightness values will not be calculated, so when performing unevenness correction, there is a possibility that inadvertent correction will be performed in response to noise that differs from the original color unevenness. As a result, the color unevenness of each pixel cannot be made uniform.

  Note that luminance and lightness are also used to express the brightness of an object in almost the same meaning, but in color filters, the intensity of light that normally passes through or reflects an object depends on the brightness of the light emitter. In many cases, luminance is used, and brightness is used to express relative brightness as an optical property of the color filter itself.

JP 2007-205820 A

  The present invention has been made in view of the above-mentioned problems, and the problem is that in measuring color unevenness of a color filter, accurate color can be obtained by minimizing the influence of background noise of a measurement camera. In the case of a color filter that detects and calculates unevenness and is manufactured by an inkjet method, by adjusting the color unevenness, a color filter in which all pixels are uniformly colored and the chromaticity is adjusted to a desired value is obtained. Is to provide.

According to a first aspect of the present invention, there is provided an inspection apparatus for detecting color unevenness in an effective area of a color filter. The inspection apparatus includes an imaging unit and an image processing unit. of the effective visual unit areas consisting of a camera pixel, the imaging means is not leaked an image of the entire effective region of the color filter, which sequentially imaged is divided into images of a plurality of the effective visual field units, the The image processing means includes, for each effective visual field unit image captured by the imaging means, a set of all camera pixels filled with the same color filter pixel image, for each luminance measurement cell of the same color. and regions, the image processing means, as an average of the luminance values of each total camera pixels filled with the image of the color filter pixels of the same color, each of the same color It calculates an average brightness value in degrees measured cell region, by a comparison of the same color of the average luminance values between different brightness measurement cell region, a function of detecting the color unevenness in the effective area of the color filter The image of each effective visual field unit includes the image of the color filter pixel of the same color for a plurality of adjacent pixels, and the image of the color filter pixel of the same color located in a discrete or separated region The color filter inspection apparatus is characterized in that it does not include
The invention according to claim 2 is characterized in that, in calculating the average luminance value in each of the luminance measurement cell regions, the luminance measurement is repeated a plurality of times and the temporal averaging process is also performed. The color filter inspection apparatus according to Item 1.

The invention according to claim 3 has an illumination light source in a part of the imaging means, and images are picked up by transmitted light from the illumination light source, and the color filter inspection apparatus according to claim 1 or 2 It is.

According to a fourth aspect of the present invention, the color filter inspection apparatus according to the first or second aspect, wherein an illumination light source is provided in a part of the imaging unit, and the image is captured by reflected light from the illumination light source. It is.

The invention according to claim 5 is a color filter inspection method for detecting color unevenness, wherein the color filter is inspected using the color filter inspection apparatus according to any one of claims 1 to 4. .

The invention according to claim 6 relates to an average luminance value of each color for each luminance measurement cell region obtained by the color filter inspection apparatus according to any one of claims 1 to 4 with respect to a color filter manufactured by an inkjet method. A color filter manufacturing method is characterized in that color unevenness adjustment is performed by calculating a luminance difference from a target luminance value and obtaining a corrected ejection amount of an inkjet head nozzle.

According to a seventh aspect of the present invention, there is provided an inspection apparatus for detecting color unevenness in an effective area of a color filter, including an imaging unit and an image processing unit, wherein the imaging unit includes a plurality of vertical and horizontal units set in a field of view of the camera. of the effective visual unit areas consisting of a camera pixel, the imaging means is not leaked an image of the entire effective region of the color filter, which sequentially imaged is divided into images of a plurality of the effective visual field units, the The image processing means includes, for each effective visual field unit image captured by the imaging means, a set of all camera pixels filled with the same color filter pixel image, for each brightness measurement cell of the same color. and regions, the image processing means, as an average of brightness values of each individual camera pixels filled with the image of the color filter pixels of the same color, each of the same color It calculates an average brightness value in degrees measured cell region, by a comparison of the same color of the average brightness value of the different brightness measurement cell region, a function of detecting the color unevenness in the effective area of the color filter are as hereinbefore, images of the respective effective visual field unit includes an image of the same color color filter pixels of a plurality of pixels in contact with next to each other, the image of the same color color filter pixels located discrete or separate regions The color filter inspection apparatus is characterized in that it does not include
The invention according to claim 8 is characterized in that, in calculating the average brightness value for each brightness measurement cell region, repeated measurement is performed a plurality of times, and temporal averaging processing is also performed. It is an inspection apparatus of the described color filter.

The invention according to claim 9 has an illumination light source in a part of the imaging means, and images are picked up by transmitted light from the illumination light source, and the color filter inspection apparatus according to claim 7 or 8 It is.

The invention according to claim 10 has an illumination light source in a part of the imaging means, and images are picked up by reflected light from the illumination light source, and the color filter inspection apparatus according to claim 7 or 8 It is.

The invention according to an eleventh aspect is a color filter inspection method for detecting color unevenness, wherein the color filter is inspected using the color filter inspection apparatus according to any one of the seventh to tenth aspects. .

The invention according to claim 12 relates to an average brightness value of each color for each brightness measurement cell region obtained by the color filter inspection apparatus according to any one of claims 7 to 10 regarding a color filter manufactured by an inkjet method. A color filter manufacturing method characterized by performing color unevenness adjustment by calculating a lightness difference from a target lightness value and obtaining a corrected discharge amount of an inkjet head nozzle.

According to the color filter inspection apparatus of the first or seventh aspect of the present invention, it is possible to detect the occurrence of color unevenness at an early stage after the application of the colored coating liquid, and to prevent outflow of defective products downstream. . In addition, regarding color filters manufactured by the inkjet method, it is possible to know the location and degree of abnormality when abnormality occurs in the ejection amount from the nozzle of the inkjet head, and it becomes possible to determine the recovery measures, This contributes to the stable maintenance of the entire manufacturing process.

In addition, according to the color filter inspection apparatus of the first or seventh aspect of the present invention, the occurrence of color unevenness in units of a single pixel or a plurality of adjacent pixels of the color filter using the function of detecting color unevenness. Can be grasped.

In addition, according to the color filter inspection apparatus of the second or eighth aspect of the present invention, the occurrence of color unevenness can be detected by averaging processing both in a plane and in time, so that it is more than necessary. It is not affected by information in a minute area and is not greatly affected by noise other than color unevenness detected by the imaging camera. Therefore, waste due to erroneous detection or excessive detection can be minimized.

Further, according to the color filter inspection apparatus according to claim 3 or 4 of the present invention, or the color filter inspection apparatus according to claim 9 or 10 of the present invention, illumination light by transmitted light or reflected light is used. Since the color filter substrate can be installed in a uniform illumination environment, it is possible to sensitively read changes in the average luminance or brightness value of each color for each luminance or brightness measurement cell area, and to have a high color unevenness detection capability. be able to.

  Further, according to the color filter inspection method of the present invention, it is possible to detect the occurrence of color unevenness at an early stage after application of the colored coating liquid and prevent the outflow of defective products to the downstream. In addition, by installing an inspection process immediately after the inkjet process, it is possible to promptly send an inkjet head maintenance instruction when a malfunction occurs, and to quickly recover from the malfunction of the head. Contributes to stable maintenance.

  Further, according to the color filter manufacturing method of the present invention, the color unevenness adjustment of the color filter by the ink jet method is performed by correcting the ejection amount from the nozzle, so that all the colored pixels of the same color are uniformly colored. A color filter can be manufactured. Therefore, it is possible to provide a color filter that has excellent performance as a color filter and has chromaticity and lightness adjusted to desired values.

It is explanatory drawing which shows an example of the test | inspection apparatus of this invention. It is explanatory drawing which shows an example of the image caught within a camera visual field by the inspection apparatus of this invention. It is an enlarged view of a color filter pixel for explaining an example of a luminance or lightness measurement cell region. It is an enlarged view of the color filter pixel for demonstrating the other example of a brightness | luminance or lightness measurement cell area | region.

Embodiments of the present invention will be described below.
FIG. 1 is an explanatory diagram for schematically showing a configuration example of an inspection apparatus according to the present invention. The imaging element includes the following elements. An arbitrary part on the color filter substrate 13 having a color filter formed on the surface thereof can be imaged by a camera 12 having an area CCD imaging device having an image measurement function and a lens having a variable imaging magnification. A unit of image data captured by each of the matrix-like imaging elements of the camera 12 is referred to as a camera pixel, and is distinguished from a unit of color filter pixel constituting a color filter as an imaging target.

  In this example, the stage 14 on which the color filter substrate 13 on which a color filter as an imaging target is formed is mounted includes an illumination light source (not shown) inside, and is uniform due to light transmitted to the color filter substrate 13. Give lighting. For simplicity, the light box that has been used for photoengraving in the past can perform the same function, but the flatness and position fixing function as a stage and the brightness and uniformity as an illumination light source are dedicated. An improved version is desirable. In another example, when the illumination is not reflected light but reflected light, separate independent illumination light sources are equally arranged on the upper periphery of the color filter substrate 13 to uniformly illuminate the surface of the color filter substrate.

  In addition to the above, the image pickup means of the inspection apparatus of the present invention includes a first drive system 10 and its control system (not shown) that enable the camera 12 and the stage 14 to relatively move in a plane, and the stage. 14 includes a second drive system 11 and a control system (not shown) that enable the relative distance between the camera 14 and the camera 12 to be changed, and a camera control system (not shown) that controls the imaging mechanism of the camera 12. It is.

  The image processing means of the inspection apparatus of the present invention includes an image recording system for accumulating and storing the image obtained from the camera 12, the setting of the luminance or brightness measurement cell area of the present invention, and the average brightness or brightness value. An image processing system related to the calculation (the above two systems are collectively indicated by 15 in FIG. 1).

  An embodiment of the present invention will be described with reference to an example of a color filter manufactured by an inkjet method, which is a method for manufacturing a color filter characterized by adjusting color unevenness. The color unevenness inspection apparatus and inspection method are the same in the case of a color filter manufactured by another manufacturing method, but for the sake of convenience, a color filter manufactured by an inkjet method will be described as an example.

Of the color unevenness of the color filter, especially in the color filter manufactured by the ink jet method, the color unevenness in the aligned nozzle arrangement direction is often caused by the variation in the discharge amount of each nozzle. In order to eradicate the color unevenness in this direction, it is best to completely arrange the discharge amounts of all the nozzles. However, in an actual color filter, color unevenness is not necessarily recognized if the total amount of the colored coating liquid ejected into a certain region of the same color is equal to other certain regions of the same color. It is not inevitable to arrange all the discharge amounts of the nozzles.

  Hereinafter, a case where a color filter is manufactured by a parallel scanning method in which the alignment of the nozzles of the inkjet head and the alignment direction of the same color of the color filter are parallel will be described. The same idea can be applied when manufacturing a color filter by the tilt method in which the nozzles of the inkjet head have a certain inclination with respect to the direction of arrangement of the same color. The concrete means to find the relationship with is more complicated.

  Here, if the same color is arranged in the X direction by filling the black matrix weir in the black matrix weir by the parallel scanning method of the inkjet, the arrangement of the nozzles of the inkjet head is also X direction. Taking a color filter with a three-color stripe arrangement as an example, the Y-direction feed of the inkjet head is set to a pitch of three colors, and a fixed discharge amount of a specified color in a one-color width weir in the Y direction. It is applied in the Y direction while maintaining the above.

  The above method is repeated three times, and the colored coating liquid is filled with three colors in the black matrix weir. The entire effective area of the color filter substrate can be painted in three colors by appropriately performing a shift in the X direction for a region exceeding the nozzle arrangement length of the inkjet head.

  At the time of inspection, first, the first drive system 10 is operated so that the camera 12 is directly above the center of the color filter substrate 13, the coordinate origin is set, and then moved again to the inspection start position. The second drive system 11 is controlled so that the visual field is filled with the effective area of the color filter substrate. FIG. 2 is an explanatory diagram illustrating an example of an image captured in the camera field of view. An image captured inside the outer frame 16 of the camera field of view is an arrangement of a black matrix 17 and color filter pixels 18 partitioned by the black matrix 17, and usually three colors R, G, and B are regularly arranged as shown in the figure. After that, the camera control system captures an image in the field of view, but excluding the peripheral part of the field of view, set a certain area consisting of a plurality of camera pixels in each of the vertical and horizontal directions, for example, the area surrounded by the alternate long and short dash line in the figure The field of view unit 20 is used. Image data captured by camera pixels in the effective visual field unit 20 is stored in an image recording system. The image data is converted into appropriate luminance or brightness data by an image processing system and processed.

  The image of the effective visual field unit 20 within one visual field captured by the camera 12 is an object of image processing, and the camera continues to move to an adjacent visual field and picks up an image. At this time, the peripheral part of the visual field overlaps, but the entire area to be inspected is divided into a plurality of effective visual field units and sequentially picked up and processed. The size of the field of view and the effective field of view unit is not particularly limited. However, if the field of view is too large, the resolution of the camera will be insufficient to detect color unevenness, and if the field of view is too narrow, the entire area to be inspected will be divided sequentially. The number of fields to be imaged and the number of effective field units greatly increases, and the capability of the image processing system cannot keep up.

  As a method for the image processing system to recognize the opening of the black matrix 17 from the image captured in the effective field unit in the camera field of view, the luminance or brightness range of the black matrix opening is acquired and set in advance. Alternatively, it is registered in advance as a known one. Then, a threshold is set between the luminance or brightness range of the black matrix opening and the luminance or brightness range of the black matrix 17, and the coordinates exceeding the threshold are regarded as the black matrix opening.

  Furthermore, as a method for determining the color of the black matrix opening by the image processing system, first, the color with the highest luminance or brightness value of the black matrix opening is selected as the reference, and then the color is selected. Select which color is R, G, or B as the reference color, and determine the color of each cell based on the order of arrangement of known colors (R, G, B or B, G, R) .

  FIG. 3 is an enlarged view of the color filter pixel 18 for defining a luminance or brightness measurement cell region for each designated color from the effective visual field unit 20 and explaining the relationship with the camera pixel. The color filter pixels 18 are arranged in the Y direction in order of R, G, and B in the black matrix opening. As described above, the black matrix and each color are discriminated from the image of the effective field unit 20 captured by the camera, for example, the R color is designated, and the camera pixel 19 corresponding to the inside of the R color filter pixel 18 is specified. In the case of capturing only the image, the R color filter pixel 18 to which the camera pixel 19 corresponds corresponds to two pixels arranged vertically and completely in the center of the effective visual field unit 20 and four pixels arranged imperfectly on the left and right. It is determined regardless of the partition of the filter pixel. In this way, the brightness or brightness measurement values for each camera pixel in each effective visual field unit are classified by color, and the brightness or brightness measurement cell region is determined from a set of camera pixels of the same color.

  When the luminance or lightness measurement cell region is determined from the number of camera pixels 19, generally, n × m camera pixels (n and m are positive integers) in the X direction × Y direction are N × M (N, M M is not always a positive integer). In the example of FIG. 3, the number of camera pixels 19 is 13 × 8. However, even if the effective visual field unit 20 is defined, the luminance or brightness is different for different effective visual field units or different colors depending on the color arrangement. The number of camera pixels in the measurement cell region is not always constant.

  FIG. 4 shows an enlarged view of color filter pixels for explaining another example of the luminance or lightness measurement cell region.

  In this example, as shown in FIG. 3, the camera pixel is not a target other than the one that fits in the color filter pixel without excess or deficiency, but the portion where the camera pixel does not completely fill the color filter pixel is cut off in image processing. . As described above, the luminance or brightness measurement value for each camera pixel in each effective visual field unit is classified by color to make a set of camera pixels of the same color. A luminance or brightness measurement cell region is defined by limiting a portion that can correspond to an aggregate of a plurality of color filter pixels of a color.

  If the brightness or brightness measurement cell region is determined from the number of camera pixels 19 based on the other example of the brightness or brightness measurement cell region, the number of camera pixels 19 is 8 × 8 in the example of FIG. This corresponds to two R-color pixels of the color filter pixel 18. In general, N × M color filter pixels are set as one luminance or brightness measurement cell region (N and M are positive integers) including the case of only one color filter pixel.

  In addition, regarding the color unevenness in the X direction caused by the nozzle in the inkjet method, the color filter pixel has a risk of overlooking short width color unevenness if the X direction of the luminance or lightness measurement cell region is set too large. Therefore, it is appropriate to apply one pixel in the X direction to the X direction of the luminance or brightness measurement cell region. On the other hand, since the Y direction of the luminance or lightness measurement cell region corresponds to the coating direction in the ink jet method, color unevenness due to the nozzle hardly occurs, and the luminance or lightness measurement cell region corresponds to several pixels in the Y direction by the color filter pixels. It can be easily applied to the Y direction. However, the luminance or lightness measurement cell region is necessarily an adjacent region within the same color, and does not exist separately in discrete regions of the same color.

  The color unevenness caused by the nozzle is a phenomenon that is detected by the human eye as a slight, gentle difference in brightness due to transmitted or reflected light. It is bright in areas where the amount of discharge from the nozzle is small and dark in areas where the amount of discharge is large. To change. The above phenomenon is obvious for transmitted light as the difference in absorption of light passing through the colored coating liquid layer, and for reflected light, the rising of the colored coating liquid layer when the discharge amount is large is reflected light. It is related to the phenomenon that causes scattering. Whether transmitted light or reflected light is selected depending on the type of coating liquid layer, the amount of coating liquid, and the conditions of illumination light, but when subtle differences in the surface shape of the colored coating liquid layer are related to color unevenness In many cases, illumination by reflected light is more effective.

  Next, processing of the brightness or brightness value D (x, y) of each camera pixel 19 in the brightness or brightness measurement cell area will be described. Although the coordinate position (x, y) of the camera pixel can be expressed in the coordinate system of the entire inspection area, in the description of the present invention, for the sake of simplicity, the camera pixel in each luminance or brightness measurement cell area The order numbers in the X and Y directions are replaced. The luminance value D may be the image data of each camera pixel captured by the camera as it is, but a relative value expression converted into a luminance level of 256 gradation expression is used. As shown in Equation 1, the luminance values of the black matrix openings belonging to the same X coordinate are added in the Y direction for each color and divided by the total number of pixels of the added camera, so that each camera pixel in the X direction is divided. An average luminance value X (x) is obtained. In the case of expressing the brightness value, the brightness value D is expressed by a numerical value of 100% full scale, and an average brightness value X (x) for each camera pixel in the X direction is obtained by the same operation as the above formula of the brightness value. It is done.

ここで、ｍは輝度または明度測定セル領域のＹ方向のカメラ画素数を示す。

Here, m indicates the number of camera pixels in the Y direction of the luminance or brightness measurement cell region.

  Similarly, the average luminance or brightness value for each camera pixel in the X direction obtained by Equation 1 is added in the X direction as shown in Equation 2, and divided by the number of camera pixels in the X direction in the luminance or brightness measurement cell region. To calculate the average luminance or lightness value L of one luminance or lightness measurement cell region as a whole.

ここで、ｎは輝度または明度測定セル領域のＸ方向のカメラ画素数を示す。

Here, n indicates the number of camera pixels in the X direction of the luminance or brightness measurement cell region.

  As described above, by repeating the averaging process of the luminance or lightness value of the camera pixels in each luminance or lightness measurement cell region, the camera determines the average luminance or lightness value for each luminance or lightness measurement cell region. The luminance or brightness value of each camera pixel that has been imaged and converted includes a background noise component of the CCD element. If there is an abnormality in the discharge amount from the nozzles in the X direction, the characteristics will not disappear depending on the process of averaging in the Y direction (Equation 1), but in the case of randomly generated background noise, The effect is already weakened by the process. However, the influence of the background noise may reach the average luminance or lightness value L of one luminance or lightness measurement cell region obtained by (Equation 2). That is, although the average brightness or brightness value for each brightness or brightness measurement cell region is a numerical value obtained by performing the averaging process in a plane, a noise component is included.

  The luminance or brightness value for each time due to the background noise of the CCD element has a normal distribution in terms of characteristics. Therefore, when the same position is repeatedly measured several times, the brightness or brightness value is randomly calculated within the range of the normal distribution. . By calculating the luminance or brightness value averaging process for each measurement time in combination with the average brightness or brightness value for each brightness or brightness measurement cell region, noise other than color unevenness is further reduced.

As described above, if the average brightness or brightness value of each color for each brightness or brightness measurement cell area is obtained by repeated measurement and temporal averaging is also performed, it is easy to compare numerical values between different brightness or brightness measurement cell areas. As a result, it is easy to capture color unevenness that is visible to the human eye but difficult to capture using optical imaging means. As described above, it is possible to realize a color filter inspection apparatus having a function of detecting color unevenness by reducing noise other than color unevenness, and a color filter inspection method for detecting color unevenness using the inspection apparatus. .

  Furthermore, the brightness or brightness difference between the target brightness or brightness value of the average brightness or brightness value for each brightness or brightness measurement cell area obtained as described above is calculated, and the brightness or brightness difference is further calculated as the discharge amount of the inkjet head. By converting the corrected discharge amount to the luminance or lightness measurement cell region from the calibration curve of the luminance or lightness for the color and obtaining the corrected discharge amount of the inkjet head nozzle corresponding to each luminance or lightness measurement cell region, Adjustments can be made. Here, in the luminance or lightness measurement cell region, a portion that can correspond to an aggregate composed of one pixel of a specified color or a plurality of adjacent color filter pixels of the same color is a discharge amount of an inkjet nozzle after correction It is easier to perform actual color unevenness adjustment if the target area is applied.

  In addition, by implementing the above color unevenness adjustment in the manufacturing process of the color filter, it is possible to realize a manufacturing method capable of continuously improving the quality of the color filter while continuing to manufacture the color filter. it can. Of course, the above-described color unevenness adjustment is not always necessary every time one color filter substrate is processed. For example, there is a temporary interruption of the manufacturing process, and it is practical to carry out only at the beginning of the restart. It is.

  The color unevenness adjustment method in the present invention will be described based on an embodiment including luminance measurement.

  An average luminance value for each luminance measurement cell region of a small color filter manufactured by the inkjet method was calculated over 10 adjacent luminance measurement cell regions. The amount of ink discharged to each luminance measurement cell region was set in common at 660 pl. As shown in Table 1, when the average luminance value for each luminance measurement cell area was measured five times, there was random variation that was considered to be the influence of the background noise of the CCD camera.

  Table 1 shows the average luminance value obtained as a result of the measurement performed five times in the last row, and by averaging the planar average luminance value for each of the ten luminance measuring cell regions further in time, It can be seen that the variation is alleviated. The number of the average luminance value in the table corresponds to the luminance level of 256 gradation expression based on the luminance detection function of the camera.

  Next, a brightness difference from the target brightness value of the obtained average brightness value for each brightness measurement cell area is calculated, and the brightness difference is further calculated from the brightness calibration curve with respect to the ejection amount of the inkjet head to the brightness measurement cell area. It converted into the correction | amendment discharge amount, and the discharge amount after correction | amendment of the inkjet head nozzle corresponding to each brightness | luminance measurement cell area | region was calculated | required. In this embodiment, since the luminance value change amount per 1 pl of the corrected discharge amount is −0.01 and the target luminance value is 139.9, the corrected discharge amount of each luminance measurement cell region is set as shown in Table 2. Further, the corrected discharge amount is added to the previous discharge amount to determine the discharge amount after the next correction.

  When the substrate prepared after the discharge amount correction was measured, the average value of five average luminance values of all luminance measurement cell regions was 139.9, and a color filter substrate without color unevenness was obtained.

DESCRIPTION OF SYMBOLS 10 ... 1st drive system 11 ... 2nd drive system 12 ... Camera 13 ... Color filter board | substrate 14 ... Stage 15 ... Image recording system and image processing system 16 ... Camera visual field Frame 17 ... black matrix 18 ... color filter pixel 19 ... camera pixel 20 ... effective field unit

Claims (12)

In the inspection device for detecting color unevenness in the effective area of the color filter,
Having imaging means and image processing means,
The imaging means has an effective visual field unit as an area composed of a plurality of vertical and horizontal camera pixels set within the visual field of the camera,
The imaging means is not leaked an image of the entire effective region of the color filter, which sequentially imaged is divided into images of a plurality of the effective field of view units,
The image processing unit measures the luminance of each set of all the camera pixels filled with the image of the color filter pixels of the same color in each effective visual field unit image captured by the imaging unit. Cell area ,
The image processing means calculates an average luminance value in each luminance measurement cell region of the same color as an average of luminance values for all camera pixels filled with the image of the color filter pixels of the same color. A function of detecting color unevenness in an effective area of the color filter by comparing the average brightness values of the same color between different brightness measurement cell areas;
The image of each effective visual field unit includes the image of the color filter pixel of the same color for a plurality of adjacent pixels, and does not include the image of the color filter pixel of the same color located in a discrete or separated region. Color filter inspection device characterized by the above. 2. The color filter according to claim 1, wherein in calculating the average luminance value in each of the luminance measurement cell regions, the luminance measurement is repeated a plurality of times, and temporal averaging processing is also performed. Inspection device.   The color filter inspection apparatus according to claim 1, wherein the imaging unit includes an illumination light source, and images are picked up by transmitted light from the illumination light source.   The color filter inspection apparatus according to claim 1, wherein an illumination light source is provided in a part of the imaging unit, and an image is picked up by reflected light from the illumination light source.   A color filter inspection method for detecting color unevenness, wherein the color filter is inspected using the color filter inspection apparatus according to claim 1.   Regarding a color filter manufactured by an inkjet method, a luminance difference between an average luminance value of each color and a target luminance value for each luminance measurement cell region obtained by the color filter inspection apparatus according to claim 1. A method for manufacturing a color filter, characterized in that color unevenness adjustment is performed by calculating and calculating a corrected ejection amount of an inkjet head nozzle. In the inspection device for detecting color unevenness in the effective area of the color filter,
Having imaging means and image processing means,
The imaging means has an effective visual field unit as an area composed of a plurality of vertical and horizontal camera pixels set within the visual field of the camera,
The imaging means is not leaked an image of the entire effective region of the color filter, which sequentially imaged is divided into images of a plurality of the effective field of view units,
The image processing unit measures the brightness of each set of all the camera pixels filled with the image of the color filter pixels of the same color in each effective field unit image captured by the imaging unit. Cell area ,
The image processing means calculates an average brightness value in each brightness measurement cell area of the same color as an average of brightness values for all camera pixels filled with the image of the color filter pixels of the same color. A function for detecting color unevenness in the effective area of the color filter by comparing the average brightness values of the same color between different brightness measurement cell areas;
Images of the respective effective visual field unit includes an image of the same color color filter pixels of a plurality of pixels in contact with next to each other, does not include the image of the color filter pixels of the same color located discrete or separate regions, it Color filter inspection device characterized by the above.   The color filter inspection apparatus according to claim 7, wherein when calculating the average brightness value for each brightness measurement cell region, the measurement is repeated a plurality of times, and temporal averaging processing is also performed. The color filter inspection apparatus according to claim 7, wherein the imaging unit includes an illumination light source, and images are picked up by transmitted light from the illumination light source. The color filter inspection apparatus according to claim 7 , wherein an illumination light source is provided in a part of the imaging unit, and imaging is performed by reflected light from the illumination light source. A color filter inspection method for detecting color unevenness, wherein the color filter is inspected by using the color filter inspection apparatus according to claim 7 . Regarding a color filter manufactured by an inkjet method, a brightness difference between an average brightness value of each color and a target brightness value for each brightness measurement cell region obtained by the color filter inspection apparatus according to claim 7. A method for manufacturing a color filter, characterized in that color unevenness adjustment is performed by calculating and calculating a corrected ejection amount of an inkjet head nozzle.

Images