JP5378678B2 - 多点電圧電流プローブを用いた計測システム及び監視方法 - Google Patents

多点電圧電流プローブを用いた計測システム及び監視方法 Download PDF

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Publication number
JP5378678B2
JP5378678B2 JP2007317737A JP2007317737A JP5378678B2 JP 5378678 B2 JP5378678 B2 JP 5378678B2 JP 2007317737 A JP2007317737 A JP 2007317737A JP 2007317737 A JP2007317737 A JP 2007317737A JP 5378678 B2 JP5378678 B2 JP 5378678B2
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Japan
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signal
frequency
multiplexer
module
multiplexing
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JP2007317737A
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Japanese (ja)
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JP2008226820A (ja
Inventor
チョーエイリ，レイ
ヘッケルマン，トッド
ジェイ． カウムー，デイビッド
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MKS Instruments Inc
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MKS Instruments Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04B—TRANSMISSION
    • H04B17/00—Monitoring; Testing
    • H04B17/30—Monitoring; Testing of propagation channels
    • H04B17/309—Measuring or estimating channel quality parameters
    • H04B17/318—Received signal strength

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Signal Processing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Quality & Reliability (AREA)
  • Plasma Technology (AREA)
  • Transmitters (AREA)
  • Drying Of Semiconductors (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
JP2007317737A 2007-03-14 2007-12-07 多点電圧電流プローブを用いた計測システム及び監視方法 Expired - Fee Related JP5378678B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US89473807P 2007-03-14 2007-03-14
US60/894,738 2007-03-14
US11/763,298 2007-06-14
US11/763,298 US8055203B2 (en) 2007-03-14 2007-06-14 Multipoint voltage and current probe system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012253728A Division JP5635059B2 (ja) 2007-03-14 2012-11-19 高周波電力を監視する計測システム及び方法

Publications (2)

Publication Number Publication Date
JP2008226820A JP2008226820A (ja) 2008-09-25
JP5378678B2 true JP5378678B2 (ja) 2013-12-25

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JP2007317737A Expired - Fee Related JP5378678B2 (ja) 2007-03-14 2007-12-07 多点電圧電流プローブを用いた計測システム及び監視方法
JP2012253728A Expired - Fee Related JP5635059B2 (ja) 2007-03-14 2012-11-19 高周波電力を監視する計測システム及び方法

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JP2012253728A Expired - Fee Related JP5635059B2 (ja) 2007-03-14 2012-11-19 高周波電力を監視する計測システム及び方法

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Country Link
US (2) US8055203B2 (enExample)
EP (2) EP1995759B8 (enExample)
JP (2) JP5378678B2 (enExample)
CN (1) CN101267707B (enExample)
TW (1) TWI467941B (enExample)

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Also Published As

Publication number Publication date
EP3483917B1 (en) 2021-03-17
EP1995759A2 (en) 2008-11-26
JP2008226820A (ja) 2008-09-25
CN101267707A (zh) 2008-09-17
TW200838181A (en) 2008-09-16
EP1995759A3 (en) 2010-07-07
TWI467941B (zh) 2015-01-01
US20080227420A1 (en) 2008-09-18
US8190380B2 (en) 2012-05-29
JP5635059B2 (ja) 2014-12-03
EP3483917A1 (en) 2019-05-15
EP1995759B1 (en) 2018-12-12
EP1995759B8 (en) 2019-02-27
US20120013352A1 (en) 2012-01-19
JP2013084606A (ja) 2013-05-09
CN101267707B (zh) 2012-10-10
US8055203B2 (en) 2011-11-08

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