CN101267707B - 多点电压和电流探针系统 - Google Patents

多点电压和电流探针系统 Download PDF

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Publication number
CN101267707B
CN101267707B CN2007101638024A CN200710163802A CN101267707B CN 101267707 B CN101267707 B CN 101267707B CN 2007101638024 A CN2007101638024 A CN 2007101638024A CN 200710163802 A CN200710163802 A CN 200710163802A CN 101267707 B CN101267707 B CN 101267707B
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China
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signal
signals
power
frequency
output
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Expired - Fee Related
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CN2007101638024A
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English (en)
Chinese (zh)
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CN101267707A (zh
Inventor
雷·切尔瑞
托德·海克尔曼
戴维·J·库莫
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MKS Instruments Inc
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MKS Instruments Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04B—TRANSMISSION
    • H04B17/00—Monitoring; Testing
    • H04B17/30—Monitoring; Testing of propagation channels
    • H04B17/309—Measuring or estimating channel quality parameters
    • H04B17/318—Received signal strength

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Signal Processing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Quality & Reliability (AREA)
  • Plasma Technology (AREA)
  • Transmitters (AREA)
  • Drying Of Semiconductors (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
CN2007101638024A 2007-03-14 2007-09-30 多点电压和电流探针系统 Expired - Fee Related CN101267707B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US89473807P 2007-03-14 2007-03-14
US60/894,738 2007-03-14
US11/763,298 2007-06-14
US11/763,298 US8055203B2 (en) 2007-03-14 2007-06-14 Multipoint voltage and current probe system

Publications (2)

Publication Number Publication Date
CN101267707A CN101267707A (zh) 2008-09-17
CN101267707B true CN101267707B (zh) 2012-10-10

Family

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Family Applications (1)

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CN2007101638024A Expired - Fee Related CN101267707B (zh) 2007-03-14 2007-09-30 多点电压和电流探针系统

Country Status (5)

Country Link
US (2) US8055203B2 (enExample)
EP (2) EP1995759B8 (enExample)
JP (2) JP5378678B2 (enExample)
CN (1) CN101267707B (enExample)
TW (1) TWI467941B (enExample)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8055203B2 (en) * 2007-03-14 2011-11-08 Mks Instruments, Inc. Multipoint voltage and current probe system
US7970562B2 (en) 2008-05-07 2011-06-28 Advanced Energy Industries, Inc. System, method, and apparatus for monitoring power
GB0823565D0 (en) * 2008-12-24 2009-01-28 Oxford Instr Plasma Technology Signal generating system
US8040068B2 (en) * 2009-02-05 2011-10-18 Mks Instruments, Inc. Radio frequency power control system
CN102473631B (zh) * 2009-06-30 2014-11-26 朗姆研究公司 用于等离子体处理工具原位工艺监控和控制的方法和装置
US8314561B2 (en) 2010-04-02 2012-11-20 Mks Instruments, Inc. Multi-channel radio frequency generator
US8570103B2 (en) * 2011-06-16 2013-10-29 Donald C. D. Chang Flexible multi-channel amplifiers via wavefront muxing techniques
US8491759B2 (en) * 2010-10-20 2013-07-23 COMET Technologies USA, Inc. RF impedance matching network with secondary frequency and sub-harmonic variant
US9043525B2 (en) * 2012-12-14 2015-05-26 Lam Research Corporation Optimizing a rate of transfer of data between an RF generator and a host system within a plasma tool
US9041480B2 (en) * 2013-03-15 2015-05-26 Mks Instruments, Inc. Virtual RF sensor
US10821542B2 (en) 2013-03-15 2020-11-03 Mks Instruments, Inc. Pulse synchronization by monitoring power in another frequency band
DE102015212242A1 (de) * 2015-06-30 2017-01-05 TRUMPF Hüttinger GmbH + Co. KG Verfahren zum Abtasten eines mit einem Plasmaprozess in Beziehung stehenden Signalgemischs
JP7108623B2 (ja) * 2017-02-16 2022-07-28 アプライド マテリアルズ インコーポレイテッド 高温環境において高周波電力を測定するための電圧－電流プローブ、及び電圧－電流プローブを較正する方法
US10510575B2 (en) 2017-09-20 2019-12-17 Applied Materials, Inc. Substrate support with multiple embedded electrodes
KR102527384B1 (ko) 2018-03-09 2023-04-28 삼성전자주식회사 발광 소자 패키지 및 그 제조 방법
US10555412B2 (en) 2018-05-10 2020-02-04 Applied Materials, Inc. Method of controlling ion energy distribution using a pulse generator with a current-return output stage
US10304663B1 (en) * 2018-07-19 2019-05-28 Lam Research Corporation RF generator for generating a modulated frequency or an inter-modulated frequency
US11476145B2 (en) 2018-11-20 2022-10-18 Applied Materials, Inc. Automatic ESC bias compensation when using pulsed DC bias
JP7451540B2 (ja) 2019-01-22 2024-03-18 アプライド マテリアルズ インコーポレイテッド パルス状電圧波形を制御するためのフィードバックループ
US11508554B2 (en) 2019-01-24 2022-11-22 Applied Materials, Inc. High voltage filter assembly
KR102791775B1 (ko) 2019-05-07 2025-04-03 램 리써치 코포레이션 폐루프 다중 출력 rf 매칭
WO2021022303A1 (en) 2019-07-31 2021-02-04 Lam Research Corporation Radio frequency power generator having multiple output ports
EP3792955B1 (en) * 2019-09-10 2021-10-27 Comet AG Rf power generator with analogue and digital detectors
CN120280325A (zh) 2019-12-02 2025-07-08 朗姆研究公司 射频辅助等离子体生成中的阻抗变换
US11994542B2 (en) 2020-03-27 2024-05-28 Lam Research Corporation RF signal parameter measurement in an integrated circuit fabrication chamber
WO2021252353A1 (en) 2020-06-12 2021-12-16 Lam Research Corporation Control of plasma formation by rf coupling structures
US11462389B2 (en) 2020-07-31 2022-10-04 Applied Materials, Inc. Pulsed-voltage hardware assembly for use in a plasma processing system
US11798790B2 (en) 2020-11-16 2023-10-24 Applied Materials, Inc. Apparatus and methods for controlling ion energy distribution
US11901157B2 (en) 2020-11-16 2024-02-13 Applied Materials, Inc. Apparatus and methods for controlling ion energy distribution
US11495470B1 (en) 2021-04-16 2022-11-08 Applied Materials, Inc. Method of enhancing etching selectivity using a pulsed plasma
US11948780B2 (en) 2021-05-12 2024-04-02 Applied Materials, Inc. Automatic electrostatic chuck bias compensation during plasma processing
US11967483B2 (en) 2021-06-02 2024-04-23 Applied Materials, Inc. Plasma excitation with ion energy control
US20220399185A1 (en) 2021-06-09 2022-12-15 Applied Materials, Inc. Plasma chamber and chamber component cleaning methods
US12148595B2 (en) 2021-06-09 2024-11-19 Applied Materials, Inc. Plasma uniformity control in pulsed DC plasma chamber
US11810760B2 (en) 2021-06-16 2023-11-07 Applied Materials, Inc. Apparatus and method of ion current compensation
US11569066B2 (en) 2021-06-23 2023-01-31 Applied Materials, Inc. Pulsed voltage source for plasma processing applications
US11476090B1 (en) 2021-08-24 2022-10-18 Applied Materials, Inc. Voltage pulse time-domain multiplexing
US12106938B2 (en) 2021-09-14 2024-10-01 Applied Materials, Inc. Distortion current mitigation in a radio frequency plasma processing chamber
US11694876B2 (en) 2021-12-08 2023-07-04 Applied Materials, Inc. Apparatus and method for delivering a plurality of waveform signals during plasma processing
US11972924B2 (en) 2022-06-08 2024-04-30 Applied Materials, Inc. Pulsed voltage source for plasma processing applications
US12315732B2 (en) 2022-06-10 2025-05-27 Applied Materials, Inc. Method and apparatus for etching a semiconductor substrate in a plasma etch chamber
US12272524B2 (en) 2022-09-19 2025-04-08 Applied Materials, Inc. Wideband variable impedance load for high volume manufacturing qualification and on-site diagnostics
US12111341B2 (en) 2022-10-05 2024-10-08 Applied Materials, Inc. In-situ electric field detection method and apparatus
US20250285840A1 (en) * 2024-03-05 2025-09-11 Applied Materials, Inc. Rf power splitting and control

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1196936C (zh) * 2001-03-20 2005-04-13 Eni技术公司 探测分析系统
CN1647237A (zh) * 2002-07-10 2005-07-27 Eni技术公司 用于等离子体rf源的度量的多速率处理

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4951009A (en) 1989-08-11 1990-08-21 Applied Materials, Inc. Tuning method and control system for automatic matching network
US7421321B2 (en) 1995-06-07 2008-09-02 Automotive Technologies International, Inc. System for obtaining vehicular information
US5486832A (en) 1994-07-01 1996-01-23 Hughes Missile Systems Company RF sensor and radar for automotive speed and collision avoidance applications
US5576629A (en) 1994-10-24 1996-11-19 Fourth State Technology, Inc. Plasma monitoring and control method and system
US5940780A (en) * 1995-09-29 1999-08-17 Advanced Thermal Solutions, Inc. Universal transceiver
US5981961A (en) 1996-03-15 1999-11-09 Applied Materials, Inc. Apparatus and method for improved scanning efficiency in an ion implanter
US5770922A (en) 1996-07-22 1998-06-23 Eni Technologies, Inc. Baseband V-I probe
CN1072939C (zh) * 1997-04-18 2001-10-17 王春儒 治疗原发性肾小球疾病的药物
US6449568B1 (en) 1998-02-27 2002-09-10 Eni Technology, Inc. Voltage-current sensor with high matching directivity
US6222718B1 (en) 1998-11-12 2001-04-24 Lam Research Corporation Integrated power modules for plasma processing systems
US6720866B1 (en) * 1999-03-30 2004-04-13 Microchip Technology Incorporated Radio frequency identification tag device with sensor input
US6265831B1 (en) * 1999-03-31 2001-07-24 Lam Research Corporation Plasma processing method and apparatus with control of rf bias
US6447636B1 (en) * 2000-02-16 2002-09-10 Applied Materials, Inc. Plasma reactor with dynamic RF inductive and capacitive coupling control
US7960670B2 (en) 2005-05-03 2011-06-14 Kla-Tencor Corporation Methods of and apparatuses for measuring electrical parameters of a plasma process
US6677711B2 (en) * 2001-06-07 2004-01-13 Lam Research Corporation Plasma processor method and apparatus
US6608446B1 (en) 2002-02-25 2003-08-19 Eni Technology, Inc. Method and apparatus for radio frequency (RF) metrology
US6830650B2 (en) 2002-07-12 2004-12-14 Advanced Energy Industries, Inc. Wafer probe for measuring plasma and surface characteristics in plasma processing environments
JP3806734B2 (ja) * 2002-07-26 2006-08-09 独立行政法人農業・食品産業技術総合研究機構 プログラマブル計測汎用モジュール並びにそれらを用いた計測システム
US7084369B2 (en) 2002-08-20 2006-08-01 Tokyo Electron Limited Harmonic multiplexer
US20040049428A1 (en) * 2002-09-05 2004-03-11 Soehnlen John Pius Wireless environmental sensing in packaging applications
JP2004205328A (ja) 2002-12-25 2004-07-22 Daihen Corp 高周波電源装置
US6902646B2 (en) * 2003-08-14 2005-06-07 Advanced Energy Industries, Inc. Sensor array for measuring plasma characteristics in plasma processing environments
US7015414B2 (en) * 2003-09-30 2006-03-21 Tokyo Electron Limited Method and apparatus for determining plasma impedance
US20050080576A1 (en) 2003-10-10 2005-04-14 Dickerson Robert T. Method and system for frequency domain time correlation
US7460837B2 (en) * 2004-03-25 2008-12-02 Cisco Technology, Inc. User interface and time-shifted presentation of data in a system that monitors activity in a shared radio frequency band
US7292045B2 (en) 2004-09-04 2007-11-06 Applied Materials, Inc. Detection and suppression of electrical arcing
DE102004052518A1 (de) * 2004-10-29 2006-05-04 Robert Bosch Gmbh Vorrichtung und Verfahren zur winkelaufgelösten Entfernungs- und Geschwindigkeitsbetimmung eines Objekts
US20060128311A1 (en) * 2004-12-13 2006-06-15 Yohannes Tesfai Matching receive signal strenth data associated with radio emission sources for positioning applications
US7602127B2 (en) 2005-04-18 2009-10-13 Mks Instruments, Inc. Phase and frequency control of a radio frequency generator from an external source
US8102954B2 (en) 2005-04-26 2012-01-24 Mks Instruments, Inc. Frequency interference detection and correction
US7477711B2 (en) * 2005-05-19 2009-01-13 Mks Instruments, Inc. Synchronous undersampling for high-frequency voltage and current measurements
US9214909B2 (en) * 2005-07-29 2015-12-15 Mks Instruments, Inc. High reliability RF generator architecture
US7831406B2 (en) * 2006-04-13 2010-11-09 Radatec, Inc. Method of sensor multiplexing for rotating machinery
CN101188047A (zh) * 2006-11-17 2008-05-28 鸿富锦精密工业（深圳）有限公司 多通道差动信号监测电路
US8055203B2 (en) * 2007-03-14 2011-11-08 Mks Instruments, Inc. Multipoint voltage and current probe system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1196936C (zh) * 2001-03-20 2005-04-13 Eni技术公司 探测分析系统
CN1647237A (zh) * 2002-07-10 2005-07-27 Eni技术公司 用于等离子体rf源的度量的多速率处理

Also Published As

Publication number Publication date
EP3483917B1 (en) 2021-03-17
JP5378678B2 (ja) 2013-12-25
EP1995759A2 (en) 2008-11-26
JP2008226820A (ja) 2008-09-25
CN101267707A (zh) 2008-09-17
TW200838181A (en) 2008-09-16
EP1995759A3 (en) 2010-07-07
TWI467941B (zh) 2015-01-01
US20080227420A1 (en) 2008-09-18
US8190380B2 (en) 2012-05-29
JP5635059B2 (ja) 2014-12-03
EP3483917A1 (en) 2019-05-15
EP1995759B1 (en) 2018-12-12
EP1995759B8 (en) 2019-02-27
US20120013352A1 (en) 2012-01-19
JP2013084606A (ja) 2013-05-09
US8055203B2 (en) 2011-11-08

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