JP5373367B2 - 基板処理装置および基板処理方法 - Google Patents

基板処理装置および基板処理方法 Download PDF

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Publication number
JP5373367B2
JP5373367B2 JP2008279146A JP2008279146A JP5373367B2 JP 5373367 B2 JP5373367 B2 JP 5373367B2 JP 2008279146 A JP2008279146 A JP 2008279146A JP 2008279146 A JP2008279146 A JP 2008279146A JP 5373367 B2 JP5373367 B2 JP 5373367B2
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Prior art keywords
substrate
processing
liquid
supply nozzle
processing apparatus
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JP2010109118A (ja
JP2010109118A5 (enExample
Inventor
勉 菊池
治道 廣瀬
禎明 黒川
秀樹 森
正巳 竹田
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to JP2008279146A priority Critical patent/JP5373367B2/ja
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Publication of JP2010109118A5 publication Critical patent/JP2010109118A5/ja
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  • Cleaning By Liquid Or Steam (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP2008279146A 2008-10-30 2008-10-30 基板処理装置および基板処理方法 Active JP5373367B2 (ja)

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JP2008279146A JP5373367B2 (ja) 2008-10-30 2008-10-30 基板処理装置および基板処理方法

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JP2008279146A JP5373367B2 (ja) 2008-10-30 2008-10-30 基板処理装置および基板処理方法

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JP2010109118A JP2010109118A (ja) 2010-05-13
JP2010109118A5 JP2010109118A5 (enExample) 2011-12-15
JP5373367B2 true JP5373367B2 (ja) 2013-12-18

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JP2008279146A Active JP5373367B2 (ja) 2008-10-30 2008-10-30 基板処理装置および基板処理方法

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5775339B2 (ja) * 2011-03-22 2015-09-09 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156776U (enExample) * 1988-04-20 1989-10-27
JPH02309638A (ja) * 1989-05-24 1990-12-25 Fujitsu Ltd ウエハーエッチング装置
JPH11354617A (ja) * 1998-06-10 1999-12-24 Sumiere Sez Kk 基板処理装置および基板処理方法
TW399743U (en) * 1999-09-15 2000-07-21 Ind Tech Res Inst Wafer back protection device
JP3953265B2 (ja) * 1999-10-06 2007-08-08 株式会社荏原製作所 基板洗浄方法及びその装置
JP3778815B2 (ja) * 2001-06-21 2006-05-24 大日本スクリーン製造株式会社 基板洗浄装置
JP2007227764A (ja) * 2006-02-24 2007-09-06 Dainippon Screen Mfg Co Ltd 基板表面処理装置、基板表面処理方法および基板処理装置
JP2008218456A (ja) * 2007-02-28 2008-09-18 Mitsumi Electric Co Ltd 洗浄方法

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