JP5368608B2 - Dicing film with protective film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dicing film with a protection film which shortens a down time, and can stick a dicing film onto a semiconductor wafer without positional deviation. <P>SOLUTION: In the dicing film with the protection film in which a dicing film and a protection film are stacked, a difference between the transmissivity at a wavelength of 600-700 nm of the protection film and the transmissivity of the dicing film with the protection film in a portion through which light for film detection of the dicing film firstly transmits is 20% or more. <P>COPYRIGHT: (C)2013,JPO&amp;INPIT

Description

  The present invention relates to a dicing film with a protective film.

  Conventionally, a semiconductor wafer is made in advance in a large area, then diced (cut and separated) into chips, and transferred to an expanding process. The dicing film is used for fixing the semiconductor wafer during the dicing.

  The semiconductor wafer fixed to the dicing film is diced into chips, and is picked up after being uniformly expanded in the surface direction on the expanding ring in order to separate the chips.

  Conventionally, there has been proposed a dicing film that adheres and holds a semiconductor wafer in a dicing process and also provides an adhesive layer for chip fixation necessary for a mounting process (see, for example, Patent Document 1).

  The dicing film as described above is punched into a circular shape or the like according to the size of the semiconductor wafer, and is arranged on the long protective film at a predetermined interval, and from the protective film using a wafer mount device or the like. The dicing film is peeled off and attached to the semiconductor wafer. At this time, in the wafer mount device, when the light transmittance for film detection changed, that is, the light transmittance changed from the transmittance of only the protective film to the total transmittance of the protective film and the dicing film. In some cases, it is determined that a dicing film has been detected, and this position is used as a reference for the position of the dicing film, and the semiconductor wafer is attached to the dicing film so as not to cause positional displacement.

JP-A-60-57642

  However, conventionally, in the wafer mount apparatus, the dicing film on the protective film could not be detected, and the dicing film that could not be detected was not used because it was sent as it was, and there was a problem that downtime occurred during this time. It was. Moreover, there was a problem that due to the detection delay, the semiconductor wafer was attached in a state where the dicing film was misaligned.

  SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and its purpose is to reduce a downtime and to provide a dicing film with a protective film that allows the dicing film to be attached to a semiconductor wafer without causing a positional shift. It is to provide.

  The inventors of the present application have examined a dicing film with a protective film in order to solve the conventional problems. As a result, by adopting the following configuration, the inventors have found that the downtime can be shortened and that the dicing film can be attached to the semiconductor wafer without causing positional deviation, and the present invention has been completed. .

  That is, the dicing film with a protective film according to the present invention is a dicing film with a protective film in which a dicing film and a protective film are laminated, and the transmittance of the protective film at a wavelength of 600 to 700 nm and the film of the dicing film. The difference with the transmittance | permeability of the said dicing film with a protective film in the part which the light for a detection transmits first is 20% or more, It is characterized by the above-mentioned.

  According to the said structure, the difference of the transmittance | permeability of the said protective film in wavelength 600-700nm and the transmittance | permeability of the said dicing film with a protective film in the part which the light for film detection of the said dicing film transmits initially is 20%. Since it is above, the sensor which detects the light for film detection can detect reliably that it changed from the transmittance | permeability of only a protective film to the transmittance | permeability of the dicing film with a protective film containing a dicing film. As a result, it is possible to prevent the dicing film that could not be detected from being sent and used, and the downtime during this period can be reduced. In addition, it is possible to prevent the semiconductor wafer from being stuck in a state where the misalignment occurs in the dicing film due to the detection delay, and it becomes possible to attach the dicing film to the semiconductor wafer without causing misalignment. .

  The said structure WHEREIN: The said dicing film has a base material and the adhesive layer laminated | stacked on the said base material, and it is preferable that the said base material is embossed. When the substrate is embossed, the difference between the transmittance of only the protective film and the transmittance of the dicing film with the protective film including the dicing film can be more reliably set to 20% or more.

  The said structure WHEREIN: The said dicing film has a base material and the adhesive layer laminated | stacked on the said base material, It is preferable that the said base material is colored. When the said base material is colored, the difference of the transmittance | permeability of only a protective film and the transmittance | permeability of the dicing film with a protective film containing a dicing film can be more reliably made into 20% or more.

  The said structure WHEREIN: It is preferable that the transmittance | permeability of the said dicing film with a protective film in the part which the light for film detection of the said dicing film transmits initially is 0 to 70%. When the transmittance is 0 to 70%, the difference in transmittance is easily set to 20% or more.

  The said structure WHEREIN: It is preferable that the transmittance | permeability of the said protective film is 75 to 100%. When the transmittance is 75 to 100%, the difference in transmittance is easily set to 20% or more.

  The said structure WHEREIN: It is preferable that the die-bonding film is laminated | stacked on the said adhesive layer of the said dicing film. If the die bond film is laminated on the pressure-sensitive adhesive layer of the dicing film, the step of attaching the die bond film can be omitted, and the production efficiency can be improved.

(A) is a cross-sectional schematic diagram which shows the dicing film with a protective film which concerns on one Embodiment of this invention, (b) is the top view. It is a cross-sectional schematic diagram which shows a part of dicing film with a protective film shown to Fig.1 (a) and FIG.1 (b). It is a cross-sectional schematic diagram which shows the dicing film with a protective film which concerns on other embodiment. (A), (b) is a cross-sectional schematic diagram for demonstrating the manufacturing method of the semiconductor device which concerns on this embodiment. It is a cross-sectional schematic diagram which shows the example which mounted the semiconductor chip through the adhesive bond layer in the dicing film with a protective film shown in FIG.1 and FIG.2.

(Dicing film with protective film)
A dicing film with a protective film according to an embodiment of the present invention will be described below. Fig.1 (a) is a cross-sectional schematic diagram which shows the dicing film with a protective film which concerns on one Embodiment of this invention, FIG.1 (b) is the top view. FIG. 2 is a schematic cross-sectional view showing a part of the dicing film with a protective film shown in FIGS.

  As shown in FIGS. 1A and 1B, a dicing film 10 with a protective film has a configuration in which a dicing film 11 having a circular shape in plan view is laminated on a long protective film 14. The dicing film 11 is configured by laminating an adhesive layer 2 on a substrate 1, and the die bond film 3 having a diameter smaller than that of the dicing film 11 is laminated on the adhesive layer 2. The dicing film 11 is laminated on the protective film 14 so as to face the pressure-sensitive adhesive layer 2 and the die bond film 3. In the present invention, the die bond film may not be laminated.

  The dicing film 10 with the protective film is fed out in a certain direction (left direction in FIG. 1B) in the manufacturing process of the semiconductor device, and the light L for film detection is applied to the central portion 16 in the width direction of the protective film 14. Irradiated. At this time, the transmittance T1 of the protective film 14 at a wavelength of 600 to 700 nm (see FIG. 1A) and the dicing film 10 with the protective film in the portion 17 through which the light L of the dicing film 11 first transmits (in this embodiment, The difference between the transmittance T2 (see FIG. 1A) of the laminated portion of the protective film 14 and the dicing film 11 is 20% or more. The difference in transmittance is preferably 20% or more and 40% or less, and more preferably 30% or more and 40% or less. Since the difference in transmittance is 20% or more, the sensor for detecting light for film detection changes from the transmittance T1 of the protective film 14 only to the transmittance T2 of the laminated portion of the protective film 14 and the dicing film 11. Can be surely recognized. As a result, it is possible to prevent the dicing film that could not be detected from being sent and used, and the downtime during this period can be reduced. In addition, the dicing film can be attached to the semiconductor wafer without causing positional displacement.

  The transmittance T1 is preferably 75 to 100%, more preferably 80 to 100%, and still more preferably 85 to 100%. When the transmittance T1 is 75 to 100%, the difference in transmittance is easily set to 20% or more.

  The transmittance T2 is preferably 0 to 70%, more preferably 0 to 65%, and still more preferably 0 to 65%. When the transmittance T2 is 0 to 70%, the difference in transmittance is easily set to 20% or more.

  The substrate 1 is preferably one having ultraviolet transparency, and serves as a strength matrix of the dicing film 11. For example, polyolefins such as low density polyethylene, linear polyethylene, medium density polyethylene, high density polyethylene, ultra low density polyethylene, random copolymer polypropylene, block copolymer polypropylene, homopolyprolene, polybutene, polymethylpentene, ethylene-acetic acid Vinyl copolymer, ionomer resin, ethylene- (meth) acrylic acid copolymer, ethylene- (meth) acrylic acid ester (random, alternating) copolymer, ethylene-butene copolymer, ethylene-hexene copolymer, Polyester such as polyurethane, polyethylene terephthalate, polyethylene naphthalate, polycarbonate, polyimide, polyetheretherketone, polyimide, polyetherimide, polyamide, wholly aromatic polyamide, polyphenylsulfur De, aramid (paper), glass, glass cloth, fluorine resin, polyvinyl chloride, polyvinylidene chloride, cellulose resin, silicone resin, metal (foil), paper, and the like.

  Moreover, as a material of the base material 1, polymers, such as the crosslinked body of the said resin, are mentioned. The plastic film may be used unstretched or may be uniaxially or biaxially stretched as necessary. According to the resin sheet to which heat shrinkability is imparted by stretching or the like, the adhesive area between the pressure-sensitive adhesive layer 2 and the die bond film 3 is reduced by thermally shrinking the base material 1 after dicing, so that a semiconductor chip (semiconductor element) ) Can be easily collected.

  The substrate 1 is preferably colored. When the base material 1 is colored, the difference between the transmittance T1 of only the protective film 14 and the transmittance T2 of the laminated portion 11 of the protective film 14 and the dicing film can be more reliably set to 20% or more. When coloring the base material 1, a color material (coloring agent) can be used according to the target light transmittance. As such a color material, various dark color materials such as a black color material, a blue color material, and a red color material can be suitably used, and a black color material is particularly suitable. As the color material, any of a pigment, a dye and the like may be used. Color materials can be used alone or in combination of two or more. As the dye, any form of dyes such as acid dyes, reactive dyes, direct dyes, disperse dyes, and cationic dyes can be used. Also, the form of the pigment is not particularly limited, and can be appropriately selected from known pigments.

  In particular, when a dye is used as the coloring material, the dye is uniformly or almost uniformly dispersed in the base material 1 by dissolution, so that the base material 1 having a uniform color density can be easily manufactured.

  Although it does not restrict | limit especially as a black color material, For example, it can select suitably from an inorganic black pigment and a black dye. In addition, as a black color material, a color material mixture in which a cyan color material (blue-green color material), a magenta color material (red purple color material) and a yellow color material (yellow color material) are mixed. It may be. Black color materials can be used alone or in combination of two or more. Of course, the black color material can be used in combination with a color material other than black.

  Specifically, as the black color material, for example, carbon black (furnace black, channel black, acetylene black, thermal black, lamp black, etc.), graphite (graphite), copper oxide, manganese dioxide, azo pigment (azomethine) Azo black, etc.), aniline black, perylene black, titanium black, cyanine black, activated carbon, ferrite (nonmagnetic ferrite, magnetic ferrite, etc.), magnetite, chromium oxide, iron oxide, molybdenum disulfide, chromium complex, complex oxide black Examples thereof include dyes and anthraquinone organic black dyes.

  In the present invention, as the black color material, C.I. I. Solvent Black 3, 7, 22, 27, 29, 34, 43, 70, C.I. I. Direct Black 17, 19, 19, 22, 32, 38, 51, 71, C.I. I. Acid Black 1, 2, 24, 26, 31, 48, 52, 107, 109, 110, 119, 154C. I. Black dyes such as Disperse Black 1, 3, 10, and 24; I. Black pigments such as CI Pigment Black 1 and 7 can also be used.

  Examples of such a black color material include a product name “Oil Black BY”, a product name “OilBlack BS”, a product name “OilBlack HBB”, a product name “Oil Black 803”, a product name “Oil Black 860”, The product name “Oil Black 5970”, the product name “Oil Black 5906”, the product name “Oil Black 5905” (manufactured by Orient Chemical Co., Ltd.) and the like are commercially available.

  Examples of the color material other than the black color material include a cyan color material, a magenta color material, and a yellow color material. Examples of cyan color materials include C.I. I. Solvent Blue 25, 36, 60, 70, 93, 95; I. Cyan dyes such as Acid Blue 6 and 45; I. Pigment Blue 1, 2, 3, 15, 15: 1, 15: 2, 15: 3, 15: 3, 15: 4, 15: 5, 15: 6, 16, 16, 17 17: 1, 18, 22, 25, 56, 60, 63, 65, 66; I. Bat Blue 4; 60, C.I. I. And cyan pigments such as CI Pigment Green 7.

  In the magenta color material, examples of the magenta dye include C.I. I. Solvent Red 1, 3, 8, 23, 24, 25, 27, 30, 30, 49, 52, 58, 63, 81, 82, 83, 84, the same 100, 109, 111, 121, 122; I. Disper thread 9; I. Solvent Violet 8, 13, 13, 21, and 27; C.I. I. Disperse violet 1; C.I. I. Basic Red 1, 2, 9, 9, 12, 14, 15, 17, 17, 18, 22, 23, 24, 27, 29, 32, 34, the same 35, 36, 37, 38, 39, 40; I. Basic Violet 1, 3, 7, 10, 14, 15, 21, 21, 25, 26, 27, 28 and the like.

  In the magenta color material, examples of the magenta pigment include C.I. I. Pigment Red 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 11, 12, 13, 14, 15, 16, 17, 18, 19, 21, 21, 22, 23, 30, 31, 32, 37, 38, 39, 40, 41, 42, 48: 1, 48: 2, 48: 3, 48: 4, 49, 49: 1, 50, 51, 52, 52: 2, 53: 1, 54, 55, 56, 57: 1, 58, 60, 60: 1, 63, 63: 1, 63: 2, 64, 64: 1, 67, 68, 81, 83, etc. 87, 88, 89, 90, 92, 101, 104, 105, 106, 108, 112, 114, 122, 123, 139, 144, 146 147, 149, 150, 151, 163, 166, 168, 170, 171, 172, 175, 176, 177, 178, 179, 184, 185 187, 190, 193, 202, 206, 207, 209, 219, 222, 224, 238, 245; I. C.I. Pigment Violet 3, 9, 19, 23, 31, 32, 33, 36, 38, 43, 50; I. Bat red 1, 2, 10, 13, 15, 23, 29, 35 and the like.

  Examples of yellow color materials include C.I. I. Solvent Yellow 19, 44, 77, 79, 81, 82, 93, 98, 103, 104, 112, 162 and the like yellow dyes; C.I. I. Pigment Orange 31 and 43; C.I. I. Pigment Yellow 1, 2, 3, 4, 5, 6, 7, 10, 10, 12, 13, 14, 15, 15, 16, 17, 23, 24, 34, 35, 37, 42, 53, 55, 65, 73, 74, 75, 81, 83, 93, 94, 95, 97, 98, 100, 101, 104, 108, 109, 110, 113, 114, 116, 117, 120, 128, 129, 133, 138, 139 147, 150, 151, 153, 154, 155, 156, 167, 172, 173, 180, 185, 195; I. Examples thereof include yellow pigments such as Vat Yellow 1, 3 and 20.

  Various color materials such as a cyan color material, a magenta color material, and a yellow color material can be used alone or in combination of two or more. When two or more kinds of various color materials such as a cyan color material, a magenta color material, and a yellow color material are used, the mixing ratio (or blending ratio) of these color materials is not particularly limited, and each color material. It can be appropriately selected according to the type of light and the desired light transmittance.

  The surface of the substrate 1 is preferably subjected to an embossing process. When the substrate 1 is embossed, the difference between the transmittance T1 of the protective film 14 alone and the transmittance T2 of the laminated portion of the protective film 14 and the dicing film 11 is more reliably set to 20% or more. Can do. Examples of the embossing method include a method of attaching a film to an embossing roll, a method by sand mat processing, a method of chemical processing such as etching, and the like. As a standard of emboss processing, haze value is mentioned, for example. The haze value of the surface of the substrate 1 is preferably 10 to 100%, more preferably 20 to 100%, and still more preferably 30 to 100%. By setting the haze value of the surface of the substrate 1 to 10 to 100%, the difference between the transmittance T1 and the transmittance T2 can be surely set to 20% or more.

  In addition, the surface of the substrate 1 is subjected to conventional surface treatments such as chromic acid treatment, ozone exposure, flame exposure, high piezoelectric impact exposure, ionizing radiation treatment, etc., in order to improve adhesion and retention with adjacent layers. A chemical or physical treatment or a coating treatment with a primer (for example, an adhesive substance described later) can be applied. The base material 1 can be used by appropriately selecting the same kind or different kinds, and a blend of several kinds can be used as necessary.

  The thickness of the substrate 1 is not particularly limited and can be appropriately determined, but is generally about 5 to 200 μm.

  It does not restrict | limit especially as an adhesive used for formation of the adhesive layer 2, For example, common pressure sensitive adhesives, such as an acrylic adhesive and a rubber adhesive, can be used. The pressure-sensitive adhesive is an acrylic pressure-sensitive adhesive based on an acrylic polymer from the standpoint of cleanability with an organic solvent such as ultrapure water or alcohol for electronic components that are difficult to contaminate semiconductor wafers and glass. Is preferred.

  Examples of the acrylic polymer include (meth) acrylic acid alkyl esters (for example, methyl ester, ethyl ester, propyl ester, isopropyl ester, butyl ester, isobutyl ester, s-butyl ester, t-butyl ester, pentyl ester, Isopentyl ester, hexyl ester, heptyl ester, octyl ester, 2-ethylhexyl ester, isooctyl ester, nonyl ester, decyl ester, isodecyl ester, undecyl ester, dodecyl ester, tridecyl ester, tetradecyl ester, hexadecyl ester , Octadecyl esters, eicosyl esters, etc., alkyl groups having 1 to 30 carbon atoms, especially 4 to 18 carbon linear or branched alkyl esters, etc.) and Meth) acrylic acid cycloalkyl esters (e.g., cyclopentyl ester, acrylic polymers such as one or more was used as a monomer component of the cyclohexyl ester etc.). In addition, (meth) acrylic acid ester means acrylic acid ester and / or methacrylic acid ester, and (meth) of the present invention has the same meaning.

  The acrylic polymer contains units corresponding to other monomer components copolymerizable with the (meth) acrylic acid alkyl ester or cycloalkyl ester, if necessary, for the purpose of modifying cohesive force, heat resistance and the like. You may go out. Examples of such monomer components include, for example, carboxyl group-containing monomers such as acrylic acid, methacrylic acid, carboxyethyl (meth) acrylate, carboxypentyl (meth) acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid; maleic anhydride Acid anhydride monomers such as itaconic anhydride; 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate, 6-hydroxyhexyl (meth) acrylate Hydroxyl group-containing monomers such as 8-hydroxyoctyl (meth) acrylate, 10-hydroxydecyl (meth) acrylate, 12-hydroxylauryl (meth) acrylate, (4-hydroxymethylcyclohexyl) methyl (meth) acrylate; Styrene Contains sulfonic acid groups such as phonic acid, allylsulfonic acid, 2- (meth) acrylamide-2-methylpropanesulfonic acid, (meth) acrylamidepropanesulfonic acid, sulfopropyl (meth) acrylate, (meth) acryloyloxynaphthalenesulfonic acid Monomers; Phosphoric acid group-containing monomers such as 2-hydroxyethyl acryloyl phosphate; acrylamide, acrylonitrile and the like. One or more of these copolymerizable monomer components can be used. The amount of these copolymerizable monomers used is preferably 40% by weight or less based on the total monomer components.

  Furthermore, since the acrylic polymer is crosslinked, a polyfunctional monomer or the like can be included as a monomer component for copolymerization, if necessary. Examples of such polyfunctional monomers include hexanediol di (meth) acrylate, (poly) ethylene glycol di (meth) acrylate, (poly) propylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, Pentaerythritol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, dipentaerythritol hexa (meth) acrylate, epoxy (meth) acrylate, polyester (meth) acrylate, urethane (meth) An acrylate etc. are mentioned. These polyfunctional monomers can also be used alone or in combination of two or more. The amount of the polyfunctional monomer used is preferably 30% by weight or less of the total monomer components from the viewpoint of adhesive properties and the like.

  The acrylic polymer can be obtained by subjecting a single monomer or a mixture of two or more monomers to polymerization. The polymerization can be performed by any method such as solution polymerization, emulsion polymerization, bulk polymerization, suspension polymerization and the like. From the viewpoint of preventing contamination of a clean adherend, the content of the low molecular weight substance is preferably small. From this point, the number average molecular weight of the acrylic polymer is preferably 300,000 or more, more preferably about 400,000 to 3,000,000.

  In addition, an external cross-linking agent can be appropriately employed for the pressure-sensitive adhesive in order to increase the number average molecular weight of an acrylic polymer as a base polymer. Specific examples of the external crosslinking method include a method of adding a so-called crosslinking agent such as a polyisocyanate compound, an epoxy compound, an aziridine compound, a melamine crosslinking agent, and reacting them. When using an external cross-linking agent, the amount used is appropriately determined depending on the balance with the base polymer to be cross-linked and further depending on the intended use as an adhesive. Generally, it is preferable to add about 5 parts by weight or less, and further 0.1 to 5 parts by weight with respect to 100 parts by weight of the base polymer. Furthermore, you may use additives, such as conventionally well-known various tackifier and anti-aging agent, other than the said component as needed to an adhesive.

  The pressure-sensitive adhesive layer 2 can be formed of a radiation curable pressure-sensitive adhesive. The radiation curable pressure-sensitive adhesive can increase the degree of cross-linking by irradiation with radiation such as ultraviolet rays, and can easily reduce its adhesive strength, and a portion 2a corresponding to the work pasting portion of the pressure-sensitive adhesive layer 2 shown in FIG. The difference in adhesive strength with the other part 2b can be provided by irradiating only with radiation.

  Further, by curing the radiation curable pressure-sensitive adhesive layer 2 in accordance with the die bond film 3 shown in FIG. 2, the portion 2a having a significantly reduced adhesive force can be easily formed. Since the die bond film 3 is affixed to the portion 2a that has been cured and has reduced adhesive strength, the interface between the portion 2a of the pressure-sensitive adhesive layer 2 and the die bond film 3 has a property of being easily peeled off during pickup. On the other hand, the portion not irradiated with radiation has a sufficient adhesive force, and forms the portion 2b. A wafer ring can be fixed to the portion 2b.

  As the radiation-curable pressure-sensitive adhesive, those having a radiation-curable functional group such as a carbon-carbon double bond and exhibiting adhesiveness can be used without particular limitation. As the radiation curable pressure sensitive adhesive, for example, an addition type radiation curable pressure sensitive adhesive in which a radiation curable monomer component or an oligomer component is blended with a general pressure sensitive pressure sensitive adhesive such as an acrylic pressure sensitive adhesive or a rubber pressure sensitive adhesive. An agent can be illustrated.

  Examples of the radiation curable monomer component to be blended include urethane oligomer, urethane (meth) acrylate, trimethylolpropane tri (meth) acrylate, tetramethylolmethane tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, and pentaerythritol. Examples include stall tetra (meth) acrylate, dipentaerystol monohydroxypenta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 1,4-butanediol di (meth) acrylate, and the like. Examples of the radiation curable oligomer component include various oligomers such as urethane, polyether, polyester, polycarbonate, and polybutadiene, and those having a molecular weight in the range of about 100 to 30,000 are suitable. The compounding amount of the radiation-curable monomer component or oligomer component can be appropriately determined in accordance with the type of the pressure-sensitive adhesive layer, and the amount capable of reducing the adhesive strength of the pressure-sensitive adhesive layer. Generally, the amount is, for example, about 5 to 500 parts by weight, preferably about 40 to 150 parts by weight with respect to 100 parts by weight of the base polymer such as an acrylic polymer constituting the pressure-sensitive adhesive.

  In addition to the additive-type radiation curable adhesive described above, the radiation curable pressure-sensitive adhesive has a carbon-carbon double bond in the polymer side chain or main chain or at the main chain terminal as a base polymer. Intrinsic radiation curable pressure sensitive adhesives using Intrinsic radiation curable adhesives do not need to contain oligomer components, which are low molecular components, or do not contain many, so they are stable without the oligomer components moving through the adhesive over time. It is preferable because an adhesive layer having a layered structure can be formed.

  As the base polymer having a carbon-carbon double bond, those having a carbon-carbon double bond and having adhesiveness can be used without particular limitation. As such a base polymer, those having an acrylic polymer as a basic skeleton are preferable. Examples of the basic skeleton of the acrylic polymer include the acrylic polymers exemplified above.

  The method for introducing the carbon-carbon double bond into the acrylic polymer is not particularly limited, and various methods can be adopted. However, the carbon-carbon double bond can be easily introduced into the polymer side chain for easy molecular design. . For example, after a monomer having a functional group is previously copolymerized with an acrylic polymer, a compound having a functional group capable of reacting with the functional group and a carbon-carbon double bond is converted into a radiation curable carbon-carbon double bond. A method of performing condensation or addition reaction while maintaining the above.

  Examples of combinations of these functional groups include carboxylic acid groups and epoxy groups, carboxylic acid groups and aziridyl groups, hydroxyl groups and isocyanate groups, and the like. Among these combinations of functional groups, a combination of a hydroxyl group and an isocyanate group is preferable because of easy tracking of the reaction. Moreover, the functional group may be on either side of the acrylic polymer and the compound as long as the acrylic polymer having the carbon-carbon double bond is generated by a combination of these functional groups. In the preferable combination, it is preferable that the acrylic polymer has a hydroxyl group and the compound has an isocyanate group. In this case, examples of the isocyanate compound having a carbon-carbon double bond include methacryloyl isocyanate, 2-methacryloyloxyethyl isocyanate, m-isopropenyl-α, α-dimethylbenzyl isocyanate, and the like. Further, as the acrylic polymer, those obtained by copolymerizing the above-exemplified hydroxy group-containing monomers, ether compounds of 2-hydroxyethyl vinyl ether, 4-hydroxybutyl vinyl ether, diethylene glycol monovinyl ether, or the like are used.

  As the intrinsic radiation curable pressure-sensitive adhesive, the base polymer (particularly acrylic polymer) having the carbon-carbon double bond can be used alone, but the radiation curable monomer does not deteriorate the characteristics. Components and oligomer components can also be blended. The radiation-curable oligomer component or the like is usually in the range of 30 parts by weight, preferably in the range of 0 to 10 parts by weight with respect to 100 parts by weight of the base polymer.

  The radiation curable pressure-sensitive adhesive contains a photopolymerization initiator when cured by ultraviolet rays or the like. Examples of the photopolymerization initiator include 4- (2-hydroxyethoxy) phenyl (2-hydroxy-2-propyl) ketone, α-hydroxy-α, α′-dimethylacetophenone, 2-methyl-2-hydroxypropio Α-ketol compounds such as phenone and 1-hydroxycyclohexyl phenyl ketone; methoxyacetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, 2-methyl-1- [4- ( Acetophenone compounds such as methylthio) -phenyl] -2-morpholinopropane-1; benzoin ether compounds such as benzoin ethyl ether, benzoin isopropyl ether and anisoin methyl ether; ketal compounds such as benzyldimethyl ketal; 2-naphthalenesulfonyl Black Aromatic sulfonyl chloride compounds such as 1; photoactive oxime compounds such as 1-phenone-1,1-propanedione-2- (o-ethoxycarbonyl) oxime; benzophenone, benzoylbenzoic acid, 3,3′-dimethyl Benzophenone compounds such as -4-methoxybenzophenone; thioxanthone, 2-chlorothioxanthone, 2-methylthioxanthone, 2,4-dimethylthioxanthone, isopropylthioxanthone, 2,4-dichlorothioxanthone, 2 Thioxanthone compounds such as 1,4-diethylthioxanthone and 2,4-diisopropylthioxanthone; camphorquinone; halogenated ketone; acyl phosphinoxide; acyl phosphonate. The compounding quantity of a photoinitiator is about 0.05-20 weight part with respect to 100 weight part of base polymers, such as an acryl-type polymer which comprises an adhesive.

  Examples of radiation curable pressure-sensitive adhesives include photopolymerizable compounds such as addition polymerizable compounds having two or more unsaturated bonds and alkoxysilanes having an epoxy group disclosed in JP-A-60-196956. And a rubber-based pressure-sensitive adhesive and an acrylic pressure-sensitive adhesive containing a photopolymerization initiator such as a carbonyl compound, an organic sulfur compound, a peroxide, an amine, and an onium salt-based compound.

  In the pressure-sensitive adhesive layer 2, a color material can be added instead of adding a color material to the substrate 1 or in addition to adding a color material to the substrate 1. As the color material added to the pressure-sensitive adhesive layer 2, the same color material as that added to the substrate 1 described above can be used. Examples of the method of adding the color material include a method of dissolving or dispersing the color material in the pressure-sensitive adhesive composition solution.

  When the pressure-sensitive adhesive layer 2 is formed of a radiation curable pressure-sensitive adhesive, a part of the pressure-sensitive adhesive layer 2 so that the pressure-sensitive adhesive force of the part 2a in the pressure-sensitive adhesive layer 2 <the pressure-sensitive adhesive force of the other part 2b. May be irradiated.

  Examples of the method for forming the portion 2a on the pressure-sensitive adhesive layer 2 include a method in which after the radiation-curable pressure-sensitive adhesive layer 2 is formed on the support substrate 1, the portion 2a is partially irradiated with radiation to be cured. It is done. The partial radiation irradiation can be performed through a photomask having a pattern corresponding to a portion other than the portion 2a. Moreover, the method etc. of irradiating and hardening | curing an ultraviolet-ray spotly are mentioned. The radiation curable pressure-sensitive adhesive layer 2 can be formed by transferring what is provided on the separator onto the support substrate 1. Partial radiation curing can also be performed on the radiation curable pressure-sensitive adhesive layer 2 provided on the separator.

  In the case where the pressure-sensitive adhesive layer 2 is formed of a radiation curable pressure-sensitive adhesive, a material in which all or a part of at least one side of the support substrate 1 other than the part corresponding to the part 2a is shielded from light is used. Then, after the radiation-curable pressure-sensitive adhesive layer 2 is formed thereon, the portion 2a can be formed by irradiating with radiation to cure the portion 2a and reduce the adhesive force. As a light shielding material, what can become a photomask on a support film can be prepared by printing, vapor deposition, or the like. According to this manufacturing method, the dicing film 10 with a protective film can be manufactured efficiently.

  In the case where curing is inhibited by oxygen during irradiation, it is desirable to block oxygen (air) from the surface of the radiation curable pressure-sensitive adhesive layer 2 by some method. For example, a method of coating the surface of the pressure-sensitive adhesive layer 2 with a separator, a method of irradiating ultraviolet rays or the like in a nitrogen gas atmosphere, and the like can be mentioned.

  The thickness of the pressure-sensitive adhesive layer 2 is not particularly limited, but is preferably about 1 to 50 μm from the viewpoint of preventing chipping of the chip cut surface and compatibility of fixing and holding the adhesive layer. Preferably it is 2-30 micrometers, Furthermore, 5-25 micrometers is preferable.

  Examples of the laminated structure of the die bond film 3 include a single-layer adhesive layer as in this embodiment, and a multilayer structure in which an adhesive layer is formed on one or both sides of the core material. Examples of the core material include a film (for example, a polyimide film, a polyester film, a polyethylene terephthalate film, a polyethylene naphthalate film, and a polycarbonate film), a resin substrate reinforced with glass fibers or plastic non-woven fibers, a silicon substrate, a glass substrate, or the like. Is mentioned.

  Examples of the adhesive composition that constitutes the die bond film 3 include a combination of a thermoplastic resin and a thermosetting resin.

  Examples of the thermosetting resin include phenol resin, amino resin, unsaturated polyester resin, epoxy resin, polyurethane resin, silicone resin, and thermosetting polyimide resin. These resins can be used alone or in combination of two or more. In particular, an epoxy resin containing a small amount of ionic impurities or the like that corrode semiconductor elements is preferable. Moreover, as a hardening | curing agent of an epoxy resin, a phenol resin is preferable.

  The epoxy resin is not particularly limited as long as it is generally used as an adhesive composition, for example, bisphenol A type, bisphenol F type, bisphenol S type, brominated bisphenol A type, hydrogenated bisphenol A type, bisphenol AF type. Biphenyl type, naphthalene type, fluorene type, phenol novolac type, orthocresol novolak type, trishydroxyphenylmethane type, tetraphenylolethane type, etc., bifunctional epoxy resin or polyfunctional epoxy resin, or hydantoin type, trisglycidyl isocyanurate Type or glycidylamine type epoxy resin is used. These can be used alone or in combination of two or more. Of these epoxy resins, novolac type epoxy resins, biphenyl type epoxy resins, trishydroxyphenylmethane type resins or tetraphenylolethane type epoxy resins are particularly preferred. This is because these epoxy resins are rich in reactivity with a phenol resin as a curing agent and are excellent in heat resistance and the like.

  The phenol resin acts as a curing agent for the epoxy resin. For example, a novolac type phenol such as a phenol novolak resin, a phenol aralkyl resin, a cresol novolak resin, a tert-butylphenol novolak resin, a phenol biphenyl resin, or a nonylphenol novolak resin. Examples thereof include resins, resol type phenol resins, polyoxystyrenes such as polyparaoxystyrene. These can be used alone or in combination of two or more. Of these phenol resins, phenol novolac resins and phenol aralkyl resins are particularly preferred. This is because the connection reliability of the semiconductor device can be improved.

  The mixing ratio of the epoxy resin and the phenol resin is preferably such that, for example, the hydroxyl group in the phenol resin is 0.5 to 2.0 equivalents per 1 equivalent of the epoxy group in the epoxy resin component. . More preferred is 0.8 to 1.2 equivalents. That is, if the blending ratio of both is out of the above range, sufficient curing reaction does not proceed and the properties of the cured epoxy resin are likely to deteriorate.

  Examples of the thermoplastic resin include natural rubber, butyl rubber, isoprene rubber, chloroprene rubber, ethylene-vinyl acetate copolymer, ethylene-acrylic acid copolymer, ethylene-acrylic acid ester copolymer, polybutadiene resin, polycarbonate resin, heat Examples thereof include plastic polyimide resins, polyamide resins such as 6-nylon and 6,6-nylon, phenoxy resins, acrylic resins, saturated polyester resins such as PET and PBT, polyamideimide resins, and fluorine resins. These thermoplastic resins can be used alone or in combination of two or more. Of these thermoplastic resins, an acrylic resin that has few ionic impurities and high heat resistance and can ensure the reliability of the semiconductor element is particularly preferable.

  The acrylic resin is not particularly limited, and includes one or two or more esters of acrylic acid or methacrylic acid having a linear or branched alkyl group having 30 or less carbon atoms, particularly 4 to 18 carbon atoms. Examples thereof include a polymer (acrylic copolymer) as a component. Examples of the alkyl group include a methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, t-butyl group, isobutyl group, amyl group, isoamyl group, hexyl group, heptyl group, cyclohexyl group, 2- Examples include an ethylhexyl group, an octyl group, an isooctyl group, a nonyl group, an isononyl group, a decyl group, an isodecyl group, an undecyl group, a lauryl group, a tridecyl group, a tetradecyl group, a stearyl group, an octadecyl group, and a dodecyl group.

  Further, the other monomer forming the polymer is not particularly limited, and examples thereof include glycidyl group-containing monomers such as glycidyl acrylate and glycidyl methacrylate, acrylic acid, methacrylic acid, carboxyethyl acrylate, and carboxypentyl. Carboxyl group-containing monomers such as acrylate, itaconic acid, maleic acid, fumaric acid or crotonic acid, acid anhydride monomers such as maleic anhydride or itaconic anhydride, 2-hydroxyethyl (meth) acrylate, (meta ) 2-hydroxypropyl acrylate, 4-hydroxybutyl (meth) acrylate, 6-hydroxyhexyl (meth) acrylate, 8-hydroxyoctyl (meth) acrylate, 10-hydroxydecyl (meth) acrylate, (meth Acry Hydroxyl group-containing monomers such as acid 12-hydroxylauryl or (4-hydroxymethylcyclohexyl) -methyl acrylate, styrene sulfonic acid, allyl sulfonic acid, 2- (meth) acrylamide-2-methylpropane sulfonic acid, (meth) Sulfonic acid group-containing monomers such as acrylamide propanesulfonic acid, sulfopropyl (meth) acrylate or (meth) acryloyloxynaphthalene sulfonic acid, phosphoric acid group-containing monomers such as 2-hydroxyethyl acryloyl phosphate, styrene monomers, or Acrylonitrile is mentioned.

  Moreover, a filler can be suitably mix | blended with the die-bonding film 3 according to the use. The blending of the filler enables imparting conductivity, improving thermal conductivity, adjusting the elastic modulus, and the like. Examples of the filler include inorganic fillers and organic fillers, and inorganic fillers are preferable from the viewpoints of characteristics such as improvement in handleability, improvement in thermal conductivity, adjustment of melt viscosity, and imparting thixotropic properties. The inorganic filler is not particularly limited, and examples thereof include aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, calcium silicate, magnesium silicate, calcium oxide, magnesium oxide, aluminum oxide, aluminum nitride, and aluminum borate whisker. , Boron nitride, crystalline silica, amorphous silica and the like. These can be used alone or in combination of two or more. From the viewpoint of improving thermal conductivity, aluminum oxide, aluminum nitride, boron nitride, crystalline silica, and amorphous silica are preferable. Further, from the viewpoint that the above properties are well balanced, crystalline silica or amorphous silica is preferable. In addition, a conductive substance (conductive filler) may be used as the inorganic filler for the purpose of imparting conductivity and improving thermal conductivity. Examples of the conductive filler include metal powder in which silver, aluminum, gold, cylinder, nickel, conductive alloy and the like are made into a spherical shape, needle shape and flake shape, metal oxide such as alumina, amorphous carbon black, graphite and the like. The filler may have an average particle size of 0.1 to 80 μm. In addition, the average particle diameter of a filler is the value calculated | required, for example with the photometric type particle size distribution analyzer (The product made from HORIBA, apparatus name; LA-910).

  The filler content is preferably 5 parts by weight or more and 100 parts by weight or more and 500 parts by weight or less with respect to 100 parts by weight of the total of the thermosetting resin component, the thermoplastic resin component, and the filler. More preferably, it is 200 parts by weight or more and 400 parts by weight or less.

  In addition to the said filler, another additive can be suitably mix | blended with the die-bonding film 3 as needed. Examples of other additives include flame retardants, silane coupling agents, ion trapping agents, and the like. Examples of the flame retardant include antimony trioxide, antimony pentoxide, brominated epoxy resin, and the like. These can be used alone or in combination of two or more. Examples of the silane coupling agent include β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropylmethyldiethoxysilane, and the like. These compounds can be used alone or in combination of two or more. Examples of the ion trapping agent include hydrotalcites and bismuth hydroxide. These can be used alone or in combination of two or more.

  The thickness of the die bond film 3 (total thickness in the case of a laminate) is not particularly limited, but can be selected, for example, from a range of 1 to 200 μm, preferably 5 to 100 μm, more preferably 10 to 80 μm. .

  The protective film 14 has a function as a protective material for protecting the die bond film 3 until it is put into practical use. Further, the protective film 14 can be used as a support base material when the die bond film 3 is transferred to the pressure-sensitive adhesive layer 2. The protective film 14 is peeled off when a workpiece is stuck on the die bond film 3. Examples of the material for the protective film 14 include polyethylene terephthalate (PET), polyethylene, polypropylene, and plastic films and paper whose surface is coated with a release agent such as a fluorine-based release agent or a long-chain alkyl acrylate release agent. .

The dicing film 10 with a protective film according to the present embodiment is produced, for example, as follows.
First, the base material 1 can be formed by a conventionally known film forming method. Examples of the film forming method include a calendar film forming method, a casting method in an organic solvent, an inflation extrusion method in a closed system, a T-die extrusion method, a co-extrusion method, and a dry lamination method. When coloring the base material 1, the said coloring material is added.

  Next, after a pressure-sensitive adhesive composition solution is applied onto the substrate 1 to form a coating film, the coating film is dried under predetermined conditions (heat-crosslinked as necessary), and the pressure-sensitive adhesive layer 2 is formed. Form. It does not specifically limit as a coating method, For example, roll coating, screen coating, gravure coating, etc. are mentioned. As drying conditions, for example, the drying temperature is 80 to 150 ° C. and the drying time is 0.5 to 5 minutes. Moreover, after apply | coating an adhesive composition on a separator and forming a coating film, the coating film may be dried on the said drying conditions, and the adhesive layer 2 may be formed. When coloring the pressure-sensitive adhesive layer 2, the color material is added to the pressure-sensitive adhesive composition solution. Then, the adhesive layer 2 is bonded together with the separator on the base material 1. Thereby, the dicing film 11 is produced.

The die bond film 3 is produced as follows, for example.
First, an adhesive composition solution that is a material for forming the die bond film 3 is prepared. As described above, the adhesive composition solution contains the adhesive composition, filler, and other various additives.

  Next, the adhesive composition solution is applied onto the base separator so as to have a predetermined thickness to form a coating film, and then the coating film is dried under predetermined conditions to form an adhesive layer. It does not specifically limit as a coating method, For example, roll coating, screen coating, gravure coating, etc. are mentioned. As drying conditions, for example, the drying temperature is 70 to 160 ° C. and the drying time is 1 to 5 minutes. Moreover, after apply | coating an adhesive composition solution on a separator and forming a coating film, you may dry an application film on the said drying conditions, and may form an adhesive bond layer. Then, an adhesive bond layer is bonded together with a separator on a base material separator.

  Subsequently, the separator is peeled off from each of the dicing film 11 and the die bond film 3, and the die bond film 3 and the pressure-sensitive adhesive layer 2 are bonded to each other so as to be a bonding surface. Bonding can be performed by, for example, pressure bonding. At this time, the lamination temperature is not particularly limited, and is preferably 30 to 50 ° C., for example, and more preferably 35 to 45 ° C. Moreover, a linear pressure is not specifically limited, For example, 0.1-20 kgf / cm is preferable and 1-10 kgf / cm is more preferable. Next, the base material separator on the die bond film 3 is peeled off and bonded to the protective film 14 to obtain the dicing film 10 with a protective film according to the present embodiment. In this embodiment, the long thing is used for the protective film 14, and the several dicing film 11 (Dicing film 11 with which the die-bonding film 3 was bonded) is bonded to the protective film 14 at predetermined intervals.

FIG. 3 is a schematic cross-sectional view showing a dicing film with a protective film according to another embodiment.
A printed layer 15 may be provided on the base material 1 between the base material 1 and the pressure-sensitive adhesive layer 2 as in the dicing film 20 with a protective film shown in FIG. When the printing layer 15 is provided, the difference between the transmittance of only the protective film 14 and the transmittance of the dicing film 20 with the protective film including the dicing film 11 can be more reliably set to 20% or more.

  The printing layer 15 can be formed by a printing method such as a relief printing method, a lithographic printing method, an intaglio printing method, a stencil printing method, or the like. In this case, as the coloring material (coloring agent) used for the printing layer 15, the same materials as described above can be used.

(Method for manufacturing semiconductor device)
Below, the case where the dicing film 10 with a protective film is used is demonstrated to an example, referring FIG.4 (a), FIG.4 (b), and FIG. FIG. 4A and FIG. 4B are schematic cross-sectional views for describing the method for manufacturing a semiconductor device according to this embodiment. FIG. 5 is a schematic cross-sectional view showing an example in which a semiconductor chip is mounted via an adhesive layer in the dicing film with a protective film shown in FIGS. 1 and 2.

  As shown in FIG. 4 (a), the dicing film 10 with a protective film is drawn out in a certain direction (leftward in FIG. 4 (a)), and the protective film 14 has a film detecting portion at the center in the width direction. Of light L is irradiated. In FIG. 4A, the light L is transmitted only through the protective film 14, and the transmitted light L is detected by a sensor (not shown), and the transmittance is calculated. The transmittance at this time is the transmittance T1.

  Thereafter, when the dicing film 10 with the protective film is further drawn out, the light L passes through the laminated portion of the protective film 14 and the dicing film 11 as shown in FIG. The transmitted light L is detected by a sensor (not shown), and the transmittance is calculated. The transmittance at this time is the transmittance T2.

  The light for film detection has a wavelength of 600 nm to 700 nm, preferably a wavelength of 620 nm to 680 nm, and more preferably a wavelength of 640 nm to 660 nm.

  The sensor determines that the dicing film 11 on the protective film 14 has been detected when the transmittance changes by 20% or more, that is, when the transmittance changes from the transmittance T1 to the transmittance T2. Then, the wafer mount device recognizes the position of the dicing film 11 based on the detection result, peels the dicing film 11 from the protective film 14, and presses the semiconductor wafer 4 (affixing step). This step is performed while pressing with a pressing means such as a pressure roll. The attaching temperature at the time of mounting is not specifically limited, For example, it is preferable to exist in the range of 20-80 degreeC. In this embodiment, since the difference between the transmittance T1 and the transmittance T2 is 20% or more, the sensor changes from the transmittance T1 of the protective film 14 only to the transmittance T2 of the laminated portion of the protective film 14 and the dicing film 11. The change can be recognized with certainty. As a result, it is possible to prevent the dicing film that could not be detected from being sent and used, and the downtime during this period can be reduced. In addition, the dicing film can be attached to the semiconductor wafer without causing positional displacement.

  Next, dicing of the semiconductor wafer 4 is performed. Thereby, the semiconductor wafer 4 is cut into a predetermined size and separated into individual pieces to manufacture the semiconductor chip 5 (see FIG. 5). Dicing is performed according to a conventional method from the circuit surface side of the semiconductor wafer 4, for example. Further, in this step, for example, a cutting method called full cut for cutting up to the die bond film 3 can be adopted. It does not specifically limit as a dicing apparatus used at this process, A conventionally well-known thing can be used. Moreover, since the semiconductor wafer 4 is bonded and fixed by the dicing film 11 with the die-bonding film 3, chip breakage and chip jump can be suppressed, and damage to the semiconductor wafer 4 can be suppressed.

  The semiconductor chip 5 is picked up in order to peel off the semiconductor chip 5 adhered and fixed to the dicing film 11 with the die bond film 3. The pickup method is not particularly limited, and various conventionally known methods can be employed. For example, there is a method of pushing up each semiconductor chip 5 from the dicing film 11 side with a needle and picking up the pushed semiconductor chip 5 with a pickup device.

  Here, when the pressure-sensitive adhesive layer 2 is an ultraviolet curable type, the pickup is performed after the pressure-sensitive adhesive layer 2 is irradiated with ultraviolet rays. Thereby, the adhesive force with respect to the die-bonding film 3 of the adhesive layer 2 falls, and peeling of the semiconductor chip 5 becomes easy. As a result, the pickup can be performed without damaging the semiconductor chip 5. Conditions such as irradiation intensity and irradiation time at the time of ultraviolet irradiation are not particularly limited, and may be set as necessary. Moreover, the above-mentioned thing can be used as a light source used for ultraviolet irradiation.

  The picked-up semiconductor chip 5 is bonded and fixed to the adherend 6 via the die bond film 3 (die bond). Examples of the adherend 6 include a lead frame, a TAB film, a substrate, and a separately manufactured semiconductor chip. The adherend 6 may be, for example, a deformable adherend that can be easily deformed or a non-deformable adherend (such as a semiconductor wafer) that is difficult to deform.

  A conventionally well-known thing can be used as said board | substrate. As the lead frame, a metal lead frame such as a Cu lead frame or a 42 Alloy lead frame, or an organic substrate made of glass epoxy, BT (bismaleimide-triazine), polyimide, or the like can be used. However, the present invention is not limited to this, and includes a circuit board that can be used by mounting a semiconductor element and electrically connecting the semiconductor element.

  When the die-bonding film 3 is a thermosetting type, the semiconductor chip 5 is bonded and fixed to the adherend 6 by heat curing to improve the heat resistance strength. The heating temperature can be 80 to 200 ° C, preferably 100 to 175 ° C, more preferably 100 to 140 ° C. The heating time can be 0.1 to 24 hours, preferably 0.1 to 3 hours, more preferably 0.2 to 1 hour. In addition, what the semiconductor chip 5 adhere | attached and fixed to the board | substrate etc. via the die-bonding film 3 can use for a reflow process.

  The shear bond strength of the die-bonding film 3 after thermosetting is preferably 0.2 MPa or more with respect to the adherend 6, more preferably 0.2 to 10 MPa. When the shear bond strength of the die bond film 3 is at least 0.2 MPa or more, the die bond film 3 and the semiconductor chip 5 or the adherend 6 are bonded by ultrasonic vibration or heating in the wire bonding process. Less shear deformation occurs on the adhesive surface. That is, the semiconductor element is less likely to move due to ultrasonic vibration during wire bonding, thereby preventing the success rate of wire bonding from decreasing.

  In addition, the manufacturing method of the semiconductor device which concerns on this embodiment performs wire bonding, without passing through the thermosetting process by the heat processing of the die-bonding film 3, Furthermore, the semiconductor chip 5 is sealed with sealing resin, The said sealing The resin may be after-cured. In this case, the shear adhesive force at the time of temporary fixing of the die bond film 3 is preferably 0.2 MPa or more, more preferably 0.2 to 10 MPa with respect to the adherend 6. When the shear bonding force at the time of temporarily fixing the die bond film 3 is at least 0.2 MPa or more, even if the wire bonding step is performed without passing through the heating step, the die bond film is caused by ultrasonic vibration or heating in the step. 3 and the semiconductor chip 5 or the adherend 6 are less likely to cause shear deformation. That is, the semiconductor element is less likely to move due to ultrasonic vibration during wire bonding, thereby preventing the success rate of wire bonding from decreasing.

  The wire bonding is a step of electrically connecting the tip of the terminal portion (inner lead) of the adherend 6 and an electrode pad (not shown) on the semiconductor chip 5 with a bonding wire 7. As the bonding wire 7, for example, a gold wire, an aluminum wire, a copper wire or the like is used. The temperature at the time of wire bonding is 80 to 250 ° C, preferably 80 to 220 ° C. The heating time is several seconds to several minutes. The connection is performed by a combination of vibration energy by ultrasonic waves and crimping energy by applying pressure while being heated so as to be within the temperature range. This step may be performed without thermosetting the die bond film 3.

  The sealing step is a step of sealing the semiconductor chip 5 with the sealing resin 8. This step is performed to protect the semiconductor chip 5 and the bonding wire 7 mounted on the adherend 6. This step is performed by molding a sealing resin with a mold. As the sealing resin 8, for example, an epoxy resin is used. Although the heating temperature at the time of resin sealing is normally performed at 175 degreeC for 60 to 90 second, this invention is not limited to this, For example, it can cure at 165 to 185 degreeC for several minutes. Thereby, the sealing resin is cured, and the semiconductor chip 5 and the adherend 6 are fixed through the die bond film 3. That is, in the present invention, even when the post-curing step described later is not performed, the die bonding film 3 can be fixed in this step, and the number of manufacturing steps can be reduced and the semiconductor device manufacturing period can be reduced. It can contribute to shortening.

  In the post-curing step, the sealing resin 8 that is insufficiently cured in the sealing step is completely cured. Even if the die bond film 3 is not completely thermoset in the sealing step, the die bond film 3 can be completely thermoset together with the sealing resin 8 in this step. Although the heating temperature in this process changes with kinds of sealing resin, it exists in the range of 165-185 degreeC, for example, and heating time is about 0.5 to 8 hours.

  In the above embodiment, the case where the diameter of the die bond film is smaller than the diameter of the dicing film has been described. However, the present invention is not limited to this example, and the diameter of the die bond film is the same as or larger than that of the dicing film. Also good. In this case, the part of the dicing film through which the light for film detection is first transmitted is that the dicing film and the die bond film are laminated. That is, in this case, the transmittance of the dicing film with the protective film in the portion where the light for film detection of the dicing film first transmits corresponds to the transmittance of the laminate of the protective film, the dicing film, and the die bond film. At this time, it is preferable that the transmittance | permeability in the wavelength of 600-700 nm of a die-bonding film is 50-80%. The difference in transmittance between the die bond film and the dicing film is preferably 10% or more. Moreover, it is preferable that the difference of the transmittance | permeability of a die-bonding film and a protective film is 10% or more.

  In the embodiment described above, the entire dicing film 11 is colored, the printing layer 15 is provided on the entire dicing film 11, or the entire surface of the substrate 1 of the dicing film 11 is embossed, Thus, the case where the difference between the transmittance T1 and the transmittance T2 is 20% or more has been described. However, the present invention is not limited to this example, and the difference in transmittance is the transmittance of the protective film and the transmittance of the dicing film with the protective film in the portion where the light for film detection of the dicing film is first transmitted. For example, a portion where the difference in transmittance with respect to the transmittance of the protective film is 20% or more is a portion where light for film detection of the dicing film is first transmitted (for example, FIG. 1 portion 17) may be only a predetermined distance (for example, 100 μm to 5000 μm) along the film conveyance direction. In the case of such a configuration, for example, a portion where the difference in transmittance is 20% or more may be colored.

  Hereinafter, preferred embodiments of the present invention will be described in detail by way of example. However, the materials, blending amounts, and the like described in this example are not intended to limit the gist of the present invention only to those unless otherwise limited. In the following, “parts” means parts by weight.

(Preparation of adhesive layer for dicing film)
70 parts of butyl acrylate, 30 parts of ethyl acrylate and 5 parts of acrylic acid were copolymerized in a conventional manner in ethyl acetate to obtain an acrylic polymer having a weight average molecular weight of 800,000. Next, 100 parts of this acrylic polymer, 8 parts of a polyfunctional epoxy compound (manufactured by Mitsubishi Gas Chemical Co., Ltd., product name “TETRAD-C”) as a crosslinking agent, and 1-hydroxycyclohexylphenyl as a photopolymerization initiator 7 parts of ketone was blended and uniformly dissolved in toluene as an organic solvent to obtain an acrylic pressure-sensitive adhesive composition solution having a concentration of 30% by weight. This acrylic pressure-sensitive adhesive composition solution was applied on the substrate surfaces of Examples and Comparative Examples shown in Tables 1 and 2 so as to have a thickness of 10 μm, and dried at 120 ° C. for 3 minutes. Thereafter, only a portion to which the semiconductor wafer was attached was irradiated with ultraviolet rays at 500 mJ / cm ² through a mask to obtain a dicing film in which the portion to which the semiconductor wafer was attached was ultraviolet-cured. The base material (PP (polypropylene)) according to Example 1 is a product name “FVHK-LB # 40 N100” manufactured by Futamura Chemical Co., Ltd. The base material (PP (polypropylene)) according to Example 2 is a product name “FBS-LB # 40 S-400X” manufactured by Futamura Chemical Co., Ltd. The base material (PO (polyolefin)) according to Example 3 is a product name “TPX” manufactured by Mitsui Chemicals, Inc. The base material (PVC (polyvinyl chloride)) according to Example 4 is a product name “SPV-M4001” manufactured by Nitto Denko Corporation. The base material (PVC (polyvinyl chloride)) according to Example 5 is a product name “SPV-320” manufactured by Nitto Denko Corporation. The base material (PET (polyethylene terephthalate)) according to Comparative Example 1 is a product name “MRA-38” manufactured by Mitsubishi Plastics Corporation. The base material (PET (polyethylene terephthalate)) according to Comparative Example 2 is a product name “MRF-50” manufactured by Mitsubishi Plastics Corporation.

(Production of die bond film)
The following (a) to (d) were dissolved in methyl ethyl ketone to obtain an adhesive composition solution having a concentration of 23.6% by weight.
(A) Epoxy resin (JER Co., Ltd., Epicoat 1001) 32 parts by weight (b) Phenol resin (Mitsui Chemicals Co., Ltd., Millex XLC-4L) 34 parts by weight (c) Mainly ethyl acrylate-methyl methacrylate 100 parts by weight of acrylic acid ester polymer (Nagase Chemtex Co., Ltd., SG-708-6) as component, 110 parts by weight of spherical silica (manufactured by Admatechs Co., Ltd., SO-25R)

  This adhesive composition solution was applied onto a release treatment film (release liner) made of a polyethylene terephthalate film having a thickness of 100 μm after the silicone release treatment, and then dried at 120 ° C. for 3 minutes. Thus, a die bond film having a thickness of 10 μm was produced.

(Production of dicing film with protective film)
The produced dicing films of each Example and each Comparative Example were punched into a circle so as to have a diameter of 370 mm. Next, the produced die bond film was punched out in a circular shape so as to have a diameter of 320 mm, and transferred to each dicing film. The transfer was performed so that the pressure-sensitive adhesive layer of the dicing film and the die bond film face each other. Then, the protective film of the 35-micrometer-thick polyethylene terephthalate film which carried out the silicone release process was bonded to the die-bonding film side, and the dicing film with a protective film of a present Example and this comparative example was obtained.

(Measurement of transmittance)
For the measurement of transmittance, a spectrophotometer (product name “V-670”) manufactured by JASCO Corporation was used, the measurement mode was set to% T (transmittance measurement), and the measurement wavelength region was set to 190 to 800 nm. The transmittance at a wavelength of 650 nm at that time was taken as a measured value. As a result, the transmittance of the protective film at a wavelength of 650 nm was 88.8%. Moreover, the transmittance | permeability (%) in wavelength 650nm of a dicing film and the transmittance | permeability (%) of the lamination | stacking part of a protective film and a dicing film were as showing in Table 1, Table 2. FIG. Tables 1 and 2 also show the difference between the transmittance of the laminated portion of the protective film and the dicing film and the transmittance of the protective film.

(Sensor recognition)
A sensor recognizability test was performed using a sensor for detecting a dicing film on the protective film and a wafer mount device for peeling the detected dicing film from the protective film and attaching a semiconductor wafer. The case where the sensor recognized the dicing film and was able to mount the wafer was marked with ◯, and the case where the dicing film was not recognized and the wafer could not be mounted was marked with x. The results are shown in Tables 1 and 2.

<Sensor conditions>
Sensor: Keyence Corporation, LV-11SB
Sensor head: Linear light retroreflective type (Model: LV-S62)
Detection distance 50mm

<Bonding conditions>
Wafer mount device: Nitto Seiki Co., Ltd .: MA-3000III
Bonding speed: 10 mm / second Feeding speed: 10 mm / second

(Haze value)
About the base material of Example 3, the haze value was measured. Specifically, the haze value was measured with a haze meter (“NDH2000”, manufactured by Nippon Denshoku Industries Co., Ltd.).
Haze (%) = Td / Tt x 100
Td: Diffuse transmittance
Tt: Total light transmittance results are shown in Table 1.

(result)
As can be seen from the results in Tables 1 and 2, the dicing film can be recognized by the sensor when the difference between the transmittance of the laminated portion of the protective film and the dicing film and the transmittance of the protective film is 20% or more. It was.

DESCRIPTION OF SYMBOLS 1 Base material 2 Adhesive layer 3 Die bond film 4 Semiconductor wafer 5 Semiconductor chip 6 Adhering body 7 Bonding wire 8 Sealing resin 10, 20 Dicing film with a protective film 11 Dicing film 14 Protective film 15 Print layer

Claims (4)

A dicing film with a protective film in which a dicing film having a pressure-sensitive adhesive layer and a protective film are laminated,
The difference between the transmittance of the protective film at a wavelength of 600 to 700 nm and the transmittance of the dicing film with the protective film in the portion where the light for film detection of the dicing film is initially transmitted is 20% or more,
The transmittance of the dicing film with the protective film in the portion where the light for film detection of the dicing film first transmits is 0 to 70%,
A dicing film with a protective film, wherein the protective film has a transmittance of 75 to 100%. The dicing film has a base material and the pressure-sensitive adhesive layer laminated on the base material,
The dicing film with a protective film according to claim 1, wherein the substrate is embossed.   The dicing film with a protective film according to claim 1, wherein the dicing film has a base material and the pressure-sensitive adhesive layer laminated on the base material, and the base material is colored. the film. The dicing film with a protective film according to claim 1, wherein a die bond film is laminated on the pressure-sensitive adhesive layer of the dicing film.

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