JP5364877B2 - Stacked probe - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laminated probe for correctly inspecting electrodes of a liquid crystal panel having a plurality of the electrodes at a nano pitch interval. <P>SOLUTION: A plurality of the probes formed by a thin plate are laminated. The probe is held by a holder. In the probe, a contact section of the thin plate is configured so as to be protruded from a film stretched between the holders. Even if a pitch between the probes is small, a risk that a leakage is generated by a contact between the contact sections of the probe is eliminated. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a stacked probe that can accurately inspect even electrodes such as a liquid crystal panel in which a large number of electrodes are formed at an extremely small pitch interval.

  As electronics and devices have advanced, refinement between electronic circuit electrodes has progressed, and there is a strong demand for measures in the measurement department.

  Therefore, the present applicant forms the probe with an ultrathin plate, forms a concave notch in the ultrathin plate behind the needle portion, and the needle portion can move elastically in the front-rear direction. Has been developed and a patent has already been obtained (see Patent Document 1).

  This stacked probe is very highly evaluated in this industry because it can cope with ultra-fine highly integrated circuits having a pitch interval of 0.06 mm.

  However, recently, in order to create a fine image in an electrode such as a liquid crystal panel, a large number of electrodes, that is, a fine pitch of 100 to 800 pins at 40 μm, are formed with a very small pitch interval. It has become. For this reason, the conventional laminated probe cannot be used as a probe for an electrode such as a liquid crystal panel.

  That is, the conventional stacked probe has a limit of 15 to 30 pins with a pitch interval of 50 μm, but the electrodes of the liquid crystal panel and the like must be inspected with a pitch interval of 30 to 40 μm and 100 to 800 pins. I was not able to respond to this request.

    Japanese Patent No. 2819452

  The present invention has been made in view of the above points, and provides a stacked probe capable of accurately inspecting electrodes such as a liquid crystal panel in which a large number of electrodes are formed with a very small pitch interval. The purpose is to do.

The configuration of the present invention that meets the above-described object is a probe in which a plurality of probes formed of thin plates are stacked and sandwiched between holders, wherein the contact portions of the thin plates protrude from a film stretched between the holders , The thin plate abutting portion of the holder is formed with a concave portion that absorbs the bulge of the thin plate generated by stacking a large number of sheets .

  In short, in the present invention, if a thin plate is formed with a small pitch interval, adjacent contact portions (needles) may come into contact with each other to cause a leak phenomenon. In contrast, there was a limit, but by configuring the contact part to protrude from the film stretched between the holders, the contact with the contact part was eliminated even if the pitch interval was reduced with a thin plate. It is a summary.

  Both ends of the film are preferably fixed to the holder by positioning pins. Adjacent probes are stacked via an insulator layer, and the pitch interval between the tip contact portions is preferably 30 to 60 [mu], particularly preferably 25 to 40 [mu]. The number of laminated thin plates is also preferably 100 to 800 in order to correspond to 100 to 800 pins.

  The thickness of the thin plate is preferably 15 μ to 30 μ (Claim 4).

  It is preferable that a hole in which the contact portion protrudes is formed in the film with a laser.

  It is preferable that the bottom surface on the contact part side of the holder forms an inclination that rises outward (Claim 7).

  As described above, according to the present invention, an electrode such as a liquid crystal panel having a very small pitch interval and a large number of electrodes, which did not have an accurate inspection method in the past, has not been conventionally used for this kind of inspection. Since it is possible to perform accurate inspection for the first time with an inexpensive stacked probe, it greatly contributes to the contribution of technology in this field.

It is the (A) top view of the film used for this invention, (B) A part enlarged view. It is the (A) front view of the lamination type probe of the present invention, and (B) the A section enlarged view. It is a front view which shows an example of the probe which consists of a thin plate of this invention. It is a bottom view of the laminated type probe of this invention. It is a front view of the holder used for this invention. It is the (A) top view of the other film used for this invention, (B) A part enlarged view. It is the (A) top view and (B) perspective view of the holder used for this invention.

  Next, embodiments of the present invention will be described with reference to the drawings.

  A number of thin probes 2 shown in FIG. 3 are sandwiched and laminated between holders (unit bodies) 1 and 1 ′ shown in FIG. The holder (unit body) 1, 1 ′ and the probe 2 are formed with two bolt fastening holes 3 and two positioning lock holes 15, and after positioning by inserting a lock pin into the positioning lock hole 15. A plurality of probes 2 are clamped and fixed by inserting bolts into the bolt fastening holes 3. The probe 2 is actually clamped by a large number, preferably 100 to 800, but in the figure, only a small number is clamped.

  FIG. 1 shows a film 6 in which a hole 4 from which a thin contact portion 5 protrudes is formed by a laser, and positioning knock pin holes 7 and 7 (7) fixed to the holder 1 (1 ′) are provided in the film. ', 7') and a screw hole 8 (8 ') for fixing the film to the holder by a screw. The hole 4 from which the contact portion formed on the film protrudes is preferably formed with a laser because it can be formed with high accuracy.

  In this embodiment, the thickness of the thin plate is 0.02 mm (20 μ), the pitch interval is 0.04 mm (40 μ), and the polyimide film is 0.07 mm (70 μ). Although a large number of thin plates 2 are laminated via an insulating film (0.04 mm), no insulating film exists in the contact portion 5.

  As shown in FIG. 2, in order to fix the film 6 to a laminated probe in which a large number of thin probes 2 are sandwiched between holders 1 and 1 ', the holder 1 is passed through knock pins 7 and 7 on one of the films. The contact portions 5 of a plurality of probes are protruded from the holes 4 formed in the film, the film is fixed to the knock pin holes 7 and 7 of the other holder 1 ′ through the knock pins 9, and the screw 10 What is necessary is just to fix the film 6 to 8 '.

  As shown in FIG. 2, the bottom surfaces 12, 12 on the needle part side of the holders 1, 1 ′ are formed with an inclination that rises outward. By doing in this way, it can avoid that the knock pin 9 and the screw | thread 10 touch a to-be-measured electrode, and become the obstruction of a test | inspection.

  As shown in FIG. 7, recesses 11 and 11 are formed in the thin plate contact portions of the holders 1 and 1 ′ shown in FIG. This is because, when a large number of thin plates are laminated, a slight bulge is generated, so that the bulge is released.

  A polyimide film is laminated on the probe 2 as an insulator film. For high frequency measurement, it is preferable to laminate an insulating film of fluororesin (Teflon (registered trademark)). When the dimension which does not exist in a film is required, you may vapor-deposit the resin agent by the vapor deposition method to the thickness required for an insulating film instead of a film.

  FIG. 3 is an overall view showing an embodiment of the probe 2, and a notch (recessed portion) 13 is formed behind the contact portion 5 so that the contact portion 5 can elastically move up and down in FIG. 3. doing.

  The ultra-thin plate forming the probe 2 of the present invention is preferably formed from copper, copper alloy, tungsten, or a hardened steel plate. If it forms from such a material, it can form in an ultra-thin board of 0.02 mm easily.

  As shown in FIG. 3, the probe 2 has two bolt fastening holes 3 and two positioning lock holes 15 formed therein. Lamination bolts are inserted into the tightening holes 3, one end of the bolts is locked to a frame body that accommodates the laminated probes, and the other end of the insulation-coated bolts are nuts to the frame body. A plurality of stacked probes can be obtained by screwing and fixing with. In FIG. 3, reference numeral 14 denotes a terminal portion for attaching a lead wire.

  FIG. 6 shows another embodiment of the present invention. Among the electrode arrangements of various devices, the electrodes are randomly arranged, the pitch is not uniform, and the pitch between different electrodes is different. An example that can be solved by selectively combining the thickness of the probe metal plate and the size of the contact portion is shown. In that case, the hole 4 of the guide film 6 can also be solved by forming it in the same manner as the probe.

  According to the present invention, an electrode such as a liquid crystal panel having a very small pitch interval and a large number of electrodes, which does not have an accurate inspection method in the past, is conventionally used as an inexpensive stacked probe that has not been used for this type of inspection. Since it is possible for the first time to perform accurate inspection, it contributes greatly to the technical field such as liquid crystal panels.

1, 1 '... Holder (Unit body)
2 .... Probe (thin plate)
3 ········· Bolt tightening hole 4 ······················ 5 ... Film 7, 7, 7 ', 7' ... Knock pin hole 9 ... Knock pin 11 ... Recess
12 ..... Holder bottom

Claims (6)

In a probe in which a plurality of probes formed of thin plates are stacked and sandwiched between holders, the needle portion of the thin plate is configured to protrude from a film stretched between the holders, and the thin plate contact portion of the holder Is a laminated probe characterized in that a recess is formed to absorb the swelling of a thin plate produced by laminating a large number of sheets . The laminated probe according to claim 1, wherein both ends of the film are fixed to a holder by positioning pins. The stacked probe according to claim 1 or 2, wherein the adjacent probes are stacked via an insulator layer, and a pitch interval between the tip contact portions is 30 to 60 µm. The laminated probe according to claim 1, wherein the thin plate has a thickness of 15 μm to 30 μm. The laminated probe according to any one of claims 1 to 4, wherein a hole from which the contact portion protrudes is formed in the film by a laser.
The stacked probe according to any one of claims 1 to 5 , wherein a bottom surface on the contact portion side of the holder is formed to be inclined upward.

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