JP5364029B2 - Nozzle device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a nozzle device which efficiently, smoothly feeds granular dry ice and jets it. <P>SOLUTION: The nozzle device 3 includes: a carrier gas-feeding pipe 70; and a dry ice-feeding pipe 82 which is connected to feed the granular dry ice. In addition, the carrier gas-feeding pipe 70 includes: an introduction part 71; a throat part which is connected to the introduction part 71 on its downstream side in a first flowing direction and has an aperture cross section which is smaller than the aperture cross section of the introduction part 71; and a jetting part 73 which is connected to the throat part on its downstream side in the first flowing direction and has an aperture cross section which is larger than the aperture cross section of the throat part. The jetting part 73 is provided with: first two walls 75 which are arranged at an interval opposite to each other; and second two walls which connect both the end parts of the first walls 75 in a horizontal direction. In this case, the length in the opposite direction between the first walls 75 is constant, and the dry ice-feeding pipe 82 is connected to the first walls 75 of the jetting part 73. <P>COPYRIGHT: (C)2012,JPO&amp;INPIT

Description

  The present invention relates to a nozzle device, and more particularly to a nozzle device for injecting granular dry ice.

  2. Description of the Related Art Conventionally, an apparatus for cleaning or blasting a surface of an object by spraying powdered dry ice is known.

  For example, in a blast gun that is formed in a substantially circular cross section, gas is supplied inside, and a venturi (throat) is formed at the upstream end of the gas flow direction, dry ice pellets are placed downstream of the venturi flow direction. A blast gun in which a pair of ports for introduction is connected to a peripheral wall has been proposed (see, for example, Patent Document 1).

  In the blast gun described in Patent Document 1, gas is supplied from the upstream edge of the blast gun in the flow direction, accelerated in the venturi to become high-speed gas, and from the downstream edge of the blast gun in the flow direction. Be injected. The dry ice pellets are introduced into the blast gun from the port inlet, accelerated by high-speed gas, and injected from the injection unit together with the gas.

US Pat. No. 6,174,225

  However, since the blast gun described in Patent Document 1 is formed in a circular shape of the opening cross section, the opening cross sectional area of the inlet of each port is limited corresponding to the inner diameter of the blast gun. That is, if the opening cross-sectional area of the blast gun is relatively small, the opening cross-sectional area of the port inlet is also relatively small. Therefore, there is a problem in that dry ice pellets having various sizes cannot be smoothly supplied from the port inlet to the blast gun.

  An object of the present invention is to provide a nozzle device that can efficiently and smoothly supply and spray powdery dry ice.

  In order to achieve the above object, the invention described in claim 1 includes a carrier gas supply pipe for supplying a carrier gas, and a dry ice supply pipe connected to the carrier gas supply pipe for supplying granular dry ice. The carrier gas supply pipe is connected to the introduction part into which the carrier gas is introduced, and to the downstream side in the first flow direction that is the flow direction of the carrier gas in the introduction part, A throttle part having an opening cross-sectional area smaller than the opening cross-sectional area of the introduction part, and an injection part connected to the downstream side in the first flow direction of the throttle part and having an opening cross-sectional area larger than the opening cross-sectional area of the throttle part The injection unit includes two first walls opposed to each other at an interval, and a front direction in a direction orthogonal to both the opposite direction of the first wall and the first flow direction. Two second walls that connect both ends of the first wall, a length in a facing direction between the first walls is constant, and the dry ice supply pipe is connected to the first wall of the injection unit. It is characterized by being connected.

  According to such a configuration, in the carrier gas supply pipe, the carrier gas is introduced into the introduction unit, accelerated in the throttle unit, and then passes through the injection unit at a high speed.

  Also, dry ice is sucked from the dry ice supply pipe by the passage of the carrier gas in the injection section, and the dry ice is injected at high speed by the carrier gas.

  Therefore, dry ice can be efficiently supplied and injected in the dry ice supply pipe.

  Moreover, in this structure, the opposing direction length between the 2nd walls in an injection part can be lengthened, maintaining the opposing direction length between the 1st walls of an injection part constant. Therefore, even if the opening cross-sectional area of the blast gun having a circular opening cross-section described in Patent Document 1 is the same as the opening cross-sectional area, the length in the facing direction between the second walls of the injection unit can be increased. By connecting the dry ice supply pipe to the first wall, the opening cross-sectional area of the supply port of the dry ice supply pipe can be increased. As a result, powdery dry ice having various sizes can be smoothly supplied from the supply port of the dry ice supply pipe to the injection unit.

  Further, in this configuration, in the first flow direction, only the length in the orthogonal direction of the first wall, that is, only the length in the facing direction between the second walls is changed while the length in the facing direction between the first walls is constant. By making it, an injection | pouring part can be comprised.

  Therefore, the injection part can be formed easily and at low cost.

  According to a second aspect of the present invention, in the first aspect of the present invention, the injection portion includes a first enlarged portion whose opening cross-sectional area increases from the throttle portion toward the downstream side in the first flow direction. A first injection section having a second injection section having an opening cross-sectional area that increases from the downstream edge of the first injection section toward the downstream side in the first flow direction; It is preferable that the dry ice supply pipe is connected to the upstream end portion in the first flow direction or the vicinity thereof in the second enlarged portion.

  According to this configuration, the carrier gas is accelerated in the throttle portion, then the carrier gas is further accelerated in the first injection portion, and thereafter, at the upstream end portion in the first flow direction of the second expansion portion or in the vicinity thereof, It can be accelerated by putting dry ice on high-speed carrier gas.

  That is, since the dry ice supply pipe is connected to the upstream end portion in the first flow direction of the second enlarged portion or the vicinity thereof, a sufficient distance is secured over the downstream end portion in the first flow direction of the second injection portion. can do. Therefore, it is possible to sufficiently accelerate dry ice on a high-speed carrier gas.

  According to a third aspect of the present invention, in the second aspect of the present invention, it is preferable that the throttle portion and the first injection portion are formed from a Laval nozzle.

  In this configuration, the carrier gas can be accelerated to the sonic speed by the throttle, and then the carrier gas can be accelerated to the supersonic speed by the first injection unit.

  Therefore, in the 2nd injection part, dry ice can be accelerated by supersonic carrier gas, and can be then injected at high speed from the injection mouth of the 2nd injection part.

  According to a fourth aspect of the present invention, in the third aspect of the present invention, it is preferable that the dimension of the second injection portion satisfies the following formula.

10W ≦ L ≦ 80
W: length in the facing direction between the second walls at the first flow direction upstream end edge of the second injection unit L: length of the first injection direction of the second injection unit In this configuration, the second injection The dry ice can be reliably injected at high speed from the injection port of the injection unit while sufficiently and reliably accelerating the dry ice with the supersonic carrier gas.

  The invention according to claim 5 is the invention according to any one of claims 2 to 4, wherein the second injection portion has a length in a facing direction between the second walls that is downstream in the first flow direction. An upstream injection portion that gradually increases at a first increase rate toward the side, and is connected to the downstream side in the first flow direction of the upstream injection portion, and a length in a facing direction between the second walls is It is substantially the same in the first flow direction, or the length in the facing direction between the second walls is smaller than the first increase rate from the upstream injection portion toward the downstream side in the first flow direction. It is preferable to include a downstream injection unit that gradually increases at an increase rate of 2.

  According to this configuration, the dry ice supply pipe can be connected to the first wall of the upstream injection section with a wider opening cross-sectional area. Therefore, dry ice can be supplied more smoothly from the supply port of the dry ice supply pipe to the upstream injection unit.

  Further, in the downstream injection section, dry ice can be put on a high-speed carrier gas and sufficiently accelerated to be efficiently injected.

  The invention according to claim 6 is the invention according to any one of claims 1 to 5, wherein the first straight line connecting the center of gravity of the opening cross section of the injection portion along the first flow direction, and the dry A second straight line that connects the center of gravity of the opening cross section of the ice supply pipe along a second flow direction that is the flow direction of the dry ice intersects, and the first straight line and the second straight line intersect the first straight line. It is preferable that an angle formed by a line segment going upstream in one flow direction and a line segment going upstream from the intersection in the second flow direction is an acute angle.

  According to this configuration, dry ice can be smoothly supplied from the dry ice supply pipe to the injection unit.

  Therefore, it is possible to achieve efficient injection of dry ice in the injection unit.

  Moreover, the invention according to claim 7 is the invention according to any one of claims 1 to 6, wherein the carrier gas connection pipe connected to the upstream side in the first flow direction of the injection unit, and the dry ice supply At least one of the dry ice connection pipe connected to the upstream side of the second flow direction that is the flow direction of the dry ice of the pipe, the carrier gas connection pipe and the dry ice connection pipe is slidable in the longitudinal direction thereof It is preferable to include a grip portion provided.

  According to this configuration, the gripper is slid in the longitudinal direction of at least one of the carrier gas connection pipe and / or the dry ice connection pipe so as to correspond to the distance between the operator and the injection target. And the length between the downstream end edge in the first flow direction of the injection unit can be freely changed. Therefore, the workability of injection can be improved.

  Moreover, even if the grip part is slid, the first flow direction length of the injection part can be kept constant.

  Therefore, efficient dry ice injection can be maintained while improving the workability of dry ice injection.

  The invention according to claim 8 is the invention according to any one of claims 1 to 7, further comprising a heating means at or near the connecting portion of the dry ice supply pipe in the injection portion. Is preferred.

  If the carrier gas is excessively cooled by the supply of dry ice, the speed is reduced due to shrinkage, and the dry ice may not be accelerated sufficiently.

  However, according to this configuration, since the carrier gas that passes through or near the connection portion of the dry ice supply pipe in the injection section can be heated by the heating means, the dry ice is injected while preventing the carrier gas from shrinking. It can accelerate efficiently from the part.

  Moreover, clogging due to dry ice may occur in the dry ice supply pipe.

  However, in this nozzle device, the clogging due to the dry ice described above can be eliminated by the heating means, and the dry ice can be injected more efficiently from the injection unit.

  According to invention of Claim 1, the granular dry ice which has various sizes can be efficiently and smoothly supplied to the injection part from the supply port of a dry ice supply pipe. Moreover, the injection part can be formed easily and at low cost.

  Moreover, according to the invention of Claim 2, dry ice can be injected from a 2nd expansion part at high speed.

  According to the third aspect of the present invention, the dry ice can be accelerated by the supersonic carrier gas in the second injection unit, and then injected from the injection port of the second injection unit at a high speed.

  Moreover, according to the invention of Claim 4, dry ice can be reliably injected at high speed from the injection port of an injection part.

  Further, according to the invention described in claim 5, dry ice can be supplied more smoothly from the supply port of the dry ice supply pipe to the upstream injection unit, and the downstream injection unit can efficiently inject the dry ice. Can do.

  In addition, according to the invention described in claim 6, it is possible to achieve efficient injection of dry ice in the injection unit.

  According to the invention of claim 7, efficient dry ice injection can be maintained while improving the workability of dry ice injection.

  In addition, according to the eighth aspect of the invention, the clogging caused by dry ice can be eliminated by the heating means, and the dry ice can be ejected more efficiently from the ejection section.

FIG. 1 shows a schematic view of an embodiment of the dry ice supply apparatus of the present invention. 2 is a front view of the supply unit of the dry ice supply apparatus shown in FIG. 1, in which (a) shows a state in which a guide cover unit is attached, and (b) shows that the guide cover unit is removed. Indicates the state. FIG. 3 shows a side cross-sectional view of one embodiment of the nozzle device of the present invention. FIG. 4 is a plan sectional view of the dry ice supply pipe of the nozzle device shown in FIG. FIG. 5 shows a partially enlarged plan sectional view of the throat part, the first injection part and the connection part of the dry ice supply pipe shown in FIG. 6 shows a cross-sectional view of the nozzle device shown in FIGS. 3 and 4 along the line AA. FIG. 7 is an enlarged plan view of the injection unit, in which (a) is an embodiment (a mode in which the second increase rate of the downstream injection unit is smaller than the first increase rate of the upstream injection unit), (b) Are the other embodiments (a mode in which the length in the opposite direction between the second walls of the downstream injection section is substantially the same in the first flow direction), and (c) is the other embodiment (the first of the downstream injection sections). 2 is a mode in which the rate of increase is the same as the first rate of increase of the upstream injection section.

  FIG. 1 is a schematic view of an embodiment of a dry ice supply device of the present invention, FIG. 2 is a front view of a supply unit of the dry ice supply device shown in FIG. 1, and FIG. 3 is an embodiment of a nozzle device of the present invention. 4 is a cross-sectional side view of the dry ice supply pipe of the nozzle device shown in FIG. 3, and FIG. 5 is a view of the throat part, the first injection part, and the connection part of the dry ice supply pipe shown in FIG. FIG. 6 is a partially enlarged plan sectional view, FIG. 6 is a sectional view taken along line AA of the nozzle device shown in FIGS. 3 and 4, and FIG. 7 is an enlarged plan sectional view of the injection unit.

  In FIG. 1, the right side of the page is “front side”, the left side of the page is “rear side”, the front side of the page is “left side”, the back side of the page is “right side”, the upper side of the page is “upper side”, and the lower side of the page is “lower side”. The direction of FIG. 2 conforms to the direction of FIG. 1 described above. In FIG. 3, the left side of the page is “front side”, the right side of the page is “rear side”, the front side of the page is “right side”, the back side of the page is “left side”, the upper side of the page is “upper side”, and the lower side of the page is “lower side”. The direction of FIGS. 4 to 7 conforms to the direction of FIG. 3 described above.

  1 and 3, this dry ice injection system 1 includes a dry ice supply device 2 and a nozzle device 3 connected to the dry ice supply device 2 via a dry ice line (not shown). .

  As shown in FIG. 1, the dry ice supply device 2 includes a hopper 10 as a storage unit, a supply unit 15 connected to the lower side of the hopper 10, and a support unit 4 that supports them.

  The hopper 10 is provided to accommodate powdered dry ice. Specifically, the hopper 10 is provided on the upper side of the dry ice supply device 2, has a substantially rectangular tube shape, and the opening cross-sectional area gradually decreases downward. It is formed in a tapered shape that becomes smaller. Specifically, the hopper 10 integrally includes a front wall 11, a rear wall 12 that is disposed behind the front wall 11 at an interval, and a lateral wall (not shown) that connects both the left and right ends. Is prepared.

  The front wall 11 is formed in a flat plate shape along the vertical direction. The front wall 11 is provided with a transmission plate 13 that protrudes forward and extends along the left-right direction. On the upper surface of the transmission plate 13, a lower end of a vibrator 14 as a vibration applying unit is in contact.

  The upper end of the vibrator 14 is fixed to the support portion 4 and is provided so as to vibrate in the vertical direction.

  The rear wall 12 is formed in an inclined shape that gradually approaches the front wall 11 downward.

  The supply part 15 is provided in order to supply the dry ice accommodated in the hopper 10, and is equipped with the biaxial screw feeder 20 and the grinding | pulverization part 30 connected to the lower side.

  The biaxial screw feeder 20 is provided on the lower side of the hopper 10, and specifically, as shown in FIGS. 1 and 2, the first motor 21 and the first screw 22 and the second screw connected to the first motor 21 are provided. A screw 23 and a screw casing 24 that houses the first screw 22 and the second screw 23 are provided.

  The first motor 21 is provided so that the first screw 22 and the second screw 23 can be rotationally driven.

  The first screw 22 and the second screw 23 are adjacently arranged so as to extend in the front-rear direction and to be parallel to the left-right direction. Further, the first screw 22 and the second screw 23 are arranged so as to mesh with each other. Specifically, when they rotate together in front view, the first screw 22 and the second screw 23 are moved forward while crushing dry ice in the biaxial screw feeder 20. Are provided so as to be quantitatively extrudable.

  The screw casing 24 is formed in a substantially cylindrical shape extending in the front-rear direction, and is formed so as to expose the front end portions of the first screw 22 and the second screw 23. Further, a receiving opening 28 is formed at the upper end of the screw casing 24 in the front-rear direction on the slightly rear side, and the lower end of the hopper 10 is inserted into the receiving opening 28.

  In addition, a dry gas blowing unit 16 is connected to the supply unit 15. Specifically, the dry gas blower 16 is provided to blow dry gas into the screw casing 24. Specifically, the dry gas blower 16 has an upper end at the rear end of the screw casing 24. The air outlet is connected. The drying gas is not particularly limited, and examples thereof include dry air, for example, an inert gas such as nitrogen.

  The crushing unit 30 is provided for crushing dry ice supplied from the biaxial screw feeder 20, and is connected to the lower side of the biaxial screw feeder 20.

  The crushing unit 30 includes a crushing tank 35, a second motor 45, and a blade unit 40 connected to the second motor 45.

  The crushing tank 35 is formed in a substantially circular shape when viewed from the front centering on a rotation shaft 41 described later.

  The 2nd motor 45 is supporting the blade | wing part 40 rotatably. Specifically, the second motor 45 supports the blade portion 40 so as to be able to rotate counterclockwise in a front view.

  The blade portion 40 is provided in the crushing tank 35 and includes a rotation shaft 41 and a first blade 42, a second blade 43, and a third blade 44 as blades extending radially from the rotation shaft 41.

  The rotating shaft 41 extends in the front-rear direction and is disposed at the center of the crushing tank 35.

  The 1st blade | wing 42, the 2nd blade | wing 43, and the 3rd blade | wing 44 are extended toward the radial direction outward from the rotating shaft 41, and are arrange | positioned sequentially toward the back from the front. The tip portions of the first blade 42, the second blade 43, and the third blade 44 are arranged at equal intervals in the circumferential direction.

  The biaxial screw feeder 20 and the crushing unit 30 are provided with a guide cover unit 50.

  The guide cover part 50 is detachably provided to the screw casing 24 and the crushing tank 35. When the guide cover part 50 is attached to the screw casing 24 and the crushing tank 35, the guide cover part 50 is disposed on the front side thereof, and FIG. As shown in FIG. 4, the screw casing 24 and the crushing tank 35 are disposed so as to face the front side of the screw casing 24 and the crushing tank 35 so as to cover the front side portions thereof.

  Specifically, the guide cover portion 50 is integrally provided with a first front wall 51, a second front wall 52, an upper wall 54, a lateral wall 55, and a third front wall 53.

  The 1st front wall 51 is arrange | positioned along the up-down direction and the left-right direction, and is formed in the substantially rectangular flat plate shape. The first front wall 51 is disposed in front of the first screw 22 and the second screw 23 with a gap therebetween.

  The second front wall 52 is continuous from the lower end of the first front wall 51 and is arranged so as to incline downward and obliquely rearward. The upper portion becomes narrower in width (length in the left-right direction) as it goes downward. It is formed in a taper shape, and the lower part is formed in a substantially rectangular shape having the same width in the vertical direction.

  The upper portion of the second front wall 52 is disposed below the front end edges of the first screw 22 and the second screw 23. The lower part of the second front wall 52 is disposed opposite to the front side of the upper part of the blade part 40.

  The upper wall 54 is continuous rearward from the upper end of the first front wall 51, and is disposed above the front end edges of the first screw 22 and the second screw 23 with a space therebetween, and is formed in a substantially rectangular shape in plan view. Has been.

  The lateral wall 55 continues rearward from both ends in the width direction (left-right direction) of the first front wall 51, the second front wall 52, and the upper wall 54, and the front end edges of the first screw 22 and the second screw 23 and the screw casing 24. Are arranged on both sides in the width direction of the front end portion with a space therebetween.

  The third front wall 53 is continuous from the lower end portion of the second front wall 52 and the rear end portion of the lateral wall 55, extends downward and to both sides in the width direction, and is disposed opposite to the front side around the grinding tank 35. Yes. Further, the center of the third front wall 53 is disposed opposite to the lower portion of the blade portion 40.

  The guide cover unit 50 can be removed from the crushing unit 30 when the dry ice supply device 2 is cleaned. Thereby, the biaxial screw feeder 20 and the crushing part 30 can be easily cleaned from the front side.

  The discharge pipe 56 is connected to the crushing tank 35 and is connected along the tangential direction of the crushing tank 35. Specifically, the discharge pipe 56 is formed in a substantially cylindrical shape extending in the vertical direction, and is formed so as to extend downward from the left end portion (leftmost end portion) of the peripheral wall of the crushing tank 35. That is, the left end portion of the discharge pipe 56 is formed to be a tangent line extending downward from the left end portion of the peripheral wall of the crushing tank 35 in a front view.

  A dry ice line (not shown) is connected to the lower end of the discharge pipe 56.

  The support unit 4 supports the hopper 10 through the vibration isolation member 17 and supports the supply unit 15. The vibration isolation member 17 prevents the vibration of the hopper 10 due to the vibration of the vibrator 14 from being transmitted to the support portion 4.

  In the dry ice supply device 2, dry ice accommodated in the hopper 10 falls into the screw casing 24 through the receiving opening 28. In the dry ice supply device 2, the vertical vibration of the vibrator 14 is transmitted to the hopper 10 via the transmission plate 13, thereby preventing dry ice bridging in the hopper 10.

  Further, since the dry gas blown from the dry gas blowing unit 16 and passed through the supply unit 15 is also blown into the hopper 10 communicating with the twin screw feeder 20, the above-described dry ice bridge is more reliably established. Can be prevented.

  Moreover, such dry ice is a concept including dry ice pellets and powdery dry ice, and the average particle diameter thereof is, for example, 0.1 to 10 mm, preferably 1 to 5 mm.

  Next, in the screw casing 24, the dry ice is quantitatively pushed forward (cut out) while being crushed by the rotational drive of the first screw 22 and the second screw 23 based on the driving force of the first motor 21. Further, the dry gas blown to the screw casing 24 prevents the adhesion of dry ice in the screw casing 24 and the generation of a load due to the dry ice.

  The dry ice that has reached the front end portions of the first screw 22 and the second screw 23 is guided to the crushing tank 35 while sliding down diagonally downward along the second front wall 52.

  Next, in the crushing tank 35, the dry ice is crushed to a predetermined size by the rotational driving of the blade part 40 based on the driving force of the second motor 45, and subsequently discharged from the crushing part 30 to the discharge pipe 56. At this time, the dry gas that passes through the biaxial screw feeder 20 and is blown to the pulverizing unit 30 that communicates with the biaxial screw feeder 20 prevents the dry ice from adhering to the blade unit 40 and the resulting load.

  Thereafter, the dry ice is supplied to the nozzle device 3 via a dry ice line (not shown).

  In addition, the average particle diameter of the dry ice after grinding | pulverization is 0.01-1.0 mm, for example, Preferably, it is 0.5-1.0 mm.

  3 and 4, the nozzle device 3 includes a carrier gas supply unit 60 and a dry ice supply unit 80.

  The carrier gas supply unit 60 includes a carrier gas connection pipe 61 and a carrier gas supply pipe 70 connected to the downstream side of the carrier gas flow direction (hereinafter referred to as a first flow direction).

  The carrier gas connection pipe 61 is provided to supply the carrier gas to the carrier gas supply pipe 70, and is formed in a substantially cylindrical shape with a substantially L shape in a side sectional view, and specifically, from the rear to the front. The front end portion is formed so as to bend upward.

  The upstream end of the carrier gas connection pipe 61 in the first flow direction, that is, the rear end is connected to a compressor (not shown) via a carrier gas line (not shown). The compressor is configured to be able to supply carrier gas to the carrier gas connection pipe 61.

  The downstream end of the carrier gas connection pipe 61 in the first flow direction, that is, the upper end is connected to the carrier gas supply pipe 70.

  A carrier gas on-off valve (not shown) is provided at the upstream end of the carrier gas connection pipe 61 in the first flow direction. A carrier gas on-off valve (not shown) is electrically or pneumatically connected to a switch (not shown) provided in the nozzle device 3.

  The carrier gas supply pipe 70 is provided to supply a carrier gas, and includes an introduction part 71, a reduction part 74, a throat part 72 as a throttle part, and an injection part 73. In addition, the carrier gas supply pipe 70 includes two first walls 75 that are opposed to each other in the vertical direction with a space therebetween, and two second walls 76 that connect the left and right ends of the first wall 75. ing.

  The first wall 75 and the second wall 76 are continuously provided in the introduction part 71, the reduction part 74, the throat part 72, and the injection part 73 described above. The first wall 75 is formed in a flat plate shape along the left-right direction and the front-rear direction. The second wall 76 is formed so as to extend in the front-rear direction and have the same width (length in the vertical direction) in the front-rear direction.

  The introduction part 71 is provided at the upstream end of the carrier gas supply pipe 70 in the first flow direction. A carrier gas connection pipe 61 is connected to the upstream end of the carrier gas supply pipe 70 in the first flow direction.

  The introduction part 71 is a substantially straight tube extending in the front-rear direction, and is formed in a substantially rectangular tube. In other words, the introduction section 71 has an opening section (an opening section cut along the left and right direction and the up and down direction, that is, a front opening section as referred to in FIG. Is formed in a substantially rectangular shape that is long in the left-right direction, and the opening cross-sectional area thereof is the same in the first flow direction.

  Specifically, in the introduction part 71, the length in the facing direction between the first walls 75 and the length in the facing direction between the second walls 76 are both constant in the first flow direction.

  Further, a carrier gas connection pipe 61 is connected to the lower first wall 75 at the upstream end portion in the first flow direction in the introduction portion 71. The inner diameter of the connection port of the carrier gas connection pipe 61 is smaller than the length of the second wall 76 pipe in the facing direction.

  The reduced portion 74 is continuously connected to the downstream end edge of the introduction portion 71 in the first flow direction, and as shown in FIG. The introduction portion 71 is formed so as to gradually decrease from the first flow direction downstream end edge toward the first flow direction downstream side. Specifically, in the reduction portion 74, the inner surface of the second wall 76 gradually increases from each other toward the downstream side in the first flow direction while maintaining the distance in the facing direction (vertical direction) of the first wall 75 constant. It is formed in a curved shape that is close (asymptotically as a quadratic function).

  Specifically, the length in the facing direction between the first walls 75 in the reducing portion 74 is the same as the length in the facing direction between the first walls 75 of the introducing portion 71 and is constant in the first flow direction. On the other hand, the length in the opposing direction between the second walls 76 in the reducing portion 74 gradually increases so that it gradually approaches a quadratic function from the downstream edge of the introduction portion 71 toward the downstream side in the first flow direction. Shorter.

  The throat portion 72 is a portion that is formed as the first flow direction downstream edge of the reduction portion 74, that is, as shown in FIG. The opening cross-sectional area of the introducing portion 71 is smaller.

  Specifically, the length in the facing direction between the first walls 75 in the throat portion 72 is the same as the length in the facing direction between the first walls 75 in the reduction portion 74. On the other hand, the length in the facing direction between the second walls 76 in the throat portion 72 is smaller than the length in the facing direction between the second walls 76 in the introduction portion 71. More specifically, the length in the opposing direction between the second walls 76 in the throat portion 72 is minimum in the carrier gas supply pipe 70.

  The injection unit 73 includes a first injection unit 77 and a second injection unit 78 connected to the downstream side in the first flow direction.

  As shown in FIG. 5, the first injection unit 77 includes a first enlarged portion 88 and a straight portion 89 connected to the downstream side in the first flow direction.

  The first enlarged portion 88 is connected to the downstream side of the throat portion 72 in the first flow direction. Specifically, the first enlarged portion 88 is continuously connected to the downstream edge of the throat portion 72 in the first flow direction.

  Moreover, the opening cross section of the 1st expansion part 88 is formed in the substantially rectangular shape long in the left-right direction so that FIG. 6 may be referred. In addition, the opening cross-sectional area of the first enlarged portion 88 is formed so as to gradually increase from the downstream end edge of the throat portion 72 in the first flow direction toward the downstream side in the first flow direction. Specifically, in the first enlarged portion 88, while maintaining the distance in the facing direction (vertical direction) of the first wall 75 constant, the inner surface of the second wall 76 faces toward the downstream side in the first flow direction. It is formed in a tapered shape in plan view that is gradually separated from each other.

  Specifically, the length in the facing direction between the first walls 75 in the first enlarged portion 88 is the same as the length in the facing direction between the first walls 75 in the throat portion 72 and is constant in the first flow direction. On the other hand, the opposing length between the second walls 76 in the first enlarged portion 88 gradually increases from the downstream edge of the throat portion 72 in the first flow direction toward the downstream in the first flow direction.

  In the first enlarged portion 88, the second wall 76 is formed in a curved shape as described below.

  Moreover, the 1st expansion part 88 is provided with the expansion part 65 and the compression part 66 connected to the 1st flow direction downstream.

  In the inflating part 65, the inclination of the tangent line 69 in the second wall 76 in plan view with respect to the first straight line 95 that connects the center of gravity of the opening cross section of the injection part 73 along the flow direction gradually increases toward the downstream side in the first flow direction. growing. On the other hand, in the compression part 66, the inclination with respect to the 1st straight line 95 of the tangent 69 in the 2nd wall 76 in planar view becomes gradually small toward the 1st flow direction downstream.

  The straight portion 89 is a substantially straight tube extending in the front-rear direction, and is formed in a substantially rectangular tube. That is, as shown in FIG. 6, the straight section 89 is formed in a substantially rectangular shape whose opening cross section is long in the left-right direction, and the opening cross-sectional area is the same in the first flow direction.

  Specifically, in the straight portion 89, the length in the facing direction between the first walls 75 and the length in the facing direction between the second walls 76 are both constant in the first flow direction.

  The throat portion 72 and the first injection portion 77 described above are formed from Laval nozzles.

  The second injection part 78 is connected to the downstream side of the straight part 89 in the first flow direction. Specifically, the second injection part 78 is continuously connected to the downstream edge of the straight part 89 in the first flow direction.

  Moreover, the opening cross section of the 2nd injection part 78 is formed in the substantially rectangular shape long in the left-right direction, as shown in FIG. The opening cross-sectional area of the second injection portion 78 is formed so as to gradually increase from the downstream edge of the straight portion 89 in the first flow direction toward the downstream in the first flow direction. Specifically, in the second injection unit 78, the inner surface of the second wall 76 is gradually separated from each other toward the downstream side in the first flow direction while maintaining the distance in the opposing direction of the first wall 75 constant. It is formed in a tapered shape in plan view.

  Specifically, the opposing direction length between the first walls 75 in the second injection part 78 is the same as the opposing direction length between the first walls 75 in the straight part 89 and is constant in the first flow direction. On the other hand, the length in the opposing direction between the second walls 76 in the second injection portion 78 gradually increases from the downstream edge of the straight portion 89 in the first flow direction toward the downstream in the first flow direction.

  Moreover, the 2nd injection part 78 is provided with the upstream injection part 90 which is a 2nd expansion part, and the downstream injection part 91 connected to the 1st flow direction downstream. Specifically, the length in the facing direction between the second walls 76 in the upstream injection section 90 gradually increases at the first increase rate A toward the downstream side in the first flow direction, and the downstream injection section 91. The length in the opposing direction between the second walls 76 gradually increases from the upstream injection section 90 toward the downstream side in the first flow direction at a second increase rate B smaller than the first increase rate A.

  Moreover, as FIG. 4 is referred to, the dimension of the 2nd injection part 78 satisfy | fills following formula (1).

10W ≦ L ≦ 80W (1)
W: length in the facing direction between the second walls 76 at the upstream end of the second injection unit 78 in the first flow direction (that is, the inner diameter of the Laval nozzle)
L: The first flow direction length L of the 2nd injection part 78 If L is less than 10W, the distance for accelerating dry ice may be insufficient. On the other hand, if L exceeds 80 W, the carrier gas velocity may decrease due to the carrier gas receiving resistance by the first wall 75 and the second wall 76 in the second injection unit 78.

  Preferably, the following formula (2) is satisfied.

15W ≦ L ≦ 40W (2)
As shown in FIG. 3, the dry ice supply unit 80 includes a dry ice connection pipe 81 and a dry ice supply pipe 82 connected to the downstream side in the second flow direction (dry ice flow direction) thereof. .

  The dry ice connection pipe 81 is provided for supplying dry ice to the dry ice supply pipe 82 and is formed in a substantially cylindrical shape extending in the front-rear direction. The dry ice connection pipe 81 is arranged along the front-rear direction so as to be parallel to the carrier gas connection pipe 61 with an interval in the vertical direction.

  The upstream end in the second flow direction of the dry ice connection pipe 81, that is, the rear end is connected to the discharge pipe 56 via a dry ice line (not shown).

  A dry ice on-off valve (not shown) is provided at the upstream end of the dry ice connection pipe 81 in the second flow direction. A dry ice on-off valve (not shown) is electrically or pneumatically connected to a switch (not shown) provided in the nozzle device 3.

  The dry ice supply pipe 82 is provided to supply dry ice to the carrier gas supply pipe 70, and is formed in a substantially circular cross section or a substantially elliptic cross section extending obliquely forward and upward.

  Also, the dry ice supply pipe 82 is specifically connected to the lower first wall 75 in the injection unit 73. More specifically, as shown in FIGS. 4 and 5, the dry ice supply pipe 82 is provided in the vicinity of the upstream end portion in the first flow direction in the second expansion portion, that is, the downstream portion of the upstream injection portion 90. And a continuous portion of the downstream side injection section 91 with the upstream side portion. Specifically, the dry ice supply pipe 82 is connected to upstream ends of the upstream injection unit 90 and the downstream injection unit 91 in the first flow direction.

  Note that the length in the width direction of the dry ice supply pipe 82 is the length in the facing direction between the second walls 76 in the upstream injection unit 90 and the second end in the first flow direction upstream end of the downstream injection unit 91. It is larger than the length in the opposite direction between the walls 76. Therefore, the dry ice supply pipe 82 opens in the dry ice supply pipe 82 in the middle in the width direction.

  Further, as shown in FIG. 3, the second straight line 85 connecting the center of gravity of the opening cross section of the dry ice supply pipe 82 along the second flow direction intersects with the first straight line 95 described above. A line segment (first line segment) X from the intersection point P of the straight line 95 and the second straight line 85 toward the upstream side in the first flow direction and a line segment (second line segment) from the intersection point P toward the upstream side in the second flow direction. The angle α formed with Y is an acute angle, for example, 10 to 80 degrees, preferably 20 to 70 degrees.

  In addition, the nozzle device 3 is provided with a grip portion 96 that is slidable in the longitudinal direction (front-rear direction) of both the carrier gas connection pipe 61 and the dry ice connection pipe 81.

  The grip portion 96 includes a slide device 98 into which the carrier gas connection pipe 61 and the dry ice connection pipe 81 are inserted, and a handle portion 99 attached to the slide device 98.

  The slide device 98 is formed in a substantially rectangular shape in plan view, and has two insertion holes. A carrier gas connection pipe 61 and a dry ice connection pipe 81 are inserted through the insertion holes.

  The slide device 98 is slidable in the front-rear direction with respect to the carrier gas connection pipe 61 and the dry ice connection pipe 81. That is, the slide device 98 is fixed to the carrier gas connection pipe 61 and the dry ice connection pipe 81 with a fixing member 100 such as a bolt, and is fixed in the front-rear direction with respect to them. By releasing the fixation, the carrier gas connection pipe 61 and the dry ice connection pipe 81 are slid.

  In the nozzle device 3, the carrier gas is introduced from the compressor into the introduction unit 71 via the carrier gas line (not shown) and the carrier gas connection pipe 61. Then, the carrier gas is accelerated to a sonic speed (specifically, 300 to 340 m / sec) in the throat section 72, and then supersonic speed (specifically, in the first expansion section 88 of the first injection section 77). , 400 to 850 m / sec), the pressure is further reduced, and then the second injection unit 78 passes at a high speed (supersonic state). Moreover, in the straight part 89, since the 1st wall 75 and the 2nd wall 76 are parallel to the 1st flow direction, carrier gas becomes a stable linear flow.

  Then, the carrier gas is injected from the downstream end edge (injection port) in the first flow direction of the second injection unit 78 while being diffused in the left-right direction.

  On the other hand, the dry ice is supplied from the discharge pipe 56 so as to be sucked into the upstream injection unit 90 by the decompression caused by the passage of the carrier gas without being pumped, and subsequently, by the high-speed (supersonic) carrier gas. It is accelerated and sufficiently accelerated from the first flow direction upstream end of the second injection unit 78 to the downstream end of the downstream injection unit 91 in the first flow direction.

  The dry ice is jetted toward the jetting object together with the carrier gas from the downstream edge (jet port) in the first flow direction of the upstream jet section 90 while being diffused in the left-right direction.

  In order to use the dry ice injection system 1 described above, that is, to inject dry ice, first, the drive of the first motor 21 and the second motor 45 in the dry ice supply device 2 are started, and the supply unit 15 starts supplying dry ice and crushing dry ice by the crushing unit 30. At the same time, the drive of the vibrator 14 is started.

  At the same time, the compressor is driven, and then the carrier gas on-off valve (not shown) and the dry ice on-off valve (not shown) in the nozzle device 3 are opened.

  Thus, the carrier gas is supplied to the carrier gas supply pipe 70 and the dry ice is supplied from the dry ice supply pipe 82 to the carrier gas supply pipe 70.

  Subsequently, the above-described dry ice injection is performed.

  Thereafter, when the use of the above-described dry ice injection system 1 is stopped, the carrier gas on-off valve and the dry ice on-off valve (not shown) are closed, and then the compressor, the first motor 21, the second motor 45, and the vibrator 14 are driven. Stop.

  And according to the above-mentioned dry ice supply apparatus 2, since the supply part 15 is equipped with the biaxial screw feeder 20, between the 1st screw 22 and the 2nd screw 23, the dry ice adhering to them is mutually peeled off. Can do.

  Therefore, the load resulting from adhesion of dry ice can be reduced, and dry ice can be supplied quantitatively.

  In the dry ice supply device 2 described above, the dry gas blowing unit 16 is connected to the twin screw feeder 20, but may be provided in the hopper 10, for example, instead of or together with it.

  In the above description, the dry gas blowing unit 16 is provided. However, for example, the dry ice supply device 2 can be configured without providing the dry gas blowing unit 16.

  Preferably, the dry ice blowing device 16 is provided in the dry ice supply device 2. Since the dry gas can be blown to the dry ice stored in the hopper 10 and the dry ice supplied from the supply unit 15 by the dry gas blowing unit 16, it is possible to prevent the coagulated water from adhering to the surface of the dry ice. Can do.

  Therefore, in the hopper 10, it is possible to reliably prevent the occurrence of a bridge due to the adhesion of coagulated water and / or the adhesion of dry ice in the supply unit 15 and the occurrence of a load due thereto.

  As a result, dry ice can be supplied more quantitatively.

  In the above description, the pulverizing unit 30 is provided with the blade unit 40 including the first blade 42, the second blade 43, and the third blade 44. A crushing roll can also be provided. Preferably, the blade part 40 is provided.

  If the blade part 40 is provided, the dry ice supplied from the supply part 15 can be efficiently pulverized by the blade part 40 in the pulverization tank 35 of the pulverization part 30.

  In addition, the blade portion 40 is provided in the crushing tank 35 more compactly than a crushing roll that requires a large space in the crushing tank 35. Therefore, space saving can be achieved.

  Further, in the above description, the discharge pipe 56 is connected along the tangential direction of the crushing tank 35. However, for example, although not shown, it can be connected along the radial direction of the crushing tank 35. Preferably, the discharge pipe 56 is connected along the tangential direction of the crushing tank 35.

  In such a configuration, the dry ice crushed by the blade portion 40 in the pulverization unit 30 is along the tangential direction of the pulverization tank 35 as the first blade 42, the second blade 43, and the third blade 44 rotate. Thus, it can be efficiently discharged from the discharge pipe 56 and supplied efficiently.

  In the above description, the pulverizing unit 30 is provided in the supply unit 15. For example, although not shown, the pulverizing unit 30 is not provided, and the dry ice is crushed from the twin screw feeder 20 without pulverizing the dry ice. It is also possible to supply the nozzle device 3 via

  Further, according to the nozzle device 3 described above, in the carrier gas supply pipe 70, the carrier gas is introduced into the introduction part 71, accelerated in the throat part 72, and then passes through the injection part 73 at a high speed.

  Further, dry ice is sucked from the dry ice supply pipe 82 by the passage of the carrier gas in the injection unit 73, and the dry ice is jetted at high speed by the carrier gas.

  Therefore, dry ice can be supplied and injected more efficiently in the dry ice supply pipe 82 than when dry ice is pumped and fed into the carrier gas supply pipe 70.

  Moreover, in this nozzle apparatus 3, the opposing direction length between the 2nd walls 76 in the injection part 73 can be lengthened, maintaining the opposing direction length between the 1st walls 75 of the injection part 73 constant. That is, the cross-sectional shape of the injection part 73 can be made into a substantially rectangular shape. Therefore, even if the opening cross-sectional area of the blast gun having a circular opening cross-section described in Patent Document 1 is the same as the opening cross-sectional area, the length in the opposing direction between the second walls 76 of the injection unit 73 can be increased. Therefore, by connecting the dry ice supply pipe 82 to the first wall 75, the opening cross-sectional area of the supply port of the dry ice supply pipe 82 can be increased. As a result, powdery dry ice having various sizes can be smoothly supplied from the supply port of the dry ice supply pipe 82 to the injection unit 73.

  Furthermore, in this dry ice supply device 2, only the length in the orthogonal direction of the first wall 75, that is, between the second walls 76, while the length in the opposing direction between the first walls 75 is constant in the first flow direction. The injection unit 73 can be configured by changing only the length in the facing direction.

  Therefore, the injection part 73 can be formed easily and at low cost.

  In the above description, the length of the opposing direction of the first wall 75 of the introducing portion 71, the reducing portion 74, and the throat portion 72 is formed to be substantially rectangular in the opening cross section so as to be constant in the first flow direction. However, although not shown, for example, the length can be varied to form a substantially circular opening cross section or a substantially elliptic opening cross section.

  In the above description, since the dry ice supply pipe 82 is connected in the vicinity of the upstream end portion of the second enlarged portion, the carrier gas is accelerated in the throat portion 72, and then the first injection portion 77. Then, the carrier gas is further accelerated, and then it can be accelerated by putting dry ice on the high-speed carrier gas in the vicinity of the upstream end of the second enlarged portion.

  That is, since the dry ice supply pipe 82 is connected in the vicinity of the upstream end portion in the first flow direction of the second enlarged portion, a sufficient distance is provided over the downstream end portion in the first flow direction of the second injection portion 78. Can be secured. Therefore, it is possible to sufficiently accelerate dry ice on a high-speed carrier gas.

  In the above description, the throat portion 72 and the first injection portion 77 are formed from Laval nozzles, but the mode is not particularly limited. Preferably, it forms from a Laval nozzle.

  Thereby, the carrier gas can be accelerated to the sonic velocity by the throat portion 72, and then the carrier gas can be accelerated to the supersonic velocity by the first injection portion 77.

  Therefore, in the 2nd injection part 78, dry ice can be accelerated by supersonic carrier gas, and can be then injected from the injection opening of the 2nd injection part 78 at high speed.

  Moreover, since the 2nd injection part 78 satisfy | fills said Formula (1), the flow velocity of the carrier gas injected from the 2nd injection part 78 can be made supersonic.

  In the above description, the downstream injection section 91 is formed such that the length in the facing direction between the second walls 76 gradually increases from the upstream injection section 90 toward the downstream side in the first flow direction. 7 (see FIG. 7A), for example, as shown in FIG. 7B, the opposing direction length between the second walls 76 of the downstream injection section 91 is substantially the same in the first flow direction. It can also be formed.

  Further, as shown in FIG. 7C, the second increase rate B of the downstream injection unit 91 can be set to be the same as the first increase rate A of the upstream injection unit 90.

  Preferably, the embodiment shown in FIGS. 7A and 7B is used.

  According to such a configuration, the dry ice supply pipe 82 can be connected to the first wall 75 of the upstream injection unit 90 with a wider opening cross-sectional area. Therefore, dry ice can be more smoothly supplied from the supply port of the dry ice supply pipe 82 by the upstream injection unit 90.

  Moreover, in the downstream side injection | pouring part 91, dry ice can be put on a high-speed carrier gas, fully accelerated, and can be injected efficiently.

  More preferably, the aspect of Fig.7 (a) is mentioned from a viewpoint of the further injection efficiency.

  In the above description, the angle α formed by the first line segment X and the second line segment Y is set to an acute angle. However, for example, although not shown, it may be set to a right angle or an obtuse angle.

  Preferably, the angle α formed by the first line segment X and the second line segment Y is set to an acute angle. Thereby, dry ice can be smoothly supplied from the dry ice supply pipe 82 to the injection unit 73.

  Therefore, efficient injection of dry ice in the injection unit 73 can be achieved.

  In the nozzle device 3 described above, the grip 96 is slid in the longitudinal direction of the carrier gas connection pipe 61 and the dry ice connection pipe 81 so as to correspond to the distance between the operator and the injection target. The length between the part 96 and the downstream edge of the injection part 73 in the first flow direction can be freely changed. Therefore, the workability of injection can be improved.

  Moreover, even if the grip part 96 is slid, the first flow direction length of the injection part 73 can be kept constant.

  Therefore, efficient dry ice injection can be maintained while improving the workability of dry ice injection.

  In the above description, the grip portion 96 is slidably provided on both the carrier gas connection pipe 61 and the dry ice connection pipe 81. For example, although not shown, the grip portion 96 includes the carrier gas connection pipe 61 and It is also possible to insert only one of the dry ice connection pipes 81 so as to be slidable in the longitudinal direction thereof.

  Further, as indicated by the phantom line in FIG. 3, the heater 26 as a heating means can be further provided at the connection portion of the dry ice supply pipe 82 in the injection portion 73.

  If the carrier gas is excessively cooled by the supply of dry ice, the speed is reduced due to shrinkage, and the dry ice may not be accelerated sufficiently.

  However, according to this, the heater 26 can heat the carrier gas that passes through the connecting portion of the dry ice supply pipe 82 in the injection unit 73, and thus the dry ice is injected into the injection unit 73 while preventing the carrier gas from shrinking. Can be accelerated efficiently.

  Further, the dry ice supply pipe 82 may be clogged with dry ice.

  However, in the nozzle device 3, the clogging due to the dry ice can be eliminated by the heater 26, and the dry ice can be ejected from the ejection unit 73 more efficiently.

  In addition, the heater 26 can also be provided in the vicinity of the connection part of the dry ice supply pipe | tube 82 in the injection part 73, specifically, the 1st flow direction downstream part of a connection part.

  And according to the above-mentioned dry ice injection system 1 shown in FIG. 1, clean dry ice can be injected with clean carrier gas.

  Such a dry ice injection system 1 can be used as a cleaning system for cleaning an injection target by dry ice injection. There are no particular limitations on the cleaning target, which is an injection target, for example, toner manufacturing equipment such as a mixing device, a kneading device, a pulverizing device, and a classification device used in the toner manufacturing process, such as a steel plate, concrete, and a sputtering device. The inner wall of the chamber of the film forming apparatus such as the inner wall of the incinerator, medical equipment (such as a mixer or a molding machine for producing tablets), and the like.

  In such a cleaning system, even if dry ice remains on the surface of the object to be cleaned after cleaning, the dry ice is efficiently sprayed onto the object to be cleaned to ensure excellent cleaning power. It is easy to volatilize, so that the surface of the object to be cleaned can be kept clean.

  Moreover, the above-mentioned dry ice injection system 1 can also be used, for example, as a blasting system for blasting an injection target by spraying dry ice. Examples of the blasting target object that is an injection target include steel plates and concrete.

3 Nozzle device 26 Heater 61 Carrier gas connection pipe 70 Carrier gas supply pipe 71 Introduction part 72 Throat part 73 Injection part 75 First wall 76 Second wall 77 First injection part 78 Second injection part 81 Dry ice connection pipe 82 Dry ice Supply pipe 85 Second straight line 88 First expansion part 90 Upstream injection part (second expansion part)
91 Downstream injection part 95 First line 96 Grasping part P Intersection X First line segment Y Second line segment α Angle

Claims (8)

A nozzle device comprising a carrier gas supply pipe for supplying a carrier gas and a dry ice supply pipe connected to the carrier gas supply pipe for supplying powdery dry ice,
The carrier gas supply pipe is
An introduction part into which the carrier gas is introduced;
A throttle portion connected to the downstream side in the first flow direction, which is the flow direction of the carrier gas in the introduction portion, and having an opening cross-sectional area smaller than the opening cross-sectional area of the introduction portion;
An injection unit that is connected to the downstream side of the throttle unit in the first flow direction and has an opening cross-sectional area that is larger than an aperture cross-sectional area of the throttle unit;
The injection unit includes two first walls that are arranged to face each other with a space therebetween, and both ends of the first wall in an orthogonal direction that is orthogonal to both the opposing direction of the first wall and the first flow direction. Two second walls connecting the parts,
The facing direction length between the first walls is constant,
The nozzle device according to claim 1, wherein the dry ice supply pipe is connected to one of the first walls of the spray unit so as to open the one first wall of the spray unit . The injection unit is
A first injection part having a first enlarged part whose opening cross-sectional area increases from the throttle part toward the downstream side in the first flow direction;
A second injection unit having a second enlarged portion whose opening cross-sectional area increases from the first flow direction downstream end edge of the first injection unit toward the first flow direction downstream side,
2. The nozzle device according to claim 1, wherein the dry ice supply pipe is connected to the upstream end portion in the first flow direction of the second expansion portion or the vicinity thereof.   The nozzle device according to claim 2, wherein the throttle unit and the first injection unit are formed of Laval nozzles. The nozzle device according to claim 3, wherein the dimension of the second injection unit satisfies the following formula.
10W ≦ L ≦ 80W
W: length in the facing direction between the second walls at the upstream edge of the second injection portion in the first flow direction L: length in the first flow direction of the second injection portion The second injection unit is
An upstream injection section in which a length in the facing direction between the second walls gradually increases at a first increase rate toward the downstream side in the first flow direction;
The upstream injection section is connected to the downstream side in the first flow direction, and the opposing direction length between the second walls is substantially the same in the first flow direction, or between the second walls. A downstream injection section having a length in the opposite direction that gradually increases from the upstream injection section toward the downstream side in the first flow direction at a second increase rate smaller than the first increase rate. The nozzle device according to any one of claims 2 to 4. A first straight line connecting the center of gravity of the opening cross section of the injection unit along the first flow direction;
A second straight line connecting the center of gravity of the opening cross section of the dry ice supply pipe along the second flow direction that is the flow direction of the dry ice intersects,
A line segment from the intersection of the first straight line and the second straight line toward the upstream side in the first flow direction;
The nozzle device according to any one of claims 1 to 5, wherein an angle formed by a line segment from the intersection point toward the upstream side in the second flow direction is an acute angle. A carrier gas connection pipe connected to the upstream side in the first flow direction of the injection unit;
A dry ice connection pipe connected to the upstream side of the second flow direction which is the flow direction of the dry ice of the dry ice supply pipe;
The holding part provided slidably in those longitudinal directions is provided in at least one of the said carrier gas connection piping and the said dry ice connection piping, The one in any one of Claims 1-6 characterized by the above-mentioned. Nozzle device.   Furthermore, the heating device is provided in the connection part of the said dry ice supply pipe in the said injection part, or its vicinity, The nozzle apparatus in any one of Claims 1-7 characterized by the above-mentioned.

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