JP5351149B2 - プリント配線板のビルドアップ層への薄膜キャパシタの統合方法 - Google Patents
プリント配線板のビルドアップ層への薄膜キャパシタの統合方法 Download PDFInfo
- Publication number
- JP5351149B2 JP5351149B2 JP2010513353A JP2010513353A JP5351149B2 JP 5351149 B2 JP5351149 B2 JP 5351149B2 JP 2010513353 A JP2010513353 A JP 2010513353A JP 2010513353 A JP2010513353 A JP 2010513353A JP 5351149 B2 JP5351149 B2 JP 5351149B2
- Authority
- JP
- Japan
- Prior art keywords
- capacitor
- foil
- electrode
- layer
- capacitors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/162—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16235—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a via metallisation of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0175—Inorganic, non-metallic layer, e.g. resist or dielectric for printed capacitor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0355—Metal foils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09372—Pads and lands
- H05K2201/09481—Via in pad; Pad over filled via
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09509—Blind vias, i.e. vias having one side closed
- H05K2201/09518—Deep blind vias, i.e. blind vias connecting the surface circuit to circuit layers deeper than the first buried circuit layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09718—Clearance holes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09763—Printed component having superposed conductors, but integrated in one circuit layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
- H05K2203/1126—Firing, i.e. heating a powder or paste above the melting temperature of at least one of its constituents
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1283—After-treatment of the printed patterns, e.g. sintering or curing methods
- H05K3/1291—Firing or sintering at relative high temperatures for patterns on inorganic boards, e.g. co-firing of circuits on green ceramic sheets
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49128—Assembling formed circuit to base
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/765,113 | 2007-06-19 | ||
| US11/765,113 US7841075B2 (en) | 2007-06-19 | 2007-06-19 | Methods for integration of thin-film capacitors into the build-up layers of a PWB |
| PCT/US2008/067177 WO2008157524A2 (en) | 2007-06-19 | 2008-06-17 | Methods for integration of thin-film capacitors into the build-up layers of a printed wiring board |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010530644A JP2010530644A (ja) | 2010-09-09 |
| JP2010530644A5 JP2010530644A5 (enExample) | 2011-07-28 |
| JP5351149B2 true JP5351149B2 (ja) | 2013-11-27 |
Family
ID=39938355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010513353A Expired - Fee Related JP5351149B2 (ja) | 2007-06-19 | 2008-06-17 | プリント配線板のビルドアップ層への薄膜キャパシタの統合方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7841075B2 (enExample) |
| EP (1) | EP2158797A2 (enExample) |
| JP (1) | JP5351149B2 (enExample) |
| KR (1) | KR101096900B1 (enExample) |
| TW (1) | TWI418267B (enExample) |
| WO (1) | WO2008157524A2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101835782B1 (ko) * | 2015-03-11 | 2018-03-08 | 가부시키가이샤 노다스크린 | 박막 커패시터의 제조 방법, 집적 회로 탑재 기판 및 당해 기판을 구비한 반도체 장치 |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7632708B2 (en) * | 2005-12-27 | 2009-12-15 | Tessera, Inc. | Microelectronic component with photo-imageable substrate |
| US8875363B2 (en) * | 2008-09-25 | 2014-11-04 | Cda Processing Limited Liability Company | Thin film capacitors on metal foils and methods of manufacturing same |
| US8391017B2 (en) * | 2009-04-28 | 2013-03-05 | Georgia Tech Research Corporation | Thin-film capacitor structures embedded in semiconductor packages and methods of making |
| US8409963B2 (en) * | 2009-04-28 | 2013-04-02 | CDA Procesing Limited Liability Company | Methods of embedding thin-film capacitors into semiconductor packages using temporary carrier layers |
| US20100270646A1 (en) * | 2009-04-28 | 2010-10-28 | Georgia Tech Research Corporation | Thin-film capacitor structures embedded in semiconductor packages and methods of making |
| US10186458B2 (en) * | 2012-07-05 | 2019-01-22 | Infineon Technologies Ag | Component and method of manufacturing a component using an ultrathin carrier |
| US9027226B2 (en) * | 2013-03-27 | 2015-05-12 | Bae Systems Information And Electronic Systems Integration Inc. | Method for implementing prompt dose mitigating capacitor |
| US9370103B2 (en) * | 2013-09-06 | 2016-06-14 | Qualcomm Incorported | Low package parasitic inductance using a thru-substrate interposer |
| US9955568B2 (en) * | 2014-01-24 | 2018-04-24 | Dell Products, Lp | Structure to dampen barrel resonance of unused portion of printed circuit board via |
| US10062838B2 (en) * | 2015-03-31 | 2018-08-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Co-fired passive integrated circuit devices |
| US10796212B2 (en) * | 2018-10-02 | 2020-10-06 | Xerox Corporation | Orientation-agnostic method to interface to printed memory label |
| TWI688073B (zh) * | 2019-05-22 | 2020-03-11 | 穩懋半導體股份有限公司 | 半導體積體電路及其電路佈局方法 |
| WO2022047644A1 (en) * | 2020-09-02 | 2022-03-10 | Yangtze Memory Technologies Co., Ltd. | On-chip capacitor structures in semiconductor devices |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5161086A (en) | 1989-08-23 | 1992-11-03 | Zycon Corporation | Capacitor laminate for use in capacitive printed circuit boards and methods of manufacture |
| US5428499A (en) * | 1993-01-28 | 1995-06-27 | Storage Technology Corporation | Printed circuit board having integrated decoupling capacitive core with discrete elements |
| JP3154594B2 (ja) * | 1993-07-13 | 2001-04-09 | 日本特殊陶業株式会社 | キャパシタ内蔵多層配線基板とその製造方法 |
| US6611419B1 (en) | 2000-07-31 | 2003-08-26 | Intel Corporation | Electronic assembly comprising substrate with embedded capacitors |
| US6577490B2 (en) * | 2000-12-12 | 2003-06-10 | Ngk Spark Plug Co., Ltd. | Wiring board |
| US6388207B1 (en) | 2000-12-29 | 2002-05-14 | Intel Corporation | Electronic assembly with trench structures and methods of manufacture |
| JP2003332749A (ja) * | 2002-01-11 | 2003-11-21 | Denso Corp | 受動素子内蔵基板、その製造方法及び受動素子内蔵基板形成用素板 |
| US6818469B2 (en) * | 2002-05-27 | 2004-11-16 | Nec Corporation | Thin film capacitor, method for manufacturing the same and printed circuit board incorporating the same |
| JP2004200556A (ja) * | 2002-12-20 | 2004-07-15 | Mitsui Mining & Smelting Co Ltd | キャパシタ層用積層材の耐電圧検査ロール及びそのキャパシタ層用積層材ロールを用いた耐電圧測定方法 |
| US7256980B2 (en) | 2003-12-30 | 2007-08-14 | Du Pont | Thin film capacitors on ceramic |
| JP2005252141A (ja) * | 2004-03-08 | 2005-09-15 | Murata Mfg Co Ltd | 電子部品及びその製造方法 |
| US20050204864A1 (en) | 2004-03-16 | 2005-09-22 | Borland William J | Thick-film dielectric and conductive compositions |
| TWI271756B (en) * | 2004-08-11 | 2007-01-21 | Mitsui Mining & Smelting Co | Method for producing dielectric layer-constituting material, dielectric layer-constituting material produced by such method, method for manufacturing capacitor circuit-forming member using such dielectric layer-constituting material, capacitor circuit |
| US20060158828A1 (en) | 2004-12-21 | 2006-07-20 | Amey Daniel I Jr | Power core devices and methods of making thereof |
| US7613007B2 (en) | 2004-12-21 | 2009-11-03 | E. I. Du Pont De Nemours And Company | Power core devices |
| US7701052B2 (en) | 2005-10-21 | 2010-04-20 | E. I. Du Pont De Nemours And Company | Power core devices |
| EP1777745A3 (en) * | 2005-10-21 | 2010-05-05 | E.I. Du Pont De Nemours And Company | Power core device including a capacitor and method of making thereof |
| JP2007142089A (ja) * | 2005-11-17 | 2007-06-07 | Ngk Spark Plug Co Ltd | 誘電体積層構造体とその製造方法、及びコンデンサ |
| JP2007149730A (ja) * | 2005-11-24 | 2007-06-14 | Shinko Electric Ind Co Ltd | 薄膜キャパシタ、実装基板、実装基板の製造方法、半導体装置、および半導体装置の製造方法 |
| US20080158828A1 (en) * | 2006-12-27 | 2008-07-03 | Inventec Corporation | Heatsink structure and assembly fixture thereof |
-
2007
- 2007-06-19 US US11/765,113 patent/US7841075B2/en not_active Expired - Fee Related
-
2008
- 2008-06-17 KR KR1020107001113A patent/KR101096900B1/ko not_active Expired - Fee Related
- 2008-06-17 WO PCT/US2008/067177 patent/WO2008157524A2/en not_active Ceased
- 2008-06-17 EP EP08771233A patent/EP2158797A2/en not_active Withdrawn
- 2008-06-17 JP JP2010513353A patent/JP5351149B2/ja not_active Expired - Fee Related
- 2008-06-18 TW TW097122744A patent/TWI418267B/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101835782B1 (ko) * | 2015-03-11 | 2018-03-08 | 가부시키가이샤 노다스크린 | 박막 커패시터의 제조 방법, 집적 회로 탑재 기판 및 당해 기판을 구비한 반도체 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200913812A (en) | 2009-03-16 |
| WO2008157524A2 (en) | 2008-12-24 |
| TWI418267B (zh) | 2013-12-01 |
| JP2010530644A (ja) | 2010-09-09 |
| EP2158797A2 (en) | 2010-03-03 |
| WO2008157524A3 (en) | 2009-02-19 |
| US20080316723A1 (en) | 2008-12-25 |
| US7841075B2 (en) | 2010-11-30 |
| KR20100021002A (ko) | 2010-02-23 |
| KR101096900B1 (ko) | 2011-12-22 |
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