JP5319427B2 - Laser processing machine - Google Patents

Description

  The present invention relates to a laser processing machine that performs thin-film laser scribing, patterning, and the like in a manufacturing process of, for example, a solar cell panel, an organic EL display, or a plasma display.

  In this type of laser processing machine, the main task is to remove the thin film formed on the processing surface of the substrate by irradiating it with laser light. In the laser processing machine that the applicant has already proposed (see Patent Document 1 below), the substrate is lifted using a levitation device that blows out air, and is transported by a carriage, and from a processing nozzle installed in a predetermined processing region. The thin film is patterned by the emitted laser light.

  The above laser processing machine is excellent and useful. However, since the substrate is reciprocated before and after the processing region during laser processing, there is a tendency to occupy an area more than twice the size of the substrate.

  Therefore, as a configuration for reducing the occupied area, a holding mechanism that holds the substrate so as not to move, and a laser beam is irradiated to the processing surface of the substrate by traveling in a predetermined traveling direction and intersecting the traveling direction. A processing nozzle that is also movable in the pitch feed direction, a nozzle support unit that is capable of traveling in the predetermined travel direction and movably supports the processing nozzle in the pitch feed direction, and the nozzle support unit A laser processing machine having a traveling drive mechanism for traveling in the traveling direction is considered.

  If such a configuration is adopted, the processing nozzle is run instead of the substrate, so that the area required for installing the laser processing machine is about half that of the conventional configuration in which the substrate is reciprocated.

  Therefore, in such a laser processing machine, it is necessary to move the processing nozzle by a predetermined pitch in the pitch feed direction each time the processing nozzle travels from one end of the substrate to the other end in the traveling direction. In this movement, in order to detect the current position of the machining nozzle in the pitch feed direction, a configuration in which a linear scale is provided between the nozzle support unit and the machining nozzle can be considered. However, when the travel support mechanism causes the nozzle support unit to travel in the predetermined travel direction, the travel drive mechanism generates heat, and heat from the travel drive mechanism is transmitted to the nozzle support unit, causing the nozzle support unit to thermally expand. is there. Due to this thermal expansion, the distance between the light transmission holes of the linear scale provided on the nozzle support unit is extended, and there may be a problem that the measured value of the linear scale and the actual position of the machining nozzle are shifted.

Japanese Patent No. 4231538

  The present invention, which has been made by paying attention to the above, is intended to suppress the occurrence of the above-described problems associated with heat generation of the travel drive mechanism and thermal expansion of the nozzle support unit.

  That is, a laser processing machine according to the present invention includes a main body that supports a processing target, a processing nozzle that processes a processing target surface of the processing target by irradiating a laser beam, and the processing nozzle in a predetermined pitch feed direction. A nozzle support unit that is movably supported, a travel drive mechanism that supports the nozzle support unit and the processing nozzle so as to travel in a predetermined travel direction intersecting the pitch feed direction, the nozzle support unit, and the processing nozzle And a linear scale for detecting the position in the pitch feed direction of the processing nozzle, and a temperature for detecting the temperature difference between the temperature in the vicinity of the travel drive mechanism in the nozzle support unit and the room temperature. Difference processing means and the processing while correcting the value detected by the linear scale based on the temperature difference detected by the temperature difference detection means Characterized by comprising a control device for controlling the pitch feed direction position of nozzle.

  According to such a configuration, the temperature difference between the temperature in the vicinity of the travel drive mechanism of the nozzle support unit and the room temperature is detected, and the detected value of the linear scale is corrected by the correction unit based on the temperature difference. Thus, the measurement error of the linear scale caused by the thermal expansion of the nozzle support unit can be corrected.

  In a laser processing machine in which a plurality of the processing nozzles are arranged along the pitch feeding direction, the position of the processing nozzles in the pitch feeding direction can be detected, and the control device can detect the linear scale for each processing nozzle. It is desirable to correct the value detected by the above based on the temperature difference detected by the temperature difference detecting means. This is because the measurement error of the linear scale caused by the thermal expansion of the nozzle support unit can be corrected for each processing nozzle.

  In particular, if the amount of correction for the temperature difference is different for each processing nozzle, the processing nozzle is more accurately reflected by the fact that the displacement due to thermal expansion of the nozzle support unit varies depending on the position on the nozzle support unit. You can know the position of.

  Moreover, as long as the temperature difference detection means is formed using temperature sensors provided at positions near the traveling drive mechanism of the nozzle support unit and at positions separated from the traveling drive mechanism of the main body. By considering the temperature detected by the temperature sensor provided at a position away from the travel drive mechanism of the main body as room temperature, the temperature difference detection means is housed in the laser processing machine, and the heat generated by the travel drive mechanism with respect to the measured value of the room temperature. The influence can be suppressed. The “temperature sensor provided at a position near the travel drive mechanism of the nozzle support unit and a position away from the travel drive mechanism of the main body” means the position of the nozzle support unit near the travel drive mechanism. It is a concept that includes not only the temperature and the temperature at a position separated from the travel drive mechanism of the main body, but also both electrodes of a thermocouple for detecting the temperature difference between these positions.

  Furthermore, as a configuration for enabling the travel drive mechanism as described above to be installed in a small installation space, the travel drive mechanism includes a linear motor movable element provided in the nozzle support unit and a linear motor provided in the main body. The thing formed using a stator is mentioned.

  And as a suitable aspect in order to make the measurement error of a linear scale small, what has provided the said travel drive mechanism in the pitch feed direction center part of the said nozzle support unit is mentioned. In such a case, the nozzle support unit thermally expands in a direction away from the central portion in the pitch feed direction, so that the travel drive that is a heat source compared to the case where the travel drive mechanism is provided at one end. This is because the maximum distance from the mechanism can be reduced.

  According to the present invention, by detecting the temperature difference between the temperature in the vicinity of the travel drive mechanism of the nozzle support unit and the room temperature, and correcting the detected value of the linear scale by the correcting means based on this temperature difference, It is possible to suppress the occurrence of a problem that the measured value by the linear scale and the actual position of the machining nozzle are shifted with the thermal expansion of the nozzle support unit.

1 is an overall perspective view showing a laser beam machine according to an embodiment of the present invention. The exploded perspective view which omitted the dust collection nozzle of the laser beam machine. The partial exploded perspective view which shows the process nozzle and support mechanism of the laser beam machine. The front view which omitted the dust collection nozzle of the laser beam machine. The functional block diagram of the control apparatus of the laser beam machine. The figure which shows the correction map of the laser processing machine roughly. The figure which shows the time change of the displacement between the detected value and the measured value of the position of the X-axis direction of the process nozzle of the laser processing machine.

  Hereinafter, an embodiment of the present invention will be described.

  The laser beam machine 1 shown in FIGS. 1 to 4 includes a support mechanism 4 installed above the processing nozzle 3, a retaining pressing plate 2 installed beside the support mechanism 4, and a platform 8 that supports the support mechanism from below. And a processing nozzle 3 that is disposed on the gantry 8 and irradiates the processing surface of the substrate 0 with a laser beam, and this processing. An X-axis unit 322 that is a nozzle support unit that supports the nozzles so as to be able to travel in the X-axis direction that is a predetermined pitch feed direction, and a predetermined traveling direction that intersects the X-axis direction with the X-axis unit 322 and the processing nozzle 3 A linear drive for detecting the position of the machining nozzle 3 in the X-axis direction, a travel drive mechanism R that supports the main body B so as to be able to travel, a dust collection nozzle 5 suspended above the support mechanism 4 of the main body B 6 and the nozzle The temperature difference detecting means 7 for detecting the temperature difference between the temperature near the travel drive mechanism R in the holding unit S and the room temperature, and the linear scale 6 is based on the temperature difference detected by the temperature difference detecting means 7. A control device C that controls the position of the machining nozzle 3 in the X-axis direction while correcting the detected value is a main component.

  As described above, the main body B includes the support mechanism 4 installed above the processing nozzle 3, the retaining pressing plate 2 installed beside the support mechanism 4, and the gantry 8 that supports the support mechanism from below. To do.

  The support mechanism 4 mainly includes a frame that is lifted to a height at which it does not collide with the machining nozzle 3, the nozzle support unit S, and the like by a frame 9 that is fixed to the frame 8. The underframe 4 has a shape in which a plurality of openings 47 extending in the front-rear direction and penetrating vertically are arranged in the left-right direction. Laser light emitted from the processing nozzle 3 passes through the opening 47. A large number of rolling elements 45 are provided on the periphery of the opening 47 of the frame 4 so as to be spread. The underframe 4 is supported by a frame 9 so as to be movable in the left-right direction. A pitch feed motor 46 is interposed between the frame 4 and the frame 9 to cause the horizontal movement of the frame 4.

  As shown in FIG. 2, the retaining pressing plate 2 is a retaining mechanism that retains the substrate 0 so as not to move during laser processing. The retaining pressing plates 2 are paired on the left and right sides, and are located on the outer side of the frame 4 on the frame 9. These retaining pressing plates 2 are driven by an air cylinder to approach or separate in the left-right direction, abut against the side end face of the substrate 0, and sandwich the substrate 0 from the left and right.

  The processing nozzle 3 is supported by an XY stage 32. The XY stage 32 is provided with a Y-axis rail 321 extending in the front-rear direction, and traveling in the front-rear direction guided by the Y-axis rail 321 and extending in the left-right direction, and an X-axis rail 323 is provided on the upper side. An X-axis unit 322 and a cart 324 that is guided by the X-axis rail 323 and moves in the left-right direction are provided. The carriage 324 uses a linear servo mover as a drive source. In the present embodiment, a plurality of carriages 324 are arranged on the X-axis unit 322, and the machining nozzle 3 is mounted on each carriage 324. The processing nozzle 3 is connected with an optical fiber 31 that guides laser light supplied from a laser oscillator.

  The travel drive mechanism R extends in the front-rear direction to a linear servo mover, that is, a linear motor mover R1 provided at the center of the lower surface of the nozzle support unit S in the X-axis direction and the center of the mount 8 in the X-axis direction. It is a linear motor type travel drive mechanism configured using a linear motor stator R2 provided. When the travel drive mechanism R is activated, the X-axis unit 322 travels in the Y-axis direction.

  The dust collection nozzle 5 exists for sucking dust generated by patterning a thin film. The dust collection nozzle 5 is provided above the processing nozzle 3 and has a suction port that opens downward. In the present embodiment, the dust collection nozzle 5 is moved in the Y-axis direction substantially in synchronization with the processing nozzle 3. A duct hose 51 is connected to the dust collection nozzle 5. The dust sucked through the dust collection nozzle 5 is collected in a dust collector (not shown) via the duct hose 51.

  The linear scale 6 is provided between the X-axis unit 322 and the processing nozzle 3 and detects the position of the processing nozzle 3 in the X-axis direction. Specifically, for example, although not shown, the light source provided on the processing nozzle 3 side, specifically, the carriage 324, the light transmission holes provided in the X-axis unit 322 at a predetermined pitch, and the light transmission holes Each of the light receiving elements provided below is used. The light receiving element detects the light from the light source provided on each of the carriages 324 on which the processing nozzles 3 are mounted by the light receiving elements, thereby detecting the position of each processing nozzle 3 and the control device C. Can be output.

  In the present embodiment, the temperature difference detection means 7 includes a position near the travel drive mechanism R of the X-axis unit 322, more specifically, a central portion in the X-axis direction that is a position near the linear motor movable element R1, It is configured using a thermocouple as a temperature sensor provided with first and second electrodes 71 and 72 at the X-axis direction end of the gantry 8, respectively. Here, in the present embodiment, the temperature of the end portion in the X-axis direction of the gantry 8 is regarded as room temperature, and the difference between the temperature near the traveling drive mechanism R and room temperature is output to the control device S.

  As schematically shown in FIG. 5, the control device C uses a general microcomputer system having a central processing unit C1, a storage device C2, an input interface C3, and an output interface C4. The pitch feed direction position, that is, the X-axis direction position of the machining nozzle 3 is controlled while correcting the value detected by the linear scale 6 based on the temperature difference detected by the temperature difference detecting means 7. To do.

  More specifically, the input interface C3 includes a signal indicating the position of each processing nozzle 3 output from the linear scale 6, and a position in the vicinity of the travel drive mechanism R output from the temperature difference detection means 7. A signal indicating a difference from room temperature is received.

  The output interface C4 outputs at least a command for moving each machining nozzle 3 in the X-axis direction and a command for turning on / off the laser output.

The storage device C2 stores the correspondence between the temperature difference obtained in advance by experiment and the displacement between the position of the processing nozzle 3 indicated by the linear scale 6 and the actual position of the processing nozzle 3 as shown in FIG. The actual position of each processing nozzle 3 is determined by referring to this correction table using the correction map, the position of each processing nozzle 3 output from the linear scale 6 and the temperature difference as parameters. A program, a program for performing control for moving each machining nozzle 3 in the X-axis direction by a predetermined pitch, and a program for performing control for turning on / off the laser output are stored. The displacement between the temperature difference and the position of the processing nozzle 3 indicated by the linear scale 6 and the actual position of the processing nozzle 3 is substantially proportional as shown in FIG. Therefore, in practice, a proportionality constant indicating the displacement when the temperature difference is used as a parameter is stored for each processing nozzle 3. In FIG. 6, for each of the eight machining nozzles 3, the displacements of the _first to _eighth machining nozzles 3 counted from one end side are denoted by reference numerals 3 _{1 to} 3 ₈ , respectively. Yes.

  Then, the central processing unit C1 executes the program stored in the storage device C2.

  Hereinafter, the operation of each unit when performing laser processing will be described.

  In executing laser processing, first, a substrate 0 with a processing surface on which a thin film is formed facing up is carried in from the front. That is, the transport unit (not shown) is driven to feed the substrate 0 onto the frame 4 and place it on the frame 4.

  Next, the holding pressing plate 2 is pressed against both side end surfaces of the substrate 0 to sandwich the substrate 0 from both sides, thereby holding the substrate 0 against the gantry 8.

  After that, the processing nozzle 3 is moved to a required processing site, laser light is emitted upward, the substrate 0 is transmitted, and the thin film on the processing surface is irradiated. Specifically, a pulse laser is continuously irradiated while running the X-axis unit 322 in the front-rear direction to form a groove extending in the front-rear direction in the thin film. Further, the carriage 324 equipped with the machining nozzle 3 is pitch-moved in the X-axis direction to change the groove formation position. At the same time, the frame 4 is also moved in the left-right direction in conjunction with the carriage 324 so that the laser optical axis does not interfere with the frame 4. At this time, the frame 4 supporting the substrate 0 is displaced relative to the substrate 0. However, the rolling element 45 is interposed between the lower surface of the substrate 0 and the upper surface of the frame 4, and this rotates. Therefore, the movement of the underframe 4 is not hindered. Incidentally, it is also possible to form a groove extending in the left-right direction in the thin film by continuously irradiating the pulse laser while moving both the carriage S2 and the frame 4 in the left-right direction.

Here, when the machining nozzle 3 and the carriage 324 are pitch-moved in the left-right direction, the control device C detects the detected value p _{j of} each position of each machining nozzle 3 output from the linear scale 6 as described above. A signal indicating (j is a subscript indicating the j-th processing nozzle 3 and j is an integer of 1 to 8) is received. On the other hand, as described above, a signal indicating the temperature difference δT between the position near the traveling drive mechanism R and the room temperature output from the temperature difference detecting means 7 is also received. Then, using the temperature difference δT as a parameter and referring to the correction map, the correction amount δp _j (j is a subscript indicating the j-th processing nozzle 3 and j is an integer from 1 to 8) by the following equation (1): Calculate

δp _j = C _j × δT (1)
Here, (j is a subscript indicating the j-th processing nozzle 3 and _j is an integer of 1 to 8) C _j is a proportional constant obtained in advance for each processing nozzle 3 based on an experiment. Stored in internal memory.

Thereafter, the corrected position _{pad_j} is determined for each processing nozzle 3 by the following equation (2).

p _ad — _j = p _j −δp _j (2)
Here, the change of the detected value p _j of each processing nozzle 3 from the actual measurement value of the detected value p _j (j is a subscript indicating the j-th processing nozzle 3, j = 1 to 8) with respect to time is shown in FIG. (A), the change with respect to time of the displacement from the measured value of the corrected position _{pad_j} of each processing nozzle 3 is shown in FIG. Note that the time of (a) and (b) in FIG. 7 and the scale of the displacement are common. Also in FIG. 7, reference numerals 3 _{1 to} 3 ₈ are respectively attached to the displacements of the machining nozzles 3 located at the first to eighth positions from the one end side.

  The temperature difference δT is detected and updated every predetermined time, for example, within 10 minutes or less.

Then, it is determined whether or not the corrected position _{pad_j of} each machining nozzle 3 obtained by the equation (2) has changed by a predetermined pitch from before the pitch feed start, and the result of this determination is “true”. At this point, the movement of each processing nozzle 3 is stopped.

  During the laser processing, it is preferable that the dust collection nozzle 5 is positioned immediately above the laser irradiation point, and the generated dust is sucked and collected as appropriate.

  When the laser processing is completed, the substrate 0 is unloaded.

As described above, according to the configuration of the laser beam machine 1 according to the present embodiment, the temperature difference detection unit 7 detects the temperature difference between the temperature near the traveling drive mechanism R of the X-axis unit 322 and the room temperature. Then, the control device C calculates the correction amount δp _j of the detected value of the position of the machining nozzle 3 based on this temperature difference, and controls the position of the machining nozzle 3 based on the corrected position _{padd_j} that is the result of the correction. Therefore, the travel drive mechanism R generates heat, and the measurement error of the linear scale 6 caused by the thermal expansion caused by the increase in the temperature of the X-axis unit 322 over time can be corrected by receiving this heat. Therefore, the grooves can be formed in the substrate 0 at a predetermined pitch without being affected by the heat generated by the travel drive mechanism R.

  Further, the linear scale 6 can detect the X-axis direction positions of the plurality of processing nozzles 3 arranged along the X-axis direction, and the control device C uses the linear scale 6 for each processing nozzle 3. Since the detected value is corrected based on the temperature difference detected by the temperature difference detecting means 7, the measurement error of the linear scale 6 caused by the thermal expansion of the X-axis unit 322 can be corrected for each processing nozzle 3.

  Further, since the correction amount for the temperature difference is made different for each processing nozzle 3, more accurately reflecting that the displacement of each part due to the thermal expansion of the nozzle support unit S differs depending on the position on the X-axis unit 322. In addition, the position of the processing nozzle 3 can be known.

  In addition, the first and second electrodes are disposed near the traveling drive mechanism R of the X-axis unit 322, that is, in the center in the X-axis direction, and at positions separated from the traveling drive mechanism R of the main body B, that is, at one end in the X-axis direction. By forming the temperature difference detection means 7 using a thermocouple provided with 71, 72, and assuming that the temperature detected by the second thermocouple 72 provided at one end in the X-axis direction of the main body B is room temperature, While the temperature difference detecting means 7 is housed in the laser processing machine 1, the influence of heat generated by the travel drive mechanism R on the measured value at room temperature can be suppressed.

  Further, since the travel drive mechanism R is formed by using a linear motor movable element R1 provided in the nozzle support unit S and a linear motor stator R2 provided on the mount 8 of the main body B, this Such a travel drive mechanism R can be installed in a small installation space.

  Since the travel drive mechanism R is provided at the center of the X-axis unit 322 in the X-axis direction, the X-axis unit 322 is heated away from the center of the X-axis as shown in FIG. Inflate. Therefore, compared with the case where the traveling drive mechanism R is provided at one end of the X-axis unit 322, the maximum distance from the traveling drive mechanism R that is a heat source can be reduced, and the measurement error of the linear scale 6 can be reduced. .

  The present invention is not limited to the embodiment described above.

  For example, the position of the travel drive mechanism may be set arbitrarily. Further, instead of the combination of the linear motor movable element and the linear motor stator, for example, a normal rotary motor, a rolling element connected to the output shaft of the rotary motor, and the rolling element are attached. You may comprise a traveling apparatus using the rail formed.

  Furthermore, the temperature sensor for detecting the room temperature is not limited to the main body of the laser processing apparatus, and may be provided outside the laser processing apparatus, for example. Further, a signal indicating the room temperature may be separately received by a communication line or other methods.

  The linear scale is not limited to a light source, a light transmitting hole, and a light receiving element, but a magnetic scale formed using a permanent magnet provided on the nozzle support unit side and an electromagnet provided on the processing nozzle side. May be adopted.

  In addition, the number of processing nozzles is arbitrary, and only one may be provided.

  Then, instead of preparing a correction amount table for each nozzle, an embodiment is adopted in which the correction amount is directly determined from the measured value of the position of the processing nozzle on the nozzle support unit detected by the linear scale and the temperature difference. Also good.

  In addition, various changes may be made without departing from the spirit of the present invention.

B ... Main body 3 ... Processing nozzle 322 ... X-axis unit (nozzle support unit)
6 ... Linear scale 7 ... Temperature difference detection means R ... Travel drive mechanism C ... Control device

Claims (6)

A main body for supporting the workpiece;
A processing nozzle for irradiating the processing surface of the processing object with laser light;
A nozzle support unit that movably supports the processing nozzle in a predetermined pitch feed direction;
A travel drive mechanism that supports the nozzle support unit and the processing nozzle so as to travel in a predetermined travel direction intersecting the pitch feed direction;
A linear scale provided between the nozzle support unit and the processing nozzle for detecting the pitch feed direction position of the processing nozzle;
A temperature difference detecting means for detecting a temperature difference between a temperature at a position in the vicinity of the travel drive mechanism in the nozzle support unit and a room temperature;
A laser processing machine comprising: a control device that controls the position in the pitch feed direction of the processing nozzle while correcting the value detected by the linear scale based on the temperature difference detected by the temperature difference detection means.   A plurality of the processing nozzles are arranged along the pitch feed direction, the pitch feed direction position of each processing nozzle can be detected, and the controller detects the value detected by the linear scale for each processing nozzle. The laser beam machine according to claim 1, wherein correction is performed based on the temperature difference detected by the temperature difference detection means.   The laser processing machine according to claim 2, wherein the correction amount for the temperature difference is made different for each processing nozzle.   The temperature difference detection means is formed by using temperature sensors provided at positions near the travel drive mechanism of the nozzle support unit and at positions separated from the travel drive mechanism of the main body, respectively. 3. The laser processing machine according to 3.   5. The laser processing according to claim 1, wherein the traveling drive mechanism is formed using a linear motor movable element provided in the nozzle support unit and a linear motor stator provided in the main body. Machine.   The laser processing machine according to claim 1, 2, 3, 4, or 5, wherein the traveling drive mechanism is provided at a central portion in a pitch feed direction of the nozzle support unit.

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