JP5297432B2 - Transmission line and transmission device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transmission line and a transmission apparatus, capable of attenuating common-mode noise, being realized in a conventional silicon semiconductor manufacturing processes, and functioning as a common-mode noise filter which can be mounted in a same chip so as to integrate with a silicon semiconductor circuit. <P>SOLUTION: The transmission line and the transmission apparatus comprise two signal lines 101, 102 provided in parallel at regular intervals along the in-plain direction of a first virtual plane VP1; and a sealed body 110 having floating sealed pieces 110-1 to 110-n being a plurality of conductors having a predetermined length arranged in parallel to each other at regular intervals in a direction orthogonal to an extension direction of a projection image when two signal lines 101, 102 are projected to a second virtual plane VP2 along the in-plain direction of the second virtual plane VP2 in parallel to the first virtual plane VP1. The two signal lines and the sealed body are formed in silicon semiconductor manufacturing processes. <P>COPYRIGHT: (C)2012,JPO&amp;INPIT

Description

  The present invention relates to a transmission line and a transmission device having a filter function for removing an in-phase signal.

First, with reference to FIG. 12 and FIG. 13, the transmission line which is a prior art is demonstrated and the problem in the common mode transmission characteristic is demonstrated.
FIG. 12A is a configuration diagram of a differential CPW (co-planer wave guide) type transmission line 120.
The differential CPW transmission line 120 is positioned in a substantially parallel relationship with each other, and is disposed on both sides so as to sandwich the two signal lines 121 and 122 for transmitting signals and the signal lines 121 and 122. The ground portions 123 and 124 and a ground shield (bottom conductor) 125 on the bottom surface connected to the ground portions 123 and 124 are configured. The two signal lines 121 and 122 are surrounded by ground portions 123, 124, and 125 on both sides and three sides.

Here, XX ′ is an axis of line symmetry, w is the width of the signal line, s is the distance between the signal lines, and g is the distance between the signal line and the side surface of the ground portion.
The signal line is composed of the top layer metal (top metal), and the ground plane is composed of all metal layers (conductor layers) including the top metal and via (VIA) layers that connect the metals to each other. Yes. The lowermost metal is used as a ground shield.

FIG. 12B is a cross-sectional view of the transmission line in FIG. 12A taken along line YY ′.
Here, as already described with reference to FIG. 12A, w represents the width of the signal line, s represents the distance between the signal lines, g represents the distance between the signal line and the side surface of the ground portion, and FIG. ), H1 represents the distance between the signal lines 121 and 122 and the bottom conductor 125, and h2 represents the distance between the bottom conductor and the substrate (for example, Si substrate).
From the viewpoint of shielding, designing with g≈h1≈s / 2 is preferable because the electric and magnetic fields are uniformly distributed.

FIG. 13A is a diagram showing an electric field distribution in the differential mode in the differential CPW transmission line 120 described with reference to FIGS. 12A and 12B.
The differential mode refers to a case where a signal component or noise component of interest flows in two signal lines in opposite directions. Here, the arrow represents the electric field and its direction, and the portion indicated by a black dot in the circle represents a state in which the signal component moves from the far side to the near side in the signal line, and is represented by a cross in the circle. The part represents a state in which the signal component moves away from the near side in the signal line.

At this time, in a normal CPW transmission line, g1 and h1 <s / 2 are often selected so that the electric field is not concentrated between the two signal lines (where g1 is a specific value of g described above). is there).
Next, FIG.13 (b) is a figure which shows the electric field distribution in the common mode in the differential CPW type | mold transmission line 120 demonstrated with reference to Fig.12 (a) and FIG.12 (b).
The common-mode mode refers to a case where the signal component and noise component of interest flow in two signal lines in the same direction. Here, the arrow indicates the electric field and the direction thereof, and the portion indicated by a cross in the circle indicates a state in which the signal component moves away from the near side in the signal line.

FIG. 13A is compared with FIG. Comparing on the right side or the left side with respect to XX ′ in the figure, it can be seen that there is no great difference between the two except for the electric field that goes back and forth between the signal lines. This is because a normal CPW transmission line is designed based on the conditions of g1, h1 <s / 2.
Further, FIG. 13C is a diagram showing the magnetic field distribution in the differential mode in the differential CPW transmission line described with reference to FIGS. 12A and 12B. FIG. 13D is a diagram illustrating the common-mode magnetic field distribution in the differential CPW transmission line described with reference to FIGS. 12A and 12B. Here, the arrows represent the magnetic field and its direction.

FIG. 13C is compared with FIG. Similar to the electric field distributions in FIGS. 13A and 13B, when compared on the right side or the left side with respect to XX ′ in the drawings, both follow the law of Ampere's right-hand thread, and there is no significant difference between the two. I understand that.
FIG. 14A shows the frequency characteristic of the insertion loss of the transmission line in the differential mode when a differential signal is applied. FIG. 14B shows the frequency characteristic of the insertion loss of the transmission line in the in-phase mode when the in-phase signal is applied.

As shown in the figure, in a normal CPW type transmission line designed based on the conditions of g1, h1 <s / 2, there is no difference in frequency characteristics in both the differential mode and the common mode, and the frequency is substantially flat. It can be seen that it exhibits characteristics. As described above, in the conventional CPW type transmission line, the insertion loss is not attenuated in any of the differential mode and the common mode.
However, in recent years, in transmission lines, removal of common-mode signal noise (common mode noise), which is a main cause of skew increase and electromagnetic radiation, has been demanded.
In order to meet this demand, for example, a common mode noise filter as shown in Patent Document 1 has been proposed. By inserting this common mode noise filter into the transmission line, it is possible to reduce the common mode noise of the signal propagating through the differential signal line.

JP 2005-64976 A

However, this common mode noise filter uses a magnetic material to attenuate common mode noise (common-mode noise) with magnetic loss, and is difficult to realize in the normal silicon semiconductor manufacturing process. There is a problem that it is not easy to realize in the same chip.
The present invention has been made in view of the above situation, can attenuate common mode noise, can be realized in a normal silicon semiconductor manufacturing process, and is integrated into a silicon semiconductor circuit in the same chip. An object of the present invention is to provide a transmission line and a transmission device that function as a mountable common mode noise filter.

In order to achieve the above object, the present invention proposes the following circuits.
(1) two signal lines provided in parallel at a predetermined interval along the in-plane direction of the first virtual plane and to which a differential signal is applied ;
Each predetermined length provided at a predetermined interval along the in-plane direction of the second virtual plane different from the first virtual plane and arranged in a direction intersecting with the two signal lines when seen in a plan view A shield body configured to include each floating shield piece that is a plurality of conductors of
Equipped with a,
The length of the difference corresponding to the length of each floating shield piece and the interval between the two signal lines is proportional to the frequency of the in-phase component attenuated from the differential signal propagating through the two signal lines. A transmission line characterized by being in a relationship .
In the transmission line of (1), common mode noise can be attenuated by the action of the two signal lines and the shield body.
In the transmission line of (1), the length of the difference corresponding to the length of each floating shield piece and the distance between the two signal lines is particularly determined from the signal propagating through the two signal lines. Since it is proportional to the frequency of the in-phase component to be attenuated, a desired signal attenuation characteristic can be obtained by selecting the length of the difference.

(2) two signal lines provided in parallel at a predetermined interval along the in-plane direction of the first virtual plane, to which a differential signal is applied ;
A projection image obtained by projecting the two signal lines onto the second virtual plane provided in parallel with each other at a predetermined interval along the in-plane direction of the second virtual plane parallel to the first virtual plane. A shield body configured to include each floating shield piece that is a plurality of conductors of each predetermined length arranged in a direction crossing the extending direction of
Equipped with a,
The length of the difference corresponding to the length of each floating shield piece and the interval between the two signal lines is proportional to the frequency of the in-phase component attenuated from the differential signal propagating through the two signal lines. A transmission line characterized by being in a relationship .
In the transmission line of (2), common mode noise can be attenuated by the action of the two signal lines and the shield body.
In the transmission line of (2) above, the length of the difference corresponding to the length of each floating shield piece and the interval between the two signal lines is particularly determined from the signal propagating through the two signal lines. Since it is proportional to the frequency of the in-phase component to be attenuated, a desired signal attenuation characteristic can be obtained by selecting the length of the difference.

(3) The two signal lines are constituted by an upper metal layer formed by a silicon semiconductor manufacturing process, and the shield body is constituted by a lower metal layer formed by the silicon semiconductor manufacturing process. The transmission line according to (1) or (2), wherein the transmission line is a thing.
In the transmission line of (3) above, the transmission line is formed by a normal silicon semiconductor manufacturing process, particularly in the transmission line of (1) or (2).

(4) The transmission line according to (3), wherein the two signal lines and the shield body are configured to be integrated with a silicon semiconductor circuit in a predetermined same chip.
In the transmission line of (4) above, the transmission line of (3) is particularly suitable for mass production because the transmission line is formed by a normal silicon semiconductor manufacturing process, and quality uniformity can be ensured.

(5) The transmission line according to any one of (1) to (4), wherein the intersecting direction is an orthogonal direction.
In the transmission line of (5) above, in particular in each transmission line of (1) to (4), each floating shield piece is a projection when two signal lines are projected onto the second virtual plane. Since the arrangement is along the direction intersecting with the extending direction of the image, unnecessary electromagnetic linkage between the two signal lines is avoided.

(6) The transmission line according to any one of (1) to (5), wherein a length of each floating shield piece is longer than an interval between the two signal lines.
In the transmission line of (6) above, particularly in the transmission line of any one of (1) to (5), the length of each floating shield piece is configured to be longer than the interval between the two signal lines. As a result, it is possible to obtain such characteristics that the suppression of common mode noise becomes significant at a lower frequency.

( 7 ) further comprising a grounded substrate;
The shield body is disposed at a predetermined interval from the substrate,
The transmission line according to any one of (1) to ( 6 ), wherein the two signal lines are arranged at a predetermined distance from the shield body.
In the transmission line ( 7 ) above, particularly in the transmission line of any one of (1) to ( 6 ), the two signal lines are arranged with a predetermined distance from the shield body. A specific signal attenuation characteristic can be obtained according to the interval.

( 8 ) The transmission line according to any one of (1) to ( 7 ) above,
A terminator connected to both ends of the transmission line;
A transmission apparatus comprising:
With the transmission device of ( 8 ), a transmission device capable of attenuating common mode noise by the action of the two signal lines and the shield body is obtained.

( 9 ) Further, another transmission line having a plurality of conductors spaced apart from each other between the plurality of floating shield pieces of the transmission line is provided between the transmission line and the terminator. ( 8 ) The transmission apparatus characterized by the above.
In the transmission device of ( 9 ), in-phase components can be efficiently removed particularly in the transmission device of (8), and the length between terminals of the transmission device can be shortened due to the effect of shortening the wavelength of the transmission line. It is possible to reduce the size.

(1 0 ) The terminator takes a value that matches the characteristic impedance of the transmission line for the differential component of the signal propagating through the two signal lines, and propagates through the two signal lines. The transmission device according to ( 8 ) or ( 9 ), wherein the in-phase component of the signal is different from the characteristic impedance of the transmission line.
In the transmission device of (1 0 ), in the transmission device of ( 8 ) or ( 9 ), the differential component of the signal propagating through the two signal lines is not reflected as much as possible, and the in-phase component is reflected well. The transmission apparatus is realized.

  According to the present invention, common mode noise can be attenuated. In the specific mode, it can be realized in a normal silicon semiconductor manufacturing process, and in the specific mode, it can be mounted so as to be integrated with a silicon semiconductor circuit in a predetermined same chip.

It is a figure which shows the transmission line as embodiment of this invention. It is a figure of the equivalent circuit for demonstrating operation | movement of the floating noise filter (transmission line) as embodiment of this invention. It is a conceptual diagram for demonstrating operation | movement of the floating noise filter (transmission line) as embodiment of this invention. It is a figure which shows the frequency characteristic of the insertion loss of the transmission line as embodiment of this invention. It is a figure which shows the transmission apparatus which concerns on Example 1 of this invention. It is a figure which shows the frequency characteristic of the insertion loss of the transmission apparatus of FIG. It is a figure which shows the transmission apparatus which concerns on Example 2 of this invention. It is a figure which shows the structural example of the termination | terminus device applied to the transmission apparatus of FIG. It is a figure which shows the transmission apparatus which concerns on Example 3 of this invention. It is a schematic diagram which shows the relationship between the space | interval of the floating shield piece applied to the transmission apparatus of FIG. 9, and the wavelength of a signal. It is a schematic diagram which shows the effect | action of wavelength shortening (miniaturization) in the transmission apparatus of FIG. It is a block diagram of the conventional differential CPW type | mold transmission line. It is a figure which shows the electric field distribution in the differential mode of the differential CPW type | mold transmission line of FIG. It is a figure which shows the frequency characteristic of the insertion loss of the differential CPW type | mold transmission line of FIG.

Hereinafter, the present invention will be clarified by describing embodiments of the present invention in detail with reference to the drawings.
Fig.1 (a) is a figure which shows the transmission line as embodiment of this invention, and is the figure seen from the upper part with respect to the board | substrate.
FIG. 1B is a cross-sectional view of the transmission line in FIG. 1A cut along line YY ′.
This transmission line is configured as a common mode noise filter, and has a filter function for attenuating common mode noise. Therefore, hereinafter, the transmission path 100 is appropriately referred to as a common mode noise filter.

The common mode noise filter 100 includes two signal lines 101 and 102 and a plurality of floating shield pieces 110-1, 110-2, 110-3 disposed below the signal lines 101 and 102. ..., 110-n-2, 110-n-1, 110-n (hereinafter, appropriately referred to as floating shield).
These two signal lines 101 and 102 are provided along the in-plane direction of the first virtual plane VP1 represented by a virtual line in FIG. 1B, and a plurality of floating shield pieces are provided. 110-1, 110-2, 110-3,..., 110-n-2, 110-n-1, 110-n are second virtual planes VP2 represented by phantom lines in FIG. It is provided along the in-plane direction.

  Then, two signal lines 101 and 102 provided in parallel at a predetermined interval along the in-plane direction of the first virtual plane VP1, and a second virtual plane VP2 parallel to the first virtual plane VP1 Along the in-plane direction, they are provided in parallel with each other at a predetermined interval, and are arranged in a direction intersecting with the extension direction of the projected image when the above-described two signal lines 101 and 102 are projected onto the second virtual plane VP2. Each floating shield piece 110-1, 110-2, 110-3,..., 110-n-2, 110-n-1, 110-n, each of which is a plurality of conductors each having a predetermined length. A transmission line 100 is configured including the shield body 110.

  As described above, the plurality of floating shield pieces 110-1, 110-2, 110-3,..., 110-n-2, 110-n-1, 110-n are arranged in parallel to each other. As shown in FIG. 1A, the extension direction of the projected image of the two signal lines 101 and 102 on the second virtual plane VP2 and the direction in which the plurality of floating shield pieces intersect each other are at right angles or substantially They are arranged at right angles. This arrangement is for avoiding unnecessary linkage of electromagnetic fields.

Further, each of the floating shield pieces 110-1, 110-2, 110-3,..., 110-n-2, 110-n-1, 110-n has the same length, and is the end of the floating shield piece. When viewed from above, the portion protrudes outward from the signal lines 101 and 102 by a predetermined length, and this portion is referred to as a protruding portion of the floating shield piece.
In FIG. 1, XX ′ is an axis of line symmetry of the common mode noise filter, t is the width of the conductor of the floating shield piece, d is the distance between the conductors of the floating shield piece, w is the width of the conductor of the signal line, s Is the interval between the conductors of the signal line, and ov is the length of the protruding portion of the floating shield piece.

The length ov of the protruding portion can be set to an arbitrary value, but is set to a predetermined value that matches the frequency of the common mode noise to be attenuated.
In other words, the above-described floating shield pieces 110-1, 110-2, 110-3,..., 110-n-2, 110-n-1, 110-n are the same virtual plane (second Are formed on the virtual plane VP2). The surface on which these floating shield pieces are formed (second virtual plane VP2) and the virtual plane on which two signal lines are formed (first virtual plane VP1) are parallel to each other as described above. It is arranged as follows.

Further, both virtual planes VP1 and VP2 are arranged parallel to each other with respect to the surface of the silicon substrate 1200.
Here, w is the width of the conductor of the signal lines 101 and 102, h1 is the distance from the signal line to the floating shield piece (shield body 110), and h2 is the floating shield piece (shield body 110) to the substrate (for example, the silicon substrate 1200). Distance).
The common mode noise filter 100 having the above configuration can be realized in a normal silicon semiconductor manufacturing process. For example, the floating shield piece can be realized by a lower metal layer, and the signal line can be realized by an upper metal layer. . Furthermore, it can be realized in the same chip so as to be integrated with the silicon semiconductor circuit.

  The floating shield pieces 110-1, 110-2, 110-3,..., 110-n-2, 110-n-1, 110-n are electromagnetically and electrostatically connected to the signal lines 101, 102. Although they are coupled, they are electrically and physically floating. Floating shield pieces 110-1, 110-2, 110-3,..., 110-n-2, 110-n-1, 110-n and the signal lines 101, 102 are insulated from, for example, SiO2. It is electrically separated by the body. The floating shield pieces 110-1, 110-2, 110-3,..., 110-n-2, 110-n-1, 110-n and the signal lines 101, 102 are, for example, a semiconductor substrate such as a silicon substrate. Formed above, the substrate is grounded.

  In the above-described embodiment, the first virtual plane VP1 and the second virtual plane VP2 are parallel, and the floating shield pieces 110-1, 110-2, 110-3,. -N-2, 110-n-1, and 110-n are parallel, and further, the extension direction of the projected image and the floating shields when the two signal lines 101 and 102 are projected onto the second virtual plane VP2. The pieces 110-1, 110-2, 110-3,..., 110-n-2, 110-n-1, 110-n were intersecting directions (orthogonal directions in the above example). . However, even if the first virtual plane VP1 and the second virtual plane VP2 in the above are not strictly parallel, a corresponding effect can be expected, and the intersecting direction is not necessarily strictly orthogonal. The effect can be expected.

  Therefore, the above-described floating noise filter (transmission line) according to the embodiment of the present invention includes two signal lines 101 provided in parallel at predetermined intervals along the in-plane direction of the first virtual plane VP1. 102 and a second virtual plane VP2 that is different from the first virtual plane VP1 are provided at predetermined intervals along the in-plane direction of the second virtual plane VP2, and in a direction intersecting the two signal lines 101 and 102 when viewed in plan Including floating shield pieces 110-1, 110-2, 110-3,..., 110-n-2, 110-n-1, 110-n, which are a plurality of conductors of a predetermined length. Even if the transmission line is characterized by including the shield body 110 configured, the essence as a technical idea is not slightly different.

Next, the operation of the floating noise filter according to the embodiment of the present invention will be described using equations with reference to FIG.
FIG. 2A shows an equivalent circuit of a lossless transmission line having a unit length U0 when there is no floating shield (shield body). Here, L represents an inductor per unit length U0 of the transmission line, and C represents a capacity per unit length U0 of the transmission line. At this time, the characteristic impedance Z0 is Z0 = √ (L / C). In order to simplify the model, the parasitic resistance between the substrate and the ground is ignored.

Next, FIGS. 2B and 2C show an equivalent circuit of a lossless transmission line having a unit length U0 in the case where there is a floating shield. Here, L1 represents an inductor per unit length U0 of the floating shield, and C represents a capacity per unit length U0 of the floating shield.
In this equivalent circuit, there are C, L1, and C1 portions connected in series, and common mode noise is suppressed by series resonance of the series connection portions.

From FIG. 2C, in the unit length U0, when the input voltage is Vin and the output voltage is Vout,
(Vout−Vin) / jωL1 = (Vout−0) / Z1 = 0
here,
Z1 = jωL1-j (1 / ωC-1 / ωC1)
= J {(ω ² C · C1 · L1- (C + C1)) / ωC · C1}
Therefore,
Vout · (1 / jωL1-1 / Z1) = Vin / jωL1
At this time, the transfer function is
Vout / Vin = Z1 / (Z1 + jωL1)
It can be expressed. From this, it can be seen that the common mode loss is maximized at Z1 = 0, that is, in series resonance. The condition of Z1 = 0 is
ω ² C · C1 · L1− (C + C1) = 0
Than,
ω = √ {(C + C1) / C · C1 · L1}
It is. From the above equation, it can be seen that ω decreases as C1 and L1 increase.

Thus, it can be seen that common mode noise can be suppressed if there is a floating shield. Furthermore, when the length of the floating shield (S + 2 × (W + ov)) becomes longer (the protruding portion ov becomes longer), C1 and L1 become larger and ω becomes smaller, that is, the suppression of common mode noise has a lower frequency. It turns out that becomes remarkable.
That is, each floating shield piece 110-1, 110-2, ..., 110-n lengths of the (S + 2 × (W + ov)), of the difference each corresponding to the spacing S of the two signal lines 101, 102 The length (length ov of the protruding portion) is proportional to the frequency of the in-phase component at which the signal propagating through the two signal lines 101 and 102 is attenuated. Therefore, a desired signal attenuation characteristic can be obtained by selecting the difference length ov .

Next, the operation of the floating noise filter according to the embodiment of the present invention will be described with reference to FIG.
FIG. 3A is a diagram illustrating a state in which a differential signal (differential current) flows through the signal lines 101 and 102 in order to explain the transmission line according to the embodiment of the present invention. In the figure, reference numeral 110 denotes a shield body 110.
A differential signal is applied to the transmission line shown in FIG. 1 above realized on a silicon substrate. The electric field behaves as shown in FIG. The electric field radiated from one signal line 101 (102) floats on the other signal line 102 (101) serving as a return path in a layer between the signal lines (silicon layer, insulating layer, etc.) and low impedance. Reach via the shield. Here, the return path generally refers to the return path of signal current (return current path), and the path with the lowest impedance to the ground is said to be the return path.

In the embodiment of FIG. 3A, as described above, the other signal line 102 (101) functions as a return path with respect to one signal line 101 (102), so there is no need to perform separate grounding. .
Here, since some electric fields cannot reach the other signal line and are lost, the frequency characteristic of the insertion loss of the transmission line is as shown in FIG. However, since a large amount of electric field can be collected by the floating shield having the protruding portion having a predetermined length, insertion loss is reduced.
As shown in FIG. 4A, when the length ov of the protruding portion is 100 μm (indicated as “protruding length” in the drawing) and ov is 20 μm (indicated as “protruding short” in the drawing), It can be seen that the longer the length ov , the smaller the insertion loss.
FIG. 3B is a diagram illustrating a state in which an in-phase signal (differential current) flows through the signal line in order to explain the transmission line as the embodiment of the present invention.

The in-phase signal is applied to the transmission line shown in FIG. 1 above realized on a silicon substrate. The electric field behaves as shown in FIG. In this case, since the return path is a ground existing on the substrate, the signal line behaves like a supply point for supplying an electric field to the floating shield (shield body 110), and the floating shield behaves like a dipole antenna.
Therefore, the frequency characteristic of the insertion loss of the transmission line is as shown in FIG. 4B, and has a resonance point due to the floating shield that can be regarded as a dipole antenna. It can be selectively suppressed. That is, it is understood that the filter functions as a common mode noise filter having wavelength selectivity.

As shown in FIG. 4 (b), when the length ov of the protruding portion is compared to 100 μm and 20 μm, the longer the length ov of the protruding portion, the more the resonance occurs at a relatively low frequency. The shorter ov , the higher the frequency. Note that the resonance point when the length ov of the protruding portion is short is not shown and is outside the range on the high frequency side.
Thus, the transmission line provided with the floating shield can selectively remove the in-phase signal. Further, since the differential signal return path and the in-phase signal return path are separated, the loss of the differential signal and the high attenuation of the in-phase signal can be achieved simultaneously.

Example 1
Next, Example 1 according to the above-described embodiment of the present invention will be described with reference to the drawings.
FIG. 5 is a diagram illustrating a transmission apparatus according to Example 1 according to the embodiment of the present invention. In this transmission apparatus, a common mode noise filter which is the transmission line 100 according to the embodiment of the present invention shown in FIG. 1 is connected between the two transmission lines 501 and 502 at both ends which also serve as an input terminal and an output terminal. The configuration is shown.
In the common mode noise filter 100, the length of the floating shield piece (length of the protruding portion) is adjusted so that the attenuation of the common mode noise at a desired frequency is maximized.

FIG. 6 is a diagram illustrating the frequency characteristics of insertion loss when a differential signal including an in-phase component (for example, in-phase noise) is applied to the transmission device illustrated in FIG. 5 having a protruding portion of 100 μm.
In FIG. 6, the differential signal shows a monotonically decreasing characteristic with respect to the frequency, but the in-phase component has a notch and the in-phase component is attenuated at a predetermined frequency. It can be seen that the common-mode rejection ratio is large near the notch. This example shows a case where the in-phase signal rejection ratio at 27 GHz is 20 dB, which is a sufficient value in actual use. This embodiment is particularly useful as a common mode noise filter formed on a silicon chip that is suitable for a high-frequency signal band of 10 GHz or more.
As described above, in the embodiment described with reference to FIGS. 5 and 6, the in-phase signal can be selectively removed.

(Example 2)
Next, Example 2 according to the above-described embodiment of the present invention will be described with reference to the drawings.
FIG. 7 is a diagram illustrating a transmission apparatus according to Example 2 according to the embodiment of the present invention. This transmission apparatus has a configuration in which a common mode noise filter, which is the transmission line 100 of the present invention shown in FIG. 1, is connected between two transmission lines 501 and 502 at both ends that also serve as an input terminal and an output terminal. Terminators 701 and 702 are respectively added to the two transmission lines 501 and 502 at both ends.
The terminators 701 and 702 are configured to reflect the common-mode signal so as to match the differential signal with the characteristic impedance of the transmission line. The in-phase component can be further attenuated by arranging the standing wave of the in-phase signal by the terminators 701 and 702.

FIG. 8 is a diagram illustrating a configuration example of the terminators 701 and 702.
The terminator illustrated in FIG. 8A includes resistance elements R81 and R82 that are connected to the terminal portions of the two signal lines 801 and 802.
As a condition of the terminator, the differential signal is required to be matched with the characteristic impedance of the transmission line so that the differential component is not reflected. The in-phase signal is required to be sufficiently larger or smaller than the characteristic impedance of the transmission line so as to reflect as much as possible.

As an example, consider the case where the characteristic impedance of the transmission line in the most common differential is 100Ω and the characteristic impedance of the transmission line in the same phase is 25Ω. According to this terminator, as shown in FIG. 8B, since it is regarded as 100Ω as a terminator in the case of differential, it can be seen that the differential signal is not reflected. Further, as shown in FIG. 8C, since the terminator in the case of the in-phase is considered to be open (resistance value is infinite), it can be seen that the in-phase signal is totally reflected.
In this way, a standing wave having a frequency component to be attenuated can be generated, and by adjusting the length of the floating conductor group according to the amplitude of the standing wave generated in the filter, the in-phase signal is attenuated. Can be increased.

(Example 3)
Next, Example 3 according to the above-described embodiment of the present invention will be described with reference to the drawings.
FIG. 9 is a diagram illustrating a transmission apparatus according to Example 3 according to the embodiment of the present invention. This transmission apparatus includes a plurality of common mode noise filters (in the example shown in the figure) that are the transmission lines 100 of the present invention shown in FIG. 1 between two transmission lines 901 and 902 at both ends that also serve as input terminals and output terminals. 100a, 100b, and 100c) are connected, and terminators 903 and 904 are added to the two transmission lines 901 and 902 at both ends, respectively.

The terminators 903 and 904 match the differential signal and reflect the in-phase signal as in the second embodiment.
Here, each of the plurality of common mode noise filters 100a, 100b, and 100c has a different spacing d between the floating shield pieces. The interval between the floating shield pieces of the common mode filters 100b and 100c is d1, and the interval of the floating shield pieces of the common mode filter 100a is d2, and d2 << d1.

Common mode filters 100b and 100c having a narrow spacing d of the floating shield pieces are arranged where the standing wave of the in-phase signal is increased by the terminator, and the common gaps d of the floating shield pieces are relatively wide. By disposing the mode filter 100a on both sides, the in-phase component can be further attenuated.
The narrower the distance d between the floating shield pieces, the higher the effective relative dielectric constant εr. In addition, the wavelength λeff of the electromagnetic wave passing through the dielectric is λ0 when the wavelength in vacuum is λ0.
λeff = λ0 / εr
It is known that the wavelength λeff becomes shorter as the effective relative dielectric constant εr of the dielectric becomes higher.
Therefore, it can be seen that the smaller the distance d between the floating shield pieces, the shorter the wavelength of the signal, that is, more waves can be distributed in a limited length.

  FIG. 10 is a diagram schematically showing the relationship between the interval between the floating shield pieces and the signal wavelength. FIG. 10A shows a state of propagation of the waveform (wavelength λ1) when the distance between the floating shield pieces is d1, and FIG. 10B shows the waveform (wavelength λ2) when the distance between the floating shield pieces is shorter than d2. The state of propagation is shown. It can be seen that a larger number of waves can be distributed in a limited length when the distance between the floating shield pieces is shorter as shown in FIG. Note that the effective relative dielectric constant εr also changes when the distance d between the floating shield pieces changes, that is, the characteristic impedance also changes, and signal reflection occurs here as well.

  FIG. 11 is a diagram illustrating a state of signals in each block. In the transmission lines (common mode filter) 100b and 100c in which the distance between the floating shield pieces is d1, the wavelength is λ1, and in the transmission line (common mode filter) 100a in which the distance between the floating shield pieces is d2, the wavelength is λ2. Terminators 903 and 904 match the differential signal and reflect the in-phase signal. A differential signal and an in-phase signal are reflected by the boundary between the transmission lines 100b and 100c and the transmission line 100a where the distance d of the floating shield pieces changes.

Since the electric field is confined in the transmission line 100a, the in-phase component can be efficiently removed, and the length between the terminals of the transmission apparatus is shortened by the effect of shortening the wavelengths of the transmission lines 100b, 100c, and 100a. Can be reduced in size.
As described above, the distance (density) of the floating shield pieces corresponding to the standing wave wavelength in one transmission line corresponds to the standing wave wavelength in the transmission line connected before and after the one transmission line. By changing the effective relative permittivity by making it different from the spacing (density) of the floating shield pieces to be used, the common-mode signal is attenuated more significantly by using the accompanying electromagnetic confinement effect. Can do.
Furthermore, by adjusting the amplitude of the standing wave and the length of the floating shield piece, it is possible to maximize the common-mode signal attenuation within a predetermined area.

100, 100a, 100b, 100c .. Common mode noise filters 101, 102... 110, 110-2,..., 110-n Floating shield piece 120... Differential CPW transmission lines 121 and 122. …………………… Signal lines 123, 124, 125 ……………………… Ground portions 501, 502 ………………………………… Transmission lines 701, 702 ……… ………………………… Terminators 801, 802 ………………………………… Signal lines 901,902 ………………………………… Transmission line 903 904 ………………………………… Terminator 1200 ………………………………………… Silicone group

Claims (10)

Two signal lines provided in parallel at predetermined intervals along the in-plane direction of the first virtual plane, to which a differential signal is applied ;
Each predetermined length provided at a predetermined interval along the in-plane direction of the second virtual plane different from the first virtual plane and arranged in a direction intersecting with the two signal lines when seen in a plan view A shield body configured to include each floating shield piece that is a plurality of conductors of
Equipped with a,
The length of the difference corresponding to the length of each floating shield piece and the interval between the two signal lines is proportional to the frequency of the in-phase component attenuated from the differential signal propagating through the two signal lines. A transmission line characterized by being in a relationship . Two signal lines provided in parallel at predetermined intervals along the in-plane direction of the first virtual plane, to which a differential signal is applied ;
A projection image obtained by projecting the two signal lines onto the second virtual plane provided in parallel with each other at a predetermined interval along the in-plane direction of the second virtual plane parallel to the first virtual plane. A shield body configured to include each floating shield piece that is a plurality of conductors of each predetermined length arranged in a direction crossing the extending direction of
Equipped with a,
The length of the difference corresponding to the length of each floating shield piece and the interval between the two signal lines is proportional to the frequency of the in-phase component attenuated from the differential signal propagating through the two signal lines. A transmission line characterized by being in a relationship .   The two signal lines are composed of an upper metal layer formed by a silicon semiconductor manufacturing process, and are composed of the shield body and a lower metal layer formed by the silicon semiconductor manufacturing process. The transmission line according to claim 1 or 2.   The transmission line according to claim 3, wherein the two signal lines and the shield body are configured to be integrated with a silicon semiconductor circuit in a predetermined same chip.   The transmission line according to claim 1, wherein the intersecting direction is an orthogonal direction.   The transmission line according to claim 1, wherein a length of each floating shield piece is longer than an interval between the two signal lines. Further comprising a grounded substrate;
The shield body is disposed at a predetermined interval from the substrate,
The transmission line according to any one of claims 1 to 6 , wherein the two signal lines are arranged at a predetermined distance from the shield body. The transmission line according to any one of claims 1 to 7 ,
A terminator connected to both ends of the transmission line;
A transmission apparatus comprising: In addition, another transmission line having a plurality of conductors spaced apart from each other between the plurality of floating shield pieces of the transmission line is provided between the transmission line and the terminator. The transmission apparatus according to claim 8 . The terminator takes a value matched to the characteristic impedance of the transmission line for the differential component of the signal propagating through the two signal lines, and is in phase with the signal propagating through the two signal lines. The transmission device according to claim 8 or 9 , wherein the component takes a value different from a characteristic impedance of the transmission line.

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