JP5292858B2 - Light guide and air filter and fan filter unit using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily view the state of the upstream side of an air filter from the downstream side, without moving toward the upstream side. <P>SOLUTION: The air filter 1 includes: a filtering material 2 folded and formed in a waveform; and a frame body 3 that holds the filtering material 2 in a predetermined shape while tightly bonding and fixing the filtering material 2 to the inner peripheral wall surface of the frame body 3. A light guide 4 of transparent material quality formed in a recessed and projection shape to be tightly bonded and fixed to the surface of the filtering material 2 is disposed so as to fit to the waveform of the folded air filter 1. The light guide 4 includes: recessed and projecting parts 4F constituting the recessed and projecting shape; and a base part 4G connecting the recessed and projecting parts 4F. Mountain parts 4A functioning as the tops of the recessed and projecting parts have the same inclination as that of the filtering material 2 folded and formed to the waveform, and are tightly bonded and fixed to the filtering material 2. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to an air filter used in an environment that requires clean air in a manufacturing apparatus for manufacturing a semiconductor, a flat panel display, or the like, or an inspection apparatus thereof.

  Conventionally, an air filter disposed on a ceiling surface of a clean room or the like, which is a space where clean air is required, is required to be able to easily confirm the upstream state from the downstream side. As shown in FIG. 6, as a filter support device for a clean unit main body 101 capable of confirming the operation status of a clean room ceiling surface facility, an operation display unit 103 (LED lamp) is mounted on a clean unit support frame 102 holding an air filter 1. Etc.) are known (see, for example, Patent Document 1).

JP-A-6-193929

  As such a conventional filter support device, a support frame into which the operation display of the upstream clean unit can be incorporated is required, and a special support frame must be used in terms of construction. In addition, the support frame needs to have a displayable frame width, and there is a problem in that the frame width requires a necessary cost, and it is required that the situation from the downstream side of the filter can be easily confirmed.

  SUMMARY OF THE INVENTION The present invention solves such a conventional problem, and an object thereof is to provide an air filter characterized by a light guide having transparency that can be visually recognized from the downstream side to the upstream side.

It means for solving the above-Ri Do of a material with a concavo-convex portion and the transparency was made uneven shape at the base of tightly joined and fixed in the bent with a filter medium formed into a corrugated shape, wherein the base the groove V-shaped in plan, a Raitogai de provided at least one or more.

By this means, the situation from the downstream side to the upstream side of the air filter can be visually recognized. Further, since the upstream light source is refracted by the V-shaped groove, the upstream state can be confirmed from any downstream direction.

  In addition, other means include an uneven portion and a base portion that are tightly bonded and fixed to a filter medium that is bent into a wave shape.
The light guide is made of a transparent material having a concavo-convex shape, and is provided with a pocket in the center portion of two opposing surfaces of the base portion or the concavo-convex portion side surface.

  By this means, hot melt can be injected into the pocket portion, so that the light guide and the filter medium can be securely fixed.

  In another aspect, the uneven portion is formed of at least one uneven portion.

  By this means, the filter medium can be easily and tightly fixed regardless of the installation location, and the situation from the downstream side to the upstream side of the air filter can be visually confirmed.

  Another means is characterized in that a flat portion is provided at the tip of the crest of the concavo-convex portion.

  By this means, the state of the upstream side of the air filter can be confirmed from the downstream side even with a weak light source.

  Further, another means is characterized in that an R surface is provided on a side surface of the tip of the peak portion.

  By this means, the light guide can be tightly joined and fixed without damaging the filter medium.

  Further, the other means is characterized in that an insertion depth adjusting rod is provided on two longitudinal surfaces of the base portion.

  By this means, the depth when the light guide is inserted can be adjusted.

  Another means is an air filter that uses a filter medium that is bent into a wave shape, and is inserted into a trough of the filter medium that is bent into a wave shape, and is tightly joined to the filter medium. This is an air filter in which a filter medium is sandwiched from both the front and back surfaces by a light guide made of a transparent material to be fixed.

  By this means, the situation from the downstream side to the upstream side of the air filter can be clearly seen, and an air filter that can be incorporated into a device such as a fan filter unit can be provided.

  The other means is an air filter characterized in that a light emitting means is provided upstream of the air filter, the light emitted from the light emitting means is received by the light guide, and the light of the light emitting means can be confirmed from the surface of the air filter. is there.

  By this means, it is possible to provide an air filter capable of confirming information such as strong, weak operation, stop, and alarm.

  Further, the other means includes a fan, a motor, a fan motor unit having them therein, a filter in the downstream thereof, and inserted into a trough portion of a filter medium formed by bending into a wave shape. The fan filter unit is provided with a light guide made of a transparent material that is tightly bonded and fixed to the surface, and an air filter that can confirm the upstream state from the downstream side.

By this means, it is possible to provide a fan filter unit in which the situation from the downstream side to the upstream side of the air filter can be visually recognized.

  ADVANTAGE OF THE INVENTION According to this invention, the light guide which can visually recognize the condition of the upstream from the downstream can be provided.

  Further, it is possible to provide a light guide that can be easily and tightly bonded to the filter medium and can visually recognize the situation from the downstream side to the upstream side of the air filter.

  In addition, by providing a flat portion at the tip of the crest or trough of the concavo-convex portion having transparency with the display function having the concavo-convex shape, a light that can visually recognize the situation from the downstream side to the upstream side of the air filter even with a weak light source A guide can be provided.

  Moreover, the light guide which does not damage a filter medium can be provided by providing R surface in the side surface of the peak part of the said uneven | corrugated | grooved part with the said uneven | corrugated shaped display function with transparency.

  In addition, by providing a V-shaped groove on the bottom that is the flat surface of the base, light can be diffused efficiently even with a weak light source, so that a light guide that can confirm the upstream state even from the downstream horizontal direction is provided. it can.

  Moreover, since a hot melt can be injected by providing a pocket in the center part of the two opposing surfaces of the base part or the concavo-convex part side surface, the filter medium and the light guide can be reliably bonded and fixed.

  Moreover, the light guide which can adjust the depth at the time of insertion can be provided by providing the flange for insertion depth adjustment in the longitudinal direction 2 surface in the said base part.

  Further, by providing the light guide on both the front and back surfaces of the filter medium, an air filter that can visually recognize the situation on the upstream side from the downstream side can be supplied.

  Further, it is possible to provide an air filter that is provided with a light emitting means upstream of the air filter, receives light emitted from the light emitting means by a light guide, and can confirm the light of the light emitting means from the surface of the air filter.

  In addition, a fan motor and a fan motor unit having them inside, and a filter at the downstream side thereof, inserted into a trough of a filter medium formed by bending into a wave shape, and tightly bonded and fixed to the filter medium By providing a light guide made of a transparent material on the surface, it is possible to provide a fan filter unit that can visually recognize the situation from the downstream side to the upstream side of the air filter.

Sectional drawing of the attachment state of the light guide of Embodiment 1 The perspective view of the light guide of Embodiment 1 The top view of the attachment state of the light guide of Embodiment 1 The perspective view of the attachment state of the light guide of Embodiment 1 The block diagram which shows the fan filter unit of the same Embodiment 2. Sectional drawing which shows the filter support apparatus of the conventional clean unit

Claim 1 The invention described in the present invention, Ri Do of a material with a concavo-convex portion and the transparency was made uneven shape at the base of tightly joined and fixed to the bent with a filter medium formed into a corrugated shape, the base On the plane
The groove V-shaped, having at least a one or more provided with Raitogai de, effect that can be visually recognized on the upstream side situation from the downstream side of the air filter. In addition, since light can be diffused efficiently even with a weak light source, the upstream state can be confirmed even from the downstream horizontal direction.

  In addition, it is made of a transparent material having an uneven shape composed of an uneven portion and a base portion that are closely bonded and fixed to a filter medium formed by bending into a wave shape, and the two surfaces facing the base portion or the uneven portion side surface A pocket is provided in the central portion, and hot melt can be injected into the pocket portion, so that the filter medium and the light guide can be reliably bonded and fixed.

The front Symbol uneven portion is characterized in that a combination of at least one or more irregularities, easily joined and fixed to the filter medium closely, to visually recognize the upstream status from the downstream side of the air filter Has the effect of being able to

Also, which is characterized in that a flat portion at the tip of the front Symbol uneven portion, an effect that can be visually recognized on the upstream side situation from the downstream side of the air filter in a weak light source.

Also, which is characterized in that a R-plane on the side surface of the front Symbol crest tip, when inserting the light guide into the filter medium, an effect that may be inserted without damaging the filter medium.

Further, as the eaves of the insertion depth adjustment with transparency having a display function before Symbol base is characterized in that provided in the longitudinal direction two surfaces, it is depth adjustment when inserting the light guide Has an effect.

Also, an air filter using a filter medium which is formed by bending a corrugated, a air filter provided with a light guide on both sides, be visually recognized on the upstream side situation from the downstream side of the air filter And an air filter that can be incorporated in a device such as a fan filter knit can be provided.

The front SL which a light-emitting unit on the back side of the air filter, receives the light emitted from the light emitting means to the light guide, and an air filter, characterized in that can check the light emitting means from the surface of the air filter, strong, It has the effect of providing an air filter that can confirm information such as weak operation, stop, and alarm.

Furthermore, fan motor and a fan motor unit having them therein, having a filter at its downstream portion, and inserted into the valley of the filter medium formed by bending a corrugated shape, tightly and filter medium It is a fan filter unit that has a light guide made of a transparent material to be bonded and fixed on the surface, and an air filter that can confirm the upstream state from the downstream side. The situation from the downstream side to the upstream side of the air filter can be visually confirmed. The fan filter unit can be provided.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
As shown in FIG. 1, the air filter 1 of the present invention has a filter medium 2 formed by bending into a wave shape, and the filter medium 2 is tightly joined and fixed to the inner peripheral wall surface of the frame 3 and held in a predetermined shape. A frame 3 is provided. Light guides 4 made of a transparent material having a concave and convex shape to be tightly joined and fixed to the filter medium 2 are provided as 4a and 4B on the front and back surfaces so as to be joined to the waveform of the bent air filter 1.

  FIG. 2 shows a perspective view of the light guide 4. The light guide 4 includes an uneven portion 4F that forms an uneven shape, and a base portion 4G that connects the uneven portion 4F. The peak portion 4 </ b> A, which is an uneven peak, has the same inclination as the filter medium 2 formed by bending into a wave shape, and is tightly bonded and fixed to the filter medium 2. The mountain portion 4A is composed of one or more mountains, but preferably three or more mountains.

  FIG. 4 is a perspective view showing a state in which the light guide 4 is mounted on both the front and back surfaces of the filter medium 2.

  The operation of the above configuration will be described. For example, as shown in FIG. 1, a lighting lamp 5 is provided on the upstream side of the air filter 1. The light from the lighting lamp 5 is received by the base 4G of the upstream light guide 4a provided on the upstream side of the filter medium 2. This light is emitted from the peak portion 4A after passing through the light guide 4a on the upstream side. The emitted light is taken into the downstream light guide 4b from the peak portion 4A of the downstream light guide 4b. The taken-in light is emitted downstream from the base 4G of the downstream light guide 4b. That is, the light emission state on the upstream side of the air filter 1 can be easily visually recognized from the downstream side.

  Moreover, the front-end | tip part 4B of the peak part 4A is provided with a flat flat surface, and will improve the transmission of light.

  Furthermore, the R surface 4C is provided at both ends of the tip portion 4B of the concavo-convex portion 4F, and the R surface 4C can prevent the filter medium from being damaged.

  Further, the bottom 4H of the base 4G is provided with a groove 4E, which has a function of refracting the light from the lighting lamp 5, so that the upstream state can be confirmed even from the downstream horizontal direction.

As shown in FIGS. 2 and 3, the light guide 4 is provided with a pocket 4I. The pocket 4I has a shape in which the center portions of both sides in the short direction of the bottom portion 4H are cut into a rectangle, and the depth thereof is less than half of the total length of the peak portion 4A. By injecting the hot melt 6 into the pocket 4I, the filter medium 2 and the light guide 4 can be reliably bonded and fixed.

  Further, as shown in FIG. 2, the light guide 4 can provide an insertion depth adjustment effect by providing the ridge 4D on the two longitudinal surfaces of the base 4G.

  In this embodiment, the light guide member is made of a transparent material such as acrylic or glass having transparency, and is manufactured by extrusion molding or injection molding, and has a strength that can be used for the light guide. What it has is sufficient.

  With the above configuration, the light from the lighting lamp 5 disposed on the downstream side of the air filter 1 is received by the upstream light guide 4a, and the light is transmitted to the downstream light guide 4b without being attenuated. Therefore, on the surface side of the air filter 1, light with high luminance can be viewed in a wide range.

  Further, the lighting lamp 5 is a status display lamp of the apparatus, and changes depending on the status, such as continuous flashing and different flashing times.

  In the above configuration, for example, the lighting lamp 5 is turned on as a display of a certain state (for example, operation of the air conditioner). The light of the lighting lamp 5 passes through the light guide 4 provided on the downstream side of the filter medium 2 of the air filter 1, and the light of the lighting lamp 5 can be visually recognized on the upstream side on the downstream side of the air filter 1. Therefore, the state of the air filter 1 can be confirmed quickly.

(Embodiment 2)
FIG. 5 is a configuration diagram of a fan filter unit equipped with a light guide and an air filter as shown in FIGS.

  As shown in the figure, the fan filter unit 8 of the present embodiment includes a fan motor unit 13 and an air filter 1 disposed on the downstream side thereof. The fan motor unit 13 includes a fan 11, a motor 10, and a box-shaped chamber 12 that accommodates the fan 11. A suction port 9 is provided on the top surface of the fan motor unit 13. The air filter 1 is provided on the downstream side of the box-shaped chamber 12. Here, the air filter 1 will be described as an example in which the light guide 4 having the uneven shape shown in FIGS. 1 and 2 is arranged. Between the fan motor unit 13 and the air filter 1, a lighting lamp 5 for displaying the operation state of the fan filter unit 8 and the like is provided. Information such as the operating state of the fan filter unit 8 displayed on the lighting lamp 5 is output from the control device 14 that controls the upstream fan motor unit 13. The display means 15 is an operation display lamp, an abnormality display lamp, or the like.

  In the above configuration, the operation display by the lighting lamp 5 is indicated by lighting of the lamp. This display content can be viewed from the downstream side through the light guide 4. The fan filter unit 8 purifies contaminated air containing dust sucked from the suction port 9 by the air filter 1 by the operation of the fan motor unit 13 and supplies it to the downstream side. Even if there is an information source on the upstream side by using the air filter 1 as in the present invention, the upstream side information (such as the operating condition of the fan filter unit 8) is confirmed without leaking contaminated air downstream. Will be possible.

  The air filter according to the present invention can confirm the operating state of the equipment on the upstream side. Therefore, it can be used for an air cleaning device such as a fan filter unit integrated with an air filter.

DESCRIPTION OF SYMBOLS 1 Air filter 2 Filter medium 3 Frame 4 Light guide 4a Upstream side light guide 4b Downstream side light guide 4A Mountain part 4B Tip part 4C R surface 4D 4E Groove 4F Concavity and convexity 4G Base part 4I Pocket 5 Point lamp 6 Hot melt 8 Fan Filter Unit 9 Suction Port 10 Motor 11 Fan 12 Chamber 13 Fan Motor Unit 14 Control Device

Claims (9)

Ri Do a material with a concavo-convex portion and the transparency was made uneven shape at the base of tightly joined and fixed to the bent with a filter medium formed into a corrugated shape,
The base is a light guide provided with at least one V-shaped groove on a plane . It consists of a transparent material with an uneven shape composed of an uneven part and a base part that are closely bonded and fixed to a filter medium formed by bending into a wave shape,
The light guide which provided the pocket in the center part of two surfaces which the said base or uneven | corrugated | grooved part side faces. The uneven portion is at least one or more of claims 1 or 2, wherein the light guide is characterized by a combination of irregularities. The light guide according to any one of claims 1 to 3 , wherein a flat portion is provided at a tip of the peak portion of the uneven portion. The light guide according to any one of claims 1 to 4 , wherein an R surface is provided on a side surface of the tip of the mountain portion. The light guide according to claim 1 , wherein a flange for adjusting an insertion depth is provided on two longitudinal surfaces of the base portion. A air filter using a filter medium which is formed by bending a corrugated air filter provided on the front and rear surfaces of the light guide according to any one of claims 1 to 6. 8. The air filter according to claim 7 , wherein a light emitting means is provided upstream of the air filter, the light emitted from the light emitting means is received by the light guide, and the light of the light emitting means can be confirmed from the surface of the air filter. 9. A fan filter unit comprising a fan motor unit including a fan and a motor, a chamber in which the fan motor unit is built, and an air filter according to claim 7 or 8 mounted in a downstream portion of the chamber.

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