JP5380822B2 - Air filter and fan filter unit equipped with it - Google Patents

Description

  The present invention relates to an air filter used in an environment that requires clean air in a manufacturing apparatus for manufacturing a semiconductor, a flat panel display, or the like, or an inspection apparatus thereof.

  Conventionally, an air filter disposed on a ceiling surface of a clean room or the like, which is a space where clean air is required, is required to be able to easily confirm the upstream state from the downstream side. As shown in FIG. 7, as a filter support device for the clean unit main body 102 capable of confirming the operation status of the clean room ceiling surface equipment, an operation display unit 104 (LED lamp) is mounted on a clean unit support frame 103 holding an air filter 101. Etc.) are known (see, for example, Patent Document 1).

JP-A-6-193929

  As such a conventional filter support device, a support frame into which the operation display of the upstream clean unit can be incorporated is required, and a special support frame must be used in terms of construction. In addition, the support frame needs to have a displayable frame width, and there is a problem in that the frame width requires a necessary cost, and it is required that the situation from the downstream side of the filter can be easily confirmed.

  The present invention solves such a conventional problem, and an object of the present invention is to provide an air filter or a fan filter unit capable of easily visually confirming or confirming the operation status of the fan filter unit from the downstream side.

The air filter of the present invention is an air filter formed of an inorganic fiber material or an organic fiber material in order to achieve the above object, wherein the entire filter frame or a part thereof is a transparent resin material, and the transparent resin material The air filter is characterized in that one or more light emitting means capable of displaying the operation state of the fan filter unit are attached.

  Another means is an air filter characterized in that the transparent resin material is acrylic or nylon resin.

Another means is an air filter characterized in that a transparent resin material portion is provided with an overhanging portion protruding to the air filter surface side.

  Another means is an air filter characterized by providing a light-scattering effect by providing a streak-like notch in the overhanging portion.

  By these means, an air filter can be obtained in which the situation from the downstream side to the upstream side of the air filter can be visually recognized.

  Another means is an air filter characterized in that one or more light emitting means attached to a transparent resin material is a high-intensity LED lamp. By this means, an air filter having a longer lamp life than a neon lamp or the like can be obtained.

  In another means, a fan filter unit having a fan, a motor, a fan motor unit having them inside, and a fan filter unit having a filter on the downstream side thereof, a transparent resin material is used for the entire filter frame or a part thereof. A fan filter unit comprising an air filter in which one or more light emitting means are embedded in a transparent resin material portion.

  Another means is a fan filter unit characterized by indicating the state of the fan filter unit by the emission color.

  Another means is a fan filter unit in which the light emitting means is a plurality of light sources arranged in a matrix, and the operation state of the fan filter unit is indicated by switching the light source to be lit.

  Another means is a fan filter unit in which a plurality of light sources are arranged in a matrix, and the operation state of the fan filter unit is indicated by the light sources blinking.

  Further, the other means is a fan filter unit which sounds a buzzer by an operation synchronized with the light emitting means.

  By these means, it is possible to obtain a fan filter unit that can visually and audibly confirm the situation from the downstream side to the upstream side of the air filter.

Another means is that one or more light-emitting means embedded in a transparent resin material portion and the power source are connected to each other by providing contact points on the mounting surface of the fan motor unit and the air filter. The fan filter unit is characterized in that both can be connected.

  This means eliminates the need to route the wiring between the light emitting means and the power source, and by attaching the air filter, the exchange work can be easily performed by connecting the respective contacts, for example, connectors.

  ADVANTAGE OF THE INVENTION According to this invention, the air filter which can visually recognize the driving | running state of a fan filter unit from the downstream of an air filter can be provided.

  Moreover, the fan filter unit which can confirm an operating condition easily from downstream can be provided by comprising the air filter and fan motor unit which provided the display means which light-emits on a transparent resin frame.

Configuration diagram of the air filter according to the first embodiment of the present invention. Configuration diagram of air filter of the first embodiment Configuration diagram of fan filter unit of Embodiment 1 Configuration diagram of fan filter unit of Embodiment 1 Configuration diagram of fan filter unit of Embodiment 1 Configuration diagram of fan filter unit of Embodiments 2 and 3 Sectional drawing which shows the filter support apparatus of the conventional clean unit

  The invention according to claim 1 of the present invention is an air filter formed of an inorganic fiber material or an organic fiber material, wherein a transparent resin material is used for the entire filter frame or a part of the filter frame, and the transparent resin material portion is used. The air filter is characterized in that one or more light emitting means are embedded, and has an effect that the operating condition of the fan filter unit can be visually recognized from the downstream side of the air filter.

  The invention described in claim 2 of the present invention is an air filter characterized in that the transparent resin material is acrylic or nylon resin, and it can be said that the operating condition of the fan filter unit can be visually recognized from the downstream side of the air filter. Has an effect.

The invention described in claim 3 of the present invention is an air filter characterized in that a transparent resin material portion is provided with an overhanging portion protruding to the air filter surface side, and the fan filter unit is operated from the downstream side of the air filter. It has the effect that the situation can be visually recognized.

  The invention according to claim 4 of the present invention is an air filter characterized by providing a light-scattering effect by providing a streak-like notch in the projecting portion, and the light source at the tip of the transparent resin material is more It has the effect of making it easier to see.

  The invention according to claim 5 of the present invention is an air filter characterized in that one or more light emitting means attached to a transparent resin material is a high-intensity LED lamp, which is an operation lamp as compared with a neon lamp or the like. Has the effect that it can be used for a long time.

  The invention according to claim 6 of the present invention is a fan filter unit having a fan, a motor, a fan motor unit having them therein, and a filter on the downstream side thereof, according to any one of claims 1-6. A fan filter unit comprising an air filter having one or more light emitting means attached thereto, and has the effect that the operating status of the fan filter unit can be visually recognized from the downstream side of the air filter.

  The invention according to claim 7 of the present invention is a fan filter unit characterized in that the state of the fan filter unit is indicated by the emission color, and the operation of the fan filter unit is performed by visually checking the emission color downstream of the air filter. It has the effect that the situation can be visually recognized.

  The invention according to claim 8 of the present invention is a fan filter unit characterized in that the light emitting means has a plurality of light sources arranged in a matrix and the state of the fan filter unit is indicated by switching the light source to be lit. The operation state of the fan filter unit can be visually recognized by visually recognizing the change of the emission color on the downstream side of the air filter.

  The invention according to claim 9 of the present invention is a fan filter unit in which a plurality of light sources are arranged in a matrix, and the state of the fan filter unit is indicated by blinking of the light sources.

  Thereby, it has the effect | action that the operating condition of a fan filter unit can be visually recognized by visually recognizing blinking operation | movement of the luminescent color downstream of an air filter.

  According to a tenth aspect of the present invention, there is provided a fan filter unit that sounds a buzzer by an operation synchronized with the light emitting means.

  By these means, it is possible to confirm the situation from the downstream side to the upstream side of the air filter, and it is possible to obtain a fan filter unit capable of confirming the driving situation visually and auditorily.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  According to an eleventh aspect of the present invention, the power source of the light emitting means is provided on the fan motor unit side, and the air filter is attached to the fan motor unit by providing contact points that join the fan motor unit and the air filter mounting surface. It is a fan filter unit characterized in that both can be connected simultaneously with attachment.

  This means eliminates the need to route the wiring between the light emitting means and the power source, and by attaching an air filter, the connectors can be connected to each other, so that the replacement work can be easily performed.

(Embodiment 1)
As shown in FIGS. 1 and 2, the air filter 1 of the present invention has a filter medium 2 and a filter medium 2 formed by bending in a wave shape so as to be densely attached to an inner peripheral wall surface of a frame 3 made of a transparent resin material. Bonded and fixed and held in a predetermined shape. A hole processing 4 is performed on a part of the frame 3 made of a transparent resin material, and an LED lamp 5 as a light emitting means is embedded in the hole processing.

  FIG. 3 shows a fan filter unit 11 using the air filter 1 in which the LED lamp 5 as described above is embedded in the frame 3. The fan filter unit 11 includes a fan motor unit 7 and an air filter 1. The fan motor unit 7 includes a motor 8 and a fan 9 in a chamber 10. The air filter 1 is provided on the downstream side of the fan motor unit 7 so as to cover the blowing portion. The wiring 6 of the LED lamp 5 provided in the air filter 1 is connected to a terminal block 12 that supplies power to the fan motor unit 7.

  With the above configuration, when power is supplied to the fan motor unit 7, the LED lamp 5 attached to the air filter 1 emits light, and the operating state can be easily visually recognized on the downstream side of the air filter 1.

Further, as shown in FIG. 5, the air filter 1 may be provided with a protruding portion 14 on the downstream side of the filter only at a portion where the LED lamp 5 is attached, and the LED lamp 5 may be embedded in the protruding portion 14. According to such a structure, since the light emission part protrudes in the filter downstream, it becomes easy to visually recognize.

  Further, a notch 15 may be provided at the tip. As a result, light confusion is promoted at the tip of the resin material, and the visibility at the tip is further improved.

  Also, as shown in FIG. 4, by providing the connector 16 on the mounting surface of the fan motor unit 7 and the air filter, the air filter 1 can be connected at the same time when the air filter 1 is mounted. There is no need to route the wiring in the motor unit 7 and the air filter 1 is attached so that the connectors 16 are connected to each other, so that the replacement work can be easily performed.

(Embodiment 2)
As shown in FIG. 6, a plurality of LED lamps 5 are attached as light emitting means to a frame 3 made of a transparent resin material. The wiring 6 of the LED lamp 5 is connected to a terminal block 12 that supplies power to the fan motor unit 7, so that the LED lamp 5 is turned on during operation and is turned off when stopped. Due to the difference in the lighting status of the LED lamp 5, the driving status can be easily visually recognized on the downstream side of the air filter 1.

  In addition, for example, by attaching two types of LED lamps 5, green light is lit during operation, and red light is lit when stopped, thereby making it possible to clarify the difference in driving conditions.

  Further, as shown in FIG. 6, a plurality of LED lamps 5 are arranged in a frame 3 made of a transparent resin material, all the LED lamps 5 are turned on during operation, and all the LED lamps are turned off when stopped. It is also possible to make 5 blink instead of turning off. By changing the lighting state of the LED lamp 5 at the time of driving and stopping, the user can be alerted and the operating status of the fan filter unit can be visually confirmed.

(Embodiment 3)
As shown in FIG. 6, a plurality of LED lamps 5 are attached to a frame 3 made of a transparent resin material, and two or more frames 3 to which the LED lamps 5 are attached are arranged. During the operation of the fan filter unit 11, a control circuit or the like is provided so that the LED lamps 5 are turned on only in one row installed in the center and the stop LED lamps 5 arranged on the left and right can be turned off. Conversely, when the fan filter unit is stopped, the LED lamp 5 installed in the center is turned off, and the LED lamps 5 mounted on both sides are turned on, so that the difference in the operating state is clarified visually on the downstream surface of the air filter 1. It is urged to be alerted by changing to, so that the change in the operating condition of the fan filter unit can be visually recognized.

  Further, when the fan filter unit is stopped, for example, by using a relay, the LED lamp 5 may be turned off and a circuit for operating the buzzer 13 shown in FIG. 4 may be configured. Thus, for example, when the vehicle is stopped, the operation status of the fan filter unit 11 can be confirmed by visually recognizing the operation lamp and the buzzer sound.

  The air filter and the fan filter unit according to the present invention can be used for facilities that require confirmation of the operation status from the downstream side.

DESCRIPTION OF SYMBOLS 1 Air filter 2 Filter medium 3 Frame body 4 Hole processing 5 LED lamp 6 Wiring 7 Fan motor unit 8 Motor 9 Fan 10 Chamber 11 Fan filter unit 12 Terminal block 13 Buzzer 14 Overhanging part 15 Notch 16 Connector

Claims (11)

An air filter formed of an inorganic fiber material or an organic fiber material, wherein a transparent resin material is used for the entire filter frame or a part thereof, and one or more light emitting means are embedded in the transparent resin material part. Air filter. 2. The air filter according to claim 1, wherein the transparent resin material is acrylic or nylon resin. The air filter according to claim 1 or 2, wherein an overhanging portion protruding toward the air filter surface side is provided in the transparent resin material portion . 4. The air filter according to claim 3, wherein a light scattering effect is provided by providing a streak-like notch in the projecting portion. The air filter according to claim 1, wherein the one or more light emitting means embedded in the transparent resin material portion is a high-intensity LED lamp. A fan comprising a fan, a motor, a fan motor unit having them therein, and a fan filter unit having a filter downstream thereof, comprising the air filter according to any one of claims 1 to 5. Filter unit. The fan filter unit according to claim 6, wherein the light emitting means indicates an operation state of the fan filter unit according to a light emission color. 7. The fan filter unit according to claim 6, wherein the light emitting means includes a plurality of light sources arranged in a matrix, and indicates the operating state of the fan filter unit by switching the light sources to be lit. 7. The fan filter unit according to claim 6, wherein the light emitting means is a plurality of light sources arranged in a matrix, and indicates the state of the fan filter unit by blinking the light sources. The fan filter unit according to claim 6, wherein a buzzer is sounded by an operation synchronized with the light emitting means. The power source of the light emitting means is provided on the fan motor unit side, and a contact point for joining the fan motor unit and the air filter to each other is provided so that the air filter can be attached to the fan motor unit and both can be connected simultaneously. The fan filter unit according to claim 6.

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