JP4803112B2 - Light guide and air filter and fan filter unit using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light guide capable of easily visualizing an upstream state of an air filter from a downstream side without moving to the upstream side. <P>SOLUTION: The air filter 1 is provided with a filter material 2 formed in a bent waveform and a frame body 3 tightly jointing and fixing the filter material 2 to an inner periphery wall face of the frame body 3 and retaining it in a given shape. A light guide 4 of a transparent material of a comb shape tightly jointing and fixing from the surface of the filter material 2 is provided so as to joint with the waveform of the bent air filter 1. The light guide 4 is formed of comb parts forming a comb shape and a base part coupling the comb parts. Hill parts to be hills of the comb have the same inclination as the filter material 2 formed bent in waveforms, and are to be tightly jointed and fixed to the filter material 2. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to an air filter used in an environment that requires clean air in a manufacturing apparatus for manufacturing a semiconductor, a flat panel display, or the like, or an inspection apparatus thereof.

Conventionally, an air filter disposed on a ceiling surface of a clean room or the like, which is a space where clean air is required, is required to be able to easily confirm the upstream state from the downstream side. As shown in FIG. 12, as a filter support device for a clean unit main body 101 capable of confirming the operation status of a ceiling surface facility in a clean room, an operation display unit 103 (LED lamp) is mounted on a clean unit support frame 102 holding an air filter 1. Etc.) are known (see, for example, Patent Document 1).
JP-A-6-193929

  As such a conventional filter support device, a support frame into which the operation display of the upstream clean unit can be incorporated is required, and a special support frame must be used in terms of construction. In addition, the support frame needs to have a displayable frame width, and there is a problem in that the frame width requires a necessary cost, and it is required that the situation from the downstream side of the filter can be easily confirmed.

  SUMMARY OF THE INVENTION The present invention solves such a conventional problem, and an object thereof is to provide an air filter characterized by a light guide having transparency that can be visually recognized from the downstream side to the upstream side.

  In order to achieve the above object, the air filter of the present invention is provided with a light guide made of a transparent material that is inserted into a trough portion of a filter medium formed by bending into a wave shape and is tightly bonded and fixed to the filter medium. It is a thing.

  Another means is to provide a light guide made of a transparent material having a comb shape composed of a comb portion and a base portion that are closely joined and fixed to a filter medium formed by bending into a wave shape. By this means, the situation from the downstream side to the upstream side of the air filter can be visually recognized.

  Another means is characterized in that the comb portion includes at least one mountain. By this means, the filter medium can be easily joined and fixed tightly, and the situation from the downstream side to the upstream side of the air filter can be visually confirmed.

  The other means is characterized in that a flat portion is provided at the tip of the comb portion. By this means, the state of the upstream side of the air filter can be confirmed from the downstream side even with a weak light source.

  In another aspect, the base is provided with chamfered surfaces at both ends. By this means, the upstream light source is refracted by the chamfered surface, so that the upstream state can be confirmed even from the downstream horizontal direction.

  Further, the other means is characterized in that a ridge for adjusting the insertion depth is provided on two opposing surfaces of the side surface of the base portion or the comb portion. By this means, it is possible to adjust the depth when the light guide is inserted and to fix the protective net.

  Further, the other means is characterized in that a hook for adjusting the insertion depth is provided on the entire circumference of the side surface of the base portion or the comb portion. By this means, it is possible to adjust the depth when the light guide is inserted and to fix the protective net, and since the ridges are provided on the entire four surfaces, the appearance can be improved.

  Another means is an air filter that uses a filter medium that is bent into a wave shape, and is inserted into a trough of the filter medium that is bent into a wave shape, and is tightly joined to the filter medium. An air filter having a light guide made of a transparent material to be fixed provided on the surface. By this means, the situation from the downstream side to the upstream side of the air filter can be visually recognized, and an air filter that can be incorporated into a device such as a fan filter knit can be provided.

  Another means is an air filter that uses a filter medium that is bent into a wave shape, and is inserted into a trough of the filter medium that is bent into a wave shape, and is tightly joined to the filter medium. This is an air filter in which a filter medium is sandwiched from both the front and back surfaces by a light guide made of a transparent material to be fixed. By this means, the situation from the downstream side to the upstream side of the air filter can be clearly seen, and an air filter that can be incorporated into a device such as a fan filter knit can be provided.

  The other means is an air filter characterized in that a light emitting means is provided on the back side of the air filter, the light emitted from the light emitting means is received by the light guide, and the light of the light emitting means can be confirmed from the surface of the air filter. is there. By this means, it is possible to provide an air filter capable of confirming information such as strong, weak operation, stop, and alarm.

  Further, the other means is an air filter characterized in that the light emitting means can change its emission color. By this means, it is possible to provide an air filter capable of confirming information such as strong, weak operation, stop, and alarm.

  Further, the other means includes a fan, a motor, a fan motor unit having them therein, a filter in the downstream thereof, and inserted into a trough portion of a filter medium formed by bending into a wave shape. The fan filter unit is provided with a light guide made of a transparent material that is tightly bonded and fixed to the surface, and an air filter that can confirm the upstream state from the downstream side. By this means, it is possible to provide a fan filter unit in which the situation from the downstream side to the upstream side of the air filter can be visually recognized.

  ADVANTAGE OF THE INVENTION According to this invention, the light guide which can visually recognize the condition of the upstream from the downstream can be provided.

  Further, it is possible to provide a light guide that can be easily and tightly bonded to the filter medium and can visually recognize the situation from the downstream side to the upstream side of the air filter.

  Further, by providing a flat portion at the tip of the comb portion having transparency and having a display function in the shape of the comb, a light guide that can visually recognize the situation from the downstream side to the upstream side of the air filter even with a light source can be provided.

  Further, by providing a chamfered surface that is larger than both ends of the comb-shaped valley portion having a comb-shaped display function and having transparency, it is possible to provide a light guide that can confirm the upstream state even from the downstream horizontal direction.

  In addition, a light guide capable of adjusting the depth at the time of insertion and fixing the protective net can be provided by providing a translucent insertion depth adjusting ridge having a comb-shaped display function on two surfaces in the longitudinal direction.

  In addition, by providing a transparent insertion depth adjustment collar having a comb-shaped display function on all four surfaces, the depth at the time of insertion can be adjusted and the protective mesh can be fixed, and the appearance can be improved. Can provide light guide.

  Further, the situation from the downstream side to the upstream side of the air filter can be visually recognized, and an air filter that can be incorporated into a device such as a fan filter knit can be supplied.

  Further, by providing the light guide on both the upstream side and the downstream side of the filter medium, it is possible to provide an air filter in which the situation from the downstream side to the upstream side of the air filter can be visually recognized more clearly.

  Moreover, the air filter which can show the driving | running state of an apparatus with an issue color can be supplied.

  Further, by providing the light guides on both the upstream side and the downstream side of the filter medium, it is possible to supply an air filter that can clearly show the operation status of the device by the issued color.

  Moreover, the fan filter unit which can visually recognize the condition of the upstream side from the downstream side of the air filter can be provided.

  The invention according to claim 1 of the present invention is provided with a light guide made of a transparent material that is inserted into a trough of a filter medium formed by bending into a wave shape and is tightly bonded and fixed to the filter medium.

  According to a second aspect of the present invention, there is provided a light guide made of a transparent material having a comb shape composed of a comb portion and a base portion that are tightly joined and fixed to a filter medium formed by bending into a wave shape. It is provided and has an effect that the situation on the upstream side can be visually recognized from the downstream side of the air filter.

  Further, the invention according to claim 3 of the present invention is characterized in that the comb portion is composed of at least one mountain, and can be easily joined and fixed to the filter medium, from the downstream side to the upstream side of the air filter. It has the effect that the situation can be visually recognized.

  The invention according to claim 4 of the present invention is characterized in that a flat portion is provided at the tip of the comb portion, and the situation from the downstream side to the upstream side of the air filter can be visually recognized even with a weak light source. Has the effect of being able to

  Further, the invention according to claim 5 of the present invention is characterized in that the base portion is provided with chamfered surfaces at both ends, and the upstream light source is refracted by the chamfered surface in the previous period, so that the upstream state is changed. It has the effect | action that it can confirm also from a downstream horizontal direction.

  The invention according to claim 6 of the present invention is characterized in that a flange for adjusting the insertion depth is provided on two opposing sides of the base or the comb portion, and when the light guide is inserted. It has the effect that the depth can be adjusted and the protective net can be fixed.

  The invention according to claim 7 of the present invention is characterized in that a flange for adjusting the insertion depth is provided on the entire circumference of the side surface of the base portion or the comb portion, and the depth when the light guide is inserted. Adjustment and fixing of the protective net can be performed, and since the ridges are provided on all four surfaces, the appearance can be improved.

  The invention according to claim 8 of the present invention is an air filter using a filter medium formed by bending into a wave shape, and is an air filter provided with a light guide on the surface, downstream of the air filter. Therefore, it is possible to provide an air filter that can be installed in equipment such as a fan filter knit.

  The invention according to claim 9 of the present invention is an air filter using a filter medium that is bent into a wave shape, and is inserted into a trough of the filter medium that is bent into a wave shape. The air filter is a light guide made of a transparent material that is tightly bonded and fixed to the filter medium, and the filter medium is sandwiched from both the front and back surfaces. The situation from the downstream side to the upstream side of the air filter can be clearly seen. The air filter can be provided in an apparatus such as a fan filter knit.

  In the invention according to claim 10 of the present invention, a light emitting means is provided on the back side of the air filter so that light emitted from the light emitting means is received by the light guide and the light of the light emitting means can be confirmed from the surface of the air filter. The air filter is characterized in that it can provide an air filter capable of confirming information such as strong, weak operation, stop, and alarm.

  According to the eleventh aspect of the present invention, the filter is provided with a transparent light guide provided upstream and downstream of the filter medium, and the function of the indicator lamp is added by changing the color of the lighting lamp. Thus, the air filter is provided with a display means for confirming the upstream state from the downstream side, and has an effect of providing an air filter capable of clearly confirming information such as strong, weak operation, stop, and alarm.

  The invention according to claim 12 of the present invention includes a fan, a motor, a fan motor unit having them therein, a filter in the downstream thereof, and a trough of a filter medium formed by bending into a wave shape. This is a fan filter unit that has a light guide made of a transparent material that is inserted into the part and is tightly bonded and fixed to the filter medium on the surface. The fan filter unit has an air filter that can check the upstream state from the downstream side. It has the effect | action that it has the effect | action that it can provide the fan filter unit which can visually recognize the condition of the upstream side.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
As shown in FIG. 1, the air filter 1 of the present invention has a filter medium 2 formed by bending into a wave shape, and the filter medium 2 is tightly joined and fixed to the inner peripheral wall surface of the frame 3 and held in a predetermined shape. A frame 3 is provided. A light guide 4 made of a transparent material having a comb shape is provided so as to be tightly joined and fixed from the surface of the filter medium 2 so as to be joined to the waveform of the bent air filter 1.

  FIG. 2 shows a perspective view of the light guide 4. The light guide 4 includes a comb portion 4F that forms a comb shape and a base portion 4G that connects the comb portions 4F. The peak portion 4 </ b> A serving as a comb peak has the same inclination as the filter medium 2 formed by bending into a wave shape, and is tightly bonded and fixed to the filter medium 2. The mountain portion 4A is composed of one mountain or more, but three or more are desirable.

  FIG. 5 is a perspective view showing a state in which the light guide 4 is attached to the filter medium 2.

  The operation of the above configuration will be described. For example, as shown in FIG. 1, a lighting lamp 5 is provided on the upstream side of the air filter 1. The light of the lighting lamp 5 is taken into the light guide 4 from the tip (tip portion 4B) of the peak portion 4A which is a light receiving portion of the light guide 4. The taken-in light is emitted downstream from the base 4G. That is, the light emission state on the upstream side of the air filter 1 can be easily visually recognized from the downstream side without moving to the upstream side.

  Moreover, the front-end | tip part 4B of the peak part 4A is provided with a flat flat surface, and will improve the transmission of light.

  Further, chamfered surfaces 4C are provided at both ends of the bottom surface 4H of the base 4G. The chamfered surface 4C has a function of refracting light from the light source (lighting lamp 5) on the upstream side of the mountain portion 4A, and the upstream state can be confirmed even from the downstream horizontal direction.

  Also, as shown in FIGS. 3 and 6, by providing a ridge 4D on the opposite side surface of the comb portion 4F or the base portion 4G, the ridge 4D on the two surfaces in the longitudinal direction provides an insertion depth adjusting effect, and the filter medium 2 is The protection net to be protected can be fixed.

  4 and 7 show the light guide 4 provided with the flange 4E on the entire circumference of the side surface. The ridges 4E on all four sides provide an insertion depth adjustment effect, and a protective net for protecting the filter medium 2 can be fixed.

  In this embodiment, the light guide member is made of a transparent material such as acrylic or glass having transparency, and is manufactured by extrusion molding or injection molding, and has a strength that can be used for the light guide. What it has is sufficient.

(Embodiment 2)
As shown in FIG. 8, the light guides 41 and 42 are filtered from both the front and back surfaces of the filter medium 2 so as to be joined to the corrugation of the air filter 1 composed of the filter medium 2 formed in a wave shape. 2 is provided.

  With the above configuration, light from the light emitting means (not shown) arranged on the back side of the air filter 1 is received by the light guide 42 and transmitted to the light guide 41 without being attenuated. Therefore, on the surface side of the air filter 1, light with high luminance can be viewed in a wide range.

(Embodiment 3)
As shown in FIG. 9, the light guide 4 is provided on the downstream side of the filter medium 2 of the air filter 1, and the lighting lamps 5 </ b> A, 5 </ b> B, and 5 </ b> C having different colors are provided on the upstream side of the air filter 1. The lighting lamps 5A, 5B, and 5C may be arranged in the vicinity of the light guide 4 with the light emitting surface facing the light guide 4.

  In the above configuration, for example, the lighting lamp 5A is turned on as a display of a certain state (for example, operation of the air conditioner). The light of the lighting lamp 5A passes through the light guide 4 provided on the downstream side of the filter medium 2 of the air filter 1 and the light of the lighting lamp 5A can be visually recognized on the downstream side of the air filter 1. That is, it is possible to confirm the lighting of the lighting lamp 5A displayed on the upstream side on the downstream side of the air filter 1. Similarly, lighting of the lighting lamps 5B and 5C can be confirmed from the opposite side of the air filter 1. Thus, the lighting of the status display lamp displayed on the back surface of the air filter 1 can be confirmed from the front surface side.

  In the present embodiment, the lighting lamps 5A, 5B, and 5C having different colors are used. However, the same lighting can be achieved by using a single lighting lamp and changing the lighting method continuously and blinking. An effect is obtained.

  Further, as shown in FIG. 10, the light guide 4 is engaged so that the filter medium 2 is sandwiched between the upstream side and the downstream side of the filter medium 2 of the air filter 1, and the different lamps 5A, 5B, 5C having different colors are connected to the upstream side. May be provided.

(Embodiment 4)
FIG. 11 is a configuration diagram of a fan filter unit equipped with a light guide and an air filter as shown in FIGS.

  As shown in the figure, the fan filter unit 8 of the present embodiment includes a fan motor unit 13 and an air filter 1 disposed on the downstream side thereof. The fan motor unit 13 includes a turbo fan 11, a motor 10, and a box-shaped chamber 12 that houses these, and a suction port 9 is provided on the top surface thereof. The air filter 1 is provided on the downstream side of the box-shaped chamber 12. Here, an example in which the air filter 1 is provided with the comb-shaped light guide 4 shown in FIGS. 1 and 2 will be described. Between the fan motor unit 13 and the air filter 1, display means 15 for displaying the operation state of the fan filter unit 8 and the like is provided. Information such as the operating state of the fan filter unit 8 displayed on the display means 15 is output from the control device 14 that controls the fan motor unit 13 on the upstream side. The display means 15 is an operation display lamp, an abnormality display lamp, or the like.

  In the above configuration, the operation display by the display means 15 is indicated by lighting of the lamp. This display content can be viewed from the downstream side through the light guide 4. The fan filter unit 8 purifies contaminated air containing dust sucked from the suction port 9 by the air filter 1 by the operation of the fan motor unit 13 and supplies it to the downstream side. Even if there is an information source on the upstream side by using the air filter 1 as in the present invention, the upstream side information (such as the operating condition of the fan filter unit 8) is confirmed without leaking contaminated air downstream. Will be possible.

  The air filter according to the present invention can confirm the operating state of the equipment on the upstream side. Therefore, it can be used for an air cleaning device such as a fan filter unit integrated with an air filter.

Sectional drawing of the attachment state of the light guide of Embodiment 1 The perspective view of the light guide of Embodiment 1 The perspective view of the light guide of Embodiment 1 The perspective view of the light guide of Embodiment 1 The perspective view of the light guide attachment state of Embodiment 1 The perspective view of the light guide attachment state of Embodiment 1 The perspective view of the light guide attachment state of Embodiment 1 Sectional drawing of the air filter of Embodiment 2 The perspective view of the air filter of Embodiment 3 Sectional drawing of the air filter of Embodiment 3 The block diagram which shows the fan filter unit of the same Embodiment 4. Sectional drawing which shows the filter support apparatus of the conventional clean unit

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Air filter 2 Filter medium 3 Frame 4 Light guide 4A Crest part 4B Tip part 4C Chamfering surface 4D 庇 4E 庇 4F Comb part 4G Base part 5 Point lamp 5A Point lamp 5B Point lamp 5C Point lamp 8 Fan filter unit 9 Suction Port 10 Motor 11 Turbo fan 12 Chamber 13 Fan motor unit 14 Controller 15 Display means

Claims (12)

A light guide made of a transparent material that is inserted into a trough of a filter medium that is bent into a wave shape and is tightly bonded to the filter medium. A light guide made of a transparent material having a comb shape composed of a comb portion and a base portion that are closely joined and fixed to a filter medium formed by bending into a wave shape. The light guide according to claim 2, wherein the comb portion includes at least one mountain. 4. The light guide according to claim 2, wherein the comb portion is provided with a flat portion at a tip. The light guide according to claim 2, wherein the base portion is provided with chamfered surfaces at both ends. The light guide according to any one of claims 2 to 5, wherein a flange for adjusting an insertion depth is provided on two opposing surfaces of the side surface of the base portion or the comb portion. The light guide according to any one of claims 2 to 5, wherein a flange for adjusting an insertion depth is provided on an entire circumference of a side surface of the base portion or the comb portion. An air filter using a filter medium formed by bending into a wave shape, wherein the light filter according to claim 1 is provided on the surface. An air filter using a filter medium formed by bending into a wave shape, wherein the filter medium is sandwiched from both the front and back surfaces by the light guide according to claim 1. The air filter according to claim 8 or 9, wherein a light emitting means is provided on a back surface side of the air filter, and light emitted from the light emitting means is received by a light guide so that the light of the light emitting means can be confirmed from the surface of the air filter. 11. The air filter according to claim 10, wherein the light emitting means can change a light emission color. The fan filter unit which mounts the air filter of Claim 10 or 11 in the fan motor unit which has a fan, a motor, a fan motor unit which has them inside, and a filter in the downstream part.

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