JP5286142B2 - Processing equipment - Google Patents

Description

  The present invention relates to a processing apparatus having storage means capable of storing a workpiece.

  A processing apparatus for processing various types of workpieces includes storage means for storing the workpieces. For example, in a cutting apparatus that cuts a workpiece such as a semiconductor wafer, the workpiece is stored in a storage means called a cassette, and the workpiece is taken out from a cassette mounted on a cassette mounting mechanism and cut. Then, the workpiece after cutting is stored in the cassette again. In addition, storage means for storing a workpiece to be inspected, a dressboard for dressing a grindstone, or the like may be placed under a cassette that stores a plurality of workpieces (see, for example, Patent Document 1). .

  The workpiece stored in the storage means is taken out by the transfer mechanism, transferred to the holding table, and processed, and the storage means is open on both the transfer mechanism side and the operator side. There has also been proposed a mechanism for sliding a workpiece storage portion toward the operator so that an operator can put a workpiece in and out of the storage means (see, for example, Patent Document 2).

  However, when the workpiece storage unit is stored on the apparatus side by pressing the slide mechanism, the workpiece may jump out to the transport mechanism side due to the pressing force. If the workpiece jumps out to the transport mechanism in this way, the cassette mounting mechanism or the transport mechanism may collide with the semiconductor wafer. For this reason, measures have been taken such as providing the storage means with a sensor that detects that the workpiece is about to jump out, or providing a step to be abutted so that the workpiece does not jump out.

JP 2006-74004 A Japanese Patent No. 2997766

  However, when a sensor is used, it is only necessary to detect popping out, and it is not possible to prevent popping out. Even when the step is provided, the protrusion may not be sufficiently prevented when the workpiece is warped.

  The present invention has been made in view of these facts, and the main technical problem thereof is to ensure that the workpiece is popped out of the storage means when the workpiece is stored by the slide mechanism. It is to prevent.

The present invention includes a holding unit that holds a workpiece, a processing unit that processes the workpiece held by the holding unit, a storage unit that stores the workpiece, and a workpiece that is unloaded from the storage unit. The storage device includes a first transport port that opens to the transport unit side, and a second transport port that opens to the operator side facing the first transport port. A frame having a workpiece, a workpiece placing table that can be pulled out from the frame through the second conveyance port, and a state in which the workpiece placement table is pulled out through the second conveyance port. There is a latching portion that prevents the workpiece placed on the workpiece mounting table from popping out of the first transfer port by a certain force due to the inertia force when pushing in, and the certain force is inertial From the force acting on the latch when the work piece moves toward the first transfer port by force When the workpiece is carried in / out via the first conveyance port by the conveyance means, the force acting on the latching portion is smaller, and the conveyance means carries the workpiece in / out via the first conveyance port. When doing so, the latch by the latch portion is released.
Processing equipment.

  As the latching portion, for example, a leaf spring can be used.

  In the present invention, since the workpiece has a latching portion that prevents the workpiece from jumping out from the first transfer port, it is possible to reliably avoid a collision between the transfer mechanism and the like provided in the processing apparatus and the semiconductor wafer. be able to. The force acting on the workpiece from the latching portion is larger than the force acting on the latching portion when the workpiece moves in the direction of the first conveyance port due to the inertial force. Since the work force is smaller than the force acting on the latching portion when the work is carried in / out through the transport opening, the work load / unload function of the transport means is not hindered.

  In addition, when a leaf spring is used as the latching portion, the thickness of the plate is changed, or the shape is changed so as to change the angle formed by the contact surface between the surface of the plate and the workpiece or a member supporting the workpiece. Thus, the constant force can be easily adjusted in accordance with the shape and size of the workpiece and the member supporting the workpiece, the performance of the conveying means, and the like.

It is a perspective view which shows an example of a cutting device. It is a perspective view which shows the internal structure of a cutting device. It is a perspective view which shows an example of a storage means. It is a disassembled perspective view which shows an example of a storage means. It is a perspective view which shows the state which the workpiece mounting base of the storage means rotated. It is a perspective view which shows the state which returned the workpiece mounting base of the accommodating means to the original state. It is a perspective view which shows the state in which the workpiece was accommodated in the workpiece mounting base. It is a perspective view which shows the state from which a workpiece is carried out from a workpiece mounting base. It is a perspective view which shows an example of the latching part with which the workpiece mounting base was equipped. It is a top view which shows the state by which the to-be-processed object was supported by the flame | frame via the tape. It is a top view which shows the state of a change of a latching | locking part. It is a top view which shows the state by which the frame was supported by the latching | locking part. It is a perspective view which shows the state which accommodates a workpiece in the 2nd example of a workpiece mounting base. It is a perspective view which shows the state by which the workpiece was accommodated in the workpiece mounting base in the 2nd example.

  A cutting apparatus 1 shown in FIG. 1 is a kind of processing apparatus, and includes a holding means 2 that holds a workpiece and can move in the horizontal direction (X-axis direction in FIG. 1) and rotate. The holding means 2 has a suction part 20 for sucking a workpiece such as a semiconductor wafer and a clamp part 21 for fixing the periphery.

  One or both of the first storage means 30 for storing the workpiece to be cut and the second storage means 31 for storing the workpiece to be inspected are located in front of the movable range of the holding means 2. Is mounted and can be moved up and down. In the illustrated example, the second storage unit 31 is mounted on the storage unit mounting mechanism 3, and the first storage unit 30 is mounted thereon. In the example of FIG. 1, the first storage means 30 has a wafer W as a workpiece attached to a tape attached to a ring-shaped frame F, and the wafer W is attached to the frame via the tape T. It is in a state supported by F.

  On the rear side of the movable range of the holding means 2, a cleaning means 4 for cleaning the workpiece after cutting is disposed. The cleaning means 4 includes a holding table 40 that can rotate while holding a workpiece, and nozzles (not shown) that eject cleaning water and high-pressure air.

  Above the movable range of the holding unit 2, a first transport unit 5, a second transport unit 6, and a third transport unit 7 are disposed. The first transport unit 5 has a function of transporting the workpiece between the holding unit 2 and the first storage unit 30 or the second storage unit 31, and in the transport direction (Y-axis direction). A guide rail 50 that extends, an arm portion 51 that moves along the guide rail 50, and a clamping portion 52 that is provided at the lower end of the arm portion 51 and clamps the workpiece in the vertical direction. The Y-axis direction is a direction orthogonal to the X-axis direction that is the moving direction of the holding means 2 on the horizontal plane.

  The second transport unit 6 has a function of transporting the workpiece after cutting to the cleaning unit 4, and moves along the guide rail 60 extending in the transport direction (Y-axis direction). The arm part 61, the raising / lowering part 62 raising / lowering with respect to the arm part 61, and the adsorption | suction part 63 provided in the lower end of the raising / lowering part 62 and adsorb | sucking a workpiece are provided.

  The third transport unit 7 has a function of transporting the workpiece cleaned by the cleaning unit 4 in order to store the workpiece in the first storage unit 30 or the second storage unit 31, and the transport direction (Y A guide rail 70 extending in the axial direction), an arm portion 71 that moves along the guide rail 70, a lifting portion 72 that moves up and down relative to the arm 71, and a suction that is provided at the lower end of the lifting portion 72 and sucks the workpiece. Part 73.

  On the front side of the cutting apparatus 1, there is provided display means 8 for displaying a guide screen and an image of the workpiece when the operator performs various operations.

  Inside the cutting apparatus 1, as shown in FIG. 2, the 1st cutting means 10 and the 2nd cutting means 11 which are processing means are arrange | positioned. The first cutting means 10 is driven by the first feeding means 12 and is movable in the Y-axis direction, and the second cutting means 11 is driven by the second feeding means 13 and is movable in the Y-axis direction. It has become.

  The first cutting means 10 includes a rotatable first blade 100, and the second cutting means 11 includes a rotatable second blade, which is not shown in FIG. .

  The first feeding means 12 includes a ball screw 120 having an axis in the Y-axis direction, a guide rail 121 disposed in parallel to the ball screw 120, a pulse motor (not shown) that rotates the ball screw 120, and an internal nut. The movable portion 122 is screwed into the ball screw 120 and the side portion is in sliding contact with the guide rail 121, and the lifting mechanism 123 that lifts and lowers the first cutting means 10. The second feeding means 13 includes a ball screw 130 having an axis in the Y-axis direction, a guide rail 121 disposed in parallel to the ball screw 130, a pulse motor 131 that rotates the ball screw 130, and an internal nut. Is composed of a movable portion 132 that is screwed into the ball screw 130 and whose side portion is in sliding contact with the guide rail 121, and a lifting mechanism 133 that lifts and lowers the second cutting means 11.

  The workpiece held by the holding means 2 is driven by the first cutting means 10 and the second feeding means 13 which are lowered by the driving by the first feeding means 12 while the holding means 2 moves in the X-axis direction. Is cut by receiving the action of the second cutting means 11 lowered.

  As shown in FIG. 3, the second storage means 31 includes a frame body 32 and a workpiece mounting table 33 that can be inserted into and removed from the frame body 32. The frame 32 penetrates in the front-rear direction, and as shown in FIG. 4, a first transport port 320 opened on the first transport means 5 side shown in FIG. On the front side facing the first transport port 320 on the side, a second transport port 321 opened to the operator side is formed.

  One or a plurality of workpieces are placed on the workpiece mounting table 33. As shown in FIGS. 4 and 5, the workpiece mounting table 33 can be pulled out from the frame body 32 via the second transfer port 321, and a grip for pulling out the workpiece mounting table 33 to the operator side. A rotating part 330 having a plurality of groove-like slots 330b for supporting the part 330a and the end of the workpiece, and a sliding part 331 that supports the rotating part 330 rotatably and is slidable with respect to the frame 32. It has. On the rear side of the rotating unit 330, an input / output part 332 serving as an inlet / outlet of the workpiece when the workpiece is carried into the second storage means 31 or when the workpiece is carried out from the second storage means 31 is opened. It is provided in the state.

  The rotating part 330 is rotatable with respect to the slide part 331 by a rotating mechanism 333. The rotation mechanism 333 has a rotation shaft 333a in a direction orthogonal to the Y-axis direction, which is the workpiece loading / unloading direction, in the horizontal plane, and the rotation unit 330 rotates around the rotation shaft 333a. ing. As shown in FIG. 5, in a state where the rotating unit 330 stands, the input / output unit 332 faces upward, and the operator can easily put in and out the workpiece. Here, “upward” does not mean only directly above, but also includes a state in which the entrance / exit part 332 is inclined to either the frame body 32 side or the operator side.

  In this way, the inspection work W1 supported by the frame F, for example, via the tape T is stored in the rotation part 330 with the input / output part 332 facing upward, and the inspection work W1 is received from the rotation part 330. It is taken out. Therefore, it becomes easier for the operator to see the entry / exit part 332, and it becomes easier to store the workpieces in the respective slots and to easily take out the desired workpieces. When the rotating portion 330 is at a position below the operator's line of sight, it becomes easier to store and remove the workpiece.

  In addition to the inspection work, the rotating unit 330 includes a pre-cut board used for test cutting, the first cutting blade 100 and the second blade shown in FIG. A board, a normal work, etc. are stored.

  After the workpiece is stored in the rotating unit 330, as shown in FIG. 6, the rotating unit 330 is brought down and returned to its original state. Then, as shown in FIG. 7, the workpiece mounting table 33 is pushed into the frame body 32. When the workpiece is stored in the workpiece mounting table 33 and the frame 32 is stored in the frame 32, the workpiece can be unloaded by the first conveying means 5.

  The clamping part 52 of the first conveying means 5 shown also in FIG. 1 enters the inside from the rear side of the workpiece mounting table 33 to clamp the frame F, and the clamping state is maintained as shown in FIG. The inspection work W <b> 1 supported by the frame F is carried out from the second storage means 31 by the clamping unit 52 remaining outside the workpiece mounting table 33. And the inspection work W1 carried out is conveyed to the holding means 2 shown in FIG. 1, held, and processed.

  As shown in FIG. 9, the workpiece mounting table 33 is formed with a latching portion 334 that prevents the stored inspection work W <b> 1 from jumping out from the loading / unloading portion 332 to the outside of the workpiece mounting table 33. . Although the latching portion 334 shown in FIG. 9 is formed through a plurality of slots 330b, a latching portion may be provided individually at each stage of the slot.

  The latching portion 334 in the illustrated example is a leaf spring, and as shown in an enlarged view in FIG. 9, a rising portion 334a that rises from the side wall 330c of the slot 330b toward the front side (operator side), and a tip is the side wall 330c. It comprises a stopper part 334b that is slidably in contact with the upper part and a peak part 334c that connects the rising part 334a and the stopper part 334b.

  The mountain portion 334 c slides the peripheral side surface of the frame F while moving in and out when the frame F is taken in and out of the entrance / exit portion 332. As shown in FIG. 10, the outer periphery of the frame F has a shape having a pair of opposed linear portions F2 formed by cutting out a part of the outer periphery of the circular curved portion F1 in a straight line. When the inspection wafer W1 is loaded onto the workpiece mounting table 33 with the frame F held between the first transfer means 5 shown in FIGS. 7 and 8, the straight line of the frame F is shown in FIG. The portion F2 slides while pressing the peak portion 334a of the latching portion 334. Then, as shown by a two-dot chain line in FIG. 11, when the straight line portion F2 passes through the peak portion 334c and enters the front side of the peak portion 334a, the peak portion 334c gradually protrudes along the curved portion F1, As shown in FIG. 12, the latching portion 334 returns to the state before being pressed by the frame F, the stopper portion 334 b and the peak portion 334 c are in contact with the curved portion F <b> 1 of the frame F, and the frame F faces the input / output portion 332 side. It doesn't move. On the other hand, when the inspection wafer W1 is carried out to the outside of the work piece mounting 33rd through the loading / unloading portion 332, the linear portion F2 presses the stopper portion 334b and the mountain portion 334c by the slide of the frame F so as to be immersed. The straight portion F2 is drawn out to the entrance / exit portion 332 in a state where the straight portion F2 is in sliding contact with the mountain portion 334c. When the straight line portion F2 completely passes through the peak portion 334c, the hook portion 334 returns to the state before being pressed by the frame F.

  As shown in FIG. 7, the workpiece mounting table 33 is placed in a frame as shown in FIG. 7 from the state in which the workpiece mounting table 33 storing the workpiece is pulled out through the second transfer port 321. When pushed into the body 32, an inertial force acts on the workpiece stored in the workpiece mounting table 33 toward the first transfer port 320, but the latching portion 334 has its inertia. It is possible to prevent the workpiece from jumping out of the first transfer port 320 with a certain force. The constant force referred to here is larger than the force acting on the latching portion 334 when the workpiece is moved toward the first conveyance port 320 by the inertial force, and the first conveyance means 5 is the workpiece. This is a force smaller than the force acting on the latching portion 334 when carrying in or out through the first carrying port 320. Therefore, when the first conveying means 5 carries the workpiece in and out through the first conveying port 320 while preventing the workpiece from jumping out of the first conveying port 320, the latching portion Since the latching of the workpiece by 334 is cancelled | released, the carrying in / out function by the 1st conveyance means 5 is not inhibited.

  Further, when a leaf spring is used as the latching portion 334, the plate thickness of the rising portion 334a, the stopper portion 334b, and the peak portion 334c is changed, or the angle formed by the plate surface and the contact surface of the frame F is changed. By changing the shape of the spring, the constant force can be easily adjusted according to the shape and size of the frame F, the performance of the arm portion 51 of the first conveying means 5, and the like.

  Instead of the second storage means 31 shown in FIGS. 3 to 9, the storage means 9 shown in FIGS. 13 and 14 can be used. The storage means 9 includes a frame body 90 and a workpiece mounting table 91 that can be inserted into and removed from the frame body 90. The frame 90 penetrates in the front-rear direction, and a first transport port 900 that is open to the first transport means 5 shown in FIG. 1 is formed on the rear side, and the first transport port on the rear side is formed. A second transport port 901 that is open to the operator side is formed on the front side facing 900.

  The workpiece mounting table 91 on which one or a plurality of workpieces are mounted can be pulled out from the frame body 90 via the second transfer port 901 and tilted toward the standing state and the front side (operator side). An opening / closing portion 910 that can take the above-described state, a slide portion 911 that is slidable with respect to the frame 90, and a storage portion 912 that is disposed inside the opening / closing member 910 and stores a plurality of workpieces. . The accommodating portion 912 has a plurality of groove-like slots 912a that support the end portion of the workpiece. In addition, an inlet / outlet portion 913 serving as a workpiece entrance / exit is provided on the rear side of the accommodating portion 912 in an open state.

  As shown in FIG. 14, the opening / closing part 910 is formed with a gripping part 910 a that is a part that the operator grips when opening and closing. As shown in FIG. 13, when the opening / closing part 910 is tilted to the open state, the workpiece can be taken in and out of the housing part 912. On the other hand, when the workpiece is not taken in and out, as shown in FIG. 14, the opening / closing part 910 is raised to the closed state. FIG. 13 shows a state in which the inspection wafer W1 supported by the frame F via the tape T is accommodated while being supported by the slot 912a. However, in addition to the inspection wafer W1, it is used for a test cut. A pre-cut board, a first cutting blade 100 shown in FIG. 2 and a second blade, a round shape, a dress board used for leveling, a normal work, and the like may be accommodated.

  The accommodating portion 912 is formed with a latching portion 914 that prevents the accommodated inspection work W1 from jumping out of the workpiece loading table 91 from the loading / unloading portion 913. 13 and 149 are formed so as to penetrate through a plurality of slots 912a. However, a latching section may be provided individually at each stage of the slot. The structure and operation of the latching portion 914 are the same as those of the latching portion 334 shown in FIGS.

1: Cutting device 2: Holding unit 20: Suction unit 21: Clamp unit 3: Storage unit mounting mechanism 30: First storage unit 31: Second storage unit 32: Frame 320: First transport port 321: Second transfer port 33: Workpiece mounting table 330: Rotating unit 330a: Gripping unit 330b: Slot 331: Slide unit 332: In / out unit 333: Rotating mechanism 333a: Rotating shaft 334: Latching unit 334a: Rising unit 334b: Stopper part 334c: Mountain part 4: Cleaning means 40: Holding table 5: First conveying means 50: Guide rail 51: Arm part 52: Nipping part 6: Second conveying means 60: Guide rail 61: Arm part 62: Lifting part 63: Suction part 7: Third conveying means 70: Guide rail 71: Arm part 72: Lifting part 73: Suction part 8: Display means 9: Storage means 90: Frame body 900: First Feed port 901: Second transport port 91: Workpiece mounting table 910: Opening / closing part 910a: Holding part 911: Slide part 912: Storage part 912a: Slot 913: In / out part 914: Latching part 10: First cutting Means 100: first blade 11: second cutting means 12: first feeding means 120: ball screw 121: guide rail 122: movable part 123: lifting mechanism 13: second feeding means 130: ball screw 131: pulse motor 132: Movable part 133: Elevating mechanism W: Wafer W1: Inspection wafer T: Tape F: Frame

Claims (2)

Holding means for holding the workpiece;
Processing means for processing the workpiece held by the holding means;
Storage means for storing the workpiece;
A processing device having transporting means for transporting the workpiece from the storage means and transporting it to the holding means,
The storage means includes a frame having a first transport port that opens to the transport means side, and a second transport port that faces the first transport port and opens to the operator side;
A worktable that can be pulled out from the frame through the second transport port;
The workpiece placed on the workpiece placing table by the inertia force when the workpiece placing table is pushed into the frame body from the state where the workpiece placing table is pulled out through the second transport port is A latching portion that prevents the first transfer port from jumping out with a certain force,
The constant force is greater than the force acting on the latching portion when the workpiece moves toward the first transfer port due to the inertial force, and the transfer unit causes the first transfer port to move. Less than the force acting on the hook when the work piece is carried in and out via
A processing apparatus in which latching by the latching portion is released when the transporting means loads and unloads the workpiece through the first transport port. The processing device according to claim 1, wherein the latching portion is configured by a leaf spring.

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