JP5254652B2 - Particle capturing material and method for producing the same - Google Patents

Description

  The present invention relates to a particle trapping material and a method for producing the same, and more particularly to a particle trapping material containing inorganic fibers for trapping particles and a method for producing the same.

In an apparatus in which a predetermined process is performed while maintaining an internal atmosphere in a vacuum like a semiconductor manufacturing apparatus, it is necessary to capture particles that cause contamination. Therefore, conventionally, for example, Patent Document 1 describes that a cotton-like body made of stainless felt or fluororesin felt is used as a particle trapping material. When attaching such a particle trapping material to an apparatus, for example, cutting the particle trapping material according to the shape of the apparatus, or forming a fixing screw hole in the particle trapping material, etc. Necessary processing is applied to the material.
JP 2007-180467 A

  However, conventionally, when the particle trapping material includes fibers for trapping particles, by performing processing such as cutting and drilling on the particle trapping material, fragments of the fibers are generated from the particle trapping material and Sometimes it became.

  This invention is made | formed in view of the said subject, Comprising: It aims at providing the particle | grain capture | acquisition material by which generation | occurrence | production of the fragment of a fiber was suppressed effectively, and its manufacturing method.

  A particle trapping material according to an embodiment of the present invention for solving the above problems is a particle trapping material used for trapping fine particles generated in a low-pressure atmosphere, and is formed from a first fluororesin. A first base member formed with one opening, a second base member formed of a second fluororesin and formed with a second opening, and one or more inorganic fiber sheets. An inorganic fiber layer sandwiched between a base member and the second base member, wherein one or more of the inorganic fiber sheets are part of the first opening and the second in the inorganic fiber layer. A third fluororesin having a melting point lower than both the melting point of the first fluororesin and the melting point of the second fluororesin on the outer periphery of the inorganic fiber sheet that is exposed from the opening of Is impregnated. ADVANTAGE OF THE INVENTION According to this invention, the particle | grain capture | acquisition material by which generation | occurrence | production of the fragment of the fiber was suppressed effectively can be provided.

  The outer peripheral portion of the inorganic fiber sheet may be impregnated with the third fluororesin from both the first base member side and the second base member side. If it carries out like this, generation | occurrence | production of the fiber piece from an outer peripheral part can be avoided more reliably. Further, by melting a molten sheet formed of the third fluororesin and having an opening corresponding to the first opening or the second opening, the third outer peripheral portion of the inorganic fiber sheet is The fluororesin may be impregnated. If it carries out like this, the shape and area of a part of inorganic fiber sheet exposed in order to capture | acquire particle | grains can also be controlled reliably. Further, the first base member is a porous body of the first fluororesin, and the second base member is a porous body of the second fluororesin, and the first base member The second base member and the inorganic fiber layer may be bonded with the third fluororesin. If it carries out like this, while being able to raise the softness | flexibility of a particle | grain capture | acquisition material, the firm adhesion | attachment with a 1st base member and a 2nd base member, and an inorganic fiber layer can also be achieved more reliably. The first fluororesin and the second fluororesin are both polytetrafluoroethylene (PTFE), and the third fluororesin is an ethylene-tetrafluoroethylene copolymer (ETFE). It is good as well. In this way, generation of outgas from the particle trapping material can be effectively avoided, and chemical resistance and heat resistance of the particle trapping material can be improved.

  A method for producing a particle trapping material according to an embodiment of the present invention for solving the above-described problem is a method for producing a particle trapping material used for trapping fine particles generated in a low-pressure atmosphere. The melting point is between the first base member formed of the fluororesin and having the first opening formed therein and the second base member formed of the second fluororesin and having the second opening formed therein. A molten sheet formed of a third fluororesin having a melting point of the first fluororesin and a melting point of the second fluororesin lower than that of the first fluororesin and having an opening corresponding to the first opening or the second opening A stacking step in which an inorganic fiber sheet is disposed so as to be partially exposed between the first opening or the second opening between the pair of molten sheets. , The laminate is the third The molten sheet is melted by pressing while being heated at a temperature equal to or higher than the melting point of the fluorine resin, lower than the melting point of the first fluororesin and the melting point of the second fluororesin. A heat press step of impregnating the third fluororesin in an outer peripheral portion of the inorganic fiber sheet surrounding the inorganic fiber sheet. ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the particle | grain capture | acquisition material by which generation | occurrence | production of the fragment of the fiber was suppressed effectively can be provided.

  Further, in the laminating step, a plurality of inorganic fiber sheets, each sandwiched between a pair of the molten sheets, are disposed between the first base member and the second base member, and in the heating press step The outer peripheral portion of each of the plurality of inorganic fiber sheets may be impregnated with the third fluororesin from both the first base member side and the second base member side. If it carries out like this, the manufacturing method of the particle | grain capture | acquisition material by which generation | occurrence | production of the fiber piece from an outer peripheral part was avoided more reliably can also be provided.

  Hereinafter, a particle trapping material (hereinafter referred to as “the present trapping material”) and a method for manufacturing the particle trapping material (hereinafter referred to as “the present manufacturing method”) according to an embodiment of the present invention will be described with reference to the drawings. explain.

  FIG. 1 is an explanatory view showing an example of the appearance of the present capturing material 1. FIG. 2 is an explanatory view showing a cross section of the capture material 1 shown in FIG. FIG. 3 is an explanatory view showing an appearance of a member used for manufacturing the capturing material 1 shown in FIG. FIG. 4 is an explanatory view showing a cross section of the member shown in FIG. FIG. 5 is an explanatory view showing an example of a heating press in the present manufacturing method. In the following description, for two or more similar elements, when these elements are not distinguished from each other, they are simply indicated by numbers (for example, “40”), and these elements are distinguished from each other. In such a case, the number is shown with a lower case alphabet (for example, “40a”, “40b”).

  As shown in FIGS. 1 and 2, the capturing material 1 includes a first base member (hereinafter referred to as “upper base member 10”) and a second base member (hereinafter referred to as “lower base member 20”). And the inorganic fiber layer 30 sandwiched between the upper base member 10 and the lower base member 20. As shown in FIGS. 3 and 4, the main capturing material 1 is manufactured by laminating an upper base member 10, a lower base member 20, two inorganic fiber sheets 40, and three molten sheets 50. The

  The upper base member 10 is made of a first fluororesin. The lower base member 20 is made of a second fluororesin. As the first fluororesin and the second fluororesin, appropriate fluororesins selected according to the characteristics required for the capture material 1 can be used. The first fluororesin and the second fluororesin may be the same type of fluororesin, or may be different types of fluororesins.

  Specifically, as the first fluororesin and the second fluororesin, for example, polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkoxyethylene copolymer (PFA), polychlorotrifluoroethylene (PCTFE) ), A filler-containing PTFE (PTFE mixed with a filler such as glass fiber) can be used as one type of fluororesin selected from the group consisting of two or more types. Among these, PTFE can be preferably used. When PTFE is used as the first fluororesin and the second fluororesin, it is possible to effectively avoid the generation of outgas from the upper base member 10 and the lower base member 20.

  The upper base member 10 and the lower base member 20 can be formed by an appropriate molding method selected according to the characteristics required for the capture material 1. Specifically, the upper base member 10 and the lower base member 20 can be, for example, a first fluororesin porous body and a second fluororesin porous body, respectively. The porous body of the first fluororesin and the porous body of the second fluororesin can be formed by, for example, a stretching method. That is, for example, in the case where the first fluororesin and the second fluororesin are PTFE, the preformed body is prepared from an emulsion polymerization PTFE fine powder to which an auxiliary agent such as naphtha is added using an extruder and a calender roll. A porous sheet of PTFE can be formed by molding, stretching the preform, and heat-treating the preform at a high temperature. When the upper base member 10 and the lower base member 20 are porous bodies, the capture material 1 can have flexibility.

  An opening 11 is formed in the upper base member 10. An opening 21 is also formed in the lower base member 20. That is, in the present embodiment, the upper base member 10 and the lower base member 20 are a pair of frame-shaped molded bodies in which a rectangular opening 11 and an opening 21 having the same shape are respectively formed in the center. The thicknesses of the upper base member 10 and the lower base member 20 can be arbitrarily set according to the characteristics required for the capture material 1. For example, by making the thickness of the upper base member 10 and the lower base member 20 larger than any of the inorganic fiber sheet 40 and the molten sheet 50, the upper base member 10 and the lower base member 20 can be used as the skeleton of the capturing material 1. It becomes a preferable thing as a supporting member which comprises.

  The inorganic fiber sheet 40 is formed from inorganic fibers. As the inorganic fiber constituting the inorganic fiber sheet 40, an appropriate inorganic fiber selected according to the characteristics required for the capture material 1 can be used. Specifically, for example, alumina fiber, glass fiber, or silica fiber can be used as the inorganic fiber. In the inorganic fiber sheet 40, an opening corresponding to the opening 11 of the upper base member 10 or the opening 21 of the lower base member 20 is not formed. That is, in this embodiment, the inorganic fiber sheet 40 is a woven fabric or a non-woven fabric that can be arranged so as to cover one side of the opening 11 of the upper base member 10 or the opening 21 of the lower base member 20. In addition, although the thickness of the inorganic fiber sheet 40 can be arbitrarily set according to the characteristic requested | required of this capture | acquisition material 1, it can be made smaller than the thickness of the upper base member 10 and the lower base member 20, for example. it can.

  The molten sheet 50 is formed from a third fluororesin. The third fluororesin is a fluororesin whose melting point is lower than both the melting point of the first fluororesin and the melting point of the second fluororesin. As a 3rd fluororesin, the appropriate fluororesin selected according to the characteristic requested | required of this capture | acquisition material 1 can be used.

  Specifically, as the third fluororesin, for example, ethylene-tetrafluoroethylene copolymer (ETFE), tetrafluoroethylene-perfluoroalkoxyethylene copolymer (PFA), tetrafluoroethylene / hexafluoropropylene copolymer One type of fluororesin selected from the group consisting of coalescence (FEP) or a fluororesin combining two or more types can be used. Among these, ETFE and FEP can be preferably used, and ETFE can be particularly preferably used. When ETFE is used as the third fluororesin, generation of outgas from the inorganic fiber layer 30 can be effectively avoided.

  Furthermore, when PTFE is used as the first fluororesin and the second fluororesin and ETFE is used as the third fluororesin, it is possible to reliably avoid outgassing from the capture material 1. In this case, the capture material 1 can also have excellent chemical resistance and heat resistance. Therefore, for example, the capture material 1 can be subjected to chemical treatment or heat treatment for the purpose of cleaning or the like.

  The molten sheet 50 can be formed by an appropriate molding method selected according to the characteristics required for the capture material 1. Specifically, the molten sheet 50 can be a film-like molded body formed by film-forming a third fluororesin, for example.

  An opening 51 corresponding to the opening 11 of the upper base member 10 or the opening 21 of the lower base member 20 is formed in the molten sheet 50. That is, in the present embodiment, the molten sheet 50 is a frame-like sheet in which a rectangular opening 51 having the same shape as the opening 11 of the upper base member 10 and the opening 21 of the lower base member 20 is formed at the center. Further, by setting the thickness of the molten sheet 50 to the same level as that of the inorganic fiber sheet 40, the inorganic fiber sheet 40 can be impregnated with an appropriate amount of the third fluororesin.

  In the first step (hereinafter referred to as “lamination step”) included in this manufacturing method, first, the members shown in FIGS. 3 and 4 are stacked in the order shown in FIG. A body 60 is formed. That is, in the present embodiment, the molten sheets 50 and the inorganic fiber sheets 40 are alternately arranged so that each inorganic fiber sheet 40 is sandwiched between the pair of molten sheets 50 between the upper base member 10 and the lower base member 20. Deploy.

  Specifically, an inorganic fiber sheet (hereinafter referred to as “upper fiber sheet 40a”) disposed on the upper base member 10 side is a molten sheet (hereinafter referred to as “upper melt sheet 50a”) disposed on the upper base member 10 side. ") And a molten sheet (hereinafter referred to as" intermediate molten sheet 50c ") disposed in the middle. On the other hand, the inorganic fiber sheet (hereinafter referred to as “lower fiber sheet 40b”) disposed on the lower base member 20 side is a molten sheet (hereinafter referred to as “lower molten sheet 50b”) disposed on the lower base member 20 side. And the intermediate melting sheet 50c.

  A part of the upper fiber sheet 40 a is disposed so as to be exposed from the opening 11 of the upper base member 10. That is, in the present embodiment, a central rectangular portion (hereinafter referred to as “central portion 41 a”) corresponding to the opening 11 of the upper base member 10 in the upper fiber sheet 40 a is exposed from the opening 11. Further, a part of the lower fiber sheet 40 b is disposed so as to be exposed from the opening 21 of the lower base member 20. That is, in the present embodiment, a central rectangular portion (hereinafter referred to as “center portion 41 b”) corresponding to the opening 21 of the lower base member 20 in the lower fiber sheet 40 b is exposed from the opening 21. In the capturing material 1, the central portion 41a of the upper fiber sheet 40a and the central portion 41b of the lower fiber sheet 40b function as portions that capture particles.

  In a second step (hereinafter referred to as “heat press step”) included in the present manufacturing method, a process of pressing the above-described laminated body 60 while heating (hereinafter referred to as “heat press”) is performed. In the example shown in FIG. 5, a pair of resin films 70 a and 70 b used as release paper are arranged on the upper side (upper base member 10 side) and the lower side (lower base member 20 side) of the laminate 60, A pair of metal plates 71a and 71b are disposed above and below the resin films 70a and 70b, and a pair of heating press devices 72a and 72b are disposed above and below the pair of metal plates 71a and 71b. ing. Also, spacers 73a and 73b for limiting the thickness (length in the stacking direction) of the stacked body 60 after the heat press are disposed between the pair of metal plates 71 and around the stacked body 60. Has been.

  In the heating press step, first, the metal plate 71 is heated by the heating press instrument 72, and the laminated body 60 is heated to a melting point of the first fluororesin or higher than that of the third fluororesin. Heat at a temperature lower than any of the above. Specifically, for example, when the first fluororesin and the second fluororesin are PTFE and the third fluororesin is ETFE, the heating temperature is equal to or higher than the melting point of ETFE, and PTFE Less than the melting point. By this heating, it is possible to selectively melt only the molten sheet 50 among the members constituting the laminated body 60.

  In the heating press step, the laminate 60 is further compressed in the direction in which the members are laminated by the pair of heating press instruments 72 under the above-described heating for melting the molten sheet 50. That is, by this press, the pair of molten sheets 50 melted between the upper base member 10 and the lower base member 20 and the inorganic fiber sheet 40 sandwiched between the pair of molten sheets 50 are at a predetermined pressure. Press contact. By using the spacers 73a and 73b, for example, when a plurality of laminated bodies 60 having different pressed areas are arranged between a pair of heating press devices 72a and 72b and simultaneously heated and pressed, the laminated bodies are used. It is possible to press with a constant load while keeping the amount of 60 crushed (thickness reduced by pressing) constant. The method of heating and pressing the laminate 60 is not limited to the method using the heating press instrument 72. For example, the laminate 60 with a predetermined weight is heated in an electric furnace to melt the molten sheet 50. In addition, a method of pressing the laminated body 60 with a load due to the weight can also be used.

  With such a heat press, a frame-shaped portion (hereinafter referred to as “outer peripheral portion 42”) surrounding the central portion 41 of the inorganic fiber sheet 40 is impregnated with the third fluororesin. Specifically, in the present embodiment, the outer peripheral portion 42 of each inorganic fiber sheet 40 is impregnated with the third fluororesin from both the upper side and the lower side.

  That is, the outer peripheral portion 42a of the upper fiber sheet 40a is impregnated with the third fluororesin that constitutes the upper molten sheet 50a from the upper side, and the third fluororesin that constitutes the intermediate molten sheet 50c from the lower side. Is impregnated. On the other hand, similarly, the outer peripheral portion 42b of the lower fiber sheet 40b is impregnated with the third fluororesin that constitutes the intermediate melt sheet 50c from the upper side, and the third that constitutes the lower melt sheet 50b from the lower side. Of fluororesin.

  As a result, in the present embodiment, the outer peripheral portion 42 of each inorganic fiber sheet 40 can be impregnated with the third fluororesin throughout the thickness direction of each inorganic fiber sheet 40. Thus, the inorganic fiber layer 30 in which the inorganic fiber sheet 40 and the molten sheet 50 are integrated can be formed.

  In FIG. 6, the cross section of the inorganic fiber layer 30 is selectively shown among the cross sections of this capture | acquisition material 1 shown in FIG. As shown in FIG. 6, the inorganic fiber layer 30 is exposed from the opening 11 of the upper base member 10 and the opening 21 of the lower base member 20 and captures particles, and an outer peripheral portion 32 surrounding the capture portion 31. And have.

  The capturing part 31 is formed by laminating the central part 41 of the inorganic fiber sheet 40. The outer peripheral portion 32 is formed by laminating the outer peripheral portion 42 of the inorganic fiber sheet 40 impregnated with the third fluororesin.

  In the outer peripheral part 32 of this inorganic fiber layer 30, the 3rd fluororesin is impregnated to the whole area of the lamination direction. That is, in the outer peripheral portion 32, from the end surface on the upper base member 10 side (hereinafter referred to as “outer peripheral portion upper surface 33”) to the end surface on the lower base member 20 side (hereinafter referred to as “outer peripheral portion lower surface 34”). The third fluororesin is filled.

  In this capture | acquisition material 1 manufactured by such this manufacturing method, generation | occurrence | production of the fragment of an inorganic fiber can be suppressed effectively. That is, in the inorganic fiber layer 30, the outer peripheral part 42 of each inorganic fiber sheet 40 is impregnated with the third fluororesin. For this reason, for example, even when a part of the outer peripheral portion 42 of the capturing material 1 is cut or when a through hole is formed in the outer peripheral portion 42, the generation of the inorganic fiber fragments from the outer peripheral portion 42 is effective. Can be avoided. Therefore, for example, a part of the capture material 1 once manufactured can be cut according to the installation environment, and the shape and size thereof can be arbitrarily adjusted.

  In particular, in the present embodiment, the third fluororesin is impregnated from both the upper side and the lower side of the outer peripheral portion 42 of each inorganic fiber sheet 40, and the third from the upper end 33 to the lower end 34 of the inorganic fiber layer 30. Of fluororesin. For this reason, in this capture | acquisition material 1, the fray of the inorganic fiber contained in the inorganic fiber layer 30 and the scattering of the fragment of an inorganic fiber can be prevented reliably.

  Moreover, in this capture | acquisition material 1, the upper base member 10, the lower base member 20, and the inorganic fiber layer 30 are adhere | attached with the 3rd fluorine resin. That is, in this manufacturing method, the outer peripheral portion 42 of the inorganic fiber sheet 40 is impregnated with the third fluororesin by a heating press, and the upper base member 10 and the lower base member 20 and the outer peripheral portion 42 are connected to the third outer peripheral portion 42. It can also be welded with a fluororesin.

  Specifically, the upper base member 10 and the outer peripheral portion upper surface 33 of the inorganic fiber layer 30 are bonded to each other by the third fluororesin of the upper molten sheet 50a that has been melted at the time of hot pressing. On the other hand, the lower base member 20 and the outer peripheral surface lower surface 34 of the inorganic fiber layer 30 are bonded together by the third fluororesin of the lower molten sheet 50b melted during the hot pressing.

  Here, for example, the upper base member 10 is a first fluororesin porous body, the lower base member 20 is a second fluororesin porous body, and the upper base member 10 and the lower base member 20 When the inorganic fiber layer 30 is bonded by the third fluororesin, a high adhesive force can be realized by a so-called anchor effect. That is, in this case, a part of the melted third fluororesin enters into the holes opened on the surfaces of the upper base member 10 and the lower base member 20 during the hot pressing, so that the upper base member 10 And the lower base member 20 can adhere | attach the said upper base member 10, the lower base member 20, and the inorganic fiber sheet 40 firmly at lower heating temperature compared with the case where it is a non-porous body of PTFE.

  Further, in the case where the upper base member 10 and the lower base member 20 are PTFE porous bodies, the deformation at the time of heating is compared with the case where the upper base member 10 and the lower base member 20 are PTFE non-porous bodies. The rate (thermal expansion rate or thermal contraction rate) is small. For this reason, it can avoid effectively that wrinkles generate | occur | produce in the inorganic fiber sheet 40 contained in the capture | acquisition part 31 of the inorganic fiber layer 30 by the deformation | transformation of the upper base member 10 and the lower base member 20. FIG.

  Moreover, when the upper base member 10 and the lower base member 20 are porous bodies, the flexibility of the capturing material 1 is improved as compared with the case where the upper base member 10 and the lower base member 20 are non-porous bodies. Can be improved. For this reason, this capture | acquisition material 1 can also be appropriately installed along the surface of comparatively complicated shapes, such as a curved surface. Moreover, since the openings 11 and 21 are formed in both the upper base member 10 and the lower base member 20, the capturing portion of the inorganic fiber layer 30 is caused by the deformation of the upper base member 10 and the lower base member 20 due to the heating press. It is possible to effectively avoid the generation of wrinkles in the inorganic fiber sheet 40 included in 31.

  In addition, the capture material 1 is manufactured using a molten sheet 50 formed of a third fluororesin and having openings 51 corresponding to the openings 11 of the upper base member 10 and the openings 21 of the lower base member 20. The area of the capturing part 31 can be reliably controlled.

  That is, for example, when a third fluororesin dispersion (dispersion) or a third fluororesin powder is used, the solution or powder is not only the outer peripheral portion 42 of the inorganic fiber sheet 40 but also the central portion. Leaching up to 41. On the other hand, when the molten sheet 50 formed from the third fluororesin is used, the third fluororesin can be selectively impregnated only in the outer peripheral portion 42 of the inorganic fiber sheet 40. Therefore, according to the present manufacturing method, the present capturing material 1 including the capturing section 31 having a desired area capable of capturing particles can be reliably manufactured.

  The capturing material 1 is used to capture fine particles generated in the low-pressure atmosphere in an apparatus in which the internal atmosphere is maintained at a low pressure such as a vacuum. That is, the capture material 1 can be installed inside a vacuum processing apparatus that performs processes such as etching, sputtering, and chemical vapor deposition (CVD) in the manufacture of semiconductors.

  Specifically, the capture material 1 is used in, for example, a vacuum processing chamber that performs vacuum processing such as etching in a semiconductor processing apparatus, and the degree of vacuum in the vacuum processing chamber when the semiconductor wafer is carried into and out of the vacuum processing chamber. Can be installed inside a vacuum preliminary chamber, a vacuum processing chamber, or an exhaust pipe connected to the vacuum preliminary chamber.

  FIG. 7 shows an example of a semiconductor manufacturing apparatus 80 in which the present capturing material 1 is installed. A semiconductor manufacturing apparatus 80 shown in FIG. 7 includes a processing chamber 81 for processing a semiconductor wafer W and an exhaust pipe 82 extending from the processing chamber 81. In the processing chamber 81, a lower electrode portion 83 having a stage on which the semiconductor wafer W is placed and an upper electrode portion 84 facing the lower electrode portion 83 are provided.

  In the processing chamber 81, the semiconductor wafer W can be etched by applying high frequency power to the lower electrode portion 83 and the upper electrode portion 84 to generate plasma. The atmosphere in the semiconductor manufacturing apparatus 80 is maintained in a vacuum atmosphere suitable for etching. The exhaust pipe 82 is connected to a suction device (not shown) such as a pump in order to collect fine particles that are a contamination source generated in the semiconductor manufacturing apparatus 80.

  However, the fine particles discharged through the exhaust pipe 82 may return to the processing chamber 81 again due to, for example, a collision with a part of the suction device and rebounding. Therefore, as shown in FIG. 7, a plurality of main capturing materials 1 a, 1 b, 1 c are arranged along the inner surface 85 of the exhaust pipe 82.

  Then, the fine particles generated in the semiconductor manufacturing apparatus 80 are captured by the capturing unit 31 (see FIGS. 1 and 6) of the capturing material 1. That is, for example, the fine particles colliding with the capturing portion 31 of the capturing material 1 from the opening 11 of the upper base member 10 or the opening 21 of the lower base member 20 are captured by the inorganic fibers constituting the central portion 41 of the inorganic fiber sheet 40. And retained in the inorganic fiber layer 30.

  Next, specific examples of the capturing material 1 and the manufacturing method will be described.

[Example]
As the upper base member 10, a rectangular porous sheet (80 mm × 120 mm, thickness 1.0 mm) formed by a PTFE stretching method was used. A rectangular opening 11 (20 mm × 60 mm) was formed in the upper base member 10. As the lower base member 20, a rectangular PTFE porous sheet (80 mm × 120 mm, thickness 1.0 mm) in which a rectangular opening 21 (20 mm × 60 mm) was formed as in the upper base member 10 was used. That is, the upper base member 10 and the lower base member 20 were frame-like sheets having a width of 30 mm.

  As the inorganic fiber sheet 40, three rectangular sheets (80 mm × 120 mm, thickness 0.12 mm) formed from alumina fibers were used. As the molten sheet 50, four rectangular films (80 mm × 120 mm, thickness 0.1 mm) formed by ETFE film forming and having rectangular openings 51 (20 mm × 60 mm) were used.

  The molten sheets 50 and the inorganic fiber sheets 40 are alternately arranged so that each of the three inorganic fiber sheets 40 is sandwiched between the pair of molten sheets 50 between the upper base member 10 and the lower base member 20. Thus, the laminate 60 as shown in FIG. 5 was formed.

  Further, the laminate 60 was sandwiched between hot press instruments 72 as shown in FIG. The resin film 70 is a polyimide film (thickness 0.1 mm), the metal plate 71 is a stainless steel plate (thickness 5.0 mm), and the spacer 73 is a stainless steel plate (thickness 1.5 mm). Using.

  In the heating press, first, the laminate 60 was subjected to a heating press at a heating temperature of 260 ° C. with a force of 19 tons. Next, the heating temperature was increased from 260 ° C. to 290 ° C. over 30 minutes while maintaining the pressurized state. After maintaining the heating temperature of 290 ° C. for 30 minutes, the heating temperature was decreased from 290 ° C. to 30 ° C. over 60 minutes. Thereafter, the press was released at 30 ° C. The thickness of the capture material 1 after the heat press was about 1.2 mm.

  In FIG. 8, an example of the electron micrograph which image | photographed the cross section which cut | disconnected the outer peripheral part 32 of the inorganic fiber layer 30 among the manufactured this capture | acquisition materials 1 is shown. As shown in FIG. 8, between the PTFE porous sheet P1 as the upper base member 10 and the PTFE porous sheet P2 as the lower base member 20, the inorganic fiber sheet A1 on the upper base member 10 side, the middle It was confirmed that the inorganic fiber sheet A2 and the inorganic fiber sheet A3 on the lower base member 20 side were laminated.

  Also, a molten sheet E1 melted between the PTFE porous sheet P1 and the inorganic fiber sheet A1, a molten sheet E2 melted between the inorganic fiber sheet A1 and the inorganic fiber sheet A2, and the inorganic fiber sheet A2. Traces of the melted sheet E3 melted between the inorganic fiber sheet A3 and the melted sheet E4 melted between the inorganic fiber sheet A3 and the PTFE porous sheet P2 were observed. These four molten sheets E1, E2, E3 and E4 were impregnated between the inorganic fibers of the inorganic fiber sheets A1, A2 and A3 and in the pores of the PTFE porous sheets P1 and P2 by heating press. Further, the outer peripheral portion 32 of the capturing material 1 was impregnated with ETFE in the entire region in the stacking direction.

  The present invention is not limited to the above example. That is, the number of inorganic fiber sheets 40 included in the capturing material 1 is not limited to 2 or 3, and can be 1 or any number of 2 or more. Further, the upper base member 10 and the lower base member 20 are not limited to a porous molded body, and for example, both can be non-porous molded bodies, or one is a porous body and the other is non-porous. It can also be a body. Moreover, the shape of this capture | acquisition material 1 and the capture | acquisition part 31 is not restricted to a rectangle, For example, it can be set as another polygon, circle, and an ellipse. Further, the shapes of the opening 11 of the upper base member 10 and the opening 21 of the lower base member 20 are not limited to the same, and these openings 11 and 21 may be different from each other. Moreover, this capture | acquisition material 1 is not restricted to what is installed along the inner surface of an apparatus as shown in FIG. 7, For example, it can stand up in an apparatus.

  Moreover, this manufacturing method is not restricted to what uses multiple pairs of molten sheet 50, For example, the some inorganic fiber sheet 40 laminated | stacked is pinched | interposed with a pair of molten sheet 50, and the said some inorganic fiber sheet 40 is carried out with a heating press. The outer peripheral portion 42 can be impregnated with a third fluororesin.

It is explanatory drawing which shows an example of the external appearance of the particle | grain capture | acquisition material which concerns on this embodiment. It is explanatory drawing which shows the cross section of the particle | grain trapping material shown in FIG. It is explanatory drawing which shows the external appearance of the member used for manufacture of the particle | grain trapping material shown in FIG. It is explanatory drawing which shows the cross section of the member shown in FIG. It is explanatory drawing which shows an example of the heating press in the manufacturing method of the particle | grain capture | acquisition material which concerns on this embodiment. It is explanatory drawing which selectively shows the cross section of an inorganic fiber layer among the cross sections of the particle | grain trapping material shown in FIG. It is explanatory drawing which shows an example of the semiconductor manufacturing apparatus with which the particle | grain trapping material which concerns on this embodiment was installed. It is explanatory drawing which shows an example of the electron micrograph of the cross section of the particle | grain trapping material which concerns on this embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Particle capture | acquisition material, 10 Upper base member, 11 Opening, 20 Lower base member, 21 Opening, 30 Inorganic fiber layer, 31 Capture part, 32 Outer peripheral part, 33 Outer peripheral part upper surface, 34 Outer peripheral part lower surface, 40 Inorganic fiber sheet, 41 Central part, 42 Peripheral part, 50 Melting sheet, 51 Opening, 60 Laminate, 70 Resin sheet, 71 Metal plate, 72 Heat press instrument, 73 Spacer, 80 Semiconductor manufacturing equipment, 81 Processing chamber, 82 Exhaust pipe, 83 Lower electrode Part, 84 upper electrode part, 85 exhaust pipe inner surface.

Claims (7)

A particle capturing material used for capturing fine particles generated in a low-pressure atmosphere,
A first base member formed of a first fluororesin and having a first opening;
A second base member formed of a second fluororesin and having a second opening formed thereon;
An inorganic fiber layer including one or a plurality of inorganic fiber sheets and sandwiched between the first base member and the second base member;
Have
In the inorganic fiber layer, a part of the one or more inorganic fiber sheets is exposed from the first opening and the second opening, and an outer peripheral part of the inorganic fiber sheet surrounding the part has a melting point. A particle capturing material, wherein a third fluororesin lower than both the melting point of the first fluororesin and the melting point of the second fluororesin is impregnated. The outer peripheral portion of the inorganic fiber sheet is impregnated with the third fluororesin from both the first base member side and the second base member side. Particle trapping material. The third fluorine is formed in the outer peripheral portion of the inorganic fiber sheet by melting a molten sheet formed of the third fluororesin and having an opening corresponding to the first opening or the second opening. The particle capturing material according to claim 1 or 2, wherein the particle capturing material is impregnated with a resin. The first base member is a porous body of the first fluororesin,
The second base member is a porous body of the second fluororesin,
4. The particle trap according to claim 1, wherein the first base member, the second base member, and the inorganic fiber layer are bonded to each other by the third fluororesin. Wood. The first fluororesin and the second fluororesin are both polytetrafluoroethylene (PTFE),
The particle capturing material according to any one of claims 1 to 4, wherein the third fluororesin is an ethylene-tetrafluoroethylene copolymer (ETFE). A method for producing a particle trapping material used for capturing fine particles generated in a low-pressure atmosphere,
A first base member formed of a first fluororesin and having a first opening;
Between the second base member formed from the second fluororesin and having the second opening formed,
The first opening or the opening corresponding to the second opening is formed from a third fluororesin having a melting point lower than both the melting point of the first fluororesin and the melting point of the second fluororesin. Arranging at least one pair of molten sheets,
Between the pair of molten sheets, a laminating step of forming a laminate by disposing an inorganic fiber sheet so that a part is exposed from the first opening or the second opening;
The molten sheet is pressed while being heated at a temperature equal to or higher than the melting point of the third fluororesin, lower than the melting points of the first fluororesin and the second fluororesin. Melt
A heat press step of impregnating the third fluororesin in an outer peripheral portion of the inorganic fiber sheet surrounding the part;
A method for producing a particle trapping material, comprising: In the laminating step, between the first base member and the second base member, a plurality of inorganic fiber sheets, each sandwiched between a pair of the molten sheets, are arranged,
In the heating and pressing step, the outer peripheral portion of each of the plurality of inorganic fiber sheets is impregnated with the third fluororesin from both the first base member side and the second base member side. A method for producing a particle trapping material according to claim 6.