JP5240776B2 - Ball feeder - Google Patents

Description

  The present invention relates to an apparatus for supplying and placing solder balls on electrode portions when forming solder bumps on the electrode portions serving as terminals in, for example, a semiconductor wafer, a circuit device, or a wiring board.

  For example, when a solder bump is formed on an electrode portion serving as a terminal in a semiconductor wafer, a circuit device, a wiring board, or the like, as a method for supplying and placing a solder ball on the electrode portion, a flux or cream is previously printed on the electrode portion. A method is used in which solder is applied, a solder ball is dropped on a mask from a hopper, and the solder ball is dropped into a through hole of the mask while being stroked with a brush.

  However, according to such a conventional method, the solder ball does not easily enter the through hole of the mask and diffuses to an unnecessary portion on the mask, which is inefficient. In addition, when boiled with a brush, static electricity is generated, and some of them adhere to the edge of the through hole of the mask and do not fall.

  In view of such a point, the present inventor can efficiently drop the solder ball into the through-hole of the mask first, prevent diffusion to unnecessary portions, and generate static electricity with a conventional brush. The solder ball can be moved on the mask in a state reduced as much as compared to the case where it is performed. In addition, when the solder ball passes through the through hole of the mask, pressurization is performed by increasing the pressure from the upper surface side of the mask. Has devised a ball supply device that ensures that the solder balls fall into the through holes of the mask (Patent Document 1).

JP 2008-130956 A

  The ball supply apparatus previously invented by the present inventor disclosed in Patent Document 1 is as shown in FIGS.

  5 to 7, reference numeral 1 is formed on the upper side of the mask support frame with a mask support frame described later as a boundary, and the atmospheric pressure inside the mask support frame is raised and lowered at a required timing by using an appropriate air pressure raising / lowering means. This is a sealable chamber. In the illustrated example, airbags 2 and 3 are used as means for raising and lowering the atmospheric pressure. Note that only one airbag may be used. The airbags 2 and 3 raise the atmospheric pressure in the chamber 1 by injecting air from an empty state. The air is injected by a known appropriate means such as a pump. Further, as the air pressure raising / lowering means inside the chamber 1, an airbag is used in the illustrated example. However, other means can also be adopted. 1 may be blown into 1 to increase the atmospheric pressure, or air may be extracted and lowered.

  Reference numeral 4 denotes a support frame that moves horizontally on a mask, which will be described later, by a known appropriate driving means (not shown). Reference numeral 5 denotes a bowl-shaped hopper which is attached to the support frame 4 and is provided with a supply port 6 at the bottom which can adjust the opening area according to the diameter of the solder ball. Solder balls are supplied onto the mask by the bowl-shaped hopper 5. The bowl-shaped hopper 5 is partitioned into a plurality of partitions with partition plates 5a, 5a, 5a. Reference numeral 7 denotes a diaphragm plate that adjusts the opening area of the bowl-shaped hopper 5, and is fixed to the tip of an operating rod 7 a that is rotated up and down by a rotary shaft 9 to which the driving force of the reversible motor 8 is transmitted. Has been.

  Reference numeral 10 denotes a ball supply means which is disposed immediately above the bowl-shaped hopper 5 and supplies the solder balls to the bowl-shaped hopper 5 by dropping. Further, as the ball supply means 10, in the illustrated example, the glass bottle-shaped transparent glass ball supply cartridge 11 moves along the bowl-shaped hopper 5 and has a narrowed mouth portion provided with a filling port 11a at a required location. Is used. The filling port 11a is sealed by an appropriate means after filling the ball.

  In the illustrated example, the ball supply cartridge 11 includes a holder 13 attached to a guide frame 12 erected on the support frame 4 so as to reciprocate in the horizontal direction and also to rotate in the vertical direction. It is set while being held in the holder body. As a result, the ball supply cartridge 11 is carried to one end side of the bowl-shaped hopper 5 in a state of being tilted sideways by the holder main body, and when reaching the end portion, the ball supply cartridge 11 is in an inverted state with the mouth down, and the solder filled therein The ball is dropped and supplied to the bowl-shaped hopper 5. In this state, the solder ball is returned to the original direction, and the solder balls are supplied to the entire length direction or a required range of the bowl-shaped hopper 5.

  Further, in the illustrated example, the holder 13 is attached to a long hole provided in the guide frame 12 along the length direction thereof, and a movable support plate that moves horizontally along the long hole, and the movable support plate And a motor for rotating the holder body in the vertical direction, which is fixed so that the rotating shaft protrudes to the front side, and a U-shaped band attached to the flat plate, fixed to the tip of the rotating shaft of the motor. A holder main body, a motor for moving the movable support plate, a driving pulley fixed to a rotating shaft of the motor, a driven pulley attached to the guide frame 12 on the opposite side of the driving pulley, and the driving pulley An endless belt is provided between the driven pulley and partially connected to the movable support plate.

  Reference numerals 14, 14, 14, and 14 are means provided around the bowl-shaped hopper for preventing the solder balls on the mask from diffusing to unnecessary portions and rolling the solder balls by wind pressure. The solder ball diffusion preventing and rolling means 14, 14, 14, 14 are arranged on the front and rear and the left and right sides in the moving direction of the bowl-shaped hopper 5 in the illustrated example, and from above at a required timing. An air ejection device that ejects air toward a mask to form an air curtain is used. The air ejection devices 14, 14, 14, and 14 are connected to an air compressor (not shown) and supplied with air so that air is ejected slightly inward from the nozzle 14a.

  Reference numeral 15 denotes a mask that can receive the solder ball that falls from the bowl-shaped hopper 5 and rolls in the middle of the through hole and temporarily blocks the passage. The mask 15 is a set of two masks, and the positions of the respective through holes are made to coincide or disagree by shifting the relative position in the horizontal direction. Reference numerals 16 and 17 denote mask support frames for these masks.

  Reference numeral 18 denotes a semiconductor wafer which is a solder ball supply body fixed by a jig (not shown), 21 a solder ball for forming solder bumps, and 22 a support table for the solder ball supply body.

  The above-described ball supply device (hereinafter referred to as “prior art”) previously devised by the present inventor has the desired effect, but further in terms of efficiency and cost in actual use. The point that should be improved was found.

  This is because in the prior art, the rolling of the ball due to the wind pressure of the air ejection device is insufficient. That is, in the prior art, the air ejection devices 14, 14, 14... Are provided so as to surround the hopper 5, but have a square shape in plan view. Further, although the air jets from the nozzles 14a are jetted slightly inward toward the mask 15, they are all straight inward and are simply blowing wind from the front, rear, left and right toward the hopper 5 side. It is. For this reason, the balls are concentrated at the point where they fall from the hopper 5, and all the balls cannot be rolled sufficiently on the mask 15. Accordingly, it takes a considerable time to put the ball into all the through holes provided in the mask 15, and the efficiency is poor.

  In addition, since the rolling of the ball is poor as described above, when the ball is put into all the through holes provided in the mask 15 in a short time, the number of the through holes of the mask 15 is much larger than the number of the through holes. A number of balls must be placed on the mask. In this case, many of the balls remaining on the mask without entering the through-hole of the mask are all deformed due to mutual collision at the time of rolling, and almost all become defective products. Useless costs will be incurred.

  The present invention has been made in view of the above points, and the flow of air ejected from the air ejection device is swirled so that all of a large number of balls placed on the mask are enlarged by a powerful wind pressure. An object of the present invention is to provide a ball supply device that can be quickly rolled to solve the above-mentioned problems.

Thus, the gist of the present invention is that the mask support frame is formed on the upper side of the mask support frame, and the internal air pressure is raised and raised at a required timing using an appropriate air pressure raising / lowering means. A sealable chamber adapted to be lowered, a support frame disposed in the chamber and moving horizontally on a mask with appropriate driving means, and a ball supply port at the bottom, which is attached to the support frame. A hopper provided, a ball supply means disposed immediately above the hopper, for dropping the ball to the hopper, and provided so as to surround the periphery of the hopper, and air is jetted from above toward the mask at a required timing. To form an air curtain to prevent the ball on the mask from diffusing to unnecessary portions and roll the ball by wind pressure, and a mask having a ball through hole at a predetermined position. Do Ri, further the air jet device, the jetting direction of air together to such so as to surround the periphery of the hopper to a circle, without and in the circumferential direction obliquely downwardly inwardly slightly, air flow is spirally Oite the ball Lumpur supply apparatus without such, the air jet device, the lower is the inner tube and the outer tube tapered, provided with a supply passageway between these inner cylinder and the outer cylinder, A wind direction regulating plate provided with a plurality of fins inclined in a predetermined angle along the circumferential direction of the inner cylinder and the outer cylinder in a slightly inward air outlet that communicates with the air supply path. The ball supply device is characterized by being an air ejection device.

  The present invention is configured as described above, and makes the flow of air ejected from the air ejection device spiral, so that all of a large number of balls riding on the mask are rolled large and fast by powerful wind pressure. Therefore, the ball enters all the through holes of the mask much faster than the prior art. Therefore, work efficiency is greatly improved. In addition, since the number of balls placed on the mask is much smaller than in the prior art, the number of balls that become deformed and unusable is greatly reduced, and the cost can be reduced accordingly. .

It is a longitudinal cross-sectional view of the principal part of the ball | bowl supply apparatus which concerns on embodiment of this invention. It is a partial top view of an air ejection apparatus. It is a top view of the wind direction control board in an air ejection apparatus. It is a one part perspective view of the wind direction control board in an air ejection apparatus. It is the schematic explanatory drawing seen from the front side of the ball supply apparatus which concerns on a prior art. It is the schematic explanatory drawing seen from the side surface of the ball supply apparatus which concerns on a prior art. It is action | operation explanatory drawing of the air ejection apparatus at the time of ball | bowl supply in the ball | bowl supply apparatus which concerns on a prior art.

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.
The present invention relates to the improvement of the prior art, and the basic configuration is the same except for the point of the prior art and the air ejection device, so the description of the basic configuration is omitted. The outline is as follows.

  That is, the ball supply device according to the present invention is formed on the upper side of the mask support frame with the mask support frame as a boundary, and the internal pressure is raised and lowered at a required timing using an appropriate air pressure raising / lowering means. A sealable chamber configured as described above, a support frame that is disposed in the chamber and moves horizontally on the mask with appropriate driving means, and is attached to the support frame and has a ball supply port at the bottom. A hopper, a ball supply means that is disposed directly above the hopper and that drops the ball to the hopper, and is provided so as to surround the periphery of the hopper, and air is blown toward the mask from above at a required timing. An air ejection device that forms an air curtain to prevent the ball from diffusing to unnecessary portions on the mask and rolls the ball by wind pressure, and a mask having a ball through hole at a predetermined position. It become one.

The present invention has been made to the basic structure of the configuration described above, the air ejection apparatus and has a difference in that a different from the above.

That is, in the ball supply device according to the present invention, the air ejection device 23 is formed so as to surround the hopper 5 in a circular shape, and the air ejection direction is slightly inward and obliquely downward in the circumferential direction. The air jetting device is designed so that the air flow is spiral .
To do.

The air ejection device 23 includes an inner cylinder 24 and an outer cylinder 25 whose lower portions are tapered, and an air supply path 26 is provided between the inner cylinder 24 and the outer cylinder 25, and the air supply path 26, a plurality of fins 28a, 28a, 28a,... That are inclined at a predetermined angle along the circumferential direction of the inner cylinder 24 and the outer cylinder 25 are provided in a slightly inward air outlet 27 that communicates with the nozzle 26. A wind direction regulating plate 28 is attached. Reference numeral 29 denotes a member that covers the upper opening of the air ejection device 23, and reference numeral 30 denotes a ball jump-out preventing mesh. When supplying a ball to the hopper 5, the member 29 covering the upper opening of the air ejection device 23 is removed, or the ball jumping prevention mesh 30 is opened and closed, and the ball jumping prevention mesh 30 is partially This is done by shifting and opening.

  Thus, in the above embodiment, when air is supplied to the air supply passage 26 in the air ejection device 23 by an air compressor (not shown), the flow of air ejected from the air ejection port 27 is as shown in FIG. All of a large number of balls on the mask 15 are swirled and rolled large and fast by a strong wind pressure. Therefore, the ball can be put into all the through holes of the mask much faster than the prior art, and the working efficiency can be greatly improved. In addition, since the number of balls placed on the mask 15 is much smaller than that in the prior art, the number of balls that are deformed and cannot be used can be greatly reduced, and the cost can be reduced accordingly. It can be done.

1 chamber 4 support frame 5 hopper 6 supply port 10 ball supply means 11 ball supply cartridge 12 guide frame 14, 14, 14,... Air ejection device 15 mask 16, 17 mask support frame 23 air ejection device 24 inner cylinder 25 outside Tube 26 Air supply path 27 Air outlet 28 Air direction regulating plate 28a, 28a, 28a... Fin

Claims (1)

A sealable chamber formed on the upper side of the mask support frame with the mask support frame as a boundary, and the internal pressure of the mask support frame can be raised and lowered at a required timing by using an appropriate air pressure raising and lowering means; A support frame that is disposed in the room and moves horizontally on the mask with appropriate driving means, a hopper that is attached to the support frame and has a ball supply port at the bottom, and is disposed immediately above the hopper. A ball supply means for dropping the ball to the hopper and surrounding the periphery of the hopper, and air is blown toward the mask from above at a required timing to form an air curtain. an air ejection device for rolling the ball by wind pressure is prevented from diffusing into unnecessary portions, Ri Do and a mask having a through hole of the ball in place, further the air jet device, wherein Tsu ejection direction of the air with be such so as to surround the circular path, without the and circumferentially obliquely downwardly inwardly slightly, in ball Lumpur supply apparatus without such air flow is spirally ,
The air jetting device includes an inner cylinder and an outer cylinder having a tapered lower portion, and an air supply path is provided between the inner cylinder and the outer cylinder, and is connected to the air supply path. A ball supply comprising an air jetting device in which a wind direction regulating plate having a plurality of comb-like fins inclined in a predetermined angle along the circumferential direction of the inner cylinder and the outer cylinder is mounted in the jet outlet. apparatus.

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