JP5221309B2 - Optical fiber preform dehydration and sintering apparatus and furnace tube maintenance method in optical fiber preform dehydration and sintering apparatus - Google Patents

Optical fiber preform dehydration and sintering apparatus and furnace tube maintenance method in optical fiber preform dehydration and sintering apparatus Download PDF

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JP5221309B2
JP5221309B2 JP2008310839A JP2008310839A JP5221309B2 JP 5221309 B2 JP5221309 B2 JP 5221309B2 JP 2008310839 A JP2008310839 A JP 2008310839A JP 2008310839 A JP2008310839 A JP 2008310839A JP 5221309 B2 JP5221309 B2 JP 5221309B2
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兼吾 深津
次男 坂本
圭祐 内山
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings

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Abstract

<P>PROBLEM TO BE SOLVED: To prevent rupture of a furnace core pipe due to the expansion of an optical fiber preform inside the furnace core pipe. <P>SOLUTION: A dehydration sintering apparatus 1 of an optical fiber preform comprises a furnace core pipe 5 accommodating the optical fiber preform 3 subjected to dehydration sintering, a heating furnace 9 provided with a heater 7 to heat the optical fiber preform 3 in the outer circumference of the furnace core pipe 5, a supply side gas pipe 13 connected at least with a gas pipe for dehydration 21 and a gas pipe for sintering 17 to supply a gas for dehydration sintering to the furnace core pipe 5 and the heating furnace 9, and an exhaust side gas pipe 15 to exhaust the dehydration sintering gas in the furnace core pipe 5 and the heating furnace 9. Further provided are a pressure detecting device 29 installed to detect a pressure in the gas pipe for sintering 17, and a gas pressure regulating pipe 31 equipped with a release side valve 33 to release to exhaust the dehydration sintering gas in the supply side gas pipe 13 when a measured value detected by the pressure detecting device 29 exceeds a preset value. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

この発明は、光ファイバ母材の脱水焼結装置脱水焼結装置及び光ファイバ母材の脱水焼結装置における炉心管保全方法に関し、特に炉心管の内部で光ファイバ母材が膨張したために炉心管が破裂するのを防止する機能を備えた光ファイバ母材の脱水焼結装置と、その光ファイバ母材の脱水焼結装置における炉心管保全方法に関する。 The present invention relates to an optical fiber preform dehydration and sintering apparatus and an optical fiber preform dehydration and sintering apparatus , and more particularly to a furnace core maintenance method in an optical fiber preform dehydration and sintering apparatus. TECHNICAL FIELD The present invention relates to an optical fiber preform dehydration and sintering apparatus having a function of preventing the explosion of the optical fiber preform and a core tube maintenance method in the optical fiber preform dehydration and sintering apparatus .

図４を参照するに、従来、光ファイバ母材の脱水焼結装置１０１は、特許文献１及び特許文献２に示されているように、脱水焼結用ガスとして塩素等の腐食性ガスを使用し、炉心管１０３の内部でワークとしての光ファイバ母材１０５（スート母材）を加熱してＯＨ基を除去している。すなわち、脱水焼結すべき光ファイバ母材１０５が炉心管１０３内に収容される。前記炉心管１０３の外側には、光ファイバ母材１０５を加熱するヒータ１０７が配置されている。なお、炉心管１０３の外周には、前記ヒータ１０７を断熱材を介して収容する炉体１０９が配置されている。さらに、炉心管１０３と炉体１０９の内部には脱水焼結用ガスが供給される。   Referring to FIG. 4, conventionally, an optical fiber preform dehydrating and sintering apparatus 101 uses a corrosive gas such as chlorine as a dehydrating and sintering gas as shown in Patent Document 1 and Patent Document 2. Then, the optical fiber preform 105 (soot preform) as a workpiece is heated inside the furnace core tube 103 to remove OH groups. That is, the optical fiber preform 105 to be dehydrated and sintered is accommodated in the furnace core tube 103. A heater 107 that heats the optical fiber preform 105 is disposed outside the furnace core tube 103. A furnace body 109 that houses the heater 107 via a heat insulating material is disposed on the outer periphery of the core tube 103. Further, dehydration sintering gas is supplied into the furnace core tube 103 and the furnace body 109.

すなわち、脱水焼結用ガスは炉心管１０３の下部側から供給側ガス管路１１１を経て供給される。一方、炉心管１０３内の脱水焼結用ガスは炉心管１０３の上部側から排気側ガス管路１１３を経て排気される。   That is, the dehydration sintering gas is supplied from the lower side of the furnace core tube 103 via the supply side gas pipe 111. On the other hand, the dehydration and sintering gas in the core tube 103 is exhausted from the upper side of the core tube 103 through the exhaust side gas pipe 113.

また、炉心管１０３と炉体１０９の内部のガス圧力が図示しない差圧計で比較され、炉心管１０３内のガス圧力が所定の圧力となるように図示しない電動弁で制御される。また、炉心管１０３には、その内部圧力の変動を吸収する図示しない圧力変動吸収容器が接続されている。
特開平６−１２７９６４号公報 特開平２−１９９０３８号公報 Further, the gas pressure inside the furnace core tube 103 and the furnace body 109 is compared by a differential pressure gauge (not shown), and is controlled by an electric valve (not shown) so that the gas pressure in the furnace core tube 103 becomes a predetermined pressure. The core tube 103 is connected to a pressure fluctuation absorption container (not shown) that absorbs fluctuations in the internal pressure.
JP-A-6-127964 JP-A-2-199038

ところで、従来の光ファイバ母材の脱水焼結装置１０１においては、図４に示されているように、例えばヒータ１０７の設定不具合等によって光ファイバ母材１０５が溶けて膨張したために炉心管１０３内を閉塞させてしまい、脱水焼結用ガスの排気の流れを妨げることが生じる。そのために炉心管１０３の一部の内圧が過剰となり、炉心管１０３が破裂して脱水焼結用ガスが外部に漏れるといった事故が発生する可能性があった。   By the way, in the conventional optical fiber preform dehydration and sintering apparatus 101, as shown in FIG. 4, the optical fiber preform 105 is melted and expanded due to, for example, a setting failure of the heater 107. May be blocked, and the flow of exhaust gas for dehydration sintering may be hindered. For this reason, an internal pressure of a part of the core tube 103 becomes excessive, and there is a possibility that an accident occurs in which the core tube 103 bursts and the dehydration sintering gas leaks to the outside.

この発明は、炉心管の内部で光ファイバ母材が膨張したために炉心管が破裂するのを防止することを目的とする。   An object of the present invention is to prevent the core tube from rupturing because the optical fiber preform expands inside the core tube.

上記の課題を解決するために、この発明の光ファイバ母材の脱水焼結装置は、脱水焼結する光ファイバ母材を収容する炉心管と、この炉心管の外周で前記光ファイバ母材を加熱するヒータを備えた加熱炉と、前記炉心管と前記加熱炉に脱水焼結用ガスを供給すべく少なくとも脱水用ガス管路と焼結用ガス管路を連結した供給側ガス管路と、前記炉心管と前記加熱炉の脱水焼結用ガスを排気する排気側ガス管路を備えた光ファイバ母材の脱水焼結装置において、
前記焼結用ガス管路内の圧力を検出すべく設置した圧力検出装置と、この圧力検出装置で検出した測定値が予め設定した設定値を超えた場合に前記供給側ガス管路内の脱水焼結用ガスを排気すべく開放する開放側バルブを備えたガス圧調整用管路と、常時は開放し前記場合に前記焼結用ガス管路を閉塞するバルブと、を設けたことを特徴とするものである。 In order to solve the above-described problems, an optical fiber preform dehydration and sintering apparatus of the present invention includes a core tube containing an optical fiber preform to be dehydrated and sintered, and the optical fiber preform on the outer periphery of the core tube. A heating furnace equipped with a heater for heating, a supply-side gas pipe connecting at least a dehydration gas pipe and a sintering gas pipe to supply dehydration and sintering gas to the furnace tube and the heating furnace; In the dehydration and sintering apparatus for an optical fiber preform including an exhaust side gas pipe for exhausting the dehydration and sintering gas of the furnace core tube and the heating furnace,
A pressure detector installed to detect the pressure in the sintering gas line, and dehydration in the supply side gas line when the measured value detected by the pressure detector exceeds a preset value. A gas pressure adjusting conduit having an open side valve that is opened to exhaust the sintering gas, and a valve that is always open and closes the sintering gas conduit in the above case are provided. It is what.

また、この発明の光ファイバ母材の脱水焼結装置は、脱水焼結する光ファイバ母材を収容する炉心管と、この炉心管の外周で前記光ファイバ母材を加熱するヒータを備えた加熱炉と、前記炉心管と前記加熱炉に脱水焼結用ガスを供給すべく少なくとも脱水用ガス管路と焼結用ガス管路を連結した供給側ガス管路と、前記炉心管と前記加熱炉の脱水焼結用ガスを排気する排気側ガス管路を備えた光ファイバ母材の脱水焼結装置において、
前記供給側ガス管路内の圧力を検出すべく設置した圧力検出装置と、この圧力検出装置で検出した測定値が予め設定した設定値を超えた場合に前記供給側ガス管路内の脱水焼結用ガスを排気すべく開放する開放側バルブを備えたガス圧調整用管路と、常時は開放し前記場合に前記供給側ガス管路を閉塞するバルブと、を設けたことを特徴とするものである。 Further, an optical fiber preform dehydration and sintering apparatus of the present invention includes a furnace core tube containing an optical fiber preform to be dehydrated and sintered, and a heater provided with a heater for heating the optical fiber preform on the outer periphery of the furnace core tube. A furnace, a supply side gas line connecting at least a dehydration gas line and a sintering gas line to supply dehydration and sintering gas to the furnace core and the heating furnace, the furnace core and the heating furnace In an optical fiber preform dehydration and sintering apparatus equipped with an exhaust side gas pipe for exhausting the dehydration and sintering gas of
A pressure detection device installed to detect the pressure in the supply side gas pipeline, and when the measured value detected by the pressure detection device exceeds a preset value, dehydration in the supply side gas pipeline A gas pressure adjusting conduit having an open side valve that opens to exhaust the working gas, and a valve that is always open and closes the supply side gas conduit in the above case are provided. Is.

この発明の光ファイバ母材の脱水焼結装置における炉心管保全方法は、脱水焼結する光ファイバ母材を収容する炉心管と、この炉心管の外周で前記光ファイバ母材を加熱するヒータを備えた加熱炉と、前記炉心管と前記加熱炉に脱水焼結用ガスを供給すべく少なくとも脱水用ガス管路と焼結用ガス管路を連結した供給側ガス管路と、前記炉心管と前記加熱炉の脱水焼結用ガスを排気する排気側ガス管路を備えた光ファイバ母材の脱水焼結装置における前記炉心管の破裂を防止するための、光ファイバ母材の脱水焼結装置における炉心管保全方法であって、
前記脱水焼結装置に、前記焼結用ガス管路内の圧力を検出すべく設置した圧力検出装置と、前記供給側ガス管路内の脱水焼結用ガスを排気すべく開閉可能な開放側バルブを備えたガス圧調整用管路と、前記焼結用ガス管路を開閉可能なバルブと、を設けておき、
常時は、前記開放側バルブを閉塞すると共に前記バルブを開放し、前記圧力検出装置で検出した測定値が予め設定した設定値を超えた場合に、前記開放側バルブを開放すると同時に前記バルブを閉塞することを特徴とするものである。 A method for maintaining a core tube in an optical fiber preform dehydrating and sintering apparatus according to the present invention comprises: a furnace core tube containing an optical fiber preform to be dehydrated and sintered; and a heater for heating the optical fiber preform on the outer periphery of the core tube. A heating furnace provided; a supply side gas line connecting at least a dehydration gas line and a sintering gas line to supply dehydration and sintering gas to the furnace core and the heating furnace; and to prevent rupture of the heating furnace Contact Keru the core tube in dehydrated sintering apparatus of an optical fiber preform having an exhaust-side gas pipe for exhausting the dehydrating sintering gas, the optical fiber preform dehydration baked A furnace core tube maintenance method in a sintering apparatus ,
A pressure detecting device installed in the dehydration sintering device to detect the pressure in the sintering gas line; and an open side that can be opened and closed to exhaust the dehydration sintering gas in the supply side gas line. A gas pressure adjusting pipe provided with a valve, and a valve capable of opening and closing the sintering gas pipe,
Normally, the open side valve is closed and the valve is opened. When the measured value detected by the pressure detection device exceeds a preset value, the open side valve is opened and the valve is closed simultaneously. It is characterized by doing.

また、この発明の光ファイバ母材の脱水焼結装置における炉心管保全方法は、脱水焼結する光ファイバ母材を収容する炉心管と、この炉心管の外周で前記光ファイバ母材を加熱するヒータを備えた加熱炉と、前記炉心管と前記加熱炉に脱水焼結用ガスを供給すべく少なくとも脱水用ガス管路と焼結用ガス管路を連結した供給側ガス管路と、前記炉心管と前記加熱炉の脱水焼結用ガスを排気する排気側ガス管路を備えた光ファイバ母材の脱水焼結装置における前記炉心管の破裂を防止するための、光ファイバ母材の脱水焼結装置における炉心管保全方法であって、
前記脱水焼結装置に、前記供給側ガス管路内の圧力を検出すべく設置した圧力検出装置と、前記供給側ガス管路内の脱水焼結用ガスを排気すべく開閉可能な開放側バルブを備えたガス圧調整用管路と、前記供給側ガス管路を開閉可能なバルブと、を設けておき、
常時は、前記開放側バルブを閉塞すると共に前記バルブを開放し、前記圧力検出装置で検出した測定値が予め設定した設定値を超えた場合に、前記開放側バルブを開放すると同時に前記バルブを閉塞することを特徴とするものである。 Also, a method for maintaining a core tube in an optical fiber preform dehydrating and sintering apparatus according to the present invention comprises heating a core tube containing an optical fiber preform to be dehydrated and sintered, and the optical fiber preform on the outer periphery of the core tube. A heating furnace provided with a heater; a supply side gas line connecting at least a dehydration gas line and a sintering gas line to supply dehydration sintering gas to the furnace core and the heating furnace; and the core for preventing your Keru rupture of the furnace tube to dehydration sintering apparatus of an optical fiber preform having an exhaust-side gas pipe for exhausting the dehydrating sintering gas of the tube the heating furnace, the optical fiber preform A furnace core tube maintenance method in a dehydration sintering apparatus ,
A pressure detecting device installed in the dehydration sintering device to detect the pressure in the supply side gas line, and an open side valve that can be opened and closed to exhaust the dehydration sintering gas in the supply side gas line And a gas pressure adjusting conduit provided with a valve capable of opening and closing the supply side gas conduit,
Normally, the open side valve is closed and the valve is opened. When the measured value detected by the pressure detection device exceeds a preset value, the open side valve is opened and the valve is closed simultaneously. It is characterized by doing.

以上のごとき課題を解決するための手段から理解されるように、この発明の請求項１〜請求項４によれば、ヒータの設定不具合等によって光ファイバ母材が溶けて膨張したために炉心管内を閉塞した場合、圧力検出装置で検出した測定値が予め設定した設定値を超えると、開放側バルブが作動してガス圧調整用管路を開放するので、供給側ガス管路の脱水焼結用ガスはガス圧調整用管路を経て外部へ排気される。その結果、炉心管が破裂して脱水焼結用ガスが外に漏れるといった事故を防止することができ、運転時の安全性および装置の保全性を向上できる。 As can be understood from the means for solving the above problems, according to the first to fourth aspects of the present invention, since the optical fiber preform melts and expands due to a heater setting failure or the like, the inside of the furnace core tube is expanded. In the case of blockage, if the measured value detected by the pressure detector exceeds the preset value, the open side valve is activated to open the gas pressure adjustment line. The gas is exhausted to the outside through a gas pressure adjusting pipe. As a result, it is possible to prevent an accident in which the core tube is ruptured and the dehydration and sintering gas leaks to the outside, and the safety during operation and the maintenance of the apparatus can be improved.

以下、この発明の実施の形態について図面を参照して説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図１を参照するに、第１の実施の形態に係る光ファイバ母材の脱水焼結装置１は、脱水焼結する光ファイバ母材３(スート母材)を収容する炉心管５と、この炉心管５の外周で前記光ファイバ母材３を加熱するヒータ７を備えた加熱炉９が備えられている。   Referring to FIG. 1, an optical fiber preform dehydration and sintering apparatus 1 according to a first embodiment includes a core tube 5 that houses an optical fiber preform 3 (soot preform) to be dehydrated and sintered, A heating furnace 9 having a heater 7 for heating the optical fiber preform 3 on the outer periphery of the furnace core tube 5 is provided.

また、炉心管５の上方には、前記光ファイバ母材３を把持して軸線回りに回転するためのスート回転駆動部１１が昇降自在に設けられている。   A soot rotation drive unit 11 for holding the optical fiber preform 3 and rotating around the axis is provided above the core tube 5 so as to be movable up and down.

さらに、前記炉心管５の下部側には、その炉心管５と前記加熱炉９に脱水焼結用ガスを供給する供給側ガス管路１３が連通しており、前記炉心管５の上部側には、前記炉心管５と前記加熱炉９の内部の脱水焼結用ガスを排気する排気側ガス管路１５が連通している。   Further, a supply side gas pipe 13 for supplying dehydration sintering gas to the furnace core tube 5 and the heating furnace 9 communicates with the lower side of the core tube 5. Is connected to an exhaust gas line 15 for exhausting the dehydration and sintering gas inside the furnace core tube 5 and the heating furnace 9.

なお、第１の実施の形態では、脱水焼結用ガスとしては、ヘリウムガス（Ｈｅ）、酸素(Ｏ２)、塩素ガス (Ｃｌ２)等の腐食性ガスが用いられる。 In the first embodiment, a corrosive gas such as helium gas (He), oxygen (O 2 ), or chlorine gas (Cl 2 ) is used as the dehydration sintering gas.

この実施の形態では、上記の供給側ガス管路１３は、焼結用ガス管路としての例えばヘリウムガス（Ｈｅ）用のヘリウムガス管路１７と、酸素(Ｏ２) 用の酸素ガス管路１９と、脱水用ガス管路としての例えば塩素ガス (Ｃｌ２) 用の塩素ガス管路２１が連結されている。 In this embodiment, the supply side gas pipe 13 includes, for example, a helium gas pipe 17 for helium gas (He) as a sintering gas pipe, and an oxygen gas pipe for oxygen (O 2 ). 19 and a chlorine gas pipe 21 for, for example, chlorine gas (Cl 2 ) as a dehydrating gas pipe are connected.

また、ヘリウムガス管路１７には、ヘリウムガス供給時に開放するヘリウムガス開放バルブ２３が介設されており、酸素ガス管路１９には、酸素ガス供給時に開放する酸素ガス開放バルブ２５が介設されており、塩素ガス管路２１には、塩素ガス供給時に開放する塩素ガス開放バルブ２７が介設されている。   The helium gas conduit 17 is provided with a helium gas release valve 23 that is opened when helium gas is supplied, and the oxygen gas conduit 19 is provided with an oxygen gas release valve 25 that is opened when oxygen gas is supplied. The chlorine gas pipe 21 is provided with a chlorine gas release valve 27 that opens when the chlorine gas is supplied.

また、上記のヘリウムガス管路１７には、そのヘリウムガス管路１７内の圧力を検出する圧力検出装置としての例えば圧力センサ２９が設置されている。上述したヘリウムガス開放バルブ２３は、ヘリウムガス供給時は常時は開放し、かつ前記圧力センサ２９で検出した測定値が予め設定した設定値を超えた場合に前記ヘリウムガス管路１７を閉塞するものである。   The helium gas pipe 17 is provided with, for example, a pressure sensor 29 as a pressure detecting device for detecting the pressure in the helium gas pipe 17. The above-described helium gas release valve 23 is normally opened when helium gas is supplied, and closes the helium gas conduit 17 when the measured value detected by the pressure sensor 29 exceeds a preset value. It is.

さらに、前記炉心管５と前記圧力センサ２９との間の供給側ガス管路１３には、その供給側ガス管路１３内の脱水焼結用ガスを排気するためのガス圧調整用管路３１が連結されており、このガス圧調整用管路３１には、常時は閉塞し、かつ前記圧力センサ２９で検出した測定値が予め設定した設定値を超えた場合にガス圧調整用管路３１を開放するための開放側バルブ３３が設けられている。   Further, a gas pressure adjusting line 31 for exhausting the dehydration sintering gas in the supply side gas line 13 is provided in the supply side gas line 13 between the furnace core tube 5 and the pressure sensor 29. Is connected to the gas pressure adjusting pipe 31. When the measured value detected by the pressure sensor 29 exceeds a preset value, the gas pressure adjusting pipe 31 is closed. An open side valve 33 is provided for opening the valve.

第１の実施の形態では、前記設定値は０．００８ＭＰａ（８ｋＰａ）としている。   In the first embodiment, the set value is set to 0.008 MPa (8 kPa).

なお、第１の実施の形態では、前記圧力センサ２９がヘリウムガス管路１７に設けられているのは、厳密に言えば、光ファイバ母材３が溶けて膨張したために炉心管５内を閉塞させる可能性があるのは、塩素ガス (Ｃｌ２)を使用するときの脱水時ではなく、ヘリウムガス（Ｈｅ）を使用するときの焼結時であるので、基本的には焼結用のガスとしてのヘリウムガス（Ｈｅ）を供給する供給側ガス管路（ヘリウムガス管路１７）の圧力を検出するように設置している。 In the first embodiment, the pressure sensor 29 is provided in the helium gas pipe 17 because, strictly speaking, the core tube 5 is closed because the optical fiber preform 3 is melted and expanded. Since there is a possibility that it is not during dehydration when using chlorine gas (Cl 2 ) but during sintering when helium gas (He) is used, the gas for sintering is basically used. Is installed so as to detect the pressure of the supply side gas line (helium gas line 17) for supplying helium gas (He).

上記構成により、脱水焼結すべき光ファイバ母材３を脱水焼結する際に、光ファイバ母材３が炉心管５の上方のスート回転駆動部１１により把持されて軸線回りに回転しながら下降して炉心管５内に収容される。脱水焼結用ガスは供給側ガス管路１３を経て炉心管５の下部からその炉心管５と加熱炉９の内部に供給されてから、炉心管５の上部から排気側ガス管路１５を経て排気される。   With the above configuration, when the optical fiber preform 3 to be dehydrated and sintered is dehydrated and sintered, the optical fiber preform 3 is held by the soot rotation drive unit 11 above the core tube 5 and is lowered while rotating around the axis. And accommodated in the core tube 5. The dehydration and sintering gas is supplied from the lower part of the core tube 5 to the inside of the core tube 5 and the heating furnace 9 through the supply side gas line 13 and then from the upper part of the core tube 5 through the exhaust side gas line 15. Exhausted.

炉心管５内に収容された光ファイバ母材３は、炉心管５の外側に設けた加熱炉９により炉心管５の内部で加熱されてＯＨ基が除去されることになる。このとき、例えば、ヒータ７の設定不具合等によって光ファイバ母材３が溶けて膨張したために炉心管５内を閉塞した場合、脱水焼結用ガスが排気側ガス管路１５から排気されないために、炉心管５内の圧力が高くなる。すると、供給側ガス管路１３の圧力も高くなるために圧力センサ２９で検出した測定値が予め設定した設定値の０．００８ＭＰａ（８ｋＰａ）を超えることになる。   The optical fiber preform 3 accommodated in the furnace core tube 5 is heated inside the furnace core tube 5 by a heating furnace 9 provided outside the furnace core tube 5 to remove OH groups. At this time, for example, when the inside of the core tube 5 is closed because the optical fiber preform 3 is melted and expanded due to a setting failure of the heater 7 or the like, the dehydration sintering gas is not exhausted from the exhaust side gas conduit 15. The pressure in the furnace core tube 5 is increased. Then, since the pressure of the supply side gas pipeline 13 also increases, the measured value detected by the pressure sensor 29 exceeds the preset value of 0.008 MPa (8 kPa).

この時、ヘリウムガス開放バルブ２３が作動してヘリウムガス管路１７を閉塞してヘリウムガス供給を停止すると同時に、開放側バルブ３３が作動してガス圧調整用管路３１を開放するので、供給側ガス管路１３並びに炉心管５内の脱水焼結用ガスはガス圧調整用管路３１を経てガス抜き口から外部へ排気されるインターロックとなる。その結果、炉心管５が破裂して脱水焼結用ガスが外に漏れるといった事故を防止することができ、運転時の安全性および装置の保全性を向上できる。   At this time, the helium gas release valve 23 is operated to close the helium gas pipe line 17 to stop the helium gas supply, and at the same time, the open side valve 33 is operated to open the gas pressure adjusting pipe line 31. The dehydration and sintering gas in the side gas pipe 13 and the furnace core pipe 5 is an interlock that is exhausted to the outside from the gas vent through the gas pressure adjusting pipe 31. As a result, it is possible to prevent an accident in which the core tube 5 is ruptured and the dehydration and sintering gas leaks to the outside, and the safety during operation and the maintenance of the apparatus can be improved.

なお、開放側バルブ３３によりガス圧調整用管路３１が開放すれば、供給側ガス管路１３と連通する炉心管５内の圧力は前記圧力センサ２９の設定値より高くならないので、上記のヘリウムガス開放バルブ２３は必ずしも設けなくてもよい。すなわち、Ｈｅが供給されつづけてもガス圧調整用管路３１から排気されることになるので、炉心管５の内部の圧力は高くならない。   If the gas pressure adjusting pipe 31 is opened by the open side valve 33, the pressure in the reactor core pipe 5 communicating with the supply side gas pipe 13 does not become higher than the set value of the pressure sensor 29. The gas release valve 23 is not necessarily provided. That is, even if He is continuously supplied, the gas pressure adjusting pipe 31 is exhausted, so that the pressure inside the core tube 5 does not increase.

次に、第２の実施の形態に係る光ファイバ母材の脱水焼結装置３５について図面を参照して説明する。なお、第１の実施の形態に係る光ファイバ母材３の脱水焼結装置１と同様の部材は同じ符号を付して特に異なる点を説明し、同様の部分についての詳細な説明は省略する。   Next, an optical fiber preform dehydrating and sintering apparatus 35 according to a second embodiment will be described with reference to the drawings. The same members as those in the dehydration and sintering apparatus 1 for the optical fiber preform 3 according to the first embodiment are denoted by the same reference numerals, and particularly different points will be described, and detailed description of the same parts will be omitted. .

図２を参照するに、この光ファイバ母材の脱水焼結装置３５は、ヘリウムガス管路１７と酸素ガス管路１９と塩素ガス管路２１を連結した供給側ガス管路１３に、その供給側ガス管路１３内の圧力を検出する圧力センサ２９が設置されている。さらに、前記圧力センサ２９と前記炉心管５との間の供給側ガス管路１３には、常時は開放し、かつ前記圧力センサ２９で検出した測定値が予め設定した設定値を超えた場合に前記供給側ガス管路１３を閉塞するための閉塞側バルブ３７が設けられている。さらに、前記閉塞側バルブ３７と前記圧力センサ２９との間の供給側ガス管路１３には、その供給側ガス管路１３内の脱水焼結用ガスを排気するためのガス圧調整用管路３１が連結されており、このガス圧調整用管路３１には、常時は閉塞し、かつ前記圧力センサ２９で検出した測定値が予め設定した設定値を超えた場合にガス圧調整用管路３１を開放するための開放側バルブ３３が設けられている。   Referring to FIG. 2, this optical fiber preform dehydration and sintering apparatus 35 is supplied to a supply side gas line 13 in which a helium gas line 17, an oxygen gas line 19, and a chlorine gas line 21 are connected. A pressure sensor 29 for detecting the pressure in the side gas pipe 13 is installed. Further, when the supply side gas line 13 between the pressure sensor 29 and the core tube 5 is always open and the measured value detected by the pressure sensor 29 exceeds a preset value, A closing side valve 37 for closing the supply side gas pipe 13 is provided. Further, a gas pressure adjusting pipe for exhausting the dehydration sintering gas in the supply side gas pipe 13 is provided in the supply side gas pipe 13 between the closing side valve 37 and the pressure sensor 29. 31 is connected to the gas pressure adjusting pipe 31. When the measured value detected by the pressure sensor 29 exceeds a preset value, the gas pressure adjusting pipe 31 is normally closed. An open side valve 33 for opening 31 is provided.

第２の実施の形態でも、第１の実施の形態と同様に、前記設定値は０．００８ＭＰａ（８ｋＰａ）としている。   Also in the second embodiment, the set value is set to 0.008 MPa (8 kPa), as in the first embodiment.

上記構成により、例えば、ヒータ７の設定不具合等によって光ファイバ母材３が溶けて膨張したために炉心管５内を閉塞した場合、炉心管５並びに供給側ガス管路１３の圧力も高くなるために圧力センサ２９で検出した測定値が予め設定した設定値の０．００８ＭＰａ（８ｋＰａ）を超えることになる。   With the above configuration, for example, when the inside of the core tube 5 is closed because the optical fiber preform 3 is melted and expanded due to a setting failure of the heater 7 or the like, the pressure in the core tube 5 and the supply side gas conduit 13 is also increased. The measured value detected by the pressure sensor 29 exceeds the preset value of 0.008 MPa (8 kPa).

この時、閉塞側バルブ３７が作動して供給側ガス管路１３を閉塞すると同時に、開放側バルブ３３が作動してガス圧調整用管路３１を開放するので、供給側ガス管路１３の脱水焼結用ガスは炉心管５へ供給されず、ガス圧調整用管路３１を経てガス抜き口から外部へ排気されることになる。その結果、炉心管５が破裂して脱水焼結用ガスが外に漏れるといった事故を防止することができ、運転時の安全性および装置の保全性を向上できる。   At this time, the closing side valve 37 is actuated to close the supply side gas pipeline 13, and at the same time, the opening side valve 33 is actuated to open the gas pressure adjusting conduit 31. The sintering gas is not supplied to the furnace core tube 5 but is exhausted to the outside from the gas vent through the gas pressure adjusting conduit 31. As a result, it is possible to prevent an accident in which the core tube 5 is ruptured and the dehydration and sintering gas leaks to the outside, and the safety during operation and the maintenance of the apparatus can be improved.

なお、開放側バルブ３３によりガス圧調整用管路３１が開放すれば、供給側ガス管路１３と連通する炉心管５内の圧力は前記圧力センサ２９の設定値より高くならないので、上記の閉塞側バルブ３７は必ずしも設けなくてもよい。   If the gas pressure adjusting pipe 31 is opened by the open side valve 33, the pressure in the core tube 5 communicating with the supply side gas pipe 13 does not become higher than the set value of the pressure sensor 29. The side valve 37 is not necessarily provided.

次に、第３の実施の形態に係る光ファイバ母材の脱水焼結装置３９について図面を参照して説明する。なお、第１、第２の実施の形態に係る光ファイバ母材の脱水焼結装置１、３５と同様の部材は同じ符号を付して特に異なる点を説明し、同様の部分についての詳細な説明は省略する。   Next, an optical fiber preform dehydrating and sintering apparatus 39 according to a third embodiment will be described with reference to the drawings. The same members as those of the optical fiber preform dehydrating and sintering apparatuses 1 and 35 according to the first and second embodiments are denoted by the same reference numerals, and particularly different points are described. Description is omitted.

図３を参照するに、この光ファイバ母材の脱水焼結装置３９は、焼結用ガス管路としての例えばヘリウムガス管路１７と酸素ガス管路１９と脱水用ガス管路としての例えば塩素ガス管路２１を連結した供給側ガス管路１３に、その供給側ガス管路１３内の脱水焼結用ガスを排気するためのガス圧調整用管路３１が連結されており、このガス圧調整用管路３１には、常時は閉塞し、かつ供給側ガス管路１３の圧力が予め設定した設定値を超えた場合に前記供給側ガス管路１３内の脱水焼結用ガスを排気すべく動作する安全バルブ４１が設けられている。   Referring to FIG. 3, this optical fiber preform dehydrating and sintering apparatus 39 includes, for example, a helium gas line 17 and an oxygen gas line 19 as a sintering gas line, and chlorine as a dehydrating gas line, for example. A gas pressure adjusting pipe 31 for exhausting the dehydration and sintering gas in the supply side gas pipe 13 is connected to the supply side gas pipe 13 to which the gas pipe 21 is connected. The adjustment pipe 31 is normally closed, and the dehydration and sintering gas in the supply side gas pipe 13 is exhausted when the pressure of the supply side gas pipe 13 exceeds a preset value. A safety valve 41 is provided which operates accordingly.

第３の実施の形態でも、第１、第２の実施の形態と同様に、前記設定値は０．００８ＭＰａ（８ｋＰａ）としている。   Also in the third embodiment, the set value is set to 0.008 MPa (8 kPa), as in the first and second embodiments.

上記構成により、例えば、ヒータ７の設定不具合等によって光ファイバ母材３が溶けて膨張したために炉心管５内を閉塞し、供給側ガス管路１３内の圧力が予め設定した設定値の０．００８ＭＰａ（８ｋＰａ）を超える時、安全バルブ４１が作動して供給側ガス管路１３の脱水焼結用ガスがガス圧調整用管路３１を経てガス抜き口から外部へ排気されることになる。その結果、炉心管５が破裂して脱水焼結用ガスが外に漏れるといった事故を防止することができ、運転時の安全性および装置の保全性を向上できる。   With the above configuration, for example, because the optical fiber preform 3 is melted and expanded due to a setting failure of the heater 7 or the like, the inside of the core tube 5 is closed, and the pressure in the supply side gas pipe 13 is set to a preset value of 0. When the pressure exceeds 008 MPa (8 kPa), the safety valve 41 is operated, and the dehydration and sintering gas in the supply side gas line 13 is exhausted from the gas vent through the gas pressure adjusting line 31 to the outside. As a result, it is possible to prevent an accident in which the core tube 5 is ruptured and the dehydration and sintering gas leaks to the outside, and the safety during operation and the maintenance of the apparatus can be improved.

なお、上記の安全バルブ４１は、前述した第１の実施の形態と同様に、焼結用のガスとしてのヘリウムガス（Ｈｅ）を供給するための焼結用ガス管路としての例えばヘリウムガス管路１７に設けることができる。また、この安全バルブ４１を使用する方式は、炉心管５が破裂しないように供給側のガス圧が設定値を超えないように制御することができるので、外付焼結炉に有効に適用することができる。   The safety valve 41 is, for example, a helium gas pipe as a sintering gas line for supplying helium gas (He) as a sintering gas, as in the first embodiment. It can be provided in the path 17. Further, the method using the safety valve 41 can be controlled effectively so that the gas pressure on the supply side does not exceed the set value so that the core tube 5 does not rupture. be able to.

この発明の第１の実施の形態の光ファイバ母材の脱水焼結装置を示す概略的な構造説明図である。It is a schematic structure explanatory drawing which shows the dehydration sintering apparatus of the optical fiber preform of 1st Embodiment of this invention. この発明の第２の実施の形態の光ファイバ母材の脱水焼結装置を示す概略的な構造説明図である。It is a schematic structure explanatory drawing which shows the dehydration sintering apparatus of the optical fiber preform of 2nd Embodiment of this invention. この発明の第３の実施の形態の光ファイバ母材の脱水焼結装置を示す概略的な構造説明図である。It is a schematic structure explanatory drawing which shows the dehydration sintering apparatus of the optical fiber preform of 3rd Embodiment of this invention. 従来の光ファイバ母材の脱水焼結装置を示す概略的な構造説明図である。It is a schematic structure explanatory drawing which shows the dehydration sintering apparatus of the conventional optical fiber preform | base_material.

符号の説明Explanation of symbols

１ 光ファイバ母材の脱水焼結装置（第１の実施の形態の）
３ 光ファイバ母材 (スート母材)
５ 炉心管
７ ヒータ
９ 加熱炉
１１ スート回転駆動部
１３ 供給側ガス管路
１５ 排気側ガス管路
１７ ヘリウムガス管路
１９ 酸素ガス管路
２１ 塩素ガス管路
２３ ヘリウムガス開放バルブ
２５ 酸素ガス開放バルブ
２７ 塩素ガス開放バルブ
２９ 圧力センサ（圧力検出装置）
３１ ガス圧調整用管路
３３ 開放側バルブ
３５ 光ファイバ母材の脱水焼結装置（第２の実施の形態の）
３７ 閉塞側バルブ
３９ 光ファイバ母材の脱水焼結装置（第３の実施の形態の）
４１ 安全バルブ 1 Optical fiber preform dehydration sintering apparatus (of the first embodiment)
3 Optical fiber base material (soot base material)
5 Furnace tube 7 Heater 9 Heating furnace 11 Soot rotation drive part 13 Supply side gas line 15 Exhaust side gas line 17 Helium gas line 19 Oxygen gas line 21 Chlorine gas line 23 Helium gas release valve 25 Oxygen gas release valve 27 Chlorine gas release valve 29 Pressure sensor (pressure detector)
31 Gas Pressure Adjusting Pipe Line 33 Opening Side Valve 35 Optical Fiber Base Material Dehydration and Sintering Device (of the Second Embodiment)
37 Closure side valve 39 Optical fiber preform dehydration sintering apparatus (in the third embodiment)
41 Safety valve

Claims (4)

脱水焼結する光ファイバ母材を収容する炉心管と、この炉心管の外周で前記光ファイバ母材を加熱するヒータを備えた加熱炉と、前記炉心管と前記加熱炉に脱水焼結用ガスを供給すべく少なくとも脱水用ガス管路と焼結用ガス管路を連結した供給側ガス管路と、前記炉心管と前記加熱炉の脱水焼結用ガスを排気する排気側ガス管路を備えた光ファイバ母材の脱水焼結装置において、
前記焼結用ガス管路内の圧力を検出すべく設置した圧力検出装置と、
この圧力検出装置で検出した測定値が予め設定した設定値を超えた場合に前記供給側ガス管路内の脱水焼結用ガスを排気すべく開放する開放側バルブを備えたガス圧調整用管路と、
常時は開放し前記場合に前記焼結用ガス管路を閉塞するバルブと、
を設けたことを特徴とする光ファイバ母材の脱水焼結装置。 A furnace tube containing an optical fiber preform to be dehydrated and sintered, a heating furnace equipped with a heater for heating the optical fiber preform on the outer periphery of the furnace tube, and a gas for dehydration and sintering in the furnace tube and the heating furnace A supply-side gas line connecting at least a dehydration gas line and a sintering gas line, and an exhaust-side gas line that exhausts the dehydration and sintering gas of the furnace core tube and the heating furnace. In the optical fiber preform dehydration and sintering equipment,
A pressure detector installed to detect the pressure in the sintering gas line;
A gas pressure adjusting pipe provided with an open side valve that opens to exhaust the dehydration and sintering gas in the supply side gas pipe when the measured value detected by the pressure detecting device exceeds a preset value. Road,
A valve that is normally open and closes the sintering gas line in this case;
An optical fiber preform dehydrating and sintering apparatus characterized by comprising: 脱水焼結する光ファイバ母材を収容する炉心管と、この炉心管の外周で前記光ファイバ母材を加熱するヒータを備えた加熱炉と、前記炉心管と前記加熱炉に脱水焼結用ガスを供給すべく少なくとも脱水用ガス管路と焼結用ガス管路を連結した供給側ガス管路と、前記炉心管と前記加熱炉の脱水焼結用ガスを排気する排気側ガス管路を備えた光ファイバ母材の脱水焼結装置において、
前記供給側ガス管路内の圧力を検出すべく設置した圧力検出装置と、
この圧力検出装置で検出した測定値が予め設定した設定値を超えた場合に前記供給側ガス管路内の脱水焼結用ガスを排気すべく開放する開放側バルブを備えたガス圧調整用管路と、
常時は開放し前記場合に前記供給側ガス管路を閉塞するバルブと、
を設けたことを特徴とする光ファイバ母材の脱水焼結装置。 A furnace tube containing an optical fiber preform to be dehydrated and sintered, a heating furnace equipped with a heater for heating the optical fiber preform on the outer periphery of the furnace tube, and a gas for dehydration and sintering in the furnace tube and the heating furnace A supply-side gas line connecting at least a dehydration gas line and a sintering gas line, and an exhaust-side gas line that exhausts the dehydration and sintering gas of the furnace core tube and the heating furnace. In the optical fiber preform dehydration and sintering equipment,
A pressure detector installed to detect the pressure in the supply side gas line;
A gas pressure adjusting pipe provided with an open side valve that opens to exhaust the dehydration and sintering gas in the supply side gas pipe when the measured value detected by the pressure detecting device exceeds a preset value. Road,
A valve that is normally open and closes the supply-side gas line in such a case;
An optical fiber preform dehydrating and sintering apparatus characterized by comprising: 脱水焼結する光ファイバ母材を収容する炉心管と、この炉心管の外周で前記光ファイバ母材を加熱するヒータを備えた加熱炉と、前記炉心管と前記加熱炉に脱水焼結用ガスを供給すべく少なくとも脱水用ガス管路と焼結用ガス管路を連結した供給側ガス管路と、前記炉心管と前記加熱炉の脱水焼結用ガスを排気する排気側ガス管路を備えた光ファイバ母材の脱水焼結装置における前記炉心管の破裂を防止するための、光ファイバ母材の脱水焼結装置における炉心管保全方法であって、
前記脱水焼結装置に、前記焼結用ガス管路内の圧力を検出すべく設置した圧力検出装置と、前記供給側ガス管路内の脱水焼結用ガスを排気すべく開閉可能な開放側バルブを備えたガス圧調整用管路と、前記焼結用ガス管路を開閉可能なバルブと、を設けておき、
常時は、前記開放側バルブを閉塞すると共に前記バルブを開放し、
前記圧力検出装置で検出した測定値が予め設定した設定値を超えた場合に、前記開放側バルブを開放すると同時に前記バルブを閉塞することを特徴とする光ファイバ母材の脱水焼結装置における炉心管保全方法。 A furnace tube containing an optical fiber preform to be dehydrated and sintered, a heating furnace equipped with a heater for heating the optical fiber preform on the outer periphery of the furnace tube, and a gas for dehydration and sintering in the furnace tube and the heating furnace A supply-side gas line connecting at least a dehydration gas line and a sintering gas line, and an exhaust-side gas line that exhausts the dehydration and sintering gas of the furnace core tube and the heating furnace. to prevent rupture of the furnace tube Keru Contact dehydrated sintering apparatus of the optical fiber preform was, a core tube conservation method in dewatering sintering apparatus of an optical fiber preform,
A pressure detecting device installed in the dehydration sintering device to detect the pressure in the sintering gas line; and an open side that can be opened and closed to exhaust the dehydration sintering gas in the supply side gas line. A gas pressure adjusting pipe provided with a valve, and a valve capable of opening and closing the sintering gas pipe,
Normally, the open side valve is closed and the valve is opened.
A core in a dehydration sintering apparatus for an optical fiber preform , wherein when the measured value detected by the pressure detector exceeds a preset value, the open side valve is opened and the valve is closed simultaneously Pipe maintenance method . 脱水焼結する光ファイバ母材を収容する炉心管と、この炉心管の外周で前記光ファイバ母材を加熱するヒータを備えた加熱炉と、前記炉心管と前記加熱炉に脱水焼結用ガスを供給すべく少なくとも脱水用ガス管路と焼結用ガス管路を連結した供給側ガス管路と、前記炉心管と前記加熱炉の脱水焼結用ガスを排気する排気側ガス管路を備えた光ファイバ母材の脱水焼結装置における前記炉心管の破裂を防止するための、光ファイバ母材の脱水焼結装置における炉心管保全方法であって、
前記脱水焼結装置に、前記供給側ガス管路内の圧力を検出すべく設置した圧力検出装置と、前記供給側ガス管路内の脱水焼結用ガスを排気すべく開閉可能な開放側バルブを備えたガス圧調整用管路と、前記供給側ガス管路を開閉可能なバルブと、を設けておき、
常時は、前記開放側バルブを閉塞すると共に前記バルブを開放し、
前記圧力検出装置で検出した測定値が予め設定した設定値を超えた場合に、前記開放側バルブを開放すると同時に前記バルブを閉塞することを特徴とする光ファイバ母材の脱水焼結装置における炉心管保全方法。 A furnace tube containing an optical fiber preform to be dehydrated and sintered, a heating furnace equipped with a heater for heating the optical fiber preform on the outer periphery of the furnace tube, and a gas for dehydration and sintering in the furnace tube and the heating furnace A supply-side gas line connecting at least a dehydration gas line and a sintering gas line, and an exhaust-side gas line that exhausts the dehydration and sintering gas of the furnace core tube and the heating furnace. to prevent rupture of the furnace tube Keru Contact dehydrated sintering apparatus of the optical fiber preform was, a core tube conservation method in dewatering sintering apparatus of an optical fiber preform,
A pressure detecting device installed in the dehydration sintering device to detect the pressure in the supply side gas line, and an open side valve that can be opened and closed to exhaust the dehydration sintering gas in the supply side gas line And a gas pressure adjusting conduit provided with a valve capable of opening and closing the supply side gas conduit,
Normally, the open side valve is closed and the valve is opened.
A core in a dehydration sintering apparatus for an optical fiber preform , wherein when the measured value detected by the pressure detector exceeds a preset value, the open side valve is opened and the valve is closed simultaneously Pipe maintenance method .
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