JP5202533B2 - 超解像近接場構造を伴うマスク層を備える光学記憶媒体 - Google Patents
超解像近接場構造を伴うマスク層を備える光学記憶媒体 Download PDFInfo
- Publication number
- JP5202533B2 JP5202533B2 JP2009531852A JP2009531852A JP5202533B2 JP 5202533 B2 JP5202533 B2 JP 5202533B2 JP 2009531852 A JP2009531852 A JP 2009531852A JP 2009531852 A JP2009531852 A JP 2009531852A JP 5202533 B2 JP5202533 B2 JP 5202533B2
- Authority
- JP
- Japan
- Prior art keywords
- optical storage
- storage medium
- mask layer
- semiconductor material
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 43
- 238000003860 storage Methods 0.000 title claims abstract description 38
- 239000004065 semiconductor Substances 0.000 claims abstract description 51
- 239000000463 material Substances 0.000 claims abstract description 31
- 238000002310 reflectometry Methods 0.000 claims abstract description 27
- 239000011669 selenium Substances 0.000 claims abstract description 8
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052711 selenium Inorganic materials 0.000 claims abstract description 6
- 229910052714 tellurium Inorganic materials 0.000 claims abstract description 6
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000002019 doping agent Substances 0.000 claims abstract description 5
- 229910000846 In alloy Inorganic materials 0.000 claims abstract description 4
- 239000010410 layer Substances 0.000 claims description 71
- 239000000758 substrate Substances 0.000 claims description 8
- 239000011241 protective layer Substances 0.000 claims description 7
- 229910000807 Ga alloy Inorganic materials 0.000 claims 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 abstract description 14
- 238000005477 sputtering target Methods 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000000151 deposition Methods 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 6
- 239000000969 carrier Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000003574 free electron Substances 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229910005542 GaSb Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012782 phase change material Substances 0.000 description 1
- 201000010065 polycystic ovary syndrome Diseases 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
- G11B7/2578—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/2403—Layers; Shape, structure or physical properties thereof
- G11B7/24056—Light transmission layers lying on the light entrance side and being thinner than the substrate, e.g. specially adapted for Blu-ray® discs
- G11B7/24059—Light transmission layers lying on the light entrance side and being thinner than the substrate, e.g. specially adapted for Blu-ray® discs specially adapted for near-field recording or reproduction
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/21—Circular sheet or circular blank
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Optical Recording Or Reproduction (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP06122288.1 | 2006-10-13 | ||
| EP06122288A EP1912216A1 (en) | 2006-10-13 | 2006-10-13 | Optical storage medium comprising a mask layer with a super resolution near field structure |
| PCT/EP2007/060854 WO2008043824A1 (en) | 2006-10-13 | 2007-10-11 | Optical storage medium comprising a mask layer with a super resolution near field structure |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010506343A JP2010506343A (ja) | 2010-02-25 |
| JP2010506343A5 JP2010506343A5 (enExample) | 2010-11-18 |
| JP5202533B2 true JP5202533B2 (ja) | 2013-06-05 |
Family
ID=38319257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009531852A Expired - Fee Related JP5202533B2 (ja) | 2006-10-13 | 2007-10-11 | 超解像近接場構造を伴うマスク層を備える光学記憶媒体 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8067079B2 (enExample) |
| EP (2) | EP1912216A1 (enExample) |
| JP (1) | JP5202533B2 (enExample) |
| KR (1) | KR101413211B1 (enExample) |
| CN (1) | CN101523492B (enExample) |
| AT (1) | ATE500589T1 (enExample) |
| DE (1) | DE602007012926D1 (enExample) |
| WO (1) | WO2008043824A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2914775B1 (fr) * | 2007-04-06 | 2009-05-15 | Commissariat Energie Atomique | Support d'enregistrement optique en super-resolution |
| FR2929747A1 (fr) * | 2008-04-04 | 2009-10-09 | Commissariat Energie Atomique | Disque optique a super-resolution a stabilite de lecture elevee |
| EP2196993A1 (en) * | 2008-12-02 | 2010-06-16 | Thomson Licensing | Optical storage medium comprising two nonlinear layers |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06236578A (ja) * | 1993-02-12 | 1994-08-23 | Nec Corp | 光ディスク |
| US5555537A (en) * | 1995-06-30 | 1996-09-10 | International Business Machines Corporation | Optical data storage system with multiple write-once phase-change recording layers |
| US6187406B1 (en) * | 1997-03-17 | 2001-02-13 | Kabushiki Kaisha Toshiba | Optical disk and optical disk drive |
| JPH10320857A (ja) * | 1997-03-17 | 1998-12-04 | Toshiba Corp | 光記録媒体およびその超解像再生方法 |
| JPH11273148A (ja) * | 1998-03-20 | 1999-10-08 | Toshiba Corp | 光ディスクおよびその記録再生方法 |
| JP2001056961A (ja) * | 1999-08-17 | 2001-02-27 | Sharp Corp | 光記録媒体及びその再生方法 |
| JP2002249633A (ja) * | 2001-02-23 | 2002-09-06 | Mitsubishi Chemicals Corp | 半導体結晶粒子を含有する高分子組成物及びその薄膜状成形体 |
| JP3836722B2 (ja) * | 2001-12-28 | 2006-10-25 | 株式会社日立製作所 | 非線形光学薄膜とそれを用いた光情報記録媒体及び光スイッチ |
| JP2004310803A (ja) * | 2003-04-01 | 2004-11-04 | Samsung Electronics Co Ltd | 超解像近接場構造の記録媒体、その再生方法及び再生装置 |
| KR100754166B1 (ko) * | 2004-05-17 | 2007-09-03 | 삼성전자주식회사 | 초해상 정보 저장매체 및 그 정보 기록 및/또는 재생기기 |
-
2006
- 2006-10-13 EP EP06122288A patent/EP1912216A1/en not_active Withdrawn
-
2007
- 2007-10-11 CN CN2007800381181A patent/CN101523492B/zh not_active Expired - Fee Related
- 2007-10-11 JP JP2009531852A patent/JP5202533B2/ja not_active Expired - Fee Related
- 2007-10-11 US US12/311,716 patent/US8067079B2/en not_active Expired - Fee Related
- 2007-10-11 KR KR1020097006650A patent/KR101413211B1/ko not_active Expired - Fee Related
- 2007-10-11 AT AT07821221T patent/ATE500589T1/de not_active IP Right Cessation
- 2007-10-11 DE DE602007012926T patent/DE602007012926D1/de active Active
- 2007-10-11 WO PCT/EP2007/060854 patent/WO2008043824A1/en not_active Ceased
- 2007-10-11 EP EP07821221A patent/EP2084706B1/en not_active Not-in-force
Also Published As
| Publication number | Publication date |
|---|---|
| ATE500589T1 (de) | 2011-03-15 |
| KR20090064408A (ko) | 2009-06-18 |
| JP2010506343A (ja) | 2010-02-25 |
| US8067079B2 (en) | 2011-11-29 |
| EP2084706B1 (en) | 2011-03-02 |
| US20100189950A1 (en) | 2010-07-29 |
| EP1912216A1 (en) | 2008-04-16 |
| KR101413211B1 (ko) | 2014-06-27 |
| DE602007012926D1 (de) | 2011-04-14 |
| CN101523492A (zh) | 2009-09-02 |
| CN101523492B (zh) | 2011-03-23 |
| WO2008043824A1 (en) | 2008-04-17 |
| EP2084706A1 (en) | 2009-08-05 |
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