JP5202100B2 - Holding device with imaging device - Google Patents

Description

  The present invention relates to a holding device that holds an object such as an electronic circuit component by a plurality of suction nozzles, and more particularly to a holding device that simultaneously performs imaging from the side of two or more suction nozzles. is there.

  If the suction nozzle is imaged from the side, for example, the position of the tip of the suction nozzle is acquired, it is determined whether the tip surface is worn, or the thickness of the object sucked by the suction nozzle is acquired. Control the movement of the suction nozzle in the axial direction by determining whether or not the object to be sucked is sucked or by obtaining the position of the end of the target opposite to the side held by the suction nozzle Or can be used. However, when the holding device includes a plurality of suction nozzles, it takes time to individually capture images for the plurality of suction nozzles.

  For this reason, in the electronic circuit component mounting apparatus described in Patent Document 1 below, the electronic circuit components respectively sucked by a plurality of suction nozzles are simultaneously imaged by the imaging device. In this electronic circuit component mounting apparatus, the mounting head is moved in the horizontal direction by the moving device, receives the electronic circuit component from the component supply device, and mounts it on the circuit board. The mounting head includes a columnar head body and four nozzle heads arranged at equiangular intervals on the outer peripheral surface of the head body, and a prism is provided concentrically with the head body on the lower surface of the head body. Yes. The prism has a conical shape and is provided with a posture in which the apex faces downward, and is positioned inside the suction nozzle held by each of the four nozzle heads, and the electrons held by each of the suction nozzles. It is made to oppose with a circuit component. In addition, an imaging device is fixed to the device main body of the electronic circuit component mounting device so as to face upward.

  When the electronic circuit component is mounted on the circuit board, the mounting head is moved to the component supply device by the moving device, and each of the four suction nozzles receives the electronic circuit component from the component supply device. After receiving the electronic circuit component, the mounting head is moved to the imaging device, and the electronic circuit component held by the suction nozzle is imaged by the imaging device. The mounting head is stopped by moving the prism axis to a position where it coincides with the optical axis of the imaging device, and the light that forms the image of the side surface of the electronic circuit component held by each of the four suction nozzles is lowered by the prism. Is reflected on the image pickup device and is incident on the image pickup device, and images of the four electronic circuit components viewed from the side are simultaneously picked up. The size of the electronic circuit component is obtained based on the image data acquired by this imaging, it is determined whether or not the electronic circuit component to be sucked is sucked, and the electronic circuit component to be sucked is sucked. The subsequent steps are performed only for the suction nozzle.

In this way, if the electronic circuit components held by the plurality of suction nozzles are simultaneously imaged, the imaging is performed more efficiently than in the case of individually imaging. In addition, it is not necessary to position the plurality of suction nozzles sequentially with respect to the imaging device as in the case of performing imaging from the side of the electronic circuit component by the imaging device individually for the plurality of suction nozzles. The positioning device for positioning the plurality of suction nozzles with respect to the imaging device is unnecessary, and accordingly, the device installation space can be reduced, and if the electronic circuit component needs to be imaged again, the electronic Imaging can be performed without positioning the suction nozzle holding the circuit component with respect to the imaging device. Furthermore, as compared with the case where a plurality of image pickup devices are provided and each of the image pickup devices picks up an electronic circuit component from the side, the installation space and device cost of the image pickup device can be reduced, and image processing can be performed quickly.
JP 2005-72046 A

  The present invention has been made in view of the above circumstances, and can perform imaging from the side of a plurality of suction nozzles at the same time without wasting time, and the configuration of the holding device described in Patent Document 1 is configured. It is an object to provide a different holding device.

The above-described problems include: (a) a holding head that includes a plurality of suction nozzles and sucks and holds an object by each of the suction nozzles; and (b) a side of the plurality of suction nozzles. And an imaging device arranged so as to be capable of imaging from a direction perpendicular to the axis of the suction nozzles, and (c) at least a part of all of the plurality of suction nozzles, and at the same time At least a part of each of a plurality of target nozzles that are nozzles to be imaged by the imaging device, and at least a part of each of the objects if the target object is held by the target nozzle look including a reflective device which light from a neighboring region with one or more reflective surfaces for reflecting toward the imaging device is an area for it and at least a portion of at least the tip portion of the plurality of target nozzle And the neighboring region of is solved by that shall be imaged simultaneously.
Each of the plurality of suction nozzles is preferably disposed at each of three or more positions on the circumference, and the imaging device is preferably disposed on the outer circumference side of the circumference toward the center of the circumference. In that case, it is desirable that the reflection device is disposed at the central portion of the circumference.

The positions at which the plurality of suction nozzles are disposed may be equally spaced positions or unequal spaced positions. For example, when an object held by the suction nozzle is imaged by the imaging device from the side opposite to the suction nozzle with respect to the object, a background forming member may be provided in the suction nozzle, but the size of the background forming member is Depending on the size of the object to be sucked by the suction nozzle. For this reason, when a plurality of types of suction nozzles having different sizes of the background forming member are provided, if as many suction nozzles as possible are provided, the arrangement intervals are unequal.
The reflection device includes at least a part of at least a tip portion of each of the plurality of target nozzles, and each of neighboring areas that are areas where at least a part of each of the objects is present if the target object is held by the target nozzles. As long as it can reflect the light from and toward the imaging device. The image data acquired by the imaging device includes the position of the tip of the target nozzle, the position of the suction nozzle side of the target held by the target nozzle, and the opposite side of the suction nozzle of the target held by the target nozzle. Image processing is performed to obtain at least one of the position of the end, the thickness of the object (the dimension in the direction parallel to the axis of the suction nozzle), and the presence or absence of the object. Therefore, it is only necessary that the image data of an area where this image processing is possible be acquired by the imaging device, and the reflection device only needs to be able to reflect light from the area necessary for processing the image toward the imaging device. is there.
This will be described more specifically. When the imaging device captures the tip of the suction nozzle that does not hold the object, light from at least a part of the tip or its periphery is incident on the imaging device. It only has to be done. When the image captured by the imaging device is a front image based on light from the surface of the suction nozzle, light from at least a part of the tip of the suction nozzle may be incident on the imaging device. In the case of a silhouette image of the tip of the suction nozzle, light from the periphery of the tip may be made incident on the imaging device. In any case, it is desirable that the entire target nozzle is imaged. However, when the number of target nozzles is large, it can be used for imaging each of the target nozzles on the imaging surface of the imaging device. It is inevitable that the width of the region (dimension in the direction perpendicular to the axis of the suction nozzle) is unavoidable, and “part of the tip of the suction nozzle” means the suction nozzle among the tip including the tip of the suction nozzle. der Ru that axis to a portion of the limited width with respect to a direction perpendicular.
Against Re its, intended to be acquired by the image processing, if the thickness of the position or the object of the lower end of the suction nozzle in a state of holding the object is held in it with the tip portion of the suction nozzle It is necessary that at least a portion having a limited width with respect to a target object in a direction perpendicular to the axis of the suction nozzle can be imaged. In this case, if the image captured by the imaging device is a front image, light from at least a part of the boundary line between the tip of the suction nozzle and the object held by the suction nozzle and a portion adjacent thereto is incident on the imaging device. What should be done. However, when a silhouette image is captured by the imaging device, an image of the boundary line between the tip of the suction nozzle and the object held by the suction nozzle cannot be acquired. It is necessary to acquire a silhouette image of a portion of the end held by the nozzle that deviates from the suction nozzle in a direction perpendicular to the axis of the suction nozzle. Therefore, in this case, it is desirable to acquire at least a silhouette image of the side edge portion of the tip portion of the suction nozzle and the portion adjacent to the side edge portion of the object.
Should be acquired by the images processing, even if it is information indicating whether the object is held (the information of the object existence) by the suction nozzle is the same as the above case. If the object is held, a front image or silhouette image of at least a part of the tip of the suction nozzle and a part of the object adjacent to the part is obtained, whereas the object is held. If not, the front image or silhouette image of the object cannot be obtained.
As will be described later, the plurality of target nozzles may be all or some of the plurality of suction nozzles.

In the holding device with an imaging device configured as described above, light from at least a part of at least the tip of each of the plurality of target nozzles and their neighboring regions are simultaneously reflected by the reflecting device and incident on the imaging device. Thus, at least a part of each of the plurality of target nozzles and at least a part of the vicinity thereof are simultaneously imaged from the side, and imaging from the side of the plurality of suction nozzles is performed without wasting time. Can do. The imaging device is arranged on the side of the plurality of suction nozzles so as to be able to pick up images from a direction perpendicular to the axis of the suction nozzles, and thereby various effects can be obtained as will be described later.

Aspects of the Invention

The following invention which is considered claimable (hereinafter referred to as "claimable invention". Claimable invention, Ru invention der described in the claims of the "present invention" Some aspects of the present invention may include a superordinate concept or another concept. As with the claims, each aspect is divided into sections, each section is numbered, and is described in a form that cites the numbers of other sections as necessary. This is for the purpose of facilitating the understanding of the claimable invention, and is not intended to limit the combinations of the constituent elements constituting the claimable invention to those described in the following sections. In other words, the claimable invention should be construed in consideration of the description accompanying each section, the description of the embodiments, the prior art, and the like. The added aspect and the aspect in which the constituent elements are deleted from the aspect of each item can be an aspect of the claimable invention.

(1) a holding head that includes a plurality of suction nozzles and sucks and holds an object by each of the suction nozzles;
An imaging device disposed on the side of the plurality of suction nozzles so as to be capable of imaging from a direction perpendicular to the axis of the suction nozzles;
One that reflects light from at least a portion near at least a tip of each of a plurality of target nozzles that are at least some of all of the plurality of suction nozzles toward the imaging device. A holding device with an imaging device, comprising: a reflection device including the above reflection surface.
Although it is desirable to arrange a plurality of suction nozzles on a circle and adopt the configuration described in items (2) and (3) below, it is not essential. For example, when there are two target nozzles, if a reflection device is provided at a position symmetrical to the two suction nozzles, the lengths of the optical paths from the suction nozzles to the imaging device through the reflection device can be set to each other. They can be the same, and no problem occurs. In addition, even when there are three or more target nozzles, if an imaging device having a deep focal depth or an image whose magnification does not change even if the length of the optical path changes is used, suction is performed. The present invention can also be applied to a holding device having a holding head in which nozzles are arranged along a line other than one circle, such as a straight line, a circular arc, or a curved line whose curvature radius is not constant.
(2) Each of the plurality of suction nozzles is arranged at each of three or more positions on one circumference, and the imaging device is arranged on the outer circumference side of the one circumference toward the center of the one circumference. The holding device with an imaging device according to item (1).
(3) The holding device with an imaging device according to (2), wherein the reflection device is disposed at a central portion of the circumference.
If a plurality of suction nozzles are arranged on a circumference and the reflection device is arranged at the center of the circumference, the lengths of the optical paths from each of the suction nozzles to the imaging device through the reflection device are almost equal to each other. It is easy to equalize, and it is easy to obtain a clear image, and it is possible to obtain an effect that it is easy to make the magnifications of the images corresponding to the respective suction nozzles substantially the same.
(4) Items (1) to (4), wherein the reflection device includes a plurality of reflection planes for reflecting light from at least a part of at least a tip portion of each of the plurality of target nozzles toward the imaging device. The holding device with an imaging device according to any one of 3).
Light from at least a part of the vicinity of at least the tip of each of the plurality of target nozzles (hereinafter abbreviated as light from the vicinity of the target nozzle if not particularly necessary) is reflected by a dedicated reflection plane, The imaging device can be surely made incident. Imaging is performed in a state where a plurality of images based on light from the vicinity of each of the plurality of target nozzles is divided for each reflection plane, and an effect of facilitating image processing is obtained. Each of the divided images is referred to as a unit image. When the edge of the reflection plane becomes the edge of the unit image and the two reflection planes intersect with each other, it is possible to make the intersection line between the two become the boundary between the unit images. If the width of the unit image area is sufficiently large compared to the width of the image of each target nozzle, it is desirable that the axis of the target nozzle be positioned at the center of the unit image area. If the width is not sufficiently wide, the image of the target nozzle can be shifted to one side of the unit image area.
(5) The reflection device reflects a light from at least a part of at least a part of at least a tip of each of the plurality of target nozzles once to each set a plurality of reflection surfaces directed to the imaging device. The holding device with an imaging device according to any one of (1) to (4), wherein the holding device includes at least one set.
If the light is reflected once by each of the plurality of reflection surfaces, the reflection by one reflection surface can reduce the reflection angle even when the reflection angle becomes large, and an image with less distortion can be obtained. Alternatively, even light that is blocked by a reflecting surface that reflects light from the vicinity of another target nozzle and cannot be incident on the imaging device is incident on the imaging device by changing the direction of reflection, and at least at least the tip of the suction nozzle A part of the vicinity can be imaged by the imaging device. Therefore, for example, even if the number of suction nozzles is large, it is possible to perform imaging simultaneously with all the suction nozzles as target nozzles.
(6) The holding device with an imaging device according to any one of (1) to (5), wherein all the nozzles are the target nozzles.
Imaging can be performed only once, and imaging can be performed efficiently.
(7) The holding device with an imaging device according to (6), wherein all the nozzles are four or less suction nozzles.
When all the nozzles are four or less suction nozzles, using a reflection device having a plurality of reflection planes that reflect light from at least a part of the vicinity of at least the tip of each suction nozzle once, Light from each suction nozzle can be easily reflected toward the imaging device.
(8) The reflection device includes one or more reflection surfaces that reflect light from at least a part of the vicinity of at least a tip of each of the nozzles toward the imaging device at the same time. Or the holding device with an imaging device according to item (7).
The feature of this section can also be adopted when the target nozzle is a part of all nozzles. However, this is particularly effective when all of the nozzles are target nozzles. When the reflection device has a smoothly curved reflection surface, the number of reflection surfaces is considered to be one. When the reflection surface is a plane, each reflection plane is a reflection surface. Suppose you think.
(9) The holding device with an imaging device according to any one of (1) to (8), wherein the one or more reflecting surfaces of the reflecting device are formed by a surface of an integral reflector.
When the reflecting device has a plurality of reflecting surfaces, the reflecting device can be easily manufactured as compared with the case where a plurality of reflecting surfaces are separately formed and assembled at positions where light is reflected.
(10) The holding device with an imaging device according to any one of (1) to (5), wherein the plurality of target nozzles are a plurality of a part of all the nozzles.
All nozzles are divided into a plurality of sets, and imaging is performed a plurality of times, so that an image of at least a part of at least a part of the tip is obtained for all nozzles. Although imaging is performed a plurality of times, the number of imaging operations can be reduced as compared with the case where imaging is performed separately for each of all nozzles, and a reduction in imaging efficiency is suppressed.
The feature described in item (9) is also applicable to the holding device with an imaging device in this item.
(11) Items (1) to (11) including a target nozzle replacement device that relatively moves at least one of the reflection device, the imaging device, and the holding head in the arrangement direction of all the nozzles to replace the target nozzle. The holding device with an image pickup device according to any one of items 1).
The target nozzle replacement device can be, for example, a head rotating device that rotates the holding head when all nozzles are arranged on one circumference, and when all nozzles are arranged on a straight line. A linear movement device that linearly moves the holding head in a direction parallel to the straight line can be provided.
When this term is subordinate to the term (10), all nozzles can be imaged by one set of reflecting device and imaging device.
(12) The holding device with an imaging device according to any one of (1) to (9), wherein the reflecting device is fixed to the holding head.
The relative positions of the plurality of suction nozzles and the reflecting device do not change, and it is difficult for the imaging accuracy to decrease due to the relative position shift.
(13) Items (1) to (12) are provided at least behind each of the target nozzles to form a background of at least one of each of the target nozzles and each of the objects held by them. The holding device with an image pickup device according to any one of items 1).
The background member has a high contrast of optical characteristics such as color, brightness, and luminance with respect to at least an imaged portion of the suction nozzle and the object, and at least one of the suction nozzle and the object is the background. When the image is taken together, an image of the suction nozzle and the object with a clear outline can be obtained by providing the background member.
(14) The background member forms a bright background, and a silhouette image of at least a part of each of the target nozzles and at least one of the objects held by the target nozzles is acquired by the imaging device ( The holding device with an imaging device according to the item 13).
The background member is, for example, a light emitter. The illuminant includes, for example, a light emitting end of a number of light emitting diodes or optical fibers, and a diffusing plate for covering and diffusing light emitted from the light emitting diodes, and a light emitting device having a function of actively emitting light. It may be a body, or a light emitter that absorbs ultraviolet rays and emits visible rays. In the latter case, it is desirable to provide a lighting device between the background forming member and the target nozzle.
(15) It is disposed between a background member that forms the bright background and the target nozzle, and allows the selection light selected as possible to be light from at least a part of the vicinity of at least the tip of each target nozzle. The holding device with an imaging device according to the item (14), further including a light shielding device that blocks passage of light other than the selection light.
Light other than the selection light is prevented from entering the imaging device, and an image based on light from the vicinity of each of the plurality of target nozzles is acquired favorably.
In connection with the item (4), it has been described that a plurality of images based on light from the vicinity of each of a plurality of target nozzles are captured in a state where each image is divided for each reflection plane. The same purpose can be achieved by limiting the selection light allowed to pass through to only the light that is indispensable to fulfill the purpose of imaging. In that case, it is necessary to avoid that the unit images overlap each other, and it is necessary to allow a thin dividing line to appear between the unit images. As in the case of the boundary, it is possible to avoid the fogging between the unit images due to the wraparound of light at the boundary between the two reflection planes, and an effect of obtaining a clear image up to the end of the unit image region can be obtained.
When the background member forms a dark background, it is desirable to provide a light shielding device between the target nozzle and the imaging device.
(16) The holding device with an imaging device according to (15), wherein the light-shielding device includes a light-shielding plate provided at a position closer to the background member than the target nozzle and having a slit that allows selection light to pass therethrough. .
(17) By processing the image data acquired by the imaging device, at least one of the position of the tip of each of the plurality of target nozzles and at least a part of the target object held by each of the target nozzles The holding device with an imaging device according to any one of (1) to (16), including an image processing device that acquires the image.
When imaging by the imaging device is performed, for example, in order to acquire the position of the end of the target opposite to the tip of the target nozzle, at least the portion of the end opposite to the tip of the target nozzle is It only needs to be imaged, and when it is performed to detect whether or not the object is held by the target nozzle, it is only necessary to image the vicinity of the end near the tip of the target nozzle.
(18) The holding device with an imaging device according to any one of (1) to (17);
A substrate holding device for holding a circuit board;
A component supply device for supplying an electronic circuit component as the object to be mounted on a circuit board;
A relative movement device that relatively moves the substrate holding device, the component supply device, and the holding head along a plane parallel to the surface of the circuit board held by the substrate holding device; and the relative movement device is controlled. An electronic circuit component mounting device comprising: a relative movement device control device for causing each of the suction nozzles to receive an electronic circuit component from the component supply device and mounting the electronic circuit component on a circuit board held by the substrate holding device.
The position of the tip of the suction nozzle and the suction nozzle of the electronic circuit component held by the suction nozzle by imaging at least a part of each of the target nozzles and the electronic circuit components held by them At least one of the position of the opposite end, the thickness of the electronic circuit component, and the presence / absence of the electronic circuit component is acquired, and is used for, for example, control to reduce mounting errors of the electronic circuit component on the circuit board.
In the electronic circuit component mounting device according to this aspect, since the imaging device is provided on the side of the holding head, the imaging device does not hinder the reception and mounting of the electronic circuit component. Alternatively, it is easy to avoid interference with the second imaging device that images the electronic circuit component held by the holding head from a direction parallel to the axis of the suction nozzle.
Further, in the aspect in which the holding head is moved by the relative movement device and the image pickup device is moved together with the holding head, it is possible to perform imaging while the holding head is moving, if necessary. For example, it is not necessary to move the holding head by the relative movement device for positioning the holding head and the imaging device, and it is possible to avoid an increase in work time required for mounting the electronic circuit component.
In the electronic circuit component mounting apparatus described in Patent Document 1, the imaging device is fixed to the apparatus body, and the mounting head is moved onto the imaging device for imaging from the side of the electronic circuit component. Accordingly, the time required from the suction of electronic circuit components to the mounting becomes longer. This imaging apparatus is an apparatus that images an electronic circuit component from the lower surface side. Prior to the imaging, the imaging device positions the prism on the imaging device for imaging from the side of the electronic circuit component, and the electronic circuit component side. Therefore, it is necessary to position the electronic circuit component on the image pickup apparatus after the image pickup from one side, which increases the work time. On the other hand, in an aspect in which the imaging device is moved by the relative movement device together with the holding head, positioning of the imaging device and the holding head by the relative movement device is unnecessary, and it is possible to avoid an increase in work time.
The imaging device and the holding head of the holding device with the imaging device may not be moved together. For example, the imaging device may be provided with a fixed position, and the holding head may be moved by the relative movement device. A member that can be moved in two directions orthogonal to each other in a plane parallel to the surface of the circuit board, and one of the two moving members that is moved on the other is provided with a holding head. An imaging device may be provided on the other side.

  Several embodiments of the claimable invention will now be described in detail with reference to the drawings. In addition to the following examples, the claimable invention can be practiced in various modifications based on the knowledge of those skilled in the art, including the aspects described in the above [Aspect of the Invention] section. .

  FIG. 1 shows an electronic circuit component mounting apparatus as an embodiment of the claimable invention. As shown in FIG. 1, the electronic circuit component mounting apparatus includes a substrate transfer device 10, a substrate holding device 12, a component supply device 14, a holding device 16 with an imaging device (see FIG. 2), a head moving device 18, and a head rotating device. 19 (see FIG. 2), a mark imaging system 20, a lower part imaging system 22 as a bottom part imaging system, a control device 24 (see FIG. 5), and the like.

  The board transfer device 10 is provided on a bed 26 as a system main body, and transfers the circuit board 28 in one direction, in this embodiment, in the horizontal direction. This transport direction is defined as the X-axis direction, and the direction perpendicular to the X-axis direction is defined as the Y-axis direction in a horizontal plane that is the surface of the circuit board 28 and is parallel to the component mounting surface 29 as the work surface. The substrate holding device 12 is provided at a position corresponding to an intermediate portion in the conveyance direction of the substrate conveyance device 10 and in a direction parallel to the substrate conveyance direction of the component supply device 14. The substrate holding device 12 includes a plurality of support members erected on a support base, supports the circuit board 28 from below, includes a clamp member, and clamps both edges parallel to the conveyance direction of the circuit board 28. Then, the component mounting surface 29 is held in a horizontal posture.

  As schematically shown in FIG. 1, the component supply device 14 includes, for example, a component supply table 34 in which a large number of feeders 30 as component supply tools are arranged on a feeder support table 32. A large number of feeders 30 each contain a large number of electronic circuit components of one type, and are equipped with a component feeding device. The electronic circuit components should be sequentially fed one by one to the component supply unit, and supplied to the circuit board 28. Supply electronic circuit components. The large number of feeders 30 are arranged on the feeder support table 32 in a state in which the respective component supply units are aligned along a straight line parallel to the X-axis direction.

  As shown in FIG. 2, the holding device 16 with the imaging device includes a mounting head 40 as a holding head, a side imaging device 42, and a reflection device 44, and is moved by the head moving device 18. As shown in FIG. 1, the head moving device 18 is an XY moving device that moves the substrate holding device 12, the component supply device 14, and the mounting head 40 in the X-axis direction and the Y-axis direction. It is composed.

  As shown in FIG. 1, the head moving device 18 includes an X-axis direction moving device 50 and a Y-axis direction moving device 52. The X-axis direction moving device 50 includes an X-axis slide 54 and an X-axis slide moving device 56 as movable members. The X-axis slide moving device 56 includes an X-axis moving motor 58 as a driving source, and a feed screw mechanism 62 including a ball screw 60 as a feed screw and a nut (not shown). The Y-axis direction moving device 52 is provided on the X-axis slide 54, and includes a Y-axis slide 66 and a Y-axis slide moving device 68 as movable members. Similarly to the X-axis slide moving device 56, the Y-axis slide moving device 68 includes a Y-axis moving motor 70 as a drive source, and a feed screw mechanism 76 (see FIG. 2) having a ball screw 72 and a nut 74. The Y-axis slide 66 is moved to an arbitrary position in the horizontal plane along with the movement of the X-axis slide 54. As shown in FIG. 2, the holding device 16 with the image pickup device and the head rotating device 19 are provided on a Y-axis slide 66, and are moved to arbitrary positions in the horizontal plane by the movement of the X-axis and Y-axis slides 54 and 66. Be made.

  The mounting head 40 is configured to hold a plurality of suction nozzles 80, which are a kind of component holders, in the present embodiment, three or more, for example, four (in FIG. Nozzle 80 is shown). As shown in FIG. 2, the head main body 82 of the mounting head 40 is a rotating shaft 84 that is held by a Y-axis slide 66 so as to be uniaxial and rotatable about its own vertical axis and immovable in the axial direction. And a nozzle holder 86 as a component holder holder provided concentrically and fixed below the rotary shaft 84, and a vertical axis that is perpendicular to the component mounting surface 29 by the head rotating device 19. Is rotated around an axis parallel to. The head rotating device 19 uses a head rotating motor 88 as a drive source, the rotating shaft 84 is rotated by the head rotating motor 88, and the mounting head 40 is rotated at an arbitrary angle in both forward and reverse directions. The head rotating device 19 constitutes a relative rotating device.

  The nozzle holding body 86 has a circular cross-sectional shape and a diameter larger than that of the rotation shaft 84. A plurality of nozzle holding portions 98, for example, four or more, for example, four nozzle holding portions 98 are arranged on the rotation axis ( (Hereinafter referred to as the head rotation axis) are provided at positions spaced at an appropriate interval on one circle centered on a point on the center, for example, at four positions spaced at equal angular intervals, which is a kind of equal interval. ing. As shown in FIG. 2, each of these nozzle holding portions 98 can move to the nozzle holding body 86 in a direction parallel to the head rotation axis and in the vertical direction, and can rotate around its own vertical axis. A holding shaft 100 as a holding member is provided, and suction nozzles 80 are detachably held one by one by a nozzle holder 102 provided at a lower end protruding downward from the nozzle holder 86. Yes. Each of these four suction nozzles 80 is rotatably held around its own vertical axis at each of four positions that are equiangularly spaced on a circle centered on one point on the head rotation axis. As the mounting head 40 rotates, it is swung around a vertical head rotation axis.

  The suction nozzle 80 sucks and holds electronic circuit components by negative pressure. As shown in FIG. 2, the suction nozzle 80 includes a nozzle body 104 and a suction pipe 106, and has a passage (not shown) provided in the head body 82. A negative pressure is supplied through a negative pressure source (not shown). Supply and interruption of the negative pressure of the suction nozzle 80 are individually performed for each of the plurality of suction nozzles 80 by a switching device (not shown). There are a plurality of types of suction nozzles 80 in which the shape and dimensions of the suction pipe 106 are different, and the suction nozzles 80 corresponding to the shape and dimensions of the electronic circuit parts are held by the holding shaft 100, and the circuit of the electronic circuit parts is obtained. Used for mounting on the substrate 28. For example, the chip-shaped electronic circuit component 108 shown in FIG. 2 is sucked by the suction nozzle 80 and mounted on the circuit board 28.

  The four holding shafts 100 are rotated around their own axes by a nozzle rotating device 110. As shown in FIG. 2, the nozzle rotation device 110 uses a nozzle rotation motor 130 provided on the Y-axis slide 66 so as to be rotatable about an axis parallel to the rotation axis of the mounting head 40 as a drive source. The nozzle rotating device 110 includes a cylindrical rotating body 132 fitted to the rotating shaft 84 of the head main body 82 so as to be relatively rotatable and not relatively movable in the axial direction, and the rotation of the nozzle rotating motor 130 is driven by the drive gear 134 and The driven gear 136 transmits the rotation to the rotating body 132, and the rotation of the rotating body 132 is transmitted to each of the four holding shafts 100 by the driving gear 138 and the driven gear 139. The four suction nozzles 80 are simultaneously rotated at the same angle and in the same direction. When the head main body 82 is rotated by the head rotating device 19, the rotating body 132 is rotated in the same direction as the head main body 82 at the same angular speed, so that the holding shaft 100 does not rotate around its own axis. The

  Each of the four holding shafts 100 is also connected to its own axis by a compression coil spring 140 as a spring as an elastic member which is a kind of urging device disposed between the nozzle holding body 86 and the driven gear 139. In a direction parallel to the substrate holding device 12 or the circuit board 28, it is biased upward. The upper limit of movement or separation of the holding shaft 100 due to the urging of the spring 140 is defined by the nozzle holder 102 coming into contact with the nozzle holder 86, and the holding shaft 100 and the suction nozzle 80 are positioned at the moving end position. It is located at the rising end position which is the separation position.

  Further, the four holding shafts 100 are moved up and down by the nozzle lifting and lowering device 141, whereby the suction nozzle 80 is lifted and lowered. The nozzle lifting / lowering device 141 is an approach / separation device for moving the nozzle axis direction moving device or the suction nozzle 80 and the circuit board 28 relative to each other in a direction perpendicular to the circuit board 28 to approach and separate them. As shown in FIG. 2, the nozzle lifting device 141 is provided on the Y-axis slide 66 and includes a lifting drive member 142 and a lifting drive member drive device 144. The elevating drive member driving device 144 has an elevating motor 146 as a drive source provided in the vertical direction on the Y-axis slide 66, and a feed screw mechanism 152 including a ball screw 148 and a nut 150. The lift drive member 142 holds the combined nut 150. The lifting drive member 142 is provided on the Y-axis slide 66 so as not to be rotatable relative to the Y-axis slide 66 and to be movable in a direction parallel to the head rotation axis, and is extended from the nut 142 toward the mounting head 40 to rotate the plurality of holding shafts 100. It has the engaging part 154 located above a locus | trajectory.

  When the raising / lowering drive member 142 does not raise or lower the holding shaft 100, the engaging portion 154 is located at a position slightly above the engaged portion 156 provided at the upper end portion of the holding shaft 100 located at the rising end position. It is located at the position or non-operating position, and the holding shaft 100 is allowed to turn. The plurality of holding shafts 100 are sequentially swung to the lift position where the engaged portion 156 is opposed to the engagement portion 154 by the rotation of the mounting head 40, and the engagement portion 154 is lowered by the lowering of the lift drive member 142. Engages the engaged portion 156, lowers the holding shaft 100 against the urging force of the spring 140, and lowers the suction nozzle 80. Further, the raising of the holding shaft 100 is allowed by the raising of the elevating drive member 142, the holding shaft 100 is raised by the urging of the spring 140, and the suction nozzle 80 is raised. The four suction nozzles 80 are sequentially swung to the raising / lowering position by the rotation of the head main body 82, and are lifted / lowered by the nozzle lifting / lowering device 141 to take out the electronic circuit components from the feeder 30 and the electronic circuit components to the circuit board 28. Install. The elevating position is a component suction position and a component mounting position, and is a component suction mounting position.

  The mark imaging system 20 is a system that images a plurality of reference marks 160 (see FIG. 1) provided on the component mounting surface 29 of the circuit board 28, and is mounted on a Y-axis slide 66 as shown in FIG. It is moved by the head moving device 18 together with the mounting head 40. The mark imaging system 20 includes a mark imaging device 162 and an illumination device 164. The mark imaging device 162 is, for example, a surface imaging device, and includes, for example, a CCD camera and a lens system, and is provided downward.

  As shown in FIG. 1, the lower component imaging system 22 is located between the substrate transport device 10 of the bed 26 and the component supply device 14, and the range of movement of the mounting head 40 is determined by the substrate transport device 10. The circuit board 28 is provided in a fixed position at the center position in the conveyance direction. The lower part imaging system 22 is provided at a position corresponding to the center position in the direction in which the component supply units of the many feeders 30 are arranged.

  The lower component imaging system 22 includes a lower component imaging device 170 and an illumination device 172 as bottom surface component imaging devices, and is positioned below the moving plane of the mounting head 40, and the imaging center line (optical axis) is vertical. And it is provided upwards and images a front image of the electronic circuit component. The lower-side component imaging device 170 is, for example, a surface imaging device, and includes, for example, a CCD camera and a lens system, and the suction nozzles 80 are held by all the nozzle holding portions 98 of the mounting head 40. All the electronic circuit components held by each of 80 are imaged at a time.

  The side image pickup device 42 of the holding device 16 with the image pickup device is a surface image pickup device in the present embodiment, and includes, for example, a CCD camera and a lens system. As shown in FIGS. The Y-axis slide 66 is attached to the outer peripheral portion of the mounting head 40, and its imaging center line is provided in the direction orthogonal to the head rotation axis line toward the center of one circle where the four suction nozzles 80 are disposed. It has been. It can be considered that a part of the Y-axis slide 66 constitutes the main body of the holding device 16 with the imaging device.

  The side imaging device 42 captures the suction tube 106 that is the tip of the suction nozzle 80 or a silhouette image of the electronic circuit components that are sucked by the suction tube 106 and the suction nozzle 80. Therefore, as shown in FIG. 2 and FIG. 3, light sources 180 are provided corresponding to each of the four holding shafts 100 in a portion on the outer peripheral side of the portion where the holding shaft 100 of the nozzle holding body 86 is provided, It constitutes a background member. Each of these four light sources 180 includes, for example, a large number of light emitting diodes and a diffusion plate that covers and diffuses the light emitted from them, and emits light. As shown in FIG. The suction nozzles 80 are arranged at equal angular intervals on the circumference of the circumference of the circumference of the circumference where the suction nozzles 80 are arranged, and are arranged in the direction of irradiating light toward the center of the circumference of the circumference. The nozzle 80 is irradiated with light.

  Each of the four light sources 180 was sucked and held by the suction tube 106 and the suction nozzle 80 regardless of the type of the suction nozzle 80 held by the corresponding holding shaft 110 and the kind of the electronic circuit component sucked by the suction nozzle 80. The region including the electronic circuit components is sized to irradiate light, and forms a bright background thereof. FIG. 3 is a diagram showing the positional relationship in a plan view of the side imaging device 42, the suction nozzle 80, the light source 180, the cover and the reflector described below, and the path of light reflected by the reflector. The members are shown as being located on the same plane without the use of hide lines and hatching.

  As shown in FIGS. 2 to 4, the reflection device 44 of the holding device 16 with the imaging device is provided together with a cover 182 at a portion of the rotating shaft 84 that protrudes downward from the nozzle holding body 86. The reflection device 44 is provided at the center of one circumference where the four suction nozzles 80 are disposed. The cover 182 is generally formed in a hollow cylindrical shape and is provided concentrically and fixed to the rotation shaft 84, and a reflector 184 that forms the main body of the reflection device 44 is fixed to the inner peripheral surface of the cover 182, and is protected by the cover 182. Yes. The reflector 184 and the cover 182 are provided on the side opposite to the light source 180 with respect to the suction nozzle 80, and the cover 182 is disposed between the four suction nozzles 80 and the reflector 184.

  As shown in FIG. 4, the cover 182 has a plurality of openings 186 penetrating the peripheral wall in the thickness direction, in this embodiment, three or more, for example, four, and the same number of equiangular intervals as the suction nozzle 80. Is provided. The cover 182 provided on the rotation shaft 84 is fixed to the mounting head 40 and is not rotatable relative to the four suction nozzles 80 held by the nozzle holder 86, and the four openings 186 each have four suction nozzles. It is provided at a position corresponding to each of 80. Each of these openings 186 forms a long rectangle in a direction parallel to the axis of the suction nozzle 80.

  Further, each of the four openings 186 is provided at a position where the intermediate position in the width direction around the center line of the cover 182 coincides with the axis of the suction nozzle 80, and each opening 186 closes from the vicinity of the suction pipe 106. Incident light into the cover 182 is allowed. As shown in FIG. 4, the cover 182 also has a portion between two adjacent openings 186 that penetrates the peripheral wall of the cover 182 in the thickness direction and reflects the light cover 182 reflected by the reflector 184. An opening 188 that allows passage to the outside is formed.

  As shown in FIGS. 3 and 4, the reflector 184 is a portion between two adjacent openings 186 of the cover 182, and a portion facing the opening 188 from the inner peripheral surface of the cover 182 to the opening 188. It is provided in a state protruding from the side. In the present embodiment, the reflector 184 is at least a mirror surface made of an opaque material such as metal, and a plurality of reflection surfaces 190A, 190B, 190C, and 190D are formed on the surface. Totally reflects the light to be transmitted. As shown in FIG. 3, the reflector 184 faces the side-side imaging device 42, includes the imaging center line and the head rotation axis, and each of the four suction nozzles 80 is two on a vertical plane. The reflection planes 190A, 190B, 190C, and 190D are held by the suction tube 106 of the suction nozzle 80 or the suction tube 106 and the suction nozzle 80, which are positioned at a fixed phase around the head rotation axis. It is formed at an angle at which light from the periphery of the electronic circuit component is regularly reflected and incident on the side image pickup device 42 through the opening 188, and is formed symmetrically two by two with respect to the vertical plane. Yes. In this embodiment, the suction nozzle 80, the cover 182 and the reflection device 44 are all fixed to the head main body 82 and cannot be rotated relative to each other, and are positioned in a fixed phase with respect to each of the reflection planes 190A to 190D. The suction nozzle 80 is uniquely determined and is set as suction nozzles 80A, 80B, 80C, and 80D, respectively. The formation positions of the images of the suction nozzles 80A to 80D on the imaging surface of the side imaging device 42 are uniquely determined.

  The four reflection planes 190A to 190D each have a long rectangle in a direction parallel to the axis of the suction nozzle 80, and are formed so as to intersect each other in the width direction. The side-side imaging device 42 is capable of taking an image of each of the four suction nozzles 80 and the electronic circuit components sucked by the suction nozzles 80, which is wider than a part that is indispensable for fulfilling the purpose of imaging. In each of the four reflection planes 190A to 190D, the side-side imaging device 42 provides light sufficient for the side-side imaging device 42 to image the four suction nozzles 80 and the like most widely within the imageable range. It is supposed to have a size for incidence. In this embodiment, as described later, the diameter of the adsorption tube 106, the thickness of the electronic circuit component, and the electrons from the adsorption nozzle 80 are obtained by imaging the adsorption tube 106 or the electronic circuit component adsorbed by the adsorption tube 106 and the adsorption nozzle 80. Information on whether or not the circuit component is held is acquired. Therefore, for each of the four suction nozzles 80, at least the tip of the suction tube 106 is imaged in the direction parallel to the axis thereof, and the whole is imaged in the diameter direction, and the electronic circuit sucked by the suction nozzle 80. The entire part needs to be imaged in a direction parallel to the axis of the suction nozzle 106, and in the diameter direction of the suction pipe 106, a part of the part that deviates from the suction pipe 106 in a direction perpendicular to the axis needs to be imaged. The light from the region including them is reflected by the reflection planes 190A to 190D, is incident on the side imaging device 42, and the suction tube 106 or the suction tube 106 and the electronic circuit component are imaged. Of the electronic circuit components scheduled to be mounted on the circuit board 28 by the side-side imaging device 42, the electronic circuit component having the maximum thickness (the dimension in the direction parallel to the axis of the suction nozzle 80) is selected in the thickness direction. Of the suction nozzles 80 that can be imaged as a whole and are scheduled to be used, the suction pipe 106 having the largest outer diameter can be imaged in the entire diameter direction. The widths of the reflection planes 190 </ b> A to 190 </ b> D are equal to each other in the width of light incident on the side-side imaging device 42, and the widths of images formed on the imaging surfaces of the side-side imaging device 42 are equal to each other. The size is assumed.

  The four openings 186 of the cover 182 are larger than the reflection planes 190A to 190D in the light incident direction to the reflection planes 190A to 190D, respectively, and have a size that allows passage of more light than the light incident on the reflection planes 190A to 190D. It is supposed to have. Further, the reflection planes 190A to 190D are attracted to the center in the width direction of each image formed by the light regularly reflected by the reflection planes 190A to 190D in the direction parallel to the imaging center line of the side imaging device 42. It is provided at a position where an image of the tube 106 is formed.

  The reflector 184 is provided in the head main body 82 and is rotated together with the suction nozzle 80 with respect to the side imaging device 42. At the time of imaging, the mounting head 40 is located on the side where the reflector 184 faces the side imaging device. It is rotated to the side imaging position. The side imaging device 42 is provided at a position where it does not interfere with the nozzle lifting device 141 and the like of the Y-axis slide 66, and the side imaging position of the mounting head 40 is determined by the position. The main mounting head 40 includes four suction nozzles 80 and is stopped at four rotational positions. In this embodiment, the side-side imaging device is configured such that one of the four rotational positions is a side-side imaging position. 42 is disposed.

  As shown in FIG. 5, the control device 24 mainly includes a control computer 210 including a CPU 200, a ROM 202, a RAM 204, and a bus 206 for connecting them, and an input / output unit 212 includes a mark. An image processing computer 214 that processes image data obtained by imaging of the imaging device 162, the lower part imaging device 170, and the side imaging device 42 is connected.

  In addition, a motor that is a drive source that is a variety of actuators constituting the electronic circuit component mounting system, such as a drive source of the substrate transport apparatus 10, is configured by a servo motor with an encoder that is a kind of an electric motor, for example. The first encoder is connected to the input unit of the input / output unit 212. The servo motor is an electric rotary motor capable of accurately controlling the rotation angle, and a step motor may be used instead of the servo motor. A linear motor may be used. The output unit of the input / output unit 212 is connected to various actuators such as a drive source of the substrate transfer device 10 via the drive circuit 220. The control device 24 transfers the circuit board 28 and electronic circuit components. Is controlled. The control device 24 constitutes a head moving device control device that is a relative moving device control device.

  When the electronic circuit component is mounted on the circuit board 28 in the electronic circuit component mounting device configured as described above, the mounting head 40 is moved to the component supply device 14 by the head moving device 18, and the four suction nozzles 80. Each takes out the electronic circuit component from the feeder 30, and then the mounting head 40 is moved to the substrate holding device 12, and the suction nozzle 80 mounts the electronic circuit component on the circuit substrate 28. In this electronic circuit component mounting device, the suction tube 106 of the suction nozzle 80 and the electronic circuit component sucked by the suction tube 106 and the suction nozzle 80 are imaged from the side by the side imaging device 42. Since the use of image data obtained by imaging is not important, it will be described in a simplified manner.

  In this electronic circuit component mounting device, with the four suction nozzles 80 held by the nozzle holders 102, silhouette images of the suction pipes 106 of the suction nozzles 80 are taken by the side imaging device 42, The position of the lower end that is the tip is acquired. If the mounting head 40 is not positioned at the side-side imaging position at the time of imaging, the mounting head 40 is rotated by the head rotating device 19 and positioned at the side-side imaging position.

  Of the light emitted from the light source 180 to the suction nozzles 80A to 80D, the light from the periphery of the suction tubes 106A to 106D enters the cover 182 through the corresponding opening 186 and is respectively reflected by the corresponding reflection planes 190A to 190D. At the same time, the light is regularly reflected and is incident on the side imaging device 42 with certainty, and silhouette images of the four adsorption tubes 106A to 106D are simultaneously captured.

  Four images formed by the light regularly reflected by the four reflection planes 190 </ b> A to 190 </ b> D are captured in a state of being divided for each reflection plane 190, and are formed by the reflected light from one reflection plane 190. Is one unit, four unit images PA, PB, PC, and PD are obtained as shown in FIG. The four reflection planes 190 </ b> A to 190 </ b> D are formed in a state where two adjacent reflection planes intersect with each other, the edge of the reflection plane 190 becomes the edge of the unit image, and the intersection line of the two reflection planes 190 intersecting each other is , A boundary between unit images. Further, the side-side imaging device 42 is a device capable of imaging a portion wider than the suction tube 106 in the axial direction of the suction tube 106 and in a direction perpendicular to the axial direction, and the reflection planes 190A to 190D are reflected light respectively. As shown in FIG. 6, the suction tubes 106 </ b> A to 106 </ b> D are in a direction perpendicular to the axis line thereof, because the suction tube 106 is provided at the center of the image formed in the width direction. Thus, the whole is imaged in the diameter direction. The side-side imaging device 42 is provided on the Y-axis slide 66 together with the mounting head 40. After the four nozzle holders 102 hold the suction nozzles 80, the suction pipe 106 is imaged at an arbitrary time. be able to.

  Image data acquired by imaging is processed by the image processing computer 214 and sent to the control computer 210, and the diameters and positions of the lower ends of the adsorption tubes 106A to 106D are obtained. Since each image of the adsorption tubes 106A to 106D is formed at the center in the width direction of the unit images PA, PB, PC, PD, the positions of both ends in the direction perpendicular to the axis are obtained, and the diameter is acquired. The position in the height direction of the side component imaging device 42 is known by design, and the lower end position is calculated based on the image data of the four suction pipes 106A to 106D. Here, the lower end position of the suction tube 106 is acquired on the axis of the suction tube 106, and stored in the memory provided in the RAM 204 in association with the suction nozzle 80. The suction nozzle 80 is specified by, for example, an attachment position on the head main body 82.

  By acquiring the diameter of the suction tube 106, for example, it is determined whether or not the suction nozzle 80 to be held is held, and by acquiring the lower end position of the suction tube 106, for example, the suction nozzle 80 is obtained. Is determined to be held in the correct posture by the nozzle holder 102. If the type of the suction nozzle 80 held is wrong or the lower end position of the suction pipe 106 is deviated from the position where it should be, and the suction nozzle 80 is not held in the correct posture by the nozzle holder 102, The notification device (not shown) informs the operator and replaces the suction nozzle 80 with a type that should be held, or the suction nozzle 80 is held in a correct posture by the nozzle holder 102. . After the suction nozzle 80 is replaced or held again, the suction pipe 106 may be imaged again.

  In this way, the suction nozzle 80 is held by the nozzle holder 102, the suction pipe 106 is imaged, and processing based on the suction pipe 106 is performed, and then the electronic circuit component is mounted on the circuit board 28. In this case, the mounting head 40 is moved to the component supply device 14 by the head moving device 18, and the four suction nozzles 80 respectively take out the electronic circuit components from the feeder 30. The four suction nozzles 80 are sequentially turned to the component suction mounting position by the rotation of the mounting head 40, and are moved to above the component supply unit of the feeder 30 by the movement of the mounting head 40. Then, it is lifted and lowered by the nozzle lifting and lowering device 141 to suck the electronic circuit component and take it out from the feeder 30.

  If all the suction nozzles 80 suck the electronic circuit components, the mounting head 40 is moved to the lower part imaging system 22 and all the electronic circuit components are simultaneously imaged from below, but in the middle of the movement. Thus, the side-side imaging device 42 simultaneously captures the respective suction pipes 106 of the four suction nozzles 80 and the silhouette images of some of the electronic circuit components sucked by the suction nozzles 80. In this embodiment, all the nozzles that are all the four suction nozzles 80 are the target nozzles. If the mounting head 40 is not positioned at the side-side imaging position at the time of imaging, the mounting head 40 is rotated by the head rotating device 19 and positioned at the side-side imaging position.

  Among the light emitted from the light source 180 to the suction nozzles 80A to 80D and the suction nozzles 80A to 80D, for example, the light irradiated to the chip-shaped electronic circuit component 108, the periphery of the suction tubes 106A to 106D and the electrons Light from the periphery of the circuit component 108 enters the cover 182 through the corresponding opening 186, and is regularly regularly reflected by the corresponding reflection planes 190A to 190D, so that the light is surely incident on the side imaging device 42. Be made.

  Also in this case, four images formed by the light regularly reflected by the four reflection planes 190 </ b> A to 190 </ b> D are captured in a state of being divided for each reflection plane 190. Then, as shown in FIG. 7, four unit images PA, PB, PC, and PD are obtained, the edge of the reflection plane 190 becomes the edge of the unit image, and the intersection line of the two reflection planes 190 intersecting each other is the unit. It becomes a boundary between images. The side imaging device 42 includes a CCD camera, and even if the electronic circuit components are small, the image can be stably captured, and a plurality of small electronic circuit components are reliably imaged simultaneously.

  Further, as shown in FIG. 7, for each of the electronic circuit components 108A to 108D held by the suction nozzles 80A to 80D and the suction nozzles 80A to 80D, the suction tubes 106A to 106D and the suction tubes of the electronic circuit components 108A to 108D, respectively. 106A to 106D, which are part of the portions deviated in the direction perpendicular to the axis of the suction nozzle 80 from both side edges, respectively, from the ends sucked by the suction pipes 106A to 106D of the electronic circuit components 108A to 108D An image of a portion reaching the end opposite to the end adsorbed by the tubes 106A to 106D is obtained. Since the side imaging device 42 is provided on the Y-axis slide 66 together with the mounting head 40 and is moved by the head moving device 18, imaging is performed while the mounting head 40 is moving after the electronic circuit component is received from the component supply device 14. Thus, it is possible to avoid an increase in the work time required for mounting the electronic circuit component.

  The image data acquired by the imaging is processed by the image processing computer 214 and sent to the control computer 210, and the electronic circuit component 108 held by each of the four suction nozzles 80 is the end held by the suction nozzle 80. The lower end position and the thickness which are the positions of the opposite ends are acquired. This lower end position is acquired on the axis of the suction nozzle 80. In this apparatus, since the lower end position of the suction pipe 106 of the suction nozzle 80 is acquired in advance, the thickness of the electronic circuit component 108 is acquired based on the lower end position and the lower end position of the electronic circuit component 108. .

  Then, the obtained thickness is compared with the thickness of the electronic circuit component 108 stored in advance as component data, and it is determined whether or not the electronic circuit component 108 to be held by the suction nozzle 80 is held. If the absolute value of the difference in thickness is equal to or greater than the set difference, it is assumed that the wrong type of electronic circuit component is held, or that the electronic circuit component is held in a posture different from the planned position. If the lower end position of the electronic circuit component 108 is not acquired, it is understood that the suction nozzle 80 has failed to suck the electronic circuit component 108. In this embodiment, the control computer 210 and the image processing computer 214 constitute an image processing apparatus.

  If the type of the electronic circuit component sucked by the suction nozzle 80 is wrong or if the electronic circuit component is not held in a predetermined posture, the mounting head 40 is omitted by the head moving device 18 and is not shown. The electronic circuit component 108 is released from the suction nozzle 80, and the electronic circuit component is put into the component storage box. Then, the mounting head 40 is moved to the component supply device 14, and the suction nozzle 80 again picks up the electronic circuit components. If the suction nozzle 80 is not sucking the electronic circuit component 108, the mounting head 40 is returned to the component supply device 14, and the suction nozzle 80 that is not sucking the electronic circuit component 108 is again connected to the electronic circuit component 108. Adsorption is performed.

  After the second suction operation of the electronic circuit component 108, the suction tube 106 and the electronic circuit component 108 are imaged by the side imaging device 42. If it is determined based on the image data obtained by imaging that the electronic circuit components 108 to which all the suction nozzles 80 are set are held in a predetermined posture, the mounting head 40 captures the lower side components. It is moved to the system 22, and all the electronic circuit components 108 are imaged from below by the lower side component imaging device 170. Image data obtained by this imaging is processed by the image processing computer 214 and sent to the control computer 210, and the holding position error of the electronic circuit component 108 by the suction nozzle 80 is calculated. The holding position error includes a position error in the X-axis and Y-axis directions, which is a position error in a direction orthogonal to the axis of the suction nozzle 80, and a rotational position error, which is a position error around the axis. In addition, after the circuit board 28 is carried into the electronic circuit component mounting apparatus and held by the board holding apparatus 12, the reference mark 160 is imaged by the mark imaging apparatus 162, and a plurality of parts set on the component mounting surface 29 of the circuit board 28 are set. Each position error of the part mounting location is acquired. This position error also includes each position error and rotational position error in the X-axis and Y-axis directions of the component mounting location, and is corrected together with the holding position error. It is installed well. The four suction nozzles 80 are sequentially swung to the component suction mounting position, moved to the component mounting position, moved up and down by the nozzle lifting device 141, and mounted on the electronic circuit component 108.

  The mounting head 40 is moved to the component supply device 14 after all of the four suction nozzles 80 perform the mounting operation of the electronic circuit component 108, and receives the electronic circuit components to the four suction nozzles 80 that are empty. However, the suction nozzle 80 is imaged by the side imaging device 42 during the movement. At this time, the mounting head 40 is rotated by the head rotating device 19 and positioned at the side imaging position. The silhouette images of the suction tubes 106 of the four suction nozzles 80 are simultaneously captured by the side imaging device 42, and the image data is processed to obtain the lower end position of each suction tube 106. At this time, if the lower end position of the electronic circuit component in the state of being sucked by the suction pipe 106 is acquired, it can be understood that the suction nozzle 80 has failed to mount the electronic circuit component 108 and brought back, and the mounting head 40 has the component storage box. The electronic circuit component is accommodated in the component storage box. Then, the mounting head 40 is moved to the component supply device 14 to cause the suction nozzle 80 to receive electronic circuit components.

  As shown in FIG. 8, the image of at least the tip of the suction nozzle may be formed in a state of being close to one side in the width direction in the unit image region. For example, a reflector configured in the same manner as the reflector 184 of the reflector 44 of the above-described embodiment is adsorbed in a direction parallel to the imaging center line of the side-side imaging device in a state of facing the side-side imaging device. At a position where the light passing through the periphery of one side edge of the tube and the side edge of the electronic circuit component deviated in a direction perpendicular to the axis of the adsorption tube is regularly reflected to enter the side imaging device. Provide. In this way, for example, even when the outer diameter of the suction tube is large, one side edge portion of the suction tube and the side edge portion of the electronic circuit component are not enlarged without increasing the reflection plane and the imaging surface of the imaging device. It is possible to acquire a silhouette image with a portion adjacent to the and to obtain the thickness of the electronic circuit component. Alternatively, even if the side imaging device is a device having a low resolution, it is possible to take an image of the adsorption tube or the adsorption tube and the electronic circuit component that are necessary for fulfilling the purpose of imaging.

  The holding device with an imaging device is a device including a light shielding device, and the selection light allowed to pass by the light shielding device is limited to light indispensable to achieve the purpose of imaging, so that each of the plurality of target nozzles A plurality of images based on light from the vicinity may be captured in a state where the images are divided for each target nozzle. The embodiment will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected about the component which carries out the same effect | action as the component of the holding | maintenance apparatus with an imaging device of the said Example, description is abbreviate | omitted.

  The holding device with an imaging device 240 of the present embodiment includes a light shielding device 242 disposed between the light source 180 and the suction nozzle 80, as shown in FIGS. The light shielding device 242 is provided on the nozzle holder 86 and includes a light shielding plate 244 provided between each of the four light sources 180 and the suction nozzles 80. Each of these light shielding plates 244 is provided as close to the light source 180 as possible with respect to the suction nozzle 80. Each of the light shielding plates 244 is provided with a slit 246. Of the light emitted from the light source 180, only the light allowed to pass through the slit 246 is provided. Is applied to the suction nozzle 80 or the suction nozzle 80 and the electronic circuit components sucked by the suction nozzle 80 to form silhouette images thereof. The light shielding plate 244 in which the slit 246 is formed allows the selection light selected as much as possible to pass from the suction pipe 106 of the suction nozzle 80 or the periphery of the suction pipe 106 and the electronic circuit component sucked by the suction nozzle 80. The passage of light other than the selection light is blocked.

  In this embodiment, the slit 246 has a rectangular shape, and has a dimension that limits the selection light to light that is indispensable to fulfill the purpose of imaging. In the present embodiment, whether or not the suction nozzle 80 holds an electronic circuit component as described in the previous embodiment by imaging the suction tube 106 or the electronic circuit component sucked by the suction tube 106 and the suction nozzle 80. Thus, the indispensable part for imaging is determined for the suction nozzle 80 and the electronic circuit components held by the suction nozzle 80. The slit 246 limits the selection light to the light that forms the silhouette image of the suction tube 106 or the suction tube 106 and the electronic circuit component that is indispensable for imaging, and enters the part of the reflection plane 190. The size of the imaging surface of the side imaging device 42 is limited to light that forms a silhouette image such as the suction tube 106 in a part of an image formation region where an image is planned to be formed for each of the four suction nozzles 80. It is supposed to have. Further, the openings 186 respectively corresponding to the four suction nozzles 80 of the cover 182 that covers the reflecting device 44 are larger than the slits 246 of the light shielding plate 244.

  Also in the electronic circuit component mounting apparatus provided with the holding device with imaging device 240, the electronic circuit components are mounted on the circuit board in the same manner as in the above-described embodiment, and the four suction tubes 106 are captured by the side imaging device 42. Or each electronic circuit component hold | maintained at the four suction pipes 106 and the four suction nozzles 80 is imaged simultaneously. For example, when the suction tube 106 is imaged by the side imaging device 42, the light selected by the light shielding plate 244 and irradiated to the suction nozzles 80 </ b> A to 80 </ b> D from the light source 180 through the slit 246, and the suction tube 106 </ b> A. The light including the light from the periphery of the tip portion of -106D enters the cover 182 through the corresponding opening 186, and is regularly regularly reflected by the corresponding reflection planes 190A-190D, respectively. The light is surely incident, and silhouette images of the four adsorption tubes 106A to 106D are simultaneously captured.

  The light that irradiates the suction nozzle 80 from the light source 180 is selected by the light shielding plate 244, so that the light that forms the silhouette image of the suction tube 106 or the like is incident on a part of the reflection plane 190, and is shielded from the reflection plane 190. Light does not enter the portion of the plate 244 corresponding to the portion that defines the slit 246, and imaging is performed in a state of being divided for each slit 246. Therefore, the four images formed by the light regularly reflected by the four reflection planes 198A to 190D are, if the image formed by the selection light allowed to pass by one slit 246 is taken as one unit, As shown in FIG. 11, four unit images PA, PB, PC, and PD are obtained, and a thin dividing line appears between the unit images, and the adjacent image portions are not overlapped to each other until the end of the unit image region. Clear imaging can be obtained. In addition, when the suction nozzle 80 sucks the electronic circuit component and the suction tube 106 and the electronic circuit component are imaged by the side image pickup device 42, as shown in FIG. Four unit images PA, PB, PC, and PD that include a part of the silhouette image and are divided by thin dividing lines are obtained. Note that the image of the tip of the suction nozzle may be formed at the center in the width direction of the unit image region, or may be formed in a state of being biased to one side in the width direction.

The light-shielding device is disposed between the target nozzle and the reflection device, and allows passage of selection light including light from at least a part of the vicinity of at least the tip of each target nozzle, and allows passage of light other than the selection light. It is good also as a device which prevents.
The light shielding device is, for example, a device including a light shielding cylinder. Although the illustration of the light shielding cylinder is omitted, for example, the light shielding cylinder is provided in the same manner as the cover 182 of the above embodiment, and instead of the opening 186 of the cover 182 shown in FIG. An allowable slit is provided, and the light shielding cylinder blocks passage of light other than the selection light in a portion other than the slit. The slit has a size that limits the selection light that is allowed to pass to only light that is indispensable for fulfilling the purpose of imaging, and allows light to enter a part of the reflection plane 190 of the reflection device 44. Of the light emitted from the light source 180 to the suction nozzle 80 and the like, only light that forms a silhouette image of a part indispensable to fulfill the purpose of imaging is allowed to pass by the slit, and imaging is divided for each slit. A unit image similar to the unit images shown in FIGS. 11 and 12 is obtained.

Five or more suction nozzles may be included in the holding head. The embodiment will be described with reference to FIG.
The holding device with an imaging device 300 according to the present embodiment is provided in an electronic circuit component mounting device, and the mounting head 302 as a holding head includes a plurality of, for example, six suction nozzles 304 as schematically shown in FIG. ing. The holding device with an imaging device 300 is moved relative to the component supply device and the substrate holding device (not shown) by a relative movement device (not shown), like the holding device with an imaging device 16. The head main body 306 of the mounting head 302 is rotatably provided around a support shaft (not shown) vertically provided on a Y-axis slide that constitutes a parallel movement device of the relative movement device. It can be rotated at an arbitrary angle in both reverse directions.

  The six suction nozzles 304 can be moved up and down and rotated around their own axis at positions equidistant on a circumference around one point on the rotation axis of the head main body 306, respectively. And is moved up and down by a nozzle lifting device (not shown) and rotated around its own axis by a nozzle rotating device. The head main body 306 is also provided with six light sources 310 corresponding to the suction nozzles 304 on the outer peripheral side of the portion where the six suction nozzles 304 are disposed. A light shielding device 312 is provided between the two. The light shielding device 312 includes six light shielding plates 314, and a slit 315 is formed in each light shielding plate 314.

  The imaging device 316 of the holding device with an imaging device 300 is positioned in a horizontal posture toward the center of the circumference of the circumference of the circumference where the suction nozzle 304 of the Y-axis slide is disposed. It is fixed. In addition, a reflector 320 of the reflection device 318 is provided together with a cover 322 at an end projecting downward from the head body 306 of the support shaft. In the holding device with an imaging device 300, the reflector 320 and the cover 322 provided on the support shaft and the imaging device 316 provided on the Y-axis slide are not rotated relative to each other, and the reflector 320 is connected to the imaging device 316. It is provided in a state facing directly.

  The cover 322 has a generally cylindrical shape, and three openings 324 that are the number of the six suction nozzles 304 divided equally, for example, two, are formed on the peripheral wall thereof. In the holding apparatus 300 with the imaging device, the reflector 320, the cover 322, and the imaging device 316 are provided with their positions fixed to the Y-axis slide, and the mounting head 302 is rotated with respect thereto, so that the mounting head 302 is In a state where the imaging positions set in advance, for example, as shown in FIG. 13, the six suction nozzles 304 are positioned at positions that are symmetrically positioned with respect to the imaging center line of the imaging device 316, An opening 324 is provided at a position corresponding to each of two suction nozzles 304 located on one side and one suction nozzle 304 located on the other side. The cover 322 is also provided with an opening 326 in a portion of the peripheral wall facing the reflector 320 so as to allow the light reflected by the reflector 320 to pass therethrough.

  The reflectors 320 are fixedly provided on the inner peripheral surface of the cover 322, and the number of the six suction nozzles 304 is equally divided, and the same number as the openings 324, here, three reflection planes 328 are formed. These reflection planes 328 are formed so as to intersect with each other and at an angle at which the selection light selected by the light shielding plate 314 and reflected through the three openings 324 is regularly reflected and incident on the imaging device 316. Each of the three openings 324 is larger than the three reflection planes 328 in the light incident direction on the reflection plane 328.

  The six suction nozzles 304 are divided into two groups of three, and images are taken from the side by the imaging device 316. In this embodiment, the plurality of target nozzles are part of all the nozzles. Therefore, there are two imaging positions of the mounting head 302. For example, after all the suction nozzles 304 have received the electronic circuit components, the mounting head 302 is positioned at one imaging position, and one set of three suction nozzles 304. Are the target nozzles and are located at positions facing the opening 324 of the cover 322. The selection light selected by the light shielding plate 314 from the periphery of each suction tube and electronic circuit component of the three suction nozzles 304 passes through the corresponding opening 324 and is reflected by the reflection plane 328 at the same time. The light is regularly reflected and incident on the imaging device 316 through the opening 326, and the three adsorption tubes and the electronic circuit components are simultaneously imaged.

  After the imaging, the mounting head 302 is rotated 180 degrees by the head rotating device 308 and positioned at the other imaging position, and the other set of three suction nozzles 304 is positioned as a target nozzle at a position facing the opening 324, respectively. The three adsorption tubes or the three adsorption tubes and the electronic circuit components are simultaneously imaged by the imaging device 316. The mounting head 302 is provided with six suction nozzles 304. By picking up images in a plurality of sets, for example, two sets, light from at least one of the periphery of the suction tube and the electronic circuit component is reflected. The light is incident on the imaging device 316 without being obstructed by the body 320, and imaging such as an adsorption tube is performed. The head rotating device 308 constitutes a target nozzle replacement device.

The reflection device may be a device including one or more sets of reflection surfaces that are directed to the imaging device by reflecting light from at least a part of at least a part of the tip of each of the plurality of target nozzles once each. Good. The embodiment will be described with reference to FIGS.
The mounting head 352 of the holding apparatus with an imaging device 350 of the present embodiment includes a plurality of, for example, six suction nozzles 354. For example, as with the mounting head 40 of the above-described embodiment, the rotating shaft that constitutes the head body 356 has a rotating shaft. Rotated by the head rotating device 358, six suction nozzles 354, six light sources 360 provided on the head main body 356 corresponding to the six suction nozzles 354, a light shielding device 361, a rotating shaft and a cover 362, respectively. The reflector 366 of the reflection device 364 is rotated with respect to the imaging device 368 provided on the Y-axis slide. The light shielding device 361 includes light shielding plates 370 provided between the six light sources 360 and the suction nozzles 354, respectively. Each of the light shielding plates 370 is formed with a slit 372.

  The cover 362 has a generally cylindrical shape, and as shown in FIG. 14, openings 374 are provided at positions corresponding to the six suction nozzles 354, respectively, and a reflector 366 is provided at a portion between two adjacent openings 374. An opening 376 that allows passage of the light reflected by is provided. The reflector 366 is fixed to the inner peripheral surface of the cover 362, and as shown in FIG. 15, six reflecting planes 378 are formed. These reflection planes 378 are respectively provided corresponding to the six suction nozzles 354A to 354F, and the reflection planes 378A to 376D corresponding to the suction nozzles 354A to 354D are the suction pipes or suction pipes of the suction nozzles 354A to 354D, respectively. It is formed at an angle at which light from the periphery of the electronic circuit component is regularly reflected and incident on the imaging device 368.

  The reflection plane 378E and the reflection plane 378F form a pair with each of the reflection planes 384 and 386 of the reflectors 380 and 382 provided separately from the reflector 366, and the reflection plane 378E is an adsorption tube or adsorption of the adsorption nozzle 354E. The light from the periphery of the tube and the electronic circuit component is specularly reflected and incident on the reflection plane 384, and the reflection plane 384 is provided at an angle at which the light incident from the reflection plane 378E is specularly reflected and incident on the imaging device 368. It has been. Similarly, the reflection plane 378F and the reflection plane 386 are provided at an angle with respect to the suction nozzle 354F so that light from the periphery of the suction tube or the suction tube and the electronic circuit component is regularly reflected and incident on the imaging device 368.

  The reflection device 364 of the present embodiment includes two sets each including two reflection planes that reflect light once each, and even if the number of suction nozzles is large, all the nozzles are used as target nozzles to perform imaging at once. In addition, the incident angle and the reflection angle of light at each of the two reflection planes can be smaller than the incident angle and the reflection angle when the light is reflected toward the imaging device 368 by one reflection plane. When the incident angle and the reflection angle of light on each reflection plane increase, the dimensional accuracy of an image acquired by the imaging device tends to decrease. However, according to this aspect, this problem can be solved. In the case of a single reflector, it is inevitable that a reflection plane with a large incident angle and reflection angle will be generated as the number of suction nozzles increases, but it is necessary to change the direction of light by combining multiple reflection planes. Thus, the angle of the light reflected by one reflection plane and incident on the imaging device can be reduced, and an image with less distortion can be obtained.

  In addition, even when the plurality of target nozzles are part of all the nozzles, or when all the nozzles are target nozzles, the number of suction nozzles may be more than six, for example, eight or twelve. There may be. When the plurality of target nozzles are a part of all the nozzles, if there are eight suction nozzles, the image can be divided into a plurality of sets, for example, two sets as in the case of six. The reflector has, for example, a plurality of reflection planes, and the same number of reflection planes as the number of suction nozzles belonging to one set reflect regularly light from at least a part of the front end portion of the suction nozzles. Provided. Even when a plurality of target nozzles are part of all nozzles, a light shielding cylinder may be provided instead of the cover to constitute a light shielding device, and in that case, a suction nozzle belonging to one set on the peripheral wall thereof The same number of slits is provided.

  Further, when all the nozzles are target nozzles, the reflection device and the imaging device may be provided so as not to be relatively rotatable, and the holding head may be provided so as to be relatively rotatable with respect to the reflection device and the imaging device. In this case, any of the plurality of rotation positions of the holding head can be set as the side-side imaging position.

  Furthermore, the background member and the holding head may be provided so as to be relatively rotatable. In this case, the phases of the suction nozzle and the background member coincide with each other during imaging.

In addition, when the position of the tip of the suction nozzle is acquired by imaging from the side of the image pickup device of the holding device with the image pickup device, the wear of the component suction surface that is the tip surface of the suction nozzle is detected based on the tip position. If the position of the end opposite to the end held by the suction nozzle of the electronic circuit component is acquired, the position is the suction nozzle when the electronic circuit component is mounted on the circuit board. It may be used for controlling the descending speed of the. For example, when the suction nozzle is lowered, the lowering speed is reduced just before the lower end of the electronic circuit component is mounted on the circuit board, and the electronic circuit component is brought into contact with the circuit board with less impact.
Further, when a portion of the electronic circuit component that is deviated from the suction nozzle in a direction perpendicular to the axis is imaged, the position of the end of the portion held by the suction nozzle and the position of the opposite end are acquired, The thickness of the electronic circuit component may be acquired based on them.

  The imaging by the imaging device of the holding device with the imaging device may be performed on the suction nozzle or the part essential to the imaging purpose of the suction nozzle and the object. For example, a part in the diameter direction of the suction tube, for example, the suction tube Only the part near the center line or one side edge part side may be imaged, or only the part on the adsorption tube side of the object may be imaged. It is effective to allow only a part of the adsorption tube or the like to be imaged when the imaging device cannot be a device with a wide field of view for the sake of resolution. For example, when a holding device with an imaging device is provided in an electronic circuit component mounting device, and the electronic circuit component sucked by the suction nozzle is mounted on the circuit board, it is confirmed that the electronic circuit component is properly mounted and the electronic circuit component is not brought home. Therefore, if imaging is performed for this purpose, it is only necessary to know the lower end position of the adsorption tube and the presence or absence of electronic circuit components below the lower end position, and the whole of the adsorption tube in the diameter direction and the lower end of the electronic circuit component are imaged. Is not essential, a part of the lower end of the adsorption tube in the diametrical direction and a part of the electronic circuit component adsorbed on the adsorption tube, and a portion located inside both diametrical edges of the adsorption tube A part of the image may be imaged.

  Further, when the holding head is one in which each of the plurality of suction nozzles is disposed at each of three or more positions on one circumference, it is not indispensable to use the holding head as a rotating head and it does not rotate. It may be a thing. In this case, the holding head and the target object are relatively moved by the relative movement device, the plurality of suction nozzles and the target object are sequentially positioned, and the target object is sucked by the suction nozzle. The relative movement device may be, for example, a device that moves one of the holding head and the object in two directions orthogonal to each other in a plane orthogonal to the axis of the suction nozzle, and moves one of the two in one of the two directions. It may be a device that moves and moves the other to the other in the two directions. In addition, when it is necessary to correct or change the rotational position of the object attracted by the suction nozzle, for example, the suction nozzle is provided in the head body so as to be rotatable about its own axis, and is rotated by the nozzle rotating device. To be done.

  When the holding head in the holding device with the imaging device is a head that does not rotate or move linearly with respect to the main body of the holding device with the imaging device, if all the nozzles are target nozzles, the imaging device and the reflection The device may be provided so as not to move with respect to the holding head. The same applies when a light-shielding device is provided. If the plurality of target nozzles are a part of all the nozzles and a set of imaging device and reflection device is provided, the imaging device and reflection device are provided to be movable with respect to the holding head. The light shielding device may be fixed to the holding head, or may be provided so as to be movable with respect to the holding head.

  Furthermore, when a background member that forms a bright background is provided, light that is incident on the imaging device is selected if a light shielding device is provided between the background member and the imaging device.

  Further, the holding device with an imaging device according to the claimable invention may be a holding device in which at least one front image of the tip of the suction nozzle and the holding object is captured by the imaging device, other than the electronic circuit component mounting device. A holding device provided in the working device may be used.

It is a top view which shows roughly the electronic circuit component mounting apparatus which is an Example. It is a side view (partial cross section) which shows the holding | maintenance apparatus with an imaging device of the electronic circuit component mounting apparatus shown in FIG. It is a top view which shows roughly the holding | maintenance apparatus with an imaging device shown in FIG. It is a plane sectional view showing a cover and a reflector of a holding device with an imaging device shown in FIG. It is a block diagram which shows notionally the control apparatus of the electronic circuit component mounting apparatus shown in FIG. It is a figure which shows the image of the adsorption | suction pipe | tube of four adsorption nozzles obtained by imaging with the imaging device of the holding | maintenance apparatus with an imaging device shown in FIG. It is a figure which shows the image of the adsorption tube of four adsorption nozzles obtained by the imaging with the imaging device of the holding | maintenance apparatus with an imaging device shown in FIG. 2, and the image of the electronic circuit component adsorbed by each of these adsorption nozzles. It is a figure which shows the image of the electronic circuit components adsorbed by each of the adsorption | suction pipe | tube of four adsorption nozzles obtained by the imaging device of the holding | maintenance apparatus with an imaging device which is another Example, and these adsorption nozzles. It is a side view (partial cross section) which shows the holding | maintenance apparatus with an imaging device of the electronic circuit component mounting apparatus which is another Example. It is a top view which shows roughly the holding | maintenance apparatus with an imaging device shown in FIG. It is a figure which shows the image of the adsorption | suction pipe | tube of four adsorption nozzles obtained by imaging with the imaging device of the holding | maintenance apparatus with an imaging device shown in FIG. It is a figure which shows the image of the electronic circuit component adsorbed by each of the adsorption | suction pipe | tube of four adsorption nozzles obtained by the imaging device of the holding | maintenance apparatus with an imaging device shown in FIG. 9, and these adsorption nozzles. It is a top view which shows schematically the holding | maintenance apparatus with an imaging device which is another Example. It is a top view which shows schematically the holding | maintenance apparatus with an imaging device which is another Example. It is a top view (partial cross section) which shows the cover and reflector of the holding | maintenance apparatus with an imaging device shown in FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 12: Board | substrate holding apparatus 14: Component supply apparatus 16: Holding apparatus with an imaging device 18: Head moving apparatus 24: Control apparatus 28: Circuit board 40: Mounting head 42: Side side imaging device 44: Reflecting device 80: Suction nozzle 108 : Electronic circuit component 180: Light source 184: Reflector 190: Reflection plane 240: Holding device with imaging device 242: Light shielding device 244: Light shielding plate 246: Slit 300: Holding device with imaging device 302: Mounting head 304: Suction nozzle 310: Light source 312: Light shielding device 314: Light shielding plate 315: Slit 316: Imaging device 318: Reflecting device 320: Reflector 328: Reflecting plane 350: Holding device with imaging device 352: Mounting head 354: Suction nozzle 360: Light source 361: Light shielding device 364: reflector 366: reflector 368: imaging device 370: shielding plate 372: slit 378: reflecting planes 380, 382: reflector 384, 386: reflecting planes

Claims (7)

A holding head that includes a plurality of suction nozzles and sucks and holds an object by each of the suction nozzles;
An imaging device disposed on the side of the plurality of suction nozzles so as to be capable of imaging from a direction perpendicular to the axis of the suction nozzles;
At least a part of all of the plurality of suction nozzles, and at least a part of at least a tip of each of the plurality of target nozzles that are nozzles to be imaged by the imaging device ; And one or more reflecting surfaces for reflecting light from a neighboring region, which is a region where at least a part of each of the objects is present, to the imaging device if the objects are held by the target nozzles. reflective devices and only including, a plurality of at least the tip portion of the at least a portion holding device with an imaging device and their the neighboring region is imaged simultaneously target nozzle. Each of the plurality of suction nozzles is disposed at each of three or more positions on one circumference, the reflection device is disposed at a central portion of the circumference, and the imaging device is disposed on the circumference. The holding device with an imaging device according to claim 1, wherein the holding device is disposed on an outer peripheral side toward the reflection device. 3. The reflection device according to claim 1, wherein the reflection device includes a plurality of reflection planes that reflect light from at least a part of at least a tip of each of the target nozzles and the vicinity region toward the imaging device. The holding device with an imaging device. Holding device with an imaging device according to any one of 3 to the all nozzles claims 1 which is the target nozzle. Wherein a said one or more reflective surfaces a plurality of reflecting surfaces of the reflecting device, an imaging apparatus according to any one of claims 1 all of the plurality of reflecting surfaces are formed by the surface integral of the reflector 4 A holding device. Behind each of at least the target nozzle, with an imaging device according to any one of from the background member forming a background claims 1 provided in each of those target nozzle and with each of their said neighborhood region 5 Holding device. The background member forms a bright background, and the imaging device acquires a silhouette image of at least a part of at least the tip of each of the target nozzles and the vicinity region thereof , and the background member wherein between the target nozzle, according to claim 6, the shading device is disposed to the to permit passage of selected selected light for silhouette image acquisition, block the passage of light other than the selected beam and The holding device with an imaging device.

Images