JP5199703B2 - Door open / close device for vacuum equipment - Google Patents

Description

  The present invention relates to a door opening / closing device for a vacuum device, and more specifically, by moving a door that opens and closes an opening of a large vacuum vessel used in a space environment test device or the like in a horizontal direction perpendicular to the axis of the vacuum vessel. The present invention relates to a door opening / closing device for a vacuum device that opens and closes the opening.

2. Description of the Related Art Conventionally, as a door opening / closing device for a vacuum vessel used in a large vacuum device such as a space environment test device, a linear type opening / closing device for moving a carriage with a door back and forth in the axial direction of the vacuum vessel (for example, Patent Document 1) And a suspension type opening / closing device (see, for example, Patent Document 2) that suspends a door from an upper rail provided above the vacuum vessel so as to be movable toward the opening of the vacuum vessel. A hinge-type opening / closing device that opens and closes by connecting the door to a vacuum vessel and rotating the door is known (for example, see Patent Document 3).
JP 2007-106342 A JP 7-125700 A JP 2003-137200 A

  However, in a straight-opening type switchgear, a large space is required in the axial direction of the vacuum vessel in order to secure a work space around the door, and a large balance weight is required to balance the weight of the door in the event of an earthquake. Necessary and not suitable for large vacuum equipment.

  In addition, since the suspension type opening and closing device cannot make a structure that supports the door in the space in which the door moves, the structure is such that the door is cantilevered from the support structure provided behind the vacuum vessel. It was. For this reason, high strength is required for the support structure, and since a pulling load and a compressive load act on the joint portion with the foundation, a thick foundation is necessary. Moreover, since the support structure occupies a large space, a space for arranging a shroud cooling valve and vacuum pumps must be provided separately. Further, when closing the door, a clamp device for fastening the door and the flanges of the opening portion is necessary.

  Further, in the hinge type opening / closing device, a large load is applied to the packing near the hinge, and the life of the packing is short. In addition, when the vacuum vessel is large, a hinge device with high strength is required to prevent the fall during an earthquake, and the adjustment mechanism for ensuring the parallelism between the vacuum vessel and the door is also large. In addition, a clamping device for pressing the door against the vacuum container has been required.

  In addition, a method of placing the door on the carriage and moving it horizontally in the direction perpendicular to the axis of the vacuum vessel has also been proposed, but the door must be firmly fixed on the carriage, A large-scale device was required to press the door.

  Accordingly, an object of the present invention is to provide a door opening / closing device suitable for a large vacuum device capable of reducing a load during an earthquake with a simple structure and capable of pressing the door against a vacuum vessel with a small force.

In order to achieve the above object, the present invention provides a vacuum apparatus door that opens and closes an opening of a cylindrical vacuum vessel having an axis line oriented in a horizontal direction by a door that moves in a horizontal direction perpendicular to the axis line. In the opening / closing device, guide means provided on the front floor surface of the opening in a direction perpendicular to the axis, a carriage guided and moved by the guide means, a portal frame provided on the carriage, Door suspension means provided directly on the beam at the top of the portal frame, the door suspension means comprising door movement means for moving the door in the axial direction of the vacuum vessel , Wheels rolling on the guide means are provided at both ends of the carriage, the wheel distance of the wheels at both ends is set to be equal to or greater than the diameter of the door, and the gate frame is , Start at intervals greater than the diameter of the door It is preferable that the upper end of the pair of left and right pillars you are has bridged the beam, the door hanging means, be good comprise door moving means for moving the door in the axial direction of said vacuum vessel good. Further, the door moving means is accommodated in a box-shaped upper guide member 19a provided on the lower surface portion of the beam, and the axial direction of the vacuum vessel is provided on both side plates and the bottom plate of the upper guide member. A pair of side guide holes and one bottom guide hole each having a long hole provided in the upper guide member, and an upper portion provided with a rod extending and contracting in a direction parallel to the axis of the vacuum vessel inside the upper guide member A hydraulic cylinder, a support shaft provided in a horizontal direction perpendicular to the rod at the tip of the rod and projecting outward from the pair of side guide holes, and an upper end portion of the support shaft being rotatable. The suspension member that is pivotally supported and has a lower end projecting downward from the bottom guide hole is accommodated, and on both guide ends projecting to the lower side of the upper guide member A pair of guide rollers that roll Attached to said lifting member lower end, it is good to the support shaft and the bracket provided on the outer surface of the door via a parallel connection pins are pivotally connected. Furthermore, door lower pressing means for pressing the lower part of the door in parallel with the axis of the vacuum container toward the opening of the vacuum container can be provided, and the door lower pressing means is a base plate of the carriage. A lower hydraulic cylinder provided with a rod that expands and contracts in a direction parallel to the axis of the vacuum vessel is provided on the upper end of the rod of the lower hydraulic cylinder. A pressing member that penetrates the plate in a state of being movable in the axial direction and that presses the pressing plate when the rod of the lower hydraulic cylinder extends is attached to the lower hydraulic cylinder side of the pressing plate of the rod of the lower hydraulic cylinder. In addition, it is preferable that a stopper of the push plate is attached to the tip of the rod of the lower hydraulic cylinder .

  According to the door opening and closing device for a vacuum device of the present invention, the door can be stably opened and closed with a simple structure by suspending the door from the beam of the portal frame provided on the carriage. Moreover, since it can be set as a lightweight structure, the burden of a foundation can also be reduced and cost reduction can be aimed at. Furthermore, by forming it so as to open and close laterally with respect to the opening of the vacuum vessel, it is possible to secure a sufficient space for arranging shroud cooling valves and vacuum pumps, thereby saving space. Can be planned. Further, by adopting the upper suspension type in a state where the door can be swung, the risk of the door falling over due to shaking such as an earthquake can be reduced.

  FIG. 1 is a front view of a door opening and closing device for a vacuum apparatus showing an embodiment in which the present invention is applied to a large space environment test apparatus, FIG. 2 is a side view, FIG. 3 is a top sectional side view, and FIG. FIG. 5 is a lower sectional side view.

  The space environment test apparatus 10 includes a horizontal cylindrical vacuum container 11 that accommodates a test specimen therein, and a door 12 that opens and closes an opening 11a of the vacuum container 11. Is provided with a shroud (not shown) cooled by liquid nitrogen and connected to an evacuation device for evacuating the interior of the container so that a simulated outer space can be formed inside the vacuum container 11. ing. In addition, flanges 11b and 12a are provided on the outer periphery of the opening 11a and the outer periphery of the door 12 to bring them into close contact via a ring-shaped packing (not shown).

  The door 12 moves in the horizontal direction perpendicular to the axis of the vacuum vessel 11 in a state where it is suspended on the movable mount 13 to open and close the opening 11a. The movable gantry 13 is provided with a portal frame 14 composed of a pair of left and right columns 14a and 14a and a beam 14b on a carriage 13a, and a door for suspending the door 12 on the beam 14b. Suspension means 15 are provided at two locations, and a lower door pressing means 16 for pressing the lower part of the door 12 toward the opening 11a is provided on the carriage 13a. In addition, a pair of guide rails 17 that are guide means in a direction perpendicular to the axis of the vacuum vessel 11 are laid on the floor surface portion FL in front of the opening portion 11a, and an electric device ( A plurality of wheels 13b that roll on the guide rail 17 are provided.

  The door 12 has an end plate portion 12b and the flange portion 12a provided on the outer periphery of the end plate portion 12b on the vacuum vessel side. The outer surface of the end plate portion 12b corresponds to the position of the door suspension means 15. The two brackets 12c, 12c are provided, and a pressing plate 18 corresponding to the position of the door lower pressing means 16 is provided below the flange portion 12a.

  The door suspension means 15 is provided with door moving means 19 for moving the door 12 in the axial direction of the vacuum vessel 11. The door moving means 19 is accommodated in a box-shaped upper guide member 19a provided on the lower surface portion of the beam 14b, and the both side plates and the bottom plate of the upper guide member 19a are arranged in the axial direction of the vacuum vessel 11. Side guide holes 19b and 19b and bottom guide holes 19c each having a long hole are provided.

  Inside the upper guide member 19a, an upper hydraulic cylinder 20 provided with a rod 20a that expands and contracts in a direction parallel to the axis of the vacuum vessel 11, and a tip of the rod 20a are provided in a horizontal direction perpendicular to the rod 20a. The support shafts 20b and 20b projecting outward from the side guide holes 19b and 19b, the upper end of the support shaft 20b being pivotably supported, and the lower end of the support shaft 20b downward from the bottom guide hole 19c. A projecting suspension member 20c is housed, and a pair of guide rollers 20d and 20d that roll on a guide surface 19d projecting to the lower side of the upper guide member 19a is provided at both ends of the support shaft 20b. The bracket 12c is rotatably connected to a lower end portion of the suspension member 20c via a connection pin 21 in a direction parallel to the support shaft 20b. The suspension member 20c and the bracket 12c are coupled at a position corresponding to the center of gravity of the door 12, and the door 12 is substantially upright at a position where the distance between the flange portions 11b and 12a is several tens mm, for example, about 20 mm. It is set to be suspended.

  The door lower pressing means 16 is provided with a lower hydraulic cylinder 22 having a rod 22a extending and contracting in a direction parallel to the axis of the vacuum vessel 11 on the base plate 13c of the carriage 13a. The distal end side of the rod 22a penetrates the push plate 18 so as to be movable in the axial direction. The rod 22a on the lower hydraulic cylinder 22 side of the push plate 18 is inserted with the push plate 18 when the rod 22a is extended. A pressing member 23 to be pressed is attached, and a stopper 22b of the pressing plate 18 is attached to the tip of the rod 22a. Further, a hydraulic unit 24 for operating the upper hydraulic cylinder 20 and the lower hydraulic cylinder 22 is provided on the base plate 13c.

  When the door 12 is open, the upper hydraulic cylinder 20 and the lower hydraulic cylinder 22 are both shortened, the flange portions 11b and 12a are separated from each other, and the door 12 is suspended by the door suspension means 15. With the holding member 20 c, the lower part can swing in the direction of the vacuum vessel 11 via the support shaft 20 b and the connecting pin 21. The push plate 18 below the door 12 is positioned between the pressing member 23 and the retaining member 22b. The rod 22a restricts the swinging in the direction perpendicular to the axis of the vacuum vessel 11, and the vacuum vessel The swinging in the direction of 11 is permitted.

  When closing the door 12, the wheel 13 b is driven to rotate, and the movable gantry 13 is moved along the guide rail 17 to a position corresponding to the opening 11 a of the vacuum vessel 11, and the axis of the vacuum vessel 11 and the center line of the door 12 are moved. And the rods 20a and 22a of the upper hydraulic cylinder 20 and the lower hydraulic cylinder 22 are extended by the hydraulic unit 24. When the rod 20a of the upper hydraulic cylinder 20 is extended, the support shaft 20b is moved in the direction of the vacuum vessel 11 by being guided by the guide rollers 20d and 20d rolling on the guide surface 19d, and the support shaft 20b is moved. Along with this, the door 12 moves toward the opening portion 11a of the vacuum vessel 11 through the suspension member 20c, the connecting pin 21, and the bracket 12c. At this time, even after both flange portions 11b and 12a of the vacuum vessel 11 and the door 12 come into contact with each other, the support shaft 20b slightly moves in the direction of the vacuum vessel 11, so that the entire door 12 is opened in the vacuum vessel 11. It will be in the state pressed against 11a. Furthermore, when the rod 20a of the lower hydraulic cylinder 22 extends and the pressing member 23 presses the pressing plate 18, the lower portion of the door 12 is pressed against the opening 11a.

  As a result, the opening 11 a of the vacuum vessel 11 is sealed by the door 12. By evacuating the inside of the vacuum vessel 11 in this state, atmospheric pressure acts in a direction in which the door 12 is pressed against the opening 11a, so that the opening 11a and the door 12 can be sufficiently sealed. Further, if necessary, the packing may be tightened by pressing the flanges 11b and 12a with a clamp device similar to the conventional one.

  When opening the door 12, after returning the inside of the vacuum vessel 11 to atmospheric pressure, the rods 20a, 22a of the upper hydraulic cylinder 20 and the lower hydraulic cylinder 22 are shortened, and both flange portions 11b, 12a are separated, What is necessary is just to drive the wheel 13b and to move the movable mount 13 along the guide rail 17 in the lateral direction.

  Further, when the rod 22a of the lower hydraulic cylinder 22 is shortened, even if both the flange portions 11b and 12a are difficult to be separated when the packing is in close contact with each other, the retainer 22b prevents the push plate 18 from moving between the flange portions 11b and 12a. By pushing in the separating direction, both flange portions 11b and 12a can be reliably separated.

  In this way, by hanging the door 12 from the beam 14b of the gate-shaped frame 14 having the gate-shaped configuration, the cart and the door are firmly fixed and fallen like when the door is erected on the cart. Since there is no need to prevent it, the structure of the movable mount 13 and the door 12 can be simplified and reduced in weight. As a result, the burden on the foundation can be reduced, and the construction cost and construction period can be shortened. Further, by providing the door suspending means 15 provided on the beam 14b with the door moving means 19 for moving the door 12 in the axial direction, the door 12 can be moved in the axial direction with a simple structure.

  Furthermore, in this embodiment, when opening and closing the opening 11a of the vacuum vessel 11, it is only necessary to operate the upper hydraulic cylinder 20 and the lower hydraulic cylinder 22 to move only the door 12 in the axial direction of the vacuum vessel 11. Therefore, the door 12 can be moved toward the opening portion 11a with a light force compared to the pressing device for moving the door on the carriage in the axial direction of the vacuum vessel as in the prior art, and the upper hydraulic cylinder 20 and A small one can be adopted as the lower hydraulic cylinder 22.

  In addition, by suspending the door 12 in a swingable manner with respect to the axial direction of the vacuum vessel 11, when the shaking due to the earthquake acts on the movable base 13 with the door 12 open, the axis of the vacuum vessel 11 For the shaking of the direction, the door 12 swings to absorb the shaking, so that a large vibration acceleration is not applied to the movable mount 13 and the carriage 13a and the movable mount 13 are supported in the axial direction of the vacuum vessel 11. Even if the interval between the guide rails 17 is not set large, it is possible to prevent the movable mount 13 from falling over. On the other hand, for the swing in the direction orthogonal to the axis of the vacuum vessel 11, the wheel 13b, 13b located at both ends of the carriage 13a is set to have an axial distance equal to or larger than the diameter of the door 12, so that it falls in this direction. The door 12 is also restricted from swinging in this direction by the rod 20a of the lower hydraulic cylinder 22 penetrating the push plate 18.

  Furthermore, with respect to the shaking of the earthquake with the door 12 closed, the door 12 is connected to the movable frame 13 via the suspension member 20c, so that the movable frame 13 is connected to the movable frame 13 through the door 12 from the vacuum vessel 11 side. The acceleration of the earthquake is not directly propagated, and the vacuum vessel 11 and the movable mount 13 are in an independent state, so that the earthquake load on the movable mount 13 can be reduced.

  For these reasons, the depth of the carriage 13a and the distance between the guide rails 17 in the movable gantry 13 can be significantly reduced as compared with the conventional carriage system, and the structure for supporting the door 12 is simplified and lightweight. It is possible to reduce the burden on the guide rail 17 and the foundation portion, thereby simplifying the structure and reducing the construction cost.

  In addition, the door 12 is moved laterally with respect to the opening of the vacuum vessel 11 so as to be opened and closed, thereby securing a space for arranging a shroud cooling valve and vacuum pumps. In addition, the space for installing the space environment test apparatus can be saved.

  In this embodiment, the door suspending means 15 provided on the beam 14b of the movable mount 13 is provided with the door moving means 19 for moving the door 12 in the axial direction, but other parts such as the beam 14b and the column 14a are provided. The door moving means can be provided independently of the door suspension means 15, and the door moving means for pulling the door 12 toward the vacuum container 11 can be provided. Further, it is possible to suspend the door 12 on the support shaft 20b of the door suspending means 15 so as to be swingable without using the suspending member 20c. Furthermore, the door lower part pressing means can also be provided in the other part of the movable mount 13, and a device for pulling the lower part of the door 12 closer to the vacuum container 11 can be provided.

It is a front view of the door opening / closing apparatus for large sized vacuum apparatuses which shows one example of this invention. It is a side view of the door opening / closing apparatus for large sized vacuum apparatuses similarly. It is an upper section side view of a door opening and closing device for large vacuum equipments similarly. It is a top section front view of the door opening and closing device for large-sized vacuum devices similarly. It is a lower section side view of a door opening and closing device for a large-sized vacuum device.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Space environment test apparatus, 11 ... Vacuum container, 11a ... Opening part, 11b ... Flange part, 12 ... Door, 12a ... Flange part, 12b ... End plate part, 12c ... Bracket, 13 ... Moving stand, 13a ... Cart, 13b ... wheel, 13c ... base plate, 14 ... portal frame, 14a ... pillar, 14b ... beam, 15 ... door suspension means, 16 ... door bottom pressing means, 17 ... guide rail, 18 ... push plate, 19 ... door movement Means, 19a ... upper guide member, 19b ... side guide hole, 19c ... bottom guide hole, 19d ... guide surface, 20 ... upper hydraulic cylinder, 20a ... rod, 20b ... support shaft, 20c ... suspension member, 20d ... guide Roller, 21 ... connecting pin, 22 ... lower hydraulic cylinder, 22a ... rod, 22b ... retaining, 23 ... pressing member, 24 ... hydraulic unit, FL ... floor surface

Claims (7)

In a vacuum apparatus door opening and closing device that opens and closes an opening of a cylindrical vacuum vessel having an axis lined in a horizontal direction by a door that moves in a horizontal direction perpendicular to the axis line,
Guide means provided on the front floor surface of the opening in a direction perpendicular to the axis;
A carriage guided and moved by the guide means;
A portal frame provided on the carriage;
Door suspension means provided directly on the beam at the top of the portal frame ,
The door opening / closing device for a vacuum apparatus , wherein the door suspension means includes door moving means for moving the door in the axial direction of the vacuum vessel . 2. The wheels rolling on the guide means are provided at both ends of the carriage, and the wheel distance of the wheels at both ends is set to be equal to or larger than the diameter of the door. Door opening and closing device for vacuum equipment. The door opening / closing device for a vacuum device according to claim 1 or 2 , wherein the gate frame has the beam spanned between upper ends of a pair of left and right columns standing up at an interval equal to or larger than a diameter of the door. . The said door suspension means is provided with the suspension member which suspends this door so that a movement to the axial direction of the said vacuum vessel is possible between the said door movement means and the said door. 4. A door opening / closing device for a vacuum device according to any one of claims 1 to 3 . The door moving means is accommodated in a box-shaped upper guide member 19a provided on the lower surface portion of the beam, and the both side plates and the bottom plate of the upper guide member are respectively in the axial direction of the vacuum vessel. An upper hydraulic cylinder provided with a pair of side guide holes and one bottom guide hole each having a long hole provided therein, and a rod that extends and contracts in the direction parallel to the axis of the vacuum vessel inside the upper guide member A support shaft provided in a horizontal direction perpendicular to the rod at the tip end portion of the rod and projecting outward from the pair of side guide holes, and an upper end portion of the support shaft rotatably supported by the support shaft. The suspension member having a lower end projecting downward from the bottom guide hole is accommodated, and is rolled on the guide surface projecting to the lower side of the upper guide member at both ends of the support shaft. A pair of moving guide rollers are attached. The bracket provided on the outer surface of the door is rotatably connected to the lower end portion of the suspension member via a connecting pin in a direction parallel to the support shaft. Door opening and closing device for vacuum equipment . The vacuum according to any one of claims 1 to 5, further comprising door lower pressing means for pressing the lower part of the door toward the opening of the vacuum container in parallel with the axis of the vacuum container. Device door opening and closing device . The lower door pressing means is provided with a lower hydraulic cylinder provided with a rod that expands and contracts in a direction parallel to the axis of the vacuum vessel on a base plate of the carriage, and the tip side of the rod of the lower hydraulic cylinder Passes through a push plate provided at the lower portion of the flange portion of the door while being movable in the axial direction, and is closer to the lower hydraulic cylinder side of the push plate of the rod of the lower hydraulic cylinder than the rod of the lower hydraulic cylinder. The vacuum device door opening and closing according to claim 6, wherein a pressing member that presses the pressing plate when extended is attached, and a stopper of the pressing plate is attached to a tip of a rod of the lower hydraulic cylinder. Equipment .

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