JP5168223B2 - Air flow measurement device - Google Patents

Air flow measurement device Download PDF

Info

Publication number
JP5168223B2
JP5168223B2 JP2009111890A JP2009111890A JP5168223B2 JP 5168223 B2 JP5168223 B2 JP 5168223B2 JP 2009111890 A JP2009111890 A JP 2009111890A JP 2009111890 A JP2009111890 A JP 2009111890A JP 5168223 B2 JP5168223 B2 JP 5168223B2
Authority
JP
Japan
Prior art keywords
bypass
sub
flow path
channel
bypass channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009111890A
Other languages
Japanese (ja)
Other versions
JP2010261771A (en
Inventor
崇 榎本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2009111890A priority Critical patent/JP5168223B2/en
Priority to DE102010028388.6A priority patent/DE102010028388B4/en
Priority to DE102010064698.9A priority patent/DE102010064698B3/en
Publication of JP2010261771A publication Critical patent/JP2010261771A/en
Application granted granted Critical
Publication of JP5168223B2 publication Critical patent/JP5168223B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)

Description

本発明は、センサ部に薄膜式（チップ式）の流量検出素子を用いた空気流量測定装置に関する。   The present invention relates to an air flow rate measuring apparatus using a thin film type (chip type) flow rate detecting element in a sensor unit.

従来、自動車用エンジンの吸入空気量を測定するエアフロメータ（熱式流量計）には、高精度、高応答の市場要求から、センサ部にチップ式の流量検出素子を用いたものが知られている。しかし、チップ式の流量検出素子は、例えば、シリコン基板に設けられたダイヤフラム上に薄膜抵抗体（発熱抵抗体、流量検出抵抗体等）を形成するため、空気中に含まれるダスト等の衝突によって基板上の薄膜抵抗体がダメージを受ける恐れがある。
そこで、センサ部にチップ式の流量検出素子を用いる場合は、空気流路にダストを分離する機能が必要となり、その分離能力の高さから慣性分離方式が多く採用されている（特許文献１参照）。 Conventionally, air flow meters (thermal flow meters) that measure the intake air volume of automobile engines have been known to use a chip-type flow rate detection element in the sensor unit due to market requirements for high accuracy and high response. Yes. However, the chip-type flow rate detection element, for example, forms a thin film resistor (a heating resistor, a flow rate detection resistor, etc.) on a diaphragm provided on a silicon substrate. The thin film resistor on the substrate may be damaged.
Therefore, when a chip-type flow rate detection element is used for the sensor unit, a function of separating dust in the air flow path is required, and an inertial separation method is often employed because of its high separation capability (see Patent Document 1). ).

この慣性分離方式を採用したエアフロメータの一例を図９に示す。
このエアフロメータは、ダクト１００の内部を流れる空気の流れ方向と略平行に形成されるバイパス流路１１０と、このバイパス流路１１０から分岐するサブバイパス流路１２０とを有し、このサブバイパス流路１２０にセンサ部の流量検出素子（センサチップ）１３０を配置している。この構成によれば、ダクト１００の上流から流れてくる空気中にダストが含まれている場合でも、そのダストの多くは、慣性の作用により、バイパス流路１１０を通り抜けて下流側へ流れるため、バイパス流路１１０からサブバイパス流路１２０へダストが流れ込むことを抑制できる。その結果、サブバイパス流路１２０に配置した流量検出素子１３０にダストが衝突することを抑制できるので、流量検出素子１３０の薄膜抵抗体がダメージを受けることを回避できる。 An example of an air flow meter that employs this inertia separation system is shown in FIG.
This air flow meter has a bypass passage 110 formed substantially parallel to the flow direction of air flowing inside the duct 100, and a sub-bypass passage 120 branched from the bypass passage 110. A flow rate detection element (sensor chip) 130 of the sensor unit is arranged on the path 120. According to this configuration, even when dust is contained in the air flowing from the upstream of the duct 100, most of the dust flows to the downstream side through the bypass flow path 110 due to the inertial action. It is possible to suppress dust from flowing from the bypass channel 110 into the sub bypass channel 120. As a result, it is possible to prevent dust from colliding with the flow rate detection element 130 disposed in the sub-bypass channel 120, so that the thin film resistor of the flow rate detection element 130 can be prevented from being damaged.

特開２００８−３０９６２３号公報JP 2008-309623 A

ところが、慣性分離方式のエアフロメータでは、バイパス流路１１０の途中からサブバイパス流路１２０が分岐して形成されるため、バイパス流路１１０の出口に向かう空気の一部が、バイパス流路１１０からサブバイパス流路１２０へ取り込まれる空気の流れに影響を受ける。つまり、バイパス流路１１０を流れる空気（特に、サブバイパス流路１２０の入口近くを流れる空気）には、バイパス流路１１０からサブバイパス流路１２０へ取り込まれる空気の流れ方向に引き込まれる力が働く。このため、バイパス流路１１０を流れる空気の一部が、バイパス流路１１０の出口側の上壁面に衝突して、出口側上部の圧力が上昇することで、バイパス流路１１０の出口より排出されない一部の空気がサブバイパス流路１２０へ逆流する。   However, in the inertial separation type air flow meter, since the sub-bypass channel 120 is formed by branching from the middle of the bypass channel 110, a part of the air toward the outlet of the bypass channel 110 is separated from the bypass channel 110. The flow of air taken into the sub-bypass channel 120 is affected. That is, a force drawn in the flow direction of the air taken from the bypass flow path 110 into the sub bypass flow path 120 acts on the air flowing through the bypass flow path 110 (particularly, the air flowing near the inlet of the sub bypass flow path 120). . For this reason, a part of the air flowing through the bypass channel 110 collides with the upper wall surface on the outlet side of the bypass channel 110, and the pressure on the upper side of the outlet side is increased, so that the air is not discharged from the outlet of the bypass channel 110. A part of the air flows backward to the sub-bypass channel 120.

上記の結果、図９に示す様に、バイパス流路１１０の入口側からサブバイパス流路１２０へ取り込まれる空気（図中矢印ａで示す）と、バイパス流路１１０の出口側からサブバイパス流路１２０へ逆流する空気（図中矢印ｂで示す）とが衝突することにより、空気の流れに乱れが発生し、その乱れが流量検出素子１３０の検出精度を低下させる要因となっている。
本発明は、上記事情に基づいて成されたもので、その目的は、バイパス流路の出口から排出されない一部の空気がサブバイパス流路へ逆流することによる空気の乱れを低減できる空気流量測定装置を提供することにある。 As a result of the above, as shown in FIG. 9, the air (indicated by the arrow a in the figure) taken from the inlet side of the bypass channel 110 into the sub-bypass channel 120 and the sub-bypass channel from the outlet side of the bypass channel 110. When air that flows backward to 120 (indicated by an arrow b in the figure) collides with the air, turbulence occurs in the air flow, and the turbulence causes a reduction in detection accuracy of the flow rate detection element 130.
The present invention has been made based on the above circumstances, and its purpose is to measure the air flow rate that can reduce air turbulence caused by a part of the air not discharged from the outlet of the bypass flow path flowing back to the sub bypass flow path. To provide an apparatus.

（請求項１の発明）
本発明は、ダクトの内部を流れる空気の一部を取り込むバイパス流路と、このバイパス流路から分岐して形成され、バイパス流路を流れる空気の一部を取り込むサブバイパス流路と、このサブバイパス流路に配置される流量測定用のセンサチップを有するセンサ部と、このセンサ部より出力されるセンサ情報を基に、サブバイパス流路を流れる空気の流量を測定する空気流量測定装置であって、バイパス流路を流れる空気の流れ方向と直交する所定の方向をＹ−Ｙ方向と呼ぶ時に、バイパス流路に対するＹ−Ｙ方向の一方側に、バイパス流路から分岐するサブバイパス流路の入口が形成され、サブバイパス流路の入口が形成される部分より下流側のバイパス流路をバイパス出口側流路と呼ぶ時に、このバイパス出口側流路には、Ｙ−Ｙ方向の一方側の流路壁面に衝突する空気量を低減することで、バイパス出口側流路を逆流してサブバイパス流路へ流れ込む空気の流れを抑制する逆流抑制板が配置されていることを特徴とする。 (Invention of Claim 1)
The present invention includes a bypass passage that takes in part of the air flowing inside the duct, a sub-bypass passage that is formed by branching from the bypass passage and takes in a part of air that flows through the bypass passage, An air flow measurement device that measures the flow rate of air flowing through a sub-bypass channel based on a sensor unit having a sensor chip for measuring a flow rate disposed in the bypass channel and sensor information output from the sensor unit. Thus, when a predetermined direction orthogonal to the flow direction of the air flowing through the bypass channel is referred to as a YY direction, a sub-bypass channel branching from the bypass channel is formed on one side of the YY direction with respect to the bypass channel. When the bypass channel on the downstream side of the portion where the inlet is formed and the inlet of the sub-bypass channel is called a bypass outlet channel, the bypass outlet channel is connected to the bypass outlet channel in the Y-Y direction. It is characterized in that a backflow suppression plate is arranged to suppress the flow of air flowing back into the sub-bypass flow path by reducing the amount of air that collides with the flow path wall on the side. To do.

上記の構成によれば、バイパス出口側流路に配置される逆流抑制板により、バイパス出口側流路のＹ−Ｙ方向の一方側（以下、バイパス出口上部と呼ぶ）へ向かう空気の流れを抑制することで、バイパス出口上部の流路壁面に衝突する空気量を低減できる。これにより、バイパス出口上部の圧力上昇を抑えることができるので、バイパス流路の出口から排出されない空気が少なくなり、バイパス出口側流路を逆流してサブバイパス流路へ流れ込む空気の流れを低減できる。その結果、バイパス流路の上流側からサブバイパス流路へ取り込まれる空気と、バイパス出口上部からサブバイパス流路へ逆流する空気との衝突による乱れを低減できるので、センサ部の検出精度が安定する。   According to said structure, the flow of the air which goes to one side (henceforth a bypass outlet upper part) of the YY direction of a bypass outlet side flow path is suppressed by the backflow suppression board arrange | positioned at a bypass outlet side flow path. By doing so, the air quantity which collides with the flow-path wall surface of a bypass exit upper part can be reduced. As a result, the pressure rise at the upper part of the bypass outlet can be suppressed, so that the amount of air that is not discharged from the outlet of the bypass flow path is reduced, and the flow of air flowing back into the sub bypass flow path through the bypass outlet side flow path can be reduced. . As a result, it is possible to reduce turbulence due to collision between the air taken into the sub-bypass channel from the upstream side of the bypass channel and the air flowing backward from the upper part of the bypass outlet to the sub-bypass channel, so that the detection accuracy of the sensor unit is stabilized .

また、本発明では、逆流抑制板は、Ｙ−Ｙ方向と直交する平面と平行に配置されると共に、バイパス出口側流路のＹ−Ｙ方向の略中心またはＹ−Ｙ方向の中心より一方側に寄って配置されていることを特徴とする。
このように逆流抑制板を配置することで、逆流抑制板よりバイパス出口上部（Ｙ−Ｙ方向の一方側）を流れる空気量を低減できるので、バイパス出口上部からサブバイパス流路へ逆流する空気の流れを低減できる。
更に本発明では、バイパス流路に対するサブバイパス流路の上流側の入口端部をＡ点、下流側の入口端部をＢ点と呼ぶ時に、バイパス流路の中心からＡ点までの距離よりＢ点までの距離の方が大きく設定されていることを特徴とする。
かかる構成によれば、空気と共にバイパス流路に取り込まれたダストは、慣性の作用により、そのままバイパス流路を通り抜けようとするため、バイパス流路の中心からＡ点までの距離よりＢ点までの距離の方が大きく設定されることで、そのＢ点を起点として形成されるサブバイパス流路の壁面にダストが衝突する確率は小さくなる。その結果、バイパス流路からサブバイパス流路に流れ込むダストをより少なくできるので、サブバイパス流路に配置されるセンサチップにダストが衝突することを低減でき、センサチップがダメージを受けることを回避できる。 In the present invention, the backflow suppressing plate is disposed in parallel with a plane orthogonal to the YY direction, and one side from the approximate center in the YY direction or the center in the YY direction of the bypass outlet side flow path. It is characterized by being arranged close to.
By arranging the backflow suppression plate in this way, the amount of air flowing through the upper part of the bypass outlet (one side in the Y-Y direction) can be reduced from the backflow suppression plate, so that the air flowing back from the upper part of the bypass outlet to the sub-bypass channel is reduced. The flow can be reduced.
Furthermore, in the present invention, when the inlet end on the upstream side of the sub-bypass channel with respect to the bypass channel is referred to as point A and the inlet end on the downstream side is referred to as point B, the distance B from the center of the bypass channel to the point A The distance to the point is set larger.
According to this configuration, the dust taken into the bypass flow path together with the air tends to pass through the bypass flow path as it is due to the inertial action, so the distance from the center of the bypass flow path to the point A to the point B By setting the distance to be larger, the probability that dust will collide with the wall surface of the sub-bypass channel formed starting from the point B is reduced. As a result, since dust flowing from the bypass channel into the sub-bypass channel can be reduced, it is possible to reduce dust from colliding with the sensor chip disposed in the sub-bypass channel, and to avoid damaging the sensor chip. .

エアフロメータを吸気ダクトに取り付けた状態を示す断面図である。It is sectional drawing which shows the state which attached the air flow meter to the intake duct. （ａ）エアフロメータを上流側から見た正面図、（ｂ）エアフロメータの側面図、（ｃ）エアフロメータを下流側から見た背面図である。(A) The front view which looked at the air flow meter from the upstream side, (b) The side view of an air flow meter, (c) The back view which looked at the air flow meter from the downstream side. （ａ）センサ部による流量計測の原理を説明する温度分布図、（ｂ）センサ部に使用されるセンサチップの断面図である。(A) Temperature distribution diagram illustrating the principle of flow rate measurement by the sensor unit, (b) a cross-sectional view of a sensor chip used in the sensor unit. 上流側温抵抗体の検出温度と下流側温抵抗体の検出温度との温度差ＤＴｈと、空気の流量および流れ方向との相関を示すグラフである。It is a graph which shows the correlation with the temperature difference DTh of the detection temperature of an upstream temperature resistor, and the detection temperature of a downstream temperature resistor, and the flow volume and flow direction of air. バイパス出口側流路に逆流抑制板を配置した一例を示す断面図である（実施例１）。It is sectional drawing which shows an example which has arrange | positioned the backflow suppression board in the bypass exit side flow path (Example 1). サブバイパス出口側流路の入口に整流板を配置した一例を示す断面図である（実施例２）。It is sectional drawing which shows an example which has arrange | positioned the baffle plate in the inlet_port | entrance of a sub bypass outlet side flow path (Example 2). バイパス流路に対するサブバイパス流路の分岐部（入口）の形状を示す断面図である（実施例３）。(Example 3) which is sectional drawing which shows the shape of the branch part (inlet) of the sub bypass flow path with respect to a bypass flow path. バイパス出口側流路を形成する流路形成ボディの壁面に空気排出孔を形成した一例を示す断面図である（実施例４）。(Example 4) which is an example which formed the air discharge hole in the wall surface of the flow-path formation body which forms a bypass exit side flow path. 従来技術に係るエアフロメータの断面図である。It is sectional drawing of the air flow meter which concerns on a prior art.

本発明を実施するための最良の形態を以下の実施例により詳細に説明する。
なお、以下に説明する４つの実施例のうち、実施例１は本発明が適用されたものであるのに対し、実施例２〜実施例４は本発明が適用されていない参考例である。 The best mode for carrying out the present invention will be described in detail with reference to the following examples.
Of the four examples described below, Example 1 is the one to which the present invention is applied, while Examples 2 to 4 are reference examples to which the present invention is not applied.

この実施例１は、例えば、自動車用エンジンの吸入空気量を測定するエアフロメータ１に本発明の空気流量測定装置を適用した一例を説明する。
エアフロメータ１は、図１に示す様に、吸気ダクト２に取り付けられるセンサハウジング３と、このセンサハウジング３の内部に組み込まれるセンサ部４とを有する。
吸気ダクト２は、エンジンの吸気ポート（図示せず）に接続される吸気通路の一部を形成するもので、例えば、吸気通路の最上流に配置されるエアクリーナの出口パイプ、あるいは、この出口パイプの下流側に接続される吸気管等である。
センサハウジング３は、図２に示す様に、吸気ダクト２に固定されるフランジ部３ａと、エンジンの運転状態を制御するＥＣＵ（図示せず）との電気的接続を行うコネクタ部３ｂと、吸気ダクト２の内部に挿入される流路形成ボディ３ｃ等が形成されている。 In the first embodiment, for example, an example in which the air flow measuring device of the present invention is applied to an air flow meter 1 that measures an intake air amount of an automobile engine will be described.
As shown in FIG. 1, the air flow meter 1 includes a sensor housing 3 attached to the intake duct 2 and a sensor unit 4 incorporated in the sensor housing 3.
The intake duct 2 forms part of an intake passage connected to an intake port (not shown) of the engine. For example, an outlet pipe of an air cleaner arranged at the uppermost stream of the intake passage, or the outlet pipe An intake pipe or the like connected to the downstream side.
As shown in FIG. 2, the sensor housing 3 includes a flange portion 3a fixed to the intake duct 2, a connector portion 3b that electrically connects an ECU (not shown) that controls the operating state of the engine, an intake air A flow path forming body 3c and the like inserted into the duct 2 are formed.

流路形成ボディ３ｃには、吸気ダクト２の内部を図１の左側（エアクリーナ側）から右側（エンジン側）に向かって流れる空気、つまり、エンジンに吸入される空気の一部を取り込むバイパス流路５と、このバイパス流路５を流れる空気の一部を取り込むサブバイパス流路６とが形成されている。
バイパス流路５は、空気を取り込む入口５ａから空気を排出する出口５ｂまで略直線的に、且つ、吸気ダクト２を流れる空気の流れ方向と略平行に形成されている。このバイパス流路５は、流路断面形状が円形であり、且つ、バイパス流路５の出口側は、流路断面積が出口５ｂに向かって次第に減少するテーパ状に形成されている。また、バイパス流路５の出口側には、後述する逆流抑制板７が配置されている。 In the flow path forming body 3c, a bypass flow path that takes in the air flowing from the left side (air cleaner side) to the right side (engine side) of FIG. 5 and a sub-bypass channel 6 for taking in part of the air flowing through the bypass channel 5 are formed.
The bypass flow path 5 is formed substantially linearly from the inlet 5 a that takes in air to the outlet 5 b that discharges air, and substantially parallel to the flow direction of the air flowing through the intake duct 2. The bypass channel 5 has a circular channel cross-sectional shape, and the outlet side of the bypass channel 5 is formed in a tapered shape in which the channel cross-sectional area gradually decreases toward the outlet 5b. Further, a backflow suppression plate 7 to be described later is disposed on the outlet side of the bypass flow path 5.

サブバイパス流路６は、バイパス流路５を流れる空気の流れ方向と直交する所定の方向（図１の上下方向）をＹ−Ｙ方向と呼ぶ時に、バイパス流路５に対するＹ−Ｙ方向の一方側（図示上側）にバイパス流路５から分岐するサブバイパス流路６の入口６ａが形成され、バイパス流路５の出口５ｂの周囲に形成される環状の出口６ｂに通じている。このサブバイパス流路６は、バイパス流路５より流路長が長く、且つ、流路途中で方向が大きく変化する曲がり部を有して形成されている。
また、サブバイパス流路６の入口６ａは、バイパス流路５に対する上流側の入口端部をＡ点、下流側の入口端部をＢ点と呼ぶ時に、バイパス流路５の中心線Ｏ−ＯからＡ点までの距離より、Ｂ点までの距離の方が大きく設定されている（図１参照）。つまり、サブバイパス流路６の入口開口面は、バイパス流路５の出口側に傾いて形成されている。 The sub-bypass channel 6 is one of the Y-Y directions relative to the bypass channel 5 when a predetermined direction (vertical direction in FIG. 1) orthogonal to the flow direction of the air flowing through the bypass channel 5 is referred to as a Y-Y direction. An inlet 6a of the sub-bypass channel 6 branched from the bypass channel 5 is formed on the side (the upper side in the figure), and communicates with an annular outlet 6b formed around the outlet 5b of the bypass channel 5. The sub-bypass channel 6 has a longer channel length than the bypass channel 5 and is formed with a bent portion whose direction changes greatly in the middle of the channel.
In addition, the inlet 6a of the sub-bypass channel 6 is a center line OO of the bypass channel 5 when the upstream inlet end with respect to the bypass channel 5 is referred to as point A and the downstream inlet end is referred to as point B. The distance to point B is set larger than the distance from point A to point A (see FIG. 1). That is, the inlet opening surface of the sub bypass channel 6 is formed to be inclined toward the outlet side of the bypass channel 5.

センサ部４は、図３（ｂ）に示す様に、例えば、シリコン製のセンサ基板８に設けられるダイヤフラム９の表面上に薄膜抵抗体（発熱抵抗体１０と側温抵抗体１１、１２）を形成したセンサチップ１３と、発熱抵抗体１０の発熱温度を制御すると共に、側温抵抗体１１、１２の抵抗値を基に、空気の流量と流れ方向に応じたセンサ信号を出力する回路部（図示せず）とを有し、図１に示す様に、センサチップ１３がサブバイパス流路６の曲がり部に配置されている。
発熱抵抗体１０は、サブバイパス流路６を流れる空気の温度よりも一定温度高い基準温度に通電制御される。
側温抵抗体１１、１２は、発熱抵抗体１０の上流側に近接して配置される側温抵抗体（以下、上流側温抵抗体１１と呼ぶ）と、発熱抵抗体１０の下流側に近接して配置される側温抵抗体（以下、下流側温抵抗体１２と呼ぶ）とを有している。 As shown in FIG. 3B, the sensor unit 4 includes, for example, a thin film resistor (a heating resistor 10 and side temperature resistors 11, 12) on the surface of a diaphragm 9 provided on a sensor substrate 8 made of silicon. A circuit unit that controls the heat generation temperature of the formed sensor chip 13 and the heat generation resistor 10 and outputs a sensor signal corresponding to the flow rate and flow direction of air based on the resistance values of the side temperature resistors 11 and 12 ( As shown in FIG. 1, the sensor chip 13 is disposed at the bent portion of the sub-bypass channel 6.
The heating resistor 10 is energized and controlled to a reference temperature that is higher than the temperature of the air flowing through the sub-bypass channel 6 by a certain temperature.
The side temperature resistors 11 and 12 are close to the side temperature resistor (hereinafter referred to as the upstream side temperature resistor 11) disposed close to the upstream side of the heating resistor 10 and the downstream side of the heating resistor 10. Side temperature resistors (hereinafter referred to as downstream temperature resistors 12).

このセンサ部４による空気流量の計測原理について説明する。
発熱抵抗体１０が基準温度に通電制御されると、発熱抵抗体１０の発熱による温度分布が生じる。ここで、サブバイパス流路６に空気の流れが発生していない時は、図３（ａ）に破線グラフで示す様に、発熱抵抗体１０の位置を中心として上流側と下流側とで温度分布が左右対称となるため、上流側温抵抗体１１で検出される温度と、下流側温抵抗体１２で検出される温度とが等しくなる。
これに対し、例えば、サブバイパス流路６に順流方向の空気流が生じると、図３（ａ）に実線グラフで示す様に、発熱抵抗体１０の下流側（図示右側）へ片寄った温度分布が生じるため、上流側温抵抗体１１の検出温度より、下流側温抵抗体１２の検出温度の方が高くなる。 The principle of measuring the air flow rate by the sensor unit 4 will be described.
When the heating resistor 10 is energized and controlled to the reference temperature, a temperature distribution due to the heat generated by the heating resistor 10 occurs. Here, when there is no air flow in the sub-bypass channel 6, as shown by the broken line graph in FIG. 3A, the temperature is increased between the upstream side and the downstream side around the position of the heating resistor 10. Since the distribution is symmetrical, the temperature detected by the upstream temperature resistor 11 is equal to the temperature detected by the downstream temperature resistor 12.
On the other hand, for example, when a forward air flow is generated in the sub-bypass channel 6, as shown by a solid line graph in FIG. 3A, the temperature distribution is shifted to the downstream side (right side in the drawing) of the heating resistor 10. Therefore, the detected temperature of the downstream temperature resistor 12 is higher than the detected temperature of the upstream temperature resistor 11.

一方、サブバイパス流路６に逆流方向の空気流が生じると、発熱抵抗体１０の上流側（図示左側）へ片寄った温度分布が生じるため、下流側温抵抗体１２の検出温度より、上流側温抵抗体１１の検出温度の方が高くなる。
これにより、上流側温抵抗体１１の検出温度と下流側温抵抗体１２の検出温度との間に温度差ＤＴｈが生じるため、この温度差ＤＴｈに応じて、上流側温抵抗体１１と下流側温抵抗体１２の抵抗値がそれぞれ変化し、この抵抗値の変化により生じる電位差が増幅されて、センサ信号（例えばアナログ電圧）としてＥＣＵへ出力される。なお、センサ信号は、アナログ電圧を周波数値に変換して出力することも出来る。図４は、上流側温抵抗体１１の検出温度と下流側温抵抗体１２の検出温度との温度差ＤＴｈと、空気の流量および流れ方向との相関を示すグラフである。 On the other hand, when an air flow in the reverse flow direction is generated in the sub-bypass channel 6, a temperature distribution that is shifted toward the upstream side (the left side in the drawing) of the heating resistor 10 is generated, so that the upstream side of the detected temperature of the downstream temperature resistor 12. The detected temperature of the temperature resistor 11 is higher.
As a result, a temperature difference DTh occurs between the detected temperature of the upstream temperature resistor 11 and the detected temperature of the downstream temperature resistor 12, so that the upstream temperature resistor 11 and the downstream side correspond to this temperature difference DTh. The resistance value of the temperature resistor 12 changes, and the potential difference caused by the change of the resistance value is amplified and output to the ECU as a sensor signal (for example, analog voltage). The sensor signal can also be output by converting an analog voltage into a frequency value. FIG. 4 is a graph showing the correlation between the temperature difference DTh between the detected temperature of the upstream temperature resistor 11 and the detected temperature of the downstream temperature resistor 12, and the flow rate and flow direction of air.

次に、本発明に係る逆流抑制板７について説明する。
サブバイパス流路６の入口６ａが形成される部分より下流側のバイパス流路５をバイパス出口側流路と呼ぶ時に、このバイパス出口側流路には、バイパス出口側流路を逆流してサブバイパス流路６へ流れ込む空気の流れを抑制する逆流抑制板７が配置されている。この逆流抑制板７は、図５に示す様に、Ｙ−Ｙ方向と直交する平面（Ｙ−Ｙ方向と直交し、且つ、バイパス流路５を流れる空気の流れ方向に沿った平面）と平行に配置されると共に、バイパス出口側流路のＹ−Ｙ方向の略中心またはＹ−Ｙ方向の中心より一方側（バイパス出口上部と呼ぶ）に寄って配置されている。
また、バイパス流路５を流れる空気の流れ方向に沿った逆流抑制板７の長さは、バイパス出口側流路の長さと略同じである。つまり、逆流抑制板７の上流端は、バイパス流路５を流れる空気の流れ方向において、サブバイパス流路６の下流側の入口端部Ｂ点と略同じ位置であり、逆流抑制板７の下流端は、バイパス流路５の出口開口面と略同じ位置である。但し、逆流抑制板７の下流端は、バイパス流路５の出口開口面より外側へ突き出ていても良い。 Next, the backflow suppression plate 7 according to the present invention will be described.
When the bypass flow path 5 on the downstream side of the portion where the inlet 6a of the sub bypass flow path 6 is formed is called a bypass outlet side flow path, the bypass outlet side flow path is reversely flown to the bypass outlet side flow path. A backflow suppression plate 7 that suppresses the flow of air flowing into the bypass flow path 6 is disposed. As shown in FIG. 5, the backflow suppression plate 7 is parallel to a plane orthogonal to the YY direction (a plane orthogonal to the YY direction and along the flow direction of air flowing through the bypass flow path 5). And arranged closer to one side (referred to as the upper part of the bypass outlet) than the center in the YY direction or the center in the YY direction of the flow path on the bypass outlet side.
Further, the length of the backflow suppressing plate 7 along the flow direction of the air flowing through the bypass flow path 5 is substantially the same as the length of the bypass outlet side flow path. In other words, the upstream end of the backflow suppression plate 7 is substantially in the same position as the inlet end B point on the downstream side of the sub bypass flow path 6 in the flow direction of the air flowing through the bypass flow path 5. The end is substantially the same position as the outlet opening surface of the bypass channel 5. However, the downstream end of the backflow suppression plate 7 may protrude outward from the outlet opening surface of the bypass flow path 5.

（実施例１の作用および効果）
本実施例のエアフロメータ１は、バイパス出口側流路に配置した逆流抑制板７により、バイパス出口上部へ向かう空気の流れ（図５において逆流抑制板７の上側を流れる空気）が、逆流抑制板７がない場合と比較して抑制され、バイパス出口上部の流路壁面に直接衝突する空気量を低減できる。これにより、バイパス出口上部の圧力上昇を抑えることができるので、バイパス流路５の出口５ｂから排出されない空気が少なくなり、バイパス出口側流路を逆流してサブバイパス流路６へ流れ込む空気の流れ（図９において矢印ｂで示す流れに相当する）を低減できる。その結果、バイパス流路５の上流側からサブバイパス流路６へ取り込まれる空気（順流）（図９中矢印ａで示す流れに相当する）と、バイパス出口上部からサブバイパス流路６へ流れ込む空気（逆流）（図９中矢印ｂで示す流れに相当する）との衝突による乱れを低減できるので、センサ部４の検出精度が安定する。 (Operation and Effect of Example 1)
In the air flow meter 1 of the present embodiment, the air flow toward the upper part of the bypass outlet ( air flowing above the backflow suppression plate 7 in FIG. 5) is caused by the backflow suppression plate 7 arranged in the bypass outlet side flow path . As compared with the case where there is no 7, the amount of air that directly collides with the channel wall surface above the bypass outlet can be reduced. As a result, an increase in pressure at the upper part of the bypass outlet can be suppressed, so that the amount of air that is not discharged from the outlet 5b of the bypass flow path 5 decreases, and the flow of air that flows back into the sub bypass flow path 6 through the bypass outlet side flow path (Corresponding to the flow indicated by the arrow b in FIG. 9) can be reduced. As a result, air (forward flow) taken into the sub-bypass channel 6 from the upstream side of the bypass channel 5 (corresponding to the flow indicated by arrow a in FIG. 9) and air flowing into the sub-bypass channel 6 from the upper part of the bypass outlet Since the disturbance due to the collision with (reverse flow) (corresponding to the flow indicated by the arrow b in FIG. 9) can be reduced, the detection accuracy of the sensor unit 4 is stabilized.

また、バイパス流路５に対するサブバイパス流路６の入口開口面が、バイパス流路５の出口側に傾いて形成されている。つまり、図１に示した様に、バイパス流路５の中心線Ｏ−ＯからＡ点までの距離よりＢ点までの距離の方が大きく設定されている。この構成によれば、空気と共にバイパス流路５に取り込まれたダストは、慣性の作用により、そのままバイパス流路５を通り抜けようとするため、Ｂ点を起点として形成されるサブバイパス流路６の壁面にダストが衝突する確率は小さくなる。その結果、バイパス流路５からサブバイパス流路６に流れ込むダストをより少なくできるので、サブバイパス流路６に配置されるセンサチップ１３にダストが衝突することを低減でき、基板上の薄膜抵抗体（発熱抵抗体１０、上流側温抵抗体１１、下流側温抵抗体１２等）がダメージを受けることを回避できる。   Further, the inlet opening surface of the sub-bypass channel 6 with respect to the bypass channel 5 is formed to be inclined toward the outlet side of the bypass channel 5. That is, as shown in FIG. 1, the distance from the center line OO of the bypass flow path 5 to the point A is set to be larger than the distance from the point B to the point A. According to this configuration, the dust taken into the bypass flow path 5 together with the air tends to pass through the bypass flow path 5 as it is due to the inertial action, so that the sub bypass flow path 6 formed starting from the point B is used. The probability of dust colliding with the wall surface is reduced. As a result, since dust flowing into the sub-bypass channel 6 from the bypass channel 5 can be reduced, it is possible to reduce dust from colliding with the sensor chip 13 disposed in the sub-bypass channel 6, and the thin film resistor on the substrate It is possible to avoid damage to the heating resistor 10, the upstream temperature resistor 11, the downstream temperature resistor 12, and the like.

この実施例２は、サブバイパス流路６の入口６ａに整流板１４を配置した一例である。 なお、流路形成ボディ３ｃに形成される流路構成（バイパス流路５とサブバイパス流路６の構成）およびセンサ部４の構成は実施例１と同じである。
整流板１４は、図６に示す様に、サブバイパス流路６の入口開口面（実施例１に記載したＡ点とＢ点との間に形成される開口面）よりサブバイパス流路６の内部に入り込んで配置され、且つ、Ａ点を起点として形成されるサブバイパス流路６の壁面をＡ点側壁面６ｃ、Ｂ点を起点として形成されるサブバイパス流路６の壁面をＢ点側壁面６ｄと呼ぶ時に、Ａ点側壁面６ｃとＢ点側壁面６ｄとの中間位置よりＢ点側壁面６ｄに寄った位置に配置されている。 The second embodiment is an example in which a rectifying plate 14 is disposed at the inlet 6 a of the sub bypass channel 6. The flow path configuration (the configuration of the bypass flow path 5 and the sub bypass flow path 6) formed in the flow path forming body 3c and the configuration of the sensor unit 4 are the same as those in the first embodiment.
As shown in FIG. 6, the rectifying plate 14 is formed from the inlet opening surface (the opening surface formed between the points A and B described in the first embodiment) of the sub bypass channel 6. The wall surface of the sub-bypass channel 6 formed from the point A is the side wall surface 6c of the sub-bypass channel 6 that is disposed inside and is formed with the point A as the starting point, and the wall surface of the sub-bypass channel 6 that is formed with the point B as the starting point. When referred to as a wall surface 6d, it is disposed at a position closer to the B-point side wall surface 6d than an intermediate position between the A-point side wall surface 6c and the B-point side wall surface 6d.

上記の構成によれば、バイパス出口上部の流路壁面に衝突した空気の一部がサブバイパス流路６へ逆流しても、サブバイパス流路６の入口６ａに配置した整流板１４によって逆流の向きと順流の向きとを整流できる。つまり、整流板１４によって、サブバイパス流路６の入口６ａに順流の通り道と逆流の通り道とを形成できる。これにより、整流板１４が配置されている部分を通り過ぎた後、順流と逆流とをスムーズに合流させることができるので、順流と逆流との衝突による乱れを低減でき、センサ部４の検出精度が安定する。
また、整流板１４は、Ａ点側壁面６ｃとＢ点側壁面６ｄとの中間位置よりＢ点側壁面６ｄに寄った位置に配置することで、整流板１４によって形成される逆流の通り道より順流の通り道を広く形成できるため、多くの順流をサブバイパス流路６に取り入れることができる。 According to the above configuration, even if a part of the air colliding with the flow path wall surface above the bypass outlet flows backward to the sub bypass flow path 6, the flow is reversed by the rectifying plate 14 disposed at the inlet 6 a of the sub bypass flow path 6. The direction and the direction of the forward flow can be rectified. That is, the rectifying plate 14 can form a forward flow path and a reverse flow path at the inlet 6 a of the sub bypass flow path 6. Thereby, after passing the portion where the rectifying plate 14 is disposed, the forward flow and the reverse flow can be smoothly merged, so that the disturbance due to the collision between the forward flow and the reverse flow can be reduced, and the detection accuracy of the sensor unit 4 is improved. Stabilize.
Further, the rectifying plate 14 is arranged at a position closer to the B-point side wall surface 6d than an intermediate position between the A-point side wall surface 6c and the B-point side wall surface 6d, so that it flows forward from the reverse flow path formed by the rectifying plate 14. Since a wide passage can be formed, a lot of forward flows can be taken into the sub-bypass channel 6.

この実施例３に示すエアフロメータ１は、図７に示す様に、サブバイパス流路６の入口端部Ｂ点が、サブバイパス流路６のＡ点側壁面６ｃに向かって突き出た位置に設けられ、且つ、Ａ点側壁面６ｃとＢ点側壁面６ｄとの間隔が、Ｂ点からサブバイパス流路６の内部へ入り込んだ直後に大きく形成されていることを特徴とする。なお、バイパス流路５の中心線Ｏ−Ｏ（図１参照）からＡ点までの距離よりＢ点までの距離の方が大きく設定されることは、実施例１および２と同じである。   As shown in FIG. 7, the air flow meter 1 shown in the third embodiment is provided at a position where the inlet end B point of the sub bypass flow path 6 protrudes toward the side wall surface 6 c of the sub bypass flow path 6. In addition, the distance between the point A side wall surface 6c and the point B side wall surface 6d is large immediately after entering the inside of the sub-bypass channel 6 from the point B. The distance from the center line OO (see FIG. 1) of the bypass flow path 5 to the point A is set to be larger than the distance from the point B as in the first and second embodiments.

上記の構成によれば、Ａ点側壁面６ｃとＢ点側壁面６ｄとの間隔が一定の場合（つまり、Ｂ点がＡ点側壁面６ｃに向かって突き出ていない場合）と比較した時に、シミュレーションによる検証の結果、サブバイパス流路６へ逆流する空気の量を低減できることが分かった。
また、Ａ点側壁面６ｃとＢ点側壁面６ｄとの間隔が、Ｂ点からサブバイパス流路６の内部へ入り込んだ直後に大きく形成されることにより、図示矢印ｃで示す様に、サブバイパス流路６へ逆流した空気がＢ点側壁面６ｄに沿って流れることが確認された。これにより、バイパス流路５の入口側からサブバイパス流路６へ流れ込む順流と、バイパス流路５の出口側からサブバイパス流路６へ流れ込む逆流との衝突が抑制されるので、サブバイパス流路６を流れる空気の乱れを低減でき、センサ部４の検出精度が安定する。 According to said structure, when compared with the case where the space | interval of the A point side wall surface 6c and the B point side wall surface 6d is constant (that is, when B point does not protrude toward the A point side wall surface 6c), it is a simulation. As a result of verification, it has been found that the amount of air flowing back to the sub-bypass channel 6 can be reduced.
Further, the distance between the point A side wall surface 6c and the point B side wall surface 6d is formed to be large immediately after entering the inside of the sub bypass flow path 6 from the point B, and as shown by the arrow c in the drawing, It was confirmed that the air flowing backward to the flow path 6 flows along the B-point side wall surface 6d. Thereby, the collision between the forward flow flowing into the sub bypass flow channel 6 from the inlet side of the bypass flow channel 5 and the reverse flow flowing into the sub bypass flow channel 6 from the outlet side of the bypass flow channel 5 is suppressed. The turbulence of the air flowing through 6 can be reduced, and the detection accuracy of the sensor unit 4 is stabilized.

この実施例４に示すエアフロメータ１は、バイパス出口側流路を形成する流路形成ボディ３ｃの壁面に空気排出孔１５を形成した一例である。
空気排出孔１５は、図８に示す様に、バイパス出口側流路のＹ−Ｙ方向の一方側（バイパス出口上部）の流路壁面に形成され、図示矢印で示す様に、バイパス出口上部に向かって流れる空気の一部を、空気排出孔１５から流路形成ボディ３ｃの外部へ排出できる。これにより、バイパス出口上部の圧力上昇を抑えることができるので、バイパス出口側流路を逆流してサブバイパス流路６へ流れ込む空気の流れを低減できる。その結果、バイパス流路５の上流側からサブバイパス流路６へ取り込まれる空気（順流）と、バイパス出口上部からサブバイパス流路６へ流れ込む空気（逆流）との衝突による乱れを低減できるので、センサ部４の検出精度が安定する。 The air flow meter 1 shown in the fourth embodiment is an example in which the air discharge hole 15 is formed on the wall surface of the flow path forming body 3c that forms the bypass outlet side flow path.
As shown in FIG. 8, the air discharge hole 15 is formed in the flow passage wall surface on one side in the YY direction of the bypass outlet side flow passage (the upper portion of the bypass outlet). Part of the air flowing toward the outside can be discharged from the air discharge hole 15 to the outside of the flow path forming body 3c. Thereby, since the pressure rise of the bypass outlet upper part can be suppressed, the flow of the air which flows back into the sub bypass flow path 6 through the bypass outlet side flow path can be reduced. As a result, it is possible to reduce turbulence due to collision between the air taken into the sub-bypass channel 6 from the upstream side of the bypass channel 5 (forward flow) and the air flowing into the sub-bypass channel 6 from the upper part of the bypass outlet (back flow). The detection accuracy of the sensor unit 4 is stabilized.

１ エアフロメータ（空気流量測定装置）
２ 吸気ダクト（ダクト）
４ センサ部
５ バイパス流路
６ サブバイパス流路
７ 逆流抑制板
８ センサ基板（基板）
９ ダイヤフラム
１０ 発熱抵抗体（薄膜抵抗体）
１１ 上流側温抵抗体（薄膜抵抗体）
１２ 下流側温抵抗体（薄膜抵抗体）
１３ センサチップ
１４ 整流板
１５ 空気排出孔 1 Air flow meter (air flow measuring device)
2 Air intake duct (duct)
4 Sensor part 5 Bypass flow path 6 Sub-bypass flow path 7 Backflow suppression plate 8 Sensor substrate (substrate)
9 Diaphragm 10 Heating resistor (thin film resistor)
11 Upstream temperature resistor (thin film resistor)
12 Downstream temperature resistor (thin film resistor)
13 Sensor chip 14 Current plate 15 Air exhaust hole

Claims (1)

ダクトの内部を流れる空気の一部を取り込むバイパス流路と、
このバイパス流路から分岐して形成され、前記バイパス流路を流れる空気の一部を取り込むサブバイパス流路と、
このサブバイパス流路に配置される流量測定用のセンサチップを有するセンサ部と、
このセンサ部より出力されるセンサ情報を基に、前記サブバイパス流路を流れる空気の流量を測定する空気流量測定装置であって、
前記バイパス流路を流れる空気の流れ方向と直交する所定の方向をＹ−Ｙ方向と呼ぶ時に、前記バイパス流路に対するＹ−Ｙ方向の一方側に、前記バイパス流路から分岐する前記サブバイパス流路の入口が形成され、
前記サブバイパス流路の入口が形成される部分より下流側の前記バイパス流路をバイパス出口側流路と呼ぶ時に、このバイパス出口側流路には、前記バイパス出口側流路を逆流して前記サブバイパス流路へ流れ込む空気の流れを抑制する逆流抑制板が配置され、
少なくとも、前記逆流抑制板は、前記Ｙ−Ｙ方向と直交する平面と平行に配置されると共に、前記バイパス出口側流路のＹ−Ｙ方向の略中心またはＹ−Ｙ方向の中心より一方側に寄って配置されており、且つ、
前記バイパス流路に対する前記サブバイパス流路の上流側の入口端部をＡ点、下流側の入口端部をＢ点と呼ぶ時に、前記バイパス流路の中心から前記Ａ点までの距離より前記Ｂ点までの距離の方が大きく設定されていることを特徴とする空気流量測定装置。 A bypass flow path for taking in part of the air flowing inside the duct;
A sub-bypass channel that is formed by branching from the bypass channel and takes in a part of the air flowing through the bypass channel;
A sensor unit having a sensor chip for flow rate measurement disposed in the sub-bypass channel;
Based on the sensor information output from the sensor unit, an air flow rate measuring device that measures the flow rate of air flowing through the sub-bypass channel,
When the predetermined direction orthogonal to the flow direction of the air flowing through the bypass flow path is referred to as a YY direction, the sub-bypass flow branches from the bypass flow path to one side in the YY direction with respect to the bypass flow path. A road entrance is formed,
When the bypass channel downstream of the portion where the inlet of the sub-bypass channel is formed is called a bypass outlet-side channel , the bypass outlet-side channel flows back into the bypass outlet-side channel. A backflow suppression plate that suppresses the flow of air flowing into the sub-bypass channel is arranged ,
At least the backflow suppression plate is disposed in parallel with a plane orthogonal to the YY direction, and is on the one side of the center in the YY direction or the center in the YY direction of the bypass outlet side flow path. It is arranged close to
When the inlet end on the upstream side of the sub bypass channel with respect to the bypass channel is referred to as point A and the inlet end on the downstream side is referred to as point B, the distance B from the center of the bypass channel to the point A An air flow rate measuring apparatus characterized in that the distance to the point is set larger .
JP2009111890A 2009-05-01 2009-05-01 Air flow measurement device Active JP5168223B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009111890A JP5168223B2 (en) 2009-05-01 2009-05-01 Air flow measurement device
DE102010028388.6A DE102010028388B4 (en) 2009-05-01 2010-04-29 air flow measuring device
DE102010064698.9A DE102010064698B3 (en) 2009-05-01 2010-04-29 Air flow measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009111890A JP5168223B2 (en) 2009-05-01 2009-05-01 Air flow measurement device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012245218A Division JP5454655B2 (en) 2012-11-07 2012-11-07 Air flow measurement device

Publications (2)

Publication Number Publication Date
JP2010261771A JP2010261771A (en) 2010-11-18
JP5168223B2 true JP5168223B2 (en) 2013-03-21

Family

ID=42813895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009111890A Active JP5168223B2 (en) 2009-05-01 2009-05-01 Air flow measurement device

Country Status (2)

Country Link
JP (1) JP5168223B2 (en)
DE (2) DE102010028388B4 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015068759A (en) * 2013-09-30 2015-04-13 日立オートモティブシステムズ株式会社 Thermal flowmeter
WO2018142797A1 (en) * 2017-02-06 2018-08-09 三菱電機株式会社 Flow rate measuring device

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013024710A (en) 2011-07-20 2013-02-04 Denso Corp Air flow measurement device
JP5541298B2 (en) * 2012-01-26 2014-07-09 株式会社デンソー Air flow measurement device
JP5601417B2 (en) * 2013-11-29 2014-10-08 株式会社デンソー Manufacturing method of air flow measuring device
DE102014218591A1 (en) * 2014-09-16 2016-03-17 Robert Bosch Gmbh Sensor arrangement for determining at least one parameter of a flowing through a channel structure fluid medium
CN108139246B (en) 2015-09-30 2020-06-05 日立汽车系统株式会社 Physical quantity detecting device
JP7068103B2 (en) * 2018-08-24 2022-05-16 株式会社Soken Flow measuring device
JP2020046292A (en) * 2018-09-19 2020-03-26 株式会社Ｓｏｋｅｎ Flowrate measuring device

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5749846B2 (en) * 1974-05-14 1982-10-25
JPS58132618A (en) * 1982-02-03 1983-08-08 Hitachi Ltd Device for detecting flow rate of intake air for internal combustion engine
JPS6363937A (en) * 1986-09-04 1988-03-22 Ngk Insulators Ltd Industrial gas measuring apparatus
JPH04344424A (en) * 1991-05-21 1992-12-01 Hitachi Ltd Hot wire type air flow meter
DE19815654A1 (en) 1998-04-08 1999-10-14 Bosch Gmbh Robert Measuring device for measuring the mass of a medium flowing in a line
JP3681627B2 (en) * 1999-10-06 2005-08-10 日本特殊陶業株式会社 Flow rate and flow rate measuring device
KR20010039993A (en) * 1999-10-06 2001-05-15 오카무라 가네오 Flow Rate and Flow Velocity Measurement Device
JP4811695B2 (en) 2000-05-30 2011-11-09 株式会社デンソー Flow measuring device
DE10042400A1 (en) 2000-08-30 2002-03-14 Bosch Gmbh Robert Device for determining at least one parameter of a flowing medium
JP2003315116A (en) * 2002-04-18 2003-11-06 Denso Corp Flow measuring device
DE10245965B4 (en) 2002-09-30 2021-06-02 Robert Bosch Gmbh Device for determining at least one parameter of a medium flowing in a line
JP4089654B2 (en) 2004-04-28 2008-05-28 株式会社デンソー Air flow measurement device
JP4161077B2 (en) * 2005-09-29 2008-10-08 三菱電機株式会社 Flow measuring device
JP4488030B2 (en) 2007-06-14 2010-06-23 株式会社デンソー Air flow measurement device
JP4488031B2 (en) 2007-06-14 2010-06-23 株式会社デンソー Air flow measurement device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015068759A (en) * 2013-09-30 2015-04-13 日立オートモティブシステムズ株式会社 Thermal flowmeter
WO2018142797A1 (en) * 2017-02-06 2018-08-09 三菱電機株式会社 Flow rate measuring device

Also Published As

Publication number Publication date
DE102010028388B4 (en) 2023-01-12
JP2010261771A (en) 2010-11-18
DE102010064698B3 (en) 2020-01-30
DE102010028388A1 (en) 2010-11-04

Similar Documents

Publication Publication Date Title
JP5168223B2 (en) Air flow measurement device
JP5178388B2 (en) Air flow measurement device
JP4412357B2 (en) Air flow measurement device
JP5183164B2 (en) Flow measuring device
US7043978B2 (en) Airflow meter
JP5338864B2 (en) Air flow measurement device
JP2008309623A (en) Air flow rate measuring device
JP4488030B2 (en) Air flow measurement device
JP2002005712A (en) Air flow measuring device
JP2007309909A (en) Flow-measuring device
JP4170900B2 (en) Gas flow measuring device
JP5826360B1 (en) Flow measuring device
JP5464294B2 (en) Air flow measurement device
JP6477195B2 (en) Flow measuring device
JP6208251B2 (en) Physical quantity measuring device
JP3848934B2 (en) Air flow measurement device
JP6365388B2 (en) Flow measuring device
JP6069504B2 (en) Temperature / humidity sensor
JP2005128038A (en) Air flow rate measuring device
JP5454655B2 (en) Air flow measurement device
JP2018072004A (en) Flow rate measurement device
JP4752472B2 (en) Air flow measurement device
JP5477446B2 (en) Air flow measurement device
JP2007183212A (en) Heat resistor type fluid flow rate measuring device
US20160377470A1 (en) Air flow rate measurement device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100929

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120904

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120911

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121107

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20121127

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20121210

R151 Written notification of patent or utility model registration

Ref document number: 5168223

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160111

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250