JP5167092B2 - Component extraction system - Google Patents

Description

  The present invention relates to a component extraction system that extracts a predetermined component from an object contained in an airtight container using either a supercritical fluid or a subcritical fluid.

A main channel through which supercritical carbon dioxide cleaning fluid circulates, a sub-channel through which carbon dioxide cleaning fluid circulates, one cleaning container connected to these channels and into which carbon dioxide cleaning fluid flows, and a main channel There is a cleaning system formed by one booster pump, one circulation pump installed in the sub-flow channel, and a filtration filter installed in the sub-flow channel extending downstream of the cleaning container (patent) Reference 1). The booster pump boosts the carbon dioxide flowing into the cleaning container to a predetermined pressure. The circulation pump circulates the cleaning fluid to the sub-flow path while maintaining a constant pressure of the carbon dioxide cleaning fluid flowing inside the cleaning container during the cleaning of the object to be cleaned. The filtration filter filters impurities contained in the cleaning fluid. Since this cleaning system cleans the object to be cleaned contained in the cleaning container while circulating the supercritical carbon dioxide cleaning fluid through the sub-channel, the cleaning time of the object to be cleaned can be shortened. In addition, by installing the filter in the sub-channel, fine impurities contained in the cleaning fluid can be removed, and the cleaning fluid can be kept clean.
JP-A-8-206485

  In the cleaning system disclosed in the publication, a supercritical carbon dioxide cleaning fluid flows into one cleaning container using one booster pump, and the cleaning is performed in one cleaning container using one circulation pump. When a plurality of cleaning containers are installed, if the cleaning cycle of two cleaning containers (pressure increase / cleaning / depressurization) is performed with one pressure pump, the time required for one cleaning cycle Doubled. As an example, FIG. 13 shows the change in pressure of the cleaning fluid in a time series when cleaning is performed with one booster pump and one cleaning container, and cleaning is performed with one booster pump and two cleaning containers. The change in the pressure of the cleaning fluid when it is performed will be described below with reference to FIG.

  When one cleaning container is operated for cleaning using a single booster pump, as shown in FIG. 13, for example, the pressure of the cleaning fluid flowing into the cleaning container is changed from 0 MPa to 20 MPa in 30 minutes (pressure increase time). After 30 minutes have passed and the pressurization of the cleaning fluid is completed, the cleaning fluid is allowed to flow through the first cleaning container for 1 hour (cleaning time) while maintaining the pressure. Next, the pressure of the cleaning fluid is returned to atmospheric pressure during one hour (depressurization time). When such a cleaning cycle is performed using one booster pump and one cleaning container, three cleaning cycles can be repeated in 7 hours and 30 minutes. However, when two cleaning containers are cleaned in parallel using a single booster pump, as shown in FIG. 14, the pressurizing time and the cleaning time are doubled as compared with those in FIG. Only four cleaning cycles can be repeated in time, and the cleaning cycle cannot be efficiently repeated within a predetermined time. On the other hand, in order to make the time required for pressurization and cleaning the same as in the case of one cleaning container, if a plurality of booster pumps corresponding to each cleaning container are installed, the installation cost and operating cost of these booster pumps increase, As a result, the operating cost of the cleaning system increases.

  An object of the present invention is to enable a component extraction cycle (pressure increase / extraction / depressurization) of a plurality of hermetic containers to be performed in a short time by using one pressure increase pump, and the component extraction cycle is efficiently repeated within a predetermined time. An object of the present invention is to provide a component extraction system. Another object of the present invention is to make it possible to perform a component extraction cycle of a plurality of hermetic containers in a short time using a single booster pump and a single circulation pump, and to efficiently perform the component extraction cycle within a predetermined time. It is to provide a component extraction system that can be repeated well.

  The premise of the present invention for solving the above-mentioned problems is that the fluid is introduced into an airtight container into which either a supercritical fluid or a subcritical fluid flows, and an object to be contained in the airtight container using the fluid. It is a component extraction system which extracts the component contained in.

The feature of the present invention in the premise is that the component extraction system is installed in a plurality of the airtight containers, a flow path through which the fluid circulates connected to the airtight containers, and a flow path on the upstream side of the airtight containers. One booster pump that boosts the fluid flowing into the container, a switching valve that is installed in the flow path to switch the flow path of the fluid into the hermetic container, and is installed in the flow path between the hermetic container and the booster pump. A gas-liquid separation device that separates components contained in the fluid from the fluid, and a control device. The control device uses one of the switching valves to circulate the fluid circulating in the flow path through one of the pressure boosting pumps. The first pressure increasing means for increasing the fluid flowing into the container and flowing into one of the hermetic containers using the pressure increasing pump to a predetermined pressure during the first pressure increasing time, and the first pressure increasing means after executing the first pressure increasing means. After the pressurization time has elapsed, the switching valve By using the supercritical or subcritical fluid after the pressurization while releasing the load of the pressurization pump on one of the hermetic containers by using the contained material contained in one of the hermetic containers during the first cleaning time A first extraction means for extracting a predetermined component; and after the first cleaning time has elapsed since the execution of the first extraction means, the pressure of the fluid in one of the airtight containers is reduced to atmospheric pressure during the first pressure reduction time. When the first decompression means and the first extraction means are executed, the fluid circulating through the flow path using the switching valve is circulated to the other airtight container via the booster pump, and the other airtight container is utilized using the booster pump. And a second booster that boosts the fluid flowing into the fluid to a predetermined pressure during the second booster time, and after the second booster time has elapsed since the second booster was executed and during the execution of the first extractor. , Use the switching valve to reduce the load of the boost pump on the other airtight container A second extraction means for extracting a predetermined component from an object accommodated in the other airtight container during the second cleaning time using a supercritical or subcritical fluid after pressure increase, (2) a second decompression means for starting decompression to make the pressure of the fluid in the other hermetic container atmospheric pressure after the second cleaning time has elapsed since the execution of the extraction means and during the execution of the first decompression means; The first pressure-increasing means uses a switching valve to circulate the fluid circulating in the flow path during the pressure reduction by the second pressure-reducing means through one pressure- tight container while using the pressure-boosting pump, The purpose is to pressurize the fluid flowing into one of the airtight containers to a predetermined pressure during the first pressurization time.

As an example of the present invention, the component extraction system, the length of the first step-up time and the length of the second boosting time are the same, the length of the first washing time and the length of the second cleaning time same with it, the length of the first pressure reduction time and the length of the second decompression time are the same.

  As another example of the present invention, the component extraction system includes a pressure control valve that is installed in the flow path and can adjust the pressure of the fluid, and the first extraction unit performs a predetermined time after executing the first pressure increase unit. After the elapse of time, the pressure control valve is used to reduce the pressure of the fluid to a predetermined pressure during the first depressurization time during extraction, and after the first depressurization time elapses during the extraction and after the pressure of the fluid is depressurized, the pressure control valve The pressure of the fluid is increased again during the first pressure increase time at the time of extraction using the pressure increase pump, and the second extraction means uses the pressure control valve after a predetermined time elapses after the second pressure increase means is executed. The pressure of the fluid is reduced to a predetermined pressure during the second decompression time at the time of extraction, and after the second decompression time at the time of extraction and after the pressure of the fluid is reduced, the pressure control valve and the booster pump are used. The pressure of the fluid is increased again during the second pressure increase time during extraction.

As another example of the present invention, when the component extraction system, the length of the first pressure reducing time during extraction and the length extraction during the second decompression time is the same, the length of the first boosting time when extraction Extraction The length of the second boosting time is the same.

  As another example of the present invention, in the component extraction system, the component extraction cycle of the first booster means → the first extractor → the first decompressor means and the second booster → the second extractor → the component extraction cycle of the second decompressor means. Repeat several times. As another example of the present invention, the object to be stored is the object to be cleaned, and the component contained in the object is an impurity.

  According to the component extraction system of the present invention, the pressure of the booster pump with respect to one hermetic container is increased after a predetermined time has elapsed since the pressure of the fluid flowing into one of the hermetic containers is increased to a predetermined pressure using one booster pump. Release the load, and at the same time, use the booster pump to boost the fluid flowing into the other hermetic container to a predetermined pressure, and further depressurize the fluid flowing into the other hermetic container to atmospheric pressure Since the fluid flowing into one of the hermetic containers is boosted to a predetermined pressure using a pump, after the pressurization by the booster pump of the fluid flowing into one of the hermetic containers is finished, the booster pump flows into the other hermetic container The pressure boosting pump can be used for boosting the fluid flowing into one airtight container while decompressing the fluid flowing into the other airtight container. The component extraction system does not double the time required for one component extraction cycle (pressurization, extraction, decompression) of multiple airtight containers with a single booster pump, and uses the time difference. Thus, the component extraction cycle for a plurality of hermetic containers can be performed in a short time with a single booster pump, and the component extraction cycle can be efficiently repeated within a predetermined time. This component extraction system can extract components contained in the objects contained in a plurality of hermetic containers in a short time even if there is only one booster pump.

  The component extraction system performs pressure reduction and pressure increase of the fluid flowing into one of the airtight containers in the first extraction means using a pressure control valve and a pressure booster pump, and the fluid flowing into the other airtight container in the second extraction means. Since pressure reduction and pressure increase are performed using a pressure control valve and pressure pump, even if the fluid pressure when extracting these components differs depending on the type of component, the fluid pressure can be changed by changing the fluid pressure during component extraction. This pressure can be made to correspond to the extraction pressure of various components, and even if various components are contained in the object to be contained, those components can be reliably extracted from the object to be contained.

  In the component extraction system, the object to be cleaned is the object to be cleaned, the component included in the object is an impurity, and the impurities included in the object to be cleaned contained in a plurality of hermetic containers are removed from the object to be cleaned. Therefore, a plurality of objects to be cleaned can be cleaned in a short time, and the cleaning efficiency for the objects to be cleaned can be greatly improved.

  The details of the component extraction system according to the present invention will be described with reference to the accompanying drawings, taking filter cleaning as an example. FIG. 1 is a configuration diagram of a component extraction system 10A shown as an example. This component extraction system 10A is used to clean a used air filter (contained object) (contained object) after filtering a gas or a used liquid filter (contained object) (contained object) after filtering a liquid. It is suitably used for cleaning of the product. For cleaning these filters, either a supercritical or subcritical cleaning fluid (fluid) is used.

  The objects to be cleaned by the system 10A include not only filters but also all objects to be cleaned that can be cleaned by supercritical and subcritical cleaning fluids. Further, the system 10A can be used not only for cleaning the filter but also for extracting a predetermined component from an object to be stored, for example, extracting caffeine (component) from coffee beans. There is no particular limitation on an object (contained object) from which a component is extracted in the system 10A, and all objects that can be extracted by a supercritical or subcritical fluid are included.

  The component extraction system 10A includes a condenser 11 that liquefies carbon dioxide, a vacuum-insulated storage tank 12 that stores the liquefied carbon dioxide, and a single booster that can pressurize carbon dioxide supplied from the tank 12 to a predetermined pressure. Pump 13, heater 14 that can heat carbon dioxide to a predetermined temperature, two first and second cleaning containers 15 and 16 (a plurality of airtight containers) that house and clean the filter, and cooler 17 that can cool the cleaning fluid , A gas-liquid separation device 18 capable of separating impurities (dirt components) contained in the cleaning fluid from the cleaning fluid, and a controller 19 (control device) for controlling each device.

  The condenser 11, the tank 12, the booster pump 13, the heater 14, the cleaning containers 15 and 16, the cooler 17, and the gas-liquid separator 18 are connected to each other via a pipe line 20 (flow path). As shown in FIG. 1, the connection order of these devices is: condenser 11 → tank 12 → pressure pump 13 → heater 14 → first cleaning container 15 → cooler 17 → gas-liquid separator 18; → tank 12 → pressure pump 13 → heater 14 → second cleaning container 16 → cooler 17 → gas-liquid separator 18.

  A first pressure control valve 21 is installed in the pipe line 20 that connects the first cleaning container 15 and the cooler 17. A second pressure control valve 22 is installed in the pipe line 20 connecting the second cleaning container 16 and the cooler 17. The first and second pressure control valves 21 and 22 can adjust the pressure of the cleaning fluid inside the first and second cleaning containers 15 and 16 by changing the opening of the valve mechanism. A third pressure control valve 46 is installed in the pipe line 20 that connects the condenser 11 and the storage tank 12. The third pressure control valve 46 can adjust the pressure and temperature of the cleaning fluid inside the gas-liquid separator 18 by changing the opening of the valve mechanism. In this system 10A, the opening degree of the valve mechanism of the third pressure control valve 46 is always kept constant.

  A switching valve 23 is installed in the pipe line 20 that connects the heater 14 and the first cleaning container 15, and a switching valve 24 is installed in the pipe line 20 that connects the heater 14 and the second cleaning container 16. Has been. A switching valve 25 is installed in the pipe line 20 that connects the first cleaning container 15 and the first pressure control valve 21, and a pipe line 20 that connects the second cleaning container 16 and the second pressure control valve 22 is installed in the pipe line 20. A switching valve 26 is provided. The circulation path of the cleaning fluid can be changed by opening and closing the valve mechanisms of the switching valves 23 to 26.

  Although not shown, the first and second cleaning containers 15 and 16 are each provided with a temperature sensor that measures the internal temperature of the containers, and a pressure sensor that measures the internal pressure of the containers. An airtight structure cleaning chamber (not shown) is formed in the cleaning containers 15 and 16. Although not shown, a flow rate sensor is installed in the pipe line 20.

  The gas-liquid separator 18 separates impurities contained in the cleaning fluid from the cleaning fluid using the difference in vapor pressure of the impurities. The gas-liquid separator 18 has a built-in heater for heating it, and although not shown, a temperature sensor for measuring the internal temperature is attached and a pressure sensor for measuring the internal pressure is attached. ing. A collector 27 is attached to the gas-liquid separator 18. The recovery device 27 collects impurities (liquid) separated by the gas-liquid separation device 18.

  Examples of the air filter to be cleaned include a separator type air filter and a mini-pleat type air filter. The air filter is mainly used as an air conditioning filter, an air cleaning filter, an exhaust treatment filter, or a vehicle air filter. A liquid filter as an object to be cleaned is used as a filter for a water purifier or a filter for a membrane device using osmotic pressure.

  Air filters and liquid filters include pre-filters that remove coarse impurities, medium-performance filters or high-performance filters that remove fine impurities, HEPA filters and ULPA filters that remove extremely fine impurities, A chemical filter that removes chemical substances, a composite filter that combines these filters, and the like are used.

  Air filters and liquid filters are used by being housed in a filter cartridge using glass fibers, adsorbents, and synthetic resin fibers as filter media. These filters have a quadrangular prism-like three-dimensional structure folded into a bellows. In addition to the filter having a three-dimensional structure, the filter washed by this system includes a substantially flat filter, and also includes a columnar or polygonal column. For the adsorbent, activated carbon, zeolite, ceramic porous body, or the like is used.

  Polypropylene, polyester, polyethylene, polyether sulfone, polysulfone, nylon 6, polyphenylene sulfide, and the like are used as the synthetic resin forming the synthetic resin fiber. As a filter medium, only those fibers are overlapped, and adsorbents such as granular activated carbon, granular zeolite, and granular ceramic porous material are supported between the fibers, and those fibers are overlapped, between overlapping fiber aggregates. Also included are those in which an adsorbent such as granular activated carbon, granular zeolite, or porous ceramic porous body is interposed.

  Either supercritical or subcritical cleaning fluids have the properties of gas and liquid, easily enter the fine gaps of the filter media forming the air filter or liquid filter, and dissolve impurities adhering to the filter media surface. At the same time, it penetrates into the filter medium and dissolves the impurities that have penetrated into the filter medium. By using the cleaning fluid, not only can the impurities attached to the surface of the filter medium be removed, but also the impurities that have penetrated into the filter medium can be removed. Further, the cleaning fluid easily enters the inside of the object to be stored, penetrates into the object to be stored, and dissolves the components contained in the object to be stored. The cleaning fluid can be used to extract components contained in the object to be contained.

  The carbon dioxide supplied from the storage tank 12 is pressurized to a pressure of 5.0 to 30.0 MPa by the booster pump 13 and then heated to a temperature of 30 to 120 ° C. by the heater 14 to be supercritical or subcritical. Either of the cleaning fluids. The cleaning fluid is forcibly supplied to the first and second cleaning containers 15 and 16 by the booster pump 13 and flows into the airtight structure cleaning chamber of the cleaning containers 15 and 16 to clean the filter accommodated in the cleaning chamber. The cleaning fluid that has flowed out of the cleaning containers 15, 16 flows into the gas-liquid separator 18 through the pipe line 20, and impurities contained therein are separated by the gas-liquid separator 18. Impurities separated from the cleaning fluid are recovered in the recovery device 27.

  During the filter cleaning operation in the system 10A, the cleaning fluid passes through the pipe line 20, and the first cleaning container 15 → the first pressure control valve 21 → the cooler 17 → the gas-liquid separator 18 → the condenser 11 → the tank 12 → the booster pump. While circulating in the order of 13 → heater 14, second cleaning container 16 → second pressure control valve 22 → cooler 17 → gas-liquid separator 18 → condenser 11 → tank 12 → pressure pump 13 → heater 14 Cycle in order.

  When the cleaning time ends, the cleaning fluid flowing out from the cleaning containers 15 and 16 is decompressed by the first and second pressure control valves 21 and 22 and returns to the non-supercritical or non-subcritical cleaning fluid (carbon dioxide). If necessary, the cleaning fluid flowing out from the cleaning containers 15 and 16 may be cooled by the cooler 17 in addition to the pressure reduction by the control valves 21 and 22. The cleaning fluid flows into the condenser 11, returns to the liquid by the condenser 11, flows into the storage tank 12, and is then supplied again from the tank 12 to the pipeline 20, and becomes a supercritical or subcritical cleaning fluid. And supplied to the first and second cleaning containers 15 and 16.

  The controller 19 is a computer provided with a central processing unit (CPU or MPU) and a memory, and has a built-in large capacity hard disk. The controller 19 is connected to the condenser 11, the tank 12, the booster pump 13, the heater 14, the temperature sensor and pressure sensor of the cleaning containers 15 and 16, the flow rate sensor, the cooler 17, via an interface 28 (wired or wireless). The gas-liquid separator 18, the temperature sensor and pressure sensor of the gas-liquid separator 18, the pressure control valves 21 and 22, and the switching valves 23 to 26 are connected. In the filter cleaning, the controller 19 repeatedly executes a cleaning cycle (pressure increase / cleaning / depressurization) (component extraction cycle (pressure increase / extraction / depressurization)).

  The controller 19 monitors the temperature of the condenser 11, the amount of carbon dioxide supplied from the tank 12, the output of the booster pump 13, the output of the heater 14, the output of the cooler 17, and the opening degree of the pressure control valves 21 and 22. The controller 19 controls the supply amount of carbon dioxide, the temperature and output of these devices, and the opening degree of the control valves 21 and 22 based on the measurement results output from the temperature sensor, the pressure sensor, and the flow rate sensor. Although not shown, the controller 19 is connected to an input device such as an ON / OFF switch and a key unit, and an output device such as a printer and a display via an interface.

  During the cleaning operation of the filter, the controller 19 operates the condenser 11, the tank 12, the booster pump 13, the heater 14, the cleaning containers 15 and 16, the cooler 17, and the pressure control valves 21 and 22 connected thereto in an optimum operating state. (The filter can be cleaned most efficiently). Specifically, the controller 19 sets the devices to preset operating conditions (set supply amount, set output, set opening) so that the filters accommodated in the cleaning containers 15 and 16 can be cleaned in an optimal state. Match.

  When the controller 19 determines that an error has occurred in each operating condition based on the measurement result input from each sensor, the controller 19 performs feedback control to adjust those devices and return the operating condition to that at the time of setting. The controller 19 adjusts the inflow amount of the cleaning fluid into the cleaning containers 15 and 16 and the outflow amount from the cleaning containers 15 and 16 by the booster pump 13, and controls the pressure of the cleaning fluid flowing into the cleaning containers 15 and 16. While adjusting with the valves 21 and 22, the temperature of the cleaning fluid flowing into the cleaning containers 15 and 15 is adjusted with the heater 14.

  The central processing unit of the controller 19 activates the application stored in the memory based on the control by the operating system, and executes the following means according to the activated application. The central processing unit of the controller 19 circulates the cleaning fluid circulating in the pipe line 20 using the switching valves 23 to 26 to the first cleaning container 15 via the booster pump 13, and uses the booster pump 13 to change the first fluid. The first pressure increasing means for increasing the pressure of the cleaning fluid flowing into the cleaning container 15 to a predetermined pressure is executed. The central processing unit uses the switching valves 23 to 26 to release the load of the pressurization pump 13 on the first cleaning container 15 after a predetermined time has elapsed since the execution of the first pressurizing means, and supplies the cleaning fluid after the pressurization. The first extraction means for extracting impurities from the filter accommodated in the first cleaning container 15 is executed. The central processing unit executes first decompression means for decompressing the cleaning fluid in the first cleaning container 15 to atmospheric pressure after a predetermined time has elapsed since the execution of the first extraction means.

  The central processing unit of the controller 19 circulates the cleaning fluid circulating in the pipe line 20 using the switching valves 23 to 26 to the second cleaning container 16 via the booster pump 13 when the first extraction means is executed, Using the pump 13, a second pressure increasing means for increasing the pressure of the cleaning fluid flowing into the second cleaning container 16 to a predetermined pressure is executed. The central processing unit uses the switching valves 23 to 26 to release the load of the booster pump 13 on the second cleaning container 16 after the predetermined time has elapsed since the execution of the second pressurizing unit, and supplies the cleaning fluid after the pressurization. The second extraction means for extracting impurities from the filter accommodated in the second cleaning container 16 is executed. The central processing unit is configured to reduce the cleaning fluid in the second cleaning container 16 toward the atmospheric pressure after the predetermined time has elapsed from the execution of the second extraction unit and during the execution of the first pressure reduction unit. Execute means.

  FIG. 2 is a flowchart showing an example of a cleaning procedure in the system 10A, and FIG. 3 is a diagram showing changes in the pressure of the cleaning fluid in the system 10A in time series. An example of the filter cleaning operation in the system 10A will be described with reference to FIGS. In addition, the used filter which is a to-be-cleaned object is accommodated in the airtight structure cleaning chamber of the cleaning containers 15 and 16. It is assumed that the set number of cleaning cycles is set to 6. The number of repetitions of the cleaning cycle is input to the controller 19 via the input device. The number of repetitions is not particularly limited, and the number of repetitions can be arbitrarily set or changed. Note that the number of repetitions may be an odd number.

  When the system 10A is activated, each device operates. The controller 19 adjusts the opening of the first pressure control valve 21 while adjusting the output of the booster pump 13, and supplies the set amount of liquefied carbon dioxide stored in the tank 12 to the pipe line 20. The controller 19 maintains the output of the booster pump 13 at the set output, holds the opening of the pressure control valve 21 at the set opening, pressurizes carbon dioxide to a predetermined pressure, and sets the output of the heater 14. Maintaining the output, the pressurized carbon dioxide is heated to a predetermined temperature.

  The controller 19 opens the valve mechanisms of the switching valves 23 and 25, closes the valve mechanisms of the switching valves 24 and 26, and causes the cleaning fluid to flow through the first cleaning container 15 (one airtight container) via the booster pump 13. On the other hand, as shown in FIG. 3, the pressure of the cleaning fluid flowing into the first cleaning container 15 is increased from 0 MPa to 20 MPa (predetermined pressure) in 30 minutes (first pressure increase time) using the pressure increase pump 13. (First boosting means) (S-1). In the first pressurizing means, the cleaning fluid is booster pump 13 → heater 14 → first cleaning container 15 → first pressure control valve 21 → cooler 17 → gas-liquid separator 18 → condenser 11 → tank 12 → booster pump 13. The pipe 20 is circulated in this order. There is no particular limitation on the first boosting time, and the first boosting time can be arbitrarily set or changed. Note that the valve mechanisms of the switching valves 23 and 25 are opened simultaneously with the operation of the booster pump 13.

When 30 minutes have elapsed from the execution of the first pressurizing means and the pressurization of the cleaning fluid is completed (after a predetermined time (first pressurization time) has elapsed since the first pressurizing means has been executed), the controller 19 The valve mechanism 23 is closed, and supercritical or subcritical cleaning fluid is sealed in the first cleaning container 15 for 30 minutes. The controller 19 increases the opening degree of the valve mechanism of the first pressure control valve 21 after the pressurization of the cleaning fluid is finished (after a predetermined time (first pressurization time) has elapsed since the execution of the first pressurization unit). The pressure of the cleaning fluid inside the first cleaning container 15 is gradually reduced from 20 MPa to 15 MPa (predetermined pressure) during 30 minutes (first decompression time during extraction). The length of the first decompression time during extraction is not particularly limited, and the length of the first decompression time during extraction can be arbitrarily set or changed.

After the pressure of the cleaning fluid is reduced, the controller 19 opens the valve mechanism of the switching valve 23 and allows the cleaning fluid to flow through the first cleaning container 15 via the booster pump 13 while the valve of the first pressure control valve 21 is opened. The opening degree of the mechanism is reduced, and the pressure of the cleaning fluid inside the cleaning container 15 is gradually increased from 15 MPa to 20 MPa (predetermined pressure) during 30 minutes (first pressure increase time during extraction). The length of the first boosting time during extraction is not particularly limited, and the length of the first boosting time during extraction can be arbitrarily set or changed. The sum of the length of the first decompression time during extraction and the length of the first pressure increase time during extraction is the length of the first cleaning time (first extraction time) , but is particularly limited to the length of the first cleaning time. Rather, the length of the first cleaning time can be arbitrarily set or changed. The controller 19 extracts impurities contained in the filter accommodated in the first cleaning container 15 using the cleaning fluid during the first cleaning time (first extracting means) (S-2).

  In the first extraction means, the pressure of the cleaning fluid is reduced and increased (pressure fluctuation) in the range of 5 MPa, but there is no particular limitation on the pressure fluctuation range, and the pressure fluctuation range depends on the type of impurities contained in the filter. It can be set or changed arbitrarily. In the first extraction means, the cleaning fluid flows through the filter housed in the airtight structure cleaning chamber of the first cleaning container 15 and separates impurities contained therein from the filter. In the gas-liquid separation device 18, impurities contained in the cleaning fluid are separated from the cleaning fluid. Impurities separated from the cleaning fluid are recovered in the recovery device 27. Note that the pressure of the cleaning fluid in the cleaning container 15 is reduced and increased during the first cleaning time (the first decompression time during extraction and the first pressurization time during extraction), but the first cleaning is performed without reducing and increasing the pressure. It is also possible to maintain the pressure of the cleaning fluid at a constant pressure over time.

  The controller 19 adjusts the opening of the second pressure control valve 22 while adjusting the output of the booster pump 13 simultaneously with the first extraction means (after the first pressure increase time has elapsed and when the first extraction means is being executed). The set amount of liquefied carbon dioxide stored in the tank 12 is supplied to the conduit 20. The controller 19 maintains the output of the booster pump 13 at the set output, holds the opening of the control valve 22 at the set opening, pressurizes carbon dioxide to a predetermined pressure, and outputs the output of the heater 14 as the set output. The heated carbon dioxide is heated to a predetermined temperature.

The controller 19 opens the valve mechanisms of the switching valves 24 and 26 at the same time as the first extraction means (in parallel with the first decompression time during extraction in the first cleaning time), and causes the cleaning fluid to pass through the booster pump 13. As shown in FIG. 3, the pressure of the cleaning fluid flowing into the second cleaning container 16 using the booster pump 13 is increased for 30 minutes (second booster) while being circulated through the second cleaning container 16 (the other airtight container). The pressure is raised from 0 MPa to 20 MPa (predetermined pressure) during the time (second pressure raising means) (S-3). At this time, the valve mechanism of the switching valve 23 is in a closed state. In the second pressurizing means, the cleaning fluid is booster pump 13 → heater 14 → second cleaning container 16 → second pressure control valve 22 → cooler 17 → gas-liquid separator 18 → condenser 11 → tank 12 → pressure pump 13 The pipe 20 is circulated in this order. The length of the second boosting time is not particularly limited, but the length of the second boosting time needs to match the length of the first boosting time in the first cleaning container 15 (the length of the first boosting time ). It is to same as the length of the second boost time). Note that the valve mechanisms of the switching valves 24 and 26 are opened simultaneously with the operation of the booster pump 13.

  After one hour has elapsed since the first extraction means was executed (after the first cleaning time has elapsed), the controller 19 closes the valve mechanism of the switching valve 23 and expands the valve opening degree of the valve mechanism of the first pressure control valve 21. Then, the pressure of the cleaning fluid in the first cleaning container 15 is reduced to atmospheric pressure for 1 hour (first pressure reduction time) (first pressure reduction means) (S-4). If necessary in the first decompression means, the cleaning fluid is cooled by the cooler 17 in addition to the decompression by the control valve 21.

In the first pressure reducing means, impurities contained in the cleaning fluid are separated from the cleaning fluid by the gas-liquid separator 18. Impurities separated from the cleaning fluid are recovered in the recovery device 27. The cleaning fluid returns to the liquid by the condenser 11 and flows into the storage tank 12. After the pressure in the first cleaning container 15 returns to atmospheric pressure and the temperature in the cleaning container 15 returns to room temperature, the cleaned filter is removed from the cleaning container 15 and the next used filter is placed in the cleaning container 15. Accommodate and begin cleaning the filter. There is no particular limitation on the length of the first pressure reduction time can be arbitrarily set or change the length of the first decompression time.

When 30 minutes have elapsed from the execution of the second pressurizing means and the pressurization of the cleaning fluid is finished (after a predetermined time (second pressurization time) has elapsed since the execution of the second pressurizing means), the controller 19 The 24 valve mechanism is closed, and the supercritical or subcritical cleaning fluid is sealed in the second cleaning container 16 for 30 minutes. The controller 19 increases the opening of the valve mechanism of the second pressure control valve 22 after the cleaning fluid has finished being pressurized (after a predetermined time (second pressure increasing time) has elapsed since the second pressure increasing means was executed), The pressure of the cleaning fluid inside the second cleaning container 16 is gradually reduced from 20 MPa to 15 MPa (predetermined pressure) during 30 minutes (second decompression time during extraction). The length of the second decompression time during extraction is not particularly limited, but the length of the second decompression time during extraction needs to match the length of the first decompression time during extraction in the first cleaning container 15 ( The length of the first decompression time during extraction is the same as the length of the second decompression time during extraction).

After reducing the pressure of the cleaning fluid, the controller 19 opens the valve mechanism of the switching valve 24 and allows the cleaning fluid to flow through the second cleaning container 16 via the booster pump 13 while the valve of the second pressure control valve 22 is opened. The opening of the mechanism is reduced, and the pressure of the cleaning fluid inside the cleaning container 16 is gradually increased from 15 MPa to 20 MPa (predetermined pressure) during 30 minutes (second pressure increase time during extraction). The length of the second pressurization time during extraction is not particularly limited, but the length of the second pressurization time during extraction needs to match the length of the first pressurization time during extraction in the first cleaning container 15 ( The length of the first boosting time during extraction is the same as the length of the second boosting time during extraction). The sum of the lengths of the second pressure reduction time and the extraction time of the second boosting time when extraction is the length of the second cleaning time (second extraction time). The length of the second cleaning time is not particularly limited, but the length of the second cleaning time needs to coincide with the length of the first cleaning time in the first cleaning container 15 (first cleaning time (first cleaning time (first 1 extraction time) of the length and the second cleaning time (the length of the second extraction time) are the same). The controller 19 extracts impurities contained in the filter accommodated in the second cleaning container 16 using the cleaning fluid during the second cleaning time (second extraction means) (S-5).

  In the second extraction means, the pressure of the cleaning fluid is reduced and increased (pressure fluctuation) in the range of 5 MPa, but the pressure fluctuation range is not particularly limited, and the pressure fluctuation range depends on the type of impurities contained in the filter. It can be set or changed arbitrarily. In the second extraction means, the cleaning fluid flows through the filter housed in the airtight structure cleaning chamber of the second cleaning container 16 and separates impurities contained therein from the filter. In the gas-liquid separation device 18, impurities contained in the cleaning fluid are separated from the cleaning fluid. Impurities separated from the cleaning fluid are recovered in the recovery device 27. Note that the pressure of the cleaning fluid in the cleaning container 16 is reduced and increased during the second cleaning time (the second decompression time during extraction and the second pressure increase time during extraction), but the second cleaning is performed without reducing and increasing the pressure. It is also possible to maintain the pressure of the cleaning fluid at a constant pressure over time.

  After one hour has elapsed since the second extraction means was executed (after the second cleaning time has elapsed), the controller 19 closes the valve mechanism of the switching valve 24 and increases the valve opening of the valve mechanism of the second pressure control valve 22. Then, the pressure of the cleaning fluid in the second cleaning container 16 is reduced to atmospheric pressure (second decompression means) (S-6) for 1 hour (second decompression time). If necessary in the second decompression means, the cleaning fluid is cooled by the cooler 17 in addition to the decompression by the control valve 22. In the second pressure reducing means, during the execution of the first pressure reducing means, the pressure of the cleaning fluid in the second cleaning container 16 is started to decrease toward the atmospheric pressure, and the pressure of the cleaning fluid in the second cleaning container 16 is set to the second pressure. Depressurize to atmospheric pressure during the decompression time.

In the second decompression means, impurities contained in the cleaning fluid are separated from the cleaning fluid by the gas-liquid separator 18. Impurities separated from the cleaning fluid are recovered in the recovery device 27. The cleaning fluid returns to the liquid by the condenser 11 and flows into the storage tank 12. After the pressure in the second cleaning container 16 returns to atmospheric pressure and the temperature in the cleaning container 16 returns to room temperature, the cleaned filter is removed from the cleaning container 16 and the next used filter is placed in the cleaning container 16. Accommodate and begin cleaning the filter. Although there is no particular limitation on the length of the second pressure reduction time, a second length of decompression time is required to match the length of the first pressure reduction time (the length and the second pressure reducing time of the first decompression time Is the same length ).

  When the first decompression unit and the second decompression unit are completed, the controller 19 determines whether or not a set number of cleaning cycles have been performed (S-7). When it is determined that the set number of cleaning cycles (six times) have been performed, the controller 19 stops the system 10A. If it is determined that the set number of cleaning cycles has not been performed, the controller 19 opens the valve mechanism of the switching valve 23 after the first pressure reducing means is finished and during the execution of the second pressure reducing means, and supplies the cleaning fluid. As shown in FIG. 3, the pressure of the cleaning fluid flowing into the first cleaning container 15 is changed from 0 MPa to 20 MPa in 30 minutes (first pressure increase time) as shown in FIG. (First boosting means) (S-1). Thereafter, the controller 19 repeats each means from step 2 (S-2).

The controller 19 includes a first pressure increasing means → first extracting means → a cleaning cycle (component extraction cycle) of the first pressure reducing means, a second pressure increasing means → second extraction means → a cleaning cycle (component extraction cycle) of the second pressure reducing means. After repeating the total of 6 times, the filter cleaning is finished. Time repeating the 6 wash cycles is 8 hours as shown in FIG. If cleaning is performed in one booster pump and two cleaning containers without using this system 10A, only four cleaning cycles can be repeated in 8 hours as shown in FIG. However, by using this system 10A, six cleaning cycles can be repeated in 8 hours.

  The component extraction system 10 </ b> A uses a single booster pump 13 to boost the cleaning fluid flowing into the first cleaning container 15 to a predetermined pressure, and after a predetermined time has elapsed, the booster pump 13 with respect to the first cleaning container 15 The load is released, and at the same time, the pressure of the cleaning fluid flowing into the second cleaning container 16 is increased to a predetermined pressure using the booster pump 13, and the cleaning fluid flowing into the second cleaning container 16 is brought to atmospheric pressure. While the pressure is reduced, the pressure of the cleaning fluid flowing into the first cleaning container 15 is increased to a predetermined pressure using the pressure increasing pump 13, so that the pressure increase of the cleaning fluid flowing into the first cleaning container 15 by the pressure increasing pump 13 is completed. The booster pump 13 can be used for boosting the cleaning fluid flowing into the second cleaning container 16, and the booster pump 13 can be used while decompressing the cleaning fluid flowing into the second cleaning container 16. It can be used to boost the fluid entering the first cleaning vessel 15.

  The component extraction system 10 </ b> A does not double the time required for one cycle when the cleaning cycle (pressure increase / cleaning / depressurization) of the plurality of cleaning containers 15, 16 is performed by one pressure pump 13. By using the time difference, the single booster pump 13 can perform the cleaning cycle for the plurality of cleaning containers 15 and 16 in a short time, and the cleaning cycle can be efficiently repeated within a predetermined time. The component extraction system 10A can extract impurities contained in the filters accommodated in the plurality of cleaning containers 15 and 16 from these filters in a short time even if there is only one booster pump 13.

  The component extraction system 10A performs decompression and pressure increase of the cleaning fluid flowing into the first cleaning container 15 in the first extraction means, and pressure reduction and pressure increase of the cleaning fluid flowing into the second cleaning container 16 in the second extraction means. Therefore, even if the pressure of the cleaning fluid when extracting these impurities differs depending on the type of impurities, the pressure of the cleaning fluid can be adjusted to the extraction pressure of various impurities by changing the pressure of the cleaning fluid when extracting the impurities. Even if various impurities are contained in the filter, these impurities can be reliably extracted from the filter.

  FIG. 4 is a configuration diagram of a component extraction system 10B shown as a reference example. In FIG. 4, the sub pipe line 34 is indicated by a one-dot chain line. This component extraction system 10B is suitably used for cleaning a filter (object) (object to be cleaned), similar to that of FIG. For cleaning these filters, either a supercritical or subcritical cleaning fluid (fluid) is used. The system 10B can be used not only for cleaning the filter but also for extracting a predetermined component from the object to be contained, for example.

  The component extraction system 10B includes a main pipe line 33 (main flow path) through which the cleaning fluid circulates and a sub pipe line 34 (sub flow path) through which the cleaning fluid circulates. The system 10B includes a condenser 11 that liquefies carbon dioxide, a vacuum-insulated storage tank 12 that stores the liquefied carbon dioxide, and a single booster pump 13 that can pressurize carbon dioxide supplied from the tank 12 to a predetermined pressure. , A heater 14 capable of heating carbon dioxide to a predetermined temperature, two first and second cleaning containers 15 and 16 (a plurality of airtight containers) for housing and cleaning the filter, a cooler 17 capable of cooling the cleaning fluid, and cleaning A gas-liquid separator 18 that can separate impurities (dirt components) contained in the fluid from the cleaning fluid, a circulation pump 43 that circulates the cleaning fluid to the sub pipe 34, and a controller 19 (control device) that controls each device are provided. Yes.

  The condenser 11, the tank 12, the booster pump 13, the heater 14, the cleaning containers 15 and 16, the cooler 17, and the gas-liquid separator 18 are connected to each other via a main pipe line 33. As shown in FIG. 4, the connection order of these devices in the main pipe line 33 is as follows: condenser 11 → tank 12 → pressure pump 13 → heater 14 → first cleaning container 15 → cooler 17 → gas-liquid separation device 18. Yes, condenser 11 → tank 12 → pressure pump 13 → heater 14 → second cleaning container 16 → cooler 17 → gas-liquid separator 18

  A first pressure control valve 21 is installed in a pipe line 33 connecting the first cleaning container 15 and the cooler 17. A second pressure control valve 22 is installed in the pipe line 33 that connects the second cleaning container 16 and the cooler 17. The first and second pressure control valves 21 and 22 can adjust the pressure of the cleaning fluid inside the first and second cleaning containers 15 and 16 by changing the opening of the valve mechanism. A third pressure control valve 46 is installed in the pipe line 33 that connects the condenser 11 and the storage tank 12. The third pressure control valve 46 can adjust the pressure and temperature of the cleaning fluid inside the gas-liquid separator 18 by changing the opening of the valve mechanism. In the system 10B, the opening degree of the valve mechanism of the third pressure control valve 46 is always kept constant.

  A switching valve 35 is installed in the main pipe line 33 that connects the heater 14 and the first cleaning container 15, and a switching valve 36 is installed in the main pipe line 33 that connects the heater 14 and the second cleaning container 16. Is installed. A switching valve 37 is installed in the main conduit 33 that connects the first cleaning container 15 and the first pressure control valve 23, and the main conduit 33 that connects the second cleaning container 16 and the second pressure control valve 24. Is provided with a switching valve 38. In the sub pipe line 34, switching valves 39 to 42 are installed. By opening and closing the switching valves 35 to 42, the cleaning fluid circulation path can be changed from the main pipe line 33 to the sub pipe line 34, and the cleaning fluid circulation path can be changed from the sub pipe line 34 to the main pipe line 33. Can be changed. The circulation pump 43 is installed in the sub pipe line 34.

  Although not shown, the first and second cleaning containers 15 and 16 are attached with a temperature sensor and a pressure sensor. An airtight structure cleaning chamber (not shown) is formed in the cleaning containers 15 and 16. Although not shown, a flow rate sensor is installed in the main pipeline 33.

  The gas-liquid separator 18 separates impurities contained in the cleaning fluid from the cleaning fluid using the difference in vapor pressure of the impurities. The gas-liquid separator 18 has a built-in heater for heating it, and although not shown, a temperature sensor for measuring the internal temperature is attached and a pressure sensor for measuring the internal pressure is attached. ing. A collector 27 is attached to the gas-liquid separator 18. The recovery device 27 collects impurities (liquid) separated by the gas-liquid separation device 18.

  The carbon dioxide supplied from the storage tank 12 is pressurized to a pressure of 5.0 to 30.0 MPa by the booster pump 13 and then heated to a temperature of 30 to 120 ° C. by the heater 14 to be supercritical or subcritical. Either of the cleaning fluids. The cleaning fluid is forcibly supplied to the first and second cleaning containers 15 and 16 by the booster pump 13 or the circulation pump 43, flows into the airtight structure cleaning chamber of the cleaning containers 15 and 16, and is stored in the cleaning chamber. Wash. The cleaning fluid that has flowed out of the cleaning containers 15, 16 flows into the gas-liquid separator 18 through the main pipe 33, and impurities contained therein are separated by the gas-liquid separator 18. Impurities separated from the cleaning fluid are recovered in the recovery device 27.

  During the filter cleaning operation in the system 10B, the cleaning fluid passes through the main pipe 33, and the first cleaning container 15 → the cooler 17 → the gas-liquid separator 18 → the condenser 11 → the tank 12 → the booster pump 13 → the heater 14 → While circulating in the order of the first cleaning container 15, the second cleaning container 16 → the cooler 17 → the gas-liquid separator 18 → the condenser 11 → the tank 12 → the booster pump 13 → the heater 14 → the second cleaning container 16. Circulate with. Further, the cleaning fluid circulates in the order of the first cleaning container 15 → the circulation pump 43 → the first cleaning container 15 through the sub pipe 34, and the second cleaning container 16 → the circulation pump 43 → the second cleaning container 16. Cycle in order.

  When the cleaning time ends, the cleaning fluid flowing out from the cleaning containers 15 and 16 is decompressed by the first and second pressure control valves 21 and 22 and returns to the non-supercritical or non-subcritical cleaning fluid (carbon dioxide). If necessary, the cleaning fluid flowing out from the cleaning containers 15 and 16 may be cooled by the cooler 17 in addition to the pressure reduction by the control valves 21 and 22. The cleaning fluid flows into the condenser 11, returns to the liquid by the condenser 11, flows into the storage tank 12, and is then supplied again from the tank 12 to the main line 33, and is either supercritical or subcritical cleaning fluid. And supplied to the first and second cleaning containers 15 and 16.

  The controller 19 is a computer having a central processing unit (CPU or MPU) and a memory, as in the system 10A of FIG. 1, and has a built-in large-capacity hard disk. The controller 19 is connected to the condenser 11, the tank 12, the booster pump 13, the heater 14, the temperature sensor and pressure sensor of the cleaning containers 15 and 16, the flow rate sensor, the cooler 17, via an interface 28 (wired or wireless). The gas-liquid separator 18, the temperature sensor and pressure sensor of the gas-liquid separator 18, the pressure control valves 21 and 22, the switching valves 35 to 42, and the circulation pump 43 are connected. In the filter cleaning, the controller 19 repeatedly executes a cleaning cycle (pressure increase / cleaning / depressurization) (component extraction cycle (pressure increase / extraction / depressurization)).

  The controller 19 includes the temperature of the condenser 11, the amount of carbon dioxide supplied from the tank 12 and the output of the booster pump 13, the output of the heater 14, the output of the cooler 17, the opening degree of the pressure control valves 21 and 22, and the circulation pump 43. Monitor the output of. The controller 19 controls the supply amount of carbon dioxide, the temperature and output of these devices, and the opening degree of the control valves 21 and 22 based on the measurement results output from the temperature sensor, the pressure sensor, and the flow rate sensor. During the cleaning of the filter, the controller 19 optimizes the condenser 11, tank 12, booster pump 13, heater 14, cleaning containers 15 and 16, cooler 17, pressure control valves 21 and 22, and circulation pump 43 connected thereto. In a stable operating state (a state in which the filter can be cleaned most efficiently).

  When the controller 19 determines that an error has occurred in each operating condition based on the measurement result input from each sensor, the controller 19 performs feedback control to adjust those devices and return the operating condition to that at the time of setting. The controller 19 adjusts the inflow amount of the cleaning fluid into the cleaning containers 15 and 16 and the outflow amount from the cleaning containers 15 and 16 by the booster pump 13 or the circulation pump 43, and the cleaning fluid flowing into the cleaning containers 15 and 16 is adjusted. The pressure is adjusted by the pressure control valves 21 and 22, and the temperature of the cleaning fluid flowing into the cleaning containers 15 and 16 is adjusted by the heater 14.

  The central processing unit of the controller 19 activates the application stored in the memory based on the control by the operating system, and executes the following means according to the activated application. The central processing unit of the controller 19 circulates the cleaning fluid through the main channel 33 to the first cleaning container 15 using the switching valves 35 to 42, and circulates the main channel 33 using the booster pump 13. First boosting means for boosting (the cleaning fluid flowing into the first cleaning container 15) to a predetermined pressure is executed, and the boosted cleaning fluid is transferred from the main flow path 33 to the sub flow path using the switching valves 35-42. The sub-flow path first circulation means for circulating the cleaning fluid to the first cleaning container 15 through the sub-flow path 34 using the circulation pump 43 is executed.

  The central processing unit of the controller 19 uses the switching valves 35 to 42 to supply the increased cleaning fluid from the sub-channel 34 to the main channel 33 after a predetermined time has elapsed since the execution of the sub-channel first circulation means. The main flow path first circulation means for circulating and circulating the cleaning fluid through the main flow path 33 to the first cleaning container 15 using the booster pump 13 is executed. After the elapse of time, a first depressurizing means for reducing the pressure of the cleaning fluid in the first cleaning container 15 to atmospheric pressure is executed.

  The central processing unit of the controller 19 uses the switching valves 35 to 42 to supply the cleaning fluid to the second through the main flow path 33 when the sub flow path first circulation means is executed (in parallel with the sub flow path first circulation means). A second pressure increasing means for increasing the pressure of the cleaning fluid circulating in the main flow path 33 using the pressure increasing pump 13 (the cleaning fluid flowing into the second cleaning container 16) to a predetermined pressure, When executing the main flow path first circulation means (in parallel with the main flow path first circulation means), the switching fluid 35 to 42 is used to circulate the pressurized cleaning fluid from the main flow path 33 to the sub flow path 34. Then, the sub flow path second circulation means for circulating the cleaning fluid to the second cleaning container 16 through the sub flow path 34 using the circulation pump 43 is executed.

  When the first pressure reducing means is executed (in parallel with the first pressure reducing means), the central processing unit of the controller 19 uses the switching valves 35 to 42 to supply the pressurized cleaning fluid from the sub flow path 34 to the main flow path 33. The main flow path second circulation means for circulating and circulating the cleaning fluid to the second cleaning container 16 through the main flow path 33 using the booster pump 13 is executed, and a predetermined time has elapsed since the execution of the second main circulation means. Later, during the execution of the first pressure increasing means, the second pressure reducing means for reducing the pressure of the cleaning fluid in the second cleaning container 16 to atmospheric pressure is executed.

  FIG. 5 is a flowchart showing an example of a cleaning procedure in the system 10B, and FIG. 6 is a diagram showing changes in the pressure of the cleaning fluid in the system 10B in time series. An example of the filter cleaning operation in the system 10B will be described with reference to FIGS. In the airtight structure cleaning chambers of the cleaning containers 15 and 16, used filters that are objects to be cleaned are accommodated. It is assumed that the set number of cleaning cycles is set to 6. The number of repetitions of the cleaning cycle is input to the controller 19 via the input device. The number of repetitions is not particularly limited, and the number of repetitions can be arbitrarily set or changed. Note that the number of repetitions may be an odd number.

  When the system 10B is activated, each device operates. The controller 19 adjusts the opening of the first pressure control valve 21 while adjusting the output of the booster pump 13, and supplies the set amount of liquefied carbon dioxide stored in the tank 12 to the main line 33. The controller 19 maintains the output of the booster pump 13 at the set output, holds the opening of the pressure control valve 21 at the set opening, pressurizes carbon dioxide to a predetermined pressure, and sets the output of the heater 14. Maintaining the output, the pressurized carbon dioxide is heated to a predetermined temperature.

The controller 19 opens the valve mechanisms of the switching valves 35 and 37, closes the valve mechanisms of the switching valves 36, 38, 39, 40, 41 and 42, and supplies the cleaning fluid to the first cleaning container 15 via the booster pump 13. As shown in FIG. 6, the pressure of the cleaning fluid flowing into the first cleaning container 15 is increased from 0 MPa to 20 MPa during 30 minutes (first pressurization time) while being circulated (first pressurization means) (S− 10). There is no particular limitation on the length of the first boost time can be arbitrarily set or change the length of the first boosting time. In the first pressurizing means, the cleaning fluid is booster pump 13 → heater 14 → first cleaning container 15 → first pressure control valve 21 → cooler 17 → gas-liquid separator 18 → condenser 11 → tank 12 → booster pump 13. It circulates through the main pipe line 33 in this order. Note that the valve mechanisms of the switching valves 35 and 37 are opened simultaneously with the operation of the booster pump 13.

When 30 minutes have elapsed from the execution of the first pressurizing means and the pressurization of the cleaning fluid is finished (after a predetermined time has elapsed since the first pressurizing means has been executed), the controller 19 controls the valve mechanisms of the switching valves 39 and 40. , The valve mechanisms of the switching valves 35, 37, 41, 42 are closed, the cleaning fluid is caused to flow into the sub pipe 34, and the cleaning fluid is supplied from the sub pipe 34 to the first cleaning container 15 using the circulation pump 43. Circulate for 30 minutes (first cleaning time) (sub-channel first circulation means) (S-11). The length of the first cleaning time is not particularly limited, and the length of the first cleaning time can be arbitrarily set or changed.

  In the sub-channel first circulation means, the cleaning fluid flows into the hermetic structure cleaning chamber of the cleaning container 15 and circulates through the sub-pipe 34 in the order of the first cleaning container 15 → the circulation pump 43 → the first cleaning container 15. The cleaning fluid that circulates in the sub-line 34 flows through the filter and separates impurities contained therein from the filter.

  The controller 19 controls the second pressure control while adjusting the output of the booster pump 13 simultaneously with the sub-channel first circulation means (after the first pressure increase time has elapsed and when the sub-channel first circulation means is executed). The opening degree of the valve 22 is adjusted, and a set amount of liquefied carbon dioxide stored in the tank 12 is supplied to the pipe line 33. The controller 19 holds the output of the booster pump 13 at the set output, holds the opening of the pressure control valve 22 at the set opening, pressurizes carbon dioxide to a predetermined pressure, and sets the output of the heater 14. Maintaining the output, the pressurized carbon dioxide is heated to a predetermined temperature.

The controller 19 opens the valve mechanisms of the switching valves 36 and 38 simultaneously with the first sub-passage circulation means, closes the valve mechanisms of the switching valves 35, 37, 41, and 42, and allows the cleaning fluid to pass through the booster pump 13. While flowing through the second cleaning container 16, as shown in FIG. 6, the pressure of the cleaning fluid flowing into the second cleaning container 16 is increased from 0 MPa to 20 MPa in 30 minutes (second pressurization time) (second Boosting means) (S-12). At this time, the valve mechanisms of the switching valves 39 and 40 are in an open state. In the second pressurizing means, the cleaning fluid is booster pump 13 → heater 14 → second cleaning container 16 → second pressure control valve 22 → cooler 17 → gas-liquid separator 18 → condenser 11 → tank 12 → pressure pump 13 It circulates through the main pipe line 33 in this order. There is no particular limitation on the length of the second boosting time , but it needs to match the length of the first boosting time.

When 30 minutes have elapsed since the execution of the sub-flow path first circulation means (after a predetermined time has elapsed since the execution of the sub-flow path first circulation means), the controller 19 opens the valve mechanisms of the switching valves 35 and 37. The valve mechanisms of the switching valves 39 and 40 are closed, the pressurized cleaning fluid is circulated from the sub-flow path 34 to the main flow path 33, and the boosting pump 13 is used to pass the cleaning fluid from the main flow path 33 to the first cleaning container. 15 for 30 minutes (second cleaning time) (main flow path first circulation means) (S-13). The length of the second cleaning time is not particularly limited, and the length of the second cleaning time can be arbitrarily set or changed.

  In the main flow path first circulation means, the cleaning fluid flows into the airtight structure cleaning chamber of the first cleaning container 15, and the booster pump 13 → the heater 14 → the first cleaning container 15 → the first pressure control valve 21 → the cooler 17. The gas / liquid separator 18, the condenser 11, the tank 12, and the booster pump 13 are circulated through the main line 33 in this order. The cleaning fluid circulating through the main pipe line 33 flows through the filter, and after impurities contained therein are separated from the filter, the cleaning fluid flows out from the first cleaning container 15. In the gas-liquid separation device 18, impurities contained in the cleaning fluid are separated from the cleaning fluid. Impurities separated from the cleaning fluid are recovered in the recovery device 27. The cleaning fluid from which impurities have been removed flows from the gas-liquid separator 18 into the first cleaning container 15 through the main conduit 33.

When 30 minutes have elapsed from the execution of the second pressurizing means and the pressurization of the cleaning fluid is completed (after the predetermined time has elapsed since the second pressurizing means has been executed, the main flow path first circulating means is being executed. The controller 19 opens the valve mechanisms of the switching valves 41 and 42, closes the valve mechanisms of the switching valves 36 and 38, allows the cleaning fluid to flow into the sub-pipe 34, and uses the circulation pump 43 to supply the cleaning fluid to the sub-fluid. It is made to distribute | circulate for 30 minutes (3rd cleaning time) from the pipe line 34 to the 2nd washing | cleaning container 16 (subchannel 2nd circulation means) (S-14). There is no particular limitation on the length of the third cleaning time , but it is necessary to match the length of the first cleaning time.

  In the sub-channel second circulation means, the cleaning fluid flows into the airtight structure cleaning chamber of the second cleaning container 16 and circulates through the sub-pipe 34 in the order of the second cleaning container 16 → the circulation pump 43 → the second cleaning container 16. To do. The cleaning fluid that circulates in the sub-line 34 flows through the filter and separates impurities contained therein from the filter.

  When 30 minutes have elapsed since the execution of the main flow path first circulation means (after a predetermined time has elapsed since the execution of the main flow path first circulation means), the controller 19 closes the valve mechanism of the switching valve 35, The valve opening degree of the valve mechanism of the first pressure control valve 24 is expanded, and the pressure of the cleaning fluid in the first cleaning container 15 is reduced to atmospheric pressure during one hour (first pressure reduction time) (first pressure reduction means). ) (S-15). If necessary in the first decompression means, the cleaning fluid is cooled by the cooler 17 in addition to the decompression by the control valve 21.

In the first pressure reducing means, impurities contained in the cleaning fluid are separated from the cleaning fluid by the gas-liquid separator 18. Impurities separated from the cleaning fluid are recovered in the recovery device 27. After the pressure in the first cleaning container 15 returns to atmospheric pressure and the temperature in the cleaning container 16 returns to room temperature, the cleaned filter is removed from the cleaning container 15 and the next used filter is placed in the cleaning container 15. Accommodate and begin cleaning the filter. There is no particular limitation on the length of the first pressure reduction time can be arbitrarily set or change the length of the first decompression time.

When 30 minutes have elapsed since the execution of the sub-flow path second circulation means (after a predetermined time has elapsed since the execution of the sub-flow path second circulation means and when the first pressure reduction means is executed), the controller 19 Then, the valve mechanisms of the switching valves 36 and 38 are opened, the valve mechanisms of the switching valves 41 and 42 are closed, and the pressurized cleaning fluid is circulated from the sub flow path 34 to the main flow path 33 and cleaned using the boost pump 13. The fluid is circulated from the main flow path 33 to the second cleaning container 16 for 30 minutes (fourth cleaning time) (main flow path second circulation means) (S-16). There is no particular limitation on the length of the fourth cleaning time , but it is necessary to match the length of the second cleaning time.

  In the main flow path second circulation means, the cleaning fluid flows into the airtight structure cleaning chamber of the second cleaning container 16, and the booster pump 13 → the heater 14 → the second cleaning container 16 → the second pressure control valve 22 → the cooler 17. The gas / liquid separator 18, the condenser 11, the tank 12, and the booster pump 13 are circulated through the main line 33 in this order. The cleaning fluid circulating through the main pipe line 33 flows through the filter, and after impurities contained therein are separated from the filter, the cleaning fluid flows out from the second cleaning container 16. In the gas-liquid separation device 18, impurities contained in the cleaning fluid are separated from the cleaning fluid. Impurities separated from the cleaning fluid are recovered in the recovery device 27. The cleaning fluid from which impurities have been removed flows from the gas-liquid separator 18 into the second cleaning container 16 through the main conduit 33.

  When 30 minutes have elapsed from the execution of the main flow path second circulation means (after a predetermined time has elapsed since the execution of the main flow path second circulation means and the first pressure increase means is being executed), the controller 17 Closes the valve mechanism of the switching valve 36, expands the valve opening degree of the valve mechanism of the second pressure control valve 22, and sets the pressure of the cleaning fluid in the second cleaning container 16 for 1 hour (second decompression time). The pressure is reduced to atmospheric pressure (second pressure reducing means) (S-17). If necessary in the second decompression means, the cleaning fluid is cooled by the cooler 17 in addition to the decompression by the control valve 22.

In the second decompression means, impurities contained in the cleaning fluid are separated from the cleaning fluid by the gas-liquid separator 18. Impurities separated from the cleaning fluid are recovered in the recovery device 27. After the pressure in the second cleaning container 16 returns to atmospheric pressure and the temperature in the cleaning container 16 returns to room temperature, the cleaned filter is removed from the cleaning container 16 and the next used filter is placed in the cleaning container 16. Accommodate and begin cleaning the filter. Although the length of the second decompression time is not particularly limited, it is necessary to match the length of the first decompression time.

  When the first decompression unit and the second decompression unit are finished, the controller 19 determines whether or not a set number of cleaning cycles have been performed (S-18). When it is determined that the set number of cleaning cycles (six times) have been performed, the controller 19 stops the system 10B. If the controller 19 determines that the set number of cleaning cycles has not been performed, the controller 19 opens the valve mechanisms of the switching valves 35 and 37 after the first pressure reducing means is finished and the second pressure reducing means is being executed. The valve mechanisms of the valves 39 and 40 are closed, and the cleaning fluid is circulated through the first cleaning container 15 via the booster pump 13, and the pressure of the cleaning fluid flowing into the first cleaning container 15 is set to 30 as shown in FIG. The pressure is increased from 0 MPa to 20 MPa during the minute (first pressure increase time) (first pressure increase means) (S-10). Thereafter, the controller 19 repeats each means from step 11 (S-11).

  The controller 19 includes: first boosting means → sub-channel first circulating means → main channel first circulating means → first pressure reducing means cleaning cycle and second boosting means → sub-channel second circulating means → main channel first After repeating the total of 2 circulation means → cleaning cycle of the second decompression means 6 times, the filter cleaning is finished. The time for repeating the six washing cycles is 8 hours as shown in FIG. If cleaning is performed in one booster pump and two cleaning containers without using this system 10B, only four cleaning cycles can be repeated in 8 hours as shown in FIG. However, by using this system 10B, six cleaning cycles can be repeated in 8 hours.

  The component extraction system 10B uses a single booster pump 13 to boost the cleaning fluid flowing from the main conduit 33 into the first cleaning container 15 to a predetermined pressure, and then, after a predetermined time has elapsed, one circulation pump 43, the cleaning fluid is circulated from the sub pipe 34 to the first cleaning container 15, and at the same time, the cleaning fluid flowing into the second cleaning container 16 from the main pipe 33 is set to a predetermined pressure by using the booster pump 13. The pressure is increased, and the cleaning fluid flowing into the second cleaning container 16 is increased to a predetermined pressure. After a predetermined time has elapsed, the circulation pump 43 circulates the cleaning fluid from the sub pipe line 34 to the second cleaning container 16. At the same time, the cleaning fluid is circulated from the main conduit 33 to the first cleaning container 15 by the booster pump 13, so that the cleaning fluid flowing into the first cleaning container 15 is increased by the booster pump 13. After the pressure is finished, the circulation of the cleaning fluid to the first cleaning container 15 is performed by the circulation pump 43, and the booster pump 13 can be used to increase the pressure of the cleaning fluid flowing into the second cleaning container 16, and the second After the pressurization of the cleaning fluid flowing into the cleaning container 16 is completed, the circulation of the cleaning fluid to the second cleaning container 16 is performed by the circulation pump 43 and the circulation of the cleaning fluid to the first cleaning container 15 is performed by the booster pump 13. it can. Further, the pressure of the cleaning fluid flowing from the main conduit 33 to the first cleaning container 15 is reduced, and the cleaning fluid is circulated to the second cleaning container 16 by the single booster pump 13. The pressure of the cleaning fluid flowing into the first cleaning container 15 from the main pipe line 33 can be increased by the booster pump 13 while reducing the pressure of the cleaning fluid flowing through the first cleaning container 15.

  In the component extraction system 10B, the time required for one cycle is doubled when the cleaning cycle (pressurization / cleaning / depressurization) of a plurality of cleaning containers is performed by one booster pump 13 and one circulation pump 43. The cleaning cycle for a plurality of cleaning containers can be performed in a short time by using one time booster pump 13 and one circulation pump 43 using the time difference, and the cleaning cycle is efficiently performed within a predetermined time. Can be repeated well. This component extraction system 10B can extract impurities contained in the filters accommodated in the plurality of cleaning containers 15 and 16 in a short time even if the booster pump 13 and the circulation pump 43 are one. it can.

  FIG. 7 is a configuration diagram of a component extraction system 10C shown as another reference example. In FIG. 7, the sub pipe line 34 is indicated by a one-dot chain line. This component extraction system 10C is suitably used for cleaning a filter (object) (object to be cleaned), similar to that of FIG. For cleaning these filters, either a supercritical or subcritical cleaning fluid (fluid) is used. The system 10C can be used not only for cleaning the filter but also for extracting a predetermined component from the object to be contained, for example.

  The system 10C is different from the system 10B of FIG. 4 in that it includes a gas chromatograph 44 (component analyzer), the pressure of the cleaning fluid in the gas-liquid separator 18 using the third pressure control valve 46, Since the other configurations in the system 10C are the same as those in the system 10B in FIG. 4, the same reference numerals as those in FIG. 4 are used to explain the other configurations in the system 10C. Omitted. The third pressure control valve 46 is installed in the main pipe line 33 that connects the condenser 11 and the storage tank 12. The third pressure control valve 46 can adjust the pressure and temperature of the cleaning fluid inside the gas-liquid separator 18 by changing the opening of the valve mechanism.

  The gas chromatograph 44 analyzes impurity components contained in the cleaning fluid. The first sampling point P1 by the gas chromatograph 44 is set in the main pipe line 33 connecting the first cleaning container 15 and the first pressure control valve 21, and the second sampling point P2 is set in the second cleaning container 16 and the second. The main line 33 is connected to the pressure control valve 22. A sampling pipe 47 extending from the gas chromatograph 44 is connected to a main pipe line 33 that connects the cleaning containers 15 and 16 and the pressure control valves 21 and 22. A part of the cleaning fluid immediately after cleaning the filter flows into the sampling pipe 47 from the pipe 33, is decompressed by a pressure reducing valve (not shown), and is sent to the gas chromatograph 44.

  The gas chromatograph 44 is executing the main flow path first circulation means (substantially simultaneously with the execution of the main flow path first circulation means) and the main flow path second circulation means (execution of the main flow path second circulation means). And an analysis result output means for outputting a component analysis result analyzed by the component analysis means to the controller 19 by executing a component analysis means for analyzing the impurity component contained in the cleaning fluid after the filter is washed. Execute. Note that the gas chromatograph 44 includes the sub-channel first circulation means being executed (substantially simultaneously with the execution of the sub-channel first circulation means) and the sub-channel second circulation means being executed (sub-channel second circulation means). It is also possible to execute the component analysis means at substantially the same time as

  When the component analysis means is executed during the execution of the sub flow path first circulation means and the sub flow path second circulation means, the first sampling point P1 connects the first cleaning container 15 and the switching valve 40. The second sampling point P2 is set to the sub pipeline 34 connecting the second cleaning container 16 and the switching valve 42. A sampling pipe 47 extending from the gas chromatograph 44 is connected to a sub pipe line 34 that connects the cleaning containers 15 and 16 and the switching valves 40 and 42. A part of the cleaning fluid after cleaning the filter flows into the sampling pipe 47 from the pipe line 34, is decompressed by a pressure reducing valve (not shown), and is sent to the gas chromatograph 44.

  The controller 19 is a computer provided with a central processing unit (CPU or MPU) and a memory, as in the systems 10A and 10B of FIGS. The controller 19 is connected to the condenser 11, the tank 12, the booster pump 13, the heater 14, the temperature sensor and pressure sensor of the cleaning containers 15 and 16, the flow rate sensor, the cooler 17, via an interface 32 (wired or wireless). The gas-liquid separator 18, the temperature sensor of the gas-liquid separator 18, the pressure control valves 23, 24, 46, the switching valves 35 to 42, the circulation pump 43, and the gas chromatograph 44 are connected. In the filter cleaning, the controller 19 repeatedly executes a cleaning cycle (pressure increase / cleaning / depressurization) (component extraction cycle (pressure increase / extraction / depressurization)).

  The central processing unit of the controller 19 activates the application stored in the memory based on the control by the operating system, and executes the following means according to the activated application. The central processing unit of the controller 19 circulates the cleaning fluid through the main channel 33 to the first cleaning container 15 using the switching valves 35 to 42, and circulates the main channel 33 using the booster pump 13. First boosting means for boosting (the cleaning fluid flowing into the first cleaning container 15) to a predetermined pressure is executed, and the boosted cleaning fluid is transferred from the main flow path 33 to the sub flow path using the switching valves 35-42. The sub-flow path first circulation means for circulating the cleaning fluid to the first cleaning container 15 through the sub-flow path 34 using the circulation pump 43 is executed.

  The central processing unit of the controller 19 uses the switching valves 35 to 42 to supply the increased cleaning fluid from the sub-channel 34 to the main channel 33 after a predetermined time has elapsed since the execution of the sub-channel first circulation means. The main flow path first circulating means for circulating the cleaning fluid to the first cleaning container 15 through the main flow path 33 using the booster pump 13 is executed. The central processing unit performs component analysis results (impurities analyzed in the gas chromatograph 44) output from the gas chromatograph 44 during execution of the main flow path first circulation means (substantially simultaneously with execution of the main flow path first circulation means). The type specifying means for specifying the type of impurities contained in the cleaning fluid is executed based on the type). The type specifying means specifies the boiling point and saturated vapor pressure of the impurity from the type of impurity contained in the cleaning fluid.

  The central processing unit of the controller 19 is executing the main flow path first circulation means (substantially simultaneously with the execution of the main flow path first circulation means), and after executing the type specifying means, The pressure adjusting means for adjusting the pressure of the cleaning fluid to a set pressure suitable for the type of impurities is executed, and the temperature adjusting means for adjusting the temperature of the cleaning fluid in the gas-liquid separator 18 to the set temperature suitable for the type of impurities. Execute. The pressure adjusting means determines the set pressure based on the boiling point and saturated vapor pressure of the impurity specified by the type specifying means, and the temperature adjusting means is based on the boiling point and saturated vapor pressure of the impurity specified by the type specifying means. Determine the set temperature. The central processing unit executes a first pressure reducing unit that reduces the pressure of the cleaning fluid in the first cleaning container 15 to the atmospheric pressure after a predetermined time has elapsed since the execution of the first circulation unit of the main flow path.

  The central processing unit of the controller 19 uses the switching valves 35 to 42 to supply the cleaning fluid to the second through the main flow path 33 when the sub flow path first circulation means is executed (in parallel with the sub flow path first circulation means). A second pressure increasing means for increasing the pressure of the cleaning fluid circulating in the main flow path 33 using the pressure increasing pump 13 (the cleaning fluid flowing into the second cleaning container 16) to a predetermined pressure, When executing the main flow path first circulation means (in parallel with the main flow path first circulation means), the switching fluid 35 to 42 is used to circulate the pressurized cleaning fluid from the main flow path 33 to the sub flow path 34. Then, the sub flow path second circulation means for circulating the cleaning fluid to the second cleaning container 16 through the sub flow path 34 using the circulation pump 43 is executed. The central processing unit circulates the pressurized cleaning fluid from the sub flow path 34 to the main flow path 33 using the switching valves 35 to 42 during the execution of the first pressure reduction means (in parallel with the first pressure reduction means) The main flow path second circulation means for circulating the cleaning fluid to the second cleaning container 16 through the main flow path 33 using the booster pump 13 is executed.

  The central processing unit of the controller 19 performs cleaning fluid based on the component analysis result output from the gas chromatograph 44 during execution of the main flow path second circulation means (substantially simultaneously with the execution of the main flow path second circulation means). The type specifying means for specifying the type of the impurities contained in is executed. The central processing unit is executing the main fluid second circulation means (substantially simultaneously with the execution of the main flow passage second circulation means), and after executing the type specifying means, the cleaning fluid in the gas-liquid separation device 18 Pressure adjusting means for adjusting the pressure of the cleaning fluid to a set pressure suitable for the type of impurities is executed, and temperature adjusting means for adjusting the temperature of the cleaning fluid in the gas-liquid separator 18 to a set temperature suitable for the type of impurities is executed. . The central processing unit reduces the pressure of the cleaning fluid in the second cleaning container 16 to the atmospheric pressure after a predetermined time has elapsed since the execution of the first flow path second circulation means and during the execution of the first pressure increase means. The second decompression means is executed.

  FIG. 8 is a flowchart showing an example of a cleaning procedure in the system 10C, and FIG. 9 is a diagram showing changes in the pressure of the cleaning fluid in the system 10C in time series. FIG. 10 is a diagram illustrating an example of the specified impurity type, boiling point, and saturated vapor pressure, and FIG. 11 is a diagram illustrating a first relationship between the impurity classification and the boiling point and saturated vapor pressure. FIG. 12 is a diagram illustrating a second relationship between the impurity classification, the set pressure, and the set temperature.

  An example of the filter cleaning operation in the system 10C will be described below with reference to these drawings. In the airtight structure cleaning chambers of the cleaning containers 15 and 16, used filters that are objects to be cleaned are accommodated. It is assumed that the set number of cleaning cycles is set to 6. The number of repetitions of the cleaning cycle is input to the controller 19 via the input device. The number of repetitions is not particularly limited, and the number of repetitions can be arbitrarily set or changed. It is assumed that the used filter contains isopropyl alcohol, toluene, and dioctyl phthalate as main impurities. The hard disk of the controller 19 stores the first relationship between the impurity type in FIG. 11 and its boiling point and saturated vapor pressure, and stores the second relationship between the impurity type classification in FIG. 12 and the set pressure and set temperature. Yes.

  When the system 10C is activated, each device operates. The controller 19 adjusts the opening of the first pressure control valve 21 while adjusting the output of the booster pump 13, and supplies the set amount of liquefied carbon dioxide stored in the tank 12 to the main line 33. The controller 19 holds the output of the booster pump 13 at the set output, holds the opening of the control valve 21 at the set opening, pressurizes carbon dioxide to a predetermined pressure, and outputs the output of the heater 14 as the set output. The heated carbon dioxide is heated to a predetermined temperature.

The controller 19 opens the valve mechanisms of the switching valves 35 and 37, closes the valve mechanisms of the switching valves 36, 38, 39, 40, 41 and 42, and supplies the cleaning fluid to the first cleaning container 15 via the booster pump 13. As shown in FIG. 9, the pressure of the cleaning fluid flowing into the first cleaning container 15 is increased from 0 MPa to 20 MPa during 30 minutes (first pressure increase time) while being circulated (first pressure increase means) (S− 30). There is no particular limitation on the length of the first boost time can be arbitrarily set or change the length of the first boosting time. In the first pressurizing means, the cleaning fluid is booster pump 13 → heater 14 → first cleaning container 15 → first pressure control valve 21 → cooler 17 → gas-liquid separator 18 → condenser 11 → tank 12 → booster pump 13. It circulates through the main pipe line 33 in this order. Note that the valve mechanisms of the switching valves 35 and 37 are opened simultaneously with the operation of the booster pump 13.

When 30 minutes have elapsed from the execution of the first pressurizing means and the pressurization of the cleaning fluid is finished (after a predetermined time has elapsed since the first pressurizing means has been executed), the controller 19 controls the valve mechanisms of the switching valves 39 and 40. , The valve mechanisms of the switching valves 35, 37, 41, 42 are closed, the cleaning fluid is caused to flow into the sub pipe 34, and the cleaning fluid is supplied from the sub pipe 34 to the first cleaning container 15 using the circulation pump 43. Circulate for 30 minutes (first cleaning time) (sub-channel first circulation means) (S-31). The length of the first cleaning time is not particularly limited, and the length of the first cleaning time can be arbitrarily set or changed. In the sub-channel first circulation means, the cleaning fluid flows into the hermetic structure cleaning chamber of the cleaning container 15 and circulates through the sub-pipe 34 in the order of the first cleaning container 15 → the circulation pump 43 → the first cleaning container 15. The cleaning fluid that circulates in the sub-line 34 flows through the filter and separates impurities contained therein from the filter.

  The controller 19 controls the second pressure control while adjusting the output of the booster pump 13 simultaneously with the sub-channel first circulation means (after the first pressure increase time has elapsed and when the sub-channel first circulation means is executed). The opening degree of the valve 22 is adjusted, and a set amount of liquefied carbon dioxide stored in the tank 12 is supplied to the pipe line 20. The controller 19 maintains the output of the booster pump 13 at the set output, holds the opening of the control valve 22 at the set opening, pressurizes carbon dioxide to a predetermined pressure, and outputs the output of the heater 14 as the set output. The heated carbon dioxide is heated to a predetermined temperature.

The controller 19 opens the valve mechanisms of the switching valves 36 and 38 simultaneously with the first sub-passage circulation means, closes the valve mechanisms of the switching valves 35, 37, 41, and 42, and allows the cleaning fluid to pass through the booster pump 13. While flowing through the second cleaning container 16, as shown in FIG. 9, the pressure of the cleaning fluid flowing into the second cleaning container 16 is increased from 0 MPa to 20 MPa within 30 minutes (second pressurization time) (second Boosting means) (S-32). At this time, the valve mechanisms of the switching valves 39 and 40 are in an open state. In the second pressurizing means, the cleaning fluid is booster pump 13 → heater 14 → second cleaning container 16 → second pressure control valve 22 → cooler 17 → gas-liquid separator 18 → condenser 11 → tank 12 → pressure pump 13 It circulates through the main pipe line 33 in this order. There is no particular limitation on the length of the second boosting time , but it needs to match the length of the first boosting time.

When 30 minutes have elapsed since the execution of the sub-flow path first circulation means (after a predetermined time has elapsed since the execution of the sub-flow path first circulation means), the controller 19 opens the valve mechanisms of the switching valves 35 and 37. The valve mechanisms of the switching valves 39 and 40 are closed, the pressurized cleaning fluid is circulated from the sub-flow path 34 to the main flow path 33, and the boosting pump 13 is used to pass the cleaning fluid from the main flow path 33 to the first cleaning container. 15 for 30 minutes (second cleaning time) (main flow path first circulation means) (S-33). The length of the second cleaning time is not particularly limited, and the length of the second cleaning time can be arbitrarily set or changed.

  In the main flow path first circulation means, the cleaning fluid flows into the airtight structure cleaning chamber of the first cleaning container 15, and the booster pump 13 → the heater 14 → the first cleaning container 15 → the first pressure control valve 21 → the cooler 17. The gas / liquid separator 18, the condenser 11, the tank 12, and the booster pump 13 are circulated through the main line 33 in this order. The cleaning fluid circulating in the main pipe line 33 flows through the filter, and after impurities (isopropyl alcohol, toluene, dioctyl phthalate) contained therein are separated from the filter, the cleaning fluid flows out from the first cleaning container 15. Most of impurities (dirt) contained in the cleaning fluid immediately after flowing out of the first cleaning container 15 (cleaning fluid immediately after cleaning the filter) are isopropyl alcohol, toluene, and dioctyl phthalate.

When 30 minutes have elapsed from the execution of the second pressurizing means and the pressurization of the cleaning fluid is completed (after the predetermined time has elapsed since the second pressurizing means has been executed, the main flow path first circulating means is being executed. The controller 19 opens the valve mechanisms of the switching valves 41 and 42, closes the valve mechanisms of the switching valves 36 and 38, allows the cleaning fluid to flow into the sub-pipe 34, and uses the circulation pump 43 to supply the cleaning fluid to the sub-fluid. It is made to distribute | circulate for 30 minutes (3rd washing | cleaning time) from the pipe line 34 to the 2nd washing | cleaning container 16 (subchannel 2nd circulation means) (S-34). There is no particular limitation on the length of the third cleaning time , but it is necessary to match the length of the first cleaning time. In the sub-channel second circulation means, the cleaning fluid flows into the airtight structure cleaning chamber of the second cleaning container 16 and circulates through the sub-pipe 34 in the order of the second cleaning container 16 → the circulation pump 43 → the second cleaning container 16. To do. The cleaning fluid circulating through the sub-line 34 flows through the filter and separates impurities (isopropyl alcohol, toluene, dioctyl phthalate) contained therein from the filter.

  During execution of the main flow path first circulation means (substantially simultaneously with the execution of the main flow path first circulation means), a part of the cleaning fluid is sent to the gas chromatograph 44 from the sampling pipe 47 installed in the main pipe line 33. . The gas chromatograph 44 analyzes the components of impurities contained in the cleaning fluid (component analysis means) and outputs the analysis results to the controller 19 (analysis result output means). When the component analysis means is executed during the execution of the sub-flow path first circulation means, a part of the cleaning fluid is installed in the sub-line 34 during the execution of the sub-flow path first circulation means. The gas chromatograph 44 analyzes the components of impurities contained in the cleaning fluid and outputs the analysis result to the controller 19.

The controller 19 specifies the type of impurity contained in the cleaning fluid based on the analysis result output from the gas chromatograph 44, and then specifies the boiling point and saturated vapor pressure of the impurity from the type of impurity (type specifying unit). (S-35). The controller 19 stores the specified impurity type, boiling point, and saturated vapor pressure in the hard disk. As shown in FIG. 10, the specified impurities are isopropyl alcohol having a boiling point of 82 (° C.) and a saturated vapor pressure of 33 (mmHg), toluene having a boiling point of 110 (° C.) and a saturated vapor pressure of 22.5 (mmHg). Dioctyl phthalate having a boiling point of 386 (° C.) and a saturated vapor pressure of 2.28 × 10 ⁻⁷ (mmHg).

When the controller 19 specifies the type of impurity (isopropyl alcohol, toluene, dioctyl phthalate), boiling point, and saturated vapor pressure, the controller 19 first classifies the type of impurity stored in the hard disk and the first relationship between the boiling point and saturated vapor pressure (FIG. 11). Reference) is extracted. The controller 19 fits the boiling point and saturated vapor pressure of isopropyl alcohol to the first relationship, and the isopropyl alcohol is set to VVOC (highly volatile organic compound, boiling point: less than 50 (° C), saturated vapor pressure: 15 (kPa) or more). The toluene boiling point and the saturated vapor pressure are fitted to the first relationship, and the toluene is VOC (volatile organic compound, boiling point: 50 (° C.) to less than 260 (° C.), saturated vapor pressure: 10 ⁻² ( kPa) or higher). Further, the boiling point and saturated vapor pressure of dioctyl phthalate were fitted to the first relationship, and dioctyl phthalate was SVOC (semi-volatile organic compound, boiling point: 260 (° C.) to less than 400 (° C.), saturated vapor pressure: 10 ^{− 8-10} is determined to belong to ^-2 (kPa) or higher).

  Although the cleaning fluid contains impurities belonging to VVOC, VOC, and SVOC, when the controller 19 determines that the impurities belonging to VVOC are included, VVOC and SVOC are included, even though VOC and SVOC are included. The most severe operating conditions corresponding to the above are applied to the gas-liquid separator 18. Specifically, the controller 19 extracts the second relationship (see FIG. 12) of the impurity classification, the set pressure, and the set temperature from the hard disk, and the gas-liquid separation device when VVOC is detected from the second relationship. As the 18 operating conditions, the set pressure is determined to be 2 (MPa), and the set temperature is determined to be -20 (° C) (S-36).

  The controller 19 adjusts the valve mechanism of the third pressure control valve 46 to set the pressure of the cleaning fluid flowing into the gas-liquid separator 18 (the pressure of the cleaning fluid in the gas-liquid separator 18) to 2 (MPa) (set pressure). ) (Pressure adjusting means) and the temperature of the cleaning fluid flowing into the gas-liquid separator 18 (temperature of the cleaning fluid in the gas-liquid separator 18) is maintained at −20 (° C.) (set temperature) (temperature). Adjustment means) (S-37). The output of the cooler 17 is adjusted to finely adjust the temperature of the cleaning fluid flowing into the gas-liquid separator 18 (the temperature of the cleaning fluid in the gas-liquid separator 18) to −20 (° C.). The temperature and pressure of the cleaning fluid in the gas-liquid separation device 18 are measured by a temperature sensor and a pressure sensor attached to the device 18, and the measurement results are output from the sensors to the controller 19.

  When the main impurities included in the filter are toluene and dioctyl phthalate, the controller 19 determines that the impurities belonging to VOC are included, and also determines that the impurities belonging to SVOC are included. When the controller 19 determines that the impurities belonging to the VOC are included, the controller 19 applies the operating condition corresponding to the VOC to the gas-liquid separator 18 even though the SVOC is included. Specifically, the controller 19 sets the set pressure to 4 as the operating condition of the gas-liquid separator 18 when the VOC is detected from the second relationship (see FIG. 12) of the impurity classification, the set pressure, and the set temperature. (MPa) and the set temperature is determined to 5 (° C.) (S-36).

  In this case, the controller 19 adjusts the valve mechanism of the third pressure control valve 46 to set the pressure of the cleaning fluid flowing into the gas-liquid separator 18 (pressure of the cleaning fluid in the gas-liquid separator 18) to 4 (MPa). The pressure of the cleaning fluid flowing into the gas-liquid separator 18 (the temperature of the cleaning fluid in the gas-liquid separator 18) is maintained at 5 (° C.) (the set temperature). (Temperature adjusting means) (S-37). The output of the cooler 17 is adjusted to finely adjust the temperature of the cleaning fluid flowing into the gas-liquid separator 18 (the temperature of the cleaning fluid in the gas-liquid separator 18) to 5 (° C.).

  When the main impurity contained in the filter is dioctyl phthalate, the controller 19 determines that an impurity belonging to SVOC is contained. If the controller 19 determines that impurities belonging to SVOC are included, the controller 19 applies operating conditions corresponding to SVOC to the gas-liquid separator 18. Specifically, the controller 19 sets the set pressure to 6 as the operating condition of the gas-liquid separator 18 when SVOC is detected from the second relationship (see FIG. 12) of the impurity classification, the set pressure, and the set temperature. (MPa) and set temperature is determined to 22 (degreeC) (S-36).

  In this case, the controller 19 adjusts the valve mechanism of the third pressure control valve 46 to set the pressure of the cleaning fluid flowing into the gas-liquid separator 18 (pressure of the cleaning fluid in the gas-liquid separator 18) to 6 (MPa). The pressure of the cleaning fluid flowing into the gas-liquid separator 18 (the temperature of the cleaning fluid in the gas-liquid separator 18) is maintained at 22 (° C.) (the set temperature). (Temperature adjusting means) (S-37). The temperature of the cleaning fluid flowing into the gas-liquid separator 18 (the temperature of the cleaning fluid in the gas-liquid separator 18) is adjusted to 22 (° C.) by adjusting the outputs of the cooler 17 and the heater 45.

  In addition to isopropyl alcohol, impurities belonging to VVOC include methane (boiling point: −161 ° C.), formaldehyde (boiling point: −21 ° C.), methyl mercaptan (boiling point: 6 ° C.), acetaldehyde (boiling point: 20 ° C.), dichloromethane ( Boiling point: 40 ° C.). When they are detected by the gas chromatograph 44, the controller 19 applies operating conditions corresponding to VVOC to the gas-liquid separator 18.

  In addition to toluene, impurities belonging to VOC include methyl acetate (boiling point: 77 ° C), ethanol (boiling point: 78 ° C), benzene (boiling point: 80 ° C), methyl ethyl ketone (boiling point: 80 ° C), trichloroethane (boiling point: 113). ° C), xylene (boiling point: 140 ° C), limonene (boiling point: 178 ° C), L nicotine (boiling point: 247 ° C), and the like. When they are detected by the gas chromatograph 44, the controller 19 applies operating conditions corresponding to VOC to the gas-liquid separator 18.

  In addition to dioctyl phthalate, impurities belonging to SVOC include chloropyrifos (boiling point: 290 ° C.), dibutyl phthalate (boiling point: 340 ° C.), and the like. When they are detected by the gas chromatograph 20, the controller 21 applies operating conditions corresponding to SVOC to the gas-liquid separator 18. When POM (particulate organic matter: PCB, benzopyrene) having a boiling point of 400 ° C. or higher is detected by the gas chromatograph 44, the controller 21 applies the operating conditions corresponding to SVOC to the gas-liquid separator 19.

  In the gas-liquid separation device 18, the pressure of the cleaning fluid in the device 18 is maintained at a set pressure (2 MPa) so that isopropyl alcohol, toluene, and dioctyl phthalate contained in the cleaning fluid can be efficiently separated from the cleaning fluid. Then, the temperature of the cleaning fluid in the apparatus 18 is maintained at the set temperature (−20 ° C.). Therefore, isopropyl alcohol, toluene, and dioctyl phthalate contained in the cleaning fluid are reliably separated by the apparatus 18, and isopropyl alcohol, toluene, and dioctyl phthalate are recovered in the recovery device 27. The cleaning fluid from which isopropyl alcohol, toluene, and dioctyl phthalate are separated flows from the gas-liquid separator 18 into the condenser 11 and then flows into the first cleaning container 15 through the main pipe 33.

  When 30 minutes have elapsed since the execution of the main flow path first circulation means (after a predetermined time has elapsed since the execution of the main flow path first circulation means), the controller 19 releases the operating condition corresponding to the VVOC. Then, the valve mechanism of the switching valve 35 is closed, the valve opening degree of the valve mechanism of the first pressure control valve 21 is expanded, and the pressure of the cleaning fluid in the first cleaning container 15 is set for 1 hour (first decompression time). The pressure is reduced to atmospheric pressure (first pressure reducing means) (S-38). If necessary in the first decompression means, the cleaning fluid is cooled by the cooler 17 in addition to the decompression by the control valve 21.

In the first pressure reducing means, impurities contained in the cleaning fluid are separated from the cleaning fluid by the gas-liquid separator 18. Impurities separated from the cleaning fluid are recovered in the recovery device 27. After the pressure in the first cleaning container 15 returns to atmospheric pressure and the temperature in the cleaning container 15 returns to room temperature, the cleaned filter is removed from the cleaning container 15 and the next used filter is placed in the cleaning container 15. Accommodate and begin cleaning the filter. There is no particular limitation on the length of the first pressure reduction time can be arbitrarily set or change the length of the first decompression time.

When 30 minutes have elapsed since the execution of the sub-flow path second circulation means (after a predetermined time has elapsed since the execution of the sub-flow path second circulation means and when the first pressure reduction means is executed), the controller 19 Then, the valve mechanisms of the switching valves 36 and 38 are opened, the valve mechanisms of the switching valves 41 and 42 are closed, and the pressurized cleaning fluid is circulated from the sub flow path 34 to the main flow path 33 and cleaned using the boost pump 13. The fluid is circulated from the main flow path 33 to the second cleaning container 16 for 30 minutes (fourth cleaning time) (main flow path second circulation means) (S-39). There is no particular limitation on the length of the fourth cleaning time , but it is necessary to match the length of the second cleaning time.

  In the main flow path second circulation means, the cleaning fluid flows into the airtight structure cleaning chamber of the second cleaning container 16, and the booster pump 13 → the heater 14 → the second cleaning container 16 → the second pressure control valve 22 → the cooler 17. The gas / liquid separator 18, the condenser 11, the tank 12, and the booster pump 13 are circulated through the main line 33 in this order. The cleaning fluid circulating through the main line 33 flows through the filter, and after impurities (isopropyl alcohol, toluene, dioctyl phthalate) contained in the cleaning fluid are separated from the filter, the cleaning fluid flows out from the second cleaning container 16. Most of impurities (dirt) contained in the cleaning fluid immediately after flowing out of the second cleaning container 16 (cleaning fluid immediately after cleaning the filter) are isopropyl alcohol, toluene, and dioctyl phthalate.

  During the execution of the main flow path second circulation means (substantially simultaneously with the execution of the main flow path second circulation means), a part of the cleaning fluid is sent to the gas chromatograph 44 from the sampling pipe 47 installed in the main pipe line 33. . The gas chromatograph 44 analyzes the components of impurities contained in the cleaning fluid (component analysis means) and outputs the analysis results to the controller 19 (analysis result output means). When the component analysis unit is executed during the execution of the sub-channel second circulation unit, a part of the cleaning fluid is installed in the sub-channel 34 during the execution of the sub-channel second circulation unit. The gas chromatograph 44 analyzes the components of impurities contained in the cleaning fluid and outputs the analysis result to the controller 19.

  The controller 19 specifies the type of impurity contained in the cleaning fluid based on the analysis result output from the gas chromatograph 44, and then specifies the boiling point and saturated vapor pressure of the impurity from the type of impurity (type specifying unit). (S-40). The controller 19 stores the specified types of impurities (isopropyl alcohol, toluene, dioctyl phthalate), boiling point, and saturated vapor pressure in the hard disk.

  When the controller 19 specifies the type of impurity (isopropyl alcohol, toluene, dioctyl phthalate), boiling point, and saturated vapor pressure, the controller 19 first classifies the type of impurity stored in the hard disk and the first relationship between the boiling point and saturated vapor pressure (FIG. 11). Reference) is extracted. The controller 19 fits the boiling point and saturated vapor pressure of isopropyl alcohol to the first relationship, determines that isopropyl alcohol belongs to VVOC, fits the boiling point and saturated vapor pressure of toluene to the first relationship, and toluene belongs to VOC. Judge. Furthermore, the boiling point and saturated vapor pressure of dioctyl phthalate are fitted to the first relationship, and it is determined that dioctyl phthalate belongs to SVOC.

  If the controller 19 determines that impurities belonging to VVOC are included, the controller 19 applies the operating condition corresponding to VVOC to the gas-liquid separator 18. The controller 19 extracts the second relationship (see FIG. 12) of the impurity classification, the set pressure and the set temperature from the hard disk, and the operation of the gas-liquid separator 18 when VVOC is detected from the second relationship. As conditions, the set pressure is determined to be 2 (MPa), and the set temperature is determined to be -20 (° C) (S-41).

  The controller 19 adjusts the valve mechanism of the third pressure control valve 46 to set the pressure of the cleaning fluid flowing into the gas-liquid separator 18 (the pressure of the cleaning fluid in the gas-liquid separator 18) to 2 (MPa) (set pressure). ) (Pressure adjusting means) and the temperature of the cleaning fluid flowing into the gas-liquid separator 18 (temperature of the cleaning fluid in the gas-liquid separator 18) is maintained at −20 (° C.) (set temperature) (temperature). Adjustment means) (S-42). The output of the cooler 17 is adjusted to finely adjust the temperature of the cleaning fluid flowing into the gas-liquid separator 18 (the temperature of the cleaning fluid in the gas-liquid separator 18) to −20 (° C.).

  When the main impurities included in the filter are toluene and dioctyl phthalate, the controller 19 determines that the impurities belonging to VOC are included, and also determines that the impurities belonging to SVOC are included. When the controller 19 determines that the impurities belonging to the VOC are included, the controller 19 applies the operating condition corresponding to the VOC to the gas-liquid separator 18 and the gas-liquid when the VOC is detected from the second relationship (see FIG. 12). As operating conditions of the separator 18, the set pressure is determined to be 4 (MPa), and the set temperature is determined to be 5 (° C) (S-41).

  When the main impurity contained in the filter is dioctyl phthalate, the controller 19 determines that an impurity belonging to SVOC is contained. When the controller 19 determines that impurities belonging to SVOC are included, the controller 19 applies the operating condition corresponding to SVOC to the gas-liquid separator 18 and the gas-liquid when SVOC is detected from the second relationship (see FIG. 12). As operating conditions of the separator 18, the set pressure is determined to be 6 (MPa) and the set temperature is determined to be 22 (° C) (S-41).

  In the gas-liquid separation device 18, the pressure of the cleaning fluid in the device 18 is maintained at a set pressure (2 MPa) so that isopropyl alcohol, toluene, and dioctyl phthalate contained in the cleaning fluid can be efficiently separated from the cleaning fluid. Then, the temperature of the cleaning fluid in the apparatus 18 is maintained at the set temperature (−20 ° C.). Therefore, isopropyl alcohol, toluene, and dioctyl phthalate contained in the cleaning fluid are reliably separated by the apparatus 18, and isopropyl alcohol, toluene, and dioctyl phthalate are recovered in the recovery device 27. The cleaning fluid from which isopropyl alcohol, toluene, and dioctyl phthalate are separated flows from the gas-liquid separator 18 into the second cleaning container 16 through the main pipe 33.

  When 30 minutes have elapsed from the execution of the main flow path second circulation means (after the predetermined time has elapsed since the execution of the main flow path second circulation means and the first pressure increase means is being executed), the controller 19 After releasing the operating condition corresponding to VVOC, the valve mechanism of the switching valve 36 is closed, the valve opening degree of the valve mechanism of the second pressure control valve 24 is expanded, and the pressure of the cleaning fluid in the second cleaning container 16 is increased. Is reduced to atmospheric pressure during 1 hour (second decompression time) (second decompression means) (S-43). If necessary in the second decompression means, the cleaning fluid is cooled by the cooler 17 in addition to the decompression by the control valve 22.

In the second decompression means, impurities contained in the cleaning fluid are separated from the cleaning fluid by the gas-liquid separator 18. Impurities separated from the cleaning fluid are recovered in the recovery device 27. After the pressure in the second cleaning container 16 returns to atmospheric pressure and the temperature in the cleaning container 16 returns to room temperature, the cleaned filter is removed from the cleaning container 16 and the next used filter is placed in the cleaning container 16. Accommodate and begin cleaning the filter. Although the length of the second decompression time is not particularly limited, it is necessary to match the length of the first decompression time.

  When the first decompression unit and the second decompression unit are completed, the controller 19 determines whether or not the set number of cleaning cycles has been performed (S-44). When it is determined that the set number of cleaning cycles (six times) have been performed, the controller 19 stops the system 10C. If the controller 19 determines that the set number of cleaning cycles has not been performed, the controller 19 opens the valve mechanisms of the switching valves 35 and 37 after the first pressure reducing means is finished and the second pressure reducing means is being executed. The valve mechanisms of the valves 39 and 40 are closed, and the cleaning fluid is circulated through the first cleaning container 15 via the booster pump 13, and the pressure of the cleaning fluid flowing into the first cleaning container 15 is set to 30 as shown in FIG. The pressure is increased from 0 MPa to 20 MPa during the minute (first pressure increase time) (first pressure increase means) (S-30). Thereafter, the controller 19 repeats each means from step 31 (S-31).

  The controller 19 includes: first boosting means → sub-channel first circulating means → main channel first circulating means → first pressure reducing means cleaning cycle and second boosting means → sub-channel second circulating means → main channel first After repeating the total of 2 circulation means → cleaning cycle of the second decompression means 6 times, the filter cleaning is finished. The time for repeating the six washing cycles is 8 hours as shown in FIG. If cleaning is performed in one booster pump and two cleaning containers without using this system 10C, only four cleaning cycles can be repeated in 8 hours as shown in FIG. However, by using this system 10C, 6 cleaning cycles can be repeated in 8 hours.

  In this component extraction system 10C, the set pressure is determined based on the specified boiling point and the saturated vapor pressure, and the set temperature is determined based on the specified boiling point and the saturated vapor pressure. The set pressure may be determined based on one of the pressures and the set temperature may be determined based on either the specified boiling point or saturated vapor pressure. Further, although the gas chromatograph 44 is used as the component analyzer, in addition to the gas chromatograph 44, a gas chromatograph mass spectrometer, a high-speed liquid chromatograph mass spectrometer, an inductively coupled plasma mass spectrometer, a single focusing sector magnetic field mass Any of an analyzer, a double-focusing sector magnetic field mass spectrometer, a quadrupole mass spectrometer, a quadrupole ion trap mass spectrometer, and a time-of-flight mass spectrometer can be used.

  This component extraction system 10C has the following effects in addition to the effects of the system 10B shown in FIG. The component extraction system 10C adjusts the pressure of the cleaning fluid in the gas-liquid separator 18 to a set pressure suitable for the type of impurities (components), and changes the temperature of the cleaning fluid in the gas-liquid separator 18 to the types of impurities. Since the temperature is adjusted to a suitable setting temperature, the gas-liquid separation device 18 can be operated under a pressure and temperature condition suitable for the specified type of impurities, and the cleaning fluid can be efficiently utilized by utilizing the difference in vapor pressure of impurities. Impurities contained therein can be efficiently separated from the cleaning fluid. Since the component extraction system 10C operates the gas-liquid separator 18 under pressure and temperature conditions suitable for the specified impurities, it is possible to prevent the gas-liquid separator 18 from being excessively operated, and as a result, the energy efficiency of the system 10C. Can be improved.

The block diagram of the component extraction system shown as an example. The flowchart which shows an example of a washing | cleaning procedure. Diagram showing changes in cleaning fluid pressure over time The block diagram of the component extraction system shown as a reference example. The flowchart which shows an example of a washing | cleaning procedure. The figure which shows the change of the pressure of a cleaning fluid in time series. The block diagram of the component extraction system shown as another reference example. The flowchart which shows an example of a washing | cleaning procedure. The figure which shows the change of the pressure of a cleaning fluid in time series. The figure which shows an example of the kind of specified impurity, boiling point, and saturated vapor pressure. The figure which shows the 1st relationship of the classification division of an impurity, a boiling point, and saturated vapor pressure. The figure which shows the 2nd relationship of a boiling point and saturated vapor pressure, preset pressure, and preset temperature. The figure which shows the change of the pressure of the washing | cleaning fluid at the time of washing | cleaning in the case of wash | cleaning in one pressure | voltage rise pump and one washing | cleaning container. The figure which shows the change of the pressure of the washing | cleaning fluid at the time of washing | cleaning in the case of wash | cleaning in one pressurization pump and two washing containers.

DESCRIPTION OF SYMBOLS 10A Component extraction system 10B Component extraction system 11 Condenser 12 Storage tank 13 Booster pump 14 Heater 15 1st washing container 16 2nd washing container 17 Cooler 18 Gas-liquid separation apparatus 19 Controller (control apparatus)
20 pipeline (flow path)
21 1st pressure control valve 22 2nd pressure control valve 23-26 Switching valve 33 Main pipe line (main flow path)
34 Sub-channel (Sub-channel)
35 to 42 selector valve 43 circulation pump 44 gas chromatograph (component analyzer)

Claims (6)

In a component extraction system for extracting a component contained in an object contained in the hermetic container using the fluid by flowing the fluid into a hermetic container into which a supercritical or subcritical fluid flows.
The component extraction system includes a plurality of the airtight containers, a flow path for circulating the fluid connected to the airtight containers, and the fluid that is installed in the flow path upstream of the airtight containers and flows into the airtight containers. A booster pump that boosts pressure, a switching valve that is installed in the flow path to switch the flow path of the fluid to the hermetic container, and is installed in a flow path between the hermetic container and the booster pump. A gas-liquid separation device for separating components contained in the fluid from the fluid, and a control device,
The control device causes the fluid circulating in the flow path using the switching valve to flow into one airtight container through the booster pump, and flows into the one airtight container using the booster pump First boosting means for boosting the pressure to a predetermined pressure during the first boosting time, and after the first boosting time has elapsed since the execution of the first boosting means, the switching valve is used to make one airtight container First, a predetermined component is extracted from an object stored in one airtight container during a first extraction time using a supercritical or subcritical fluid after pressure increase while releasing the load of the pressure increasing pump. 1 extraction means, and a first pressure reducing means for reducing the pressure of the fluid in one of the airtight containers to atmospheric pressure during the first pressure reduction time after the first extraction time has elapsed since the execution of the first extraction means. ,
When the first extraction means is executed, the fluid circulating in the flow path using the switching valve is circulated to the other airtight container via the booster pump, and the other airtight container is used using the booster pump. A second booster that boosts the inflowing fluid to a predetermined pressure during the second booster time; and the execution of the first extractor after the second booster time has elapsed since the second booster was executed. During the second extraction time using the supercritical or subcritical fluid after the pressurization while releasing the load of the pressurizing pump on the other hermetic container using the switching valve A second extraction means for extracting a predetermined component from an object contained in the container, and after the second extraction time has elapsed since the execution of the second extraction means and during the execution of the first decompression means, vacuum to atmospheric pressure of the fluid in the other airtight container opening And a second decompression means for,
In the first pressurizing means, the fluid circulating through the flow path is circulated to one airtight container through the booster pump during the decompression by the second decompression means, and the booster pump is A component extraction system characterized in that the fluid flowing into one of the hermetic containers is pressurized to a predetermined pressure during the first pressurization time. In the component extraction system, the first is the length of the boosting time and the length of the second boosting time is the same, the length of the length and the second extraction time of the first extraction time is the same with some, component extraction system according to claim 1 and the length of the length of the first pressure-reduction time and the second decompression time are the same.   The component extraction system includes a pressure control valve that is installed in the flow path and is capable of adjusting the pressure of the fluid. In the first extraction unit, the pressure is increased after a predetermined time has elapsed since the first pressure increase unit was executed. Using the control valve, the pressure of the fluid is reduced to a predetermined pressure during the first decompression time during extraction, and the pressure control is performed after the first decompression time during extraction and after the fluid pressure is reduced. The pressure of the fluid is increased again during the first pressure increase time during extraction using the valve and the pressure increase pump, and the second extraction means performs the second pressure increase means after the predetermined time elapses after the second pressure increase means is executed. The pressure of the fluid is reduced to a predetermined pressure during the second decompression time at the time of extraction using a pressure control valve, and after the second decompression time at the time of extraction and after the pressure of the fluid is reduced, the pressure The fluid using a control valve and the booster pump Component extraction system according to claim 1 or claim 2 is again boosted during the second step-up time during the extraction pressure. In the component extraction system, the length of the first decompression time during extraction is the same as the length of the second decompression time during extraction, and the length of the first boost time during extraction and the second boost during extraction. The component extraction system according to claim 3, wherein the time length is the same.   In the component extraction system, the first pressure boosting means → the first extraction means → the component extraction cycle of the first pressure reducing means and the second pressure boosting means → the second extraction means → the component extraction cycle of the second pressure reducing means. The component extraction system according to claim 1, wherein the process is repeated a plurality of times.   The component extraction system according to claim 1, wherein the object is an object to be cleaned, and a component contained in the object is an impurity.

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