JP2004249220A - Supercritical reaction apparatus, method for recovering supercritical fluid, and method for producing electro-optical panel using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a supercritical reaction apparatus by which the recovery rate of a supercritical fluid is elevated. <P>SOLUTION: The supercritical reaction apparatus 100 has a washing vessel 14 connected to a pipe L2 for leading the supercritical fluid supplied from a pressure tank 10, a gas-liquid separation part 20 which reduces the pressure of an inflow material containing the supercritical fluid introduced with the completion of reaction treatment in the vessel 14 and separates the fluid into gas and liquid, and a change-over part 30 which leads the inflow material to the pressure tank 10 through a pipe L4 not through the gas-liquid separation part 20 after a prescribed point of time in a reaction period in the vessel 14. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a supercritical reactor, a method of recovering a supercritical fluid, and a method of manufacturing an electro-optical panel using the same.
[0002]
[Prior art]
At present, various reactors (hereinafter, referred to as supercritical reactors) for washing with a supercritical fluid, liquid separation, or liquid decomposition are used for industrial purposes. As the supercritical fluid, carbon dioxide, water, nitrous oxide, ammonia, ethanol, or the like is used. Among these, for example, by setting carbon dioxide to 31 ° C. and 7.4 MPa and water to 374 ° C. and 22 MPa, it is possible to change to a supercritical state.
In such a supercritical reactor, conventionally, a mixture of a supercritical fluid or a separated gas-liquid stored in a reaction vessel for reacting a supercritical fluid is subjected to gas and liquid separation in a gas-liquid separation tank maintained at a low pressure. Separates into liquid. In the supercritical reactor, the separated gas is supplied to a fluid supply unit that generates a supercritical fluid. Thereby, carbon dioxide, water, and the like in the supercritical fluid can be reused (for example, Patent Document 1).
[0003]
[Patent Document 1]
JP-A-10-94767
[Problems to be solved by the invention]
In the fluid recovery mechanism of such a conventional supercritical reactor, the supercritical fluid is changed into a gas in a low-pressure gas-liquid separation tank, and the gas is converted back into a supercritical fluid in a fluid supply unit. Had been reused. In such a recovery mechanism, it is not easy to collect all of the gas separated in the gas-liquid separation tank, and the gas recycling rate (recovery rate) is not so high. Furthermore, even if a certain amount of gas can be reused, it is not always efficient in terms of effective use of the supercritical fluid itself as a whole of the supercritical reactor.
[0005]
The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a supercritical reactor, a method of recovering a supercritical fluid, and a method of manufacturing an electro-optical panel using the same, in which the recovery rate of a supercritical fluid is increased. It is in.
[0006]
[Means for Solving the Problems]
(1) In order to solve the above-mentioned problems, a supercritical reactor of the present invention includes a fluid supply unit for supplying a supercritical fluid, and a reaction vessel for installing a reaction target of the supercritical fluid supplied from the fluid supply unit. A gas-liquid separation unit that lowers the pressure of an influent including a supercritical fluid that flows with the completion of the reaction process in the reaction vessel, and separates the gas and the liquid into gases and a gas separated by the gas-liquid separation unit. A first conducting means for leading to the fluid supply means, and an inflow flowing from the reaction vessel, after a predetermined time in a reaction processing period in the reaction vessel, without passing through the first conducting means to the fluid supply means. And a second conducting means for guiding.
This makes it possible to recover the supercritical fluid as it is and reuse it as compared with the case where the gas is reused.
[0007]
(2) A supercritical reactor according to another aspect of the present invention includes a fluid supply unit for supplying a supercritical fluid, and a reaction vessel for installing a reaction target of the supercritical fluid supplied from the fluid supply unit. A gas-liquid separation unit that reduces the pressure of an inflow including a supercritical fluid that flows in accordance with the completion of the reaction process in the reaction vessel, and separates the mixture into a gas and a liquid; and the gas-liquid separation unit and the fluid supply unit. A holding unit connected between the holding unit and the gas separated by the gas-liquid separation unit; and When the determination means determines that the pressure is equal to or higher than the first predetermined value, the pressure is reduced by releasing the pressure of the holding means, and the pressure is lower than the second predetermined value. If it is determined that And having a transformer means for stepping up the pressure of the holding means by directing a gas under pressure from the body supply unit.
Accordingly, the pressure in the holding means can be maintained at a predetermined low pressure state as compared with the pressure separating means, and the gas separated by the gas-liquid separating means can be collected without leakage.
[0008]
(3) Further, in a supercritical reactor of the present invention according to another aspect, a fluid supply means for supplying a supercritical fluid and a reaction target for reacting the supercritical fluid supplied from the fluid supply means are provided. A reaction vessel, gas-liquid separation means for reducing the pressure of an inflow containing a supercritical fluid which flows in with the completion of the reaction treatment in the reaction vessel, and separating the gas and liquid, the gas-liquid separation means, and the fluid supply means And a first pipe for guiding the gas separated by the gas-liquid separation means to the fluid supply means, a second pipe having one end connected to the first pipe, and a second pipe connected to the other end of the second pipe. A holding means connected to hold the gas, a first valve for opening and closing the second pipe, a first determination means for determining whether or not the pressure of the first pipe is equal to or higher than a first predetermined value; If the determination means determines that the value is equal to or greater than the first predetermined value, And having a control means for opening the first valve.
Thus, the pressure in the pipe for guiding the separated gas to the fluid supply means can be reduced, and the pressure can be maintained at a predetermined low level as compared with the gas-liquid separation unit 20.
[0009]
(4) Further, according to the present invention, in the supercritical reactor according to the above (3), the first tube is connected to the holding unit, and the gas held in the holding unit is guided to the first tube. A third valve having a second valve that opens and closes the third tube, wherein the control unit is configured to control the second valve, wherein the gas is retained in the retaining unit and the first determination unit determines that the gas is smaller than the first predetermined value. If it is determined that the difference is equal to or less than the predetermined value, the second valve is opened.
Thereby, the pressure in the pipe for guiding the separated gas to the fluid supply means can be increased to a predetermined low pressure state, and maintained in a low pressure state in which a constant pressure is maintained as compared with the gas-liquid separation unit 20. it can.
[0010]
(5) Further, according to the present invention, in the supercritical reactor according to any one of (1) to (4), the supercritical fluid supplied from the fluid supply means is supercritical carbon dioxide, The reaction object in the reaction container is an electro-optical panel, and the reaction object is washed with the supercritical fluid in the reaction container.
Thus, when the supercritical reactor of the present invention is used as a cleaning device for an electro-optical panel, a part of the supercritical fluid used for cleaning in the reaction vessel can be recovered as it is.
[0011]
(6) Further, according to the present invention, the gas of the supercritical fluid supplied by the fluid supply means for supplying the supercritical fluid is supplied after the completion of the reaction processing of the reaction target in the reaction vessel in which the reaction target is installed. A method for recovering a supercritical fluid recovered by the fluid supply means through a gas-liquid separation means that separates a gas and a liquid by reducing the pressure of an influent containing a supercritical fluid flowing from the reaction vessel, With the completion of the reaction process in the vessel, the influent including the supercritical fluid flowing from the reaction vessel is removed from the fluid without passing through the gas-liquid separation means after a predetermined time during the reaction process period in the reaction vessel. It is characterized by being led to a supply means.
[0012]
(7) According to another aspect of the present invention, a gas for a supercritical fluid supplied by a fluid supply unit for supplying a supercritical fluid is used to perform a reaction treatment of a reaction target in a reaction vessel in which the reaction target is installed. In the method for recovering a supercritical fluid recovered after completion of the above, the inflow including the supercritical fluid flowing in with the completion of the reaction treatment in the reaction vessel is reduced in pressure, separated into gas and liquid, and the separated gas is It is determined whether the pressure in the holding means, which is directly connected and connected to the pipe led to the fluid supply means and holds the gas, is equal to or higher than a first predetermined value or equal to or lower than a second predetermined value smaller than the first predetermined value. If it is determined that the pressure is equal to or higher than the first predetermined value, the pressure is reduced by releasing the pressure of the holding unit, and it is determined that the pressure is equal to or lower than the second predetermined value. If the said flow Characterized by boosting the pressure of the holding means by directing pressurized gas from the supply means.
[0013]
(8) Further, according to another aspect of the present invention, a supercritical fluid gas supplied by a fluid supply unit for supplying a supercritical fluid is subjected to a reaction treatment of a reaction target in a reaction vessel in which the reaction target is installed. A method of recovering a supercritical fluid recovered after completion of the first step, in which the pressure of the influent including the supercritical fluid flowing in with the completion of the reaction process in the reaction vessel is reduced, and separated into gas and liquid; A second step of determining whether the pressure in the first pipe through which the separated gas is led to the fluid supply means is equal to or higher than a first predetermined value; and the determination determines that the pressure is equal to or higher than the first predetermined value. Then, a first open / close valve provided on a second pipe connected at one end to the first pipe and at the other end to a holding means for holding a gas is opened, and the gas in the first pipe is guided to the holding means. It has a third step. To.
[0014]
(9) According to the present invention, in the method for recovering a supercritical fluid according to the above (8), if it is determined in the second step that the pressure is equal to or less than a second predetermined value smaller than the first predetermined value. For example, it is possible to open a second on-off valve provided on a third pipe having one end connected to the first pipe and the other end connected to the holding means, and to guide the gas held by the holding means to the first pipe. Features.
[0015]
(10) Further, according to the present invention, in the method for recovering a supercritical fluid according to any one of the above (6) to (9), the reaction object in the reaction container is an electro-optical panel, Preferably, the reaction target is washed with the supercritical fluid.
[0016]
(11) Further, the present invention is characterized in that an electro-optical panel is manufactured by using the method for collecting a supercritical fluid described in the above (10).
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0018]
<First embodiment>
The supercritical reactor 100 according to the present invention will be described with reference to FIG.
The pressure tank 10 of the supercritical reactor 100 generates supercritical carbon dioxide by increasing the pressure of liquefied carbon dioxide to a critical pressure or higher and heating it to a critical temperature or higher. The supercritical reactor 100 transfers the supercritical carbon dioxide generated in the pressure tank 10 to each of the cleaning tanks 14-1 to 14-3 in the cleaning container 14 by the pipe L1 and the pipe L2 via the pump 12. Supply. In each of the cleaning tanks 14-1 to 14-3, for example, in a cleaning step in a manufacturing process of a liquid crystal device, a liquid crystal panel having a pair of glass substrates in which liquid crystals are sealed is installed as a cleaning target. The liquid crystal attached to the liquid crystal panel is separated by the supercritical carbon dioxide.
[0019]
The supercritical reactor 100 sequentially cleans the liquid crystal panels in the cleaning tanks 14-1 to 14-3. For example, when the cleaning process is performed in the cleaning tank 14-1, the valve V1 is closed with the supply of the supercritical carbon dioxide from the pressure tank 10. When the cleaning process in the cleaning tank 14-1 is completed, the valve V1 is opened, and the supercritical carbon dioxide used for cleaning the liquid crystal panel is removed by the supercritical carbon dioxide supplied from the pressure tank 10. The mixture containing the liquid crystal deposit is led to the tube L3.
[0020]
The switching unit 30 receives, via the connection line P, an opening signal transmitted when the valve V1 is opened. Thereby, the switching unit 30 switches the path of the pipe so that the mixture passing through the pipe L3 is guided to the gas-liquid separation unit 20.
The gas-liquid separation section 20 keeps the inside at 5 MPa, and separates this mixture into a phase of gaseous carbon dioxide and a liquid crystal attached matter. The separated carbon dioxide is led to the pump 22 via the pipe L5. The pump 22 sends out the carbon dioxide to the pressure tank 10 via the pipe L6.
[0021]
Here, the switching unit 30 switches the destination where the supercritical carbon dioxide passing through the pipe L3 is guided to the pipe L4 when a predetermined time (for example, 10 minutes) elapses from the time when the opening signal is received. Thereby, the supercritical carbon dioxide is guided to the pressure tank 10 via the pipes L4 and L6.
[0022]
As described above, the supercritical reactor 100 of the present embodiment can reuse the supercritical carbon dioxide passing through the cleaning vessel 14 in the pressure tank with the separation of the mixture after the cleaning in the cleaning vessel 14. For this reason, conventionally, compared with the case where gaseous carbon dioxide is reused, the supercritical reactor 100 can directly recover the supercritical carbon dioxide supplied after the dirt is discharged, and the The generated supercritical carbon dioxide can be reused without changing its state to gas or the like.
[0023]
<Second embodiment>
Next, the supercritical reactor 200 according to the present invention will be described with reference to FIG. Note that, in FIG. 2 and subsequent figures, the description of the same reference numerals as those used in the supercritical reactor 100 of FIG. 1 will be omitted.
[0024]
The supercritical reactor 200 of the present embodiment is provided with a buffer tank 50 that is directly connected to a pipe that leads the carbon dioxide separated by the gas-liquid separation unit 20 to the pump 22. The carbon dioxide separated in the gas-liquid separation unit 20 is held in the buffer tank 50 via the pipe L5-1.
[0025]
The determination unit 52 measures the pressure in the buffer tank 50 as needed, and determines whether the pressure in the buffer tank 50 is equal to or greater than the upper limit predetermined value in a predetermined range (for example, 1 MPa to 2 MPa) in which a lower limit predetermined value and an upper limit predetermined value are defined. Is determined to be equal to or less than the lower limit predetermined value.
[0026]
The control unit 54 receives, from the determination unit 52, a determination signal that is within a predetermined range, is equal to or more than a predetermined upper limit value, or is equal to or less than a predetermined lower limit value. When receiving the determination signal indicating the upper limit predetermined value or more, the control unit 54 controls the opening of the valve V12. Thereby, the pressure inside the buffer tank 50 is released from the pipe L12. Then, when receiving the determination signal indicating that the value is within the above-described predetermined range from the determination unit 52, the control unit 54 controls the valve V12 to close.
When receiving the determination signal indicating the lower limit predetermined value or less, the control unit 54 performs the opening control of the valve V11. Thereby, pressure is obtained from the pressure tank 10 via the pipe L11. In addition, instead of the pressure tank 10, the pressure of the gas guided to the pressure tank 10 from the pump 22 via the pipe L6 may be obtained. Then, when receiving the determination signal indicating that the value is within the above-described predetermined range from the determination unit 52, the control unit 54 controls the valve V11 to close.
[0027]
As described above, the supercritical reactor 200 of the present embodiment is provided with the buffer tank 50 in order to obtain the carbon dioxide separated from the gas-liquid separation unit 20 without leakage with the separation process of the mixture after washing in the washing container 14. The pressure in the buffer tank 50 is maintained at a lower pressure than the gas-liquid separator 20. Therefore, by using the supercritical reactor 200 of the present embodiment, it is possible to solve the problem that conventionally, the carbon dioxide separated in the gas-liquid separation unit 20 cannot be sufficiently recovered and wasted.
[0028]
<Third embodiment>
Next, the supercritical reactor 300 according to the present invention will be described with reference to FIG.
In the supercritical reactor 300 of this embodiment, a buffer tank 70 is provided at each of the other ends of the pipes L21 and L22 connected to the pipe L5 between the gas-liquid separation unit 20 and the pump 22. Further, a pipe L23 whose other end communicates with the outside air is connected to the buffer tank 70. The pipe 21 is provided with a valve V21, the pipe L22 is provided with a valve V22, and the pipe L23 is provided with a valve V23.
[0029]
The determination unit 72 measures the pressure in the pipe L5 as needed, and the pressure in the pipe L5 is equal to or more than an upper limit predetermined value in a predetermined range (for example, 1 MPa to 2 MPa) in which a lower limit predetermined value and an upper limit predetermined value are determined. It is determined whether the value is equal to or less than the lower limit predetermined value.
[0030]
When the control unit 74 receives the determination signal indicating the upper limit predetermined value or more from the determination unit 72, it controls the valve V23 to open, reduces the pressure in the buffer tank 70, closes the valve V23, and then controls the valve V21. To open control. Thereby, the carbon dioxide in the pipe L5 is guided to the buffer tank 70 whose pressure has been reduced via the pipe L21. Then, when receiving the determination signal indicating that the pressure in the pipe L5 is within the above-described predetermined range from the determination unit 72, the control unit 74 controls the valve V21 to close.
Further, when receiving the determination signal indicating the lower limit predetermined value or less from the determination unit 72, the control unit 74 controls the valve V22 to open. Thereby, the carbon dioxide held in the buffer tank 70 is guided into the pipe L5 via the pipe L22. Then, when receiving the determination signal indicating that the value is within the predetermined range from the determination unit 72, the control unit 74 controls the valve V22 to close.
[0031]
As described above, the supercritical reactor 300 of the present embodiment is provided with the buffer tank 70 in order to obtain the carbon dioxide separated from the gas-liquid separation unit 20 without leakage with the separation process of the mixture after the cleaning in the cleaning container 14, The pressure in the pipe L5 for guiding carbon dioxide is maintained at a predetermined low pressure state as compared with the gas-liquid separation unit 20. By providing the buffer tank 70, the pressure in the pipe L5 can be changed to a predetermined range more quickly. By using the supercritical reactor 300 of the present embodiment, it is possible to solve the problem that conventionally, the carbon dioxide separated in the gas-liquid separation unit 20 cannot be sufficiently recovered and wasted.
[0032]
<Various modes to which the present invention is applied>
The supercritical reactors in the first to third embodiments described in the above embodiment are examples, and the present invention can take various forms without departing from the spirit thereof.
In the above-described second embodiment, the description has been given assuming that only the opening and closing of the valves V11 and V12 are controlled. However, the present invention is more detailed if the opening and closing amount is controlled by the control unit 54. Pressure adjustment can be performed.
This is the same for the third embodiment.
[0033]
Further, in the above-described first to third embodiments, supercritical carbon dioxide is used as the supercritical fluid. However, the present invention also includes a fluid such as water, nitrous oxide, ammonia, or ethanol. It can also be used.
[0034]
In the first to third embodiments described above, the supercritical reactor has been specifically described as an apparatus for cleaning a liquid crystal panel having a pair of glass substrates in which liquid crystals are sealed. In addition, the present invention can be applied to a process of manufacturing an electro-optical device such as an EL (electroluminescence) device, a plasma display device, an electrophoretic display device, a field emission display device, and an LED (light emitting diode) display device. . Further, the present invention provides a method for extracting and removing contaminants in wastewater, decomposing sludge, decomposing coal and petroleum, decomposing waste plastic, decomposing waste plastic, oils and fats from animal and plant raw materials, and fragrances, which are performed using a supercritical fluid. The present invention can also be applied to a reactor for separating and purifying medicinal components, removing pesticides in food extracts such as ginseng, and removing unreacted monomers from polymers.
[Brief description of the drawings]
FIG. 1 is a block diagram of a supercritical reactor according to a first embodiment.
FIG. 2 is a block diagram of a supercritical reactor according to a second embodiment.
FIG. 3 is a block diagram of a supercritical reactor according to a third embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Pressure tank, 12 ... Pump, 14 ... Cleaning container, 20 ... Gas-liquid separation part, 30 ... Switching part, 50, 70 ... Buffer tank, 52, 72 ... Judgment part, 54, 74 ... Control part, L1-L6 , L11, L12, L21 to L23 ... tubes, V1 to V3, V11, V12, V21 to V23 ... valves, 100, 200, 300 ... supercritical reactors.

Claims (11)

Fluid supply means for supplying a supercritical fluid,
A reaction vessel in which a reaction target of a supercritical fluid supplied from the fluid supply unit is installed,
Gas-liquid separation means for lowering the pressure of the influent including the supercritical fluid flowing in with the completion of the reaction treatment in the reaction vessel, and separating the gas and the liquid,
First conducting means for guiding the gas separated by the gas-liquid separating means to the fluid supply means,
A second conducting means for guiding the inflow from the reaction vessel to the fluid supply means without passing through the first conducting means after a predetermined time during a reaction processing period in the reaction vessel. Supercritical reactor. Fluid supply means for supplying a supercritical fluid,
A reaction vessel in which a reaction target of a supercritical fluid supplied from the fluid supply unit is installed,
Gas-liquid separation means for lowering the pressure of the influent including the supercritical fluid flowing in with the completion of the reaction treatment in the reaction vessel, and separating the gas and the liquid,
Holding means connected between the gas-liquid separation means and the fluid supply means, for holding the gas separated by the gas-liquid separation means,
Determining means for determining whether the pressure of the holding means is equal to or greater than a first predetermined value or equal to or less than a second predetermined value smaller than the first predetermined value;
If the determination means determines that the pressure is equal to or higher than the first predetermined value, the pressure is reduced by releasing the pressure of the holding means, and if it is determined that the pressure is equal to or lower than the second predetermined value. A pressure changing means for increasing the pressure of the holding means by introducing a pressurized gas from the fluid supply means. Fluid supply means for supplying a supercritical fluid,
A reaction vessel for installing a reaction target for reacting a supercritical fluid supplied from the fluid supply means,
Gas-liquid separation means for lowering the pressure of the influent including the supercritical fluid flowing in with the completion of the reaction treatment in the reaction vessel, and separating the gas and the liquid,
A first pipe that connects the gas-liquid separation unit and the fluid supply unit, and guides the gas separated by the gas-liquid separation unit to the fluid supply unit;
A second tube having one end connected to the first tube;
Holding means connected to the other end of the second pipe for holding gas;
A first valve for opening and closing the second pipe;
First determining means for determining whether or not the pressure of the first pipe is equal to or higher than a first predetermined value;
A control means for opening the first valve when the first determination means determines that the value is equal to or greater than the first predetermined value. The supercritical reactor according to claim 3,
A third tube that connects the first tube and the holding unit, and guides the gas held by the holding unit to the first tube;
A second valve for opening and closing the third pipe.
The control means may open the second valve if the gas is held in the holding means and the first determination means determines that the gas is equal to or less than a second predetermined value smaller than the first predetermined value. Supercritical reactor characterized. The supercritical reactor according to any one of claims 1 to 4,
The supercritical fluid supplied from the fluid supply means is supercritical carbon dioxide,
The reaction object in the reaction vessel is an electro-optical panel,
The supercritical reactor, wherein the reaction target is washed with the supercritical fluid in the reaction vessel. The gas of the supercritical fluid supplied by the fluid supply means for supplying the supercritical fluid, the supercritical fluid flowing from the reaction vessel after the completion of the reaction treatment of the reaction target in the reaction vessel in which the reaction target is installed Through a gas-liquid separation unit that separates into a gas and a liquid by reducing the pressure of the influent containing, in the method of recovering the supercritical fluid recovered by the fluid supply unit,
With the completion of the reaction process in the reaction vessel, the inflow including the supercritical fluid flowing from the reaction vessel, after a predetermined point in the reaction processing period in the reaction vessel, without passing through the gas-liquid separation means, A method for recovering a supercritical fluid, wherein the method is directed to the fluid supply unit. In the method for recovering a supercritical fluid, the gas of the supercritical fluid supplied by the fluid supply means for supplying the supercritical fluid is recovered after completion of the reaction processing of the reaction target in the reaction vessel in which the reaction target is installed. ,
The influent including the supercritical fluid flowing in with the completion of the reaction treatment in the reaction vessel is depressurized, separated into gas and liquid,
The separated gas is directly connected and connected to a pipe led to the fluid supply means, and the pressure in the holding means for holding the gas is equal to or more than a first predetermined value or equal to or less than a second predetermined value smaller than the first predetermined value. Judge whether there is
If it is determined that the pressure is equal to or higher than the first predetermined value, the pressure is reduced by releasing the pressure of the holding means, and it is determined that the pressure is equal to or lower than the second predetermined value. Then, a method of recovering a supercritical fluid, wherein the pressure of the holding means is increased by introducing a pressurized gas from the fluid supply means. In the method for recovering a supercritical fluid, the gas of the supercritical fluid supplied by the fluid supply means for supplying the supercritical fluid is recovered after completion of the reaction processing of the reaction target in the reaction vessel in which the reaction target is installed. ,
A first step of reducing the pressure of the influent including the supercritical fluid flowing in with the completion of the reaction treatment in the reaction vessel and separating the influent into gas and liquid;
A second step of determining whether the pressure in the first pipe through which the separated gas is led to the fluid supply means is equal to or higher than a first predetermined value;
If it is determined by the determination that the pressure is equal to or higher than the first predetermined value, a first opening / closing provided in a second pipe connected to a holding means for holding one end at one end and the gas at the other end. Opening the valve and guiding the gas in the first pipe to the holding means. The method for recovering a supercritical fluid according to claim 8,
If it is determined in the second step that the pressure is equal to or less than a second predetermined value smaller than the first predetermined value, one end is provided in the first tube and the other end is provided in a third tube connected to the holding means. A method for recovering a supercritical fluid, characterized in that a second on-off valve provided is opened, and the gas held in the holding means is led to the first pipe. The method for recovering a supercritical fluid according to any one of claims 6 to 9,
The reaction object in the reaction vessel is an electro-optical panel,
The method for recovering a supercritical fluid, wherein the reaction target is washed with the supercritical fluid in the reaction vessel. A method for manufacturing an electro-optical panel, comprising using the method for recovering a supercritical fluid according to claim 10.

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