JP5160751B2 - フラッシュメモリ素子及びその製造方法 - Google Patents
フラッシュメモリ素子及びその製造方法 Download PDFInfo
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- JP5160751B2 JP5160751B2 JP2006165674A JP2006165674A JP5160751B2 JP 5160751 B2 JP5160751 B2 JP 5160751B2 JP 2006165674 A JP2006165674 A JP 2006165674A JP 2006165674 A JP2006165674 A JP 2006165674A JP 5160751 B2 JP5160751 B2 JP 5160751B2
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- Prior art keywords
- film
- flash memory
- memory device
- manufacturing
- zaz
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- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 238000000034 method Methods 0.000 claims description 30
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 238000005229 chemical vapour deposition Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 6
- 230000003647 oxidation Effects 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 6
- 229920005591 polysilicon Polymers 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 238000000231 atomic layer deposition Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 description 12
- 238000010168 coupling process Methods 0.000 description 12
- 238000005859 coupling reaction Methods 0.000 description 12
- 230000007423 decrease Effects 0.000 description 4
- 238000013500 data storage Methods 0.000 description 3
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
Description
11:トンネル酸化膜
12:第1導電膜
13:第1酸化膜
14:ZAZ膜
14a,14c:第1、第2 ZrO2膜
14b:Al2O3膜
15:第2酸化膜
16:第2導電膜
Claims (17)
- 半導体基板上に積層されるトンネル誘電膜及びフローティングゲート、ゲート誘電膜及びコントロールゲートを含むフラッシュメモリ素子において、
前記ゲート誘電膜が酸化膜/ZAZ(ZrO2-Al2O3-ZrO2)膜/酸化膜の積層膜で構成されることを特徴とするフラッシュメモリ素子。 - 前記酸化膜は、高温酸化膜であることを特徴とする請求項1に記載のフラッシュメモリ素子。
- 前記ゲート誘電膜が、酸化膜/ZAZ膜/酸化膜の積層構造の場合、前記酸化膜のそれぞれの厚さは30〜60Åであることを特徴とする請求項1に記載のフラッシュメモリ素子。
- 前記ZAZ(ZrO2-Al2O3-ZrO2)膜の膜厚は、40〜100Åであることを特徴とする請求項1に記載のフラッシュメモリ素子。
- 前記ZAZ膜中、Al2O3膜の厚さは4〜5Åであることを特徴とする請求項4に記載のフラッシュメモリ素子。
- 半導体基板上にトンネル誘電膜とフローティングゲート用導電膜を形成する段階と、
前記フローティングゲート用導電膜上に第1酸化膜とZAZ(ZrO2-Al2O3-ZrO2)膜を形成する段階と、
熱処理工程を実施する段階と、
前記ZAZ膜上に第2酸化膜を形成して前記第1酸化膜と前記ZAZ膜と第2酸化膜からなるゲート誘電膜を形成する段階と、
前記ゲート誘電膜上にコントロールゲート用導電膜を形成する段階を含むフラッシュメモリ素子の製造方法。 - 前記フローティングゲート用導電膜を500〜2000Åの厚さで形成することを特徴とする請求項6に記載のフラッシュメモリ素子の製造方法。
- 前記フローティングゲート用導電膜は、化学気相蒸着法でポリシリコン膜を蒸着して形成することを特徴とする請求項6に記載のフラッシュメモリ素子の製造方法。
- 前記熱処理工程を酸素プラズマまたはN2Oガスの雰囲気で実施することを特徴とする請求項6に記載のフラッシュメモリ素子の製造方法。
- 前記熱処理工程を酸素プラズマ雰囲気で実施する場合、パワーは100〜1000W、工程温度は100〜400℃、工程時間は10〜60秒であることを特徴とする請求項9に記載のフラッシュメモリ素子の製造方法。
- 前記熱処理工程をN2Oガスの雰囲気で実施する場合、工程温度は800〜900℃、工程時間は10〜30分であることを特徴とする請求項9に記載のフラッシュメモリ素子の製造方法。
- 前記第1酸化膜と第2酸化膜は、高温酸化工程を用いて形成することを特徴とする請求項6に記載のフラッシュメモリ素子の製造方法。
- 前記ZAZ膜は、原子層蒸着法を用いてZrO2膜とAl2O3膜とZrO2膜を順に蒸着して形成することを特徴とする請求項6に記載のフラッシュメモリ素子の製造方法。
- 前記ZAZ膜を40〜100Åの厚さで形成することを特徴とする請求項6に記載のフラッシュメモリ素子の製造方法。
- 前記ZAZ膜のうち、Al2O3膜は4〜5Åの厚さで形成することを特徴とする請求項6に記載のフラッシュメモリ素子の製造方法。
- 前記コントロールゲート用導電膜を500〜2000Åの厚さで形成することを特徴とする請求項6に記載のフラッシュメモリ素子の製造方法
- 前記コントロールゲート用導電膜を化学気相蒸着法によりポリシリコン膜を蒸着して形成することを特徴とする請求項6に記載のフラッシュメモリ素子の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2005-0133076 | 2005-12-29 | ||
KR1020050133076A KR100751665B1 (ko) | 2005-12-29 | 2005-12-29 | 플래쉬 메모리 소자 및 그의 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007184523A JP2007184523A (ja) | 2007-07-19 |
JP5160751B2 true JP5160751B2 (ja) | 2013-03-13 |
Family
ID=38196774
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006165674A Expired - Fee Related JP5160751B2 (ja) | 2005-12-29 | 2006-06-15 | フラッシュメモリ素子及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US7238574B1 (ja) |
JP (1) | JP5160751B2 (ja) |
KR (1) | KR100751665B1 (ja) |
CN (1) | CN100517722C (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MX2007000973A (es) | 2004-07-27 | 2007-04-16 | Univ California | Celulas hospedadoras modificadas geneticamente y su uso para producir compuestos isoprenoides. |
KR100771807B1 (ko) * | 2005-12-29 | 2007-10-30 | 주식회사 하이닉스반도체 | 플래쉬 메모리 소자 및 그의 제조방법 |
JP4921837B2 (ja) | 2006-04-14 | 2012-04-25 | 株式会社東芝 | 半導体装置の製造方法 |
KR100717770B1 (ko) * | 2006-04-24 | 2007-05-11 | 주식회사 하이닉스반도체 | 지르코늄산화막을 포함하는 적층구조의 유전막을 구비한플래시메모리소자 및 그의 제조 방법 |
US20090001443A1 (en) * | 2007-06-29 | 2009-01-01 | Intel Corporation | Non-volatile memory cell with multi-layer blocking dielectric |
CN103474476B (zh) * | 2012-06-06 | 2015-12-02 | 旺宏电子股份有限公司 | 非挥发性记忆体及其制作方法 |
KR102494126B1 (ko) | 2016-04-26 | 2023-02-02 | 삼성전자주식회사 | 커패시터를 포함하는 반도체 소자 |
KR102372096B1 (ko) * | 2017-03-17 | 2022-03-17 | 에스케이하이닉스 주식회사 | 반도체장치 및 그 제조 방법 |
US10283516B1 (en) * | 2018-06-27 | 2019-05-07 | International Business Machines Corporation | Stacked nanosheet field effect transistor floating-gate EEPROM cell and array |
Family Cites Families (7)
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US6844604B2 (en) * | 2001-02-02 | 2005-01-18 | Samsung Electronics Co., Ltd. | Dielectric layer for semiconductor device and method of manufacturing the same |
TW490748B (en) * | 2001-05-04 | 2002-06-11 | Macronix Int Co Ltd | Flash memory structure |
US6790755B2 (en) * | 2001-12-27 | 2004-09-14 | Advanced Micro Devices, Inc. | Preparation of stack high-K gate dielectrics with nitrided layer |
KR100575357B1 (ko) * | 2003-12-31 | 2006-05-03 | 동부일렉트로닉스 주식회사 | 플래쉬 메모리 소자 및 이를 이용한 프로그램 및 소거 방법 |
JP2006005006A (ja) * | 2004-06-15 | 2006-01-05 | Toshiba Corp | 不揮発性半導体メモリ装置 |
KR100593645B1 (ko) * | 2004-10-28 | 2006-06-28 | 삼성전자주식회사 | 반도체 장치의 제조 방법 |
KR100724566B1 (ko) * | 2005-07-29 | 2007-06-04 | 삼성전자주식회사 | 다층구조의 게이트 층간 유전막을 갖는 플래시 메모리 소자및 그 제조방법들 |
-
2005
- 2005-12-29 KR KR1020050133076A patent/KR100751665B1/ko not_active IP Right Cessation
-
2006
- 2006-06-15 JP JP2006165674A patent/JP5160751B2/ja not_active Expired - Fee Related
- 2006-06-30 US US11/479,051 patent/US7238574B1/en not_active Expired - Fee Related
- 2006-08-01 CN CNB2006101082146A patent/CN100517722C/zh not_active Expired - Fee Related
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2007
- 2007-05-19 US US11/751,013 patent/US7608885B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20070278561A1 (en) | 2007-12-06 |
CN1992288A (zh) | 2007-07-04 |
US20070166921A1 (en) | 2007-07-19 |
US7608885B2 (en) | 2009-10-27 |
JP2007184523A (ja) | 2007-07-19 |
CN100517722C (zh) | 2009-07-22 |
KR100751665B1 (ko) | 2007-08-23 |
US7238574B1 (en) | 2007-07-03 |
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