JP5159255B2 - Optical frequency domain reflection measurement method and apparatus - Google Patents

Optical frequency domain reflection measurement method and apparatus Download PDF

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JP5159255B2
JP5159255B2 JP2007286567A JP2007286567A JP5159255B2 JP 5159255 B2 JP5159255 B2 JP 5159255B2 JP 2007286567 A JP2007286567 A JP 2007286567A JP 2007286567 A JP2007286567 A JP 2007286567A JP 5159255 B2 JP5159255 B2 JP 5159255B2
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優介 古敷谷
文彦 伊藤
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Nippon Telegraph and Telephone Corp
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Description

本発明は、光部品や光伝送路において、反射光や後方散乱光を高空間分解能で測定する光周波数領域反射測定方法とこの方法を用いた測定装置に関する。   The present invention relates to an optical frequency domain reflection measurement method for measuring reflected light and backscattered light with high spatial resolution in an optical component or an optical transmission line, and a measurement apparatus using this method.

高空間分解能にて光部品や光伝送路からの反射光および後方散乱光を測定することが可能な手法として、コヒーレント光を用いた光周波数領域反射測定(C−OFDR)法がある。この光周波数領域反射測定方法は、被測定物に周波数掃引されたコヒーレント光を入射し、被測定物からの反射光および後方散乱光と予め分岐された参照光とを合波(コヒーレント検波)し、これによって得られた干渉ビート信号を周波数解析することで、被測定物内の任意の位置での反射光および後方散乱光強度を得て、被測定物の損失分布や故障点の特定を可能にする技術である。   An optical frequency domain reflection measurement (C-OFDR) method using coherent light is a method capable of measuring reflected light and backscattered light from an optical component or an optical transmission line with high spatial resolution. In this optical frequency domain reflection measurement method, frequency-swept coherent light is incident on the object to be measured, and the reflected light and backscattered light from the object to be measured are combined with the previously branched reference light (coherent detection). By analyzing the frequency of the interference beat signal obtained in this way, it is possible to obtain the reflected light and backscattered light intensity at any position within the measured object, and to specify the loss distribution and failure point of the measured object Technology.

上記C−OFDR法を実現する従来技術として、非特許文献1、特許文献1に、コヒーレント光源の周波数掃引を外部変調器によって生じる1次変調側波帯を用いて行い、その際に生じる高次変調側波帯でのビート信号と1次変調側波帯によるビート信号とを遅延手段の挿入によって周波数軸上で分離する方法が示されている。   As conventional techniques for realizing the C-OFDR method, Non-Patent Document 1 and Patent Document 1 perform frequency sweep of a coherent light source by using a primary modulation sideband generated by an external modulator, and a higher order generated at that time. A method is shown in which a beat signal in the modulation sideband and a beat signal in the primary modulation sideband are separated on the frequency axis by inserting delay means.

しかしながら、C−OFDR法においては、非特許文献2に示されるように、被測定物内にフレネル反射等の強反射点が存在する場合、その強反射点での位相雑音によって反射点近傍の情報が埋もれてしまい、その情報が得られないという問題があった。   However, in the C-OFDR method, as shown in Non-Patent Document 2, when a strong reflection point such as Fresnel reflection exists in the object to be measured, information in the vicinity of the reflection point is caused by phase noise at the strong reflection point. There was a problem that the information was not obtained.

辻、清水、堀口、小山田、信学技報OPE94-117、LQE94-96(1995-02)Tsuji, Shimizu, Horiguchi, Koyamada, IEICE Technical Report OPE94-117, LQE94-96 (1995-02)

S. Venkatesh and W. V. Sorin, J. Lightwave Techol., Vol. 11, No. 10, pp. 1694-1700, 1993S. Venkatesh and W. V. Sorin, J. Lightwave Techol., Vol. 11, No. 10, pp. 1694-1700, 1993

特開平08−145846号公報(特許第3243774号)JP 08-145846 A (Patent No. 3243774)

以上述べたように、従来の光周波数領域反射測定方法では、被測定物内にフレネル反射等の強反射点が存在する場合、その強反射点での位相雑音によって反射点近傍の情報が埋もれてしまい、その情報が得られないという問題があった。
本発明は、上記課題を解決するためになされたものであり、測定される任意の位置からの反射光強度を調節することができ、強反射点近傍においても高分解能な測定を行うことのできる光周波数領域反射測定方法および装置を提供することを目的とする。
As described above, in the conventional optical frequency domain reflection measurement method, when a strong reflection point such as Fresnel reflection exists in the object to be measured, information near the reflection point is buried by phase noise at the strong reflection point. Therefore, there was a problem that the information could not be obtained.
The present invention has been made to solve the above problems, and can adjust the intensity of reflected light from an arbitrary position to be measured, and can perform high-resolution measurement even in the vicinity of a strong reflection point. An object of the present invention is to provide an optical frequency domain reflection measurement method and apparatus.

上記目的を達成するために本発明に係る光周波数領域反射測定方法は、以下のように構成される。
(1)コヒーレント光に光変調を施して変調側波帯を発生させ、この変調側波帯を時間に対して線形に周波数掃引した伝送光を2分岐して一方を参照光、他方を信号光とし、前記信号光を被測定物に入射し、当該被測定物内の任意の位置で反射または後方散乱された信号光と前記参照光を合波させて干渉ビート信号を生じさせ、これを受光して周波数解析することで、前記被測定物内の任意の位置における反射率、損失の少なくともいずれかを測定する光周波数領域測定方法において、前記光変調として両側波帯変調を施し、前記信号光及び参照光の少なくともいずれか一方の光路中で遅延時間を調節することを特徴とする。
In order to achieve the above object, an optical frequency domain reflection measurement method according to the present invention is configured as follows.
(1) Optical modulation is performed on the coherent light to generate a modulation sideband, and the transmission light obtained by sweeping the frequency of the modulation sideband linearly with respect to time is branched into two, one for reference light and the other for signal light The signal light is incident on the object to be measured, and the signal light reflected or backscattered at an arbitrary position in the object to be measured and the reference light are combined to generate an interference beat signal, which is received. In the optical frequency domain measurement method for measuring at least one of reflectance and loss at an arbitrary position in the device under test by performing frequency analysis, the signal light is subjected to double sideband modulation as the optical modulation. And a delay time is adjusted in at least one of the optical paths of the reference light.

(2)(1)において、前記遅延時間の調節は、前記両側波帯変調にて生じた+N次と−N次変調側波帯(Nは自然数)のビート信号波形間の重ね合わせ状態を変化させることで、前記被測定物内の任意の位置からの反射光強度を変化させることを特徴とする。   (2) In (1), the adjustment of the delay time changes the superposition state between the beat signal waveforms in the + Nth order and −Nth order modulation sidebands (N is a natural number) generated by the double sideband modulation. By doing so, the reflected light intensity from an arbitrary position in the object to be measured is changed.

また、この発明に係る光周波数領域反射測定装置は、以下のように構成される。
(3)コヒーレント光源と、前記コヒーレント光源から出力されるコヒーレント光を入射してその両側に変調側波帯を発生させる光変調手段と、前記光変調手段に対して前記両側変調側波帯を時間軸上で線形に周波数掃引する周波数掃引手段と、前記光変調手段の出力光を2分岐して一方を参照光、他方を信号光とする光分岐器と、前記信号光を被測定部に入射し当該被測定物の任意の位置で反射または後方散乱された信号光を被測定光として取り出す被測定光抽出手段と、前記被測定光と前記参照光を合波させて干渉ビート信号光を生じさせる光合波器と、前記光合波器で得られる干渉ビート信号光を受光して電気信号として出力する光受信器と、前記光受信器で得られる干渉ビート信号を周波数解析して前記被測定物内の任意の位置における反射率、損失の少なくともいずれかを測定する周波数解析装置と、前記参照光、信号光の少なくともいずれか一方の遅延時間を調整する可変遅延手段とを具備することを特徴とする。
The optical frequency domain reflection measuring apparatus according to the present invention is configured as follows.
(3) a coherent light source, a light modulating unit that receives coherent light output from the coherent light source and generates modulation sidebands on both sides thereof, and sets both side modulation sidebands to the light modulating unit over time. Frequency sweeping means for linearly sweeping the frequency on the axis, an optical splitter that splits the output light of the optical modulation means into two parts, one of which is the reference light, and the other is the signal light, and the signal light is incident on the part to be measured Then, measured light extraction means for extracting signal light reflected or backscattered at an arbitrary position of the measured object as measured light, and combining the measured light and the reference light to generate interference beat signal light An optical multiplexer for receiving, an optical receiver for receiving an interference beat signal light obtained by the optical multiplexer and outputting it as an electrical signal, and a frequency analysis of the interference beat signal obtained by the optical receiver for measuring the object to be measured. In any position within Reflectivity that, characterized by comprising a frequency analyzer for measuring at least one of loss, the reference light, and a variable delay means for adjusting one of the delay time at least one of the signal light.

(4)(3)において、前記可変遅延手段は、前記両側波帯変調にて生じた+N次と−N次変調側波帯(Nは自然数)の前記光合成器における干渉ビート信号波形間の重ね合わせ状態を変化させることで、前記被測定物内の任意の位置からの反射光強度を変化させることを特徴とする。   (4) In (3), the variable delay means overlaps the interference beat signal waveforms in the optical combiner in the + Nth order and −Nth order modulation sidebands (N is a natural number) generated by the double sideband modulation. The reflected light intensity from an arbitrary position in the object to be measured is changed by changing the alignment state.

(5)(3)において、前記光変調手段は、搬送波抑圧型の両側波帯変調器(DSB−SC変調器)であることを特徴とする。
(6)(3)において、前記光変調手段は、前記コヒーレント光に両側波帯変調を施す両側波帯変調器(DSB変調器)と、前記被測定物の直前に配置される遅延ファイバとを備えることを特徴とする。
(5) In (3), the optical modulation means is a carrier wave suppression type double sideband modulator (DSB-SC modulator).
(6) In (3), the optical modulation means includes a double-sideband modulator (DSB modulator) that performs double-sideband modulation on the coherent light, and a delay fiber disposed immediately before the object to be measured. It is characterized by providing.

すなわち、上記構成による光周波数領域反射測定方法及び装置では、コヒーレント光を用いて光周波数領域反射測定(C−OFDR)を行う場合に、搬送波抑圧型両側波帯(DSB−SC)変調器を用いてコヒーレント光源からの出力光の周波数を掃引し、かつ信号光中の参照光の光路中の少なくとも一方に遅延時間を付加し、その遅延時間を調節することで測定される強反射点の反射光強度を減衰させて、位相雑音レベルを低下させ、この状態で再度測定を実施する。   That is, in the optical frequency domain reflection measurement method and apparatus configured as described above, when performing optical frequency domain reflection measurement (C-OFDR) using coherent light, a carrier-suppressed double sideband (DSB-SC) modulator is used. The reflected light of the strong reflection point measured by sweeping the frequency of the output light from the coherent light source and adding a delay time to at least one of the optical paths of the reference light in the signal light and adjusting the delay time The intensity is attenuated to reduce the phase noise level, and the measurement is performed again in this state.

要するに本発明によれば、測定される任意の位置からの反射光強度を調節することができ、強反射点近傍においても高分解能な測定を行うことのできる光周波数領域反射測定方法および装置を提供することができる。   In short, according to the present invention, there is provided an optical frequency domain reflection measurement method and apparatus capable of adjusting the intensity of reflected light from an arbitrary position to be measured and capable of performing high-resolution measurement even in the vicinity of a strong reflection point. can do.

以下、図面を参照して本発明の実施の形態を詳細に説明する。
(第1の実施形態)
図1は、本発明に係る光周波数領域反射測定方法に基づく測定装置の第1の実施形態を示すブロック構成図である。図1において、コヒーレント光源11から出力されるコヒーレント光はDSB−SC(搬送波抑圧型両側波帯)変調器12に入力される。このDSB−SC変調器12は、図2に示すように、駆動回路13から出力されるRF信号によって、コヒーレント光の両側に+N次と−N次変調側波帯(Nは自然数)を生じさせるもので、駆動回路13においてRF信号周波数を掃引することで、DSB−SC変調器12から出力される変調側波帯の光周波数が掃引される。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(First embodiment)
FIG. 1 is a block configuration diagram showing a first embodiment of a measuring apparatus based on an optical frequency domain reflection measuring method according to the present invention. In FIG. 1, coherent light output from a coherent light source 11 is input to a DSB-SC (carrier wave suppression double sideband) modulator 12. As shown in FIG. 2, the DSB-SC modulator 12 generates + N-order and −N-order modulation sidebands (N is a natural number) on both sides of coherent light by an RF signal output from the drive circuit 13. Therefore, by sweeping the RF signal frequency in the drive circuit 13, the optical frequency of the modulation sideband output from the DSB-SC modulator 12 is swept.

尚、上記DSB−SC変調器12は、N=2以上の側波帯および搬送波を20dB以上抑圧することができるため、ここでは無視することができる。
このDSB−SC変調器12の出力光は第1の光方向性結合器14によって2分岐され、一方は信号光として第2の光方向性結合器15を介して被測定物16に入射され、他方は参照光として出力される。上記被測定物16内で反射または後方散乱された信号光は第2の光方向性結合器15により取り出され、参照光と共にそれぞれ可変遅延器17,18を介して第3の光方向性結合器19に送られ、ここで参照光と合波された後、光受信器20によって受信検波される。
The DSB-SC modulator 12 can suppress sidebands and carrier waves of N = 2 or more, and can be ignored here because it can suppress 20 dB or more.
The output light of the DSB-SC modulator 12 is branched into two by the first optical directional coupler 14, and one of them is incident on the device under test 16 via the second optical directional coupler 15 as signal light, The other is output as reference light. The signal light reflected or backscattered in the device under test 16 is taken out by the second optical directional coupler 15, and together with the reference light, the third optical directional coupler is passed through the variable delay devices 17 and 18, respectively. After being combined with the reference light, it is received and detected by the optical receiver 20.

このように信号光と参照光とを合波すると、その干渉によってビート信号光が発生する。この干渉ビート信号光は光受信器20で受信検波され、その検波出力の干渉ビート信号はローパスフィルタ21で不要な周波数成分が除去された後、周波数解析装置22によって周波数解析され、被測定物16内の各位置からの反射光および後方散乱光強度分布が測定される。   When the signal light and the reference light are combined in this way, beat signal light is generated due to the interference. The interference beat signal light is received and detected by the optical receiver 20, and the interference beat signal of the detection output is subjected to frequency analysis by the frequency analysis device 22 after unnecessary frequency components are removed by the low-pass filter 21, and the device under test 16 The intensity of the reflected light and the backscattered light from each position are measured.

この時、図3(a)に示すように、被測定物16内の反射が弱い場合には、反射点からの反射光が信号光として取り出すことができるが、図3(b)に示すように、被測定物16内に強反射点が存在すると、その点の近傍における反射光は、強反射点からの反射光が持つ位相雑音によって覆い隠されてしまう。そこで、測定結果に強反射点が観測された場合は、参照光の光路または信号光の光路中に挿入された可変遅延器17,18によって参照光及び信号光間の遅延時間を調節して、測定される強反射点の反射光強度を減衰させて位相雑音レベルを低下させるようにして、再度測定を実施する。   At this time, as shown in FIG. 3A, when the reflection in the DUT 16 is weak, the reflected light from the reflection point can be taken out as signal light, but as shown in FIG. In addition, when there is a strong reflection point in the DUT 16, the reflected light in the vicinity of the point is obscured by the phase noise of the reflected light from the strong reflection point. Therefore, when a strong reflection point is observed in the measurement result, the delay time between the reference light and the signal light is adjusted by the variable delay devices 17 and 18 inserted in the optical path of the reference light or the optical path of the signal light, The measurement is performed again by attenuating the reflected light intensity of the strong reflection point to be measured to reduce the phase noise level.

ここからは、上記の反射光強度低減の原理について定量的に説明する。
DSB−SC変調後の光源スペクトルを図4に示すようなモデルで考える。図4において、+1次側波帯及び−1次側波帯の周波数f1(t)、f2(t)は以下のように表される。
From here, the principle of the reflected light intensity reduction will be described quantitatively.
A light source spectrum after DSB-SC modulation is considered using a model as shown in FIG. In FIG. 4, the frequencies f 1 (t) and f 2 (t) of the + 1st order sideband and the −1st order sideband are expressed as follows.

Figure 0005159255
ここで、f0はコヒーレント光源の中心周波数、fmは駆動回路13の初期出力RF信号周波数、γは周波数掃引速度であり、周波数掃引ΔFおよび周波数掃引時間Tswpを用いてγ=ΔF/Tswpと表される。
(1)式を用いると、+1次および−1次側波帯の電場E1(t)、E2(t)はそれぞれ以下のようになる。
Figure 0005159255
Here, f 0 is the center frequency of the coherent light source, f m is the initial output RF signal frequency of the drive circuit 13, and γ is the frequency sweep speed, and γ = ΔF / T using the frequency sweep ΔF and the frequency sweep time T swp. Expressed as swp .
Using equation (1), the electric fields E 1 (t) and E 2 (t) of the + 1st order and −1st order sidebands are as follows.

Figure 0005159255
ここで、E0は電界振幅である。この電場に対して時間τだけ遅延した電場(これは、信号光の電場を意味する)は以下のように表される。
Figure 0005159255
Here, E 0 is the electric field amplitude. An electric field delayed by time τ with respect to this electric field (which means an electric field of signal light) is expressed as follows.

Figure 0005159255
DSB−SC変調においては、(2)式及び(3)式に表されるような電場が存在し、これらのビート信号によって生じる光電流は以下のように表される。
Figure 0005159255
In DSB-SC modulation, there is an electric field represented by the equations (2) and (3), and the photocurrent generated by these beat signals is represented as follows.

Figure 0005159255
1(t)及びE2(t−τ)間、E2(t)及びE1(t−τ)間で生じるビート信号は、その周波数が(4)式で生じるビート信号の周波数と比較してはるかに大きいため、ローパスフィルタ21にて除去することができるので、ここでは考慮する必要はない。
Figure 0005159255
The beat signal generated between E 1 (t) and E 2 (t−τ) and between E 2 (t) and E 1 (t−τ) is compared with the frequency of the beat signal generated by the equation (4). Since it is much larger and can be removed by the low-pass filter 21, it is not necessary to consider it here.

DSB−SC変調器12を用いたC−OFDR測定では、このように+1次および−1次側波帯に起因した2つの光電流が生じる。これらは同一の時間軸上で測定されるため、この2波の重ねあわせが最終的な出力光電流iとなる。直流成分を無視すると、出力光電流iによって得られるビート信号パワーPは以下のように表される。   In the C-OFDR measurement using the DSB-SC modulator 12, two photocurrents resulting from the + 1st order and the −1st order sidebands are thus generated. Since these are measured on the same time axis, the superposition of these two waves becomes the final output photocurrent i. If the DC component is ignored, the beat signal power P obtained by the output photocurrent i is expressed as follows.

Figure 0005159255
(5)式の振幅項cos2(2πf0τ)から、ビート信号パワーの振幅は遅延時間τに対して周期f0で振動することがわかる。この時、強反射点からの信号の参照光に対する遅延時間をτ0とし、信号光の光路中に挿入した可変遅延器18によって新たに付与される遅延時間をτ1とすると、(5)式は以下のように表される。
Figure 0005159255
From the amplitude term cos 2 (2πf 0 τ) in the equation (5), it can be seen that the amplitude of the beat signal power oscillates with a period f 0 with respect to the delay time τ. At this time, if the delay time of the signal from the strong reflection point with respect to the reference light is τ 0 and the delay time newly given by the variable delay device 18 inserted in the optical path of the signal light is τ 1 , Equation (5) Is expressed as follows.

Figure 0005159255
ここで、(6)式の振幅項cos2[2πf00+τ1)]が0となる条件は、Mを0を含まない自然数とすると、
Figure 0005159255
Here, the condition that the amplitude term cos 2 [2πf 00 + τ 1 )] in equation (6) is 0 is that M is a natural number not including 0:

Figure 0005159255
となり、(7)式を満たすようにτ1を決定することで、観測される強反射点からの信号パワーのみを0にすることができ、強反射点の位相雑音による影響を除去できる。
一方、参照光の光路中に挿入した可変遅延器17によって新たに付与される遅延時間をτ2とすると、同様にして、振幅項が0となる条件は、
Figure 0005159255
Thus, by determining τ 1 so as to satisfy the expression (7), only the signal power from the observed strong reflection point can be reduced to 0, and the influence of the phase noise at the strong reflection point can be eliminated.
On the other hand, when the delay time newly given by the variable delay device 17 inserted in the optical path of the reference light is τ 2 , the condition that the amplitude term becomes 0 similarly is

Figure 0005159255
であり、上記(8)式を満たすようにτ2を決定することで、強反射点の位相雑音による影響を除去することができる。
信号光の光路及び参照光の光路の両方に挿入した可変遅延器17,18によって新たに付与される遅延時間をそれぞれτ1,τ2とすると、
Figure 0005159255
By determining τ 2 so as to satisfy the above equation (8), the influence of the phase noise at the strong reflection point can be removed.
If the delay times newly given by the variable delay devices 17 and 18 inserted in both the optical path of the signal light and the optical path of the reference light are τ 1 and τ 2 , respectively.

Figure 0005159255
を満たすようにτ1,τ2を設定すれば、強反射点の位相雑音による影響を除去することができる。
一例として、(5)式の振幅項についてf0=200THzとした場合の計算結果を図5に示す。図5より、時間に依らず遅延時間τが0.25×10-14秒変化する毎に振幅が0となる点が生じることがわかる。これは参照光の光路及び信号光の光路間に0.5μmの光路長差が生じる毎に振幅が0となることを示している。
Figure 0005159255
If τ 1 and τ 2 are set so as to satisfy the above, the influence of the phase noise at the strong reflection point can be eliminated.
As an example, FIG. 5 shows a calculation result when f 0 = 200 THz for the amplitude term of the equation (5). From FIG. 5, it can be seen that a point where the amplitude becomes zero occurs every time the delay time τ changes by 0.25 × 10 −14 seconds regardless of the time. This indicates that the amplitude becomes zero every time a 0.5 μm optical path length difference is generated between the optical path of the reference light and the optical path of the signal light.

したがって、被測定物16内に強い反射点が存在する場合、この条件では、意図的に光路長差を最大で0.5μmだけ調整(遅延時間を0.25×10-14秒調整するのと等価)することで、測定される反射光の位置を振幅が弱くなる地点まで移動させ、反射光強度を弱くすることが可能である。これにより位相雑音が低減し、強反射点近傍の情報を得ることができる。 Therefore, when there is a strong reflection point in the DUT 16, under this condition, the optical path length difference is intentionally adjusted by a maximum of 0.5 μm (the delay time is adjusted by 0.25 × 10 −14 seconds). Equivalent), the position of the reflected light to be measured can be moved to a point where the amplitude becomes weak, and the reflected light intensity can be weakened. Thereby, phase noise is reduced, and information in the vicinity of the strong reflection point can be obtained.

尚、遅延時間を調節可能な機構としての可変遅延器17,18には、図6(a)に示すような光ファイバを圧電素子に巻きつける構造や、図6(b)に示すような光ファイバの2点を固定し、片方ないしは両方の固定点を移動させる方法でも実現できる。あるいは、図6(c)に示すように、稼動ミラー構造によって光路長を調整することも可能である。さらに、図6(d)に示すような光位相変調器にて光波の位相を調節することでも同様の効果を得ることができる。尚、遅延時間を調節するための可変遅延器17,18は、参照光の光路中、信号光の光路中のどちらか一方または両方に設置すればよい。   The variable delay devices 17 and 18 as mechanisms capable of adjusting the delay time have a structure in which an optical fiber as shown in FIG. 6A is wound around a piezoelectric element, or a light as shown in FIG. It can also be realized by fixing two points of the fiber and moving one or both of the fixed points. Alternatively, as shown in FIG. 6C, the optical path length can be adjusted by an operating mirror structure. Further, the same effect can be obtained by adjusting the phase of the light wave with an optical phase modulator as shown in FIG. Note that the variable delay devices 17 and 18 for adjusting the delay time may be installed in one or both of the optical path of the reference light and the optical path of the signal light.

上記の実施形態では、+1次および−1次側波帯のみ生じている場合について述べたが、+N次および−N次の側波帯のみ生じている場合においても同様に反射光強度の調整が可能である。
(第2の実施形態)
図7は、本発明に係る光周波数領域反射測定方法に基づく測定装置の第2の実施形態を示すブロック構成図である。但し、図7において、図1と同一部分には同一符号を付して示し、ここでは異なる部分を中心に説明する。
In the above-described embodiment, the case where only the + 1st order and −1st order sidebands are generated is described. Is possible.
(Second Embodiment)
FIG. 7 is a block diagram showing a second embodiment of the measuring apparatus based on the optical frequency domain reflection measuring method according to the present invention. However, in FIG. 7, the same parts as those in FIG. 1 are denoted by the same reference numerals, and different parts will be mainly described here.

図7に測定装置では、外部変調器12としてDSB変調器を用いる場合の構成を示すものである。このような構成であっても第1の実施形態と全く同様の原理で反射光強度の低減が可能である。但し、DSB変調は、図8に示すように搬送波が抑圧されていないため、搬送波同士のビート信号によってDC(直流成分)を中心として光源位相雑音スペクトルが生じる。そこで、被測定物16の直前にダミーファイバ等の遅延素子22を挿入し、位相雑音の影響を受けているDC周辺の周波数領域と被測定対象からのビート信号が占める周波数領域とを分離するようにするとよい。   FIG. 7 shows a configuration in the case where a DSB modulator is used as the external modulator 12 in the measurement apparatus. Even with such a configuration, the reflected light intensity can be reduced on the same principle as in the first embodiment. However, in the DSB modulation, since the carrier wave is not suppressed as shown in FIG. 8, a light source phase noise spectrum is generated around the DC (direct current component) by the beat signal between the carrier waves. Therefore, a delay element 22 such as a dummy fiber is inserted immediately before the device under test 16 so as to separate the frequency region around the DC affected by the phase noise and the frequency region occupied by the beat signal from the object to be measured. It is good to.

尚、本発明は、上記実施形態そのままに限定されるものではなく、実施段階ではその要旨を逸脱しない範囲で構成要素を変形して具体化できる。また、上記実施形態に開示されている複数の構成要素の適宜な組合せにより種々の発明を形成することができる。例えば、実施形態に示される全構成要素からいくつかの構成要素を削除してもよい。さらに、異なる実施形態例に亘る構成要素を適宜組み合わせてもよい。   Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, constituent elements over different example embodiments may be combined as appropriate.

本発明に係る光周波数領域反射測定方法に基づく測定装置の第1の実施形態を示すブロック構成図。The block block diagram which shows 1st Embodiment of the measuring apparatus based on the optical frequency domain reflection measuring method which concerns on this invention. 図1の装置において、DSB−SC変調後の光源スペクトルの概略を示す特性図。FIG. 2 is a characteristic diagram showing an outline of a light source spectrum after DSB-SC modulation in the apparatus of FIG. 1. 図1の装置において、距離と反射率との関係で被測定部内の反射が弱い場合と強い場合とを比較して示す波形図。In the apparatus of FIG. 1, the wave form diagram which compares and shows the case where the reflection in a to-be-measured part is weak with the relationship between distance and a reflectance. 図1の装置において、DSB−SC変調後の光源スペクトルモデルを表す特性図。FIG. 2 is a characteristic diagram showing a light source spectrum model after DSB-SC modulation in the apparatus of FIG. 1. 図1の装置において、ビート信号パワーの遅延時間依存性を示す図。The figure which shows the delay time dependence of beat signal power in the apparatus of FIG. 図1の装置において、遅延時間を調節可能な具体的な機構を示す図。The figure which shows the specific mechanism which can adjust delay time in the apparatus of FIG. 本発明に係る光周波数領域反射測定方法に基づく測定装置の第2の実施形態を示すブロック構成図。The block block diagram which shows 2nd Embodiment of the measuring apparatus based on the optical frequency domain reflection measuring method which concerns on this invention. 図7の装置において、DSB−SC変調後の光源スペクトルの概略を示す特性図。The characteristic diagram which shows the outline of the light source spectrum after DSB-SC modulation in the apparatus of FIG.

符号の説明Explanation of symbols

11…コヒーレント光源、12…DSB−SC変調器、13…駆動回路、14,15,19…光方向性結合器、16…被測定物、17,18…可変遅延器、20…光受信器、21…ローパスフィルタ、22…周波数解析装置、23…遅延素子。   DESCRIPTION OF SYMBOLS 11 ... Coherent light source, 12 ... DSB-SC modulator, 13 ... Drive circuit, 14, 15, 19 ... Optical directional coupler, 16 ... Device under test, 17, 18 ... Variable delay device, 20 ... Optical receiver, 21 ... Low-pass filter, 22 ... Frequency analysis device, 23 ... Delay element.

Claims (4)

コヒーレント光に光変調を施して変調側波帯を発生させ、この変調側波帯を時間に対して線形に周波数掃引した伝送光を2分岐して一方を参照光、他方を信号光とし、前記信号光を被測定物に入射し、当該被測定物内の任意の位置で反射または後方散乱された信号光と前記参照光を合波させて干渉ビート信号を生じさせ、これを受光して周波数解析することで、前記被測定物内の任意の位置における反射率、損失の少なくともいずれかを測定する光周波数領域測定方法において、
前記光変調として両側波帯変調を施し、前記信号光及び参照光の少なくともいずれか一方を光路中で遅延して前記両側波帯変調にて生じた+N次と−N次変調側波帯(Nは自然数)のビート信号波形間の重ね合わせ状態を変化させ、前記光路中の遅延時間を調整して、測定される強反射点からの反射光強度を減衰させて、前記反射光による位相雑音レベルを低下させるようにして再度測定を実施することを特徴とする光周波数反射測定方法。
Optical modulation is performed on the coherent light to generate a modulation sideband, and the transmission light obtained by frequency sweeping the modulation sideband linearly with respect to time is split into two, one being a reference light and the other being a signal light, The signal light is incident on the object to be measured, and the signal light reflected or backscattered at an arbitrary position in the object to be measured and the reference light are combined to generate an interference beat signal, which is received and frequency is received. By analyzing, in an optical frequency domain measurement method for measuring at least one of reflectance and loss at an arbitrary position in the object to be measured,
Double-sideband modulation is performed as the optical modulation, and at least one of the signal light and the reference light is delayed in the optical path, and + Nth order and −Nth order modulation sidebands (N Is a natural number) by changing the superposition state between the beat signal waveforms , adjusting the delay time in the optical path, and attenuating the reflected light intensity from the strong reflection point to be measured, and the phase noise level due to the reflected light An optical frequency reflection measurement method, wherein the measurement is performed again so as to reduce the frequency.
コヒーレント光源と、
前記コヒーレント光源から出力されるコヒーレント光を入射してその両側に変調側波帯を発生させる光変調手段と、
前記光変調手段に対して前記両側変調側波帯を時間軸上で線形に周波数掃引する周波数掃引手段と、
前記光変調手段の出力光を2分岐して一方を参照光、他方を信号光とする光分岐器と、
前記信号光を被測定部に入射し当該被測定物の任意の位置で反射または後方散乱された信号光を被測定光として取り出す被測定光抽出手段と、
前記被測定光と前記参照光を合波させて干渉ビート信号光を生じさせる光合波器と、
前記光合波器で得られる干渉ビート信号光を受光して電気信号として出力する光受信器と、
前記光受信器で得られる干渉ビート信号を周波数解析して前記被測定物内の任意の位置における反射率、損失の少なくともいずれかを測定する周波数解析装置と、
前記参照光、信号光の少なくともいずれか一方を光路中で任意の時間遅延する可変遅延手段と
を具備し、
前記可変遅延手段は、前記光路中の遅延によって前記両側波帯変調にて生じた+N次と−N次変調側波帯(Nは自然数)の前記光合成器における干渉ビート信号波形間の重ね合わせ状態を変化させ、前記光路中の遅延時間の調整を受けて、測定される強反射点からの反射光強度を減衰させ、前記反射光による位相雑音レベルを低下させるようにした測定状態を形成することを特徴とする光周波数反射測定装置。
A coherent light source,
A light modulation means for entering coherent light output from the coherent light source and generating modulation sidebands on both sides thereof; and
Frequency sweeping means for linearly sweeping the both-side modulation sidebands on the time axis with respect to the optical modulation means;
An optical branching device that splits the output light of the light modulating means into two parts, one being a reference light and the other being a signal light;
Measured light extraction means for extracting the signal light that is incident on the measured part and reflected or backscattered at an arbitrary position of the measured object as measured light;
An optical multiplexer that combines the light to be measured and the reference light to generate an interference beat signal light;
An optical receiver that receives the interference beat signal light obtained by the optical multiplexer and outputs it as an electrical signal;
A frequency analysis device that performs frequency analysis of an interference beat signal obtained by the optical receiver and measures at least one of reflectance and loss at an arbitrary position in the object to be measured;
Variable delay means for delaying at least one of the reference light and signal light in an optical path for an arbitrary time ;
The variable delay means is a superposition state between interference beat signal waveforms in the optical combiner in the + Nth order and −Nth order modulation sidebands (N is a natural number) generated in the double sideband modulation due to the delay in the optical path. Is changed, the delay time in the optical path is adjusted, the reflected light intensity from the strong reflection point to be measured is attenuated, and the measurement state in which the phase noise level due to the reflected light is reduced is formed. An optical frequency reflection measuring device characterized by the above.
前記光変調手段は、搬送波抑圧型の両側波帯変調器(DSB−SC変調器)であることを特徴とする請求項2記載の光周波数領域反射測定装置。 3. The optical frequency domain reflection measuring apparatus according to claim 2 , wherein the optical modulation means is a carrier wave suppression type double sideband modulator (DSB-SC modulator). 前記光変調手段は、前記コヒーレント光に両側波帯変調を施す両側波帯変調器(DSB変調器)と、前記被測定物の直前に配置される遅延ファイバとを備えることを特徴とする請求項2記載の光周波数領域反射測定装置。 It said light modulating means, claims, characterized in that it comprises double sideband modulator performing double side band modulation in the coherent light and (DSB modulator), and a delay fiber disposed immediately before the object to be measured 2. The optical frequency domain reflection measuring apparatus according to 2.
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