JP5156358B2 - Glass substrate processing method - Google Patents

Description

  The present invention processes mirrors and glass substrates used in optical pickups mounted on compact disc drives, DVD drives, Blu-ray disc drives, HD-DVD drives, etc., and glass substrates used in projectors, etc. On how to do.

  A glass substrate used for an optical pickup or a projector is formed by crossing a ruled line in a vertical direction and a horizontal direction on one surface of, for example, a mirror and vapor-deposited glass, and the vapor-deposited glass substrate along the ruled line. It is produced by dividing.

  As a technique related to a method for processing a glass substrate, for example, there is Patent Document 1 below.

JP 2003-12335 A

  When scribing and dividing a glass substrate, the ruled lines intersect on the same plane when they are divided, so that chipping occurs at the intersection, or protrusions occur at the boundary when dividing, or scribing The scratches on the glass substrate may cause scratches on the surface of the glass substrate, causing deterioration in quality and deterioration in productivity.

  On the other hand, as in Patent Document 1, when scribing a glass substrate, a scribing line is formed on one surface of the glass substrate in the vertical or horizontal direction, and the other scribing line is processed on the other surface. The processing method for forming the ruled lines that intersect each other can stabilize the quality without generating an intersection.

  However, when performing double-sided scribing with nothing holding the glass substrate at all, or without covering the surface of the glass substrate, the surface of the glass substrate is caused by processing debris generated when forming scribing lines. There is a problem that the quality and productivity are deteriorated due to the occurrence of scratches on the glass substrate or the small pieces that are divided when the glass substrate is divided.

  This invention is made | formed in order to solve this subject, and it aims at providing the processing method of the glass substrate which can improve quality and productivity.

  The above object can be achieved, for example, by the invention described in the claims. The following is a brief description of an outline of typical inventions disclosed in the present application.

  In the glass substrate processing method according to the present invention, an adhesive first film is attached to both surfaces of the glass substrate. Then, a scribing process is performed on one surface of the glass substrate through the first film to form ruled lines, and the first film is peeled off from the one surface of the glass substrate, A second film having adhesiveness is again applied to the surface. Next, a scribing line is formed on the other surface of the glass substrate through the first film by a scribing process so as to intersect the scribing line, and the glass substrate is divided along the scribing line. To do.

  According to the present invention, quality can be improved and productivity can be improved.

  Hereinafter, embodiments of the glass substrate processing method of the present invention will be described with reference to the drawings.

  First, as shown in FIG. 1, film materials 11 and 12 having adhesiveness are attached to both surfaces of a glass substrate 10 to be processed. In this case, the film is not only sticky, but if it is thinner than 0.1 mm, the thinner the film, the easier the scribe processing load is transmitted to the processing surface of the glass substrate, and the progress of the vertical crack 13a is improved.

  Next, scribing is performed using, for example, a scribing blade made of sintered diamond, diamond, or cemented carbide to form a ruled line 14 on the glass substrate through the film material as shown in FIG. The scribing pressure at this time is arbitrary, but the vertical crack 13a must not reach the surface opposite to the glass substrate in the first surface scribing. 3a and 3b show front views of the glass substrate after scribing shown in FIG. 2 as viewed from the direction of arrow 15, but only the processing pressure needs to be transmitted to the glass substrate during actual processing, so the film material 12 may be cut as 14 but may not be cut as 16.

  After the scribing process on one surface is completed, the film material on the surface on which the scribe lines are formed is peeled off, and a new film material is pasted on the same surface again. At this time, if the scribing process is performed without attaching the film, the ruled scraps are attached to the surface of the glass substrate, which prevents the film material from being attached again. However, it is not always necessary to replace the film after scribing, but when the film material is partially cut, the processing pressure is not evenly applied when scribing the opposite surface, so the film was re-covered as much as possible. Better.

  In addition, scribing scraps can be removed by brushing, air blowing, ultrasonic cleaning, etc., but these methods are not perfect, and the method of forming scribing scribing lines with the film material attached is a ruled method. It is the most effective because it prevents scattering of scraps.

  Next, as shown in FIG. 4, a ruled line 17 is formed on the surface on which no ruled line is formed so as to intersect the direction in which the ruled line is formed by the scribing process. At this time, the scribing lines are formed on both surfaces of the glass substrate so as to intersect with each other. However, since they are not on the same surface, there is no chipping at the intersection, and the vertical cracks 13a and 13b intersect inside the glass substrate. It doesn't matter.

  The piece 18 of Fig. 5 is obtained by dividing the glass substrate on which the double-sided scoring has been completed along the scoring line. However, in this processing method, the scoring line is not on the same surface, so it is an intersection. No cracks, protrusions, etc. are generated in 19, and since scribing is performed through the film, there is no damage on the glass substrate surface.

  The dividing method performed along the ruled lines includes a method of applying a pressing load from the upper and lower directions of the glass substrate and a method of applying a tensile load from the side surface of the glass substrate, but are not particularly limited.

  FIG. 6 shows the glass substrate after dividing the small pieces when the scribing lines are formed so as to intersect on the same plane. Chips 20 and protrusions 21 are generated at the intersections of the ruled lines, and the quality deteriorates.

  Further, when the film material is processed without being attached, scratches 22 and 23 due to ruled scraps are generated on the surface of the glass substrate.

  In the above processing method, the front and back sides may be changed for each ruled line. For example, if the film material is pasted on the surface of the glass substrate during scribe processing, the processing order is regulated. Not what you want.

  In addition, this processing method does not require a cleaning step after dividing the glass substrate, but even if the cleaning is actually performed, the quality does not change and there is no problem.

  In addition, the processing material is a glass substrate, but due to the characteristics of the processing method of processing by attaching a film material, from the viewpoint of protecting the processing surface, for example, a relatively small size of 200 mm square or less such as an optical pickup or projector This is effective for processing a vapor-deposited glass substrate on which a vapor-deposited film having a predetermined thickness is formed.

  As described above, according to the processing method according to the present invention, it is possible to stabilize the intersection quality of the glass substrate after the division, and at the same time, the surface of the glass substrate is covered with a film so that the scribing scraps do not adhere. Since the surface of the glass substrate is not scratched, the quality can be improved, and furthermore, no scribing scraps are generated on the surface of the glass substrate. Productivity can be improved without the need.

  As mentioned above, although embodiment of the processing method of the glass substrate according to this invention was described, this invention is not limited to the said embodiment, A various improvement and deformation | transformation can be performed in the range which does not deviate from the summary of this invention.

Perspective view with film material pasted on both sides of glass substrate A perspective view of a scribing line formed on a glass substrate with a scribing line through a film material Front view of FIG. 2 viewed from the direction of arrow 15 2 is a perspective view in which a scribing ruled line is formed through a film on the surface opposite to FIG. 2 so as to intersect the ruled line of FIG. Perspective view of a state in which the glass substrate is divided along the ruled lines Diagram for explaining a problem caused by scribing

Explanation of symbols

10 ... Glass substrate material
11, 12, ... Film material
13a, 13b ・ ・ ・ Vertical crack by scribing
14, 17 ・ ・ ・ Scribe lines by scribing
15 ・ ・ ・ Front view guide arrow
16 ... Film material not cut after scribing
18 ・ ・ ・ Glass pieces after division
19 ・ ・ ・ Intersection after division
20 ・ ・ ・ Deficit at the intersection
21 ・ ・ ・ Protrusions at the intersection
22, 23 ... scratches on the surface of the glass substrate

Claims (3)

A method for processing a glass substrate,
Affixing a first film having adhesiveness to both surfaces of the glass substrate,
Scribe processing on one side of the glass substrate through the first film, forming a ruled line,
The first film is peeled off from the one surface of the glass substrate, and a second film having adhesiveness is again attached to the one surface,
On the other surface of the glass substrate, a scribing line is formed through the first film by scribing so as to intersect the scribing line,
A glass substrate processing method for dividing the glass substrate along the ruled lines. It is a processing method of Claim 1, Comprising: The said glass substrate is divided | segmented in the state which bonded the said 1st film and the said 2nd film, The processing method of the glass substrate characterized by the above-mentioned. The processing method according to claim 1, wherein the glass substrate is a deposited glass having a deposited film formed on at least one surface.

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