JP5154491B2 - Chamber line - Google Patents

Description

  The present invention relates to a chamber line including a plurality of chambers such as a film forming apparatus, and more particularly to a chamber line capable of opening and closing a lid attached to the chamber for cleaning and maintenance.

  A film forming apparatus such as an ion plating apparatus or a vapor deposition apparatus (see Patent Document 1) includes a chamber line constructed by a plurality of adjacent chambers. In this type of chamber line, when the substrate passes through a film forming chamber which is a vacuum chamber, a predetermined film forming process is performed on the substrate (see Patent Document 1). In order to remove adhesion and dirt of the vapor deposition substance accompanying the film formation process, the film formation chamber needs to be periodically cleaned, and the other chambers need to be appropriately maintained. Therefore, an opening for maintenance is formed in the ceiling portion of the chamber, and generally a canopy for closing the opening is connected to the main body portion via a hinge portion. Since the canopy is a heavy object having a weight of 500 kg or more, each chamber is provided with an opening / closing device for lifting the canopy to open the chamber and holding the opened chamber.

JP 2006-299358 A

  However, in the conventional chamber line, a canopy opening / closing device is required for each of the plurality of chambers, and the equipment is complicated and easy to increase in size, which tends to increase the equipment cost.

  An object of the present invention is to provide a chamber line that is easy to construct a facility for opening and closing a lid and is effective in reducing costs. .

The present invention provides a chamber line in which a plurality of chambers having lids are arranged adjacent to each other in a row, the chamber having a lid portion is disposed on a frame, and a rail unit disposed on the frame along the alignment direction of the chambers; And an opening / closing means that is movable along the rail portion and capable of opening and closing each of the plurality of chambers by raising and lowering a lid portion provided in the chamber.

  According to the present invention, the opening / closing means is movable along the rail portion arranged along the arrangement direction of the plurality of chambers. Therefore, it is possible to open and close the chamber by raising and lowering the lid of one chamber, and further opening and closing the other chamber by moving to the other chamber and raising and lowering the lid of the other chamber. As a result, it becomes possible to open and close multiple chambers with at least one opening and closing means, and it is no longer necessary to provide an opening and closing device for each of the multiple chambers, making it easy to construct equipment and reducing costs. It is.

  Furthermore, it is preferable that the lid portion is removable from the chamber. By moving the opening / closing means together with the lid part detached from the chamber, a wide and safe working area can be secured above the chamber from which the lid part has been removed.

  Furthermore, it is preferable that the lid portion is provided with a holding portion for stacking and holding other lid portions. Since the lid part removed from the chamber by the opening / closing means can be stacked and temporarily placed, for example, on the adjacent lid part, the opening / closing means does not need to hold the lid part at all times, and a plurality of lid parts are simultaneously opened. can do.

  Furthermore, the opening / closing means has a roller chain whose one end can be coupled to the lid, a sprocket around which the roller chain is wound, and a drive unit that rotationally drives the sprocket, and the other end of the roller chain is coupled to the sprocket. It is preferable that Since the other end of the roller chain is coupled to the sprocket, the roller chain is reliably wound up with the rotation of the sprocket, and as a result, the lid can be reliably lifted. Furthermore, according to the said structure, since it can apply when a raising / lowering stroke is short, it is advantageous to the compactization of an installation.

  According to the present invention, it is an object to provide a chamber line that is easy to simplify equipment and is effective in reducing costs.

It is a side view of the film-forming apparatus which concerns on embodiment of this invention. It is a top view of the top plate changer which concerns on this embodiment. It is sectional drawing along the III-III line of FIG. It is sectional drawing along the IV-IV line of FIG. It is a side view which expands and shows a part of film-forming apparatus. It is a perspective view of a top plate.

  Hereinafter, a preferred embodiment of a current introduction structure according to the present invention will be described with reference to the drawings. In the present embodiment, the film forming apparatus 1 constituting the chamber line will be described as an example.

  As shown in FIG. 1, a film forming apparatus 1 is an apparatus for forming a film on a substrate by various vapor deposition methods, and adopts a conveyance form called a so-called inline type. The film forming apparatus 1 includes a plurality of chambers 4A to 4E installed on a gantry 3, and a drive mechanism for transporting a carrier along a predetermined path is provided in each of the chambers 4A to 4E. . A carrier is a transport body including a tray and a substrate.

  The roles of the plurality of chambers 4A to 4E are different, and a load lock chamber 4A, a pre-stage buffer chamber 4B, a film formation chamber 4C, a post-stage buffer chamber 4D, and an unload lock chamber 4E are provided in order from the upstream side of the path through which carriers pass. It has been. Each chamber 4A-4E is divided by the vacuum gate valve 5 which can be opened and closed, respectively.

  The load lock chamber 4A and the pre-stage buffer chamber 4B receive the substrates and sequentially depressurize them. Further, in the load lock chamber 4A and the preceding buffer chamber 4B, the substrate being transported is heated to a predetermined temperature. The substrate heated to a predetermined temperature is carried into the film forming chamber 4C.

  The film forming chamber 4C includes three vacuum chambers communicating with each other, and the film forming chamber 4C is maintained in a high temperature atmosphere. Vapor deposition apparatuses using various vapor deposition methods are provided at the bottom of the central vacuum chamber, and a substrate is formed by vapor deposition particles.

  The substrate after film formation is discharged into the subsequent buffer chamber 4D. A water cooling plate is installed in the latter buffer chamber 4D, and the substrate is gradually cooled by radiation in the latter buffer chamber 4D. Thereafter, the substrate is unloaded from the film forming apparatus 1 through the unload lock chamber 4E after pressure adjustment.

  In each chamber 4A to 4E, various pipes and devices are attached according to their roles. However, the schematic configuration of each chamber is common, and each chamber is provided with a casing 7 serving as a main body (see FIG. 5). The casing portion 7 includes an outer wall 7a that surrounds a rectangle, and an upper portion is opened to form a maintenance opening 7b. A rectangular top plate (lid) 9 is detachably mounted so as to close the opening. The top plate 9 is a heavy object having a weight of 500 kg.

  As shown in FIG. 6, two suspension plates 9 a are connected to the top plate 9. The suspension plate 9 a has a long rectangular plate shape, extends perpendicular to the longitudinal direction of the top plate 9, and stands on the top plate 9. The suspension plate 9 a has both end portions 9 b protruding outward from both side edges of the top plate 9. A top plate receiving column (hold portion) 9c that supports the other top plate 9 is erected on the end portion 9b. At the upper end of the top plate receiving column 9c, a notch (receiving unit) 9d for contacting and holding the lower end of the top plate receiving column 9c of the other top plate 9 is provided. A contact portion 9e having a size corresponding to 9d is provided.

  Each suspension plate 9a is formed with two through holes (engagement portions) 9f on which brackets 27c (see FIG. 3) are hooked for suspension. The through holes 9f are provided at positions overlapping the top plate 9, and are further provided at positions close to the top plate receiving column 9c in consideration of the balance when the top plate 9 is suspended.

  As shown in FIG. 1, the chambers 4 </ b> A to 4 </ b> E are arranged adjacent to each other on the gantry 3. On the gantry 3, two rails (rail portions) 11 and 12 (see FIG. 4) provided along the alignment direction D of the chambers 4 </ b> A to 4 </ b> E are laid. The two rails 11 and 12 are disposed so as to sandwich the chambers 4A to 4E, and guide the movement of the top plate changer 13. The upper surface of one rail 12 has an inverted V-shaped cross section, and a pointed portion 11a that prevents the roller 15a of the top plate changer 13 from coming off is formed along the longitudinal direction. Further, the upper surface of the other rail 12 is a flat plane so that the roller 15b rolls smoothly.

  2 to 4, the top plate changer (opening / closing means) 13 includes a portal frame 15 formed so as to straddle the chambers 4 </ b> A to 4 </ b> E, and left and right legs 15 c of the portal frame 15. A running portion of rollers 15a and 15b provided at the lower end is provided. Left and right are intended to be perpendicular to the longitudinal direction of the rails 11 and 12, and are intended to be left and right when viewed from the substrate transport direction. In addition, the term “front and rear”, which will be described later, means a direction along the longitudinal direction of the rails 11 and 12, and means the front and rear direction of the substrate transport direction. Note that FIG. 4 is a view when viewed from the direction opposite to the substrate transport direction, and is therefore opposite to the left and right on the drawing.

  The left leg 15c is provided with two rollers 15a and 15a in the front and rear, and the right leg 15c is provided with two rollers 15b and 15b in the front and rear. The roller 15a is formed with a groove 15d into which the pointed portion 11a of the rail 11 is fitted to prevent left and right displacement (see FIG. 4). The roller 15b is provided with a flat peripheral surface 15e having no irregularities in order to suppress rolling resistance on the rail 12.

  As shown in FIG. 2, the ceiling portion of the portal frame 15 (see FIG. 2) is composed of four beam portions 17L, 17R, 17F, and 17B that form a rectangular frame in plan view. The beam portions 17L and 17R arranged on the left and right extend in the same direction as the rails 11 and 12, respectively, and the beam portions 17F and 17B arranged on the front and rear extend in a direction orthogonal to the rails 11 and 12, respectively. Further, two auxiliary beam portions 18L and 18R parallel to the left and right beam portions 17L and 17R are arranged inside the frame, and both ends of the auxiliary beam portions 18L and 18R are arranged at the front and rear beam portions 17F and 17B. It is fixed to.

  An elevating mechanism 19 that elevates and lowers the top plate 9 is provided on the ceiling portion of the portal frame 15. The elevating mechanism 19 includes an axis synchronization unit 21 and a top plate elevating unit 23. The shaft synchronization unit 21 includes a drive shaft portion 21a rotatably supported by the left and right beam portions 17L and 17R and the left and right auxiliary beam portions 18L and 18R, and a drive motor (including a speed reducer) connected to the drive shaft portion 21a. 21b. The drive motor 21b is fixed to the left beam portion 17L, and the drive shaft portion 21a rotates in the forward direction or the reverse direction by the drive of the drive motor 21b. Note that the forward direction is rotation in the direction in which the top plate 9 is raised, and the reverse direction is rotation in the direction in which the top plate 9 is lowered.

  Further, the shaft synchronization portion 21 has a first driven shaft portion 21c that is rotatably supported by the left beam portion 17L and the left auxiliary beam portion 18L. The first driven shaft portion 21c is provided with a first driven sprocket 21d to which the rotational force is transmitted. Further, the shaft synchronization part 21 has a second driven shaft part 21e rotatably supported by the right beam part 17R and the right auxiliary beam part 18R. The second driven shaft portion 21e is provided with a second driven sprocket 21f to which the rotational force is transmitted. The drive shaft portion 21a receives a rotational force from the first driven sprocket 21k for transmitting the rotational force to the first driven sprocket 21d via the roller chain 21j and the second driven sprocket 21f via the roller chain 21g. A second drive sprocket 21h for transmission is provided.

  The top plate lifting / lowering unit 23 includes lifting / lowering sprockets 25 provided on the first driven shaft portion 21c, lifting / lowering sprockets 25 provided on the second driven shaft portion 21e, and lifting / lowering sprockets provided on the left and right sides of the drive shaft portion 21a. 25, 25. Further, the top plate elevating part 23 has a roller chain 27 connected to each of the four elevating sprockets 25.

  Since the four lift sprockets 25 and the roller chain 27 have the same configuration, one configuration will be described as a representative. As shown in FIG. 3, the roller chain 27 is not annular and has both ends 27a and 27b. The roller chain 27 is partially hung around the elevating sprocket 25, and one end (upper end) 27a is coupled to the elevating sprocket 25 by a bracket 27g.

  A bracket portion 27c for lifting the top plate 9 is fixed to the other end portion (lower end portion) 27b. The bracket part 27c penetrates the U-shaped pin support part 27d inserted so as to sandwich the suspension plate 9a, and the through hole 9f (see FIG. 6) of the pin support part 27d and the suspension plate 9a. A fixing pin 27e for connecting the suspension plate 9a is provided.

  The length of the roller chain 27 varies depending on the height of the portal frame 15, but needs to reach the top plate 9 mounted in the chambers 4 </ b> A to 4 </ b> E. Further, the winding length of the roller chain 27 around the elevating sprocket 25 in a state where the top plate 9 is lifted highest with the rotation of the elevating sprocket 25 is about 3/4 of the entire circumference of the elevating sprocket 25. Set as follows.

  The arrangement of the four lifting sprockets 25 and the roller chain 27 corresponds to the through holes 9f provided in the suspension plate 9a of the top plate 9, and considering that the top plate 9 can be lifted and lowered in a balanced manner, The center of the roller chain 27 and the center of gravity of the top plate 9 are aligned. The bracket portions 27c and 27c arranged on the left and right are connected to each other via a connection bracket 27f (see FIG. 4).

  Next, a procedure for opening and closing the top plate 9 for maintenance of the film forming apparatus 1 will be described. For example, when maintaining the front buffer chamber 4B (see FIG. 1), the top plate changer 13 is moved to a predetermined position across the front buffer chamber 4B by the rollers 15a and 15b of the traveling portion of the top plate changer 13.

  Next, the drive motor 21b of the top plate changer 13 is driven and controlled, and the bracket portions 27c of the four roller chains 27 fixed to the elevating sprocket 25 are lowered. Next, the bracket portions 27 c of all the four roller chains 27 are hooked on the suspension plate 9 a of the top plate 9 and fixed.

  Next, drive control of the drive motor 21b is carried out, all the four roller chains 27 are pulled up synchronously, and the top plate 9 is raised. When the top plate 9 rises to a predetermined position, the drive motor 21b is stopped and the top plate 9 is held at that position.

  Next, the top plate changer 13 is moved to, for example, a predetermined position across the adjacent load lock chamber 4A by the rollers 15a and 15b of the traveling portion of the top plate changer 13. When the predetermined position is reached, the drive motor 21b is driven and controlled to lower the top plate 9 and place it on the top plate 9 of the load lock chamber 4A (see FIGS. 5 and 6). When the transported top plate 9 is placed on the top plate 9 of the load lock chamber 4A and is securely held by the four top plate receiving posts 9c, the bracket portion 27c of the roller chain 27 is removed from the top plate 9.

  In this state, the top plate 9 does not exist above the upstream buffer chamber 4B, and the operator can perform maintenance work with peace of mind. In parallel with the maintenance work of the front buffer chamber 4B, for example, when performing the maintenance work of the rear buffer chamber 4D, the top plate changer 13 that has been emptied by lowering the top board 9 is replaced with the rear buffer chamber 4D. It moves to the predetermined position which straddles, and removes the top plate 9 by the procedure similar to the above-mentioned procedure.

  When the maintenance work is completed, the top plate 9 placed on the top plate 9 of the load lock chamber 4A is again attached to the roller chain 27, lifted, transported to a position above the front buffer chamber 4B, and lowered to the front buffer chamber 4B. Is attached to the opening 7b.

  According to the film forming apparatus (chamber line) 1 described above, the top plate changer (opening / closing means) 13 is movable along the rails 11 and 12 arranged along the alignment direction D of the plurality of chambers 4A to 4E. is there. Therefore, for example, it is possible to open and close the front buffer chamber 4B by raising and lowering the top plate 9 of the front buffer chamber 4B, and further moving to the rear buffer chamber 4D to open and close the rear buffer chamber 4D. As a result, the plurality of chambers 4A to 4E can be opened and closed by at least one top plate changer 13, and it is not necessary to provide a top plate opening and closing device in each of the plurality of chambers 4A to 4E, thereby simplifying the equipment. It is easy to construct and effective for cost reduction.

  In addition, the hinge-type opening / closing mechanism has a top plate that remains above the operator's head even when the top plate is open, and a mechanism that holds the top plate very firmly is built in consideration of the safety of the operator. It is necessary to keep. In particular, since the top plate is a heavy object of 500 kg or more, the equipment for supporting and holding the top plate tends to be very large. However, in this embodiment, since the top plate 9 can be detached from the chambers 4A to 4E, the top plate 9 is moved by moving the top plate changer 13 together with the top plate 9 detached from the chambers 4A to 4E. A wide and safe work area can be easily secured above the removed chambers 4A to 4E, which is effective for constructing a compact and simple facility.

  Further, for example, in the hinge-type opening / closing mechanism, the opening degree of the canopy is 90 ° or less, which is not sufficient, and the workability at the time of maintenance is poor, but in this embodiment, it is completely opened by removing the top plate 9 Therefore, workability at the time of maintenance becomes very high.

  Further, the top plate 9 is provided with a top plate receiving column (hold) 9c for stacking and holding other top plates 9. Accordingly, the top plate 9 removed from the chambers 4A to 4E by the top plate changer 13 can be stacked and temporarily placed on the adjacent top plate 9, for example, so that a plurality of top plates 9 can be simultaneously opened.

  Further, the elevating mechanism 19 of the top plate changer 13 includes a roller chain 27 whose lower end portion 27b is coupled to the top plate 9, an elevating sprocket 25 around which the roller chain 27 is hung, and a drive motor that rotationally drives the elevating sprocket 25. 21b, and an upper end 27a of the roller chain 27 is coupled to the lifting sprocket 25. Therefore, the roller chain 27 is reliably wound up with the rotation of the lift sprocket 25, and as a result, the top plate 9 can be reliably lifted.

  In particular, in a clean room where the ceiling height is severely limited, a simple and low top plate opening / closing device is required, but by using the lifting mechanism 19 described above, a compact and simple device can be achieved. Become.

  Further, since the lifting mechanism 19 of the top plate changer 13 has the shaft synchronization portion 21, the four chains can be lifted and lowered at the same time, and the top plate 9 can be lifted and lowered stably, which is advantageous for downsizing of the equipment. is there.

  As mentioned above, although this invention was concretely demonstrated based on the embodiment, this invention is not limited to the said embodiment. For example, in the present embodiment, an example in which one opening / closing means (top plate changer) is provided in a film forming apparatus that constitutes a single film forming line has been described. It is also possible to provide a plurality of opening / closing means by controlling the movement order. It is also possible to adopt a configuration in which a single opening / closing means can open and close the lid for a plurality of film forming lines.

  DESCRIPTION OF SYMBOLS 1 ... Film-forming apparatus (chamber line), 4A-4E ... Chamber, 9 ... Top plate, 9c ... Top plate receiving column (hold part), 11, 12 ... Rail (rail part), 13 ... Top plate changer (opening-closing means) ), 21b: Drive motor (drive unit), 25: Elevating sprocket, 27: Roller chain, 27a: Upper end (one end), 27b ... Lower end (other end), D: Arrangement direction.

Claims (4)

In a chamber line in which a plurality of chambers having lids are arranged adjacent to each other in a row ,
The chamber having the lid is disposed on a gantry,
A rail portion disposed on the gantry along the alignment direction of the chambers;
A chamber line comprising: opening and closing means that is movable along the rail portion and capable of opening and closing each of the plurality of chambers by raising and lowering the lid portion provided in the chamber.   The chamber line according to claim 1, wherein the lid is detachable from the chamber.   The chamber line according to claim 2, wherein the lid portion is provided with a holding portion that stacks and holds the other lid portions.   The opening / closing means has a roller chain whose one end can be coupled to the lid portion, a sprocket around which the roller chain is wound, and a drive unit that rotationally drives the sprocket, and the other end of the roller chain is The chamber line according to any one of claims 1 to 3, wherein the chamber line is coupled to the sprocket.

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