CN102433539B - Cavity series - Google Patents
Cavity series Download PDFInfo
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- CN102433539B CN102433539B CN201010502726.7A CN201010502726A CN102433539B CN 102433539 B CN102433539 B CN 102433539B CN 201010502726 A CN201010502726 A CN 201010502726A CN 102433539 B CN102433539 B CN 102433539B
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- chamber
- top board
- cap
- series
- sprocket wheel
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Abstract
The invention provides a cavity series, which is used for making equipment for opening and closing a cover part easy to manufacture and lowering the cost. The cavity series is provided with tracks (11, 12) and a top plate converter (13), wherein the tracks are arranged along the arrangement direction (D) of a plurality of cavities (4A-4E); the top plate converter (13) can be moved freely along the tracks (11, 12) and are used for elevating a plurality of top plates (cover plates) (9) arranged in the cavities (4A-4E) respectively to close the cavities; and the top plate converter (13) can be moved freely along the arrangement direction (D) of the cavities (4A-4E), and can be used for elevating the top plates (9) of any cavity (4A-4E). According to the cavity series, the cavities (4A-4E) can be opened and closed by using the top plate converter (13), the equipment for opening and closing the cavities (4A-4E) is easy to manufacture, and the cost is lowered.
Description
Technical field
The present invention relates to the chamber series that possesses multiple chambeies (chamber line) of a kind of film deposition system etc., relate in particular to and a kind ofly can open and close the chamber series of the cap that is assemblied in chamber for clean or maintenance etc.
Background technology
In the film deposition system such as ion plating apparatus or evaporation coating device (with reference to patent documentation 1), possess by the chamber series of constructing in abutting connection with multiple chambeies of arranging.In the series of this chamber, when substrate passes through as the filming chamber of vacuum chamber, this substrate is imposed to predetermined film forming processing (with reference to patent documentation 1).In order to remove adhering to or dirt of evaporation material that film forming processing brings, be necessary regularly to clean in filming chamber, and, be also necessary suitably to maintain other chambeies.For this reason, be formed with maintenance opening in the ceiling part in chamber, conventionally, the top cover that seals this opening is attached in main part by hinge part.Top cover is the weight weighing more than 500Kg, is therefore provided with in each chamber for slinging top cover and open cavity, and keeps the switching arrangement in open chamber.
Patent documentation 1: TOHKEMY 2006-299358 communique
But, in chamber series, in multiple chambeies, needing respectively the switching arrangement of top cover in the past, equipment complexity and the equipment cost that easily maximizes, and easily cause increase.
Summary of the invention
The present invention is to solve above problem as object, and its object is to provide a kind of and easily constructs simply for the equipment of switch cap and to reducing costs also effectively chamber series.
The invention is characterized in, in abutting connection with arranging in the chamber series in multiple chambeies with cap, to possess: orbit portion, configures along the orientation in chamber; And on-off mechanism, move freely along orbit portion, and make to be arranged on cap lifting on chamber and can switch cavity.
According to the present invention, on-off mechanism moves freely along orbit portion, and this orbit portion is along the orientation configuration in multiple chambeies.Thereby, make the cap lifting in a chamber and switch cavity, even move to other chambeies make other chambeies cap lifting and also can other chambeies of switch.Its result, can at least make multiple chambeies switch with 1 on-off mechanism, becomes and easily constructs simply equipment and also effective to reducing costs without switching arrangement being set in multiple chambeies respectively.
In addition, preferably cap can depart from from chamber.By with the together moving switch mechanism of cap departing from from chamber, can be at the top belay in chamber that is removed cap spacious and safe operating area.
In addition, be preferably provided with the maintaining part of piling up and keeping other caps at cap.The cap departing from from chamber by on-off mechanism, because for example can pile up the cap that is placed on side temporarily, so on-off mechanism need not remain cap, and can be opened multiple caps simultaneously.
In addition, preferably on-off mechanism has roller chain that one end can be combined in cap, hangs around the sprocket wheel of roller chain and rotarily actuate the driving part of sprocket wheel, and the other end of roller chain is bonded to sprocket wheel.Because the other end of roller chain is bonded on sprocket wheel, so roller chain follows the rotation of sprocket wheel to be rolled reliably, its result can be carried out the reliable rising of cap.In addition, according to said structure, can apply more in short-term at lifting travel, therefore favourable to the densification of equipment.
Invention effect:
According to the present invention, the simplification that its object is to provide a kind of equipment is easily and to reducing costs also effectively chamber series.
Accompanying drawing explanation
Fig. 1 is the side-view of the related film deposition system of embodiments of the present invention.
Fig. 2 is the vertical view of the related top board umformer of present embodiment.
Fig. 3 is the sectional view along the III-III line of Fig. 2.
Fig. 4 is the sectional view along the IV-IV line of Fig. 2.
Fig. 5 is expanded into a part for film device and the side-view that represents.
Fig. 6 is the stereographic map of top board.
In figure: 1-film deposition system (chamber series), 4A～4E-chamber, 9-top board, 9c-roof plate supporting pillar (maintaining part), 11,12-track (orbit portion), 13-top board umformer (on-off mechanism), 21b-drivingmotor (driving part), 25-lifting sprocket wheel, 27-roller chain, 27a-upper end (one end), 27b-bottom (the other end), D-orientation.
Embodiment
Below, the preferred implementation that with reference to accompanying drawing, electric current involved in the present invention is imported to structure describes.In the present embodiment, describe as an example with the film deposition system 1 that forms chamber series.
As shown in Figure 1, film deposition system 1 is according to the device of various vapour deposition methods film forming on substrate, and it adopts the in-line conveyance mode that is commonly called as.Film deposition system 1 possesses the multiple chamber 4A～4E that are arranged on stand 3, in each chamber 4A～4E, is provided with along the driving mechanism of predefined paths conveyance carrier.Carrier refers to the conveyance body that comprises pallet and substrate.
The effect of multiple chamber 4A～4E is different, is provided with successively load lock chamber 4A, leading portion cushion chamber 4B, film forming chamber 4C, back segment cushion chamber 4D and unloading chamber 4E from the upstream side in the path that carrier passed through.Each chamber 4A～4E divides according to vacuum gate valve 5 that can switch respectively.
Load lock chamber 4A and leading portion cushion chamber 4B receive substrate and reduce pressure successively.In addition, in load lock chamber 4A and leading portion cushion chamber 4B, by just at the base plate heating of conveyance to preset temperature.The substrate that is heated to preset temperature is moved into film forming chamber 4C.
Film forming chamber 4C is made up of 3 vacuum chambers that are interconnected, and in film forming chamber 4C, is held in high-temperature atmosphere.Be provided with the evaporation coating device based on various vapour deposition methods in the bottom of central vacuum chamber, and carry out the film forming of substrate by evaporation particle.
Substrate after film forming is discharged to back segment cushion chamber 4D.At back segment cushion chamber, 4D is provided with cooled plate, and substrate is slowly cooling by radiation in back segment cushion chamber 4D.Afterwards, substrate process after pressure regulation unloads chamber 4E and takes out of to film deposition system 1.
In each chamber 4A～4E, according to its effect, various pipe arrangements or equipment are installed.But the brief configuration in each chamber is common, and possesses respectively and become the frame of main part 7 (with reference to Fig. 5).Frame 7 possesses the outer wall 7a that surrounds rectangle, and top is opened and is formed with maintenance and uses opening 7b.Top board (cap) the 9 handling assembling freely of rectangle, to stop up this opening.Top board 9 is the weight of the 500kg that weighs.
As shown in Figure 6, on top board 9, be linked with 2 boatswain chair 9a.Boatswain chair 9a is long rectangular plate-like, orthogonal and extend with the long side direction of top board 9, and top board 9 erects relatively.Boatswain chair 9a has the both sides end 9b giving prominence to laterally from the both sides of the edge of top board 9.Erect roof plate supporting pillar (maintaining part) 9c of other top boards 9 of supporting at end 9b.Otch (receiving portion) 9d that is provided with the lower end of the roof plate supporting pillar 9c for being connected to other top boards 9 in the upper end of roof plate supporting pillar 9c and keep, is provided with the abutting part 9e with receiving portion 9d correspondingly-sized in lower end.
On each boatswain chair 9a, to be formed with 2 places and to block the through hole of cradle portion 27c (with reference to Fig. 3) (engagement part) 9f in order hanging.Through hole 9f is arranged on the position being overlapped on top board 9, in addition, considers to hang balance when top board 9 and is separately positioned on the position near roof plate supporting pillar 9c.
As shown in Figure 1, each chamber 4A～4E adjacency on stand 3 is arranged in row.On stand 3, be equipped with along the orientation D of each chamber 4A～4E and 2 tracks (orbit portion) 11,12 (with reference to Fig. 4) that arrange.Article 2, track 11,12 is configured to across each chamber 4A～4E, and guides the movement of top board umformer 13.Above one side's track 12, become the cross section word of falling V shape, and be formed with and prevent that the roller 15a of top board umformer 13 from departing from the pointed 11a of portion along long side direction.And, above the opposing party's track 12, become smooth plane, so that the smooth and easy rotation of roller 15b.
As shown in Figure 2 to 4, top board umformer (on-off mechanism) 13 possesses: door-shaped frame 15, is formed as across each chamber 4A～4E; The travel unit of roller 15a, 15b, is located at the lower end of the 15c of foot of door-shaped frame 15 left and right.Left and right refers to the direction orthogonal with the long side direction of track 11,12, in addition, and the left and right while referring to observe as benchmark using the conveyance direction of substrate.And front and back described later refer to along the direction of the long side direction of track 11,12, and refer to the fore-and-aft direction of the conveyance direction of substrate.In addition, Fig. 4 is the figure when observing with the conveyance opposite direction direction of substrate, therefore, becomes contrary with the left and right on accompanying drawing.
Before and after the 15c of left side foot, be provided with 2 roller 15a, 15a, before and after the 15c of right side foot, be provided with two roller 15b, 15b.On roller 15a, be formed with the groove 15d (with reference to Fig. 4) that embeds the pointed 11a of portion of track 11 and prevent left and right skew.In order to suppress the rotary resistance on track 12, on roller 15b, be provided with the smooth periphery 15e of no concave-convex.
As shown in Figure 2, the ceiling part (with reference to Fig. 2) of door-shaped frame 15 is made up of four 17L of crossbeam portion, 17R, 17F, 17B forming to overlook the framework that is rectangle.The 17L of crossbeam portion, the 17R that are configured in left and right extend to the direction identical with track 11,12 respectively, and the 17F of crossbeam portion, the 17B of front and back configuration are to extending with the orthogonal direction of track 11,12.In addition, dispose 2 piece gate beam portion 18L, the 18Rs parallel with the 17L of left and right crossbeam portion, 17R in the inner side of framework, on the 17F of crossbeam portion, 17B before and after the two ends of the 18L of gate beam portion, 18R are fixed on.
Be provided with the hoisting appliance 19 that makes top board 9 liftings in the ceiling part of door-shaped frame 15.Hoisting appliance 19 possesses the synchronous portion 21 of axle, top board lifting unit 23.The synchronous portion 21 of axle has: drive axial region 21a, rotation is bearing on the 17L of left and right crossbeam portion, 17R and the 18L of left and right gate beam portion, 18R freely; And drivingmotor (comprising step-down gear) 21b, be linked to and drive axial region 21a.It is upper that drivingmotor 21b is fixed on the left side 17L of crossbeam portion, drives the driving of axial region 21a by drivingmotor 21b forward or retrograde rotation.In addition, be forward the rotation to the direction that makes top board 9 increase, reverse is rotation to the direction that top board 9 is declined.
And the synchronous portion 21 of axle has the 1st driven axial region 21c, the 1st driven axial region 21c rotation is bearing on the left side 17L of crossbeam portion and the 18L of left side gate beam portion freely.On the 1st driven axial region 21c, be provided with the 1st driven sprocket 21d that transmits revolving force.In addition, the synchronous portion 21 of axle has the 2nd driven axial region 21e, and the 2nd driven axial region 21e rotation is supported on the right side 17R of crossbeam portion and the 18R of right side gate beam portion freely.Be provided with the 2nd driven sprocket 21f that transmits revolving force at the 2nd driven axial region 21e.And, on driving axial region 21a, be provided with: the 1st drive sprocket 21k, for transmitting revolving force by roller chain 21j to the 1st driven sprocket 21d; With the 2nd drive sprocket 21h, for transmitting revolving force by roller chain 21g to the 2nd driven sprocket 21f.
Top board lifting unit 23 have be located at the 1st driven axial region 21c lifting sprocket wheel 25, be located at the lifting sprocket wheel 25 of the 2nd driven axial region 21e and be located at the lifting sprocket wheel 25,25 that drives 2 places, axial region 21a left and right.In addition, top board lifting unit 23 has and is attached at respectively four roller chains 27 on lifting sprocket wheel 25.
The structure of four lifting sprocket wheels 25 and roller chain 27 is identical, therefore describes take a structure as representative.As shown in Figure 3, roller chain 27 is not ring-type and have two end 27a, 27b.Roller chain 27 parts are hung around on lifting sprocket wheel 25, and an end (upper end) 27a is combined on lifting sprocket wheel 25 by support 27g.
On the 27b of another end (bottom), be fixed with the cradle portion 27c for lifting top board 9.Cradle portion 27c possesses: the pin support 27d of U word shape, is inserted in the mode of clamping boatswain chair 9a; With tumbler pin 27e, run through the through hole 9f (with reference to Fig. 6) of pin support 27d and boatswain chair 9a and link cradle portion 27c and boatswain chair 9a.
The height of the interdependent door-shaped frame 15 of length of roller chain 27 and changing, but need to reach the top board 9 under the state that is assemblied in chamber 4A～4E.In addition, roller chain 27, relative to following rotating of lifting sprocket wheel 25 top board 9 to be raised up to the coiling length of the lifting sprocket wheel 25 under high state, is set the length of all-round 3/4 left and right of lifting sprocket wheel 25 for.
The configuration of four lifting sprocket wheels 25 and roller chain 27 is corresponding with the through hole 9f of boatswain chair 9a that is arranged on top board 9, considers to make balancedly lifting of top board 9, and is configured to make four roller chain 27 centers consistent with the center of gravity of top board 9.In addition, cradle portion 27c, the 27c that arrange left and right links mutually by linking support 27f (with reference to Fig. 4).
Then, the order of the switching operation of the top board 9 to the maintenance for film deposition system 1 describes.For example, leading portion cushion chamber 4B is when (with reference to Fig. 1) in maintenance, and roller 15a, the 15b of the travel unit by top board umformer 13 make top board umformer 13 move to the predetermined position across leading portion cushion chamber 4B.
Then, drive the drivingmotor 21b of controlroof umformer 13, the cradle portion 27c of four roller chains 27 that are fixed on lifting sprocket wheel 25 is declined.Then the boatswain chair 9a that, four all cradle portion 27c of roller chain 27 is hung over to top board 9 above fixes.
Then, drive and control drivingmotor 21b, all four roller chains 27 of synchronously slinging, rise top board 9.If top board 9 rises to predetermined position, stop drivingmotor 21b, and keep top board 9 in this position.
Then, roller 15a, the 15b of the travel unit by top board umformer 13, for example, make top board umformer 13 move to the predetermined position across the load lock chamber 4A on side.If arrival predetermined position, drives and control drivingmotor 21b and top board 9 is declined, and be positioned on the top board 9 of load lock chamber 4A (with reference to Fig. 5 and Fig. 6).If the top board 9 that conveyance is come is positioned on the top board 9 of load lock chamber 4A and is kept reliably by 4 roof plate supporting pillar 9c, unload the cradle portion 27c of roller chain 27 from top board 9.
Under this state, there is not top board 9 in leading portion cushion chamber 4B top, and operator can maintain operation securely.In addition, for example parallel with the maintenance operation of leading portion cushion chamber 4B, carry out maintenance when operation of back segment cushion chamber 4D, make to put down top board 9 and become empty top board umformer 13 and move to the predetermined position across back segment cushion chamber 4D, and unload lower roof plate 9 according to the order identical with said sequence.
If maintenance EO, is again arranged on the top board 9 being positioned on the top board 9 of load lock 4A on roller chain 27 and lifts, conveyance to the top position of leading portion cushion chamber 4B and put down, is assemblied on the opening 7b of leading portion cushion chamber 4B.
According to above film deposition system (chamber series) 1, top board umformer (on-off mechanism) 13 moves freely along track 11,12, and this track is along the orientation D of multiple chamber 4A～4E and configure.Thereby, also can for example make top board 9 liftings of leading portion cushion chamber 4B and switch leading portion cushion chamber 4B, and then move to back segment cushion chamber 4D and carry out switch back segment cushion chamber 4D.Its result, can at least make multiple chambeies 4A～4E switch with 1 top board umformer 13, becomes and easily constructs simply equipment and also effective to reducing costs without the switching arrangement of top board being set on multiple chamber 4A～4E respectively.
And, in bat-handle switch mechanism, even when top board open, on operator's head, also leave top board, consider operator's safety, be necessary to construct the mechanism that extremely firmly keeps top board.Especially, because top board is the weight weighing more than 500kg, for supporting and keeping the equipment of top board to be easy to become very large-scale equipment.But, in the present embodiment, top board 9 can depart from from chamber 4A～4E, therefore, by top board umformer 13 and the top board 9 departing from from chamber 4A～4E are together moved, thus can removed top board 9 chamber 4A～4E above guarantee simply the operating area of spaciousness and safety, to constructing effectively of compact and simple equipment.
And for example, in bat-handle switch mechanism, the operability when openness of top cover is 90 ° of following enough and maintenances is poor, but in the present embodiment, completely open by unloading lower roof plate 9, so operability when maintenance also becomes very high.
In addition, top board 9 is provided with roof plate supporting pillar (maintaining part) 9c that piles up other top boards 9 and keep.For example, thereby the top board 9 unloading from chamber 4A～4E by top board umformer 13, can pile up on the top board 9 that is placed on side, therefore can open multiple top boards 9 temporarily simultaneously.
In addition, the hoisting appliance 19 of top board umformer 13 has bottom 27b and is combined in roller chain 27 on top board 9, hangs around the lifting sprocket wheel 25 of roller chain 27 and rotarily actuate the drivingmotor 21b portion of lifting sprocket wheel 25, and the upper end 27a of roller chain 27 is combined on lifting sprocket wheel 25.Thereby roller chain 27 follows the rotation of lifting sprocket wheel 25 rolled-up reliably, its result can make top board 9 reliably rise.
Especially in the decontamination chamber of the restriction harshness of ceiling height, require simply and highly lower top board switching arrangement, can become compactness and simple device by above-mentioned hoisting appliance 19 is set.
In addition, the hoisting appliance 19 of top board umformer 13 has the synchronous portion 21 of axle, and therefore can not be offset four chains of ground lifting simultaneously, and can make top board 9 stable elevation, so that favourable to the densification of equipment.
Above, based on its embodiment, the present invention is illustrated, but the invention is not restricted to above-mentioned embodiment.For example, in the present embodiment, the example that an on-off mechanism (top board umformer) is set on the film deposition system that forms single film forming line has been described, still, by being arranged to mutually non-interfering configuration or controlling moving range or mobile order, multiple on-off mechanisms also can be set.And, can adopt the structure that single on-off mechanism can switch cap to multiple film forming lines.
Claims (4)
1. a chamber series, multiple chambeies adjacency with cap are arranged in row, it is characterized in that,
The chamber with described cap is configured on stand,
Possess:
Orbit portion, is configured on described stand along the orientation in described chamber; With
On-off mechanism, moves freely along described orbit portion, and make to be arranged on described chamber described cap lifting and can the multiple described chambeies of switch each.
2. chamber as claimed in claim 1 series, is characterized in that,
Described cap can depart from from described chamber.
3. chamber as claimed in claim 2 series, is characterized in that,
Be provided with and pile up the maintaining part that keeps cap described in other at described cap.
4. the chamber series as described in any one in claims 1 to 3, is characterized in that,
Described on-off mechanism has roller chain that one end can be combined in described cap, hang around the sprocket wheel of described roller chain and rotarily actuate the driving part of described sprocket wheel,
The other end of described roller chain is bonded on described sprocket wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010502726.7A CN102433539B (en) | 2010-09-29 | 2010-09-29 | Cavity series |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010502726.7A CN102433539B (en) | 2010-09-29 | 2010-09-29 | Cavity series |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102433539A CN102433539A (en) | 2012-05-02 |
| CN102433539B true CN102433539B (en) | 2014-07-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010502726.7A Active CN102433539B (en) | 2010-09-29 | 2010-09-29 | Cavity series |
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| Country | Link |
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| CN (1) | CN102433539B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106399957B (en) * | 2016-05-27 | 2019-01-08 | 中国电子科技集团公司第四十八研究所 | A kind of type of production multi-target magnetic control sputtering system for thin film hybrid IC |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1983515A (en) * | 2005-12-14 | 2007-06-20 | 东京毅力科创株式会社 | Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4403882B2 (en) * | 2004-05-31 | 2010-01-27 | 株式会社島津製作所 | Deposition system |
| JP5122842B2 (en) * | 2007-03-14 | 2013-01-16 | 日本鋳鉄管株式会社 | Method for preventing smelting top cover |
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2010
- 2010-09-29 CN CN201010502726.7A patent/CN102433539B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1983515A (en) * | 2005-12-14 | 2007-06-20 | 东京毅力科创株式会社 | Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus |
Non-Patent Citations (2)
| Title |
|---|
| JP特开2005-336590A 2005.12.08 |
| JP特开2008-223099A 2008.09.25 |
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| Publication number | Publication date |
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| CN102433539A (en) | 2012-05-02 |
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