JP5117472B2 - Organic EL device - Google Patents

Description

  The present invention relates to an organic electroluminescence (EL) device.

  In recent years, active development of display devices using organic electroluminescence (EL) elements that are self-luminous, have high-speed response, wide viewing angle, high contrast, and can be made thinner and lighter. It has been broken.

  This organic EL device injects holes from a hole injection electrode (anode), injects electrons from an electron injection electrode (cathode), and recombines holes and electrons in a light emitting layer to obtain light emission. It is. In order to obtain a full color display, it is necessary to configure pixels that emit light in red (R), green (G), and blue (B). The light emitting layer of the organic EL element that constitutes each pixel of red, green, and blue needs to be separately coated with light emitting materials that emit light having different emission spectra such as red, green, and blue. As a method of separately coating such a light emitting material, there is a vacuum deposition method. When a low molecular weight organic EL material is formed by such a vacuum deposition method, there is a method of performing mask deposition independently using a metallic fine mask opened for each color pixel (for example, Patent Document 1). reference).

JP 2003-157773 A

  An object of the present invention is to provide an organic EL device capable of suppressing deterioration of an organic EL element due to moisture.

According to this embodiment,
An insulating substrate, a first switching element and a second switching element disposed above the insulating substrate, respectively, disposed above the first switching element and the second switching element, and reach the first switching element. An insulating film in which a first contact hole and a second contact hole reaching the second switching element are formed, and the insulating film is disposed on the insulating film and extends into the first contact hole and extends to the first switching element. A first pixel electrode having a first contact portion electrically connected; and a first pixel electrode disposed on the insulating film and spaced apart from the first pixel electrode, extending into the second contact hole and extending to the second switching hole. A second pixel electrode having a second contact portion electrically connected to the element; and the first contact portion and the second contact A cover member which is formed of an insulating material with a are formed in the respective island-like covering individually, the first pixel electrode, the second pixel electrode, wherein the cover member, and wherein the first pixel electrode and the second a continuous film extending respectively on the insulating film between the pixel electrode, and the emission color different organic layer and on the first pixel electrode and on the second pixel electrode, on the organic layer There is provided an organic EL device comprising: a counter electrode disposed.

According to this embodiment,
An insulating substrate, wherein the first switching element and second switching element which are respectively disposed above the insulating substrate is disposed above the first switching element and the second switching element, reaches the first switching element A first interlayer insulating film in which a first contact hole and a second contact hole reaching the second switching element are formed;
An island-shaped second interlayer disposed on the first interlayer insulating film and having a side surface surrounded by a frame-shaped groove exposing the first interlayer insulating film, the first contact hole, and the second contact hole an insulating film, are respectively disposed on the island-shaped second interlayer insulating film, electrically connected from the side surface of the second interlayer insulating film extending Mashimashi the first switching element in the first contact hole A first pixel electrode having a first contact portion , and a second contact extending from the side surface of the second interlayer insulating film into the second contact hole and electrically connected to the second switching element. a second pixel electrode having a part, and a cover member which is formed of an insulating material while being formed with the first contact portion and the second contact portions, each island covering individually, the first Pixel electrodes, the second pixel electrode, wherein the cover member, and wherein a continuous film extending respectively into the groove between the first pixel electrode and the second pixel electrode, the a on the first pixel electrode There is provided an organic EL device comprising: an organic layer having a different emission color on the second pixel electrode; and a counter electrode disposed on the organic layer.

  ADVANTAGE OF THE INVENTION According to this invention, the organic EL apparatus which makes it possible to suppress deterioration by the water | moisture content of an organic EL element can be provided.

FIG. 1 is a cross-sectional view schematically showing the structure of a display panel including a switching element and first to third organic EL elements of an organic EL display device according to a first embodiment. FIG. 2 is a top view of the first to third organic EL elements shown in FIG. FIG. 3 is a cross-sectional view showing a structure in which the third organic EL element shown in FIG. 2 is cut along line III-III. FIG. 4 is a cross-sectional view schematically showing the structure of a display panel including switching elements and first to third organic EL elements of the organic EL display device according to the second embodiment. FIG. 5 is a top view of the first to third organic EL elements shown in FIG. FIG. 6 is a cross-sectional view showing a structure in which the third organic EL element shown in FIG. 5 is cut along the VI-VI line. FIG. 7 is a cross-sectional view of a third organic EL element in a modified example of the second embodiment. FIG. 8 is a cross-sectional view schematically showing the structure of the display panel including the switching element and the first to third organic EL elements of the organic EL display device according to the third embodiment. FIG. 9 is a top view of the first to third organic EL elements shown in FIG. FIG. 10 is a cross-sectional view schematically showing the structure of a display panel including a switching element and first to third organic EL elements of an organic EL display device according to a first modification of the third embodiment. FIG. 11 is a cross-sectional view schematically showing a structure of a display panel including a switching element and first to third organic EL elements of an organic EL display device according to a second modification of the third embodiment. FIG. 12 is a cross-sectional view schematically showing the structure of a display panel including a switching element and first to third organic EL elements of an organic EL display device according to a third modification of the third embodiment. FIG. 13 is a diagram showing the results of an experiment comparing the durability of organic EL elements due to moisture.

  Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings. In each figure, the same reference numerals are given to components that exhibit the same or similar functions, and duplicate descriptions are omitted.

  In the present embodiment, an organic EL display device adopting an active matrix driving method will be described as an example of the organic EL device.

  FIG. 1 is a cross-sectional view of a display panel 1 including a switching element SW and first to third organic EL elements OLED1 to OLED3 of the organic EL display device according to the first embodiment. The first to third organic EL elements OLED1 to OLED3 shown here are top emission types that emit light from the sealing substrate 200 side, but in the present embodiment, the first to third organic EL elements are emitted. The elements OLED1 to OLED3 may be of a bottom emission type that emits light from the array substrate 100 side.

  The array substrate 100 includes an insulating substrate 101 having optical transparency such as a glass substrate or a plastic substrate. The switching element SW and the first to third organic EL elements OLED1 to OLED3 are respectively arranged in the active area 102 for displaying an image above the insulating substrate 101.

  A first insulating film 111 is disposed on the insulating substrate 101. Such a first insulating film 111 extends over substantially the entire active area 102. The first insulating film 111 is made of, for example, an inorganic compound such as silicon oxide or silicon nitride.

  On the first insulating film 111, the semiconductor layer SC of the switching element SW is disposed. The semiconductor layer SC is made of, for example, polysilicon. In the semiconductor layer SC, a source region SCS and a drain region SCD are formed with a channel region SCC interposed therebetween.

  The semiconductor layer SC is covered with the second insulating film 112. The second insulating film 112 is also disposed on the first insulating film 111. Such a second insulating film 112 extends over substantially the entire active area 102. For example, the second insulating film 112 is formed of an inorganic compound such as silicon oxide or silicon nitride.

  On the second insulating film 112, the gate electrode G of the switching element SW is disposed immediately above the channel region SCC. In this example, the switching element SW is a top gate type p-channel thin film transistor (TFT). The gate electrode G is covered with the third insulating film 113. The third insulating film 113 is also disposed on the second insulating film 112. Such a third insulating film 113 extends over substantially the entire active area 102. The third insulating film 113 is made of, for example, an inorganic compound such as silicon oxide or silicon nitride.

  On the third insulating film 113, the source electrode S and the drain electrode D of the switching element SW are disposed. The source electrode S is in contact with the source region SCS of the semiconductor layer SC. The drain electrode D is in contact with the drain region SCD of the semiconductor layer SC. The gate electrode G, the source electrode S, and the drain electrode D of the switching element SW are formed using a conductive material such as molybdenum (Mo), tungsten (W), aluminum (Al), or titanium (Ti), for example. Yes.

  These source electrode S and drain electrode D are covered with a first interlayer insulating film 114. The first interlayer insulating film 114 is also disposed on the third insulating film 113. Such a first interlayer insulating film 114 extends over substantially the entire active area 102. The first interlayer insulating film 114 is formed of, for example, an inorganic compound such as silicon oxide or silicon nitride. Such a first interlayer insulating film 114 functions as a passivation film disposed above the switching element SW.

  A second interlayer insulating film 115 is disposed on the first interlayer insulating film 114. Such a second interlayer insulating film 115 extends over substantially the entire active area 102. The second interlayer insulating film 115 is formed of, for example, an organic compound such as an ultraviolet curable resin or a thermosetting resin.

  The first interlayer insulating film 114 and the second interlayer insulating film 115 correspond to an insulating film disposed above the switching element SW. That is, the first interlayer insulating film 114 and the second interlayer insulating film 115 are disposed between the switching element SW and the first to third organic EL elements OLED1 to OLED3. Further, a contact hole CH reaching the switching element SW is formed in the first interlayer insulating film 114 and the second interlayer insulating film 115. That is, a part of the drain electrode D of the switching element SW is exposed from the contact hole CH.

  Each pixel electrode PE constituting the first to third organic EL elements OLED1 to OLED3 is disposed on the second interlayer insulating film 115. Each pixel electrode PE of the first to third organic EL elements OLED1 to OLED3 extends into the contact hole CH and is electrically connected to the drain electrode D of the switching element SW exposed from the contact hole CH. Yes. These pixel electrodes PE correspond to, for example, anodes. The pixel electrodes PE are separated from each other, and the second interlayer insulating film 115 is exposed from between the adjacent pixel electrodes PE.

  Of each pixel electrode PE, a portion connected to the switching element SW is covered with a cover member CV. That is, the cover member CV is individually arranged corresponding to each pixel electrode PE, and is formed in an island shape. That is, the cover member CV that covers the pixel electrode PE of the first organic EL element OLED1, the cover member CV that covers the pixel electrode PE of the second organic EL element OLED2, and the pixel electrode PE of the third organic EL element OLED3 are covered. And the cover member CV to be separated from each other and are not in contact with each other.

  The connection structure between the pixel electrode PE and the switching element SW and the peripheral structure will be described in detail later.

  The structure of such a pixel electrode PE is not particularly limited, but in the example shown here, the pixel electrode PE has a two-layer structure in which a reflective layer PER and a transmissive layer PET are laminated. The reflective layer PER is disposed on the second interlayer insulating film 115. The transmissive layer PET is laminated on the reflective layer PER. The reflective layer PER is made of a conductive material having light reflectivity such as silver (Ag) or aluminum (Al). The transmissive layer PET is made of a light-transmitting conductive material such as indium tin oxide (ITO) or indium zinc oxide (IZO).

  Note that the pixel electrode PE may be a single reflective layer or a single transmissive layer, or may have a laminated structure of three or more layers. In the case of the top emission type in which the first to third organic EL elements OLED1 to OLED3 emit light from the sealing substrate 200 side, the pixel electrode PE includes at least a reflective layer PER. When the first to third organic EL elements OLED1 to OLED3 are of the bottom emission type that emits light from the insulating substrate 101 side, the pixel electrode PE does not include the reflective layer PER.

  The organic layer ORG constituting the first to third organic EL elements OLED1 to OLED3 is disposed on each pixel electrode PE. The organic layer ORG is a continuous film that extends over substantially the entire active area 102 and extends over the first to third organic EL elements OLED1 to OLED3. That is, the organic layer ORG covers each pixel electrode PE and each cover member CV, and also covers the second interlayer insulating film 115 exposed from between the pixel electrodes PE. The organic layer ORG includes at least a light emitting layer (not shown).

  The organic layer ORG may further include a hole injection layer, a hole transport layer, an electron injection layer, an electron transport layer, and the like. Further, the light emitting layer constituting the organic layer ORG may be formed of a fluorescent material or a phosphorescent material.

  The counter electrodes CE constituting the first to third organic EL elements OLED1 to OLED3 are arranged on the organic layer ORG. In this example, the counter electrode CE corresponds to a cathode. The counter electrode CE is a continuous film extending over almost the entire active area 102, extends over the first to third organic EL elements OLED1 to OLED3, and covers the organic layer ORG.

  Such a counter electrode CE is formed of, for example, a semi-transmissive layer. The semi-transmissive layer is made of, for example, a conductive material such as magnesium (Mg) / silver (Ag). The counter electrode CE may have a two-layer structure in which a semi-transmissive layer and a transmissive layer are stacked, a transmissive layer single-layer structure, or a semi-transmissive layer single-layer structure. The transmissive layer can be formed of a light-transmitting conductive material such as ITO or IZO. In the case where the first to third organic EL elements OLED1 to OLED3 are of the bottom emission type that emits light from the insulating substrate 101 side, the counter electrode CE includes at least a reflective layer or a semi-transmissive layer.

  The sealing substrate 200 is disposed above the first to third organic EL elements OLED1 to OLED3 formed on the array substrate 100. The sealing substrate 200 is an insulating substrate having optical transparency such as a glass substrate or a plastic substrate.

  In the illustrated example, the array substrate 100 and the sealing substrate 200 are separated from each other and a space is formed therebetween. However, between the array substrate 100 and the sealing substrate 200, the first to third organic layers are formed. A protective film or a resin layer covering the EL elements OLED1 to OLED3 may be arranged. The protective film is formed of an insulating material that is light transmissive and hardly penetrates moisture, for example, an inorganic compound such as silicon nitride or silicon oxynitride, and covers the first to third organic EL elements OLED1 to OLED3. It functions as a moisture barrier film that prevents the penetration of moisture into the first to third organic EL elements OLED1 to OLED3. The resin layer is formed of an organic compound such as a light transmissive thermosetting resin or an ultraviolet curable resin, and is filled between the array substrate 100 and the sealing substrate 200 or sealed with the array substrate 100. It functions as an adhesive layer that adheres to the substrate 200.

  In the present embodiment, the organic layer ORG including the light emitting layer is a continuous film extending over the first to third organic EL elements OLED1 to OLED3, but the light emission of the first to third organic EL elements OLED1 to OLED3. The colors are configured to be different from each other. In the example shown here, the emission color of the first organic EL element OLED1 is red, the emission color of the second organic EL element OLED2 is green, and the emission color of the third organic EL element OLED3 is blue.

  Here, the range where the dominant wavelength is 595 nm to 800 nm is defined as the first wavelength range, and the color within the first wavelength range is red. In addition, a range in which the dominant wavelength is longer than 490 nm and shorter than 595 nm is defined as a second wavelength range, and a color in the second wavelength range is green. Furthermore, a range where the dominant wavelength is 400 nm to 490 nm is defined as a third wavelength range, and a color within the third wavelength range is blue.

  Such a configuration can be realized by the following configuration, for example. That is, the organic layers ORG of the first to third organic EL elements OLED1 to OLED3 are, for example, a first dopant material whose emission color is red, a second dopant material whose emission color is green, and a third whose emission color is blue. Contains dopant material. About 1st organic EL element OLED1, a 1st dopant material light-emits and exhibits red. For the second organic EL element OLED2, the first dopant material is quenched, the second dopant material emits light, and exhibits a green color. Regarding the third organic EL element OLED3, the first dopant material and the second dopant material are quenched, and the third dopant material emits light and exhibits blue.

  The form of the organic layer ORG is not particularly limited, and a first light emitting layer containing a first dopant material, a second light emitting layer containing a second dopant material, and a third light emitting layer containing a third dopant material are stacked. It may be a three-layer structure, a two-layer structure in which a first light-emitting layer and a second light-emitting layer are stacked, or a single-layer structure including only the first light-emitting layer. In the case of the two-layer structure, the first light emitting layer may contain not only the first dopant material but also the second dopant material and the third dopant material, and the second light emitting layer includes not only the second dopant material. The first dopant material or the third dopant material may be included. In the case of a single layer structure, the first light emitting layer may include a first dopant material, a second dopant material, and a third dopant material.

  In addition, as the first to third dopant materials, the case where a quenching material is applied as a material whose light emission performance is changed by light irradiation has been described. However, the emission color is not limited to quenching but is changed by light irradiation such as ultraviolet rays. For example, a material whose light-emitting performance changes can be applied.

  For example, a material in which the three-dimensional structure of the molecule is changed by light irradiation and the emission color is changed or quenched can be applied. For example, the case where one dopant material is an isomer of the other dopant material corresponds to this example. Examples of cis isomers and trans isomers as types of isomers will be briefly described. The cis form refers to a three-dimensional structure of a molecule having two side chains (or atomic groups) on the same side with respect to the main skeleton, and the trans form refers to two side chains (or atomic groups) with respect to the main skeleton. Indicates the three-dimensional structure of molecules on opposite sides. Such a dopant material is selected from materials that change from a cis isomer to a trans isomer by light irradiation such as ultraviolet light, or change from a trans isomer to a cis isomer. As such a material, for example, a photochromic material is used. Can be mentioned.

  Examples of other isomers include materials referred to as light-converted proteins or fluorescent proteins. For example, among fluorescent proteins, there are materials that are activated from a quenching state and emit light when irradiated with ultraviolet light, and materials that are converted from one emission wavelength to another emission wavelength. It can be applied as the dopant material of the embodiment.

  In addition, a material in which the dopant material contained in the light emitting layer and the additive or the host material are chemically bonded to each other by light irradiation to change or quench the emission color is also applicable.

  The display panel 1 in the present embodiment employs a configuration in which the partition walls for partitioning the first to third organic EL elements OLED1 to OLED3 are omitted.

  FIG. 2 is a top view of the first to third organic EL elements OLED1 to OLED3 shown in FIG. In this figure, since the organic layer ORG and the counter electrode CE are common layers of the first to third organic EL elements OLED1 to OLED3, illustration is omitted, and the structure around the pixel electrode PE and the contact hole CH is illustrated. Show.

  The first to third organic EL elements OLED1 to OLED3 have basically the same structure and are arranged in the X direction. The pixel electrodes PE of the first to third organic EL elements OLED1 to OLED3 are spaced apart from each other. The second interlayer insulating film 115 is exposed from between adjacent pixel electrodes PE. Each pixel electrode PE includes a substantially rectangular reflective layer PER and transmissive layer PET.

  The contact hole CH penetrates to a switching element SW (not shown). The contact hole CH is formed in the vicinity of one corner of the substantially rectangular pixel electrode PE. The reflection layer PER is missing in the contact hole CH and its periphery. The transmissive layer PET overlaps the reflective layer PER and extends to the contact hole CH and its periphery. Nearly the entire contact hole CH is covered with the transmission layer PET. This transmission layer PET has a contact part PEC connected to a switching element SW (not shown).

  The cover member CV covers at least the contact part PEC of the pixel electrode PE. In the illustrated example, the cover member CV covers not only the contact portion PEC, but also the transmissive layer PET positioned immediately above the contact hole CH and the transmissive layer PET extending around the contact hole CH, and the pixel electrode PE The second interlayer insulating film 115 is overlapped with the periphery of. The cover member CV is formed of an insulating material made of an inorganic compound such as silicon nitride, for example.

  FIG. 3 is a cross-sectional view showing a structure in which the third organic EL element OLED3 shown in FIG. 2 is cut along line III-III. In this figure, only the main parts necessary for explanation are shown.

  A first interlayer insulating film 114 and a second interlayer insulating film 115 are stacked between the drain electrode D of the switching element and the pixel electrode PE. A contact hole CH penetrating to the drain electrode D is formed in the first interlayer insulating film 114 and the second interlayer insulating film 115.

  The reflective layer PER disposed on the second interlayer insulating film 115 does not reach the contact hole CH. The transmissive layer PET disposed on the reflective layer PER extends into the contact hole CH, covers the side surface 114S of the first interlayer insulating film 114 and the side surface 115S of the second interlayer insulating film 115, and also contacts the contact hole CH. To the drain electrode D exposed from. A portion of the transmissive layer PET that is in contact with the drain electrode D corresponds to the contact portion PEC.

  The cover member CV covers the contact part PEC in the transmissive layer PET. In the illustrated example, the cover member CV covers the entire portion of the transmission layer PET that extends into the contact hole CH. Such a cover member CV individually covers the contact portion PEC of each pixel electrode PE.

  The organic layer ORG is disposed on the transmission layer PET and the cover member CV. The counter electrode CE is disposed on the organic layer ORG. As illustrated, in the vicinity of the contact hole CH, not only the organic layer ORG but also the cover member CV is interposed between the pixel electrode PE and the counter electrode CE.

  According to the first embodiment, since the partition walls for partitioning the first to third organic EL elements OLED1 to OLED3 are omitted, the moisture content is reduced as compared with the configuration in which the partition walls are formed in a lattice shape with a resin material. It becomes possible to suppress diffusion. For this reason, it is possible to suppress deterioration of the first to third organic EL elements OLED1 to OLED3 due to moisture.

  According to the first embodiment, the contact part PEC electrically connected to the switching element SW in the pixel electrode PE is covered with the cover member CV. For this reason, even if the organic layer ORG on the pixel electrode PE is interrupted due to the effect of the level difference of the contact hole CH, the pixel electrode PE is covered with the cover member CV, so that the pixel electrode PE and the counter electrode CE Short circuit can be prevented.

  Furthermore, according to the first embodiment, since the organic layer ORG overlaps the entire pixel electrode PE, and the counter electrode CE is disposed on the organic layer ORG, substantially the entire pixel electrode PE contributes to light emission. It becomes an area to do. For this reason, the area (or aperture ratio) of the region contributing to light emission can be improved as compared with the configuration in which the partition wall is formed so as to overlap a part of the periphery of the pixel electrode PE and partition the organic EL element. it can.

  Further, according to the first embodiment, the organic layer ORG is a continuous film extending over the first to third organic EL elements OLED1 to OLED3, and the light emission of the first to third organic EL elements OLED1 to OLED3. The colors are configured to be different from each other. According to such a configuration, a metallic fine mask for separately coating the light emitting layer is unnecessary, and the partition as a receiver for supporting such a fine mask, or a color mixture when separately coating the light emitting layer A partition wall for preventing this is not necessary.

  Furthermore, according to the first embodiment, since the cover member CV is formed of an insulating material of an inorganic compound, even if the cover member CV is in contact with the second interlayer insulating film 115 formed of an organic compound, the cover member CV is The water diffusion path is not formed. For this reason, the cover member CV does not necessarily have to remain on the pixel electrode PE, and can be formed with a sufficiently wide margin. Moreover, by increasing the contact area between the cover member CV and the second interlayer insulating film 115, the contact area between the second interlayer insulating film 115 and the organic layer ORG can be reduced. It is possible to reduce the path of moisture diffusion to the organic layer ORG via 115. For this reason, the cover member CV may cover substantially the entire surface of the exposed second interlayer insulating film 115 between the adjacent pixel electrodes PE.

  In the first embodiment, the first interlayer insulating film 114 may be omitted from the insulating film disposed between the switching element SW and the pixel electrode PE. In this case, the second interlayer insulating film 115 corresponds to an insulating film disposed between the switching element SW and the pixel electrode PE.

  Next, a second embodiment will be described.

  FIG. 4 is a cross-sectional view of the display panel 1 including the switching element SW and the first to third organic EL elements OLED1 to OLED3 of the organic EL display device according to the second embodiment. The example shown in FIG. 4 is different from the example shown in FIG. 1 in that the cover member CV is a dome shape protruding upward from the pixel electrode PE. In addition, about the same structure as the example shown in FIG. 1, the same reference number is attached | subjected and detailed description is abbreviate | omitted.

  Between the insulating substrate 101 of the array substrate 100 and the first to third organic EL elements OLED1 to OLED3, a first insulating film 111, a second insulating film 112, a third insulating film 113, a first interlayer insulating film 114, A second interlayer insulating film 115, a switching element SW, and the like are disposed. A contact hole CH reaching the drain electrode D of the switching element SW is formed in the first interlayer insulating film 114 and the second interlayer insulating film 115.

  Each pixel electrode PE constituting the first to third organic EL elements OLED1 to OLED3 is disposed on the second interlayer insulating film 115. Each pixel electrode PE of the first to third organic EL elements OLED1 to OLED3 extends into the contact hole CH and is electrically connected to the drain electrode D of the switching element SW exposed from the contact hole CH. Yes.

  Of each pixel electrode PE, a portion connected to the switching element SW is covered with a cover member CV. That is, the cover member CV is individually arranged corresponding to each pixel electrode PE, and is formed in an island shape. The cover member CV is disposed on the pixel electrode PE and is not in contact with the second interlayer insulating film 115 exposed around the pixel electrode PE. Such a cover member CV has a dome shape that fills the recess formed by the contact hole CH and protrudes above the pixel electrode PE, that is, toward the sealing substrate 200 side.

  The organic layer ORG constituting the first to third organic EL elements OLED1 to OLED3 is disposed on each pixel electrode PE. The organic layer ORG is a continuous film that extends over substantially the entire active area 102 and extends over the first to third organic EL elements OLED1 to OLED3. That is, the organic layer ORG covers each pixel electrode PE and each cover member CV, and also covers the second interlayer insulating film 115 exposed from between the pixel electrodes PE.

  The counter electrodes CE constituting the first to third organic EL elements OLED1 to OLED3 are arranged on the organic layer ORG. The counter electrode CE is a continuous film extending over almost the entire active area 102, extends over the first to third organic EL elements OLED1 to OLED3, and covers the organic layer ORG.

  FIG. 5 is a top view of the first to third organic EL elements OLED1 to OLED3 shown in FIG. In this figure, since the organic layer ORG and the counter electrode CE are common layers of the first to third organic EL elements OLED1 to OLED3, illustration is omitted, and the structure around the pixel electrode PE and the contact hole CH is illustrated. Show.

  The first to third organic EL elements OLED1 to OLED3 have basically the same structure and are arranged in the X direction. The pixel electrodes PE of the first to third organic EL elements OLED1 to OLED3 are spaced apart from each other. The second interlayer insulating film 115 is exposed from between adjacent pixel electrodes PE. Each pixel electrode PE includes a substantially rectangular reflective layer PER and transmissive layer PET.

  The contact hole CH penetrates to a switching element SW (not shown). The contact hole CH is formed inside one corner of the substantially rectangular pixel electrode PE. The reflective layer PER is missing in the contact hole CH and its periphery, and has a substantially circular opening PEH. The transmissive layer PET overlaps the reflective layer PER and the opening PEH, and extends to the contact hole CH and its periphery. Nearly the entire contact hole CH is covered with the transmission layer PET. This transmission layer PET has a contact part PEC connected to a switching element SW (not shown).

  The cover member CV covers at least the contact part PEC of the pixel electrode PE. In the illustrated example, the cover member CV covers not only the contact portion PEC but also the transmissive layer PET positioned immediately above the contact hole CH and the transmissive layer PET extending around the contact hole CH. It is disposed inside the edge of the PET and does not contact the second interlayer insulating film 115 outside the edge of the transmission layer PET. Such a cover member CV is formed of, for example, an insulating material made of an organic compound such as various resin materials, and various methods such as a photolithography process and an ink jet method can be applied as a manufacturing method thereof.

  FIG. 6 is a cross-sectional view showing a structure in which the third organic EL element OLED3 shown in FIG. 5 is cut along a VI-VI line. In this figure, only the main parts necessary for explanation are shown.

  A first interlayer insulating film 114 and a second interlayer insulating film 115 are stacked between the drain electrode D of the switching element and the pixel electrode PE. A contact hole CH penetrating to the drain electrode D is formed in the first interlayer insulating film 114 and the second interlayer insulating film 115.

  The reflective layer PER disposed on the second interlayer insulating film 115 does not reach the contact hole CH. An opening PEH formed in the reflective layer PER is located immediately above the contact hole CH. The transmissive layer PET disposed on the reflective layer PER extends into the contact hole CH, covers the side surface 114S of the first interlayer insulating film 114 and the side surface 115S of the second interlayer insulating film 115, and also contacts the contact hole CH. To the drain electrode D exposed from. A portion of the transmissive layer PET that is in contact with the drain electrode D corresponds to the contact portion PEC.

  The cover member CV is filled on the contact part PEC in the transmissive layer PET. That is, the recess formed by the contact hole CH is filled with the cover member CV. The cover member CV overflows from the recess formed by the contact hole CH and protrudes upward from the pixel electrode PE. The surface CVS of the cover member CV rises substantially vertically in the vicinity in contact with the pixel electrode PE, smoothly curves, and forms a dome shape.

  The organic layer ORG is disposed on the transmissive layer PET and on the surface CVS of the cover member CV. The counter electrode CE is disposed on the organic layer ORG. As illustrated, in the vicinity of the contact hole CH, not only the organic layer ORG but also the cover member CV is interposed between the pixel electrode PE and the counter electrode CE.

  In the second embodiment, the same effect as that of the first embodiment can be obtained.

  In addition, according to the second embodiment, the cover member CV is formed of an insulating material of an organic compound, but is not in contact with the second interlayer insulating film 115 formed of the organic compound. No water diffusion path is formed through the. Further, since the surface CVS of the cover member CV is a smoothly curved dome shape, the adhesion of the organic layer ORG formed on the cover member CV to the cover member CV is improved, and the organic layer ORG is peeled off, It becomes possible to prevent the organic layer ORG from being interrupted by the influence of the unevenness of the base.

  Also in the second embodiment, the first interlayer insulating film 114 may be omitted from the insulating film disposed between the switching element SW and the pixel electrode PE. In this case, the second interlayer insulating film 115 corresponds to an insulating film disposed between the switching element SW and the pixel electrode PE.

  Next, a modification of the second embodiment will be described.

  FIG. 7 is a cross-sectional view of the third organic EL element OLED3. The example shown in FIG. 7 is different from the example shown in FIG. 6 in that the cover member CV is in contact with the second interlayer insulating film 115. A top view of such a configuration is the same as FIG.

  That is, the cover member CV is filled on the contact part PEC in the transmissive layer PET and fills the recess formed by the contact hole CH. Such a cover member CV overflows from the recess and protrudes upward from the pixel electrode PE. The cover member CV is in contact with the second interlayer insulating film 115 exposed outside the pixel electrode PE. The surface CVS of the cover member CV rises substantially vertically in the vicinity in contact with the pixel electrode PE and the second interlayer insulating film 115, smoothly curves, and forms a dome shape.

  Such a cover member CV is formed of, for example, an insulating material made of an organic compound such as various resin materials, and various methods such as a photolithography process and an ink jet method can be applied as a manufacturing method thereof.

  Also in such a modification, the same effect as the second embodiment described above can be obtained. Since the cover member CV is formed of an insulating material of an organic compound, there is a possibility that a moisture diffusion path may be formed at a location in contact with the second interlayer insulating film 115 formed of the organic compound. The area where the member CV and the second interlayer insulating film 115 are in contact with each other is very small, and there is no influence that causes deterioration of the organic EL element OLED.

  Also in the modification of the second embodiment, the first interlayer insulating film 114 may be omitted from the insulating film disposed between the switching element SW and the pixel electrode PE. In this case, the second interlayer insulating film 115 corresponds to an insulating film disposed between the switching element SW and the pixel electrode PE.

  In the second embodiment, the cover member CV is not limited to a dome shape, and may be a tapered shape or a mortar shape that covers a recess formed by the contact hole CH.

  Next, a third embodiment will be described.

  FIG. 8 is a cross-sectional view of the display panel 1 including the switching element SW and the first to third organic EL elements OLED1 to OLED3 of the organic EL display device according to the third embodiment. In the example shown in FIG. 8, compared to the example shown in FIG. 1, the second interlayer insulating film 115 serving as the foundation of each of the first to third organic EL elements OLED1 to OLED3 is formed in an island shape. It is different in point. In addition, about the same structure as the example shown in FIG. 1, the same referential mark is attached | subjected and detailed description is abbreviate | omitted.

  Between the insulating substrate 101 of the array substrate 100 and the first to third organic EL elements OLED1 to OLED3, a first insulating film 111, a second insulating film 112, a third insulating film 113, a first interlayer insulating film 114, A second interlayer insulating film 115, a switching element SW, and the like are disposed. A contact hole CH that reaches the drain electrode D of the switching element SW is formed in the first interlayer insulating film 114.

  The second interlayer insulating film 115 is disposed on the first interlayer insulating film 114. In the second interlayer insulating film 115, a trench GR exposing the first interlayer insulating film 114 and the contact hole CH is formed. The groove GR extends in the Y direction in the figure, and, although not shown in the figure, also extends in the X direction and is formed in a lattice shape. Therefore, the side surface 115S of the second interlayer insulating film 115 extends not only in the Y direction but also in the X direction, although the detailed illustration is omitted.

  Each of the pixel electrodes PE constituting the first to third organic EL elements OLED1 to OLED3 is disposed on each of the island-like second interlayer insulating films 115. That is, the second interlayer insulating film 115 on which the pixel electrode PE of the first organic EL element OLED1 is disposed, the second interlayer insulating film 115 on which the pixel electrode PE of the second organic EL element OLED2 is disposed, and the third organic EL The second interlayer insulating film 115 on which the pixel electrode PE of the element OLED3 is disposed is separated from each other with the groove GR interposed therebetween, and is separated from each other.

  Each pixel electrode PE of the first to third organic EL elements OLED1 to OLED3 extends toward the trench GR, and is formed on the first interlayer insulating film 114 via the side surface 115S of the second interlayer insulating film 115. The contact hole CH extends in the contact hole CH and is electrically connected to the drain electrode D of the switching element SW exposed from the contact hole CH.

  Of each pixel electrode PE, a portion connected to the switching element SW is covered with a cover member CV. That is, the cover member CV is individually arranged corresponding to each pixel electrode PE, and is formed in an island shape. The cover member CV is disposed on the pixel electrode PE. In the illustrated example, the cover member CV is in contact with the first interlayer insulating film 114 exposed by the groove GR. However, when the first interlayer insulating film 114 is a passivation film formed of an inorganic compound, Even if the member CV is in contact with the first interlayer insulating film 114, it does not form a moisture diffusion path. Note that the cover member CV may not be in contact with the first interlayer insulating film 114.

  Such a cover member CV may be formed of an insulating material made of an inorganic compound as in the first embodiment, or may be formed of an insulating material made of an organic compound as in the second embodiment.

  The organic layer ORG constituting the first to third organic EL elements OLED1 to OLED3 is disposed on each pixel electrode PE. The organic layer ORG is a continuous film that extends over substantially the entire active area 102 and extends over the first to third organic EL elements OLED1 to OLED3. That is, the organic layer ORG covers each pixel electrode PE and each cover member CV, and also extends to the trench GR and covers the first interlayer insulating film 114 exposed from between the pixel electrodes PE.

  The counter electrodes CE constituting the first to third organic EL elements OLED1 to OLED3 are arranged on the organic layer ORG. The counter electrode CE is a continuous film extending over almost the entire active area 102, extends over the first to third organic EL elements OLED1 to OLED3, and covers the organic layer ORG.

  FIG. 9 is a top view of the first to third organic EL elements OLED1 to OLED3 shown in FIG. In this figure, since the organic layer ORG and the counter electrode CE are common layers of the first to third organic EL elements OLED1 to OLED3, illustration is omitted, and the structure around the pixel electrode PE and the contact hole CH is illustrated. Show.

  In the first interlayer insulating film 114, a contact hole CH penetrating to a switching element SW (not shown) is formed. On the first interlayer insulating film 114, an island-shaped second interlayer insulating film 115 is disposed. Each of the second interlayer insulating films 115 serves as a base for the first to third organic EL elements OLED1 to OLED3.

  That is, the second interlayer insulating film 115 is formed with a trench GR that exposes the first interlayer insulating film 114 and the contact hole CH. The groove GR extends in the X direction and the Y direction, and is formed in a lattice shape. When attention is paid to the second interlayer insulating film 115 serving as a base of the second organic EL element OLED2, the second organic EL element OLED2 is surrounded by a frame-shaped groove GR extending in all directions. Such a second interlayer insulating film 115 has side surfaces 115S in four directions surrounded by the trench GR. Such side surfaces 115S extend in the X direction and the Y direction, respectively.

  The island-shaped second interlayer insulating film 115 is arranged in a matrix in the X direction and the Y direction on the first interlayer insulating film 114. The first interlayer insulating film 114 and the contact hole CH are exposed from between the adjacent second interlayer insulating films 115.

  The first to third organic EL elements OLED1 to OLED3 disposed on the second interlayer insulating film 115 have basically the same structure and are arranged in the X direction. The pixel electrodes PE of the first to third organic EL elements OLED1 to OLED3 are individually arranged on the island-shaped second interlayer insulating film 115 and are separated from each other.

  Each pixel electrode PE includes a substantially rectangular reflective layer PER and transmissive layer PET. The reflective layer PER is disposed on the second interlayer insulating film 115 and does not extend to the side surface 115S. The transmissive layer PET overlaps the reflective layer PER, and part of the transmissive layer PET extends to the contact hole CH and its periphery via the side surface 115S. Nearly the entire contact hole CH is covered with the transmission layer PET. This transmission layer PET has a contact part PEC connected to a switching element SW (not shown).

  The cover member CV covers at least the contact part PEC of the pixel electrode PE. In the illustrated example, the cover member CV covers not only the contact portion PEC but also the transmission layer PET located immediately above the contact hole CH and the transmission layer PET extending around the contact hole CH. The first interlayer insulating film 114 is in contact with the outer side of the layer PET.

  In the third embodiment, the same effect as that of the first embodiment can be obtained.

  In addition, the second interlayer insulating film 115 serving as the base of each of the first to third organic EL elements OLED1 to OLED3 is separated by the groove GR. The trench GR penetrates to the first interlayer insulating film 114 which is the base of the second interlayer insulating film 115. The first interlayer insulating film 114 is formed of an inorganic compound insulating material. Therefore, a moisture diffusion path through the second interlayer insulating film 115 is not formed, so that it is possible to further suppress moisture diffusion than in the first embodiment and the second embodiment. Thereby, deterioration by the water | moisture content of the 1st thru | or 3rd organic EL element OLED1 thru | or 3 can be suppressed.

  Next, a modification of the third embodiment will be described.

  In the example shown in FIG. 8, the reflective layer PER constituting the pixel electrode PE is disposed only on the second interlayer insulating film 115, the transmissive layer PET is disposed on the reflective layer PER, and one of the transmissive layers PET. Although the portion extends to the contact hole CH via the side surface 115S, the pixel electrode PE covers the side surface 115S of the second interlayer insulating film 115 in the modified example described below, and the first electrode in the trench GR. It is in contact with the interlayer insulating film 114. In addition, about the same structure as the example shown in FIG. 1, the same referential mark is attached | subjected and detailed description is abbreviate | omitted.

  FIG. 10 is a cross-sectional view of the display panel 1 including the switching element SW and the first to third organic EL elements OLED1 to OLED3 of the organic EL display device according to the first modification of the third embodiment. Compared with the example shown in FIG. 8, the example shown in FIG. 10 is a reflection in which the second interlayer insulating film 115 serving as the foundation of each of the first to third organic EL elements OLED1 to OLED3 constitutes the pixel electrode PE. The difference is that it is covered by the layer PER.

  That is, the reflective layer PER constituting the pixel electrode PE is disposed on the second interlayer insulating film 115 and also covers the side surface 115S. In the illustrated example, among the side surfaces 115S of the second interlayer insulating film 115, only the side surface 115S extending in the Y direction is covered with the reflective layer PER, but the side surface 115S extending in the X direction (not shown) is also reflected. Covered by layer PER. The reflective layer PER covering the side surface 115S is in contact with the first interlayer insulating film 114 exposed from the trench GR.

  The transmissive layer PET constituting the pixel electrode PE is disposed on the reflective layer PER located immediately above the second interlayer insulating film 115, and only a part thereof extends to the contact hole CH, and the drain electrode of the switching element SW D is electrically connected.

  The organic layer ORG is disposed on the transmissive layer PET and the cover member CV, and is also disposed on the first interlayer insulating film 114 exposed from the groove GR. The organic layer ORG is not in contact with the side surface 115S of the second interlayer insulating film 115. That is, the reflective layer PER is interposed between the organic layer ORG and the side surface 115S. The counter electrode CE is disposed on the organic layer ORG.

  FIG. 11 is a cross-sectional view of the display panel 1 including the switching element SW and the first to third organic EL elements OLED1 to OLED3 of the organic EL display device according to the second modification of the third embodiment. Compared with the example shown in FIG. 8, the example shown in FIG. 11 includes a second interlayer insulating film 115 serving as a base of each of the first to third organic EL elements OLED1 to OLED3. The difference is that the layer is covered with PET.

  That is, the reflective layer PER constituting the pixel electrode PE is disposed on the second interlayer insulating film 115. The transmissive layer PET constituting the pixel electrode PE is disposed on the reflective layer PER located immediately above the second interlayer insulating film 115 and also covers the side surface 115S of the second interlayer insulating film 115. In the illustrated example, of the side surface 115S of the second interlayer insulating film 115, only the side surface 115S extending in the Y direction is covered with the transmission layer PET, but the side surface 115S extending in the X direction (not illustrated) is also transmitted. Covered by layer PET. The transmissive layer PET covering the side surface 115S is in contact with the first interlayer insulating film 114 exposed from the trench GR. This transmission layer PET further extends partly to the contact hole CH and is electrically connected to the drain electrode D of the switching element SW.

  The organic layer ORG is disposed on the transmissive layer PET and the cover member CV, and is also disposed on the first interlayer insulating film 114 exposed from the groove GR. The transmissive layer PET is interposed between the organic layer ORG and the side surface 115S, and the organic layer ORG does not contact the side surface 115S of the second interlayer insulating film 115. The counter electrode CE is disposed on the organic layer ORG.

  FIG. 12 is a cross-sectional view of the display panel 1 including the switching element SW and the first to third organic EL elements OLED1 to OLED3 of the organic EL display device according to the third modification of the third embodiment. Compared with the example shown in FIG. 8, the example shown in FIG. 12 is a reflection in which the second interlayer insulating film 115 serving as the foundation of each of the first to third organic EL elements OLED1 to OLED3 constitutes the pixel electrode PE. The difference is that the reflective layer PER is covered with the layer PER and the reflective layer PER is further covered with the transmissive layer PET.

  That is, the reflective layer PER constituting the pixel electrode PE is disposed on the second interlayer insulating film 115 and also covers the side surface 115S. In the illustrated example, among the side surfaces 115S of the second interlayer insulating film 115, only the side surface 115S extending in the Y direction is covered with the reflective layer PER, but the side surface 115S extending in the X direction (not shown) is also reflected. Covered by layer PER. The reflective layer PER covering the side surface 115S is in contact with the first interlayer insulating film 114 exposed from the trench GR.

  The transmissive layer PET constituting the pixel electrode PE covers the reflective layer PER that is disposed on the reflective layer PER located immediately above the second interlayer insulating film 115 and covers the side surface 115S, and a part thereof is a contact. It extends to the hole CH and is electrically connected to the drain electrode D of the switching element SW.

  The organic layer ORG is disposed on the transmissive layer PET and the cover member CV, and is also disposed on the first interlayer insulating film 114 exposed from the groove GR. The reflective layer PER and the transmissive layer PET are interposed between the organic layer ORG and the side surface 115S, and the organic layer ORG does not contact the side surface 115S of the second interlayer insulating film 115. The counter electrode CE is disposed on the organic layer ORG.

  Also in the first to third modified examples, the same effects as those of the third embodiment described above can be obtained.

  Further, according to these first to third modifications, the side surface 115S of the second interlayer insulating film 115 serving as the foundation of each of the first to third organic EL elements OLED1 to OLED3 constitutes the pixel electrode PE. It is covered with at least one of the reflective layer PER and the transmissive layer PET. For this reason, the second interlayer insulating film 115 and the organic layer ORG do not contact each other. Thereby, it is possible to suppress the diffusion of moisture into the second interlayer insulating film 115 or the diffusion of moisture from the second interlayer insulating film 115 into the organic layer ORG.

  Next, an experiment for comparing the durability of the organic EL element OLED with moisture was performed on the organic EL display device according to the present embodiment.

  A switching element SW, a first insulating film 111, a second insulating film 112, a third insulating film 113, and the like were formed on a first mother substrate made of a 400 mm × 500 mm rectangular glass substrate. In the first mother substrate, 24 regions for forming the array substrate 100 in which the diagonal dimension of the active area 102 is 3.5 type are formed. The switching element SW is configured as a low-temperature polysilicon TFT having a polysilicon thin film as a semiconductor layer. Eleven (A, B, C, D, E, F, G, H, I, J, K) such first mother substrates were prepared.

  Subsequently, for each of the first mother substrates A, B, D, E, H, I, J, and K, a first interlayer insulating film 114 that is a passivation film is formed on the third insulating film 113, and A second interlayer insulating film 115 was formed on the first interlayer insulating film 114. On the other hand, for each of the first mother substrates of C, F, and G, the second interlayer insulating film 115 was formed on the third insulating film 113 without forming a passivation film. Note that the first interlayer insulating film 114 was formed of an inorganic compound, and the second interlayer insulating film 115 was formed of an organic compound.

  For each of the first mother substrates A, B, D, and E, a contact hole CH penetrating to the switching element SW is formed in the first interlayer insulating film 114 and the second interlayer insulating film 115. For each of the first mother substrates H, I, J, and K, the first interlayer insulating film 114 has a contact hole CH penetrating to the switching element SW, and the second interlayer insulating film 115 has a contact The grooves GR exposing the holes CH and the first interlayer insulating film 114 are formed in a lattice shape, and the second interlayer insulating film 115 is separated in an island shape. For each of the first mother substrates of C, F, and G, a contact hole CH that penetrates to the switching element SW is formed in the second interlayer insulating film 115.

  Subsequently, a pixel electrode PE was formed on the second interlayer insulating film 115 for each of the eleven first mother substrates A to K. The pixel electrode PE has a two-layer laminated structure. A reflective layer PER is formed on the second interlayer insulating film 115, and a transmissive layer PET made of ITO is laminated on the reflective layer PER. Each transmission layer PET extends into the contact hole CH, and the switching element SW and the pixel electrode PE are electrically connected.

  For the first mother substrate of H, the reflective layer PER is disposed on the inner side of the outer periphery of the second interlayer insulating film 115, and the transmissive layer PET is the second interlayer insulating film 115 except for a portion that is electrically connected to the switching element SW. Is arranged on the inner side of the outer periphery (corresponding to the configuration example shown in FIG. 8).

  With respect to the first mother substrate of I, the reflective layer PER is arranged to extend outside the outer periphery of the second interlayer insulating film 115 and cover the side surface 115S, and the transmissive layer PET is electrically connected to the switching element SW. Except for the portion, it is disposed inside the outer periphery of the second interlayer insulating film 115 (corresponding to the configuration example shown in FIG. 10).

  For the first mother substrate of J, the reflective layer PER is disposed on the inner side of the outer periphery of the second interlayer insulating film 115, and the transmissive layer PET is not only a portion that is electrically connected to the switching element SW but also the second interlayer insulating film 115. These are arranged so as to extend outside the outer periphery and cover the side surface 115S (corresponding to the configuration example shown in FIG. 11).

  For the first mother substrate of K, the reflective layer PER is disposed so as to extend outside the outer periphery of the second interlayer insulating film 115 and cover the side surface 115S, and the transmissive layer PET is also connected to the switching element SW. In addition to the conductive portion, the second interlayer insulating film 115 is disposed so as to extend outside the outer periphery and cover the side surface 115S (corresponding to the configuration example shown in FIG. 12).

  Subsequently, a partition wall having a thickness of 2 μm was formed on the first mother substrate of A so as to surround the periphery of the pixel electrode PE. This partition is made of a resin material and covers the contact portion PEC of the pixel electrode PE where the pixel electrode PE and the switching element SW are electrically connected.

  On the other hand, for the ten first mother substrates B to K, the contact portion PEC of the pixel electrode PE in which the pixel electrode PE and the switching element SW are electrically connected was covered with the cover member CV without forming a partition wall.

  For each of the first mother substrates B and C, after forming a silicon nitride (SiN) thin film by a plasma CVD method, the thin film is patterned into an island shape through a photolithography process, and a cover member CV that covers the contact portion PEC (B having the first interlayer insulating film 114 corresponds to the configuration example shown in FIG. 1).

  About each 1st mother board | substrate of D, E, F, and G, the recessed part formed of the contact hole CH was filled with the resin material by the inkjet system, and the cover member CV which covers the contact part PEC was formed. For each of the first mother substrates D and F, the cover member CV extends outward from the outer periphery of the pixel electrode PE and is in contact with the second interlayer insulating film 115 (D having the first interlayer insulating film 114). Corresponds to the configuration example shown in FIG. For each of the first mother substrates E and G, the cover member CV stays inside the outer periphery of the pixel electrode PE and does not contact the second interlayer insulating film 115 (having the first interlayer insulating film 114). D corresponds to the configuration example shown in FIGS. 4 and 6).

  About each 1st mother board | substrate of H, I, J, and K, the recessed part formed of the contact hole CH was filled with the resin material by the inkjet system, and the cover member CV which covers the contact part PEC was formed.

  Subsequently, the first mother substrate of A is set in a resistance heating type organic EL film forming apparatus, a hole transport layer is formed as an organic EL material on the pixel electrode PE, and a light emitting layer is formed on the hole transport layer. The electron transport layer was formed on the light emitting layer, the electron injection layer was formed on the electron transport layer, and the counter electrode CE was formed on the electron injection layer using magnesium / silver. . In addition, when forming a light emitting layer, it coats using a high precision metal mask, forms the red light emitting layer which light-emits red light about 1st organic EL element OLED1, and forms 2nd organic EL element OLED2. A red light emitting layer that emits green light was formed, and a red light emitting layer that emitted blue light was formed for the third organic EL element OLED3.

  On the other hand, the 10 first mother substrates B to K are respectively set in a resistance heating type organic EL film forming apparatus, and a hole transport layer is formed as an organic EL material on the pixel electrode PE. On the hole transport layer, after forming a red light emitting layer containing a first dopant material that emits red light over the entire surface of each of the regions where the first to third organic EL elements OLED1 to OLED3 are formed, once the organic EL Take out from the film forming apparatus, irradiate the region where the second organic EL element OLED2 and the third organic EL element OLED3 are formed through a photomask with ultraviolet light having a main wavelength of 365 nm, and emit red light formed in these regions The first dopant material contained in the layer was prevented from emitting light.

  Thereafter, each of the ten first mother substrates B to K is set again in the organic EL film forming apparatus, and the first to third organic EL elements OLED1 to OLED3 are formed on the red light emitting layer, respectively. After forming the green light emitting layer containing the second dopant material that emits green light over the entire surface of the region, the green light emitting layer is once taken out from the organic EL film forming apparatus, and is formed in the region where the third organic EL element OLED3 is formed through the photomask. Ultraviolet light having a dominant wavelength of 365 nm was irradiated so that the second dopant material contained in the green light emitting layer formed in this region did not emit light.

  Further, each of the ten first mother substrates B to K is set again in the organic EL film forming apparatus, and the first to third organic EL elements OLED1 to OLED3 are formed on the green light emitting layer, respectively. After forming a blue light-emitting layer containing a third dopant material that emits blue light over the entire surface, an electron transport layer is formed on the blue light-emitting layer, and an electron injection layer is further formed on the electron transport layer Thereafter, a counter electrode CE was formed on the electron injection layer using magnesium / silver.

  On the other hand, a second mother substrate made of a glass substrate was prepared as the sealing substrate 200. An ultraviolet curable resin was applied on the second mother substrate using a dispenser as a sealing material. The second mother substrate is bonded to the first mother substrate. Thereafter, the ultraviolet curable resin serving as a sealing material was irradiated with ultraviolet rays to cure the ultraviolet curable resin. Note that no desiccant is provided between the first mother substrate and the second mother substrate.

  Then, the substrate pair in which the first mother substrate and the second mother substrate were bonded together was cleaved into 24 display panels 1, and then a signal supply source was mounted on each display panel 1.

  Twenty-four display panels 1 taken out from the first mother substrate of A are set as the A group, and similarly, each of the 24 display panels 1 taken out from the first mother substrates of B to K are set as the B to K groups, respectively. It was.

  Subsequently, all the display panels of each group A to K are put in a high-temperature and high-humidity tank (temperature: 85 ° C., relative humidity: 85%) and left to stand and taken out every predetermined time. Inspected. As a lighting test, power was supplied to each of these display panels to light them, and each lighting state was visually observed to count the number of panels in which dark spots were generated. The result is shown in FIG.

  For the A group having the first interlayer insulating film 114 and having a grid-like partition wall surrounding the pixel electrode PE instead of forming the cover member, the display panel is dark on 7 display panels out of 24 after 20 hours. Spots were generated, and after 25 hours, dark spots occurred on 23 of 24 display panels, and after 30 hours, dark spots occurred on all 24 display panels.

  With respect to the B group and the C group provided with the cover member CV formed of an inorganic compound with the partition walls omitted, it was confirmed that moisture diffusion was suppressed more than the A group, and the growth of dark spots was possible.

  That is, for the B group having the first interlayer insulating film 114 and the cover member CV made of an inorganic compound covering the contact hole CH, a dark spot is displayed on one of the 24 display panels after 30 hours. 4 out of 24 after 35 hours, 10 out of 24 after 40 hours, 20 out of 24 after 45 hours, and all 24 display panels after 50 hours A dark spot occurred.

  For the C group in which the first interlayer insulating film 114 is omitted and the cover member CV made of an inorganic compound covers the contact hole CH, a dark spot is displayed on one of the 24 display panels after 30 hours. 5 out of 24 after 35 hours, 13 out of 24 after 40 hours, 21 out of 24 after 45 hours, all 24 display panels after 50 hours A dark spot occurred. Thus, by omitting the partition walls and providing the cover member CV made of an inorganic compound, the deterioration of the organic EL element due to moisture can be suppressed regardless of the presence or absence of the first interlayer insulating film 114 that is a passivation film.

  In each of the D group, the E group, the F group, and the G group provided with the cover member CV formed of an organic compound, with the partition walls omitted, moisture diffusion is suppressed more than the A group, and the growth of dark spots is suppressed. Was confirmed to be possible.

  That is, for the D group having the first interlayer insulating film 114, the cover member CV made of an organic compound covers the contact hole CH, and a part of the cover member CV is in contact with the second interlayer insulating film 115 After 30 hours, dark spots occurred on 2 out of 24 display panels, 7 out of 24 after 35 hours, 15 out of 24 after 40 hours, 45 hours Later, 22 out of 24 sheets and dark spots occurred on all 24 display panels after 50 hours.

  Further, for the E group in which the first interlayer insulating film 114 is formed and the cover member CV made of an organic compound covers the contact hole CH and the cover member CV is not in contact with the second interlayer insulating film 115, 35 hours is required. Dark spots occur on 2 out of 24 display panels after elapse, 7 out of 24 display panels after 45 hours, and 16 out of 24 display panels after 50 hours. did.

  Further, regarding the F group in which the first interlayer insulating film 114 is omitted, the cover member CV made of an organic compound covers the contact hole CH, and a part of the cover member CV is in contact with the second interlayer insulating film 115. A dark spot occurs on one of the 24 display panels after 30 hours, 6 of 24 sheets after 35 hours, 13 of 24 sheets after 40 hours, 45 hours Later, 22 out of 24 sheets and dark spots occurred on all 24 display panels after 50 hours.

  Further, the first interlayer insulating film 114 is omitted, and the cover member CV made of an organic compound covers the contact hole CH and the G group in which the cover member CV is not in contact with the second interlayer insulating film 115 is 35 hours. A dark spot occurs on one of the 24 display panels after the elapse of time, 2 of the 24 sheets after 40 hours, 6 of the 24 sheets after 45 hours, and 24 sheets after 50 hours. Dark spots occurred on 15 of the display panels.

  Thus, by omitting the partition and providing the cover member CV made of an organic compound, deterioration of the organic EL element due to moisture can be suppressed regardless of the presence or absence of the first interlayer insulating film 114 that is a passivation film. In particular, in the E group and the G group in which the cover member CV is not in contact with the second interlayer insulating film 115, the moisture content is higher than in the D group and the F group in which the cover member CV is in contact with the second interlayer insulating film 115. It was confirmed that diffusion was suppressed and deterioration of the organic EL element could be further suppressed.

  The partition walls are omitted, the first interlayer insulating film 114 and the second interlayer insulating film 115 are separated by the groove GR, and the H group, the I group, the J group, and the K including the cover member CV formed of an organic compound are provided. In each of the groups, it was confirmed that moisture diffusion was suppressed as compared with the A group, and the growth of dark spots could be suppressed.

  That is, with respect to the H group in which the reflective layer PER and the transmissive layer PET are disposed on the inner side of the outer periphery of the second interlayer insulating film 115, dark spots are generated in three of the 24 display panels after 40 hours. After 45 hours, dark spots occurred on 5 out of 24 display panels and 7 out of 24 display panels after 50 hours.

  For the I group in which the reflective layer PER covers the second interlayer insulating film 115 and the transmissive layer PET is arranged on the inner side of the outer periphery of the second interlayer insulating film 115, 2 out of 24 sheets after 45 hours have elapsed. Dark spots were generated on one display panel, and after 50 hours, dark spots were generated on five of the 24 display panels.

  Further, for the J group in which the reflective layer PER is disposed on the inner side of the outer periphery of the second interlayer insulating film 115 and the transmissive layer PET covers the second interlayer insulating film 115, two of 24 sheets after 45 hours have elapsed. A dark spot was generated on the display panel, and after 50 hours, a dark spot was generated on four of the 24 display panels.

  Further, for the K group in which the reflective layer PER and the transmissive layer PET cover the second interlayer insulating film 115, a dark spot is generated in one of the 24 display panels after 45 hours, and 24 hours after 50 hours. Dark spots occurred on three of the display panels.

  As described above, the partition wall is omitted, the second interlayer insulating film 115 is separated by the groove GR, and the cover member CV made of an organic compound is provided, whereby the moisture diffusion path is blocked, and the second interlayer insulating film 115 is formed. It was confirmed that moisture diffusion was suppressed and deterioration of the organic EL element could be further suppressed as compared with the groups A to G that were not separated by the grooves.

  In particular, for each of groups I to K covered up to the side surface 115S of the island-like second interlayer insulating film 115 by at least one of the reflective layer PER and the transmissive layer PET constituting the pixel electrode PE, the second interlayer insulating film It was confirmed that the diffusion of moisture is further suppressed and the deterioration of the organic EL element can be further suppressed as compared with the H group in which the organic layer ORG is in contact without the side surface 115S of the 115 being covered with the pixel electrode PE.

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the spirit of the invention in the stage of implementation. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine suitably the component covering different embodiment.

  In the present embodiment, the organic EL display device has been described as the organic EL device, but the present invention can also be used for organic EL lighting, an organic EL printer head, and the like.

  In this embodiment, the case where the organic EL element OLED is a top emission type including the reflective layer PER has been described. However, a bottom emission type organic EL element OLED including a pixel electrode PE not including the reflective layer is applied. May be.

DESCRIPTION OF SYMBOLS 1 ... Display panel OLED1 ... 1st organic EL element OLED2 ... 2nd organic EL element OLED3 ... 3rd organic EL element 101 ... Insulating substrate 111 ... 1st insulating film 112 ... 2nd insulating film 113 ... 3rd insulating film 114 ... 1st 1st interlayer insulation film 115 ... 2nd interlayer insulation film CH ... contact hole SW ... switching element PE ... pixel electrode PEC ... contact part PER ... reflection layer PET ... transmission layer ORG ... organic layer CE ... counter electrode CV ... cover member

Claims (9)

An insulating substrate;
A first switching element and a second switching element respectively disposed above the insulating substrate;
An insulating film disposed above the first switching element and the second switching element and having a first contact hole reaching the first switching element and a second contact hole reaching the second switching element;
A first pixel electrode disposed on the insulating film, having a first contact portion extending into the first contact hole and electrically connected to the first switching element;
A second pixel electrode having a second contact portion disposed on the insulating film and spaced apart from the first pixel electrode, extending into the second contact hole and electrically connected to the second switching element. When,
A cover member that is formed in an island shape that individually covers the first contact portion and the second contact portion and is formed of an insulating material;
Continuously extending on the first pixel electrode , on the second pixel electrode , on the cover member, and on the insulating film between the first pixel electrode and the second pixel electrode. An organic layer having a light emission color different between the first pixel electrode and the second pixel electrode;
A counter electrode disposed on the organic layer;
An organic EL device comprising:   The cover member is formed of an organic compound filled on the first contact portion and the second contact portion, and is a dome protruding upward from each of the first pixel electrode and the second pixel electrode. The organic EL device according to claim 1, wherein the organic EL device is a mold.   2. The organic EL device according to claim 1, wherein the cover member stays on the first pixel electrode and the second pixel electrode, respectively, and is not in contact with the insulating film. An insulating substrate;
A first switching element and a second switching element respectively disposed above the insulating substrate;
A first interlayer insulating layer disposed above the first switching element and the second switching element, wherein a first contact hole reaching the first switching element and a second contact hole reaching the second switching element are formed. A membrane,
An island-shaped second interlayer disposed on the first interlayer insulating film and having a side surface surrounded by a frame-shaped groove exposing the first interlayer insulating film, the first contact hole, and the second contact hole An insulating film;
First disposed on the island-shaped second interlayer insulating film, extending from the side surface of the second interlayer insulating film into the first contact hole and electrically connected to the first switching element. A first pixel electrode having a contact portion; and a second contact portion extending from the side surface of the second interlayer insulating film into the second contact hole and electrically connected to the second switching element. Two pixel electrodes;
A cover member that is formed in an island shape that individually covers the first contact portion and the second contact portion and is formed of an insulating material;
On the first pixel electrode, on the second pixel electrode, on the cover member, and, it is a continuous film extending respectively into the groove between the first pixel electrode and the second pixel electrode , Organic layers having different emission colors on the first pixel electrode and the second pixel electrode,
A counter electrode disposed on the organic layer;
An organic EL device comprising: 5. The device according to claim 4, wherein each of the first pixel electrode and the second pixel electrode covers a side surface of the second interlayer insulating film and is in contact with the first interlayer insulating film in the groove. Organic EL device. An insulating substrate;
A first switching element, a second switching element, and a third switching element respectively disposed above the insulating substrate;
A first contact hole that is disposed above the first switching element, the second switching element, and the third switching element and that reaches the first switching element, and a second contact hole that reaches the second switching element And an insulating film in which a third contact hole reaching the third switching element is formed;
A first pixel electrode disposed on the insulating film, having a first contact portion extending into the first contact hole and electrically connected to the first switching element;
A second pixel electrode having a second contact portion disposed on the insulating film and spaced apart from the first pixel electrode, extending into the second contact hole and electrically connected to the second switching element. When,
A third contact portion disposed on the insulating film and spaced apart from the first pixel electrode and the second pixel electrode, extending into the third contact hole and electrically connected to the third switching element. A third pixel electrode having
A cover member formed of an insulating material and formed in an island shape that individually covers the first contact portion, the second contact portion, and the third contact portion;
On the first pixel electrode, on the second pixel electrode, on the third pixel electrode, on the cover member, on the insulating film between the first pixel electrode and the second pixel electrode And a continuous film extending on the insulating film between the second pixel electrode and the third pixel electrode, the first dopant material having a red emission color, and the second having a green emission color. An organic layer containing a dopant material and a third dopant material whose emission color is blue;
A counter electrode disposed on the organic layer,
In the organic layer between the first pixel electrode and the counter electrode, the first dopant material emits light, and in the organic layer between the second pixel electrode and the counter electrode, the first dopant material is quenched. The second dopant material emits light, and the organic layer between the third pixel electrode and the counter electrode is extinguished by the first dopant material and the second dopant material, and the third dopant material emits light. An organic EL device characterized by the above. An insulating substrate;
A first switching element, a second switching element, and a third switching element respectively disposed above the insulating substrate;
A first contact hole that is disposed above the first switching element, the second switching element, and the third switching element and that reaches the first switching element, and a second contact hole that reaches the second switching element And a first interlayer insulating film in which a third contact hole reaching the third switching element is formed;
A side surface disposed on the first interlayer insulating film and surrounded by a frame-like groove exposing the first interlayer insulating film, the first contact hole, the second contact hole, and the third contact hole An island-shaped second interlayer insulating film having:
First disposed on the island-shaped second interlayer insulating film, extending from the side surface of the second interlayer insulating film into the first contact hole and electrically connected to the first switching element. A first pixel electrode having a contact portion; a second pixel having a second contact portion extending from the side surface of the second interlayer insulating film into the second contact hole and electrically connected to the second switching element; An electrode and a third pixel electrode having a third contact portion extending from the side surface of the second interlayer insulating film into the third contact hole and electrically connected to the third switching element;
A cover member formed of an insulating material and formed in an island shape that individually covers the first contact portion, the second contact portion, and the third contact portion;
On the first pixel electrode , on the second pixel electrode , on the third pixel electrode , on the cover member , the groove between the first pixel electrode and the second pixel electrode, and A continuous film extending in the groove between the second pixel electrode and the third pixel electrode, a first dopant material whose emission color is red, a second dopant material whose emission color is green, and light emission An organic layer comprising a third dopant material having a blue color;
A counter electrode disposed on the organic layer,
In the organic layer between the first pixel electrode and the counter electrode, the first dopant material emits light, and in the organic layer between the second pixel electrode and the counter electrode, the first dopant material is quenched. The second dopant material emits light, and the organic layer between the third pixel electrode and the counter electrode is extinguished by the first dopant material and the second dopant material, and the third dopant material emits light. An organic EL device characterized by the above. The first pixel electrode has a two-layer structure of a first reflective layer that is missing in the first contact hole and a first transmission layer that overlaps the first reflective layer and extends to the first contact hole.
The second pixel electrode has a two-layer structure including a second reflective layer missing in the second contact hole and a second transmissive layer that overlaps the second reflective layer and extends to the second contact hole. The organic EL device according to claim 1. The first pixel electrode overlaps the first reflective layer disposed on the second interlayer insulating film and the first reflective layer, and a part thereof extends to the first contact hole via the side surface. It is a two-layer structure with the existing first transmission layer,
The second pixel electrode overlaps the second reflective layer disposed on the second interlayer insulating film and the second reflective layer, and a part thereof extends to the second contact hole via the side surface. The organic EL device according to claim 4, wherein the organic EL device has a two-layer structure with the existing second transmissive layer.

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