JP5113018B2 - リニアエンコーダ装置 - Google Patents
リニアエンコーダ装置 Download PDFInfo
- Publication number
- JP5113018B2 JP5113018B2 JP2008284567A JP2008284567A JP5113018B2 JP 5113018 B2 JP5113018 B2 JP 5113018B2 JP 2008284567 A JP2008284567 A JP 2008284567A JP 2008284567 A JP2008284567 A JP 2008284567A JP 5113018 B2 JP5113018 B2 JP 5113018B2
- Authority
- JP
- Japan
- Prior art keywords
- scale
- light
- linear encoder
- source device
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 claims description 20
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 8
- 239000011295 pitch Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24428—Error prevention
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24476—Signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/2448—Correction of gain, threshold, offset or phase control
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Optical Transform (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008284567A JP5113018B2 (ja) | 2008-11-05 | 2008-11-05 | リニアエンコーダ装置 |
DE200910051708 DE102009051708B4 (de) | 2008-11-05 | 2009-11-03 | Linearcodierer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008284567A JP5113018B2 (ja) | 2008-11-05 | 2008-11-05 | リニアエンコーダ装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010112800A JP2010112800A (ja) | 2010-05-20 |
JP2010112800A5 JP2010112800A5 (de) | 2010-08-05 |
JP5113018B2 true JP5113018B2 (ja) | 2013-01-09 |
Family
ID=42063265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008284567A Expired - Fee Related JP5113018B2 (ja) | 2008-11-05 | 2008-11-05 | リニアエンコーダ装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5113018B2 (de) |
DE (1) | DE102009051708B4 (de) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61218909A (ja) * | 1985-03-25 | 1986-09-29 | Matsushita Electric Works Ltd | 光電式物体検知装置 |
JPH06137899A (ja) | 1992-10-28 | 1994-05-20 | Okuma Mach Works Ltd | 光学式リニアエンコーダ |
JP3544576B2 (ja) * | 1995-03-17 | 2004-07-21 | オリンパス株式会社 | 光学式エンコーダ |
US7064842B1 (en) * | 1999-01-13 | 2006-06-20 | Olympus Optical Co., Ltd. | Optical displacement sensor and optical encoder |
US7002137B2 (en) * | 2001-08-30 | 2006-02-21 | Gsi Lumonics Corporation | Reference point talbot encoder |
JP2003139572A (ja) * | 2001-11-06 | 2003-05-14 | Ntt Electornics Corp | エンコーダ |
-
2008
- 2008-11-05 JP JP2008284567A patent/JP5113018B2/ja not_active Expired - Fee Related
-
2009
- 2009-11-03 DE DE200910051708 patent/DE102009051708B4/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE102009051708B4 (de) | 2015-04-09 |
JP2010112800A (ja) | 2010-05-20 |
DE102009051708A1 (de) | 2010-05-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20080099666A1 (en) | Photoelectric encoder, scale and method of manufacturing scale | |
JP2006317244A (ja) | 光学式エンコーダ | |
JP2009186471A (ja) | 光学式位置測定装置 | |
US10768026B2 (en) | Optical element | |
JP2004534247A (ja) | 位置測定装置 | |
US9557193B2 (en) | Optical encoder | |
JP5824342B2 (ja) | リニアエンコーダ | |
JP2005526951A (ja) | 基準点タルボットエンコーダ | |
JP5128364B2 (ja) | 位置測定装置 | |
JP5113018B2 (ja) | リニアエンコーダ装置 | |
JP2020193929A (ja) | 光学式エンコーダ | |
KR101434925B1 (ko) | 정점 검출 장치 및 변위 측정 장치 | |
JP2007071634A (ja) | 光電式エンコーダ | |
JP5069364B2 (ja) | 光電式インクリメンタル型エンコーダ | |
JP5147877B2 (ja) | 光学式エンコーダ用センサ及び光学式エンコーダ | |
JP6684087B2 (ja) | 光エンコーダ | |
JP2011043438A (ja) | 反射型光電式エンコーダ | |
JP2017211327A (ja) | 発光ユニット、発光受光ユニットおよび光電式エンコーダ | |
JP2009069033A (ja) | 光電式インクリメンタル型エンコーダ | |
JP4543311B2 (ja) | 光学式エンコーダ | |
JP7475973B2 (ja) | 光学式エンコーダ及び制御装置 | |
JP2020012784A (ja) | 光学式角度センサ | |
JP7039642B2 (ja) | リニア・スケールを有するエンコーダ | |
JP4869641B2 (ja) | 光学式エンコーダ | |
JP4578210B2 (ja) | 光学式変位測定装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100622 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110802 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120510 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120515 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120711 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121002 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121011 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20151019 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5113018 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |