JP5106932B2 - Fluid supply system - Google Patents

Description

  The present invention relates to a fluid supply system, for example, a fluid supply system that supplies various gases, liquefied gas, or liquid filled in a high-pressure vessel.

  Conventionally, in various manufacturing processes including semiconductor manufacturing processes, high-pressure containers filled with various gases, liquefied gases, or liquids (collectively referred to as “fluids” hereinafter) have been used and are fluid consuming equipment. In semiconductor manufacturing apparatuses and various process apparatuses (hereinafter referred to as “process apparatuses”), these fluids are received and used in a gaseous state or a liquid state. At this time, the container filled with the fluid is stored in the supply facility, sent to the process device via the supply pipe, and replaced when the remaining amount is less than a predetermined amount due to consumption. Here, in a semiconductor manufacturing apparatus or the like, a plurality of types of fluids are often used, and a plurality of filling containers are disposed in the supply facility. Therefore, it is necessary to correctly replace the prepared filling containers. However, some gas types cannot be connected because the base of the outlet of the filling container is different, but in many cases, the base etc. are common and any filling container can be connected without any problem. There was a possibility that a connection error based on an operation error occurred. For this reason, in order to prevent such a human error, a method for managing the filling container and a method for managing the entire supply system have been devised.

  Specifically, as shown in FIGS. 5A to 5C, it is possible to reliably manage a high-pressure gas container filled with various gases, and to grasp the state of the filling line in the filling equipment. A management method for a high-pressure gas container that can be used has been proposed. That is, a high-pressure gas container filled with gas by a gas filling facility having a plurality of filling stations A and B and a plurality of filling ports A1 to A30 and B1 to B30 provided in the plurality of filling stations A and B. In managing 110, a label 101 printed with a filling number 107 is attached to the high-pressure gas container 110 together with gas information such as a gas type 102 and management information such as a filling date 105. The filling number 107 is filled with each high-pressure gas container 110 based on the number of systems of the filling bases A and B, the number of filling ports A1 to A30 and B1 to B30, and the number of high-pressure gas containers 110 input at the time of gas filling. The order is calculated, and a filling number 107 based on the calculated filling order is printed on the label 101. Here, 103 indicates a filling pressure, 104 indicates a capacity, 106 indicates a manufacturing company, and 108 indicates a bar code (see, for example, Patent Document 1).

  On the other hand, as shown in FIG. 6, a bottom surface inspection management device for inspecting a bottom surface portion of a high-pressure vessel filled with liquefied gas has been proposed. In other words, the unique number, the container type, and the manufacturing time of the high-pressure container 201 are input in advance, and a predetermined period (15 years or 8 years) is added to the manufacturing time according to the container type, and a filling time limit that does not require a bottom surface inspection. Is calculated by the filling time limit calculation unit 207a, and these data are stored in the storage unit 208. The unique correspondence number of the high-pressure vessel 201 is read from the barcode reader 204 at the time of filling, and the alarm unit 209 notifies the expiration date when the filling time limit is earlier than the current time. When a bottom surface inspection pass notification signal is input after performing a bottom surface inspection, the update data calculation unit adds a predetermined period to the filling period of the unique number and updates it to a new filling period. Here, 202 denotes a filling device, 203 denotes a bar code label, 205 denotes a control unit, 206 denotes a key input unit, and 207b denotes an update data calculation unit (see, for example, Patent Document 2).

JP 07-280190 A JP 05-256400 A

However, the liquefied gas supply apparatus as described above sometimes has the following problems.
(A) As described above, a filling label for a high-pressure gas container having a bar code has been devised for preventing traces of gas species and ensuring traceability such as manufacturing history, but has a fixed bar code reader. In the assembly device, when the high pressure gas container is attached, the position dependency, that is, the direction of the cap of the container valve is constant, so the filling label attaching position is also fixed, and it is attached to a place other than this fixed position on the surface of the high pressure gas container. There has been a problem that the filled label thus made cannot be read by a bar code reader.
(B) Particularly, in the high pressure vessel inspection management device as shown in FIG. 6, the device side always has the same conditions, and it is determined whether or not filling is possible depending on the quality of the high pressure vessel. As described above, it does not have a function for judging the suitability at the present time depending on the situation of the consumption equipment. Therefore, for example, in a manufacturing process that consumes liquefied gas, it is a fact that it is not possible to cope with replacement of a piping system accompanying a change in gas type.
(C) When a high-pressure vessel such as a standard gas is replaced, information (mixing rate, component, etc.) of the replaced gas is input at the time of the operation and registered and stored in a higher-level information system. However, the information was not used during the actual work of replacing the container, and no system was available.

  The object of the present invention is to quickly and safely fill a container filled with liquefied gas, etc., with an easy-to-operate and simple configuration in order to prevent a supply system trouble due to human error or a spillover of damage to consumption equipment. An object of the present invention is to provide a fluid supply system capable of performing maintenance management.

  As a result of intensive studies to solve the above problems, the present inventors have found that the above object can be achieved by the fluid supply system described below, and have completed the present invention.

The present invention includes a filling container filled with a fluid, an installation part for fixing the filling container, a joint part closely connected to the outlet of the filling container, and a pipe part having the joint part as one end. A fluid supply system comprising a facility for consuming the fluid,
Information recording section A in which information a including attributes and filling conditions of the filled fluid is readable is written, and fluid attributes and receiving conditions to which a piping system including the joint and the piping section can be applied. An information recording unit B in which information b is written in a readable manner, an information recording unit C in which information c including the attributes and acceptance conditions of a fluid required by the facility that consumes the fluid is readable, and an information a An information reading unit that reads any one of -b, and an information processing unit that determines the suitability of information a and information b and the suitability of information a and information c,
The filling container has a concave bottom portion, and is disposed in the installation portion so that the bottom portion is in contact, the information recording portion A is disposed on the bottom portion, and the information reading portion is disposed on the installation portion. The information recording unit B is disposed in any one of the joining unit, the piping unit, the information reading unit, or the information processing unit, and the information recording unit C is disposed in the process control unit. When there is a property, a fluid is supplied to the consumption equipment.

  As described above, when the filling container is a general high-pressure container, the base of the outlet may be defined in a special shape for a specific type of main component to be filled. A distinction may be made depending on the components to be filled. For example, the base is a dedicated shape in the case of acetylene, and most of the combustible gases such as hydrogen and methane are in the shape of the left rotating female screw. The container colors may be red for hydrogen, green for carbon dioxide, blue for carbon monoxide, white for ammonia, and so on. Therefore, when the fluid to be used is such a special component, if the joint portion of the joint is made to have a shape suitable for this, an artificial connection error will not occur. However, the use of such a special component is generally not used. When dealing with various filling containers, it is not always easy to avoid artificial connection errors. Also, if you try to forcibly attach when the shape of the coupling part of the base and the joint is different, one or both of the shapes may be damaged, and the leakage of the filler due to poor sealing during subsequent use And may cause corrosion. Therefore, in this system, objective information a including the attribute and filling condition of the fluid filled in the filling container, and the attribute of the fluid that can be applied to the piping system including the piping portion after the connecting portion to be connected, The information b including the acceptance conditions and the information c including the attributes and acceptance conditions of the fluid required by the equipment that consumes the fluid are prepared, and the suitability can be automatically judged instead of leaving it to human judgment. The system addresses these challenges.

  Specifically, an information recording unit A such as a two-dimensional code or an IC tag in which information a is readable is provided on a part of the bottom of the filling container, such as a joint, a piping unit, an information reading unit, or An information recording unit B in which information b is written in a readable manner is arranged in one of the information processing units, and an information recording unit C in which information c is written in a readable manner is arranged in the process control unit. Equipped with a mechanism to read out and determine suitability to construct an easy-to-operate and simple fluid supply system without human error, and to quickly and safely maintain and manage filling containers such as liquefied gas It has become possible.

  Here, “fluid” means a gas, liquid, or mixed form in use conditions, and “fluid attributes” means the type of fluid (all in the case of multiple types) and composition (concentration). , Boiling point, melting point, vapor pressure, corrosivity or toxicity.

  The present invention is the fluid supply system described above, wherein the filling container has a hollow bottom, the information recording unit A is disposed on the bottom, and the information reading unit is disposed on the installation unit. It is characterized by that.

  In the conventional method, there is a problem that important information cannot be used effectively because the two-dimensional code laid on the outer peripheral surface of the filling container is damaged or the positional relationship with the reading device is unstable. The present invention effectively uses the unique shape of the bottom depression, which has been rarely used in the past, although many of the filling containers have, and an information recording section A in which information about the filling container and the fluid inside is written. By disposing here, it was possible to protect the information recording portion A that could be damaged, and to integrate such information with the container reliably. In addition, by disposing the information reading unit in the installation unit that is in contact with the bottom of the filling container, even if the information recording unit A requires scanning such as a two-dimensional code, the external influence is blocked. Information can be read accurately in close proximity, making it possible to accurately determine suitability.

  The present invention is the above-described fluid supply system, wherein the compatibility determination information includes information d during operation of the filling container including an actual value of the internal pressure or weight of the filling container, and information on the operation status of the consumption equipment. e is input to the information reading unit, and the information processing unit determines compatibility of fluid supply to the consuming equipment.

  In this system, it is important to determine the compatibility between the filling container and the piping system and the compatibility between the filling container and the consumption equipment, and the state of the fluid that can be supplied from the filling container during actual operation and the process device It is important to accurately and quickly determine the compatibility with the fluid consumption state. Therefore, by using the information d including the measured value of the internal pressure or weight of the filling container as the information on the filling container and using the information e on the operation status of the process equipment as the information on the process equipment, it is not left to human judgment. It became possible to make an accurate determination of suitability.

The present invention is the fluid supply system described above, wherein the supply of fluid from the filling container to the consuming equipment is performed by the following process (1) installing the filling container in the installation unit (2) providing in the installation unit An installation signal is transmitted from the detection unit that recognizes the installed operation. (3) The installation signal is received by the information reading unit or / and the information processing unit. (4) The information recording unit A receives the information reading unit. The information a written in the information recording unit B, the information b written in the information recording unit B, and the information c written in the information recording unit C are read. (5) In the information processing unit, the read information a and Comparing information b and information a with information c to determine suitability (6) In the case of judgment of suitability, connect the outlet of the filling container to the joint (7) filling the fluid Pipe from container Which comprises carrying out the supply to the consumer facility via.

  As described above, in this system, in addition to the compatibility between the filling container and the piping system and the compatibility between the filling container and the consuming equipment, the compatibility between the filling container and the process device in actual operation is accurately and quickly determined. It is important to judge. In the former case, information a regarding the filling container and the fluid filled therein, information b of the piping system including the attributes and receiving conditions of the fluid, and information of the process equipment including the attributes and receiving conditions of the required fluid Based on c, the connection work between the filling container and the piping system is used as a reference point for the execution of the judgment of suitability. By comparing each information, an artificial connection mistake is eliminated and the loaded filling is carried out. The container is appropriately connected, and an appropriate fluid can be supplied to the process apparatus via the piping section.

The present invention is the above-described fluid supply system, after the process (1) to (5), connects the junction to the following process (6a) filled container outlet (7a) of the outlet opening between (8a) In the information processing section, the information d and the information e are compared to determine suitability (9a) If it is judged that suitability exists, the flow path opening / closing valve is opened (10a) It implements by supplying a fluid to the said consumption equipment via a piping part from a filling container.

  This system accurately and promptly determines the compatibility between the filled container and the process apparatus during actual operation in a state where the loaded filled container is properly connected to the piping system. In actual operation, based on the information on the filling container including the measured value of the internal pressure or weight of the filling container and the information on the operating status of the process equipment, it is determined whether the fluid supply start operation from the filling container to the process equipment is appropriate. By comparing the two types of information, human error in connection is eliminated, and it is determined that the filled container is in an appropriate state for the actual operating conditions. Thus, an appropriate fluid can be supplied to the process device via the piping unit.

  As described above, according to the present invention, it is possible to prevent the trouble of the supply system due to human error or the spillover of the damage to the consumption equipment, and the operability and simple configuration can be used for liquefied gas or the like. It is possible to provide a fluid supply system that can perform maintenance and management of a filled container quickly and safely.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Here, a filling container filled with a fluid, an installation part for fixing the filling container, a joint part closely connected to the outlet of the filling container, a pipe part having the joint part as one end, and a fluid consumption And an information recording unit A in which information a including attributes and filling conditions of the filled fluid is readable, and a joint and piping. The information recording part B in which the information b including the attribute and acceptance condition of the fluid that can be applied to the piping system including the part is readable is written, and the attribute and acceptance condition of the fluid required by the facility that consumes the fluid It is based on having the information recording part C in which the information c was written readable, the information reading part which reads any or all of the information ab, and the information processing part which judges the suitability of both information To do. The information recording unit A is disposed in a part of the filling container, the information recording unit B is disposed in any one of the joining unit, the piping unit, the information reading unit, or the information processing unit, and the information recording unit C is configured as the process control unit. When the information is compatible, the fluid is supplied to the consuming equipment.

<Example of basic configuration of fluid supply system according to the present invention>
FIG. 1 is a schematic view illustrating a fluid supply system according to the present invention (hereinafter referred to as “the present system”). In this system, a filling container 1 filled with a specific fluid is installed with its bottom 1a held by an installation unit 2. The filling container 1 delivers an internal fluid from the outlet 1b provided in the upper part. A junction 3a is connected to the outlet 1b, and is further connected to a process device 4 which is a consumption facility by a pipe 3 connected to the junction 3a, and fluid from the filling container 1 is supplied. The supply pressure of the fluid supplied from the filling container 1 is adjusted by the pressure reducing valve 5, and ON / OFF of the supply to the process apparatus 4 is controlled by the flow path opening / closing valve 6. These functions in the process device 4 are controlled and managed by the process control unit 7.

Here, the target fluid of the present system includes various gases, liquefied gases, or liquids that can be applied to the system supplied from the filling container 1 to the process device 4 as described above. Specifically, oxygen, Compressed gas such as hydrogen or argon, special material gas (NH ₃ , BCL ₃ , CL ₂ , SiH ₂ CL ₂ , Si ₂ H ₆ , HF, C ₃ F ₈ , WF ₆ etc.) used in the semiconductor manufacturing process Liquefied gas having a low vapor pressure) liquefied gas such as carbon dioxide, water for hydrogenation reaction, various refrigerants, and the like can be mentioned, including the case where the liquefied gas is supplied in a liquid state.

  In addition, in the operation of removing or attaching the filling container 1, it is preferable to purge between the outlet 1b and the joint 3a with an inert gas or the like. The same applies to resuming use after a long period of non-use. This is to prevent environmental pollution due to fluid vaporization, reaction with oxygen or moisture in the air, or contamination of the flow path due to dust in the air. Purge is preferably based on the fluid actually used, but if a large amount of purge gas is required for a long time or due to characteristics such as high cost or adsorptivity, an inert gas such as nitrogen or clean air may be used. Is preferred. The purge operation may be controlled manually or automatically by the information processing unit 8.

  Control processing information in each of the above units is controlled and managed by the information processing unit 8. This system adapts information a including attributes and filling conditions of the fluid filled in the filling container 1 and information b including attributes and receiving conditions of fluids applicable to the piping system including the joint 3a and the piping 3 In addition, the compatibility of the information a and the information c including the attributes and acceptance conditions of the fluid required by the process device 4 is determined, and the fluid is supplied to the process device 4 when each information is compatible. It is characterized by doing. Specifically, the following information can be processed.

  (A-1) The installation or replacement of the filling container 1 is detected by a lever-type switch 2a (for example, a limit switch) provided on the side of the installation unit 2 in FIG. The position and function of the switch 2a are not limited to this. For example, an optical sensor (not shown) is provided on the mounting surface 2b of the installation unit 2 and detection is performed by blocking light associated with the installation of the filling container 1. Various methods such as a method can be applied. When the installation signal of the filling container 1 from the switch 2a is transmitted to the information processing section 8, (a-2) reading of the following information is performed.

  (A-2) The information a relating to the filling container 1 and the fluid filled therein includes the container number, the container capacity, the fluid filling amount (weight or equivalent volume), the filling pressure, and the filling date as the fluid filling conditions. In addition to the expiration date, the fluid attributes include fluid type (all in the case of multiple types), composition (concentration), boiling point, melting point, vapor pressure, corrosivity, toxicity, and the like. All or part of such information is readable and written in an information recording section A such as a two-dimensional code or an IC tag, and is mounted on the filling container 1. When a two-dimensional code is used as the information recording unit A, the information reading unit 8a can read the information a using a scanner, and when an IC tag is used, the information reading unit 8a is placed at a predetermined distance around it. It can be made to function by providing in the range.

  At this time, when the filling container 1 has the bottom portion 1a having a hollow shape, the information recording portion A in which the information a is written is preferably disposed on the bottom portion. When the normal filling container 1 is a high-pressure container, its bottom 1a is hemispherical inward as illustrated in FIGS. 2 (A) and 2 (B) in order to ensure pressure resistance and stability during installation. In many cases, the shape or the shape of a dent folded back from the periphery to the inside is used. Therefore, in the present system, the information recording unit A is disposed in such a recessed portion 1c to protect the information recording unit A that may have been peeled off or damaged during transportation or maintenance in the conventional method. The information a related to the filling container 1 could be integrated with the container without fail.

  Moreover, it is preferable that the information reading part 8a which reads the information a is arrange | positioned in the mounting surface 2b. As the filling container 1 is installed, the information recording unit A and the information reading unit 8a can be brought close to each other, and the influence of disturbance on the information recording unit A provided in the recessed portion can be reduced, and each position is limited. This improves the reading accuracy. The read information a is transmitted from the information reading unit 8a to the information processing unit 8.

  As described above, by arranging the two-dimensional code or the IC tag on the bottom 1a of the filling container 1, the position dependency with respect to the conventional fixed code reader is eliminated, and a reading error can be prevented. In addition, since it is no longer necessary to input information when connecting the filling container 1 to the joint 3a with a two-dimensional code or an IC tag, it is possible to prevent an artificial error such as an input error. It is possible to prevent a common connection error.

  (B) In the information b including the attributes and acceptance conditions of the fluid required by the process apparatus 4 to which the piping system can be applied, the type, composition, filling pressure, and boiling point of the fluid corresponding to the information a. , Melting point, corrosiveness or toxicity. As described above, such information is readable and written in the information recording unit B such as a two-dimensional code or an IC tag, and any one of the joint unit 3a, the piping unit 3, the information reading unit 8b (not shown), or the information processing unit 8 is used. Equipped with crab. In FIG. 1, the information recording unit B is exemplified by a system built in the information processing unit 8, but is not limited to this. For example, the information recording unit B includes a display unit in the storage facility of the filling container 1. It is also possible to provide a system in which B is deployed and the information b or the information a can be confirmed together with the compatibility display. In FIG. 1, the information reading unit 8 b is not necessarily required, and the information in the information recording unit B can be transmitted directly to the information processing unit 8. Furthermore, when the information recording unit B is an IC tag, the information reading unit 8a can also function as the information reading unit 8b, and the function can be made compact.

  (C) The information c including the attributes and acceptance conditions of the fluid required by the process apparatus 4 corresponds to the information a, and includes the fluid filling amount, fluid type, composition, filling pressure, and the boiling point and melting point. , Corrosive or toxic. Such information is written in a readable manner in an information recording unit C provided in the process control unit 7. The information recording unit C is illustrated in FIG. 1 as an example of a system built in the process control unit 7, but is not limited to this. For example, the information recording unit C is provided in the information processing unit 8 or the storage facility for the filling container 1. It is also possible to provide an information recording unit C having a display unit in the system so that a part or all of the information a to c can be confirmed together with the compatibility display. Further, the information recording unit C can be arranged in the vicinity of the process device 4 and transmitted directly to the information processing unit 8.

  In this system, it is basically possible to determine suitability based on the above information (a-1) to (c). Furthermore, as the suitability judgment information, the inside of the filling container 1 It is preferable to use information d at the time of operation of the filling container 1 including the actual measurement value of the pressure P1 or the weight W1 and information e of the operation status of the process device 4. In the operation of the process apparatus 4, if there is an abnormality such as a supply stop of fluid or a decrease in supply pressure (flow rate) until the completion of the process apparatus 4, the situation cannot be recovered. This is because the information a related to the filled container 1 written in advance and the state at the time of actual operation (including writing errors), or the supply pipe system such as the piping unit 3 or the process apparatus 4 that is not initially planned. In the case of an emergency, it is necessary to close the flow path opening / closing valve 6 to stop the supply or to prepare the spare filling container 1.

  (D) It is preferable to grasp the actual supply pressure (internal pressure P1) and the remaining amount of fluid in the filling container 1 as the information d during operation of the filling container 1. About the former, the internal pressure P1 of the filling container 1 can be detected by the pressure sensor 9 provided in the piping part 3. In the case of compressed gas, the amount of residual gas in the filling container 1 can be grasped by the internal pressure P1. When the filling material of the filling container 1 is liquefied gas or liquid, the internal pressure P1 of the gas phase does not directly mean the remaining amount, so the amount of fluid actually remaining in the filling container 1 is actually measured by its weight W1. It is preferable to grasp the value. Specifically, the weight including the filling container 1, the joint 3a, the piping 3 and the like is measured, and the net weight W1 of the fluid excluding these weights is calculated. Such information d is transmitted directly to the information processing unit 8. The weight W1 can be calculated based on the information d, the information a transmitted to the information processing unit 8, and the total weight value at the start of use.

  Here, for the weight measurement of the filling container 1, it is preferable that a load cell (not shown) is disposed on the back side of the mounting surface 2 a of the installation unit 2. There is no particular limitation as long as it is a type that can accurately receive the weight of the filling container 1 applied to the mounting surface 2a, but a type in which cell portions are arranged at approximately equal intervals at four corners of the mounting surface 2a (FIG. (Not shown) is preferable. The pressure at each cell unit is output-converted by a strain gauge or a diaphragm displacement and transmitted to the information processing unit 8.

  (E) Information e on the operating status of the process device 4 is transmitted from the process control unit 7 to the information processing unit 8. The contents of the information e relate to fluid characteristics (fluid composition, temperature, flow rate, pressure, etc.) and operating states (manufacturing process progress steps, operating time, etc.) in the active process device 4 not included in the information c. Is. The amount of fluid consumed up to now and the amount of fluid required are compared with information d to determine and control its suitability. As in the case of (c) above, in the case of an emergency, it is necessary to close the flow path opening / closing valve 6 to stop the supply or to prepare the preliminary filling container 1.

[Judgment of compatibility]
In this system, the compatibility is basically determined by comparing information a and information b, information a and information c, information d and information e, and whether the items described, numerical values, or signs match. Based on For example, in the comparison between the information a and the information b, a gas that is not corrosive was planned as the gas type in the information b. However, when a gas containing HF is carried in the information a, it can be regarded as incompatible. . Also, in the comparison of information a and information c, nitrogen-based 3% HF was planned for information c as the gas type. However, if nitrogen-based 2% HF was carried in information a, it would be incompatible. be able to. Since the matching conditions are compared and judged in such a state where they are not actually operated, it can be said to be a static matching condition. On the other hand, in the information d as the fluid pressure condition, the internal pressure P1 of the filling container 1 is transmitted, and the supply pressure P2 to the process device 4 is transmitted as the information e. If P1> P2, it is determined that the condition is satisfied, and P1 ≦ P2 In the case of non-conformity. Since the matching conditions are compared and judged in such an actual operating state, it can be said to be a dynamic matching condition.

<Fluid supply method using this system>
In the system according to the first configuration example, a method of supplying a fluid from the filling container 1 to the process device 4 is illustrated in FIGS. Here, the case where the replacement of the filling container 1 becomes necessary due to the decrease of the fluid in the filling container 1 in the actual operation state will be described in general, including two steps that are the features of the present system described later. . 3 (A) to 3 (C), the right column shows the contents of the operation at the site, and the left column shows the contents of the information transmission to the information processing unit 8 and the operation instruction transmission from the information processing unit 8 to each unit. Yes.

[Pre-step of fluid supply method using this system]
As shown in FIG. 3A, the pre-step of the fluid supply method using the present system from the actual operation state can be configured by the following process.
(I) The pressure sensor 9 (pressure switch) detects that the internal pressure of the filling container 1 has become a certain value or less. (Ii) The flow path opening / closing valve 6 is closed, and the fluid is supplied to the process device 4. Stopped (iii) The outlet 1b is closed and the joint 3a is removed from the filling container 1 (iv) The filling container 1 is removed from the installation part 2 (v) At this time, the switch 2a ("detection part for recognizing installation operation") Is equivalent to

  In the above operation, (iv) when the filling container 1 is removed, it is preferable to purge between the outlet 1b and the joint 3a with an inert gas or the like. The same is true after the new filling container 1 is installed. The purge may be automatic control based on a command from the information processing unit 8 using a signal from the flow path opening / closing valve 6 or the pressure sensor 9.

[First step of fluid supply method using this system]
As shown in FIG. 3B, the first process of the fluid supply method using the present system can be configured by the following process.
(1) The filling container 1 is installed in the installation unit 2 (2) An installation signal is transmitted from the switch 2a provided in the installation unit 2 (3) The installation signal is transmitted to the information reading unit 8a and / or the information processing unit 8 (4) The information reading unit 8a receives the information a written in the information recording unit A, the information b written in the information recording unit B, and the information c written in the information recording unit C ( 5) The information processing unit 8 compares the read information a and information b and information a and information c to determine suitability. (6) In the case of judgment of suitability, the outlet for the filling container 1 1b is connected to the joint 3a, and if it is determined that there is a nonconformity such as a difference in the type of fluid, an alarm is issued and steps (1) to (5) are repeated again (7) Fluid is piped from the filling container 1 Supplied to the process apparatus 4 via the unit 3 The possible theft is

  In the first step of this fluid supply method, the connection work between the outlet 1b of the filling container 1 and the joint 3a is used as a reference point for execution of the suitability judgment. Based on That is, by comparing the information a and the information b and the information a and the information c, an artificial connection error is eliminated, the loaded filling container 1 is appropriately connected, and an appropriate fluid is passed through the piping unit 3. To the process device 4.

[Second step of fluid supply method using this system]
As a second step of the fluid supply method using this system, as shown in FIG.
(6a) Connecting the joint 3a to the outlet 1b of the filling container 1 (7a) Opening the outlet 1b (8a) In the information processing section 8, for example, information d and information e such as a signal from the pressure sensor 9 (9a) If it is determined that there is compatibility, the flow path opening / closing valve 6 is opened, and if it is determined that there is a non-compliance such as the internal pressure P1 of the filling container 1 is low, An alarm is issued with the flow path opening / closing valve 6 closed, and steps (6a) to (8a) are repeated. (10a) Fluid can be supplied from the filling container 1 to the process device 4 via the piping unit 3. Possible

  Here, if the installation of the new filling container 1 is completed, and after the pipe is connected, the outlet 1b is opened, the pressure in the pipe is increased, and the flow into the process apparatus 4 can be introduced. It controls to the direction which opens the road on-off valve 6. If there is a nonconformity such as the internal pressure P1 of the filling container 1 being low, an alarm is issued and the flow path opening / closing valve 6 is not opened. In addition, when the forgetting to open the outlet 1b is not performed, the pressure does not increase, so that the flow path opening / closing valve 6 is not opened. Furthermore, when purging with the fluid filled in the filling container 1 and then closing the outlet 1b, the outputs of the switch 2a and the pressure sensor 9 are normal and the flow path opening / closing valve 6 opens, but the supply to the process device 4 A pressure drop after the start of operation can be detected. At this time, by closing the flow path opening / closing valve 6 and issuing an alarm, it is possible to recognize that the outlet 1b is closed and to return to normal operation while ensuring safety.

  This fluid supply method uses the operation of the flow path opening / closing valve 6 for supplying the fluid from the filling container 1 to the process device 4 as a reference point for execution of the suitability determination. This can be said to be a dynamic determination of the matching conditions. By comparing the information d and the information e, it is possible to eliminate an artificial connection mistake and to determine that the loaded container 1 is in an appropriate state with respect to the actual operating conditions. It is supplied to the process device 4 via the piping unit 3.

<Another configuration example of the fluid supply system according to the present invention>
FIG. 4 is a schematic diagram showing another configuration example (second configuration example) of the fluid supply system according to the present invention. This system basically has the same configuration as that of the first configuration example, but a flow path is provided between the plurality of joint portions 31a, 32a, 33a, the piping portions 31, 32, 33, and the piping portions 31, 32, 33. A fluid supply system to the process device 4 having a piping system provided with the on-off valves 61, 62, 63 is formed.

  In a large-scale manufacturing process such as a semiconductor manufacturing process, a plurality of fluids are supplied to a process device 4 (single or plural) from a fluid supply facility in which a plurality of filling containers filled with different types of fluids are stored. Often to do. In such a supply system, it is necessary to select a suitable joint from a plurality of joints in order to prevent human connection mistakes and operation mistakes as described above, and the process apparatus 4 also has a plurality of operating states. It may be necessary to make a suitable selection of. Even in such a case, this system has a function to obtain information from the initial (static) information to the operating state information for both the filling container and the process equipment, and to judge the suitability thereof. It became possible to make automatic and accurate judgments that did not exist.

  Specifically, as shown in FIG. 4, by installing the filling container 1 in the installation part 2, a piping system (for example, the joining part 31a, the piping part 31, and the pressure reducing valve 61) that matches this is automatically provided. It can be selected, and supply to the process apparatus 4 can be automatically performed by performing a connection operation. In general, a combination of a plurality of filling containers and a plurality of piping systems is used, but even in such a case, “selection from a plurality of piping systems for one filling container 1” is basically based on the judgment of suitability. Therefore, this system can be widely applied to various manufacturing processes.

  In the above, the supply system of liquefied gas used mainly for semiconductors or various manufacturing processes has been described. However, the present invention is applied not only to such industrial use but also to a consumer fluid supply system such as a gas supply facility of a hospital. be able to.

Schematic showing a basic configuration example of a fluid supply system according to the present invention Explanatory drawing which illustrates the attachment state of the information recording part A to the filling container which concerns on this invention Explanatory drawing illustrating the fluid supply method using this system Schematic which shows the other structural example of the fluid supply system which concerns on this invention. Schematic illustrating the management method of a high-pressure gas container according to the prior art Schematic illustrating a management device for high-pressure vessel inspection according to the prior art

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Filling container 1a Bottom part 1b Outlet 1c Indented part 2 Installation part 2a Switch (limit switch)
2b Mounting surface 3 Piping section 3a Joint section 4 Process equipment (consumption equipment)
5 Pressure reducing valve 6 Flow path opening / closing valve 7 Process control unit 8 Information processing unit 8a Information reading unit 9 Pressure sensor A, B Information recording unit

Claims (4)

A filling container filled with a fluid; an installation part in which the filling container is installed; a joint part closely connected to a lead-out port of the filling container; a pipe part having the joint part as one end; and the fluid A fluid supply system comprising: a facility that consumes the fluid; and a process control unit that controls and manages the fluid consumption facility.
Information recording section A in which information a including attributes and filling conditions of the filled fluid is readable is written, and fluid attributes and receiving conditions to which a piping system including the joint and the piping section can be applied. An information recording unit B in which information b is written in a readable manner, an information recording unit C in which information c including the attributes and acceptance conditions of a fluid required by the facility that consumes the fluid is readable, and an information a An information reading unit that reads any one of -b, and an information processing unit that determines the suitability of information a and information b and the suitability of information a and information c,
The filling container has a concave bottom portion, and is disposed in the installation portion so that the bottom portion is in contact, the information recording portion A is disposed on the bottom portion, and the information reading portion is disposed on the installation portion. The information recording unit B is disposed in any one of the joining unit, the piping unit, the information reading unit, or the information processing unit, and the information recording unit C is disposed in the process control unit. A fluid supply system for supplying fluid to the consuming equipment when there is a property. As the suitability determination information, the information d at the time of operation of the filling container including the measured value of the internal pressure or weight of the filling container and the information e of the operation status of the consumption equipment are input to the information reading unit, fluid supply system of claim 1, wherein the determining the suitability of the fluid supply to the consumer equipment in the information processing unit. Supply of fluid from the filling container to the consuming equipment, the following process (1) installing the filling container in the installation unit (2) installation signal from the detection unit recognizing installation operation provided in the installation unit (3) The information reading unit or / and the information processing unit receive the installation signal. (4) The information a written in the information recording unit A by the information reading unit, the information recording unit B (5) The information processing unit compares the read information a with the information b and the information a with the information c. Judgment of suitability (6) In the case of judgment of suitability, the outlet of the filling container is connected to the joint part (7) The fluid is supplied from the filling container to the consumption equipment through the piping part By Fluid supply system according to claim 1 or 2, wherein the Hodokosuru. After the processes (1) to (5), the following process (6a) connects the joint to the outlet of the filling container (7a) opens the outlet (8a) In the information processing section, the information d and information e are compared to determine suitability (9a) If there is suitability, the flow path on / off valve is opened (10a) the fluid is consumed from the filling container through the piping section It implements by supplying to an installation, The fluid supply system in any one of Claims 1-3 characterized by the above-mentioned.

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