JP5100183B2 - Glass substrate manufacturing method and glass substrate grinding apparatus - Google Patents

Description

  The present invention relates to a method of manufacturing a doughnut-shaped (disc-shaped disk having a circular hole in the center) glass substrate used for an information recording medium disk and the like, and a grinding apparatus for grinding the outer peripheral end surface and the inner peripheral end surface of glass.

  In recent years, information terminal devices such as mobile phones and portable music players have been equipped with high-capacity hard disk devices. For this reason, it is desired to increase the capacity and size of the magnetic disk as a recording medium. In order to meet such needs, a glass substrate has been used instead of a conventional aluminum alloy substrate as a magnetic disk used for a hard disk.

  Generally as a manufacturing method of a glass substrate, it carries out as follows. First, a plate-shaped glass substrate having a circular hole in the center is formed by cutting a plate-shaped glass into a donut shape by a core drill. Subsequently, the outer peripheral end surface and the inner peripheral end surface of the glass substrate are ground using a rotating grindstone. Next, chamfering of the outer peripheral end surface and the inner peripheral end surface of the glass substrate is performed with a rotating grindstone. This chamfering may be performed with a common rotating grindstone simultaneously with the grinding processing of the outer peripheral end surface and the inner peripheral end surface. When the chamfering is thus completed, the outer peripheral end surface and the inner peripheral end surface of the glass substrate are then polished by the polishing brush. The glass substrate manufactured in this way is finally used as an information recording medium disk having a magnetic film formed on the surface thereof.

  For example, Patent Document 1 proposes a technique for cutting out sheet glass with a core drill. In this apparatus, a plurality of plate glasses are laminated, an inner hole portion of the glass substrate is cut out from the laminated body using an inner hole cutting core drill, and further, outer periphery cutting is performed using an outer hole cutting core drill.

Moreover, as a grinding technique of the outer peripheral end face and the inner peripheral end face of the glass substrate cut out in a donut shape, for example, Patent Document 2 proposes. In this method, the doughnut-shaped glass substrate is rotated and the outer peripheral side surface of the cylindrical rotating grindstone is pressed against the outer peripheral end surface and the inner peripheral end surface of the glass substrate.
Japanese Patent Laid-Open No. 2005-67949 JP 2004-79909 A

  However, in such a prior art, although a plurality of glass substrates are cut out (coring) together, the outer peripheral and inner peripheral end surfaces of the glass substrate are ground one by one. For this reason, the grinding process is not as efficient as the coring, and the grinding time is long. Moreover, after coring, the glass substrates are separated one by one and ground (dimensions), so that the outer diameter and the inner diameter are difficult to be uniform and good grinding precision cannot be obtained.

  On the other hand, it is also conceivable to shorten the grinding time by grinding in a state where a plurality of cored donut-shaped glass substrates are stacked. However, even in this case, when grinding the cored glass substrate, the work burden of transferring the glass substrate to the jig of the grinding apparatus remains as it is, and the dimensional accuracy is reduced due to the transfer to the jig. End up.

  An object of the present invention is to cope with the above-described problem, and is to efficiently grind the outer peripheral and inner peripheral end faces of a donut-shaped glass substrate with high dimensional accuracy.

In order to achieve the above object, the method for producing a glass substrate according to the present invention is characterized in that in a method for producing a disk-shaped glass substrate having a circular hole in the center, a laminate obtained by laminating a plurality of sheet glass is cured. A first step of placing on a tool pallet and forming two concentric cuts having different diameters by a core drill on the laminate, and a donut from the sheet glass laminate cut by the first step A second step of picking up a glass-like glass laminate together with a workpiece lifting seat inserted so as to be able to be pulled out only upward in the jig pallet by an elevating actuator, and pulling out in the second step. and and a third step of grinding the grinding wheel an outer peripheral surface and the inner peripheral surface of the donut-shaped glass laminate on the work lifting seat, as the work lifting seat, the glass product Provided below the donut-like region where the body is cut, in using a cross-section donut-shaped columnar body does not extend outside of the region.

  According to this invention, first, in the first step, a laminated body in which a plurality of sheet glass is laminated is placed on a jig pallet, and concentric notches having two different diameters are cut into the laminated body by a core drill. Form. Therefore, by this first step, a portion cut into a donut shape is formed in the sheet glass laminate on the jig pallet.

  Subsequently, in the second step, the elevating actuator is operated to extract the doughnut-shaped glass laminate from the plate-like glass laminate. At this time, the doughnut-shaped glass laminate is sandwiched and extracted together with the workpiece lifting seat inserted in the jig pallet. In other words, the workpiece lifting seat inserted in the jig pallet is pulled out by the lifting actuator, and the doughnut-shaped glass laminate placed on the workpiece lifting seat is also integrated with the workpiece lifting seat in the form of plate glass. It is extracted from the laminate. Therefore, the doughnut-shaped glass laminate is extracted as it is without being removed from the jig pallet.

  Subsequently, in the third step, the outer peripheral surface and the inner peripheral surface of the extracted doughnut-shaped glass laminate on the workpiece lifting seat are ground with a rotating grindstone. That is, the outer peripheral surface and the inner peripheral surface of the doughnut-shaped glass laminate are ground by the rotating grindstone while being placed on the workpiece lifting seat that is a part of the jig pallet.

  Accordingly, the doughnut-shaped glass laminate is extracted using the jig pallet used in the first step as it is, and the outer peripheral surface and the inner peripheral surface are ground in that state. This eliminates the need to transfer to other jigs and improves work efficiency. Moreover, the position shift by the transfer to the jig | tool of a donut-shaped glass laminated body does not arise. In addition, since a plurality of glass substrates are ground simultaneously, the grinding efficiency is good. As a result, according to the method of the present invention, the outer peripheral end face and inner peripheral end face of the donut-shaped glass substrate can be ground efficiently and with dimensional accuracy.

In addition, as a core drill used at a 1st process, it is good to use the double core drill which formed the concentric core drill tooth | gear from which two diameters differ, for example. In this case, the concentric accuracy is high and the cutting time can be shortened.
Further, the two concentric cuts having different diameters in the first step may be performed simultaneously or separately. Further, the grinding of the outer peripheral surface and the inner peripheral surface in the third step may be performed simultaneously or separately.

Furthermore, according to the present invention, in the second step, the workpiece lifting seat inserted in the jig pallet is smoothly extracted upward. Therefore, the donut-shaped glass laminated body placed on the workpiece lifting seat can be easily extracted from the laminated sheet glass. Further, it is possible to prevent the workpiece lifting seat from dropping downward from the jig pallet.

  Another feature of the glass substrate manufacturing method of the present invention is that in the third step, the tip of the rotary shaft of the rotary drive actuator is inserted into the central circular hole formed in the workpiece lifting seat from below the central circular hole. Thus, the doughnut-shaped glass laminate is rotated about its axis by rotating the workpiece lifting seat.

  According to the present invention, in the third step, using the central circular hole formed in the workpiece lifting seat, the tip of the rotary shaft of the rotary drive actuator is inserted from below the central circular hole to rotate the workpiece lifting seat. . Thereby, the donut-shaped glass laminated body on the workpiece lifting seat rotates about the axis. In this case, the doughnut-shaped glass laminate is accurately positioned and does not deviate during rotation because the tip of the rotary shaft of the rotary drive actuator is inserted into the central circular hole. Further, since the donut-shaped glass laminate rotates in addition to the rotation of the rotating grindstone, a high polishing rate can be obtained. In addition, since the donut-shaped glass laminate is rotated using the workpiece lifting seat as it is, the dimensional accuracy is not lowered by the jig replacement. Therefore, the grinding time can be shortened while maintaining high dimensional accuracy.

  Another feature of the glass substrate manufacturing method of the present invention is that, in the second step, the rotary drive actuator is moved up and down by the lift actuator.

  According to this invention, in the second step, the lifting / lowering actuator lifts and lowers the rotational drive actuator, so that the extraction operation and the rotation operation of the donut-shaped glass laminate on the workpiece lifting seat can be easily performed.

The glass substrate grinding apparatus according to the present invention is characterized by a glass substrate grinding apparatus that grinds the outer peripheral end surface and the inner peripheral end surface of the glass substrate by performing the second and third steps. A workpiece lifting seat which is a columnar body having a cross-sectional donut shape that is provided directly below the donut-shaped cut region and does not protrude outside the region. The doughnut-shaped glass laminate is sandwiched together with the workpiece lifting seat from the jig pallet inserted so that it can be extracted only in the upward direction and the plate-like glass laminate placed on the jig pallet. And an elevating drive means for extracting and a grinding means for grinding the outer peripheral surface and inner peripheral surface of the doughnut-shaped glass laminate on the extracted workpiece lifting seat.

According to the present invention, the jig pallet mounts the plate-like glass laminated body in which the doughnut-shaped cut is formed, and is provided immediately below the donut-shaped cut area, and protrudes outside the area. A workpiece lifting seat, which is a columnar body having a non-sectional donut shape, is inserted so that it can be extracted only upward. And a raising / lowering drive means pinches | interposes a donut-shaped glass laminated body with a workpiece | work lifting seat from the plate-shaped glass laminated body mounted on the jig | tool pallet, and extracts it upwards. The grinding means grinds the outer peripheral surface and inner peripheral surface of the extracted doughnut-shaped glass laminate. Therefore, the outer peripheral surface and the inner peripheral surface of the doughnut-shaped glass laminate are ground by the grinding means while being placed on the workpiece lifting seat that is a part of the jig pallet.

  As a result, the doughnut-shaped glass laminate can continuously perform the two steps of the extraction step and the grinding step without changing to the jig. This eliminates the need to transfer the doughnut-shaped glass laminate to a grinding jig, thereby improving work efficiency. Moreover, the position shift by the transfer to the jig | tool of a donut-shaped glass laminated body does not arise. In addition, since a plurality of glass substrates are ground simultaneously, the grinding efficiency is good. As a result, according to the present invention, the outer peripheral end face and the inner peripheral end face of the donut-shaped glass substrate can be ground efficiently and with dimensional accuracy.

  The glass substrate grinding apparatus according to the present invention is characterized in that it includes rotation driving means for rotating the workpiece lifting seat by inserting a tip end of a rotating shaft into a central circular hole formed in the workpiece lifting seat, and the lifting drive. The means is to pull out the donut-shaped glass laminate from the plate-like glass laminate placed on the jig pallet by raising the rotation shaft of the rotation driving means.

  According to this invention, the elevating drive means raises the rotation shaft of the rotation drive means, whereby the tip of the rotation shaft is inserted into the central circular hole formed in the workpiece lifting seat, and the donut-shaped glass laminate is removed. Extract from the sheet glass laminate. Then, the rotation driving means rotates the rotating shaft to rotate the workpiece lifting seat. Thereby, the donut-shaped glass laminated body on the workpiece lifting seat rotates about the axis. In this case, since the tip of the rotating shaft of the rotation driving means is inserted into the central circular hole of the doughnut-shaped glass laminate, the donut-shaped glass laminate is accurately positioned and does not deviate during rotation. In addition, since the donut-shaped glass laminate is rotated using the workpiece lifting seat as it is, the dimensional accuracy is not lowered by the jig replacement. Therefore, the grinding time can be shortened while maintaining high dimensional accuracy. Moreover, since the raising / lowering drive means raises the rotating shaft of the rotation drive means, the extraction operation and the rotation operation of the donut-shaped glass laminate on the workpiece lifting seat can be easily performed.

  Hereinafter, a method for producing a glass substrate used for a recording medium according to an embodiment of the present invention, particularly a glass substrate cutting and grinding method, will be described with reference to the drawings. FIG. 11 shows the glass substrate 1 manufactured by this glass substrate manufacturing method. This glass substrate 1 is a donut-shaped disk having a circular hole 1h in the center, and then undergoes chamfering processing, brushing processing, etc. on the outer peripheral end surface 1a and inner peripheral end surface 1b, and finally a magnetic film or the like on the surface. Is used as a magnetic disk built in a hard disk drive.

  FIG. 1 shows a coring apparatus 10 as an embodiment for performing a coring process which is the first process of the present invention. The coring device 10 includes a work table 12 provided on the base 11 and on which the glass plate laminate 5 is placed, and a core drill device 30 provided beside the work table 12. A plate-like glass plate laminate 5 is placed on the work table 12 via a jig pallet 20. The glass plate laminate 5 is formed by stacking a plurality of thin rectangular glass plates 7 each having a thickness of 0.5 mm. The glass plate laminate 5 is bonded and integrally formed with an adhesive applied between the glass plates 7. Yes.

  The glass plate laminate 5 is placed on the upper surface of the jig pallet 20 while being adhered. As shown in FIG. 3, the jig pallet 20 is a part on which the glass plate laminate 5 is placed on the front side, and a part that is clamped and fixed to the work table 12 by a clamping device (not shown) on the rear side. As shown in FIGS. 2 and 3, four circular holes 21 penetrate in the vertical direction (perpendicular to the pallet forming surface) in the mounting region of the glass plate laminate 5 in the jig pallet 20. The workpiece lifting seats 25 are respectively inserted into the circular holes 21 (hereinafter referred to as pallet through holes 21) from above. The workpiece lifting seat 25 functions as a jig for lifting only the region cut into the donut shape from the glass plate laminate 5 in the second step to be described later, and is a columnar body having a donut cross section. Hereinafter, the workpiece lifting seat 25 is simply referred to as a workpiece seat 25. 2 and FIGS. 4 and 5 to be described later are cross-sectional views taken along the line AA in FIG.

  Around the upper surface side of the four pallet through holes 21 formed in the jig pallet 20, a ring-shaped shallow upper surface depression 22 having a diameter larger than the diameter of the pallet through holes 21 is formed. In addition, a ring-shaped deep lower surface recess 23 having a diameter larger than the diameter of the pallet through hole 21 is also formed around the lower surface side of the four pallet through holes 21.

  The work seat 25 has a cylindrical body portion 26 that is substantially the same diameter as the pallet through-hole 21 and is inserted into the pallet through-hole 21, a flange portion 27 that is formed by projecting in the radial direction at the tip of the cylindrical body portion 26, It is comprised from the truncated cone part 28 formed in a tapered truncated cone shape at the rear end of the cylindrical trunk | drum 26. FIG. The work seat 25 is formed with a circular hole 29 penetrating in the vertical direction at the center of the shaft. The circular hole 29 corresponds to the central circular hole of the present invention, and is hereinafter referred to as a work seat through hole 29.

  The flange portion 27 formed at the tip of the work seat 25 has a thickness equal to the depth of the upper surface recess portion 22 formed around the pallet through hole 21, and the diameter thereof is smaller than the diameter of the upper surface recess portion 22. Therefore, the collar portion 27 is accommodated in the upper surface recess portion 22 when the work seat 25 is inserted into the pallet through hole 21 from above. In this state, a ring-shaped recess having a difference width between the radius of the flange portion 27 and the radius of the upper surface recess portion 22 is formed around the flange portion 27. Further, the outer diameter of the collar portion 27 is set to be slightly smaller than the outer diameter of the glass substrate 1. Moreover, the inner diameter of the workpiece seat through hole 29 is set to be slightly larger than the inner diameter of the circular hole 1 h of the glass substrate 1. The work seat 25 is inserted into the jig pallet 20 so that the movement of the work seat 25 is restricted by the flange 27 and can be extracted only in the upward direction.

  The work seat 25 is restricted so that it cannot rotate in the pallet through-hole 21 due to the engagement between the rotation prevention pin 24 and the rotation prevention groove 26a. 12 is a cross-sectional view taken along the line BB in FIG. As shown in the drawing, an anti-rotation groove 26 a having a size capable of accommodating the tip of the anti-rotation pin 24 with play is formed in the vertical direction on the outer peripheral surface of the cylindrical body portion 26 of the work seat 25. The anti-rotation groove 26a is formed on the vertical line from the middle position of the cylindrical body 26 slightly upward to the lower end. On the other hand, the anti-rotation pin 24 is inserted laterally from the end of the jig pallet 20 and screwed to a predetermined position, so that the tip of the anti-rotation pin 24 faces the anti-rotation groove 26a of the work seat 25 with play. With this configuration, the work seat 25 is inserted into the pallet insertion hole 21 so as not to rotate with respect to the jig pallet 20. This can be said to be provided with a rotation restricting means for restricting the rotation of the work seat 25 in the pallet through hole 21.

  The jig pallet 20 is fixed to the work table 12. The work table 12 is formed with an opening 13 in a range surrounding a region in the jig pallet 20 where the four work seats 25 are inserted, and the periphery and the rear side are portions on which the jig pallet 20 is placed. The jig pallet 20 is clamped by a clamping device (not shown) provided on the rear side thereof, and is positioned and fixed to the work table 12.

  Next to the work table 12, a core drill device 30 is provided. The core drill device 30 includes a spindle motor 32 (hereinafter referred to as a drill motor 32) having a double core drill 31 fixed to the tip thereof, and a drill control unit 33 that controls the horizontal position and height position of the drill motor 32.

  The drill control unit 33 includes a vertical support frame 35 that supports a drill support arm 34 to which a drill motor 32 is fixed so as to be slidable in the vertical direction. Two vertical guide rails 36 are provided on the side surfaces of the vertical support frame 35 in the vertical direction, and the base of the drill support arm 34 is connected to the vertical guide rail 36 via a slide connection piece 37. A ball screw mechanism 40 is provided in the upper and lower support frames 35, and a ball screw 41 is rotated by rotation of a servo motor 38 (hereinafter referred to as an elevating motor 38). A ball screw nut 42 is engaged with the ball screw 41. The ball screw nut 42 is connected to the base of the drill support arm 34 by a connecting bar 43, and its rotation is restricted. Accordingly, the rotational motion of the ball screw 41 by driving the lifting motor 38 is converted into a linear motion in the axial direction (vertical direction) of the ball screw nut 42 and drives the drill support arm 34 in the vertical direction. Thus, the drill control unit 33 can control the lifting / lowering of the drill motor 32 in the vertical direction by drivingly controlling the lifting / lowering motor 38.

  The drill control unit 33 includes a horizontal support frame 44 that supports the upper and lower support frames 35. The horizontal support frame 44 includes two horizontal guide rails 45 on the upper surface thereof, and supports the legs 35a of the upper and lower support frames 35 via a slide connecting piece 46 so as to be slidable. In the horizontal support frame 44, a ball screw mechanism (not shown) connected to a servo motor 47 (hereinafter referred to as a horizontal drive motor 47) is provided. The drill control unit 33 controls the horizontal position by controlling the horizontal position of the vertical support frame 35 by converting the rotational motion into the horizontal motion of the vertical support frame 35 by the ball screw mechanism by driving and controlling the horizontal drive motor 47.

  Therefore, the drill control unit 33 can independently control the height position and the horizontal position of the drill motor 32 by driving and controlling the lifting motor 38 and the horizontal driving motor 47. The ball screw mechanism provided in the horizontal support frame 44 and the ball screw mechanism used in the grinding apparatus 50 described later have the same basic configuration as the ball screw mechanism 40 provided in the upper and lower support frame 35. Therefore, illustration is omitted and only a brief description is given.

  A double core drill 31 is connected to the output shaft of the drill motor 32. As shown in FIG. 5, the double core drill 31 is formed by coaxially arranging two core drill teeth (large diameter core drill teeth 31a and small diameter core drill teeth 31b) having different diameters.

Next, a method for coring the glass plate laminate 5 using the coring apparatus 10 will be described with reference to FIG.
First, the operator adheres the glass plate laminate 5 to the upper surface of the jig pallet 20 with an adhesive. Then, the jig pallet 20 is placed on the work table 12, and the jig pallet 20 is clamped and fixed by a clamping device (not shown).

  Subsequently, the operator operates an operation switch of a controller (not shown) of the drill control unit 33. As a result, the controller controls the horizontal drive motor 47 to move the double core drill 31 to a predetermined horizontal position. At this time, the double core drill 31 is arranged at a position coaxial with the work seat 25 at the end inserted in the jig pallet 20. When the horizontal position of the double core drill 31 is adjusted to the predetermined position in this way, the controller drives the drill motor 32 at a predetermined number of revolutions and controls the lifting motor 38 to lower the double core drill 31. Thereby, the glass plate laminated body 5 is simultaneously cut by the large diameter core drill teeth 31a and the small diameter core drill teeth 31b. Accordingly, two concentric cuts having different diameters are formed in the glass plate laminate 5.

  When the tip of the small diameter core drill teeth 31b passes through the bottom of the glass plate laminate 5 (the bonding surface of the glass plate 6 bonded to the surface of the jig pallet 20), it is surrounded by a cylindrical surface cut by the small diameter core drill teeth 31b. The laminated glass portion separated from the glass plate laminate 5 passes through the workpiece seat through hole 29 of the workpiece seat 25 and falls. At this time, since the inner diameter of the small-diameter core drill teeth 31 b is smaller than the inner diameter of the work seat through hole 29 of the work seat 25, it does not contact the work seat 25.

  At the same time, the large-diameter core drill teeth 31a form a large-diameter circle cut. The inner diameter of the large-diameter core drill tooth 31 a is larger than the outer diameter of the flange portion 27 of the work seat 25, and the outer diameter is smaller than the outer diameter of the upper surface recess portion 22 formed in the jig pallet 20 around the flange portion 27. . For this reason, when the large-diameter core drill teeth 31 a penetrate the bottom of the glass plate laminate 5, the tips of the large-diameter core drill teeth 31 a are accommodated in the upper surface recess 22 and do not contact the jig pallet 20 or the work seat 25. In this way, a portion cut into a donut shape is formed in the glass plate laminate 5. Hereinafter, the portion cut into a donut shape is referred to as a donut-shaped glass laminate 6. In this case, since the workpiece seat 25 is restricted from rotating by the engagement between the rotation prevention pin 24 and the rotation prevention groove 26a, the donut-shaped glass laminate 6 may rotate together with the workpiece seat 25. And a donut-shaped cut can be formed satisfactorily.

  When one donut-shaped glass laminate 6 is thus formed in the glass plate laminate 5, the double-core drill 31 is raised by drivingly controlling the lifting motor 38. Next, the horizontal drive motor 47 is driven and controlled so that the position of the double core drill 31 is coaxial with the adjacent workpiece seat 25. Then, the second donut-shaped glass laminate 6 is formed in the glass plate laminate 5 by driving and controlling the lifting motor 38 as described above to lower and raise the double core drill 31.

  The coring apparatus 10 of the present embodiment repeats such operations to form four donut-shaped glass laminates 6 in one glass plate laminate 5, but the number thereof can be set arbitrarily. Thus, the first process by the coring apparatus 10 is completed.

Next, an embodiment of a grinding apparatus for carrying out the second and third steps of the present invention will be described. FIG. 6 shows a schematic configuration of a grinding apparatus 50 for a glass substrate for recording medium as an embodiment.
The grinding device 50 extracts the doughnut-shaped glass laminate 6 from the glass plate laminate 5 that has been cut in the first step, and grinds the outer peripheral surface and the inner peripheral surface of the doughnut-shaped glass laminate 6 that are extracted. It is a device to do.

  The grinding device 50 can be broadly divided into a workpiece feed drive unit 60 for placing the jig pallet 20 used in the first step and adjusting the horizontal position thereof, and the donut-shaped glass laminate 6 up and down together with the workpiece seat 25. A workpiece lifting / lowering drive unit 70 that sandwiches and moves up and down in the vertical direction, and a grindstone driving unit 90 that grinds the outer peripheral surface and inner peripheral surface of the donut-shaped glass laminate 6 are configured. The workpiece lifting / lowering drive unit 70 corresponds to the lifting / lowering actuator or the lifting / lowering driving means of the present invention.

  The work feed driving unit 60 includes a work table 61 for mounting and fixing the jig pallet 20 used in the first process, and a feed control unit 62 for controlling the horizontal position of the work table 61. The feed control unit 62 includes a horizontal support frame 63 that supports the work table 61. The horizontal support frame 63 includes two horizontal guide rails 64 on the upper surface thereof, and supports the work table 61 so as to be slidable. In the horizontal support frame 63, a ball screw mechanism (not shown) connected to a servo motor 66 (hereinafter referred to as a feed motor 66) is provided. The workpiece feed drive unit 60 controls the feed motor 66 to convert the rotational motion thereof into a horizontal motion of the work table 61 by a ball screw mechanism, thereby controlling the feed amount of the work table 61.

  The work table 61 is formed with an opening 67 in a range surrounding a region where the four workpiece seats 25 are inserted in the jig pallet 20, and the periphery and the rear side are portions on which the jig pallet 20 is placed. The jig pallet 20 is clamped by a clamping device (not shown) provided on the rear side thereof and positioned and fixed to the work table 61.

  The workpiece lifting / lowering drive unit 70 has a vertical support frame 71 erected on the base 51 on the side of the workpiece feed drive unit 60, and two guide rails 72 are vertically arranged on the side surface of the vertical support frame 71. It is arranged. A work holding arm 73 is connected to the guide rail 72 on the upper side so as to be slidable in the vertical direction, and a work lift arm 75 is connected to the lower side so as to be slidable in the vertical direction.

  A ball screw mechanism (not shown) is provided in the vertical support frame 71. This ball screw mechanism is connected to an output shaft of a servo motor 76 (hereinafter referred to as an elevating motor 76) provided on the top of an upper and lower support frame 71 and is rotatably arranged in a vertical direction. And a ball screw nut coupled to the work lift arm 75, and the rotational movement of the lifting motor 76 is converted into the vertical movement of the work lift arm 75 by the ball screw mechanism.

  A spindle motor 77 (hereinafter referred to as a work rotation motor 77) is fixed to the work lift arm 75 with its output shaft facing upward. A work lift shaft 78 is connected to the output shaft of the work rotation motor 77 to contact the bottom surface of the work seat 25 to push up the work seat 25 and transmit a rotational force to the work seat 25. The work lift shaft 78 is formed with an insertion shaft portion 78a having a diameter that can be inserted into the work seat through-hole 29 at the tip thereof, and has a bowl-like shape slightly below the insertion shaft portion 78a (work rotation motor 77 side). A work receiving portion 78b is formed. The work receiving portion 78b has an outer diameter larger than the inner diameter of the work seat through hole 29, and constitutes a push-up surface of the work seat 25. In the present embodiment, the work rotation motor 77 includes a spindle device having a work lift shaft 78 as an output shaft, and a servo motor that applies a rotational force to the output shaft of the spindle device. The workpiece rotating motor 77 corresponds to the rotation driving means and the rotation driving actuator in the present invention.

  The workpiece lifting / lowering drive unit 70 further includes an air cylinder 80 that drives the workpiece pressing arm 73 to move up and down. The air cylinder 80 has a main body 80 a fixed to a cylinder mounting bracket 79 provided on the top of the upper and lower support frames 71, and a rod 80 b fixed to the work pressing arm 73. Therefore, the work pressing arm 73 is configured to move up and down along the guide rail 72 by operating the air cylinder 80 to control the expansion / contraction length of the rod 80 b.

  A work pressing cup 81 is provided at the tip of the work pressing arm 73. As shown in FIG. 7, the work pressing cup 81 includes a ring-shaped case 82 fixed to the tip of the work pressing arm 73, and a cylindrical shape rotatably supported in the ring-shaped case 82 via a bearing 83. The workpiece holding cylinder 84 is provided. The work holding cylinder 84 is formed with a through hole 85 at its axial center. The through hole 85 is formed so that the hole diameter becomes narrower in the middle thereof. The work holding cylinder 84 is formed with a donut-shaped disc portion 86 that is in contact with the upper surface of the donut-shaped glass laminate 6 cut into the glass plate laminate 5 at the lower end thereof. The donut-shaped disk portion 86 is formed such that the hole diameter of the through-hole 86 a is slightly larger than the inner diameter of the donut-shaped glass laminate 6 and the outer diameter is slightly smaller than the outer diameter of the donut-shaped glass laminate 6.

  The workpiece lifting / lowering drive unit 70 has a central axis of the workpiece pushing cup 81 (a central axis of the through hole 85 of the workpiece pressing cylinder 84) and a central axis of the workpiece lift shaft 78 arranged on the same vertical line, and the central axis thereof. Is arranged at a position intersecting with a straight line connecting the center positions of the four work seats 25 of the jig pallet 20 set on the work table 61 (the course center line of the work seat 25). The direction and arm length of the work pressing arm 73 and the work lift arm 75 are set.

The grindstone driving unit 90 includes an outer peripheral grinding unit 100 that grinds the outer peripheral surface of the doughnut-shaped glass laminate 6 and an inner peripheral grinding unit 120 that grinds the inner peripheral surface of the donut-shaped glass laminate 6.
The outer peripheral grinding unit 100 includes a spindle motor 102 (hereinafter referred to as outer peripheral grinding motor 102) connected to a rotating grindstone 101 (hereinafter referred to as outer peripheral grindstone 101) that grinds the outer peripheral surface of the doughnut-shaped glass laminate 6; A peripheral grinding control unit 103 that controls the horizontal position and height position of the peripheral grinding motor 102 is provided.

  The outer peripheral grinding control unit 103 includes an upper and lower support frame 105 that supports an outer peripheral grinding motor support arm 104 to which the outer peripheral grinding motor 102 is fixed so as to be slidable in the vertical direction. Two vertical guide rails 106 are provided on the side surfaces of the vertical support frame 105 in the vertical direction, and a base portion of the outer peripheral grinding motor support arm 104 is slidably connected to the vertical guide rail 106. A ball screw mechanism (not shown) is provided in the vertical support frame 105, and the rotational motion of a servo motor 107 (hereinafter referred to as a lifting motor 107) is changed to the vertical motion of the outer peripheral grinding motor support arm 104 by the ball screw mechanism. Converted. As a result, the peripheral grinding control unit 103 can control the lifting / lowering of the peripheral grinding motor 102 in the vertical direction by controlling the driving of the lifting / lowering motor 107.

  The outer peripheral grinding control unit 103 includes a horizontal support frame 108 that supports the upper and lower support frames 105. The horizontal support frame 108 includes two horizontal guide rails 109 on the upper surface thereof, and supports the leg portions 105a of the upper and lower support frames 105 so as to be slidable. A ball screw mechanism (not shown) similar to that of the upper and lower support frames 105 is also provided in the horizontal support frame 108, and the vertical support frame 105 is moved to the horizontal guide rail 109 by a servo motor 110 (hereinafter referred to as a horizontal drive motor 110). The drive control is possible in the horizontal direction along.

  The outer periphery grinding control unit 103 configured as described above can independently control the height position and the horizontal position of the outer periphery grindstone 101 by driving and controlling the elevating motor 107 and the horizontal drive motor 110. it can. The outer peripheral grinding control unit 103 is fixedly installed on a first table 53 provided at an intermediate portion of a support column 52 erected from a base 51.

  The inner peripheral grinding unit 120 is connected to a spindle motor 122 (hereinafter referred to as an inner peripheral grinding motor 122) connected to a rotating grindstone 121 (hereinafter referred to as an inner peripheral grindstone 121) for grinding the inner peripheral surface of the doughnut-shaped glass laminate 6. The inner peripheral grinding control unit 123 for controlling the horizontal position and the height position of the inner peripheral grinding motor 122. The inner peripheral grinding control unit 123 has basically the same configuration as that of the outer peripheral grinding control unit 103, and is different in that the position control target is the inner peripheral grinding stone 121.

  That is, the inner peripheral grinding control unit 123 slidably connects the inner peripheral grinding motor support arm 124, to which the inner peripheral grinding motor 122 is fixed, to the upper and lower support frames 125, and the servo motor 127 (hereinafter referred to as the lifting motor 127). ), The inner peripheral grinding motor support arm 124 is driven up and down along the vertical guide rail 126, and the leg portion 125 a of the upper and lower support frame 125 is slidably connected on the horizontal guide rail 129 of the horizontal support frame 128, and servo The upper and lower support frames 125 are configured to be driven in the horizontal direction by a motor 130 (hereinafter referred to as a horizontal drive motor 130). Therefore, by driving and controlling the elevating motor 127 and the horizontal driving motor 130, the height position and the horizontal position of the inner peripheral grinding wheel 121 can be controlled independently. The inner peripheral grinding control unit 123 is fixedly installed on the second table 54 provided on the top of the support column 52 erected from the base 51.

  In this embodiment, the outer peripheral grinding part 100 and the inner peripheral grinding part 120 are shifted in the vertical direction so as not to interfere with each other. However, they can be arbitrarily laid out, for example, by arranging them in the horizontal direction. .

Next, using this grinding apparatus 50, the donut-shaped glass laminate 6 is extracted from the glass plate laminate 5 (corresponding to the second step of the present invention), and the outer periphery of the extracted donut-shaped glass laminate 6 is extracted. A method of grinding the surface and the inner peripheral surface (corresponding to the third step of the present invention) will be described.
First, the operator feeds the jig pallet 20 with the glass plate laminate 5 in which the donut-shaped cuts are formed in the first process placed on the jig pallet 20 used in the first process. It is placed on the work table 61 of the drive unit 60. Then, the jig pallet 20 is placed on the work table 61 and clamped and fixed by a clamping device (not shown).

Subsequently, the operator operates an operation switch of a controller (not shown) provided in the grinding device 50. Thereby, the controller starts a series of operations shown below.
First, the feed motor 66 of the feed control unit 62 is driven and controlled to feed the work table 61 horizontally to a predetermined position. This position is a position where the central axis of the workpiece seat 25 at the end of the jig pallet 20 is on the same vertical line as the central axis of the workpiece pushing cup 81 of the workpiece lifting and lowering drive unit 70. The center axis of the work lift shaft 78 is also located on the same vertical line.

  Subsequently, the air cylinder 80 of the workpiece lifting / lowering drive unit 70 is operated at a predetermined pressure to extend the rod 80b and lower the workpiece pushing cup 81. Thereby, the donut-shaped disc part 86 provided in the front-end | tip part of the workpiece | work pushing cup 81 presses down the donut-shaped area | region (upper surface of the donut-shaped glass laminated body 6) cut into the glass plate laminated body 5 (FIG. 7). reference). Next, the lifting / lowering motor 76 of the workpiece lifting / lowering drive unit 70 is driven and controlled to raise the workpiece lift arm 75. As a result, the workpiece rotation motor 77 rises, and the workpiece lift shaft 78 provided at the tip thereof reaches the workpiece seat 25 in the jig pallet 20 (see FIG. 8). Then, the insertion shaft portion 78 a formed at the tip of the work lift shaft 78 is fitted into the work seat through hole 29, and the upper surface of the bowl-shaped work receiving portion 78 b pushes up the bottom surface of the work seat 25.

  The force by which the work seat 25 is pushed up by the work lift shaft 78 is greater than the downward pressing force by the work pushing cup 81. Accordingly, the doughnut-shaped glass laminate 6 that has been accommodated in the glass plate laminate 5 ascends together with the workpiece seat 25 while being sandwiched between the workpiece lift shaft 78 and the workpiece pushing cup 81. Then, when the work lift shaft 78 rises to a predetermined height position, the lifting motor 76 is stopped (FIG. 9). Thereby, the donut-shaped glass laminated body 6 on the workpiece seat 25 clamped between the workpiece lift shaft 78 and the workpiece pushing cup 81 is held at a predetermined grinding height position. Up to this point corresponds to the second step of the present invention.

  Subsequently, the controller drives and controls the work rotation motor 77 to rotate the work lift shaft 78. Thereby, the donut-shaped glass laminated body 6 rotates integrally with the workpiece seat 25. In this case, the doughnut-shaped glass laminate 6 is reliably positioned without being displaced in the lateral direction because the insertion shaft portion 78a formed at the tip of the work lift shaft 78 is fitted into the work seat through hole 29. Rotate.

  Next, the grindstone driving unit 90 is driven and controlled. In the peripheral grinding unit 100, the peripheral grinding motor 102 is driven to rotate the peripheral grinding wheel 101 at a high speed, and the position of the peripheral grinding wheel 101 is adjusted by the lifting motor 107 and the horizontal driving motor 110 of the peripheral grinding control unit 103. The cylindrical outer peripheral surface (abrasive grain adhering surface) 101 a of the outer peripheral grinding stone 101 approaches and contacts the outer peripheral surface 6 a of the doughnut-shaped glass laminate 6 under control. Also in the inner peripheral grinding part 120, the inner peripheral grinding motor 122 is driven to rotate the inner peripheral grinding wheel 121 at a high speed, and the inner peripheral grinding control unit 123 includes an elevating motor 127 and a horizontal driving motor 130. The position of the circumferential grindstone 121 is controlled, the inner circumferential grindstone 121 is inserted into the through hole 85 of the workpiece pushing cup 81, and the cylindrical outer circumferential surface (abrasive grain adhesion surface) 121 a is the inner circumferential surface of the doughnut-shaped glass laminate 6. 6b is contacted. In addition, the rotation direction of the grindstone 101 for outer periphery and the grindstone 121 for inner periphery is each set to the direction where a contact speed with the donut-shaped glass laminated body 6 increases. In this example, the rotation direction of the outer peripheral grindstone 101 is the same direction and the rotation direction of the inner peripheral grindstone 121 is opposite to the rotation direction of the doughnut-shaped glass laminate 6.

  Thus, the outer peripheral surface 6a and the inner peripheral surface 6b of the doughnut-shaped glass laminate 6 are sandwiched between the outer peripheral grindstone 101 and the inner peripheral grindstone 121 and are ground simultaneously (see FIG. 10). During this grinding, the outer peripheral grinding unit 100 is driven to reciprocate in the vertical direction by the lifting motor 107 of the outer peripheral grinding control unit 103 in the outer peripheral grinding unit 100, and the inner peripheral grinding unit 120 is moved up and down by the inner peripheral grinding control unit 123. The inner circumferential grinding wheel 121 is reciprocated in the vertical direction by the motor 127 for motor.

  When the grinding of the inner peripheral surface 6b and the outer peripheral surface 6a of one donut-shaped glass laminate 6 is completed, the work rotation motor 77 is stopped to stop the rotation of the donut-shaped glass laminate 6 on the work seat 25. At the same time, the lifting / lowering motor 76 of the workpiece lifting / lowering drive unit 70 is driven and controlled to lower the workpiece lift arm 75 to the origin position. At this time, the workpiece pushing cup 81 moves downward while pressing the donut-shaped glass laminate 6 from the upper surface by the pressure of the cylinder 80. Accordingly, the workpiece seat 25 and the donut-shaped glass laminate 6 move downward while being sandwiched between the workpiece pushing cup 81 and the workpiece lift shaft 78. Further, the work rotation motor 77 is positioned at a position (position on the same vertical line) where the tip of the rotation prevention pin 24 is aligned with the rotation prevention groove 26a formed in the work seat 25 by rotation position control by a motor controller (not shown). The rotation is stopped. As a result, the workpiece seat 25 reliably returns into the pallet through hole 21 of the jig pallet 20, and the donut-shaped glass laminate 6 returns to the original position of the glass plate laminate 5. Further, the outer peripheral grinding wheel 101 and the inner peripheral grinding wheel 121 are also returned to the original origin position by the outer peripheral grinding control unit 103 and the inner peripheral grinding control unit 123. In this case, the rotation of the outer peripheral grindstone 101 and the inner peripheral grindstone 121 may be either stopped or not stopped.

  When the workpiece seat 25 and the doughnut-shaped glass laminate 6 return to the original positions, the air cylinder 80 is driven to raise the workpiece pushing cup 81 to the original origin position. In this way, grinding of one set of donut glass laminated bodies 6 is completed. Then, the feed motor 66 of the feed control unit 62 is driven and controlled to feed the work table 61 in the horizontal direction. This horizontal position is set to a position where the central axis of the second workpiece seat 25 of the jig pallet 20 is on the same vertical line as the central axis of the workpiece pushing cup 81 of the workpiece lifting / lowering drive unit 70. In this way, by repeating the control operation described above, the four sets of donut-shaped glass laminates 6 are sequentially ground. The grinding of the doughnut-shaped glass laminate 6 is not necessarily performed in plural sets, and one set of the donut-shaped glass laminate 6 may be extracted from the glass plate laminate 5 and ground. Such a grinding step of the outer peripheral surface 6a and the inner peripheral surface 6b of the donut-shaped glass laminate 6 corresponds to the third step of the present invention.

  The doughnut-shaped glass laminates 6 thus ground are separated one by one to form a donut-shaped glass substrate 1. The doughnut-shaped glass substrate 1 is used as an information recording medium disk after a chamfering process and a polishing process of an outer peripheral end face 1a and an inner peripheral end face 1b, and finally a magnetic film is formed on the surface. . The glass substrate 1 may be distributed in the market as a product at the stage where the grinding process is completed, and may be processed into a final product by another processor.

  According to the method for manufacturing a glass substrate for recording medium manufactured by the coring device 10 and the grinding device 50 of the present embodiment described above, the grinding efficiency is good because the plurality of glass substrates 1 are ground simultaneously. Further, the doughnut-shaped glass laminate 6 is extracted in the second step using the jig pallet 20 used in the first step as it is, and in this state, the outer peripheral surface 6a and the inner peripheral surface 6b are ground in the third step. Therefore, the work of transferring the donut-shaped glass laminate 6 to another jig for grinding becomes unnecessary, and the work efficiency is improved. Moreover, the position shift by the transfer to the jig | tool of the donut-shaped glass laminated body 6 does not arise. As a result, the outer peripheral end surface 1a and the inner peripheral end surface 1b of the doughnut-shaped glass substrate 1 can be ground efficiently and with dimensional accuracy.

  Further, since the work seat 25 inserted into the jig pallet 20 is held by the collar portion 27 so that it can be pulled out only upward, it is not necessary to insert and hold the jig pallet 20 firmly. Therefore, the work seat 25 can be smoothly pulled out of the jig pallet 20 by the lift of the work lift shaft 78, and the donut-shaped glass laminate 6 can be easily lifted from the glass plate laminate 5.

  Further, the work seat through hole 29 formed in the work seat 25 is used not only for dropping glass scrap but also for inserting an insertion shaft portion 78 a provided at the tip of the work lift shaft 78. For this reason, the doughnut-shaped glass laminate 6 is accurately positioned by the insertion shaft portion 78a and does not shift when rotated. Moreover, since the rotation direction of the outer peripheral grinding stone 101 and the inner peripheral grinding stone 121 is set to a direction in which the grinding speed is higher than the rotational direction of the doughnut-shaped glass laminate 6, the grinding time can be shortened. it can.

  Furthermore, since the workpiece rotating motor 77 for rotating the donut-shaped glass laminate 6 is moved up and down, the extraction operation and the rotation operation of the donut-shaped glass laminate 6 on the workpiece seat 25 can be easily performed. it can. Moreover, since the inner periphery and the outer periphery are simultaneously cut using the double core drill 31, the concentric accuracy is high and the cutting time can be shortened.

  Although the present embodiment has been described above, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the object of the present invention.

  For example, in this embodiment, the double core drill 31 is used for coring, but the two core drills having different diameters are used to form, for example, a small-diameter hole cut and then a large-diameter hole cut separately. You may make it cut into. Moreover, in this embodiment, although the outer peripheral surface 6a and the inner peripheral surface 6b of the donut-shaped glass laminated body 6 are ground simultaneously, you may make it grind separately.

  In addition, although the glass laminated body 5 and the doughnut-shaped glass laminated body 6 in FIG. 1, FIG. 4-10 represent a cross section, hatching is abbreviate | omitted in order to make it easy to see.

It is a schematic block diagram of the coring apparatus which implements the 1st process concerning an embodiment. It is sectional drawing cut | disconnected in the AA direction of FIG. 3 of a jig | tool palette. It is a top view of a jig pallet. It is sectional drawing showing the state which mounted the glass plate laminated body on the jig | tool palette. It is sectional drawing explaining a coring operation | movement. It is a schematic block diagram of the grinding device which implements the 2nd process and 3rd process concerning embodiment. It is state explanatory drawing showing the state which is pressing the donut-shaped glass laminated body with a workpiece | work pushing cup. It is a state explanatory view showing the state where a doughnut-shaped glass laminated body is clamped with a work pushing cup and a work lift shaft. It is a state explanatory view showing the state where the doughnut-shaped glass laminate is lifted by being sandwiched between a workpiece pushing cup and a workpiece lift shaft. It is a state explanatory view showing the state where the donut-like glass layered product is ground on the work seat. It is a perspective view of a glass substrate. It is sectional drawing cut | disconnected in the BB direction of FIG. 3 of a jig | tool palette.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Glass substrate, 1a ... Outer peripheral end surface, 1b ... Inner peripheral end surface, 1h ... Round hole, 5 ... Glass laminated body, 6 ... Donut-shaped glass laminated body, 6a ... Outer peripheral surface, 6b ... Inner peripheral surface, 7 ... Glass plate DESCRIPTION OF SYMBOLS 10 ... Coring apparatus, 12 ... Work table, 20 ... Jig pallet, 21 ... Pallet through-hole, 22 ... Upper surface recessed part, 23 ... Lower surface recessed part, 24 ... Anti-rotation pin, 25 ... Work lifting seat, 26 ... Cylindrical body part, 26a ... rotation prevention groove, 27 ... collar part, 28 ... truncated cone part, 29 ... work seat through hole, 30 ... core drill device, 31 ... double core drill, 32 ... drill motor, 33 ... drill control unit, 34 DESCRIPTION OF SYMBOLS ... Drill support arm, 38 ... Elevating motor, 47 ... Horizontal drive motor, 50 ... Grinding device, 60 ... Work feed drive unit, 61 ... Work table, 62 ... Feed control unit, 66 ... Feed motor, 7 DESCRIPTION OF SYMBOLS ... Work lifting drive part, 73 ... Work holding arm, 76 ... Lifting motor, 77 ... Work rotation motor, 78 ... Work lift shaft, 78a ... Insertion shaft part, 78b ... Work receiving part, 80 ... Air cylinder, 81 ... Work pressing cup, 84 ... Work holding cylinder, 85 ... Through hole, 86 ... Doughnut-shaped disk part, 86a ... Through hole, 90 ... Wheel driving unit, 100 ... Wear grinder, 101 ... Wheel for outer periphery, 102 ... Wear grind Motor, 103 ... outer peripheral grinding control unit, 107 ... elevating motor, 110 ... horizontal drive motor, 120 ... inner circumference grinding part, 121 ... inner circumference grinding wheel, 122 ... inner circumference grinding motor, 123 ... inner circumference grinding Control unit, 127 ... elevating motor, 130 ... horizontal drive motor.

Claims (5)

In the method of manufacturing a disk-shaped glass substrate having a circular hole in the center,
A first step of placing a laminated body in which a plurality of sheet glass is laminated on a jig pallet, and forming two concentric cuts having different diameters by a core drill on the laminated body;
The doughnut-shaped glass laminate is sandwiched from the plate-like glass laminate cut in the first step together with the workpiece lifting seat inserted so as to be able to be extracted only upward in the jig pallet by the lifting actuator. A second step of pulling upward;
A third step of grinding the outer peripheral surface and inner peripheral surface of the doughnut-shaped glass laminate on the workpiece lifting seat extracted in the second step with a rotating grindstone;
Including
A glass substrate manufactured by using a columnar body having a cross-sectional donut shape that is provided directly under a donut-shaped region into which the glass laminate is cut, and that does not protrude outside the region as the workpiece lifting seat. Method. In the third step, the donut-shaped object is formed by inserting the tip of the rotation shaft of the rotation drive actuator into the central circular hole formed in the workpiece lifting seat from below the central circular hole and rotating the workpiece lifting seat. The method for producing a glass substrate according to claim 1, wherein the glass laminate is rotated about its axis. In the above-described second step, the manufacturing method of a glass substrate請Motomeko 2, wherein the raising and lowering the rotary drive actuator by the lifting actuator. A glass substrate grinding apparatus for grinding an outer peripheral end surface and an inner peripheral end surface of the glass substrate by performing the second step and the third step according to claim 1,
A workpiece, which is a columnar body having a cross-sectional donut shape that is placed directly below the donut-shaped cut region and does not protrude outside the cut-out glass region, with the plate-like glass laminate having a donut-shaped cut formed thereon. A jig pallet inserted so that the lifting seat can be pulled out only upward ,
From the plate-like glass laminate placed on the jig pallet, the elevating drive means for clamping the donut-like glass laminate together with the workpiece lifting seat and extracting it upwards;
A glass substrate grinding apparatus comprising: a grinding means for grinding an outer peripheral surface and an inner peripheral surface of the extracted donut-shaped glass laminate on the workpiece lifting seat. A rotation driving means for rotating the workpiece lifting seat by inserting the tip of the rotating shaft into the central circular hole formed in the workpiece lifting seat from below the central circular hole,
The elevation driving means, by raising the rotation shaft of the rotary drive means, according to claim 4, characterized in that withdrawing the donut-shaped glass laminate from the placed sheet glass laminate to the jig pallet The glass substrate grinding apparatus as described .

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