JP5091053B2 - Visual inspection device for flexible sheet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flexible sheet visual inspection apparatus adapted to improve yield rate in visual inspection by reducing error determination of the flexible sheet. <P>SOLUTION: The flexible sheet visual inspection apparatus inspects the appearance of the flexible sheet 20 between an upstream guide roller 21 and a downstream guide roller 22, while transferring the flexible sheet 20 with tension imparted between both guide rollers 21 and 22. The apparatus includes an irregularity detection sensor 25 to detect irregularities in opposite side ends 20a of the flexible sheet 20; and an air force support mechanism 24 to support the opposite side ends 20a in a non-contact state by pressing the opposite side ends 20a of the flexible sheet 20 by air force from both front and rear surfaces. The apparatus includes a control unit 26 to control the air force of the air force support mechanism 24 in a direction to suppress small vibration, according to the degree of irregularities detected by the irregularity detection sensor 25. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to an appearance inspection apparatus for a flexible sheet.

  Conventionally, a flexible sheet, for example, a flexible substrate sheet material in which polyimide and copper foil are laminated, has a thickness of about 20 μm to 60 μm, a width of about 600 mm, and is wound into a roll.

  At the time of appearance inspection, as shown in FIGS. 8A and 8B, the flexible sheet 20 is in the direction of the arrow in a state where tension is applied between the upstream guide roller 21 and the downstream guide roller 22. Transport to. As described above, the appearance of the flexible sheet 20 is inspected by the imaging device 23 between the guide rollers 21 and 22 while being conveyed.

  If the flexible sheet 20 does not have an uneven (wavy wrinkle) defect portion, nothing appears in the image by the imaging device 23 (see FIG. 8D), and thus it is determined as a non-defective product. On the contrary, when the flexible sheet 20 has an uneven defect portion, a horizontal stripe a appears in the image obtained by the imaging device 23 [see FIG.

  The flexible sheet 20 as described above uses the center portion of the width W1 as a product, and the both side end portions 20a and 20a of the width W2 are cut and discarded at the product processing stage. Even if it exists, it will not be a defective product.

  However, the flexible sheet 20 between the upstream guide roller 21 and the downstream guide roller 22 is only in a state where tension is applied, and during that time, the flexible sheet 20 is not vibrated. It is not supported.

In addition, the technique which prevents the bending of a strip | belt material edge part by conveying while blowing air on the edge part of the both sides of the thin sheet | seat strip | belt material between rollers is proposed (refer patent document 1).
JP-A-8-34551

  For this reason, if both side end portions 20a have irregularities, they come into contact with the respective guide rollers 21 and 22 so that the flexible sheet 20 between the upstream guide roller 21 and the downstream guide roller 22 has a minute vibration. May occur.

  The minute vibration appears as a horizontal stripe a in the image captured by the image pickup device 23, so that the flexible sheet 20 is erroneously determined to be a defective product even if there is no uneven portion at the center. was there.

  The present invention has been made to solve the above problems, and provides a visual inspection apparatus for a flexible sheet that reduces the erroneous determination of the flexible sheet and improves the yield rate in the visual inspection. It is intended to do.

  In order to solve the above-described problems, the present invention provides a flexible sheet between both guide rollers while conveying the flexible sheet with tension applied between the upstream guide roller and the downstream guide roller. An apparatus for inspecting the appearance of a flexible sheet, wherein an irregularity detection sensor for detecting irregularities at both ends of the flexible sheet is provided upstream of the upstream guide roller, and between the guide rollers. When both sides of the flexible sheet are pressed by aerodynamic force from both the front and back sides, both sides are supported in a non-contact state and when the irregularities are detected by the irregularity detection sensor And a control unit that controls the aerodynamic force of the aerodynamic support mechanism in a direction that suppresses minute vibrations according to the degree of the unevenness provided. is there.

  As in claim 2, in claim 1, the aerodynamic support mechanism is preferably a pair of air nozzles that apply air pressure toward both the front and back surfaces of the side end portion of the flexible sheet.

  As in claim 3, in claim 2, the air nozzle is preferably inclined so as to apply air pressure outward from the side end of the flexible sheet.

  As in a fourth aspect, in the second aspect, the air nozzle preferably has a vortex forming portion that forms a vortex that applies air pressure outward from a side end portion of the flexible sheet.

  As in claim 5, in claim 1, the aerodynamic support mechanism is a pair of sound pressure generators that apply sound pressure toward both the front and back surfaces of the side end portion of the flexible sheet. Can do.

  As in claim 6, in claim 5, the sound pressure generator preferably has a directing portion that directs the sound pressure while converging toward the side edge of the flexible sheet.

  According to the present invention, between the upstream guide roller and the downstream guide roller, the both sides of the flexible sheet are pressed by air force from both the front and back surfaces by the aerodynamic support mechanism. The both side ends of the are supported in a non-contact state (floating state). Then, when the unevenness detection sensor detects the unevenness on both ends of the flexible sheet upstream of the upstream guide roller, the control unit suppresses minute vibrations according to the detected unevenness. Thus, the aerodynamic force of the aerodynamic support mechanism is controlled. As a result, even if minute vibrations are generated in the flexible sheet due to the irregularities on both side edges of the flexible sheet, both side edges of the flexible sheet are supported by controlled aerodynamic forces. The micro vibration of the flexible sheet between the guide rollers is suppressed. Therefore, even if there are irregularities on both ends of the flexible sheet, the defect that the flexible sheet is erroneously determined to be defective is reduced, and the yield rate in appearance inspection is improved. Become.

  According to the second aspect, the front and back surfaces of the side end portion of the flexible sheet can be supported almost evenly by the air pressure of the pair of air nozzles, so that one-side pressing or the like is eliminated and the appearance inspection can be performed more accurately. .

  According to the third aspect, since the air pressure of the air nozzle is applied outward from the side end portion of the flexible sheet, dust attached to the side end portion of the flexible sheet can be removed outward. . Further, since the air pressure can be smoothly released to the outside, the amount of air pressure can be reduced by eliminating the retention of air pressure.

  According to the fourth aspect, since the air pressure of the air nozzle becomes a vortex flow outward from the side end portion of the flexible sheet, dust attached to the side end portion of the flexible sheet is removed outward. it can. Further, since the air pressure can be smoothly released to the outside, the amount of air pressure can be reduced by eliminating the retention of air pressure.

  According to claim 5, since both the front and back surfaces of the side end portion of the flexible sheet can be supported almost uniformly by the sound pressure (air vibration) applied from the pair of sound pressure generators, there is no single press, Appearance inspection can be performed more accurately.

  According to the sixth aspect, since the sound pressure can be accurately directed while converging toward the side edge portion of the flexible sheet by the directing portion, minute vibrations are further suppressed.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings. Note that portions having the same configuration and operation as those of the background art are denoted by the same reference numerals, and detailed description thereof is omitted.

  1A and 1B show a first embodiment, in which FIG. 1A is a plan view of an aerodynamic support mechanism 24 of an appearance inspection apparatus, and FIG. 1B is a side view of FIG.

  The flexible sheet 20 is conveyed between the guide rollers 21 and 22 by the imaging device 23 while being conveyed in the direction of the arrow while tension is applied between the upstream guide roller 21 and the downstream guide roller 22. The appearance of the flexible sheet 20 is inspected.

  Between the upstream guide roller 21 and the downstream guide roller 22, the both side ends 20 a of the flexible sheet 20 are supported over almost the entire length between the guide rollers 21 and 22. An aerodynamic support mechanism 24 is provided. The aerodynamic support mechanism 24 presses both side end portions 20a of the flexible sheet 20 between the two guide rollers 21 and 22 by air force from both the front and back surfaces, so that both side end portions 20a are in a non-contact state (floating state). ).

  Further, an unevenness detection sensor 25 that detects the unevenness of both end portions 20 a of the flexible sheet 20 is provided upstream of the upstream guide roller 21.

  Furthermore, a control unit 26 is provided that controls the aerodynamic force of the aerodynamic support mechanism 24 according to the degree of the detected unevenness when the unevenness detection sensor 25 detects the unevenness of the both end portions 20a.

  In the first embodiment, the air force support mechanism 24 presses the both end portions 20a of the flexible sheet 20 from both the front and back surfaces between the upstream guide roller 21 and the downstream guide roller 22 by air force. . Thereby, the both-ends part 20a of the flexible sheet | seat 20 comes to be supported in a non-contact state.

  Then, when the unevenness detection sensor 25 detects the unevenness of the both end portions 20a of the flexible sheet 20, the control unit 26 supports the aerodynamic force in the direction of suppressing micro vibration according to the detected unevenness level. The aerodynamic force of the mechanism 24 is controlled.

  As a result, even if minute vibrations are generated in the flexible sheet 20 due to the unevenness of the both end portions 20a of the flexible sheet 20, the both end portions 20a of the flexible sheet 20 are microvibrated by controlled aerodynamic force. It comes to be supported not to occur. Therefore, minute vibrations of the flexible sheet 20 between the guide rollers 21 and 22 are suppressed.

  Therefore, even if both side end portions 20a of the flexible sheet 20 are uneven, the problem that the flexible sheet 20 is erroneously determined to be defective is reduced, and the yield rate in appearance inspection is improved. To come.

  2A and 2B show a second embodiment, in which FIG. 2A is a side view of a main part of a pair of air nozzles 30 that are aerodynamic support mechanisms 24, and FIG. 2B is a view of the flexible sheet 20 imaged by the imaging device 23. 4 is a graph of the uneven state of both side ends 20a and the aerodynamic control state by the control unit 26.

  The aerodynamic support mechanism 24 is a pair of air nozzles 30 that apply air pressure toward the front and back surfaces of the side end portion 20 a of the flexible sheet 20, and the air pressure (air force when air is ejected from the air nozzle 30. ), The minute vibrations of the side end portions 20a are suppressed. The amount of air injection from the pair of upper and lower air nozzles 30 is set to be approximately the same.

  Then, as shown in FIG. 2B, when the unevenness of the side end portion 20a is large (see symbol b), that is, when the minute vibration is large, the air injection amount from the air nozzle 30 is increased (see symbol b ′). By doing so, the air pressure is increased to suppress minute vibrations.

  On the contrary, when the unevenness of the side end portion 20a is small (see symbol c), that is, when the minute vibration is small, the air pressure is reduced by reducing the air injection amount from the air nozzle 30 (see symbol c ′). To come.

  Such a relationship between the uneven state and the air injection amount is programmed in the control unit 26, and the air injection amount from the air nozzle 30 is controlled.

  If it is 2nd Embodiment, since the front and back both surfaces of the side edge part 20a of the flexible sheet | seat 20 can be supported substantially equally with the air pressure of a pair of air nozzle 30, one press etc. will be lose | eliminated and a visual inspection will be more accurate. You can do it.

  3A and 3B show a first modification of the second embodiment, in which FIG. 3A is a side view of the main part of the air nozzle 30 and FIG. 3B is a side view of the main part showing the pneumatic flow caused by the air nozzle 30.

  As shown by a two-dot chain line in FIG. 3A, when air pressure is applied to the side end portion 20a of the flexible sheet 20 from the air nozzle 30 'in a substantially vertical direction, the air pressure colliding with the side end portion 20a is reduced. It blows right above and interferes with the air pressure coming out of the air nozzle 30 '. That is, since the air pressure is retained, it is necessary to increase the air pressure amount.

  Therefore, the air nozzle 30 is inclined at an angle θ so as to apply an air pressure outward from the side end portion 20a of the flexible sheet 20. In FIG. 3, only the upper air nozzle 30 is shown, but the lower air nozzle has the same configuration.

  If it is the 1st modification of 2nd Embodiment, since the air pressure of the air nozzle 30 is provided toward outward from the side edge part 20a of the flexible sheet | seat 20 as the arrow d, it is flexible. The dust adhering to the side end portion 20a of the sheet 20 can be removed outward.

  Further, since the air pressure can be smoothly released to the outside, the amount of air pressure can be reduced by eliminating the retention of air pressure.

  FIG. 4 is a second modification of the second embodiment, in which (a) is a cross-sectional view of the air nozzle 30 and (b) and (c) are side views showing a pneumatic flow caused by the air nozzle 30.

  As shown in FIG. 4A, the air nozzle 30 has a spiral air passage (vortex forming portion) 30c that is wide on the inlet 30a side and narrowed on the outlet 30b side. (Air pressure) e is applied.

  In addition, the direction of the vortex e is set so that air pressure is applied outward from both side end portions 20a of the flexible sheet 20 respectively. Note that one side (for example, the left side) side end portion 20a and the other side (for example, the right side) side end portion 20a of the flexible sheet 20 each have a spiral direction in order to apply air pressure outward. Need to change. Although only the upper air nozzle 30 is shown in FIG. 4, the lower air nozzle has the same configuration.

  In the second modification of the second embodiment, the air pressure of the air nozzle 30 is vortex e from the side end portion 20a of the flexible sheet 20 to the outside as indicated by an arrow d. The dust adhering to the side end 20a of the flexible sheet 20 can be removed outward.

  Further, since the air pressure can be smoothly released to the outside, the amount of air pressure can be reduced by eliminating the retention of air pressure.

  FIG. 5 is a third embodiment, in which (a) is a plan view of the aerodynamic support mechanism 24, and (b) is a side view of (a).

  The aerodynamic support mechanism 24 is a pair of sound pressure generators 31 that apply sound pressure (air vibration) toward the front and back surfaces of the side end portion 20 a of the flexible sheet 20, and is generated by the sound pressure generator 31. With the sound pressure, the minute vibrations at the both end portions 20a are suppressed.

  FIG. 6A is a system block diagram, in which the detection signal of the unevenness detection sensor 25 is input to the control unit 26, and a sound pressure signal corresponding to the degree of the detected unevenness is generated by the sound pressure generator 32. The sound pressure signal is input to the sound pressure generator 31. As a result, the sound pressure generator 31 generates a sound pressure corresponding to the degree of unevenness.

  Then, as shown in FIG. 6B, when the unevenness of the side end portion 20a is large (see symbol b), that is, when the minute vibration is large, the sound pressure (low frequency of 10 Hz or less) ( Air vibration) b ″ is generated. This increases the sound pressure and suppresses minute vibrations.

  On the contrary, when the unevenness of the side end 20a is small (see symbol c), that is, when the minute vibration is small, the sound pressure (air vibration) c ″ of a high frequency (for example, an ultrasonic wave of 20 KHz or more) is generated. Let As a result, the sound pressure is reduced.

  If it is 3rd Embodiment, since the front and back both surfaces of the side edge part 20a of the flexible sheet | seat 20 can be supported substantially equally with the sound pressure (air vibration) of the sound pressure generator 31, one side press etc. will be lost, and external appearance Inspection can be performed more accurately.

  FIG. 7 is a cross-sectional view of a sound pressure generator 31 according to a modification of the third embodiment. The sound pressure generator 31 is provided with a directing portion 31 a that directs the sound pressure while converging toward the side edge portion 20 a of the flexible sheet 20.

  In the directing portion 31a, the flat plate-like reflecting plate 31b in the central portion is arranged in the vertical direction toward the flexible sheet 20, and the cone-like reflecting plate 31c in the peripheral portion is arranged in the flexible sheet 20. It is arranged to narrow toward the direction of.

  In the modified example of the third embodiment, the sound pressure can be accurately directed while converging toward the side edge portion 20a of the flexible sheet 20 by the directing portion 31a, so that the minute vibration is further suppressed. It becomes like this.

It is 1st Embodiment of this invention, (a) is a top view of an aerodynamic support mechanism, (b) is a side view of (a). It is 2nd Embodiment of this invention, (a) is a principal part side view of a pair of air nozzle which is an aerodynamic support mechanism, (b) is the uneven | corrugated state of the both ends of a flexible sheet, and a control unit It is a graph of an air pressure control state. It is a 1st modification of 2nd Embodiment, (a) is a principal part side view of an air nozzle, (b) is a principal part side view which shows the pneumatic flow by an air nozzle. It is a 2nd modification of 2nd Embodiment, (a) is sectional drawing of an air nozzle, (b) (c) is a side view which shows the pneumatic flow by an air nozzle. It is 3rd Embodiment of this invention, (a) is a top view of an aerodynamic support mechanism, (b) is a side view of (a). (A) is a system block diagram of 3rd Embodiment, (b) is a graph of the uneven | corrugated state of the both-ends part of a flexible sheet | seat, and the sound pressure control state by a control unit. It is sectional drawing of the sound pressure generator of the modification of 3rd Embodiment. It is a conventional appearance inspection apparatus, (a) is a plan view, (b) is a side view of (a), and (c) and (d) are image diagrams by an imaging apparatus.

Explanation of symbols

20 Flexible sheet 21 Upstream roller 22 Downstream roller 23 Imaging device 24 Aerodynamic support mechanism 25 Concavity and convexity detection sensor 26 Control unit 30 Air nozzle 31 Sound pressure generator

Claims (6)

Inspecting the appearance of the flexible sheet between the guide rollers while conveying the flexible sheet with tension applied between the upstream guide roller and the downstream guide roller. A device,
An irregularity detection sensor that detects irregularities at both ends of the flexible sheet upstream of the upstream guide roller;
An aerodynamic support mechanism that supports both end portions in a non-contact state by pressing both side end portions of the flexible sheet between the guide rollers from both front and back surfaces by aerodynamic force;
And a control unit that controls the aerodynamic force of the aerodynamic support mechanism in a direction that suppresses minute vibrations according to the degree of the detected unevenness when the unevenness is detected by the unevenness detection sensor. Appearance inspection device for flexible sheet.   The visual inspection apparatus for a flexible sheet according to claim 1, wherein the aerodynamic support mechanism is a pair of air nozzles that apply air pressure toward both front and back surfaces of the side end of the flexible sheet. .   3. The flexible sheet visual inspection apparatus according to claim 2, wherein the air nozzle is inclined so as to apply an air pressure outward from a side end portion of the flexible sheet.   3. The flexible sheet according to claim 2, wherein the air nozzle includes a vortex forming portion that forms a vortex that applies air pressure outward from a side end portion of the flexible sheet. Appearance inspection device.   2. The flexible sheet according to claim 1, wherein the aerodynamic support mechanism is a pair of sound pressure generators that apply sound pressure toward both front and back surfaces of a side end portion of the flexible sheet. Appearance inspection device.   6. The flexible sheet visual inspection apparatus according to claim 5, wherein the sound pressure generator includes a directing unit that directs the sound pressure while converging toward a side edge of the flexible sheet.

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