JP5086336B2 - 多導管流量率コントローラ - Google Patents
多導管流量率コントローラ Download PDFInfo
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- JP5086336B2 JP5086336B2 JP2009505364A JP2009505364A JP5086336B2 JP 5086336 B2 JP5086336 B2 JP 5086336B2 JP 2009505364 A JP2009505364 A JP 2009505364A JP 2009505364 A JP2009505364 A JP 2009505364A JP 5086336 B2 JP5086336 B2 JP 5086336B2
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- frc
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
- G05D7/0664—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/43—Programme-control systems fluidic
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87877—Single inlet with multiple distinctly valved outlets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Measuring Volume Flow (AREA)
Description
Claims (11)
- 1つの質量流量を複数N個の副次流に分割するシステムであって、
前記1つの質量流量を受けるように構成されている入口と、
マスタFRC(流量率コントローラ)および1つ以上のスレーブFRCであって、各々、前記入口に接続されており、少なくとも1つの副次流導管を含む、FRCと、
を備えており、
前記マスタFRCおよびスレーブFRCは、組合せにおいて、N個の副次流導管を含み、各流導管i(i=1、...N)は、前記N個の副次流の内対応する1つを搬送するように接続されており、
前記マスタFRCは、ホスト・コントローラから事前選択比率設定点を受信し、前記スレーブFRCに前記事前選択比率設定点を1つ以上のコマンド信号と共に配信し、個々の流量Qi(i=1、...N)と総流量QTとの間の比率Qi/QT(i=1、...N)を、前記事前選択比率設定点に維持できるように構成されており、Qiは流導管iにおける個々の流量を表し、QTはN個の個々の流量全ての和QT=Q1+...+Qi+...QNを表し、
前記マスタFRCは、対応する流導管i(i=1、...N)を通過するN個の個々の流量Q i (i=1、...N)を加算することによって前記総流量Q T を計算し、前記スレーブFRCの全てに、前記総流量Q T および比率設定点を伝達するように構成されており、
前記マスタFRCおよび各スレーブFRCは、前記ホスト・コントローラからの比率設定点に応答して、比率Q i /Q T (i=1、...N)の全てが前記比率設定点を満たすまで、それぞれの流導管を通過する質量流量を制御し、
各スレーブFRCは、その流導管を通過する流量を測定し、測定した流量を前記マスタFRCに伝達するように構成されており、
各スレーブFRCは、更に、その流導管を通過する前記測定流量と、前記マスタFRCから受信した総流量Q T との間における実際の比率を計算し、該実際の比率を前記マスタFRCに報告するように構成されている、システム。 - 請求項1記載のシステムにおいて、
前記マスタFRCは、更に、前記ホスト・コントローラに、前記測定流速と、各スレーブFRCからの実際の比率とを報告するように構成されている、システム。 - 請求項1記載のシステムにおいて、前記マスタFRCは、更に、当該マスタFRCにおける流導管を通過する流量を測定し、前記マスタFRC内の流導管を通過する前記測定流量を、前記スレーブFRCの全てによって測定しこれらから受信した流量と加算することによって、総流量QTを計算するように構成されている、システム。
- 請求項1記載のシステムにおいて、前記マスタFRCおよびスレーブFRCは二重導管FRCであり、各二重導管FRCは、それぞれ、前記N個の流導管の内2つを含む、システム。
- 請求項1記載のシステムにおいて、
各流導管i(i=1、...N)は、
当該流導管iを通過する流量を測定するように接続されている流量センサと、
前記流導管iを通過する流量を規制するように接続されている弁と、
を含む、システム。 - 請求項5記載のシステムにおいて、各FRCは、当該FRC内にある流量センサおよび弁に接続されている弁コントローラを含み、該弁コントローラは、前記ホスト・コントローラからの比率設定点に応答して、当該FRC内にある各弁に制御信号を供給し、前記個々の流量およびQT間の比率が、対応する流導管に対する比率設定点を満たすまで、対応する流導管における質量流量を制御するように構成されている、システム。
- 請求項1記載のシステムであって、更に、ディジタル通信バスを備えており、前記マスタFRCおよびスレーブFRCは、更に、前記ディジタル通信バスを通じて、互いにおよび前記ホスト・コントローラと通信するように構成されている、システム。
- 請求項7記載のシステムにおいて、前記ディジタル通信バスは、イーサネット(登録商標)TCP/IP、UDP/IP、DeviceNet、CAN(コントローラ・エリア・ネットワーク)、RS−232、およびRS−485の内少なくとも1つを備えているネットワークに接続されている、システム。
- 請求項1記載のシステムにおいて、前記流導管の数Nは固定である、システム。
- 請求項1記載のシステムにおいて、前記流導管の数Nは可変である、システム。
- 請求項1記載のシステムにおいて、前記マスタFRCおよびスレーブFRCは、互いに並列構成に接続されている、システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/279,786 | 2006-04-14 | ||
US11/279,786 US8997791B2 (en) | 2006-04-14 | 2006-04-14 | Multiple-channel flow ratio controller |
PCT/US2007/005429 WO2007120406A1 (en) | 2006-04-14 | 2007-03-01 | Multiple-channel flow ratio controller |
Publications (2)
Publication Number | Publication Date |
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JP2009533756A JP2009533756A (ja) | 2009-09-17 |
JP5086336B2 true JP5086336B2 (ja) | 2012-11-28 |
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JP2009505364A Active JP5086336B2 (ja) | 2006-04-14 | 2007-03-01 | 多導管流量率コントローラ |
Country Status (7)
Country | Link |
---|---|
US (1) | US8997791B2 (ja) |
JP (1) | JP5086336B2 (ja) |
KR (1) | KR101161635B1 (ja) |
DE (1) | DE112007000926B4 (ja) |
GB (1) | GB2449212B (ja) |
TW (1) | TWI443487B (ja) |
WO (1) | WO2007120406A1 (ja) |
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-
2006
- 2006-04-14 US US11/279,786 patent/US8997791B2/en active Active
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2007
- 2007-03-01 GB GB0817343A patent/GB2449212B/en active Active
- 2007-03-01 JP JP2009505364A patent/JP5086336B2/ja active Active
- 2007-03-01 DE DE112007000926.8T patent/DE112007000926B4/de active Active
- 2007-03-01 WO PCT/US2007/005429 patent/WO2007120406A1/en active Application Filing
- 2007-03-01 KR KR1020087025507A patent/KR101161635B1/ko active IP Right Grant
- 2007-04-13 TW TW96112952A patent/TWI443487B/zh active
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Publication number | Publication date |
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GB2449212B (en) | 2012-03-14 |
GB0817343D0 (en) | 2008-10-29 |
DE112007000926T5 (de) | 2009-04-16 |
KR101161635B1 (ko) | 2012-07-09 |
JP2009533756A (ja) | 2009-09-17 |
WO2007120406A1 (en) | 2007-10-25 |
KR20080111075A (ko) | 2008-12-22 |
TW200807204A (en) | 2008-02-01 |
GB2449212A (en) | 2008-11-12 |
US8997791B2 (en) | 2015-04-07 |
US20070240778A1 (en) | 2007-10-18 |
DE112007000926B4 (de) | 2020-06-18 |
TWI443487B (zh) | 2014-07-01 |
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