JP5070673B2 - Magnetic measurement apparatus and method - Google Patents

Description

  The present invention relates to a magnetic measurement apparatus and method.

Conventionally, as a magnetic measurement technique on a sample surface, a method of performing magnetic measurement while moving a probe along the sample surface is known. For example, Patent Document 1 describes a surface magnetic detection device that has a magnetic probe as a probe and moves the magnetic probe along a sample surface.
JP 2001-354177 A

  However, as a magnetic measurement technique for evaluating a magnet using a magnet as a sample, the magnetic force of the entire magnet is mainly the object of measurement, and the magnetic force distribution on the surface of the magnet (for example, magnetic flux density distribution, magnetic field strength). The measurement method of the distribution of thickness is not clearly defined.

  In a magnet with a finite size, even if the magnet is uniformly magnetized, the magnetic force at the central part is weak due to the effect of the corners of the magnet, and the magnetic force increases as it approaches the corner (edge) from the central part. Has a distribution that has a local maximum. Therefore, as in the surface magnetism detection device described in the above publication, even if the measuring element is moved along the magnet surface as it is and magnetic measurement is performed, characteristics such as magnetization uniformity on the magnet surface are accurately evaluated. It is difficult. In addition, due to the effect of the corners of the magnet, the measured value may vary greatly depending on the displacement of the probe, making it difficult to evaluate the characteristics of the magnet.

  The present invention has been made to solve the above problems. Accordingly, an object of the present invention is to provide a magnetic measurement apparatus and method capable of performing magnetic measurement on the surface of a sample in a state in which the effect of a corner portion of the magnetic sample such as a magnet is reduced.

  The above object of the present invention is achieved by the following means.

Magnetic measuring apparatus of the present invention, write sandwiched one of the sample magnetized as the magnetic source-free, the first and second clamping portions made of a magnetic material, made of a magnetic material, the said first clamping portion second A coupling unit that magnetically couples the clamping unit; and at least a magnetic measurement unit provided in the first clamping unit among the first and second clamping units, wherein the first clamping unit is A first holding member having a sample-side end surface contacting a surface corresponding to one of the sample poles and a connection-side end surface on the opposite side of the sample-side end surface; and A second holding member having a sample-side end surface in contact with the surface corresponding to the other pole and a connection-side end surface on the opposite side of the sample-side end surface, wherein the connecting portion is connected to the first holding member; the side end face, magnetically ligated only to the connection-side end face of the second clamping member, the first sandwiching The second holding portion and the connecting portion so as to form a magnetic closed circuit for connecting the magnetic field lines from one pole of the sample to the other pole, that you connected the magnetism from the sample magnetically Features.

Magnetic measurement method of the present invention, between the first and second clamping portions made of a magnetic material are connected by a connecting portion made of a magnetic material, comprising the steps of sandwiching the one sample magnetized as the magnetic source, the first A step of performing magnetic measurement by a magnetic measurement unit provided in the clamping unit, wherein the first clamping unit includes at least a sample-side end surface that abuts on a surface corresponding to one of the poles of the sample, and the sample-side end surface A first clamping member having a connection side end surface on the opposite side of the sample, and the second clamping unit includes at least a sample side end surface that abuts on a surface corresponding to the other pole of the sample, and the sample side end surface. A second clamping member having a coupling side end surface on the opposite side, wherein the coupling part magnetically couples the coupling side end surface of the first clamping member only to the coupling side end surface of the second clamping member. The first clamping part, the second clamping part and the Binding portion so as to form a magnetic closed circuit for connecting the magnetic field lines from one pole of the sample to the other pole, it characterized that you connect the magnetism from the sample magnetically.

  According to the present invention, a magnetized sample such as a magnet is sandwiched between the first and second sandwiching portions, and the first sandwiching portion and the second sandwiching portion are coupled by the coupling portion to form a magnetic closed circuit, Since magnetic measurement is performed after rectifying the magnetic flux in the vicinity of the surface of the sample, it is possible to perform magnetic measurement on the surface of the sample with the effect of the corners of the sample reduced. Therefore, when magnetically measuring a magnet that is uniformly magnetized, uniform measurement values can be obtained at the center and corners of the magnet. It becomes possible to evaluate the characteristics.

  Embodiments of the present invention will be described below with reference to the drawings.

(First embodiment)
FIG. 1 is a perspective view showing an outline of a magnetic measurement apparatus according to a first embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along the line II-II in FIG. The magnetic measurement apparatus 1 of the present embodiment is an apparatus that executes magnetic measurement on the surface of a magnet that is a sample. In particular, in the magnetic measurement apparatus of the present embodiment, magnetic measurement is performed after the magnetic flux near the surface of the magnet is rectified. Here, “magnetization of magnetic flux” means that the direction of magnetic flux or lines of magnetic force is aligned in one direction.

  As shown in FIGS. 1 and 2, the magnetic measurement apparatus 1 includes an apparatus main body 100 and an arithmetic unit 200 connected to the apparatus main body 100 through a signal line 300.

  The apparatus main body 100 includes a first clamping unit 110 and a second clamping unit 120 that sandwich a magnet 400 as a sample, a connecting unit 130 that couples the first clamping unit 110 and the second clamping unit 120, and a first clamping unit 110. And a measuring element (magnetic measuring unit) 140 provided in.

  The first clamping part 110, the second clamping part 120, and the connecting part 130 are each made of a magnetic material, and preferably made of a ferromagnetic material. For example, the 1st clamping part 110, the 2nd clamping part 120, and the connection part 130 are formed with the single metal or alloy containing the 1 or several element from which the group which consists of iron, cobalt, and nickel was chosen.

  When the magnet 400 is mounted, the first clamping unit 110, the magnet 400, and the second clamping unit 120 are stacked in this arrangement order and aligned in the axial direction of the stack. Here, the surface of the magnet 400 corresponding to one pole (for example, the S pole) of the magnet 400 is directed to the first clamping unit 110, and the surface corresponding to the other pole (for example, the N pole) of the magnet 400. It is mounted between the first clamping unit 110 and the second clamping unit 120 so as to face the second clamping unit 120.

  The shapes of the first clamping unit 110 and the second clamping unit 120 are appropriately determined according to the shape of the magnet 400. In particular, in the first clamping unit 110 and the second clamping unit 120, it is desirable that the surface facing the magnet 400 (hereinafter referred to as “magnet side end surface”) has a size that can be included without protruding the magnet 400. In particular, it is desirable that the magnet-side end surface of the second clamping unit 120 has the same shape and size as the magnet 400.

  In the present embodiment, the cross-sectional shape of the magnet 400 is rectangular, and the magnet side end surfaces of the first clamping unit 110 and the second clamping unit 120 are also rectangular. However, unlike the present embodiment, if the cross-sectional shape of the magnet 400 is circular, it is desirable that the magnet-side end surfaces of the first clamping unit 110 and the second clamping unit 120 are also circular.

  The first holding part 110 is formed with a recess 111 for mounting the measuring element 140. The recess 111 is formed on the magnet-side end surface of the first clamping unit 110, that is, the surface facing the magnet 400. The recess 111 is preferably a groove extending from the mounting position of the measuring element 140 toward the end edge of the first clamping unit. The width and depth of the recess 111 are designed according to the size of the measuring element 140 so that the measuring element 140 does not protrude beyond the end face on the magnet side.

  Next, the connecting part 130 will be described. In the present embodiment, connecting portion 130 has a block shape formed into a U-shape. One end of the connecting part 130 is connected to the first holding part 110, and the other end of the connecting part 130 is connected to the second holding part 120. Specifically, one end of the coupling part 130 is connected to the first clamping part 110, extends along the surface direction of the first clamping part 110, is bent in the opposite direction, and the other end is the second clamping part. 120. As a result, a magnetic closed circuit (magnetic flux closed circuit) is formed in which the magnet 400, the second holding unit 120, the connecting unit 130, and the first holding unit 110 are magnetically connected in this order and return to the magnet 400 again.

  Next, the measuring element 140 will be described. FIG. 3 is a perspective view showing the first clamping unit 110, and shows a state in which the measuring element 140 is attached to the concave portion 111 of the first clamping unit 110. The measuring element 140 is a magnetic sensor, for example, a Hall element. The measuring element 140 is provided in the recess 111 as shown in FIG. The measuring element 140 is fixed in the recess 111 with an adhesive 109. The measuring element 140 is connected to the arithmetic unit 200 via the signal line 300. The measuring element 140 is preferably embedded as close to the surface of the recess 111 as possible and fixed with the adhesive 109.

  Next, the calculation unit 200 will be described. The calculation unit 200 appropriately amplifies and converts the voltage signal detected by the probe 140, thereby converting the magnetic field strength H (unit: A / m) and magnetic flux density B (unit T: Tesla or G: Measured values such as Gauss). The calculated measurement value is recorded and displayed as appropriate. The arithmetic unit 200 has the same configuration as a so-called magnetic flux density meter (referred to as a gauss meter and a tesla meter) or a magnetometer, and thus detailed description thereof is omitted.

  The magnetic measurement apparatus 1 of the present embodiment configured as described above has the following operation.

  FIG. 4 is a diagram schematically showing lines of magnetic force when the magnet 400 is attached to the apparatus main body 100 of the magnetic measurement apparatus 1 of the present embodiment, and FIG. 5 is a diagram of the magnet 400 before being attached to the magnetic measurement apparatus 1. It is a figure which shows typically the line of magnetic force in. The magnetic field lines are magnetic field lines. Specifically, the lines of magnetic force are stream lines in the direction of the magnetic field H, and correspond to the magnetic flux lines similarly defined for the magnetic flux density B. In the case of a permanent magnet, both the magnetic field lines and magnetic flux lines go from the north pole to the south pole outside the magnet, but inside the magnet, the magnetic flux lines circulate from the south pole to the north pole, whereas the magnetic field lines are As shown in FIGS. 4 and 5, the direction is from the north pole to the south pole.

  As shown in FIG. 5, the magnet 400 alone is not aligned with the direction of the lines of magnetic force due to the effect of the corners of the magnet 400, and the direction of the corresponding magnetic flux is not aligned.

  On the other hand, as shown in FIG. 4, by attaching the magnet 400 to the magnetic measurement apparatus 1, the direction of the magnetic lines of force in the vicinity of the magnet 400 is aligned, and the corresponding magnetic flux is rectified. That is, the magnetic flux is guided to the clamping unit side by the configuration in which the magnet 400 is clamped by the first clamping unit 110 and the second clamping unit 120. In the case shown in FIG. 4, the magnetic flux is rectified in a direction perpendicular to the surface of the magnet 400.

  And since the measuring element 140 is provided in the magnet side end surface of the 1st clamping part 110, the rectified magnetic flux will pass the measuring element 140. FIG. In this way, the sample magnet 400 is sandwiched between the first sandwiching portion 110 and the second sandwiching portion 120, and the first sandwiching portion 110 and the second sandwiching portion 120 are connected by the connecting portion 130 to constitute a magnetic closed circuit. Since the magnetic measurement is performed after rectifying the magnetic flux in the vicinity of the magnet surface, the magnetic measurement on the magnet surface can be performed with the effect of the corners of the magnet 400 reduced. Therefore, when measuring the uniformly magnetized magnet 400, uniform measurement values can be obtained at the center and corners of the magnet 400. It becomes possible to evaluate the characteristics.

  Below, the magnetic flux density of the magnet surface vicinity measured by the magnetic measurement apparatus 1 of this Embodiment is shown. For comparison, the magnetic flux density on the magnet surface measured by the magnetometer of the comparative example shown in FIG. 6 is also shown. In the comparative example shown in FIG. 6, magnetic measurement is performed while moving the probe 140 ′ along the surface of the magnet 400.

  FIG. 7 shows the magnetic flux density on the surface of the magnet 400 measured by the magnetometer of the comparative example for the uniformly magnetized magnet 400. The vertical axis represents the magnetic flux density, and the horizontal axis represents the position (sensor position) of the probe 140 along the magnet surface. On the other hand, FIG. 8 shows the magnetic flux density on the magnet surface measured by the magnetometer 1 of the present embodiment for the magnet 400 magnetized uniformly. The vertical axis and the horizontal axis are the same as in FIG.

  As shown in FIG. 7, in the case of the comparative example, the magnetic flux density in the central portion of the magnet 400 is low, and the magnetic flux density increases from the central portion toward the corner (edge portion: indicated by an arrow in the figure). The magnetic flux density distribution having a maximum value is measured. Therefore, in the magnetometer of the comparative example, it is difficult to accurately evaluate characteristics such as the uniformity of magnetization on the magnet surface.

  On the other hand, as shown in FIG. 8, according to the magnetic measurement apparatus 1 of the present embodiment, uniform measurement values can be obtained at the center and corners of the magnet. Therefore, it is possible to accurately evaluate characteristics such as the uniformity of magnetization on the magnet surface. That is, the magnetic measurement apparatus 1 of the present embodiment can be suitably applied to a test of the magnetized state of a magnet. Further, according to the magnetic measurement apparatus 1 of the present embodiment, since the probe 140 is fixed, the measurement conditions are stable and the reliability of the measurement compared to the configuration in which the probe is moved as in the comparative example. Increase.

  As described above, the magnetic measurement apparatus 1 according to the present embodiment has the following effects.

  The sample magnet 400 is sandwiched between the first and second sandwiching portions 120, 120, and the first sandwiching portion 110 and the second sandwiching portion 120 are coupled by the coupling portion 130, thereby forming a magnetic closed circuit. Since the magnetic measurement is performed after the magnetic flux in the vicinity is rectified, the magnetic measurement in the vicinity of the surface of the magnet 400 can be performed with the effect of the corners of the magnet 400 reduced. Therefore, for example, when magnetically measuring a magnet 400 that is uniformly magnetized, uniform measurement values can be obtained at the center and corners of the magnet 400. It becomes possible to evaluate characteristics such as appearance.

  Moreover, since the 1st clamping part 110 has the recessed part 111 in the surface which faces the magnet 400, and the measuring element 140 is provided in the recessed part 111, the measuring element 140 can be embedded in the surface vicinity of the 1st clamping part 110. . Therefore, the magnetic measurement near the surface of the magnet 400 is possible, and the reliability of the measurement is increased. In particular, since the probe 140 is fixed with the adhesive 109, the displacement of the probe 140 can be prevented and the measurement conditions are stabilized.

  Furthermore, since the 1st clamping part 110, the 2nd clamping part 120, and the connection part 130 consist of ferromagnetic materials, the rectification | straightening property of magnetic flux improves and a measurement precision increases. Moreover, the apparatus can be miniaturized.

(Second Embodiment)
Next, a magnetic measuring apparatus according to the second embodiment of the present invention will be described. The magnetic measurement apparatus of the present embodiment has a plurality of measuring elements. The magnetic measurement apparatus according to the present embodiment is the same as that of the first embodiment except that a plurality of measuring elements are provided and a plurality of recesses in which a plurality of measuring elements are provided are formed in the first clamping part. It is the same as that of the magnetic measurement apparatus of the form. Therefore, repeated description of the same configuration as that of the first embodiment is omitted. For the sake of simplicity of explanation, the same reference numerals are used for the same members as those in the first embodiment.

  FIG. 9 is a perspective view showing the first clamping unit 110 in the magnetic measurement apparatus 1 of the present embodiment. As shown in FIG. 9, a plurality of recesses 111 a to 111 i are formed in the first clamping unit 110. As shown in FIG. 9, each of the concave portions 111 a to 111 i has a hole portion in which the measuring element is mounted and a groove portion extending from the hole portion toward the edge of the first holding portion 110. Is desirable. In the example shown in FIG. 9, a total of nine recesses are arranged in a matrix, but the number and arrangement of the recesses 111 a to 111 i are determined as appropriate according to the position where measurement is desired on the surface of the magnet 400. can do.

  Measuring elements 140a to 140i are provided in the recesses 111a to 111i, respectively. In addition, each measuring element 140a-140i is the same as that of the measuring element 140 in 1st Embodiment mentioned above. Each measuring element 140a-140i is fixed in each recessed part 111a-111i with the adhesive material (it abbreviate | omits in a figure). One end of each of the signal lines 300a to 300i is connected to each of the measuring elements 140a to 140i. Each of the signal lines 300a to 300i is guided by the groove of each of the recesses 111a to 111i and is finally connected to the arithmetic unit 200.

  As described above, the magnetic measurement of the magnet surface is performed using the first holding unit 110 configured. As a result, it is possible to measure at a plurality of points on the magnet surface by a single measurement. For example, an in-plane distribution of the magnetic flux density on the magnet surface and an in-plane distribution of the magnetic field strength can be obtained by a single measurement.

  According to the magnetic measurement apparatus 1 of the present embodiment, in addition to the effects of the first embodiment, the following effects are achieved.

  Measurement can be performed at a plurality of points on the magnet surface at once without using any moving mechanism, and in-plane distribution of magnetic flux density and magnetic field strength on the magnet surface can be obtained. Moreover, as in the first embodiment, the magnetic flux in the vicinity of the magnet 400 is guided and rectified in the rectified state by the effect of the magnetic closed circuit using the first sandwiching portion 110 and the second sandwiching portion 120. Since the in-plane distribution of the intensity can be measured, for example, the uniformity of magnetization on the magnet surface can be accurately evaluated.

(Third embodiment)
Next, a magnetic measuring apparatus according to the third embodiment of the present invention will be described. In the magnetic measurement apparatus of the present embodiment, the connecting portion includes a plurality of connecting members that connect the first holding portion and the second holding portion at a plurality of locations. Specifically, two connecting members are provided. Moreover, the magnetism measuring apparatus of this Embodiment is provided with the moving jig which translates the magnet which is a sample with respect to a measuring element.

  FIG. 10 is a perspective view showing an outline of the magnetic measurement apparatus of the present embodiment, and FIG. 11 is an exploded perspective view of the magnetic measurement apparatus of FIG. 12 is a cross-sectional view taken along line VII-VII in FIG. Since the calculation unit 200 is the same as that in the first embodiment, the display is omitted. For the sake of simplicity of explanation, the same reference numerals are used for the same members as those in the first embodiment.

  The apparatus main body 100 of the magnetic measurement apparatus 1 according to the present embodiment includes a first clamping part 110 and a second clamping part 120 that sandwich a magnet 400 as a sample.

  The 1st clamping part 110 is comprised from the 1st magnet side clamping member 112 provided in the magnet 400 side, and the base member 113 connected with the surface on the opposite side to the magnet side end surface of the 1st magnet side clamping member 112. As shown in FIG. Yes.

  The first magnet side clamping member 112 is formed with a recess 111 for mounting the tracing stylus 140. The recess 111 is formed on the magnet-side end surface of the first magnet-side clamping member 112, that is, the surface facing the magnet 400. The recess 111 is preferably a groove extending from the mounting position of the measuring element 140 toward the end edge of the first clamping unit. The width and depth of the recess 111 are designed according to the size of the measuring element 140 so that the measuring element 140 does not protrude beyond the end face on the magnet side.

  On the other hand, as shown in FIG. 11 and FIG. 12, the second clamping unit 120 is a surface opposite to the second magnet side clamping unit 122 provided on the magnet 400 side and the magnet side end surface of the second magnet side clamping member 122. The upper plate 123 is magnetically coupled to the upper plate 123. The second magnet side clamping member 122 and the upper plate 123 are physically separated, and it is desirable that the second magnet side clamping member 122 is slidably in contact with the upper plate 123.

  In addition, it is desirable that the magnet-side end surface of the second sandwiching portion, that is, the magnet-side end surface of the second magnet-side sandwiching member 122, be a size that can be included without protruding the magnet 400. From the viewpoint, it is desirable to have the same shape and size as the magnet 400. As will be described later, the first magnet side clamping unit 112 is formed to be larger than the second magnet side clamping unit 122 corresponding to the translational movement of the magnet 400. Therefore, in the present embodiment, the first magnet side clamping unit 112 is The holding part 112 and the second magnet side holding part 122 are different in size.

  Next, the connecting part 130 will be described. The connection part 130 of this Embodiment contains several connection part 131a, 131b which connects the 1st clamping part 110 and the 2nd clamping part 120 in multiple places. Specifically, the connecting part 130 includes two first connecting members 131a and second connecting members 131b. The first connecting member 131a extends from one side of the upper plate 123 to the base member 113, and magnetically connects the upper plate 123 and the base member 113. Similarly, the second connecting member 131b extends from the other side of the upper plate 123 to the base member 113, and magnetically connects the upper plate 123 and the base member 113. The plurality of connecting members 131a and 131b are desirably provided at symmetrical positions.

  The upper plate 123 can be detachably attached to the first connecting member 131a and the second connecting member 131b. In addition, in the state which attached the 1st connection member 131a and the 2nd connection member 131b with the upper board 123, as shown in FIG. 12, the attachment position is so that the upper board 123 and the 2nd magnet side clamping member 122 may adjoin. It is desirable that it is set.

  Next, a moving mechanism that translates the magnet 400 relative to the probe 140 will be described.

  In the present embodiment, as shown in FIGS. 10 to 12, a moving jig 150 that translates the magnet 400 relative to the probe 140 is provided. The moving jig 150 is a moving mechanism that translates the magnet 400 relative to the measuring element 140.

  The moving jig 150 preferably grips the magnet 400 and the second magnet side clamping member 122 from the side (left and right direction in FIG. 12). The magnet 400 can be translated by connecting a driving mechanism such as a slider (not shown) to the moving jig 150. In this case, there is no need to provide a moving jig between the magnet and the first magnet side clamping member 112, and the distance between the magnet 400 and the measuring element 140 can be shortened, and the measurement accuracy can be increased. Become. Here, it is desirable that the moving jig 150 is made of a nonmagnetic material such as aluminum, copper, and resin from the viewpoint of reducing the influence on the magnetic field.

  The magnetic measurement apparatus 1 of the present embodiment configured as described above has the following operation.

  The 1st connection member 131a and the 2nd connection member 131b connect the 1st clamping part 110 and the 2nd clamping part 120 in multiple places. As a result, the magnet 400, the second magnet side clamping part 122, the upper plate 123, the first connecting member 131a, the base member 113, and the first magnet side clamping part 112 are magnetically connected in this order, and the first returns to the magnet 400 again. 1st magnetic closed circuit, the 2nd magnet side clamping part 122, the upper board 123, the 2nd connection member 131b, the base member 113, and the 1st magnet side clamping part 112 are magnetically connected in order, and return to the magnet 400 again. 2 magnetic closed circuit is formed. Therefore, compared with the case where the 1st clamping part 110 and the 2nd clamping part 120 are connected using one connection member, as a whole, a magnetic path, ie, the area which magnetic flux passes, increases.

  In addition, since the moving jig 150 that translates the magnet 400 with respect to the probe 140 is provided, the magnet 400 is moved with respect to the probe 140 and magnetically measured to measure at a plurality of points on the magnet surface. Is possible. For example, an in-plane distribution of the magnetic flux density on the magnet surface can be obtained.

  As described above, according to the magnetic measurement apparatus 1 of the present embodiment, in addition to the effects of the first embodiment, the following effects are achieved.

  Since the area through which the magnetic flux passes in the apparatus main body 100 can be increased, the rectification of the magnetic flux is improved and the measurement accuracy is increased. Moreover, the apparatus main body 100 can be reduced in size.

  Further, since the magnet 400 can be translated on the first clamping unit 110, a plurality of points can be measured with one device and one measuring element. Therefore, wiring such as the signal line 300 can be simplified.

(Fourth embodiment)
Next, a magnetic measuring apparatus according to the fourth embodiment of the present invention will be described. In the magnetic measurement apparatus of the present embodiment, the connecting portion includes four connecting members, and is provided over the entire edge of the second clamping portion so as to surround the magnet.

  FIG. 13 is a perspective view showing an outline of the magnetic measurement apparatus of the present embodiment, and FIG. 14 is an exploded perspective view of the magnetic measurement apparatus of FIG. The magnetic measurement apparatus of the present embodiment is the same as the magnetic measurement apparatus of the third embodiment except that the connecting member is provided on the entire edge. Therefore, repeated description of the same configuration as that of the third embodiment is omitted. For the sake of simplicity, the same members as those in the third embodiment will be described using the same reference numerals.

  The connecting portion 130 of the present embodiment includes a plurality of connecting portions 131a, 131b, 131c, and 131d (first to fourth connecting members) that connect the first holding portion 110 and the second holding portion 120 at a plurality of locations. . Each of the connecting members 131 a to 131 d is provided along the entire end edge of the upper plate 123 of the second clamping unit 120 so as to surround the magnet 400. That is, the connecting members 131a to 131d are arranged along the four sides of the upper plate 123, respectively. Each of the connecting members 131a to 131d extends from the edge of the upper plate 123 of the second holding unit 120 to the base member 113 of the first holding unit, and magnetically connects the upper plate 123 and the base member 113.

  In order to carry in and out the magnet 400, it is desirable that the upper plate 123 and the first to fourth connecting members 131a to 131d are detachably attached. In addition, in the state which attached the upper board 123 to the 1st-4th connection members 131a-131d, it is desirable that the attachment position is set so that the upper board 123 and the 2nd magnet side clamping member 122 may adjoin. . This point is the same as in the third embodiment.

  As described above, the connecting portion 130 is provided over the entire end edge of the second holding portion 120 so as to surround the magnet 400, extends to the first holding portion 110, and the first holding portion 110 and the second holding portion 120. Can be further increased in the magnetic path, that is, the area through which the magnetic flux passes. Therefore, measurement can be performed more stably.

  As described above, according to the magnetic measurement apparatus 1 of the present embodiment, in addition to the effects of the first embodiment, the following effects are achieved.

  Since the connection part 130 is provided in the whole edge part of a 2nd clamping part, the area which the magnetic flux in the apparatus main body 100 passes can be maximized. Further, since the magnet 400 can be translated on the first clamping unit 110, a plurality of points can be measured with a single device.

  As described above, the preferred embodiments of the present invention have been described by exemplifying the first to fourth embodiments. However, the present invention is not limited to these cases, and various omissions can be made by those skilled in the art. Of course, addition and modification are possible.

  For example, in the above example, the case where the magnet 400 is used as the sample has been described. The present invention is preferably used for the evaluation of the magnet 400, in particular, the uniformly magnetized magnet 400. However, the present invention is not limited to this, and can be applied to magnetic measurement of a sample having magnetism. it can. Also in this case, the step of sandwiching a magnetized sample between the first and second sandwiching portions made of magnetic material connected by the joining portion made of magnetic material, and the magnetic measurement unit provided in the first sandwiching portion, Magnetic measurement is performed through a magnetic measurement step.

  Further, in the above example, the case where the Hall element utilizing the galvanomagnetic effect of the semiconductor is employed as the probe 140 serving as the magnetic measurement unit, and the magnetic flux density and the magnetic field strength are measured has been described. From the viewpoint of miniaturization of the probe 140, it is desirable to employ a Hall element, but the present invention is not limited to this case and can be applied to various magnetic measurements.

  Magnetic measurements include a magnetometer that measures the strength of the magnetic field using the force acting on the coil or probe by the magnetic field, a search coil that uses electromagnetic induction, and magnetic modulation that uses the nonlinearity of the magnetization characteristics (for example, There are various measuring methods such as a fluxgate magnetometer). The sample is sandwiched between the first sandwiching portion and the second sandwiching portion, and the magnetic flux is guided and the magnetic flux is rectified. The present invention can be applied to any magnetic measurement as long as magnetic measurement can be performed with a probe. For example, a probe, a search coil, or a magnetic field detector for flux gates is adopted as a probe, and the present invention can be applied to the case where the magnetic field strength or magnetic flux density is measured.

  Further, in the above example, the case where the measuring element is provided in the first clamping unit 110 out of the first clamping unit 110 and the second clamping unit 120 has been described, but the present invention is not limited to this case. A measuring element may also be provided in the second clamping unit 120.

  Furthermore, in the above example, a case has been described in which a recess is formed in the first sandwiching portion 110 and the measuring element 140 is provided in the recess, but the present invention is not limited to this case. For example, the measuring element 140 can be provided in the first clamping unit 110 by a method of attaching a sheet-like molded product obtained by molding the measuring element using a nonmagnetic resin to the surface of the first clamping unit 110.

  Moreover, although the case where the magnet 400 which is a sample and the 2nd magnet side clamping member 122 are moved was shown in said example, this invention is not limited to this case. A moving mechanism that translates the sample relative to the probe 140 can be employed. For example, the first holding unit 110 provided with the probe 140, more specifically, the first magnet side holding member. It is also possible to adopt a configuration that moves 112.

It is a perspective view which shows the outline | summary of the magnetic measurement apparatus in the 1st Embodiment of this invention. It is sectional drawing of the magnetic measuring apparatus of FIG. It is a perspective view of the 1st clamping part of the magnetic measuring apparatus of FIG. It is a figure which shows typically a magnetic force line when the magnet 400 is mounted | worn with the magnetism measuring apparatus of FIG. 3 is a diagram schematically showing lines of magnetic force in a magnet 400 before being mounted on the magnetism measuring apparatus 1. FIG. It is a figure which shows the magnetic measuring apparatus of a comparative example. It is a figure which shows the magnetic flux density of the magnet surface measured with the magnetism measuring apparatus of the comparative example of FIG. 6 about the magnet magnetized uniformly. It is a figure which shows the magnetic flux density of the magnet surface measured by the magnetometer of FIG. 1 about the magnet magnetized uniformly. It is a perspective view of the 1st clamping part used for the magnetic measurement apparatus in the 2nd Embodiment of this invention. It is a perspective view which shows the outline | summary of the magnetic measuring apparatus in the 3rd Embodiment of this invention. It is a disassembled perspective view of the magnetic measuring apparatus of FIG. It is sectional drawing of the magnetic measurement apparatus of FIG. It is a perspective view which shows the outline | summary of the magnetic measuring apparatus in the 4th Embodiment of this invention. It is a disassembled perspective view of the magnetic measurement apparatus of FIG.

Explanation of symbols

1 Magnetic measuring device,
100 device body,
110 the first clamping part,
109 adhesives,
111, 111a-111i recess,
120 second clamping part,
130 connecting part,
131a to 131d connecting members,
140, 140a to 140i probe (magnetic measuring unit),
150 moving jig (moving mechanism),
200 arithmetic unit,
300 signal lines,
400 Magnet (sample).

Claims (13)

Included sandwiched one sample magnetized as the magnetic source-free, the first and second clamping portions made of a magnetic material,
A connecting portion made of a magnetic material and magnetically connecting the first holding portion and the second holding portion;
A magnetic measuring unit provided at least in the first clamping part among the first and second clamping parts;
The first sandwiching portion includes a first sandwiching member including at least a sample side end surface that abuts on a surface corresponding to one pole of the sample, and a connection side end surface on the opposite side of the sample side end surface;
The second sandwiching portion includes at least a second sandwiching member including a sample side end surface that abuts on a surface corresponding to the other pole of the sample, and a connection side end surface on the opposite side of the sample side end surface;
The connecting portion magnetically connects the connecting side end surface of the first holding member only to the connecting side end surface of the second holding member ,
The first sandwiching portion, the second sandwiching portion, and the connecting portion magnetically conduct magnetism from the sample so as to form a magnetic closed circuit that connects magnetic lines of force from one pole of the sample to the other pole. coupled to a magnetic measurement apparatus according to claim Rukoto. The first sandwiching portion has a recess on the surface facing the sample,
The magnetic measurement apparatus according to claim 1, wherein the magnetic measurement unit is provided in the recess.   The magnetic measurement apparatus according to claim 2, wherein the magnetic measurement unit is fixed in the concave portion with an adhesive.   The magnetic measurement apparatus according to claim 1, wherein the first and second sandwiching portions and the coupling portion are made of a ferromagnetic material.   5. The magnetic measurement apparatus according to claim 1, wherein the connecting portion includes a plurality of connecting members that connect the first holding portion and the second holding portion at a plurality of locations. .   The magnetic measurement apparatus according to claim 1, wherein the connecting portion is provided over the entire edge of the second holding portion so as to surround the sample.   The magnetic measurement apparatus according to claim 1, wherein a plurality of magnetic measurement units are arranged in the first clamping unit.   The magnetic measurement apparatus according to claim 1, further comprising a moving mechanism that translates the sample relative to the magnetic measurement unit.   The magnetic measurement apparatus according to claim 8, wherein the moving mechanism is a moving jig that translates the sample, and the moving jig is made of a nonmagnetic material.   10. The magnetic measurement apparatus according to claim 1, wherein the sample-side end surface of the second clamping unit has the same shape and size as the sample.   The magnetic measurement apparatus according to claim 1, wherein the sample is a magnet.   The said 1st and 2nd clamping part is further provided with a some member further, The magnetic measuring apparatus as described in any one of Claims 1-11 characterized by the above-mentioned. Between the first and second clamping portions made of a magnetic material are connected by a connecting portion made of a magnetic material, comprising the steps of sandwiching the one sample magnetized as the magnetic source,
A step of performing a magnetic measurement by at least a magnetic measurement unit provided in the first clamping unit among the first and second clamping units,
The first sandwiching portion includes a first sandwiching member including at least a sample side end surface that abuts on a surface corresponding to one pole of the sample, and a connection side end surface on the opposite side of the sample side end surface;
The second sandwiching portion includes at least a second sandwiching member including a sample side end surface that abuts on a surface corresponding to the other pole of the sample, and a connection side end surface on the opposite side of the sample side end surface;
The connecting portion magnetically connects the connecting side end surface of the first holding member only to the connecting side end surface of the second holding member ,
The first sandwiching portion, the second sandwiching portion, and the connecting portion magnetically conduct magnetism from the sample so as to form a magnetic closed circuit that connects magnetic lines of force from one pole of the sample to the other pole. coupled to the magnetic measuring method according to claim Rukoto.

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