JP5064343B2 - Manufacturing method of semiconductor device - Google Patents

Description

  The present invention relates to a semiconductor device manufacturing method for improving circuit performance of a liquid crystal display device in which peripheral drive circuits and control circuits are integrated on the same substrate in an active matrix drive liquid crystal display device driven by TFTs, for example. Is.

  Conventionally, a thin film transistor (Thin Film Transistor, hereinafter referred to as TFT) of amorphous Si (hereinafter abbreviated as a-Si) or polycrystalline Si (hereinafter abbreviated as P-Si) is formed on a glass substrate, A liquid crystal display device that performs so-called active matrix driving for driving a liquid crystal display panel, an organic EL panel, or the like is used.

  In particular, an integrated peripheral driver using p-Si having high mobility and operating at high speed is used. However, in order to integrate systems such as image processors and timing controllers that require higher performance, higher performance Si devices are required.

  This is because, in polycrystalline Si, the mobility is lowered and the S coefficient (sub-factor) due to localized levels in the gap due to crystal imperfection, defects near the grain boundary, and localized levels in the gap. This is because the transistor performance is not sufficient to form a high-performance Si device due to an increase in the threshold coefficient.

  Therefore, in order to form a higher performance Si device, a technique for forming a semiconductor device by forming a device such as a thin film transistor made of a single crystal Si thin film in advance and pasting it on an insulating substrate has been studied. (For example, refer to Patent Document 1, Non-Patent Documents 1 and 2).

In Patent Document 1, a display device of a display panel of an active matrix liquid crystal display device is produced using a semiconductor device in which a single crystal Si thin film transistor previously produced using an adhesive is transferred onto a glass substrate.
Special table 7-503557 (publication date April 13, 1995) JPSalerno “Single Crystal Silicon AMLCDs”, Conference Record of the 1994 International Display Research Conference (IDRC) P.39-44 (1994) Q.-Y.Tong & U.Gesele, SEMICONDUCTOR WAFER BONDING: SCIENCE AND TECHNOLOGY, John Wiley & Sons, New York (1999) K. Warner, et. Al., 2002 IEEE International SOI Conference: Oct, pp. 123-125 (2002) LPAllen, et. Al., 2002 IEEE International SOI Conference: Oct, pp.192-193 (2002)

  However, in the conventional semiconductor device and the manufacturing method thereof, since the adhesive is used to bond the single-crystal Si thin film transistor, which is a high-performance device, onto the glass substrate, the pasting work is troublesome and the production is performed. It has problems such as poor nature. In addition, since the completed semiconductor device is also bonded by an adhesive, there is a problem in heat resistance, and since it is impossible to form a high-quality inorganic insulating film or TFT after that, an active matrix substrate is manufactured. In this case, it is necessary to affix to a substrate to be used after forming a device including a TFT array, and there are significant problems in terms of size cost and wiring formation.

  Further, Patent Document 1 merely discloses forming a single crystal Si thin film device on a glass substrate. With this configuration, a high-performance and high-functional semiconductor device that has been demanded in recent years is obtained. I can't.

  Further, in Non-Patent Document 3 described above, it is disclosed that the alignment mark is detected and aligned through the Si substrate by infrared rays. However, since the light wavelength is long and the resolution cannot be increased, the alignment is performed with high accuracy. It was difficult.

  The present invention has been made in view of the above-described problems, and the object thereof is to easily form a single crystal Si thin film device on an insulating substrate without using an adhesive, and a non-single crystal Si. To provide a semiconductor device in which a high-performance system is integrated by forming a thin film and a single crystal Si thin film device, a method for manufacturing the same, and a single crystal Si substrate for forming a single crystal Si thin film of the semiconductor device is there.

  A single crystal Si substrate according to the present invention is planarized after an oxide film, a gate pattern, and an impurity ion implantation portion are formed on the surface, and hydrogen ions having a predetermined concentration are implanted to a predetermined depth. A hydrogen ion implantation part is provided.

  According to the above configuration, the single crystal Si substrate is bonded to the insulating substrate or the like on the oxide film forming side, and heat treatment is performed, whereby the bonding between the substrates is changed into a bond between atoms and a strong bonding is obtained. By cleaving and peeling by heat treatment in the ion implanted portion, a MOS type single crystal Si thin film transistor can be easily obtained without using an adhesive.

  That is, the single crystal Si substrate is formed with an oxide film, a gate pattern, and an impurity ion implantation portion forming a part of a MOS type single crystal Si thin film transistor on the surface, and hydrogen ion implantation to a predetermined depth from the surface. Has a part.

  As a result, the impurity doping of the gate electrode and the source / drain of the present invention or the impurity doping of the base, collector, emitter, etc. is completed in advance on the insulating substrate or the like, and hydrogen ions of a predetermined concentration are implanted to a predetermined depth. Bonding a single crystal Si substrate with a flattened and hydrophilic surface and heating to a temperature above the temperature at which hydrogen ions desorb from Si can increase the bonding strength to the insulating substrate, and the hydrogen ion implantation part By cleaving and peeling at the boundary, a MOS type single crystal Si thin film transistor can be easily formed without using an adhesive.

  Therefore, for example, the above-mentioned single crystal Si substrate is bonded to an insulating substrate having a non-single crystal Si thin film transistor such as a polycrystalline Si thin film formed on the surface, thereby forming a MOS type single crystal Si thin film transistor. A semiconductor device in which a transistor made of Si and a transistor made of single crystal Si are formed in different regions on one substrate can be easily obtained.

  The single crystal Si substrate includes an impurity ion implanted portion or a diffusion region having a pnp junction structure or an npn junction structure in which impurity ions are implanted near the surface, and an oxide film deposited on the impurity ion implanted portion or the diffusion region. And have.

  According to said structure, the bipolar thin-film transistor which consists of a single crystal Si thin film which is easy to form on another insulating substrate can be obtained.

  Thus, for example, a bipolar single-crystal Si thin-film transistor is formed by bonding the single-crystal Si substrate on an insulating substrate on which a non-single-crystal Si thin-film transistor such as a polycrystalline Si thin film is formed. A semiconductor device in which a transistor made of Si and a transistor made of single crystal Si are formed in different regions on one substrate can be easily obtained.

  It is more preferable to provide a hydrogen ion implanted part region in which hydrogen ions of a predetermined concentration are implanted at the predetermined depth.

  Thus, a single-crystal Si substrate is bonded to an insulating substrate or the like on the oxide film deposition side and cleaved and peeled off at the hydrogen ion implantation portion, so that bipolar single-crystal Si can be easily used without using an adhesive. A thin film transistor can be obtained.

  That is, the single crystal Si substrate has an oxide film for forming a bipolar single crystal Si thin film transistor on its surface, an impurity ion implantation portion, and a hydrogen ion implantation portion at a predetermined depth on the junction formation side. Yes.

  Therefore, by bonding the single crystal Si thin film transistor on an insulating substrate or the like and heating it to a temperature higher than the temperature at which hydrogen ions are released from Si, the bonding strength to the insulating substrate can be increased and the vicinity of the impurity ion implanted portion. The bipolar single-crystal Si thin film transistor having the SOI structure can be easily formed without using an adhesive by cleaving and peeling off with the hydrogen ion implanted portion formed in (1).

  Then, the single-crystal Si substrate is bonded to an insulating substrate having a non-single-crystal Si thin film transistor such as a polycrystalline Si thin film formed on the surface, thereby forming a single-crystal Si thin-film transistor. A semiconductor device in which thin film transistors made of single crystal Si are formed in different regions on one substrate can be easily obtained.

  The oxide film is more preferably formed so as to have a thickness of 200 nm or more.

In general, the thicker the oxide film such as SiO ₂ film, the smaller the characteristics and variations due to the influence of the interface charge, etc., but the trade-off between the efficiency of the SiO ₂ film formation process (time required for oxidation) and the step difference. A suitable value is approximately 200 nm to 400 nm. Appropriate values are approximately 400 nm or more when importance is attached to variations, and approximately 200 nm to 400 nm, more preferably 250 nm to 350 nm, when importance is placed on steps and efficiency. This is because the influence of fixed charges due to contamination at the interface between the bonded single crystal Si substrate and the insulating substrate such as a glass substrate or lattice distortion or imperfection is reduced.

Therefore, in the MOS transistor made of single crystal Si, the threshold value varies, and in the bipolar TFT made of single crystal Si, the characteristic variation is small and the on-resistance is kept low, which is suitable for the efficiency of the SiO ₂ film forming process and the balance with the step. A single crystal Si substrate can be obtained.

In the semiconductor device according to the present invention, a non-single-crystal Si thin-film device and a single-crystal Si thin-film device are formed in different regions on the insulating substrate, respectively, and the single-crystal Si thin-film device is connected to the insulating substrate. Are joined via a SiO ₂ film.

  According to the above configuration, for example, a single crystal Si thin film device such as a single crystal Si thin film transistor is used for a device that requires a higher performance function such as a timing controller, and a non-single crystal Si is used for the remaining devices. By using a non-single crystal Si thin film device such as a thin film transistor, a semiconductor device in which a high-performance and high-function circuit system is integrated can be obtained.

  That is, a single-crystal Si thin-film device is used to form a high-speed DAC (current buffer) that requires high speed, power consumption, high-speed logic, timing generator, or variation using the characteristics of single-crystal Si. Can do. On the other hand, non-single-crystal Si thin film devices such as polycrystalline Si can form inexpensive semiconductor devices in a large area, although they are inferior in performance and function to single crystal Si thin-film devices.

  Therefore, according to the above configuration, a semiconductor device having the advantages of both the Si thin film devices can be formed on a single substrate.

  As a result, a high-performance and high-performance circuit system that can be realized only by single crystal Si can be integrated on the substrate. Therefore, for example, a semiconductor device for a display device such as a liquid crystal panel or an organic EL panel integrated with a high-performance system is manufactured at a very low cost compared to the case where all devices are formed of single crystal Si. it can.

  Further, the shape of the single crystal Si substrate forming the single crystal Si thin film included in the semiconductor device according to the present invention is a 6-, 8-, or 12-inch disk, which is a general wafer size of an LSI manufacturing apparatus. Limited. However, since the non-single crystal Si thin film device and the single crystal Si thin film device coexist on the insulating substrate of the semiconductor device according to the reference of the present invention, for example, in a large liquid crystal display panel or an organic EL panel. A compatible large semiconductor device can be manufactured.

Furthermore, the single crystal Si thin film device is bonded to the insulating substrate via a SiO ₂ film.

  Accordingly, since a device such as a single crystal Si thin film transistor can be formed on the insulating substrate without using an adhesive, the single crystal Si can be prevented from being contaminated. In addition, metal wiring, inorganic insulating film formation, etching, or the like can be easily performed after bonding. Furthermore, a metal wiring or the like can be formed together with a TFT process on a large substrate, and a device can be formed at low cost.

  It is more preferable that the non-single crystal Si thin film device and the single crystal Si thin film device are both MOS type or MIS type single crystal Si thin film transistors.

  Thus, for example, in the case of a CMOS structure, it is possible to obtain a semiconductor device suitable for logic with low power consumption, capable of reducing power consumption and full output up to the power supply voltage.

  The MOS type single crystal Si thin film transistor is more preferably formed in the order of a gate, a gate insulating film, and Si from the insulating substrate side.

  As a result, the single crystal Si MOS thin film transistor is formed with the gate disposed on the side of the insulating substrate, and a semiconductor device is obtained in which a so-called upside down MOS type single crystal Si thin film transistor is formed on the so-called insulating substrate. Can do. Therefore, the self-alignment process using the gate as a mask can be applied to the source / drain formation on the single crystal Si substrate, the influence of the fixed charge on the surface of the glass substrate can be reduced, and the junction interface between the single crystal Si and the glass substrate can be reduced. The effect of fixed charges that tend to occur can be reduced by the gate shielding effect, and the established process using source / drain impurity ion implantation with the gate as a mask in single crystal Si can be applied, so that the yield can be increased. is there.

  The film thickness of the single crystal Si thin film of the MOS type thin film transistor is more preferably about 600 nm or less.

Thus, in the semiconductor device described above, the thickness d of the single crystal Si thin film is a small value including a variation margin with respect to the maximum depletion length Wm determined by the impurity concentration Ni, that is, the impurity density is 10 ¹⁵ cm, which is a practical lower limit. ^{Even if -3,} the upper limit of d is approximately 600 nm or less.

Where Wm = [4ε _s kTln (Ni / ni) q ² Ni] ^1/2 , ni is the intrinsic carrier density, k is the Boltzmann constant, T is the absolute temperature, ε _s is the dielectric constant of Si, and q is The electron charge, Ni, is the impurity density.

  According to said structure, since the film thickness of a single-crystal Si thin film is about 600 nm or less, the S value (subthreshold coefficient) of a semiconductor device can be made small and an off-current can be reduced.

  The film thickness of the single crystal Si thin film of the MOS type thin film transistor is more preferably about 100 nm or less.

  As a result, the S value (subthreshold coefficient) of the semiconductor device can be further reduced, and the off-current can also be reduced. Therefore, the characteristics of the MOS type single crystal Si thin film transistor can be utilized to the maximum.

  In particular, in order to suppress TFT characteristic deterioration due to a quantum effect generated in a short channel TFT having a gate length of 0.1 to 0.2 μm or less, it is desirable that the thickness is about 20 nm or less. When the film thickness of the single crystal Si is increased from about 20 nm on the short channel side than the gate length of about 200 nm, the variation of the threshold value increases and the mobility increases. However, since the threshold value is more important as a device, This value is a highly practical area.

  More preferably, the metal wiring pattern of the MOS type single crystal Si thin film transistor includes a portion formed by a looser wiring formation rule than the gate pattern of the MOS type single crystal Si thin film transistor. Further, it is more preferable that the wiring is formed according to a wiring forming rule that is similar to or looser than a metal wiring design rule on a large substrate. Furthermore, it should be the same as the wiring formation rule of the metal wiring equivalent to the gate of the TFT, or the same or looser wiring formation rule of the metal wiring on the large substrate made of different wiring layers. Is more preferable.

  As a result, the metal wiring or a part of the metal wiring of the semiconductor device in which the MOS type single crystal Si thin film transistor is formed can cope with the fine processing equivalent to the gate and can be processed simultaneously with the metal wiring on the large substrate. Can improve the processing capacity. Alternatively, connection to other circuit blocks and TFT arrays is facilitated, and a decrease in product yield due to poor connection can be reduced.

  The loose wiring formation rule means that the design rule when forming the wiring is not strict and the allowable range when forming the wiring is wide.

  The non-single-crystal Si thin film device is a MOS-type or MIS-type non-single-crystal Si thin film transistor, and the single-crystal Si thin-film device is more preferably a bipolar single-crystal Si thin-film transistor.

  As a result, in addition to the MOS-type or MIS-type non-single-crystal Si thin-film transistor, a bipolar-type single-crystal Si thin-film transistor is formed, so that a more multifunctional semiconductor device can be obtained.

  In other words, by forming a bipolar thin film transistor made of a single crystal Si thin film in addition to a MOS or MIS thin film transistor, it is possible to perform linear signal processing, which is a characteristic of the bipolar thin film transistor, and the structure is simple because there is no gate. It is possible to obtain a semiconductor device having further advantages such as excellent production yield, excellent linearity in a saturation region, and suitable for an analog amplifier, a current buffer, and a power amplifier.

  The non-single-crystal Si thin film device is a MOS-type or MIS-type non-single-crystal Si thin-film transistor, and the single-crystal Si thin-film device is either a MOS-type or a bipolar-type, or both single-crystal Si thin-film transistors. More preferably.

  Thus, a semiconductor device having three types of characteristics, that is, a MOS type or MIS type non-single crystal Si thin film transistor, a single crystal Si thin film transistor, and a bipolar type single crystal Si thin film transistor can be formed on one substrate.

  Therefore, a semiconductor device with higher performance and higher functionality can be obtained.

  The non-single-crystal Si thin film device is a MOS-type or MIS-type non-single-crystal Si thin-film transistor, and the single-crystal Si thin-film device includes an MOS-type single-crystal Si thin-film transistor and a Schottky-type or PN junction-type diode. More preferably, a sensor or a CCD type image sensor is provided.

  This makes it possible to integrate thin film devices with different designs or structures individually in different regions, so that devices with structures different from CMOS devices such as image sensors that were extremely difficult to coexist with the conventional method are easily integrated. Can create highly functional devices that were impossible until now.

  More preferably, the single crystal Si thin film of the MOS thin film transistor made of single crystal Si has a smaller film thickness than the single crystal Si thin film of the bipolar thin film transistor.

  In general, MOS thin film transistors tend to obtain better characteristics when the film thickness is thinner, and bipolar thin film transistors can obtain better characteristics (characteristics with less variation and lower on-resistance) when the film thickness is relatively thick. Are known.

  Therefore, by specifying the thicknesses of the MOS type and bipolar type Si thin films by comparing each other, it is possible to obtain a semiconductor device capable of effectively utilizing both MOS type and bipolar type characteristics.

  The bipolar single crystal Si thin film transistor preferably has a planar structure in which the base, collector and emitter regions are formed and arranged on the same plane.

  Thus, since it is a so-called lateral type transistor having no gate like a MOS type thin film transistor and having a planar structure, an oxide film is simply formed on the Si surface, and impurities of P and N are formed in a predetermined pattern (region). In this case, a Si substrate having a completely flat surface can be formed simply by performing activation annealing and bonding a single crystal Si substrate on an insulating substrate without performing a planarization process by CMP. Can do.

  Therefore, the manufacturing process can be simplified as compared with a normal bipolar transistor having a junction in the direction perpendicular to the MOS type or the plane.

  More preferably, the metal wiring and contact pattern of the bipolar single crystal Si thin film transistor include a portion formed by a looser wiring formation rule than the base pattern of the bipolar single crystal Si thin film transistor. Furthermore, it is more preferable that the metal wiring is formed according to a rule that is the same as or looser than that of the metal wiring on the large substrate.

  As a result, the metal wiring or part of the metal wiring can be processed simultaneously with the metal wiring on the large-sized substrate, and the cost can be reduced and the processing capability can be improved. In addition, the semiconductor device in which the bipolar single crystal Si thin film transistor is formed can be easily connected to other circuit blocks and TFT arrays, and the product yield can be prevented from being lowered due to poor connection.

  The film thickness of the single crystal Si thin film of the bipolar single crystal Si thin film transistor is more preferably about 800 nm or less.

  As a result, a bipolar single crystal Si thin film transistor with small variation in characteristics and low on-resistance can be obtained.

  The non-single crystal Si thin film included in the non-single crystal Si thin film device is a polycrystalline Si thin film or a continuous grain boundary Si thin film, and the MOS type thin film transistor as the non-single crystal Si thin film device is a non-single crystal from the substrate side. More preferably, Si, a gate insulating film, and a gate are formed in this order.

  Thus, by configuring the MOS thin film transistor so that the gate is formed on the insulating substrate, a self-alignment process using a general gate as a mask can be obtained. Thin film transistors can be easily manufactured, and productivity can be improved.

  The non-single crystal Si thin film included in the non-single crystal Si thin film device is a polycrystalline Si thin film or a continuous grain boundary Si thin film. The MOS thin film transistor as the non-single crystal Si thin film device includes a gate, a gate from the substrate side. More preferably, the insulating film and the non-single crystal Si are formed in this order.

As a result, the MOS type non-single-crystal Si thin film transistor has an opposite configuration when viewed from the substrate, so that it is possible to avoid the influence of fixed charges near the surface of the glass substrate and to stabilize the characteristics. Furthermore, the degree of freedom in setting the doping profile of the channel portion is increased, and measures against hot electron degradation are facilitated. Further, it becomes possible to use high-quality and thin thermally oxidized SiO ₂ , and oxidation formed at a low temperature by CVD or the like. There is a merit that a thin gate oxide film of higher quality than the film can be obtained, and a TFT having excellent short channel characteristics can be obtained, and variations of the configuration that can obtain the same effect as described above can be increased.

  The non-single-crystal Si thin film included in the non-single-crystal Si thin-film device is an amorphous Si thin film, and the MOS-type or MIS-type thin film transistor as the non-single-crystal Si thin-film device includes a gate and gate insulation from the substrate side. More preferably, the film and non-single crystal Si are formed in this order.

  As a result, by forming a so-called bottom-gate MOS type or MIS type thin film transistor in which the gate is formed below the insulating substrate, a process that has been widely used in general can be applied, and a high yield can be achieved. The process for forming the amorphous Si thin film can be simplified, the cost can be reduced, and the productivity can be improved. Further, in the active matrix LCD, it is possible to form a liquid crystal display device capable of improving the light shielding property from the backlight and capable of displaying with high luminance.

  In addition, since amorphous Si has a low off current characteristic, a semiconductor device suitable for a low power consumption type LCD or the like can be obtained.

  The non-single crystal Si thin film included in the non-single crystal Si thin film device is an amorphous Si thin film, and the MOS type or MIS type thin film transistor as the non-single crystal Si thin film device is a non-single crystal Si, More preferably, the gate insulating film and the gate are formed in this order.

  As a result, even if the MOS-type or MIS-type non-single-crystal Si thin film transistor has the opposite configuration as viewed from the substrate, it is possible to increase the number of variations of the configuration that can obtain the same effect as described above, and the degree of freedom in process design is increased. Rise.

  The difference in linear expansion between the single crystal Si constituting the single crystal Si thin film device and the insulating substrate is more preferably about 250 ppm or less in a temperature range from about room temperature to 600 ° C.

  This reduces the difference in linear expansion between the insulating substrate and the single crystal Si thin film with respect to a large temperature rise. Therefore, in the process for forming a single-crystal Si thin film on an insulating substrate, it is possible to reliably prevent the breakage in the cleavage peeling process from the hydrogen injection position due to the difference in thermal expansion coefficient, the peeling at the bonding interface, or the generation of defects in the crystal. In addition, the heat bonding strength can be improved.

  Here, the linear expansion is standardized as a change in length caused by a temperature change.

The insulating substrate is at least, the monocrystalline Si thin film device is an alkaline earth SiO ₂ film is formed on the surface of the area to be formed - and more preferably a high strain point glass made of aluminoborosilicate glass.

  This eliminates the need to use crystallized glass whose composition is adjusted for bonding to a single crystal Si substrate, so that the insulating substrate is a high strain point that is generally used for liquid crystal display panels driven by an active matrix drive. A low-cost semiconductor device made of glass can be manufactured.

  The insulating substrate is composed of barium-borosilicate glass, barium-aluminoborosilicate glass, alkaline earth-aluminoborosilicate glass, borosilicate glass, alkaline earth-zinc-lead-aluminoborosilicate glass and alkaline earth-zinc- More preferably, it is made of any one of aluminoborosilicate glasses.

  Thus, since the insulating substrate is made of the glass described above, which is a high strain point glass generally used for liquid crystal display panels by active matrix driving, a semiconductor device suitable for the active matrix substrate can be manufactured at low cost. .

  The alignment margin of at least a part of the pattern in the single crystal Si region is smaller than the alignment margin of the pattern of the entire mother substrate, the display region, or the entire device, and more preferably has high accuracy.

  As a result, when forming a metal wiring pattern or the like common to the non-single-crystal Si region, a part of the pattern can be aligned with the high-precision pattern in the single-crystal Si region by a higher-precision exposure system. it can.

  Therefore, a single crystal Si region having a high-precision pattern and a non-single-crystal region having a low-precision pattern can be easily and efficiently connected with a high yield using a metal wiring pattern or the like.

  The alignment mark in the single crystal Si region and the alignment mark on the transparent substrate are detected from the transparent substrate side with visible light or light having a shorter wavelength than visible light. More preferably, it has a shape that can be aligned with an alignment mark formed on the transparent substrate.

  Thereby, since the alignment mark can be detected through the glass substrate, the optical resolution can be improved, and higher-precision alignment than before can be achieved.

  In order to solve the above problems, a method for manufacturing a semiconductor device according to the present invention is a method for manufacturing a semiconductor device in which a single crystal Si thin film device and a non-single crystal Si thin film device are formed on an insulating substrate. After the oxide film, gate pattern, and impurity ion implanted portion are formed, the single crystal Si substrate having a hydrogen ion implanted portion having a predetermined concentration of hydrogen ions implanted at a predetermined depth is subjected to heat treatment. A non-single-crystal Si thin film is formed after bonding on an insulating substrate and cleaving and peeling by heat treatment in a hydrogen ion implanted portion.

  According to the above manufacturing method, the single crystal Si thin film device is formed on the insulating substrate having the best flatness, and then the non-single crystal Si thin film is formed. Therefore, a semiconductor device with few defects due to poor bonding and high yield can be manufactured.

  More preferably, a protective insulating film, a contact hole, and a metal wiring are formed on the single crystal Si thin film device.

  As a result, since the single crystal Si thin film device formed prior to the formation of the non-single crystal Si thin film has metal wiring, miniaturization processing is possible, and integration of circuits formed on the single crystal Si thin film is possible. A significant increase in density can be achieved. Furthermore, by providing metal wiring in the same process for non-single-crystal Si thin film formed after the single crystal Si thin film device is formed on the glass substrate, a semiconductor device with a double metal wiring structure can be manufactured in a simple and efficient process. can do.

  It is more preferable to form an interlayer insulating film after forming the single crystal Si thin film device and before forming the non-single crystal Si thin film.

  Thereby, since the interlayer insulating film is formed between the single crystal Si thin film device and the non-single crystal Si thin film, contamination of the single crystal Si of the single crystal Si thin film can be surely prevented.

  In order to solve the above-described problems, a method for manufacturing a semiconductor device according to the present invention is a method for manufacturing a semiconductor device in which a single crystal Si thin film device and a non-single crystal Si thin film device are formed on an insulating substrate. After a single crystal Si thin film is formed on the insulating substrate, an oxide film, a gate pattern, and an impurity ion implantation portion are formed on the surface and then flattened, and hydrogen ions having a predetermined concentration are implanted at a predetermined depth. The single crystal Si substrate provided with the hydrogen ion implanted portion is bonded to the insulating substrate by heat treatment, and further, cleaved and separated by heat treatment at the hydrogen ion implanted portion.

  According to the above manufacturing method, since the non-single-crystal Si thin film is formed before the single-crystal Si thin-film device is formed, compared with the case where the non-single-crystal Si thin film is formed after the single-crystal Si thin-film device is formed, It is possible to prevent the single crystal Si thin film from being contaminated or damaged.

  In the method of manufacturing a semiconductor device in which a single crystal Si thin film device and a non-single crystal Si thin film are formed on an insulating substrate, the single crystal is formed after the non-single crystal Si thin film is formed on the insulating substrate. There is a problem that the microroughness increases due to the roughness of the surface to which single crystal Si from which non-single crystal Si is removed when forming a Si thin film device is formed, and the bonding force decreases.

On the other hand, in the method for manufacturing a semiconductor device of the present invention, at least a region to which single crystal Si is to be bonded is planarized in advance by GCIB (Gas Cluster Ion Beam) of a low energy (about 3 keV) halide (CF ₄ or the like). ing. When a SiO ₂ film having a thickness of about 10 nm is formed thereon by PECVD using TEOS or TMCTS (Tetramethylcyclotetrasiloxane), it is more desirable because the bondability is further improved.

  The single crystal Si thin film device is more preferably a MOS type single crystal Si thin film transistor.

  Thus, for example, in the case of a CMOS structure, the characteristics of the MOS transistor can be obtained, such as reduction of power consumption and full output up to the power supply voltage, and a semiconductor device suitable for low power consumption logic can be obtained. A semiconductor device having the same can be manufactured.

  The single crystal Si thin film device is more preferably a bipolar single crystal Si thin film transistor.

  Thus, by forming the bipolar transistor on the insulating substrate, the configuration of the single crystal Si thin film can be simplified as compared with the MOS type, and can be bonded to the insulating substrate without performing a planarization process.

  More preferably, hydrogen ions having a predetermined concentration are implanted at a predetermined depth into a single crystal Si substrate for forming the single crystal Si thin film device.

  Thereby, a single crystal Si thin film device can be easily formed on an insulating substrate without using an adhesive.

  That is, when a single crystal Si thin film device is formed on an insulating substrate by forming a hydrogen ion implanted portion into which hydrogen ions are implanted, the single crystal Si thin film device is heated to a temperature at which the hydrogen ions are separated from Si. In addition to increasing the bonding strength to the insulating substrate, the bipolar single crystal Si thin film transistor can be easily formed by cleaving and peeling with the hydrogen ion implanted portion as a boundary.

  The predetermined depth may be determined according to the target thickness of the single crystal Si thin film to be formed.

  The hydrogen ion implantation energy is obtained by subtracting the energy corresponding to the projection range of hydrogen ions corresponding to the film thickness of the oxide film from the hydrogen ion implantation energy, the energy corresponding to the film thickness of the oxide film, More preferably, the energy is set to be smaller than the energy corresponding to the projection range of the constituent atoms of the material existing in the layer formed on the oxide film.

  Thereby, for example, in a MOS-type single crystal Si thin film transistor, the hydrogen ion irradiated to the single crystal Si substrate collides with the constituent atoms of the gate electrode material or the metal wiring material, and is thus ejected. It is possible to prevent deterioration of characteristics or reliability due to contamination of the single crystal Si portion by passing through the oxide film and reaching the single crystal Si.

  More preferably, the thickness of the single crystal Si substrate having the hydrogen ion implanted portion is approximately 100 microns or less.

  As a result, the single crystal Si layer can be reduced to about 1/10 of the original substrate, and the bending rigidity of the Si substrate is reduced, so that the same bonding can be applied to fine irregularities caused by surface scratches or particles on the glass substrate side. Even under energy conditions, it becomes easier to follow and bend less easily.

  Therefore, if it is the said thickness, the joining defect resulting from the surface flaw on the glass substrate side, particle | grains, etc. can be reduced significantly, without significantly impairing the handling property of the divided small thin Si substrate.

  The thickness is preferably about 70 microns or less, more preferably 50 microns or less.

  After the non-single-crystal Si thin film is formed on the insulating substrate, at least the non-single-crystal Si is removed, and a surface region to be bonded to the single-crystal Si substrate is previously set to a GCIB (Gas Cluster Ion) of about 3 keV. It is more preferable to flatten by beam.

Thus, when irradiated with low energy (about 3 kev) oxygen or halide GCIB, the Si or SiO ₂ surface is lightly etched and the microroughness of the surface is improved.

  Therefore, the success rate of the bonding can be greatly improved as compared with the bonding of the conventional Si substrate.

Embodiment 1
An embodiment of a method for manufacturing a semiconductor device of the present invention will be described as follows with reference to FIGS. 1 (a) to 1 (i).

  Note that the semiconductor device described in this embodiment is a semiconductor device suitable for high performance and high functionality in which a MOS-type non-single-crystal Si thin-film transistor and a MOS-type single-crystal Si thin-film transistor are formed in different regions on an insulating substrate. Thus, it is formed on an active matrix substrate using TFTs.

  This MOS type thin film transistor comprises an active semiconductor layer, a gate electrode, a gate insulating film, and a high concentration impurity doped portion (source / drain electrode) formed on both sides of the gate, and the carrier concentration of the semiconductor layer under the gate by the gate electrode. Is a general transistor in which the current flowing between the source and the drain is controlled.

  As a characteristic of the MOS type transistor, a COMS (Complementary MOS) structure is suitable for low power consumption type logic because it consumes less power and can fully output depending on the power supply voltage.

As shown in FIG. 1 (i), the semiconductor device 20 of the present embodiment has a non-single-crystal Si thin film 5 ′ made of SiO ₂ (Si oxide) film (oxide film) 3 and polycrystalline Si on an insulating substrate 2. A MOS type non-single crystal Si thin film transistor 1a, a MOS type single crystal Si thin film transistor (single crystal Si thin film device) 16a provided with a single crystal Si thin film 14a, and a metal wiring 22.

  The insulating substrate 2 is made of Corning code 1737 (alkaline earth-aluminoborosilicate glass) which is a high strain point glass.

The SiO ₂ film 3 is formed with a film thickness of about 50 nm on the entire surface of the insulating substrate 2.

A MOS type non-single-crystal Si thin film transistor 1a including a non-single-crystal Si thin film 5 ′ includes a non-single-crystal Si thin film 5 ′ and a SiO ₂ film 7 as a gate insulating film on an SiO ₂ film 4 as an interlayer insulating film, A gate electrode 6 is provided.

  The gate electrode 6 is formed of polycrystalline Si and W silicide, but may be formed of polycrystalline Si, another silicide, polycide, or the like.

On the other hand, the MOS type single crystal Si thin film transistor 16a including the single crystal Si thin film 14a includes a planarizing layer having the gate electrode 12, an SiO ₂ film 13 as a gate insulating film, and a single crystal Si thin film 14a.

  The material of the gate electrode 12 is a heavy-doped polycrystalline Si film and W silicide. However, the material may be polycrystalline Si alone, other refractory metal or silicide, and the necessary resistance. Or selected in consideration of heat resistance.

  The single crystal Si thin film transistor 16a is formed on the single crystal Si substrate before being bonded to the insulating substrate 2, and the portion to be the gate electrode 12 includes the gate insulating film 13 and the single crystal Si thin film 14a. Then, it is bonded onto the insulating substrate 2. Therefore, the formation of the gate electrode and the source / drain impurity ion implantation on the single crystal Si substrate 10a is more preferable than the single crystal Si thin film formed on the insulating substrate 2 after the single crystal Si thin film is formed. Fine processing to a thin film can be easily performed.

  As described above, the semiconductor device 20 of the present embodiment has the characteristics by allowing the MOS type non-single crystal Si thin film transistor 1a and the MOS type single crystal Si thin film transistor 16a to coexist on one insulating substrate 2. A high-performance and high-performance semiconductor device in which a plurality of different circuits are integrated can be obtained. In addition, it is possible to obtain a high-performance and high-performance semiconductor device at a lower cost than when a single-crystal Si thin film transistor is formed on a single insulating substrate 2.

  Note that the region of the non-single-crystal Si thin film 5 ′ and the region of the single-crystal Si thin film 14 a are separated by at least 0.3 μm or more, preferably 0.5 μm or more. Thereby, it is possible to prevent the diffusion of metal atoms such as Ni, Pt, Sn, and Pd into the single crystal Si thin film 14a, and to stabilize the characteristics of the single crystal Si thin film transistor 16a.

Further, in the semiconductor device 20 of the present embodiment, the SiO ₂ film 4 is formed as an interlayer insulating film between the non-single crystal Si thin film transistor 1a and the single crystal Si thin film transistor 16a. This can prevent the single crystal Si thin film 14a from being contaminated.

  For example, in the case of an active matrix substrate of a liquid crystal display device including the semiconductor device 20 of the present invention, SiNx (Si nitride), a resin flattening film, a via hole, and a transparent electrode are further formed for liquid crystal display. In the region of the non-single-crystal Si thin film 5 ′, TFTs for drivers and display units are formed. In the region of the single-crystal Si thin film 14a that can be applied to a device that requires higher performance, a timing controller is provided. It is formed. The driver unit may be single crystal Si, and may be determined in consideration of cost and performance.

  As described above, by determining the function and application of each thin film transistor according to the characteristics of the thin film transistor composed of the single crystal Si thin film 14a and the non-single crystal Si thin film 5 ', a high performance and high function thin film transistor can be obtained. Can do.

The conventional N-channel TFT formed in the region of the non-single-crystal Si thin film 5 ′ has a mobility of about 100 cm ² / V · sec, whereas the liquid crystal display in which the semiconductor device of this embodiment is formed is used. In the active matrix substrate, the N-channel TFT formed in the region of the single crystal Si thin film 14a has a mobility of about 550 cm ² / V · sec. Thus, according to the configuration of the semiconductor device 20 of the present embodiment, a TFT capable of operating at a higher speed than the conventional one can be obtained.

  Further, in this active matrix substrate for liquid crystal display, the device formed in the region of the non-single-crystal Si thin film 5 ′ as well as the driver requires a signal of 7 to 8 V and a power supply voltage, whereas the single-crystal Si thin film 14a. The timing controller, which is a device formed in the region, operated stably at 2.7V.

  Further, in the semiconductor device 20, the integrated circuit is formed in the region of the non-single crystal Si thin film 5 ′ and the region of the single crystal Si thin film 14a, so that the integration including the pixel array in accordance with the required configuration and characteristics is performed. The circuit can be formed in a suitable region. Then, in the integrated circuits formed in the respective regions, integrated circuits having different performances such as operating speed and operating power supply voltage can be manufactured. For example, at least one of the gate length, the gate insulating film thickness, the power supply voltage, and the logic level can be designed differently for each region.

  Thus, devices having different characteristics for each region can be formed, and a semiconductor device having more various functions can be obtained.

  Further, in the semiconductor device 20, since the integrated circuit is formed in the region of the non-single crystal Si thin film 5 ′ and the region of the single crystal Si thin film 14a, the integrated circuit formed in each region differs from region to region. Processing rules can be applied. For example, in the case of a short channel length, since there is no crystal grain boundary in the single crystal Si thin film region, the variation in TFT characteristics hardly increases, whereas in the polycrystalline Si thin film region, the variation is rapid due to the effect of the crystal grain boundary. This is because the processing rules need to be changed in each part. Therefore, the integrated circuit can be formed in a region suitable for the processing rule.

  Further, in the semiconductor device 20 of this embodiment, in the MOS type single crystal Si thin film transistor 16a, the metal wiring pattern can be formed by a looser design rule than the gate pattern.

  As a result, the metal wiring or a part of the metal wiring of the semiconductor device in which the MOS type single crystal Si thin film transistor 16a is formed can be processed at the same time as the metal wiring on the large substrate, thereby reducing the cost and improving the processing capability. be able to. Furthermore, connection to external wiring, other circuit blocks, and TFT arrays is facilitated, and product yield due to poor connection to external devices and the like can be reduced.

  Note that the size of the single crystal Si thin film 14a formed on the semiconductor device 20 is determined by the wafer size of the LSI manufacturing apparatus. However, in order to form a high-speed DAC (current buffer), a processor, or the like that requires high-speed performance, power consumption, high-speed logic, timing generator, variation, and the like that require the single crystal Si thin film 14a, a general LSI The wafer size of the manufacturing equipment is sufficient.

  Here, the manufacturing method of the semiconductor device 20 will be described as follows with reference to FIGS. 1 (a) to 1 (i).

First, a SiO ₂ film 3 having a thickness of about 50 nm is deposited on the entire surface of the insulating substrate 2 by plasma CVD using a mixed gas of TEOS and O ₂ .

  In the manufacturing method of the semiconductor device 20 of this embodiment, here, if the film is thinned, a single crystal Si substrate 10a is formed in which a portion to be the single crystal Si thin film transistor 16a is separately formed, and this single crystal Si substrate 10a is formed as an insulating substrate. 2 is formed.

Specifically, a part of a CMOS process in advance in a general IC manufacturing line, that is, a gate electrode 12, a gate insulating film 13, source / drain impurity ion implantation (BF ³⁺ , P ⁺ ), a protective insulating film, a planarizing film After forming (BPSG), planarization is performed by CMP (Chemical-mechanical Polishing). Subsequently, a SiO ₂ film having a thickness of about 10 nm is formed, and a single crystal Si substrate 10a having a hydrogen ion implanted portion 15 in which hydrogen ions having a dose amount of 5 × 10 ¹⁶ / cm ² are implanted with a predetermined energy is formed. To do. Then, this is cut into a predetermined size suitable for the formation region on the insulating substrate 2.

  Then, as shown in FIG. 1B, both the transparent insulating substrate 2 and the cut single crystal Si substrate 10a are SC-1 cleaned and activated, and then the hydrogen ion implanted portion 15 side of the single crystal Si substrate 10a is activated. Are aligned at a predetermined position and bonded together at room temperature.

  As shown in FIG. 9, the alignment mark 94 on the single crystal Si and the alignment mark 93 on the transparent substrate 2 side are visible light from the transparent substrate 2 side through the transparent substrate 2, here, Corning 1737 glass. And detect. In the example shown in FIG. 9, the alignment mark 94 on the single crystal Si on the alignment stage 91 is detected using the alignment CCD camera 90 set on the microscope with epi-illumination, and finally this is detected as an electric signal. It is converted and processed.

  In the conventional method of aligning through the Si substrate by irradiating with infrared rays, the IC etc. is opaque to visible light and UV light, and passes through a Si wafer having a surface that scatters non-specular light to prevent adsorption. Since the alignment mark was detected and alignment was performed, there was a problem that accuracy deteriorated.

  Therefore, in the semiconductor device of this embodiment, for example, since the alignment marks 93 and 94 are detected through glass that is transparent to visible light and UV light having a shorter wavelength and whose surface does not scatter light, Compared with the method, highly accurate alignment can be performed.

The single crystal Si and the transparent substrate 2 made of glass are joined together by Van der Waals force. Thereafter, the reaction between 400 ° C. and 600 ° C., here about 550 ° C., causes a reaction of Si—OH + —Si—OH → Si—O—Si + H ₂ O to strengthen the atoms. Change to a simple bond. Further, as shown in FIG. 1 (c), the temperature of the hydrogen ion implantation part 15 is raised to a temperature higher than the temperature at which hydrogen is released from the single crystal Si, thereby cleaving and peeling at the hydrogen ion implantation part 15 as a boundary. Can do.

Here, the single crystal Si thin film transistor 16a is bonded to the insulating substrate 2 via the SiO ₂ film 3 which is an inorganic insulating film. Therefore, it is possible to reliably prevent the single crystal Si thin film 14a from being contaminated as compared with the case of joining using a conventional adhesive.

  Subsequently, an unnecessary portion of the single crystal Si thin film 14a that has been peeled off and remains on the insulating substrate 2 is removed by etching, and after processing the single crystal Si into an island shape, the damaged layer on the surface is subjected to isotropic plasma etching or wet etching. Etching is performed by light etching of about 10 nm by wet etching using buffer hydrofluoric acid. Thereby, as shown in FIG. 1I, a part of the MOSTFT is formed on the insulating substrate 2 on the single crystal Si thin film 14a having a film thickness of about 50 nm.

Thereafter, as shown in FIG. 1D, a second SiO ₂ film 4 having a thickness of about 200 nm is deposited on the entire surface of the insulating substrate 2 by plasma CVD using a mixed gas of SiH ₄ and N ₂ O. . Further, an amorphous Si film 5 having a thickness of about 50 nm is deposited on the entire surface by plasma CVD using SiH ₄ gas.

  The amorphous Si film 5 is irradiated with an excimer laser, heated and crystallized, and a polycrystalline Si layer is grown to form a non-single-crystal Si thin film 5 ′, and between the single-crystal Si thin film 14a and the insulating film 3 To improve the bonding strength.

  Next, as shown in FIG. 1F, the unnecessary polycrystalline Si film 5 'is removed by etching in order to leave a portion that becomes an active region of the device, and an island-like pattern is obtained.

Next, using a mixed gas of TEOS and oxygen, a SiO ₂ film having a thickness of about 350 nm is deposited by plasma CVD, and this is etched back by about 400 nm by RIE which is anisotropic etching. Thereafter, a SiO ₂ film 7 having a thickness of about 60 nm is formed by plasma CVD using a mixed gas of SiH ₄ and N ₂ O as a gate insulating film of the non-single-crystal Si thin film transistor 1a. At this time, sidewalls are formed at the ends of the pattern of the single crystal Si thin film 14a and the pattern of the non-single crystal Si thin film 5 ′.

Next, as shown in FIG. 1G, a SiO ₂ film 8 having a thickness of about 350 nm is deposited as an interlayer planarization insulating film by P-CVD using a mixed gas of TEOS and O ₂ (oxygen).

  Then, as shown in FIG. 1H, a contact hole 21 is opened, and a metal (AlSi) wiring 22 is formed in the contact hole 21 as shown in FIG.

  In the semiconductor device manufacturing method of the present embodiment, as described above, the single crystal Si thin film transistor 16a is formed before the non-single crystal Si thin film (polycrystalline Si thin film) 5 'is formed. Thereby, since the single crystal Si substrate can be bonded in a state where the flatness of the insulating substrate 2 is maintained, problems such as bonding failure can be prevented.

  In the present embodiment, when the hydrogen ion implantation energy is increased so that the peak position of the hydrogen atoms is deep from the surface, and the film thickness of the single crystal Si thin film 14a is increased, there is no significant change between 50 nm and 100 nm. . However, when the thickness increased from 300 nm to 600 nm, the S value of the TFT gradually increased, and the increase in off current became significant. Therefore, although the film thickness of the single crystal Si thin film 14a depends on the impurity doping density, it is preferably about 600 nm or less, desirably about 500 nm or less, and more desirably 100 nm or less.

  Also, when Corning code 7059 (barium-borosilicate glass) is used in place of Corning code 1737 (alkaline earth-aluminoborosilicate glass) as the insulating substrate 2, bonding can be performed in the same manner. The success rate deteriorated.

  As shown in FIG. 8, code 1737 has a linear expansion difference with Si of about 250 ppm when the temperature is raised from approximately room temperature to 600 ° C., whereas code 7059 has a linear expansion difference with Si. This is because it becomes as large as about 800 ppm.

  Therefore, from the viewpoint of improving the success rate of cleavage peeling, the difference in linear expansion between the insulating substrate and Si from room temperature to 600 ° C. is desirably about 250 ppm or less.

  The single crystal Si thin film transistor 16a is not limited to the configuration shown in this embodiment. For example, even with a gate bottom structure MOS thin film transistor, the same effect as described above can be obtained.

[Embodiment 2]
Another embodiment of the method for manufacturing a semiconductor device according to the present invention will be described below with reference to FIGS. 2 (a) to 2 (i). For convenience of explanation, description of members having the same functions as those described in the semiconductor device 20 of the first embodiment is omitted.

  Similar to the semiconductor device 20 of the first embodiment, the semiconductor device 30 of the present embodiment is formed by forming the MOS type single crystal Si thin film transistor 16a and the non-single crystal Si thin film transistor 1a in different regions on the insulating substrate 2. Yes. Therefore, also for the semiconductor device 30 of the present embodiment, a high-performance and high-performance semiconductor device can be obtained in the same manner as the semiconductor device 20 of the first embodiment.

  On the other hand, the semiconductor device 30 differs from the semiconductor device 20 of the first embodiment in that the single crystal Si thin film transistor 16a is formed after the non-single crystal Si thin film transistor 1a is formed.

The semiconductor device 30 of this embodiment includes an SiO ₂ film 3, a non-single crystal Si thin film transistor 1a, a single crystal Si thin film transistor 16a, a metal wiring 22, and the like on an insulating substrate 2.

The non-single-crystal Si thin film transistor 1a includes a non-single-crystal Si thin film 5 ′, a SiO ₂ film 7 as a gate insulating film, and a gate electrode 6. As described above, the single crystal Si thin film transistor 16a is formed on the insulating substrate 2 on which the non-single crystal Si thin film transistor 1a is formed via the interlayer insulating film 7.

Further, the single crystal Si substrate 10a for forming the single crystal Si thin film transistor 16a is subjected to a process for forming a MOS type single crystal Si thin film transistor before being formed on the insulating substrate 2. Specifically, a gate electrode and a gate insulating film are formed, source / drain impurity ions are implanted, and channel implantation is performed for each of the P-type and N-type channel portions. Here, a P-type Si substrate is used. N-type TFT channel injection was omitted. A step of cutting an interlayer planarizing film on the gate electrode, here, SiO ₂ by CVD and BPSG after deposition and further planarizing by CMP into a predetermined shape is performed. Then, the single crystal Si substrate 10a on which the MOS type single crystal Si thin film 14a is formed is cleaned with SC1 cleaning liquid, particle removal and surface activation are performed, and visible light is transmitted from the glass substrate side through the glass substrate at room temperature. Then, the alignment mark on the single crystal Si and the alignment mark on the transparent substrate side were detected and aligned, and then bonded onto the insulating substrate 2. Here, processing is performed so that the gate length becomes 0.35 μm, and the processing rule for the contact and metal wiring portion corresponds to the accuracy of photolithography on a large glass substrate and the alignment accuracy at the time of bonding. And the space was 2 microns.

  In the semiconductor device 30 of this embodiment, MOS transistors are formed in the region of the non-single crystal Si thin film 5 'and the region of the single crystal Si thin film 14a. In the same conductivity type transistor formed in each region, at least one of mobility, subthreshold coefficient, and threshold value is different for each region. Thus, a transistor can be formed in a corresponding single crystal Si or non-single crystal Si thin film region in accordance with desired characteristics.

  Here, the manufacturing method of the semiconductor device 30 will be described as follows with reference to FIGS. 2 (a) to 2 (i).

First, as the insulating substrate 2, Corning code 1737 (alkaline earth-aluminoborosilicate glass), which is a high strain point glass, is used. Then, as shown in FIG. 2A, plasma chemical vapor is formed on the surface by plasma CVD using a mixed gas of TEOS (Tetra Ethoxy Silane, that is, Si (OC ₂ H ₅ ) ₄ ) and O ₂ (oxygen). A SiO ₂ film 3 having a thickness of about 100 nm is deposited by phase growth (Plasma Chemical Vapor Deposition, hereinafter referred to as P-CVD).

Further, an amorphous Si film 5 having a thickness of about 50 nm is deposited on the surface by plasma CVD using SiH ₄ gas.

  Subsequently, as shown in FIG. 2B, the amorphous Si film 5 is irradiated with an excimer laser, heated and crystallized to grow a polycrystalline Si layer, thereby forming a non-single-crystal Si thin film 5 ′. . Note that the heating of the amorphous Si film 5 is not limited to the irradiation heating by the excimer laser, but may be the irradiation heating by another laser or the heating using a furnace, for example. Further, in order to promote crystal growth, at least one of Ni, Pt, Sn, and Pd may be added to the amorphous Si film 5 '.

  Then, a predetermined region of the non-single crystal Si thin film 5 'is removed by etching as shown in FIG.

Next, as shown in FIG. 2 (c), plasma CVD using SiH ₄ and N ₂ O gas for TFTs of non-single crystal Si (here, polycrystalline Si or continuous grain boundary Si) is performed at 80 to 100 nm. After depositing a SiO ₂ film 7 as a gate insulating film, a gate electrode 6 is formed.

Next, as shown in FIG. 2D, impurity ions of source and drain are implanted, and TEOS (Tetra Ethoxy Silane, that is, Si (OC ₂ H ₅ ) ₄ ) and O ₂ (oxygen) are implanted on the surface thereof. A SiO ₂ film 4 having a thickness of about 250 nm is deposited as an interlayer insulating film by plasma CVD using a mixed gas.

  Here, in the semiconductor device 30 of this embodiment, as in the semiconductor device 20 of the first embodiment, a part of the process of the transistor that becomes the MOS type single crystal Si thin film transistor 16a by implanting hydrogen ions is performed. A completed single crystal Si substrate 10a is formed.

  Then, the single crystal Si substrate 10a is cut into a slightly smaller shape by dicing or anisotropic etching using KOH or the like as compared with a predetermined region where the non-single crystal Si thin film 5 'is removed by etching.

The portion from which the non-single-crystal Si thin film is removed in order to join the crystalline Si is previously planarized by GCIB (Gas Cluster Ion Beam) of a gas containing a low-energy (about 3 keV) halide. If a SiO ₂ film of about 10 nm is formed on this by PECVD using TEOS or TMCTS (Tetramethylcyclotetrasiloxane), the bondability is further improved.

  After the insulating substrate 2 on which the non-single crystal Si thin film 5 ′ is formed and the single crystal Si substrate 10a are cleaned with SC-1 for particle removal and surface activation, as shown in FIG. The hydrogen ion implanted portion 15 side of the single-crystal Si substrate 10a is aligned and closely adhered to the etched region at the room temperature by the same method as in the first embodiment. Here, the SC-1 cleaning is one of cleaning methods generally called RCA cleaning, and uses a cleaning liquid composed of ammonia, hydrogen peroxide, and pure water.

The formation of the single crystal Si substrate 10a on the insulating substrate 2 may be performed after the formation of the SiO ₂ film 7 as the gate insulating film and before the deposition of the SiO ₂ film 4 as the interlayer insulating film.

  Thereafter, heat treatment is performed at a temperature of 300 ° C. to 600 ° C., here about 550 ° C., and the temperature of the hydrogen ion implanted portion 15 of the single crystal Si substrate 10a is raised to a temperature higher than the temperature at which hydrogen is desorbed from the single crystal Si. Thereby, the single crystal Si substrate 10a can be cleaved and peeled off with the hydrogen ion implanted portion 15 as a boundary. In this heat treatment, the hydrogen ion implanted portion 15 of the single crystal Si substrate 10a may be heated by laser irradiation or lamp annealing including a peak temperature of about 700 ° C. or higher.

  Next, the damaged layer on the surface of the single crystal Si substrate 10a which has been peeled off and remains on the insulating substrate 2 is lightened by about 20 nm by isotropic plasma etching or wet etching, here isotropic plasma etching with buffer hydrofluoric acid. It is removed by etching. Thereby, as shown in FIG. 2F, a non-single-crystal Si thin film 5 'and a single-crystal Si thin film 14a each having a film thickness of about 50 nm can be obtained on one insulating substrate 2. In addition, after bonding the single crystal Si substrate 10a to the insulating substrate 2 at room temperature, heat treatment is performed at 300 to 350 ° C. for about 30 minutes, heat treatment is performed at about 550 ° C., and cleaving due to cleavage peeling. Diminished.

  At this time, a sufficient bonding strength between Si and the substrate has already been obtained. However, in order to further improve the bonding strength, a lamp annealing treatment is then performed at about 800 ° C. for 1 minute. This process may be performed in conjunction with the activation of the source / drain implanted impurities.

Then, as shown in FIG. 2G, a SiO ₂ film 8 is deposited as an interlayer planarization insulating film, and a contact hole 21 is opened as shown in FIG. As described above, the process of forming the metal wiring 22 is the same as that of the first embodiment.

  In the semiconductor device manufacturing method of this embodiment, as described above, after the non-single-crystal Si thin film transistor 1a is formed first, the single-crystal Si thin-film transistor 16a is formed, so that the single-crystal Si thin-film transistor is formed first. Compared with the semiconductor device 20 of the first embodiment, the manufacturing process can be simplified and the single crystal Si thin film can be prevented from being contaminated.

[Embodiment 3]
Still another embodiment relating to a method for manufacturing a semiconductor device of the present invention will be described as follows with reference to FIGS. 3 (a) to 3 (f) and FIG. For convenience of explanation, description of members having the same functions as those described in Embodiments 1 and 2 is omitted.

  As shown in FIG. 3F, the semiconductor device 40 of this embodiment is a semiconductor in which a non-single crystal Si thin film transistor and a single crystal Si thin film transistor are formed on a single insulating substrate 2 as in the first embodiment. The apparatus is common in that the single crystal Si thin film transistor is formed before the non-single crystal Si thin film is formed. On the other hand, a transistor formed as a single crystal Si thin film transistor is different in that it is not a MOS type but a bipolar type single crystal Si thin film transistor.

  Thus, by forming a MOS transistor as the non-single crystal Si thin film transistor and a bipolar transistor as the single crystal Si thin film transistor, the semiconductor device 40 having characteristics different from those of the semiconductor devices 20 and 30 described in the first and second embodiments. Can be obtained.

  Here, in the bipolar thin film transistor, a narrow reverse conductivity type layer (base) is provided in the middle of the current path between the first conductivity type semiconductor collector and the emitter, and the bias between the emitter and the base is changed from forward to reverse. In this transistor, the number of minority carriers flowing from the emitter to the base is controlled, and the current by the minority carriers flowing into the collector by diffusing the base is controlled.

  Since the bipolar thin film transistor is not formed with a gate electrode unlike the MOS type, the structure can be simplified and the manufacturing yield can be improved. Further, it has the advantages of excellent linearity in the saturation region, fast reaction speed, and linear signal processing, so that it is used for analog amplifiers, current buffers, power supply ICs, and the like.

  Note that in the bipolar single crystal Si thin film transistor, the contact pattern is formed according to a design rule looser than that of the base pattern.

  As a result, the metal wiring or part of the metal wiring of the semiconductor device in which the bipolar type single crystal Si thin film transistor is formed can be processed simultaneously with the metal wiring on the large substrate, and the cost can be reduced and the processing capability can be improved. Alternatively, connection to other circuit blocks or TFT arrays is facilitated, and a decrease in product yield due to poor connection to external devices or the like can be reduced.

As shown in FIG. 3F, the semiconductor device 40 includes a non-single-crystal Si thin film transistor 1a including a SiO ₂ film 3, a non-single-crystal Si thin film 5 ′ made of polycrystalline Si, and a single-crystal Si on an insulating substrate 2. A bipolar single crystal Si thin film transistor 16b including the thin film 14b and the metal wiring 22 are included.

  Since the MOS type non-single crystal Si thin film transistor 1a and the bipolar type single crystal Si thin film transistor 16b are thus formed on one insulating substrate 2, the MOS type, bipolar type or non-single crystal Si thin film transistor 16b is formed. By utilizing the characteristics of the thin film and the single crystal Si thin film, it is possible to obtain the semiconductor device 40 that can be used for more applications.

  Here, a method for manufacturing the semiconductor device 40 will be described as follows with reference to FIGS. 3A to 3F.

As the insulating substrate 2, Corning code 1737 (alkaline earth-aluminoborosilicate glass) is used, and as shown in FIG. 3A, a mixed gas of TEOS and O ₂ is used on its surface by plasma CVD. A SiO ₂ film 3 having a thickness of about 20 nm is deposited.

  Here, in the semiconductor device 40 of the present embodiment, the single crystal Si substrate 10b is formed in advance before the single crystal Si thin film transistor 16b is formed on the insulating substrate 2, as in the semiconductor devices 20 and 30 of the first and second embodiments. A structure that becomes a bipolar single crystal Si thin film transistor 16b is formed by cleaving separation from the hydrogen ion implanted portion, and bonded to the insulating substrate 2 in this state.

Specifically, first, a junction portion of a PNP junction or an NPN junction of a bipolar thin film transistor is formed. Next, an SiO ₂ film 11 having a film thickness of about 200 nm is formed by oxidizing the surface or depositing an oxide film. Then, a bipolar type single crystal Si thin film transistor having a hydrogen ion implanted portion 15 in which hydrogen ions having a dose amount of 5 × 10 ¹⁶ / cm ² are implanted at a predetermined depth with a predetermined energy is formed.

  As described above, the bipolar single crystal Si thin film transistor 16b is also formed with a hydrogen ion implanted portion in which hydrogen ions of a predetermined concentration are implanted at a predetermined depth, similar to the MOS type.

  Subsequently, the single crystal Si substrate 10 b is cut into an appropriate shape in advance and formed on the insulating substrate 2.

  After SC-1 cleaning and activation of the insulating substrate 2 and the cut single crystal Si substrate 10b, the hydrogen ion implanted portion 15 side of the single crystal Si thin film transistor 16b is placed on the insulating substrate 2 as shown in FIG. The regions removed by etching are aligned at the room temperature by the same method as in the first embodiment, and are adhered and bonded.

  In the semiconductor device 40 of the present embodiment, as shown in FIG. 4, impurity ions are implanted into each of P and N regions, and a plane (Lateral) in which the collector 25, the base 26, and the emitter 27 are arranged in a plane. ) A bipolar thin film transistor having a structure is shown, but a vertical structure may be used like a conventional bipolar thin film transistor. Further, the junction may be formed by diffusing impurities. Further, SIT (Static Induction Transistor) and diodes can be similarly applied.

  However, as in this embodiment, by forming a planar bipolar thin film transistor, it is not necessary to perform a planarization process before the formation, so that the manufacturing process can be further simplified and the production efficiency can be improved.

  Thereafter, heat treatment is performed at a temperature of 400 ° C. to 600 ° C., here about 550 ° C., and the temperature of the hydrogen ion implanted portion 15 of the single crystal Si substrate 10b is increased to a temperature at which hydrogen is desorbed from Si, thereby hydrogen ion implantation. The unnecessary portion 11 of the single crystal Si substrate 10b is cleaved and peeled off at the boundary 15 so that the bipolar single crystal Si thin film transistor 16b can be formed on the insulating substrate 2.

  Next, the damaged layer on the surface of the single crystal Si substrate 10b remaining on the insulating substrate 2 is removed by light etching about 20 nm by isotropic plasma etching or wet etching, here, wet etching with buffer hydrofluoric acid. . Thus, as shown in FIG. 3C, a bipolar single crystal Si thin film transistor 16b having a film thickness of about 80 nm can be formed on the insulating substrate 2.

Thereafter, as shown in FIG. 3D, an SiO ₂ film 4 having a thickness of about 200 nm is deposited as an interlayer insulating film on the entire surface of the insulating substrate 2 by plasma CVD using a mixed gas of SiH ₄ and N ₂ O. To do. Further, as shown in FIG. 3D, an amorphous Si film 5 having a thickness of about 50 nm is deposited on the surface by plasma CVD using SiH ₄ gas.

  Next, as shown in FIG. 3E, the amorphous Si film 5 is crystallized by irradiation with excimer laser, and a polycrystalline Si layer is grown to form a non-single-crystal Si thin film 5 '. At this time, the bonding strength of the bipolar single crystal Si thin film transistor 16b to the insulating substrate 2 can be improved.

Next, as shown in FIG. 3 (f), the part of the non-single-crystal Si thin film 5 ′ that becomes the active region of the device is left, and unnecessary Si film is removed by etching to obtain an island pattern. Then, by plasma CVD using a mixed gas of TEOS and oxygen, a SiO ₂ film 7 having a thickness of about 350 nm is deposited as a gate insulating film, and a photoresist having a thickness of about 350 nm is applied as a resin flattening film on the entire surface. All of the resin flattening film and a part of the SiO ₂ film 4 are etched back (not shown) by RIE (reactive ion etching) which is anisotropic etching with a gas containing oxygen and CF _4. Then, an SiO ₂ film 7 having a film thickness of about 60 nm is formed by plasma CVD using a mixed gas of SiH ₄ and N ₂ O as a gate insulating film.

Then, it is possible to the gate electrode 6 is formed on the SiO ₂ film 7, to obtain the gate electrode 6, the SiO ₂ film 7 and the non-monocrystalline Si thin film transistor 1a of non-single-crystal Si thin film 5 'as a gate insulating film.

The subsequent steps of forming the SiO ₂ film 8 as an interlayer planarization insulating film, opening the contact hole 21 and forming the metal wiring 22 are the same as those in the first and second embodiments, and thus the description thereof is omitted.

  As described above, in the method of manufacturing the semiconductor device 40 according to the present embodiment, after forming the bipolar single crystal Si thin film transistor 16b, the non-single crystal Si thin film transistor 1a made of a polycrystalline Si thin film is formed. 2 can be bonded as it is, the bonding process can be facilitated, and the adhesive strength of the bipolar single crystal Si thin film transistor 16b to the insulating substrate 2 can be improved.

  Further, since the single crystal Si thin film transistor to be formed is a bipolar type, planarization treatment is unnecessary, and the manufacturing cost can be reduced. Further, as in the case of the MOS type, part of the metal wiring may be formed in advance and planarization may be performed, whereby the integration density can be increased.

  In the semiconductor device 40 of the present embodiment, as shown in FIG. 3F, the transistor group is not element-isolated, but when leakage current becomes a problem or crosstalk between elements becomes a problem. Of course, element isolation may be performed.

[Embodiment 4]
Still another embodiment relating to the method for manufacturing a semiconductor device of the present invention will be described below with reference to FIGS. 5 (a) to 5 (f). For convenience of explanation, explanation of members having the same functions as those explained in Embodiments 1 to 3 is omitted.

  The semiconductor device 50 of the present embodiment is the same as that of the first embodiment in that a MOS type single crystal Si thin film transistor and a MOS type non-single crystal Si thin film transistor are formed on one insulating substrate 2. 20 and in common. On the other hand, it differs from the semiconductor device 20 of the first embodiment in that continuous grain boundary Si (Continuous Grain Silicon) is used as the non-single crystal Si thin film.

  Thus, by using continuous grain boundary Si as the non-single-crystal Si thin film, the non-single-crystal Si thin film transistor 1b having higher characteristics than the non-single-crystal Si thin film transistor made of polycrystalline Si can be obtained.

The semiconductor device 50 of this embodiment includes an SiO ₂ film 3, a MOS non-single crystal Si thin film transistor 1b, and a MOS single crystal Si thin film transistor 16a on an insulating substrate 2.

  In particular, the non-single-crystal Si thin film transistor 1b is formed as a non-single-crystal Si thin film using polycrystalline Si having a uniform crystal growth direction, so-called continuous grain boundary Si (Continuous Grain Silicon).

The conventional N-channel TFT formed in the continuous crystal grain boundary Si region has a mobility of about 200 cm ² / V · sec, whereas the liquid crystal display active matrix in which the semiconductor device 50 of the present embodiment is formed. The mobility of about 550 cm ² / V · sec was obtained for the N-channel TFT formed in the region of the single crystal Si thin film 14 a on the substrate. Therefore, it is possible to obtain an active matrix substrate that can respond faster than before.

  According to the active matrix substrate for liquid crystal display, the device formed in the region of the non-single-crystal Si thin film as well as the driver requires a signal of 7 to 8 V and the power supply voltage, whereas the region of the single-crystal Si thin film 14a. The timing controller, which is a device formed in the above, stably operated with a signal of 2.7 V and a power supply voltage.

  Here, the manufacturing process of the semiconductor device 50 will be described as follows with reference to FIGS. 5A to 5F.

In the present embodiment, as in the first embodiment, first, Corning code 1737 (alkaline earth-aluminoborosilicate glass) is used as the insulating substrate 2, and as shown in FIG. An SiO ₂ film 3 of about 100 nm is deposited by plasma CVD using TEOS and O ₂ mixed gas.

Further, as shown in FIG. 5B, an amorphous Si thin film 51 of about 50 nm is deposited on the entire surface of the SiO ₂ film 3 by plasma CVD using SiH ₄ gas. Further, an SiO ₂ film 52 of about 200 nm is deposited on the entire surface by plasma CVD using SiH ₄ and N ₂ O mixed gas.

After an opening is formed in a predetermined region of the SiO ₂ film 52 by etching, the surface of the amorphous Si thin film 51 is thinly oxidized in order to control the hydrophilicity of the surface of the amorphous Si thin film 51 in the opening. Then, an oxide film (SiO ₂ film) is formed, and Ni acetate aqueous solution is spin-coated thereon.

  Next, solid-phase growth is performed at a temperature of 580 ° C. for about 8 hours to grow polycrystalline Si that promotes crystal growth in the same crystal growth direction, so-called continuous grain boundary silicon (Continuous Grain Silicon). A crystal grain boundary Si thin film 51 'is formed.

Further, as shown in FIG. 5C, the SiO ₂ film 52 on the continuous grain boundary Si thin film 51 ′ is removed. Thereafter, a predetermined region of the continuous grain boundary Si thin film 51 ′ is removed by etching.

  Here, as in the case of the second embodiment, the bonding property was improved by flattening the surface with GCIB of a low energy (about 3 keV) halide gas. Also in the semiconductor device 50 of the present embodiment, a structure that becomes a MOS type single crystal Si thin film transistor is formed by cleavage and thinning as in the first embodiment, and hydrogen ions are implanted at a predetermined concentration and with a predetermined energy. A crystalline Si substrate 10a is prepared.

  Then, as shown in FIG. 5D, the insulating substrate 2 and the single crystal Si substrate 10a on which the continuous grain boundary Si thin film 51 ′ is formed are activated by SC-1 cleaning, and then the single crystal Si substrate 10a. In the region where the hydrogen ion implanted portion 15 side is removed by etching, the alignment is performed at room temperature by the same method as in the first embodiment, and adhesion is performed in close contact.

  At this time, the distance between the continuous grain boundary Si thin film 51 'and the single crystal Si substrate 10a is at least 0.3 microns, preferably 0.5 microns or more. This prevents metal atoms such as Ni, Pt, Sn, and Pd used in the manufacturing process described later from diffusing into the region of the single crystal Si thin film 14a, and stabilizes the characteristics of the single crystal Si thin film transistor. it can.

  Thereafter, by raising the temperature of the hydrogen ion implanted portion 15 of the single crystal Si substrate 10a to a temperature at which hydrogen is desorbed from the single crystal Si by laser irradiation or lamp annealing including a peak temperature of about 700 ° C. or higher, As shown in FIG. 5E, the unnecessary portion 11 of the single crystal Si substrate 10a is cleaved and separated with the hydrogen ion implanted portion 15 as a boundary.

  Next, the damaged layer of the single crystal Si thin film 10a remaining on the insulating substrate 2 is removed by light etching about 10 nm by isotropic plasma etching or wet etching, here, wet etching with buffer hydrofluoric acid.

  Thereby, the continuous crystal grain boundary Si thin film 51 ′ and the single crystal Si thin film 14 a each having a thickness of about 50 nm can be formed on the insulating substrate 2.

  Next, unnecessary portions on the continuous grain boundary Si thin film 51 'are removed by etching.

Next, an opening is formed in the SiO ₂ film in the active region near the device, for gettering of Ni added to promote crystal growth of the SiO ₂ film as a mask, implanting a high concentration of P ⁺ ions ( ¹⁵ keV, 5 × 10 ¹⁵ / cm ² ), RTA is performed at a temperature of about 800 ° C. for 1 minute.

  It should be noted that although a space is physically provided so that Ni atoms do not diffuse into the single crystal Si thin film 14a, a very small amount of Ni atoms may be mixed in the process. Therefore, it is desirable that the active region of the single crystal Si thin film 14a is also gettered, but if space is a priority, gettering may be omitted as a design option.

  Next, an unnecessary portion of the unnecessary continuous crystal grain boundary Si thin film 51 ′ and the single crystal Si thin film 14 a are removed by etching while leaving a portion to be an active region of the device, and an island-like pattern is obtained.

Next, an SiO ₂ film having a thickness of about 350 nm is deposited by P-CVD using a mixed gas of TEOS and oxygen, and this is etched back by about 400 nm by RIE which is anisotropic etching, and then SiH ₄ and N A SiO ₂ film 7 having a film thickness of about 60 nm is formed as a gate insulating film by plasma CVD using a mixed gas with ₂ O.

  At this time, side walls are formed at the ends of the pattern of the continuous grain boundary Si thin film 51 'and the pattern of the single crystal Si thin film 14a.

The subsequent steps of forming the SiO ₂ film 8 as an interlayer planarization insulating film, opening the contact hole 21 and forming the metal wiring 22 are the same as those in the first and second embodiments, and thus the description thereof is omitted.

As described above, in the manufacturing method of the semiconductor device 50 of this embodiment, after forming polycrystalline Si as a non-single crystal Si thin film, the single crystal Si thin film transistor 16a is formed, and then the gate insulation of the non-single crystal Si thin film transistor 1b is performed. Since the SiO ₂ film 7 is formed as a film, the number of SiO ₂ films can be reduced and the process can be simplified.

[Embodiment 5]
Still another embodiment relating to the method for manufacturing a semiconductor device of the present invention will be described below with reference to FIGS. 6 (a) to 6 (h). For convenience of explanation, explanation of members having the same functions as those explained in Embodiments 1 to 4 is omitted.

  The semiconductor device 60 of the present embodiment is such that a bipolar single crystal Si thin film transistor and a MOS non-single crystal Si thin film transistor are formed on a single insulating substrate 2. 40.

  On the other hand, it differs from the semiconductor device 40 of the third embodiment in that a bottom-gate transistor is formed as a non-single crystal Si thin film transistor.

  The semiconductor device 60 of the present embodiment is manufactured by the same manufacturing process as that of the semiconductor device 30 of the second embodiment with respect to the steps up to the bonding and cleavage separation of the single crystal Si substrate shown in FIG. The semiconductor device having the same structure as the semiconductor device 30 is also used.

In the subsequent steps, as shown in FIG. 6 (h), after the element isolation of the single crystal device portion, an interlayer insulating film is formed over the entire surface, and an amorphous Si TFT and circuit are formed thereon. A gate insulating film 62 and non-doped amorphous Si 63 are formed in an island shape on the gate electrode 6, and an N ⁺ amorphous Si thin film 64 and a metal for source / drain wiring are formed. A wiring 65 is formed.

  Although not shown, a protective insulating film, a planarizing film, and a transparent conductive film for display are further formed thereon for liquid crystal display or the like.

  Here, the manufacturing method of the semiconductor device 60 will be described as follows with reference to FIGS. 6 (a) to 6 (h).

First, as shown in FIG. 6A, plasma CVD using Corning code 1737 (alkaline earth-aluminoborosilicate glass) as the insulating substrate 2 and using a mixed gas of TEOS and O ₂ on the entire surface thereof. Thus, a SiO ₂ film 3 having a thickness of about 50 nm is deposited.

  Here, similarly to the semiconductor device 40 of the third embodiment, a single crystal Si substrate 10b in which a structure 16b to be a bipolar type single crystal Si thin film transistor is prepared in advance after the formation of a cleaved thin film is prepared. After implanting hydrogen ions with energy, this is cut into a predetermined size.

  After the insulating substrate 2 and the cut single crystal Si substrate 10b are activated by SC-1 cleaning, as shown in FIG. 6B, the hydrogen ion implanted portion 15 side of the single crystal Si substrate 10b is set at a predetermined position. The positions are aligned by the same method as in the first embodiment, and are brought into close contact at room temperature and bonded. Although not shown in the drawing, metal wiring may be formed in advance on the single-crystal Si substrate. In this case, there is an advantage that high integration can be achieved by miniaturization.

  Thereafter, heat treatment is performed at a temperature of 400 ° C. to 600 ° C., here about 550 ° C., and the temperature of the hydrogen ion implanted portion 15 of the single crystal Si substrate 10b is increased to a temperature at which hydrogen is desorbed from the single crystal Si. As shown in FIG. 6C, the single crystal Si substrate 10b is cleaved and separated with the hydrogen ion implanted portion 15 as a boundary. Even if the metal wiring is formed in advance, even if the metal is an Al-based alloy within this temperature range, it can be used because it has a melting point or lower.

  Next, a part of the single crystal Si thin film 14b remaining on the insulating substrate 2 is removed by etching, and after processing the single crystal Si thin film 14b into an island shape, the damaged layer on the surface is subjected to isotropic plasma etching or wet etching. Here, it is removed by light etching of about 10 nm by wet etching with buffer hydrofluoric acid.

  As a result, a part of the MOS thin film transistor made of the single crystal Si thin film 14b having a film thickness of about 50 nm is formed on the insulating substrate 2.

Thereafter, as shown in FIG. 6D, an SiO ₂ film 61 having a thickness of about 200 nm is deposited on the entire surface of the insulating substrate 2 by plasma CVD using a mixed gas of SiH ₄ and N ₂ O.

  Further, a TaN thin film is deposited on the entire surface by sputtering and processed into a predetermined pattern, thereby forming gate layers such as gate electrodes 6 and gate bus lines.

  Note that the material of the wiring of the gate layer is not limited to this material, and various metal materials such as Al and Al alloy can be selected according to resistance, heat resistance, compatibility with a subsequent manufacturing process, and the like.

Subsequently, as shown in FIG. 6E, a silicon nitride film 62 of about 200 nm is formed as a gate insulating film by plasma CVD using SiH ₄ gas and NH ₃ gas. Then, by plasma CVD using SiH ₄ gas thereon, amorphous Si film 63 having a thickness of about 50 nm, further on to the SiH ₄ gas and PH ₃ film thickness of about 30nm and doped with P with a mixed gas thereof N ⁺ Amorphous Si film 64 is successively deposited successively.

  Next, as shown in FIG. 6 (f), the non-doped and P-doped amorphous Si film is etched into an island shape, leaving a portion to be a transistor. Further, as shown in FIG. A Ti thin film is deposited by sputtering as a metal film 65 for source bus wiring, and processed into a predetermined pattern.

  Note that the metal film 65 for the source bus wiring is not limited to Ti, and various metal materials such as Al and Al alloys depending on resistance, heat resistance, compatibility with later processes, and the like. Can be selected.

Next, as shown in FIG. 6 (h), the N ⁺ layer in a predetermined region (portion between the source and drain) of the island-like pattern of amorphous Si 63 (including a part of the non-doped layer) is also combined. Etching is removed to form an amorphous Si TFT.

Thereafter, a silicon nitride film of about 200 nm is deposited by plasma CVD using SiH ₄ gas and NH ₃ gas as a protective insulating film.

  Thereafter, similar to the manufacturing process of an active matrix substrate using ordinary amorphous Si, for example, an active matrix substrate used for liquid crystal display is completed by forming a resin interlayer and forming a transparent electrode for display.

  As described above, since the semiconductor device 60 of this embodiment uses amorphous Si as the non-single-crystal Si thin film transistor 1c, the manufacturing process of the non-single-crystal Si thin film is simplified, and the cost of the semiconductor device 60 is reduced. Can be realized. In addition, the semiconductor device 60 can be applied to a low power consumption type LCD or the like due to the low-off current characteristic that is characteristic of amorphous Si.

  Furthermore, since the structure of the non-single-crystal Si thin film transistor 1c is a so-called bottom gate structure in which the gate electrode 6 is disposed on the insulating substrate 2 side, the formation of amorphous Si is facilitated, and the productivity is simplified from the simplification of the process. Thus, the cost of the semiconductor device can be reduced.

  In addition, as shown in FIG. 7, each semiconductor device described in the first to fifth embodiments includes an active matrix substrate 70 having a display unit 72 and a high-function circuit unit (high-speed DAC, high-speed timing controller, image processing circuit, etc.). ) 71.

In the single crystal Si thin film transistors 16a and 16b of the first to fifth embodiments, a wiring layer made of a refractory metal may be further formed on the gate layer. Here, the wiring of a circuit portion that requires fine processing is formed using a TiW alloy, and further, an interlayer insulating film is formed by CVD or PECVD using TEOS or SiH ₄ and N ₂ O gas, and then flattened by CMP or the like. Then, hydrogen ions may be implanted therein with a predetermined energy and a predetermined concentration.

  Thus, a semiconductor device having a double metal wiring structure can be obtained by forming a single crystal Si thin film transistor in which metal wiring is formed in advance on an insulating substrate, and further forming metal wiring after forming an oxide film. Furthermore, a functional circuit with a high integration density can be formed.

  Here, the wiring layer made of a refractory metal only needs to have heat resistance with respect to the heat treatment temperature at the time of cleaving separation of the single crystal Si substrate, polycrystalline Si, various metal silicides, Ti, W, Mo, TiW, TaN, A material such as Ta can be used. Furthermore, when the single crystal Si substrate is cleaved and peeled off with a laser, the heat resistance may be low.

  Further, the present invention is not limited to the contents described in the above embodiment, and for example, the non-single crystal Si forming method, the material of the interlayer insulating film, the film thickness, and the like can be obtained by other means known to those skilled in the art. Can be realized.

  Also, a semiconductor device formed of single crystal Si is not limited to a MOS transistor or a bipolar transistor, and may be a SIT, a diode, or the like, for example.

  In the semiconductor device of the present invention, it is an important merit of the present invention that a plurality of types of semiconductor devices having different characteristics can be integrated on the same glass substrate.

  Moreover, although the said Embodiments 1-5 demonstrated and demonstrated the example in which the thin film Si transistor which has two types of different characteristics was formed, this invention is not limited to this, Three or more types of characteristics A semiconductor device in which different devices are formed on one substrate may be used.

  For example, when a semiconductor device in which a MOS transistor and a bipolar transistor are formed as a single crystal Si thin film transistor and a MOS transistor is formed as a non-single crystal Si thin film transistor, a semiconductor device having three types of characteristics is formed. A semiconductor device that can be formed on one substrate and has higher performance and higher functionality can be obtained.

  In such a semiconductor device, it is more preferable that the single crystal Si thin film of the MOS thin film transistor made of single crystal Si has a smaller film thickness than the single crystal Si thin film of the bipolar thin film transistor.

  This is because it is known that a MOS type thin film transistor usually has better characteristics when the film thickness is thinner, and that a bipolar thin film transistor can obtain better characteristics when the film thickness is relatively thick.

  In addition, it is more preferable that the gate line width of the MOS type thin film transistor made of the single crystal Si thin film is 1 μm or less. Also, a bipolar thin film transistor made of a single crystal Si thin film preferably has a base width of about 2.5 μm or less.

  Furthermore, the base width is more preferably 1 μm or less. This is because the narrower the base width, the better the efficiency with which minority carriers diffuse and pass, and the shorter the time.

  Thereby, the switching speed of the transistor can be increased.

[Embodiment 6]
The following will describe still another embodiment relating to the method for manufacturing a semiconductor device of the present invention. For convenience of explanation, description of members having the same functions as those described in Embodiments 1 to 5 is omitted.

  In the embodiment of the present invention, in the semiconductor devices of Embodiments 1 to 5, the thickness of the single crystal Si substrate before bonding is about 70 μm. Here, the same materials and methods were used except for the thickness before bonding of the single crystal Si substrate, but the bonding properties of the glass substrate and the Si substrate were excellent in all cases, and in particular, the bonding failure at the four corners of the substrate was excellent. It was able to reduce significantly.

  In this embodiment, the thickness is reduced after hydrogen ion implantation by a polishing method used in an IC card. Note that the thickness of the single crystal Si is preferably as thin as possible from the viewpoint of bondability, but is preferably about 50 to 100 μm because of trade-off with ease of handling.

  In the first to sixth embodiments, the MOS type transistor has been described. However, the present invention is not limited to the MOS type transistor. For example, even with an MIS type transistor, the same effect as when a MOS type transistor is used can be obtained.

  Here, since the MIS type transistor uses a Si nitride film or the like as a gate insulating film, the gate insulating film having a high dielectric constant increases the electric field effect even if the film thickness is the same, and the leakage current of the gate. Is a transistor having characteristics such that it can be operated at a low voltage.

  In addition, it cannot be overemphasized that the manufacturing method of the semiconductor device by this invention is not limited to a liquid crystal display device, but is effective also for other devices including organic EL. Further, it may be generally used not only as a display device but also as a high-performance integrated circuit.

  The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims, and can be obtained by appropriately combining technical means disclosed in different embodiments. Embodiments are also included in the technical scope of the present invention.

〔The invention's effect〕
As described above, the single crystal Si substrate according to the present invention is planarized after an oxide film, a gate pattern, and an impurity ion implanted portion are formed on the surface, and has a predetermined concentration of hydrogen at a predetermined depth. In this configuration, a hydrogen ion implantation part into which ions are implanted is provided.

  Therefore, a single crystal Si substrate is bonded to an insulating substrate or the like on the oxide film forming side, and the heat treatment is performed by changing the bonding between the substrates into a bond between atoms, and in the hydrogen ion implantation portion. By cleaving and peeling by heat treatment, it is possible to easily obtain a MOS type single crystal Si thin film transistor without using an adhesive.

  Further, for example, by joining the single crystal Si substrate of the present invention on an insulating substrate having a non-single crystal Si thin film transistor such as a polycrystalline Si thin film formed on the surface, a MOS type single crystal Si thin film transistor is formed. A semiconductor device in which a transistor made of single crystal Si and a transistor made of single crystal Si are formed in different regions on one substrate can be easily obtained.

  As described above, the single crystal Si substrate is deposited on the impurity ion implanted portion or the diffusion region having the pnp junction structure or the npn junction structure in which the impurity ions are implanted near the surface, and on the impurity ion implanted portion or the diffusion region. And an oxide film formed.

  Therefore, there is an effect that a bipolar thin film transistor made of a single crystal Si thin film that can be easily formed on another insulating substrate can be obtained.

  Since it has a hydrogen ion implantation part in which hydrogen ions of a predetermined concentration are implanted at the predetermined depth, a single crystal Si substrate is bonded to an insulating substrate or the like on the oxide film deposition side, and the hydrogen ion implantation side By cleaving and peeling, a bipolar single crystal Si thin film transistor can be easily obtained without using an adhesive.

  The oxide film is more preferably formed so as to have a thickness of 200 nm or more.

Therefore, in the MOS transistor made of single crystal Si, the threshold value varies, and in the bipolar TFT made of single crystal Si, the characteristic variation is small and the on-resistance is kept low, which balances the efficiency and step of the SiO ₂ film formation process. There is an effect that an appropriate single crystal Si substrate can be obtained.

As described above, in the semiconductor device according to the present invention, the non-single crystal Si thin film device and the single crystal Si thin film device are respectively formed in different regions on the insulating substrate. The structure is bonded to the insulating substrate through a SiO ₂ film.

  Therefore, for example, a single crystal Si thin film device such as a single crystal Si thin film transistor is used for a device that requires a higher performance function such as a timing controller, and a non-single crystal Si thin film transistor such as a non-single crystal Si thin film transistor is used for the remaining devices. Using the single crystal Si thin film device, it is possible to obtain a semiconductor device in which a high-performance and high-performance circuit system is integrated at a low cost. In addition, for example, a large semiconductor device that can be used for a large liquid crystal display panel, an organic EL panel, or the like can be manufactured.

Furthermore, the single crystal Si thin film device is bonded to the insulating substrate via a SiO ₂ film.

  Therefore, since a device such as a single crystal Si thin film transistor can be formed on an insulating substrate without using an adhesive, it is possible to prevent the single crystal Si from being contaminated. In addition, metal wiring, inorganic insulating film formation, etching, or the like can be easily performed after bonding. Furthermore, it is possible to form a device at a low cost by forming a metal wiring or the like in common with a TFT process on a large substrate.

  It is more preferable that the non-single crystal Si thin film device and the single crystal Si thin film device are both MOS type or MIS type single crystal Si thin film transistors.

  Therefore, for example, in the case of a CMOS structure, it is possible to obtain a semiconductor device suitable for logic with low power consumption, which can reduce power consumption and full output up to the power supply voltage.

  The MOS type single crystal Si thin film transistor is more preferably formed in the order of a gate, a gate insulating film, and Si from the insulating substrate side.

  Therefore, the MOS thin film transistor is formed in a state where the gate is disposed on the insulating substrate side, and a semiconductor device in which a MOS type single crystal Si thin film transistor upside down is formed on a so-called insulating substrate can be obtained. A self-alignment process using a gate as a mask can be applied to source / drain formation on a single crystal Si substrate, and the effect of fixed charges on the surface of the glass substrate can be reduced. Furthermore, the effect of fixed charges that tend to occur at the interface between single crystal Si and glass substrate can be reduced by the shielding effect of the gate, and an established process using source / drain impurity ion implantation with the gate as a mask in single crystal Si Can be applied, so there is an advantage that the yield can be increased.

  The film thickness of the single crystal Si thin film of the MOS type thin film transistor is more preferably about 600 nm or less.

  Therefore, the S value (subthreshold coefficient) of the semiconductor device can be reduced, and the off current can be reduced.

  The film thickness of the single crystal Si thin film of the MOS type thin film transistor is more preferably about 100 nm or less.

  Therefore, the S value (subthreshold coefficient) of the semiconductor device can be further reduced, and the off-current can also be reduced. Therefore, it is possible to maximize the characteristics of the MOS type single crystal Si thin film transistor.

  More preferably, the metal wiring pattern of the MOS type single crystal Si thin film transistor includes a portion formed by a looser wiring formation rule than the gate pattern of the MOS type single crystal Si thin film transistor.

  Therefore, the metal wiring of the semiconductor device in which the MOS type single crystal Si thin film transistor is formed or at least a part of the metal wiring can be processed simultaneously with the metal wiring on the large substrate, and the processing capability can be improved while suppressing the cost. Alternatively, connection to an external device, external wiring, another circuit block, or TFT array is facilitated, and the product yield due to poor connection to the external device can be reduced.

  The non-single-crystal Si thin film device is a MOS-type or MIS-type non-single-crystal Si thin film transistor, and the single-crystal Si thin-film device is more preferably a bipolar single-crystal Si thin-film transistor.

  Therefore, since the bipolar type single crystal Si thin film transistor is formed in addition to the MOS type or MIS type non-single crystal Si thin film transistor, there is an effect that a more multifunctional semiconductor device can be obtained.

  The non-single-crystal Si thin-film device is a MOS-type or MIS-type non-single-crystal Si thin-film transistor, and the single-crystal Si thin-film device is either a MOS-type or bipolar-type, or both single-crystal Si thin-film transistors and More preferably, it includes a bipolar single crystal Si thin film transistor.

  Therefore, there is an effect that a semiconductor device having three types of characteristics, that is, a MOS type or MIS type non-single crystal Si thin film transistor, a single crystal Si thin film transistor, and a bipolar type single crystal Si thin film transistor can be formed on one substrate. Therefore, a semiconductor device with higher performance and higher functionality can be obtained.

  The non-single-crystal Si thin film device is a MOS-type or MIS-type non-single-crystal Si thin-film transistor, and the single-crystal Si thin-film device includes an MOS-type single-crystal Si thin-film transistor and a Schottky-type or PN junction-type diode. More preferably, a sensor or a CCD type image sensor is provided.

  Therefore, since thin film devices with different designs or structures can be integrated individually in different regions, it is easy to integrate devices with different structures from CMOS devices such as image sensors that were extremely difficult to coexist with conventional methods. It is possible to create a highly functional device that has been impossible until now.

  More preferably, the single crystal Si thin film of the MOS thin film transistor made of single crystal Si has a smaller film thickness than the single crystal Si thin film of the bipolar thin film transistor.

  Therefore, by specifying the thicknesses of the MOS thin film and the bipolar thin film by comparing each other, it is possible to obtain a semiconductor device that can effectively utilize both the MOS and bipolar characteristics.

  The bipolar single crystal Si thin film transistor preferably has a planar structure in which the base, collector and emitter regions are formed and arranged on the same plane.

  Therefore, since it is a so-called lateral type transistor having no gate and having a planar structure like a MOS type thin film transistor, an oxide film is simply formed on the Si surface, and impurities of P and N are formed in a predetermined pattern (region). In this case, a Si substrate having a completely flat surface can be formed simply by performing activation annealing and bonding a single crystal Si substrate on an insulating substrate without performing a planarization process by CMP. There is an effect that can be.

  The contact pattern of the bipolar single crystal Si thin film transistor is more preferably formed by a looser design rule than the base pattern of the bipolar single crystal Si thin film transistor.

  Connection to an external device of a semiconductor device, external wiring, other circuit blocks, or a TFT array is facilitated, and the product yield due to poor connection to the external device can be reduced.

  Therefore, the metal wiring or part of the metal wiring of the semiconductor device in which the bipolar single crystal Si thin film transistor is formed can be processed at the same time as the metal wiring on the large substrate, and the processing capability can be improved while reducing the cost. Alternatively, the connection to the external device or the external wiring is facilitated, and the product yield due to the connection failure with respect to the external device or the like can be reduced.

  The film thickness of the single crystal Si thin film of the bipolar single crystal Si thin film transistor is more preferably about 800 nm or less.

  Therefore, by setting the film thickness to about 800 nm or less, which is the limit of the thickness with respect to the characteristic variation of the single crystal Si thin film of the bipolar type single crystal Si thin film transistor, the bipolar in which the characteristic variation can be suppressed to a small level without deteriorating the characteristic. The effect is that a single-crystal Si thin film transistor can be obtained.

  The non-single-crystal Si thin film is a polycrystalline Si thin film or a continuous grain boundary Si thin film. The MOS type thin film transistor comprising the non-single-crystal Si thin film has a non-single-crystal Si, a gate insulating film, and a gate in this order from the substrate side. More preferably, it is formed.

  Therefore, by constructing the MOS thin film transistor so that the gate is formed on the insulating substrate, a self-alignment process using a general gate as a mask can be summarized. The thin film transistor can be easily manufactured, and the productivity can be improved.

  The non-single crystal Si thin film is a polycrystalline Si thin film or a continuous grain boundary Si thin film, and the MOS type thin film transistor comprising the non-single crystal Si thin film is formed in the order of gate, gate insulating film, and non-single crystal Si from the substrate side. More preferably.

  Therefore, since the MOS type non-single-crystal Si thin film transistor has an opposite configuration when viewed from the substrate, the influence of fixed charges near the surface of the glass substrate can be avoided, and the characteristics can be stabilized. Furthermore, the degree of freedom in setting the doping profile of the channel portion is increased, measures for hot electron degradation are facilitated, and variations in the configuration that can obtain the same effects as described above can be increased.

  The non-single crystal Si thin film is an amorphous Si thin film, and the MOS type or MIS type thin film transistor made of the non single crystal Si thin film is formed from the substrate side in the order of gate, gate insulating film, and non single crystal Si. More preferably.

  Therefore, by forming a so-called bottom-gate MOS type or MIS type thin film transistor in which the gate is formed below the insulating substrate, a process that has been widely used in the past can be applied, and a high yield can be achieved. There are effects that the process of forming the amorphous Si thin film can be simplified, the cost can be reduced, and the productivity can be improved. In addition, since amorphous Si has a low off current characteristic, a semiconductor device suitable for a low power consumption type LCD or the like can be obtained.

  The non-single-crystal Si thin film is an amorphous Si thin film, and the MOS type thin film transistor made of the non-single-crystal Si thin film is formed from the substrate side in the order of non-single-crystal Si, gate insulating film, and gate. More preferred.

  Therefore, even if the MOS-type non-single-crystal Si thin film transistor has the opposite configuration as viewed from the substrate, it is possible to increase the number of variations of the configuration that can obtain the same effect as described above, and to increase the degree of freedom in process design. Play.

  The difference in linear expansion between the single crystal Si constituting the single crystal Si thin film device and the insulating substrate is more preferably about 250 ppm or less in a temperature range from about room temperature to 600 ° C.

  Therefore, the difference in linear expansion between the insulating substrate and the single crystal Si thin film with respect to a large temperature rise is reduced. Therefore, in the process for forming a single-crystal Si thin film on an insulating substrate, it is possible to reliably prevent the breakage in the cleavage peeling process from the hydrogen injection position due to the difference in thermal expansion, the peeling at the bonding interface, or the generation of defects in the crystal. In addition, there is an effect that the heat bonding strength can be improved.

The insulating substrate is at least, the monocrystalline Si thin film device is an alkaline earth SiO ₂ film is formed on the surface of the area to be formed - and more preferably a high strain point glass made of aluminoborosilicate glass.

  Therefore, it is not necessary to use crystallized glass whose composition used for bonding to a single crystal Si substrate is eliminated, so that an insulating substrate is a high strain point generally used for liquid crystal display panels driven by an active matrix. It is made of glass and produces an effect that a low-cost semiconductor device can be manufactured.

  The insulating substrate is composed of barium-borosilicate glass, barium-aluminoborosilicate glass, alkaline earth-aluminoborosilicate glass, borosilicate glass, alkaline earth-zinc-lead-aluminoborosilicate glass and alkaline earth-zinc- More preferably, it is made of any one of aluminoborosilicate glasses.

  Therefore, since the insulating substrate is made of the glass described above, which is a high strain point glass generally used for liquid crystal display panels by active matrix driving, a semiconductor device suitable for the active matrix substrate can be manufactured at low cost. There is an effect.

  The alignment margin of at least a part of the pattern in the single crystal Si region is smaller than the alignment margin of the pattern of the entire mother substrate, the display region, or the entire device, and more preferably has high accuracy.

  Therefore, when forming a metal wiring pattern or the like common to the non-single-crystal Si region, it is possible to align a part of the pattern with a high-precision pattern in the single-crystal Si region by a higher-precision exposure system. There is an effect that can be done. Therefore, a single crystal Si region having a high-precision pattern and a non-single-crystal region having a low-precision pattern can be easily and efficiently connected with a high yield using a metal wiring pattern or the like.

  The alignment mark in the single crystal Si region and the alignment mark on the transparent substrate are detected from the transparent substrate side with visible light or light having a shorter wavelength than visible light. More preferably, it has a shape that can be aligned with an alignment mark formed on the transparent substrate.

  Therefore, since the alignment mark can be detected through the glass substrate, the optical resolution can be improved, and an effect that the alignment with higher accuracy than before can be achieved.

  As described above, the method for manufacturing a semiconductor device according to the present invention is a method for manufacturing a semiconductor device in which a single crystal Si thin film device and a non-single crystal Si thin film device are formed on an insulating substrate. A single crystal Si substrate having a hydrogen ion implanted portion in which hydrogen ions having a predetermined concentration are implanted to a predetermined depth is formed on an insulating substrate by heat treatment. This is a method of forming a non-single-crystal Si thin film after bonding and further cleaving and peeling by heat treatment in the hydrogen ion implanted portion.

  Therefore, a single crystal Si thin film device is formed on an insulating substrate having the best flatness, and then a non-single crystal Si thin film is formed. Therefore, it is possible to manufacture a semiconductor device with few defects due to poor bonding and high yield.

  More preferably, a protective insulating film, a contact hole, and a metal wiring are formed on the single crystal Si thin film device.

  Therefore, since the single crystal Si thin film device formed prior to the formation of the non-single crystal Si thin film has metal wiring, miniaturization processing is possible, and the circuit formed in the single crystal Si thin film is integrated. A significant increase in density can be achieved. Furthermore, by providing metal wiring in the same process for non-single-crystal Si thin film formed after the single crystal Si thin film device is formed on the glass substrate, a semiconductor device with a double metal wiring structure can be manufactured in a simple and efficient process. There is an effect that can be done.

  It is more preferable to form an interlayer insulating film after forming the single crystal Si thin film device and before forming the non-single crystal Si thin film.

  Therefore, since the interlayer insulating film is formed between the single crystal Si thin film device and the non-single crystal Si thin film, there is an effect that the single crystal Si contamination of the single crystal Si thin film can be surely prevented.

  As described above, the semiconductor device manufacturing method of the present invention is planarized after the non-single-crystal Si thin film is formed on the insulating substrate and then the oxide film, gate pattern, and impurity ion implanted portion are formed on the surface. A single crystal Si substrate provided with a hydrogen ion implanted portion in which hydrogen ions of a predetermined concentration are implanted at a predetermined depth is bonded onto an insulating substrate by heat treatment, and further cleaved and peeled off by heat treatment at the hydrogen ion implanted portion. Is the method.

  Therefore, since the non-single-crystal Si thin film is formed before forming the single-crystal Si thin-film device, the single-crystal Si thin-film is formed in comparison with the case of forming the non-single-crystal Si thin film after forming the single-crystal Si thin-film device. There is an effect that it can be prevented from being contaminated or damaged.

  The single crystal Si thin film device is more preferably a MOS type single crystal Si thin film transistor.

  Therefore, for example, in the case of the CMOS structure, the characteristics of the MOS transistor such as reduction of power consumption and full output up to the power supply voltage, and a semiconductor device suitable for low power consumption logic can be obtained. The semiconductor device can be manufactured.

  The single crystal Si thin film device is more preferably a bipolar single crystal Si thin film transistor.

  Therefore, by forming the bipolar transistor on the insulating substrate, the structure of the single crystal Si thin film can be simplified as compared with the MOS type, and it can be bonded to the insulating substrate without performing the planarization process. .

  More preferably, hydrogen ions having a predetermined concentration are implanted at a predetermined depth into a single crystal Si substrate for forming the single crystal Si thin film device.

  Therefore, there is an effect that a single crystal Si thin film device can be easily formed on an insulating substrate without using an adhesive.

  The hydrogen ion implantation energy is obtained by subtracting the energy corresponding to the projection range of hydrogen ions corresponding to the film thickness of the oxide film from the hydrogen ion implantation energy, the energy corresponding to the film thickness of the oxide film, More preferably, the energy is set to be smaller than the energy corresponding to the projection range of the constituent atoms of the material existing in the layer formed on the oxide film.

  Therefore, for example, in a MOS type single crystal Si thin film transistor, the hydrogen ion irradiated to the single crystal Si substrate collides with the constituent atoms of the gate electrode material or the metal wiring material, and is ejected by elastic scattering. The constituent atoms of the electrode material pass through the oxide film, reach the single crystal Si, and it is possible to prevent deterioration in characteristics or reliability due to contamination of the single crystal Si portion.

  More preferably, the thickness of the single crystal Si substrate having the hydrogen ion implanted portion is approximately 100 microns or less.

  Therefore, the single crystal Si layer can be reduced to about 1/10 of the original substrate, and the bending rigidity of the Si substrate is reduced. Therefore, the same bonding is applied to fine irregularities due to surface scratches or particles on the glass substrate side. Even if it is an energy condition, there is an effect that it is easy to follow and bend easily and can be less affected.

  Therefore, if it is the said thickness, the joining defect resulting from the surface flaw on the glass substrate side, particle | grains, etc. can be reduced significantly, without significantly impairing the handling property of the divided small thin Si substrate.

  After the non-single crystal Si thin film is formed on the insulating substrate, a surface region to which at least the single crystal Si from which the non-single crystal Si has been removed is bonded is preliminarily formed by a GCIB (Gas Cluster Ion Beam) of a halide of about 3 keV. It is more preferable to planarize.

Therefore, when irradiated with low energy (about 3 kev) oxygen or halide GCIB, the Si or SiO ₂ surface is lightly etched and the microroughness of the surface is improved. Therefore, the success rate of bonding can be greatly improved as compared with the conventional bonding of Si substrates.

(A)-(i) is sectional drawing which shows one Embodiment of this invention and shows the manufacturing process of a semiconductor device. (A)-(i) is other embodiment which concerns on this invention, and is sectional drawing which shows the manufacturing process of a semiconductor device. (A)-(i) is sectional drawing which shows other embodiment concerning this invention, and shows the manufacturing process of a semiconductor device. FIG. 4 is a cross-sectional view schematically showing a configuration of the bipolar single crystal Si thin film transistor shown in FIG. 3. (A)-(f) is sectional drawing which shows further another embodiment which concerns on this invention, and shows the manufacturing process of a semiconductor device. (A)-(i) is sectional drawing which shows other embodiment concerning this invention, and shows the manufacturing process of a semiconductor device. It is a top view which shows the active-matrix board | substrate produced using the semiconductor device which concerns on this invention. It is a graph which shows the difference of the linear expansion of single crystal Si and a glass substrate with respect to the temperature of room temperature to 600 degreeC in the semiconductor device which concerns on this invention. It is a conceptual diagram at the time of aligning single crystal Si and a glass substrate at room temperature in the manufacturing method of the semiconductor device of this invention.

Explanation of symbols

1a / 1b / 1c Non-single crystal Si thin film transistor
2 Insulating substrate
3 SiO ₂ film (oxide film)
8 SiO ₂ film (interlayer planarization insulating film)
4 SiO ₂ film (interlayer insulating film)
5 Amorphous Si thin film
5 'non-single crystal Si thin film
6.12 Gate electrode
7.13 61 SiO ₂ film (gate insulation film)
10a ・ 10b ・ 10c Single crystal Si substrate
11 Unnecessary parts
14a ・ 14b Single crystal Si thin film
15 Hydrogen ion implantation part
16a, 16b Single crystal Si thin film transistor 20, 30, 40, 50, 60 Semiconductor device
21 Contact hole
22 Metal wiring
25 Collector
26 base
27 Emitter
51 Amorphous Si thin film
51 'continuous grain boundary Si thin film
52 Non-single crystal Si thin film
62 Silicon nitride film
63 Amorphous Si film
64 N ⁺ amorphous Si film
65 Metal film
70 Active matrix substrate
71 Drive circuit
72 Display section
90 CCD camera for alignment
91 Positioning stage
93 Alignment mark on glass substrate
94 Alignment mark on single crystal Si

Claims (7)

In a method for manufacturing a semiconductor device in which a single crystal Si thin film device and a non-single crystal Si thin film device are formed on an insulating substrate,
A single crystal Si substrate provided with a hydrogen ion implantation portion that is planarized after an oxide film, a gate pattern, and an impurity ion implantation portion are formed on the surface and in which hydrogen ions of a predetermined concentration are implanted at a predetermined depth. After bonding to the insulating substrate by heat treatment and further cleaving and peeling by heat treatment in the hydrogen ion implanted portion,
Before forming the non-single crystal Si thin film, an interlayer insulating film is formed, and the non-single crystal Si thin film is formed on the interlayer insulating film in a region different from the single crystal Si thin film device. A method for manufacturing a semiconductor device.   2. The method of manufacturing a semiconductor device according to claim 1, wherein an inter-protection insulating film, a contact hole, and a metal wiring are formed on the single crystal Si thin film device. In a method for manufacturing a semiconductor device in which a single crystal Si thin film device and a non-single crystal Si thin film device are formed on an insulating substrate,
After forming the non-single-crystal Si thin film on the insulating substrate, at least the non-single-crystal Si is removed, and a surface region to which the single-crystal Si substrate is to be bonded is preliminarily formed by a GCIB (Gas Cluster Ion Beam) of about 3 keV halide. Flatten,
A single crystal Si substrate provided with a hydrogen ion implantation portion that is planarized after an oxide film, a gate pattern, and an impurity ion implantation portion are formed on the surface and in which hydrogen ions of a predetermined concentration are implanted at a predetermined depth. A method for manufacturing a semiconductor device, wherein the semiconductor device is bonded to an insulating substrate by heat treatment, and further cleaved and peeled off by heat treatment in a hydrogen ion implanted portion. The monocrystalline Si thin film device, a method of manufacturing a semiconductor device according to any one of claim 1 to 3, characterized in that a MOS single-crystal Si thin film transistor. The monocrystalline Si thin film device, a method of manufacturing a semiconductor device according to any one of claim 1 to 3, characterized in that a bipolar type single-crystal Si thin film transistor. The hydrogen ion implantation energy is obtained by subtracting the energy corresponding to the projection range of hydrogen ions corresponding to the film thickness of the oxide film from the hydrogen ion implantation energy, the energy corresponding to the film thickness of the oxide film, manufacturing a semiconductor device according to claim 1 or 3, characterized in that it is set to be smaller than the energy corresponding to the projection range of the constituent atoms of the material present in the formed on the oxide film layer Method. The method of manufacturing a semiconductor device according to claim 1 or 3, wherein the thickness of the single crystal Si substrate having the hydrogen ion implantation section is equal to or less than approximate 100 microns.

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