JP5057968B2 - 分離可能な操作モジュールおよび流体保持モジュールを有するマイクロ流体装置 - Google Patents

分離可能な操作モジュールおよび流体保持モジュールを有するマイクロ流体装置 Download PDF

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Publication number
JP5057968B2
JP5057968B2 JP2007513234A JP2007513234A JP5057968B2 JP 5057968 B2 JP5057968 B2 JP 5057968B2 JP 2007513234 A JP2007513234 A JP 2007513234A JP 2007513234 A JP2007513234 A JP 2007513234A JP 5057968 B2 JP5057968 B2 JP 5057968B2
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Japan
Prior art keywords
module
fluid
valve
valve device
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2007513234A
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English (en)
Japanese (ja)
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JP2008501934A (ja
Inventor
ピー ウェル リチャード
Original Assignee
ザ エアロスペース コーポレーション
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Filing date
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Priority claimed from US10/843,515 external-priority patent/US7694694B2/en
Application filed by ザ エアロスペース コーポレーション filed Critical ザ エアロスペース コーポレーション
Publication of JP2008501934A publication Critical patent/JP2008501934A/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0036—Operating means specially adapted for microvalves operated by temperature variations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0046—Electric operating means therefor using magnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K2099/0069—Bistable microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
JP2007513234A 2004-05-10 2005-05-09 分離可能な操作モジュールおよび流体保持モジュールを有するマイクロ流体装置 Expired - Fee Related JP5057968B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10/843,515 2004-05-10
US10/843,515 US7694694B2 (en) 2004-05-10 2004-05-10 Phase-change valve apparatuses
US10/877,691 2004-06-24
US10/877,691 US7757717B2 (en) 2004-05-10 2004-06-24 Microfluidic devices with separable actuation and fluid-bearing modules
PCT/US2005/015979 WO2005111435A2 (fr) 2004-05-10 2005-05-09 Dispositifs microfluidiques a modules support de fluide et a actionnement separable

Publications (2)

Publication Number Publication Date
JP2008501934A JP2008501934A (ja) 2008-01-24
JP5057968B2 true JP5057968B2 (ja) 2012-10-24

Family

ID=35394759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007513234A Expired - Fee Related JP5057968B2 (ja) 2004-05-10 2005-05-09 分離可能な操作モジュールおよび流体保持モジュールを有するマイクロ流体装置

Country Status (3)

Country Link
EP (1) EP1759120A4 (fr)
JP (1) JP5057968B2 (fr)
WO (1) WO2005111435A2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016217241A1 (de) * 2016-09-09 2018-03-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Klebeelement und Ventilanordnung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19648695C2 (de) * 1996-11-25 1999-07-22 Abb Patent Gmbh Vorrichtung zur automatischen und kontinuierlichen Analyse von Flüssigkeitsproben
US6167910B1 (en) * 1998-01-20 2001-01-02 Caliper Technologies Corp. Multi-layer microfluidic devices
US6086740A (en) * 1998-10-29 2000-07-11 Caliper Technologies Corp. Multiplexed microfluidic devices and systems
US6282907B1 (en) * 1999-12-09 2001-09-04 International Business Machines Corporation Thermoelectric cooling apparatus and method for maximizing energy transport
US7351376B1 (en) * 2000-06-05 2008-04-01 California Institute Of Technology Integrated active flux microfluidic devices and methods
JP3333876B2 (ja) * 2000-07-24 2002-10-15 独立行政法人産業技術総合研究所 光駆動型集積化学システム
JP2002214243A (ja) * 2001-01-19 2002-07-31 Nec Corp 液流制御方法、液流制御機構及び該液流制御機構を備えたバイオセンサ
JP3746207B2 (ja) * 2001-05-15 2006-02-15 株式会社日立製作所 シート型マイクロリアクタ及びモバイル型化学分析装置
JP2003278489A (ja) * 2002-03-27 2003-10-02 Mitsubishi Heavy Ind Ltd トンネル掘削機
JP2003299485A (ja) * 2002-04-10 2003-10-21 Sekisui Chem Co Ltd 温度制御型マイクロリアクター及びマイクロリアクターシステム
US6679279B1 (en) * 2002-07-10 2004-01-20 Motorola, Inc. Fluidic valve having a bi-phase valve element
US6806543B2 (en) * 2002-09-12 2004-10-19 Intel Corporation Microfluidic apparatus with integrated porous-substrate/sensor for real-time (bio)chemical molecule detection
JP4119217B2 (ja) * 2002-10-10 2008-07-16 財団法人川村理化学研究所 マイクロ流体素子、流体処理デバイス、および流体処理方法

Also Published As

Publication number Publication date
JP2008501934A (ja) 2008-01-24
EP1759120A4 (fr) 2012-06-27
WO2005111435A3 (fr) 2007-12-13
WO2005111435A2 (fr) 2005-11-24
EP1759120A2 (fr) 2007-03-07

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