JP5028140B2 - Holder, polishing apparatus, polishing method - Google Patents

Description

  The present invention relates to a holder, a polishing apparatus, and a polishing method. For example, the present invention relates to a technique effective for polishing a polished object such as an optical element.

  For example, when a spherical or planar lens used in an optical apparatus such as a camera or a microscope is ground and polished, a lens holder that holds the lens may be used. In particular, the lens holder is indispensable in the polishing process in which it is difficult to perform so-called single ball processing, in which the thickness in the optical axis direction is thin and the lens is polished without being attached to a jig or the like.

  When such a lens holder is used, for example, in the case of a lens having a thin outer edge (so-called edge part), the edge part is buried in the holder in order to prevent displacement during polishing. There has been a technical problem that it cannot be easily removed from the holder after processing.

  For this reason, for example, in Patent Document 1, an inner frame that supports the back side of a lens to be polished is accommodated in a cup-shaped outer cylinder so that the outer edge of the lens is held at the open end of the outer cylinder. In the lens holding member, a technique for facilitating the attachment / detachment of the lens from the holder manually by providing at least one notch at the opening end portion of the outer cylinder in contact with the edge portion of the lens is disclosed. ing.

However, in the lens holding member disclosed in Patent Document 1, stress concentration occurs on the lens being processed at the cutout portion of the outer cylinder that supports the outer edge of the lens.
That is, the outer cylinder part has a role of supporting the edge part of the lens so that the lens being processed is not detached from the holder when the lens is attached to the lens holding member and grinding or polishing is performed. If there is a notch in the area of the outer cylinder that is in contact with the edge, stress concentration occurs due to the processing force at the edge of the notch, and damage such as chipping of the edge occurs.

  In particular, the lens holding member disclosed in Patent Document 1 is assumed to be applied to a lens that has a thin edge portion and is less likely to be detached from the holder manually, as described above. If there is a notch in the outer cylinder supporting the part, there is a concern that the thin edge part may be easily damaged due to stress concentration in the notch part.

In addition, if stress concentration occurs in the edge due to the notch in the outer tube, lens deformation of the edge is likely to occur. Especially when applied to a lens with a thin edge, the thin edge easily becomes easier with stress concentration. Therefore, there is a concern that the shape accuracy of the spherical surface or the plane portion subjected to grinding or polishing may be lowered.
Japanese Patent Laid-Open No. 11-10503

  It is an object of the present invention to easily attach and detach an object to be polished without causing damage to the edge part or a decrease in shape accuracy in grinding or polishing of an object to be polished such as an optical element having a relatively thin edge part (outer edge part). It is to provide a retention technique that can be used.

A first aspect of the present invention is a holder for holding an object to be slidably contacted with a polishing tool,
A substrate which have a said support surface configured to support the rear side of the object to be polished,
A cylindrical body comprising a holding portion configured to movably accommodate the substrate in the thickness direction of the object to be polished and to support an outer edge portion of the object to be polished on the inner peripheral surface of the front end portion thereof. When,
In the front-rear direction of the cylinder, which is the thickness front-rear direction of the object to be polished,
A position where the support surface is arranged behind the holding portion;
The position where the support surface is arranged forward from this position, and the outer edge of the object to be polished is separated from the holding part;
An operation unit that can be moved to slide between,
A holding tool is provided.

According to a second aspect of the present invention, in the holder according to the first aspect,
Furthermore, an elastic body that urges the base material to a position where the support surface of the base material is arranged on the rear end side from the holding portion;
A regulating member capable of holding the base material in the position ;
A holding tool is provided.

According to a third aspect of the present invention, in the holder according to the first aspect or the second aspect,
Provided is a holder that relatively biases the base material in a direction in which the base material is pulled into the cylindrical body by an extension force of the elastic body that is compressed and deformed.

According to a fourth aspect of the present invention, in the holder according to the first aspect or the second aspect,
Provided is a holder that relatively biases the base material in a direction in which the base material is pulled into the cylindrical body by a contraction force of the elastic body that has been stretched and deformed.

According to a fifth aspect of the present invention, a base material that supports the back side of an object to be polished is movably disposed in a thickness direction of the object to be polished inside a cylindrical body that supports an outer edge portion of the object to be polished. Process,
Attaching the back side of the object to be polished to the substrate inside the cylinder, and polishing the object to be polished by supporting an outer edge of the object to be polished by the cylinder;
Displacing the base material in a direction protruding from the cylindrical body and detaching the outer edge of the object to be polished from the cylindrical body;
A polishing method comprising:

According to a sixth aspect of the present invention, in the polishing method according to the fifth aspect ,
A polishing method is provided in which a regulating member that regulates a relative position in a direction in which the base material is pulled into the cylindrical body is disposed between the base material and the cylindrical body.

  According to the present invention, the object to be polished can be easily detached without causing damage to the edge or lowering the shape accuracy in grinding or polishing of the object to be polished such as an optical element having a relatively thin edge (outer edge). Retention technology that can be provided.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(Embodiment 1)
FIG. 1 is a cross-sectional view showing an example of the configuration of a holder portion of a polishing apparatus that performs a polishing method according to an embodiment of the present invention. FIGS. 2A, 2B, and 2C are diagrams illustrating an example of the present invention. It is sectional drawing which shows an example of the operation state of the holder of the grinding | polishing apparatus which is embodiment.

In the present embodiment, a polishing apparatus M that performs polishing of a lens 2 such as a convex lens using the holder 1 will be described.
In this case, when one of the two optical surfaces of the lens 2 becomes the polishing surface 2 a to be polished, the opposite optical surface becomes the back surface 2 b held by the holder 1.

As illustrated in FIG. 1, the polishing apparatus M of the present embodiment includes a holder 1 that supports the lens 2 and a polishing dish 3 as a polishing tool.
In order to polish the lens 2 via the holder 1, the holder 1 is engaged with a cantilever 10 (drive mechanism) which is a part of the polishing apparatus M via a universal joint portion 10 a so as to be tiltable and rotatable. The lens 2 held inside the holder 1 is pressed against a polishing dish 3 having a spherical polishing action surface 3a obtained by roughly inverting the spherical shape that is the polishing surface 2a of the lens 2.

  Then, by the mutual rotation and swinging motion of the polishing plate 3 that is rotationally driven and swinged by the drive shaft 3b (drive mechanism) and the holder 1 that is tiltably supported by the Kanzashi 10 via the universal joint portion 10a. The polishing surface 2a of the lens 2 is polished.

  The holder 1 of the first embodiment that holds the lens 2 accommodates the receiving member 6 that supports the spherical surface (back surface 2b) opposite to the polishing surface 2a of the lens 2, and the receiving member 6 and the lens 2 therein. And a bottomed cylindrical outer cylinder 7 (cylinder) that supports the edge 2c, which is the outer edge of the lens 2.

  The tip portion of the outer cylinder 7 is fixed to the back surface of the receiving member 6 (base material 5) around the Kanzashi hole 11 through which the Kanzashi 10 penetrates through the through hole 7b of the outer cylinder 7 so as to be displaceable. A plurality of screws 9 are provided, and a compressed spring 8 (elastic body) is disposed between a large-diameter screw head 9 a of the screw 9 and the bottom surface of the outer cylinder 7.

  Thereby, the receiving member 6 and the outer cylinder 7 of the holder 1 are engaged with each other through the screw 9 and the spring 8 so as to be relatively displaceable in the thickness direction of the lens 2 and are assembled in a compressed state. The receiving member 6 is constantly urged in the direction in which it is relatively pulled into the outer cylinder 7 by the urging force of the spring 8 in the extending direction.

  Here, the receiving member 6 that comes into contact with the back surface 2 b of the lens 2 includes a base material 5 and a buffer material 4. The base material 5 is made of a metal such as brass or stainless steel, which does not deform due to the pressure of the polishing process. The buffer material 4 attached to the surface of the base material 5 does not cause contact scratches or the like on the lens 2, and In order to ensure a high frictional force, it is made of a resin such as polyurethane.

  The outer cylinder 7 that supports the edge 2c of the lens 2 is made of a relatively soft metal such as brass or aluminum or a resin such as polyacetal, Teflon (registered trademark), or polyimide so that the edge 2c is not damaged during processing. The

  Further, a tapered surface 7 a that matches the curvature of the polishing dish 3 is formed at the opening end of the outer cylinder 7 that surrounds the edge 2 c of the lens 2, and the polishing action surface 3 a of the polishing dish 3 becomes the polishing surface 2 a of the lens 2. It has a structure that does not interfere with the polishing dish 3 when sliding.

Next, the operation of the polishing apparatus M and the holder 1 according to the first embodiment will be described with reference to FIGS. 2A, 2B, and 2C.
FIG. 2A is a cross-sectional view of a state in which a lens 2 as a workpiece is attached to the holder 1 of the present embodiment. FIG. 2B is a cross-sectional view showing the lens 2 that has been processed is removed from the holder 1 in the present embodiment. FIG. 2C is a cross-sectional view showing a state where the holder 1 of the present embodiment does not hold the lens or does not perform processing.

  First, as shown in FIG. 2C, in the normal state, the holder 8 is compressed and mounted, and the spring 8 tries to push back the screw 9 and the outer cylinder 7 so as to release the compression force. For this reason, the receiving member 6 to which the distal end portion of the screw 9 is screwed is relatively pulled into the outer cylinder 7 by the restoring force of the spring 8 and is held so as to come into contact with the bottom portion of the outer cylinder 7.

  In this state, as shown in FIG. 2A, the lens 2 is attached to the opening of the outer cylinder 7. The lens 2 is supported by a base material 5 via a cushioning material 4 as a receiving member 6 on the back surface 2b opposite to the polishing surface 2a to be polished.

  Since the cushioning material 4 constituting the receiving member 6 is held in contact with the back surface 2b, which is the optical surface of the lens 2, a polyurethane or resin sheet that does not cause defects such as scratches on the optical surface is used. it can. In addition to the occurrence of scratches on the back surface 2b of the lens 2, the cushioning material 4 is used to prevent the lens 2 from being deformed by the pressure during the polishing process by holding the lens 2 in contact with the back surface 2b as evenly as possible. The material of is important. On the other hand, since it is necessary for the base material 5 to support the lens 2 from the processing pressure via the buffer material 4, for example, a metal such as brass, stainless steel, or aluminum is often used.

The lens 2 with the back surface 2 b supported by the receiving member 6 is inserted into the outer cylinder 7, and the edge portion 2 c contacts the inner circumference of the outer cylinder 7 to support the radial displacement of the lens 2.
At this time, the lens 2 using the holder 1 of the first embodiment has the edge portion 2c having a relatively thin shape as shown in FIGS. 2A, 2B, and 2C. In order to prevent breakage of 2c, a relatively soft material is used for the outer cylinder 7. Specifically, for example, if it is a metal, brass or aluminum can be used, or a resin such as polyacetal or polyimide can be used.

  As shown in FIG. 1 described above, the lens 2 attached to the holder 1 as shown in FIG. 2A is attached to the Kanzashi 10 of the polishing apparatus M via the universal joint portion 10a, and the polishing surface 2a. After the polishing process is performed, it is necessary to remove the lens 2 from the holder 1.

  At this time, since the edge portion 2c of the lens 2 of the present embodiment is very thin and is embedded in the outer cylinder 7, it cannot be easily removed from the outer cylinder 7 as it is. In particular, on the back surface 2b in contact with the receiving member 6, the processing liquid and water during the polishing process enter and are strongly adhered and held by the buffer material 4 and the surface tension, and cannot be easily removed. If the edge portion 2c is forcibly hooked and taken out by a tool or the like, the thin edge portion 2c may be damaged. In particular, the outer cylinder 7 and the edge portion 2c are usually used for the purpose of preventing radial displacement. The gap is set small and cannot be easily taken out as it is.

  Here, in the holder 1 according to the present embodiment, the receiving member 6 and the outer cylinder 7 are engaged with each other by the spring 8 as described above, so that the biasing force by the spring 8 is resisted. By pushing the receiving member 6 relative to the outer cylinder 7 as indicated by the arrow 2B, the receiving member 6 and the lens 2 can be protruded from the outer cylinder 7 while being integrated.

  That is, by pushing the base member 5 of the receiving member 6 with a force larger than the urging force of the spring 8, the receiving member 6 and the lens 2 are fed out of the outer cylinder 7 so that the edge portion 2c of the lens 2 is exposed. The lens 2 can be easily removed from the outer cylinder 7 by gripping the exposed edge 2c.

After the lens 2 is taken out, if the force pressing the receiving member 6 is released, the initial state shown in FIG.
That is, as shown in FIG. 2C, the receiving member 6 and the outer cylinder 7 are engaged by the restoring force of the spring 8 even in a normal state, but in order to take out the mounted lens 2 from the outer cylinder 7, The lens 2 can be taken out by pushing the receiving member 6 with a force stronger than the restoring force, and when this pressing force is released, the normal state shown in FIG. Can be made.

  Further, in the holder 1 of the first embodiment, the spring 8 is used as an example to engage the receiving member 6 and the outer cylinder 7, but an elastic body such as compressed rubber or a balloon may be used. It is clear that the same effect can be obtained.

When the spring 8 is used as in the present embodiment, there is an advantage that the restoring force (biasing force) can be easily set by adjusting the spring constant.
On the other hand, for example, when rubber is used instead of the spring 8, if the elastic characteristics of the rubber material can be set, a stable urging force can be exerted even in an environment where water or an abrasive is supplied by grinding or polishing, There is an advantage that the structure of the holder 1 can be simplified.

  According to the first embodiment, the lens 2 having the relatively thin edge portion 2c is not caused to cause stress concentration at a specific position of the edge portion 2c by the outer cylinder 7, that is, the edge portion 2c of the lens 2 is not chipped. It can be held stably over the entire circumference without causing deformation of the optical surface in the vicinity of the edge portion 2c, and easily held by pushing the receiving member 6 of the holder 1 relative to the outer cylinder 7. The lens 2 can be removed from the tool 1.

Further, according to the polishing apparatus M of the present embodiment, it is possible to improve the yield by preventing the edge portion 2c of the lens 2 from being damaged in the polishing process, and to deform the optical surface in the vicinity of the edge portion 2c. The lens 2 can be polished with high shape accuracy.
(Embodiment 2)
Next, a holder 1A according to Embodiment 2 of the present invention will be described with reference to FIGS. 3A and 3B. In the second embodiment, a spring 8 that engages the receiving member 6 of the holder 1A and the outer cylinder 7 is incorporated in an extended state. The point that the receiving member 6 and the outer cylinder 7 are engaged with each other by the biasing force of the spring 8 constantly biasing the receiving member 6 in the direction in which the receiving member 6 is relatively pulled into the outer cylinder 7 is described above. This is different from the first embodiment.

3A shows a cross-sectional view of the holder 1A in a normal state and a state in which the lens 2 is held, and FIG. 3B shows a cross-sectional view in a state in which the lens 2 is taken out.
Constituent parts that are the same as those of the holder 1 of the first embodiment described above are denoted by the same reference numerals and description thereof is omitted.

In the holder 1A of the second embodiment, the spring hole 5a and the spring hole 7c are provided at corresponding positions around the base hole 5 of the receiving member 6 and the perforated hole 11 on the bottom surface of the outer cylinder 7.
The spring 8 is incorporated in the spring hole 5a and the spring hole 7c in an extended state, and the upper end and the lower end of the spring 8 are respectively connected to the inner periphery of the spring hole 7c and the spring hole 5a by the fixing pins 12. It is fixed on the circumference.

As the biasing force of the spring 8, in addition to the usual elasticity, super elasticity may be used.
As a result, in this holder 1A, the receiving member 6 and the outer cylinder 7 are constantly urged in the direction in which the receiving member 6 is drawn into the outer cylinder 7 by the urging force of the spring 8 in the contracting direction. 6 is engaged with the base material 5 and the outer cylinder 7 in close contact with each other.

Hereinafter, the operation of the holder 1A of the second embodiment will be described.
In the second embodiment, the spring 8 that engages the receiving member 6 and the outer cylinder 7 is fixed to the receiving member 6 and the outer cylinder 7 in a stretched state extended from the natural length. A restoring force acting in the contraction direction to return to the length acts.

  The restoring force of the spring 8 is transmitted to the receiving member 6 and the outer cylinder 7 via the fixing pins 12 fixed to both ends thereof, and acts as a force for attracting both. For this reason, the receiving member 6 and the outer cylinder 7 are normally attracted by the spring 8, and the receiving member 6 and the outer cylinder 7 are in contact with each other as shown in FIG. 3A.

  In the state of FIG. 3A, the back surface 2b of the lens 2 is attached to the cushioning material 4 inside the outer cylinder 7 and the edge portion 2c is held by the outer cylinder 7 in the same manner as in the first embodiment. As illustrated in FIG. 5, the polishing operation surface 3 a of the polishing dish 3 and the polishing surface 2 a of the lens 2 are brought into sliding contact with each other to perform polishing.

  After this polishing process, it is difficult to remove from the outer cylinder 7 with a lens having a thin edge portion 2c. Therefore, also in the second embodiment, as shown in FIG. When the receiving member 6 is pressed against the outer cylinder 7 against the force, the receiving member 6 and the lens 2 are pushed out of the outer cylinder 7, and the edge portion 2c is exposed to the outside of the outer cylinder 7, so that the lens 2 can be easily taken out.

  At this time, in this embodiment, the spring 8 is mounted in an extended state, and the receiving member 6 is relatively attracted and held so as to abut against the bottom surface of the outer cylinder 7. Needs to be pushed out so that the spring 8 extends beyond the length of the mounted state.

When the pressing force is released, the extending spring 8 attracts the receiving member 6 and the outer cylinder 7 so as to return to the original state, and the two members come into contact with each other and return to the engaged state as shown in FIG. 3A.
Since the holder 1A of the second embodiment uses the contraction force of the spring 8, the spring 8 can be accommodated inside the spring hole 5a and the spring hole 7c provided in the receiving member 6 and the outer cylinder 7. In addition, when attaching to the polishing apparatus M or the like via the Kanzashi 10, there is no protrusion from the holder 1A, and installation is easy.
(Embodiment 3)
A holder 1B according to Embodiment 3 of the present invention will be described with reference to FIGS. 4A and 4B. The third embodiment is different from the first embodiment in that the engagement position of the receiving member 6 that is pressed and moved in the thickness direction of the lens 2 can be adjusted. The same parts as those in the first embodiment are denoted by the same reference numerals and description thereof is omitted.

FIG. 4A is a cross-sectional view showing a normal state of the holder 1B and a state where the lens 2 is held, and FIG. 4B is a cross-sectional view showing a position where the lens 2 is taken out from the holder 1B.
4A and 4B are based on the configuration of the holder 1 according to the first embodiment described above. However, even in the case of the configuration of the holder 1A illustrated in FIGS. It can be applied as it is.

  In the holder 1B according to the third embodiment, a female screw 11a is cut in the inner peripheral portion of the kanzashi hole 11 so as to be attached to the canned pin 10 of the polishing apparatus M provided in the central portion of the outer cylinder 7. A regulating ring 15 (regulating member) in which a male screw is formed is screwed.

  The restriction ring 15 is screwed into the Kanzashi hole 11 so as to protrude from the contact surface of the outer cylinder 7 with respect to the receiving member 6 (base material 5). Thereby, the regulation ring 15 is attached so that it may be pinched | interposed between the contact member 6 and the contact surface of the outer cylinder 7 which closely_contact | adhere with the extension force of the spring 8 provided between the outer cylinder 7 and the screw 9. FIG.

  Here, the regulating ring 15 is sandwiched between the receiving member 6 and the outer cylinder 7 and acts to regulate each other's position. Therefore, the regulating ring 15 does not particularly define the material. For example, a metal such as brass, aluminum, stainless steel, A resin that can appropriately withstand the compressive force of the spring 8 such as a polyimide resin may be used.

Hereinafter, the operation of the holder 1B of the third embodiment will be described.
According to the configuration of the holder 1 </ b> B of the third embodiment described above, the regulating ring 15 screwed into the outer hole 11 of the outer cylinder 7 contacts the receiving member 6 by the contraction force of the spring 8, and receives the outer cylinder 7 and the receiving ring 7. It will be sandwiched between the members 6.

  When the receiving member 6 is brought into contact with and engaged with the restriction ring 15, the screwing position of the restriction ring 15 with respect to the Kanzashi hole 11, that is, the protrusion from the bottom surface of the outer cylinder 7, as shown in FIG. A gap G is formed between the bottom surface.

  That is, in the third embodiment, since the regulating ring 15 is screwed into the Kanzashi hole 11 of the outer cylinder 7, the position of the regulating ring 15 can be moved in the thickness direction of the lens 2. The gap G can be adjusted by changing the position to be in contact with the receiving member 6 by adjusting the mounting position with respect to the 7 Kanzashi hole 11.

  When the gap G is changed, the relative position between the outer cylinder 7 and the receiving member 6 changes, so that the positional relationship between the outer cylinder 7 and the lens 2 held by the receiving member 6 also changes. The protrusion amount H of the edge portion 2c of the lens 2 from 7a) changes.

  The holder 1B of the third embodiment is effective for the lens 2 having a thin edge portion 2c that is difficult to be removed from the holder 1B, as in the above-described embodiments. The workability at the time of detachment of the lens 2 is improved, and the protrusion amount H of the edge portion 2c can be adjusted, so that the edge portion 2c with respect to the outer cylinder 7 can be adjusted according to the thickness of the edge portion 2c, the manufacturing dimensions of the receiving member 6, and the like. Optimum adjustment of the mounting position can be performed.

  Specifically, according to the actual production dimensions (performance) of the receiving member 6 and the outer cylinder 7, the receiving member can be changed by changing the mounting position of the restriction ring 15 with respect to the outer cylinder 7 with the actual lens 2 attached. Regardless of variations in manufacturing dimensions of the outer cylinder 7 and the outer cylinder 7, the protrusion amount H of the edge 2c from the tapered surface 7a of the outer cylinder 7 can be optimally adjusted according to the dimension of the edge 2c.

  Thus, according to the holder 1B of the third embodiment, in addition to the same effects as the above-described embodiments, the edge portion is adjusted by adjusting the attachment position of the restriction ring 15 attached to the outer cylinder 7. The holding position of the outer cylinder 7 with respect to the thin lens 2 of 2c can be adjusted easily and accurately.

  In other words, even if the receiving member 6 and the outer cylinder 7 are not more expensive than necessary and manufactured with high accuracy, by optimizing the mounting position of the lens 2 on the receiving member 6 and the outer cylinder 7 by the restriction ring 15, The polishing accuracy of the polishing surface 2a of the lens 2 can be improved.

  As described above, according to each embodiment of the present invention, even if the edge portion 2c is a thin lens 2, damage to the edge portion 2c of the lens 2 or the optical surfaces (the polishing surface 2a and the back surface 2b). The polishing surface 2a can be easily polished and the lens 2 can be detached from the holder 1 (polishing apparatus M) without causing deterioration in shape accuracy.

Needless to say, the present invention is not limited to the configuration exemplified in the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, the object to be polished is not limited to the optical element such as the lens 2 but can be widely applied to a polishing process for general precision parts.

It is sectional drawing which shows an example of a structure of the part of the holder of the grinding | polishing apparatus which implements the grinding | polishing method which is one embodiment of this invention. It is sectional drawing which shows an example of the operation state of the holder of the grinding | polishing apparatus which is one embodiment of this invention. It is sectional drawing which shows an example of the operation state of the holder of the grinding | polishing apparatus which is one embodiment of this invention. It is sectional drawing which shows an example of the operation state of the holder of the grinding | polishing apparatus which is one embodiment of this invention. It is sectional drawing which shows an example of the operation state of the holder of the grinding | polishing apparatus which is other embodiment of this invention. It is sectional drawing which shows an example of the operation state of the holder of the grinding | polishing apparatus which is other embodiment of this invention. It is sectional drawing which shows an example of the operation state of the holder of the grinding | polishing apparatus which is further another embodiment of this invention. It is sectional drawing which shows an example of the operation state of the holder of the grinding | polishing apparatus which is further another embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Holding tool 1A Holding tool 1B Holding tool 2 Lens 2a Polishing surface 2b Back surface 2c Edge part 3 Polishing plate 3a Polishing action surface 3b Drive shaft 4 Buffer material 5 Base material 5a Spring hole 6 Receiving member 7 Outer cylinder 7a Tapered surface 7b Through hole 7c Spring hole 8 Spring 9 Screw 9a Screw head 10 Kanzashi 10a Universal joint part 11 Kanzashi hole 11a Female screw 12 Fixing pin 15 Restriction ring G Clearance H Protrusion M Polishing device

Claims (6)

A holding tool for holding an object to be slid in contact with a polishing tool,
A substrate which have a said support surface configured to support the rear side of the object to be polished,
A cylindrical body comprising a holding portion configured to movably accommodate the substrate in the thickness direction of the object to be polished and to support an outer edge portion of the object to be polished on the inner peripheral surface of the front end portion thereof. When,
In the front-rear direction of the cylinder, which is the thickness front-rear direction of the object to be polished,
A position where the support surface is arranged behind the holding portion;
The position where the support surface is arranged forward from this position, and the outer edge of the object to be polished is separated from the holding part;
An operation unit that can be moved to slide between,
A holder characterized by comprising. The holder according to claim 1, wherein
Furthermore, an elastic body that urges the base material to a position where the support surface of the base material is arranged on the rear end side from the holding portion;
A regulating member capable of holding the base material in the position ;
A holding tool characterized by comprising: The holder according to claim 1 or 2,
A holder that relatively biases the base material in a direction in which the base material is pulled into the cylindrical body by an extension force of the elastic body that is compressed and deformed. The holder according to claim 1 or 2,
The holder according to claim 1, wherein the base member is relatively biased in a direction in which the base member is pulled into the cylindrical body by a contraction force of the elastic body that has been stretched and deformed. A step of disposing a base material supporting the back side of the object to be polished movably in a thickness direction of the object to be polished inside a cylindrical body that supports an outer edge portion of the object to be polished;
Attaching the back side of the object to be polished to the substrate inside the cylinder, and polishing the object to be polished by supporting an outer edge of the object to be polished by the cylinder;
Displacing the base material in a direction protruding from the cylindrical body and detaching the outer edge of the object to be polished from the cylindrical body;
A polishing method comprising: The polishing method according to claim 5 , wherein
A polishing method, wherein a regulating member that regulates a relative position in a direction in which the base material is pulled into the cylindrical body is disposed between the base material and the cylindrical body.

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