JP5025374B2 - Holder, polishing method - Google Patents

Holder, polishing method Download PDF

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JP5025374B2
JP5025374B2 JP2007202361A JP2007202361A JP5025374B2 JP 5025374 B2 JP5025374 B2 JP 5025374B2 JP 2007202361 A JP2007202361 A JP 2007202361A JP 2007202361 A JP2007202361 A JP 2007202361A JP 5025374 B2 JP5025374 B2 JP 5025374B2
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receiving
sheet material
outer cylinder
lens
polished
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JP2009034784A (en
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尚之 岸田
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Olympus Corp
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Olympus Corp
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Description

本発明は、被研磨物の保持技術および研磨技術に関し、たとえば、カメラや顕微鏡等に用いられる球面あるいは平面形状のレンズ等の光学素子を研削、研磨加工する際に当該光学素子を保持する技術に関する。   The present invention relates to a technique for holding an object to be polished and a polishing technique. For example, the present invention relates to a technique for holding an optical element such as a spherical or planar lens used in a camera or a microscope when grinding and polishing the optical element. .

たとえば、カメラや顕微鏡等に用いられる球面あるいは平面形状のレンズを単玉加工で実施するレンズ保持具としては、特許文献1(特開平11-10503号公報)に開示される技術が知られている。   For example, as a lens holder that implements a spherical or planar lens used for a camera, a microscope, or the like by a single ball processing, a technique disclosed in Patent Document 1 (Japanese Patent Laid-Open No. 11-10503) is known. .

すなわち、特許文献1に開示される従来のレンズ保持具では、外筒部の中にレンズをレンズ受けシートで支える構成において、保持具からのレンズ着脱を容易にするために外筒部に少なくとも1ケ所以上の切り欠きを設けた構成が開示されている。また、外筒部をレンズ保持具本体に交換可能に取り付ける構成としている。   That is, in the conventional lens holder disclosed in Patent Document 1, in a configuration in which the lens is supported by the lens receiving sheet in the outer cylinder portion, at least one is attached to the outer cylinder portion in order to facilitate attachment / detachment of the lens from the holder. A configuration in which more than one notch is provided is disclosed. Moreover, it is set as the structure which attaches an outer cylinder part to a lens holder main body so that replacement | exchange is possible.

しかしながら、特許文献1に開示された従来のレンズ保持具では、レンズの脱着を容易にするために外筒部に切り欠きを設けているため、レンズを支える外筒部の切り欠き部分で加工中のレンズに対して応力集中が発生する懸念がある。   However, in the conventional lens holder disclosed in Patent Document 1, a cutout is provided in the outer cylinder portion in order to facilitate attachment / detachment of the lens. There is a concern that stress concentration occurs on the lens.

つまり研削や研磨加工を行う際にレンズ保持具にレンズを装着して加工を実施するが、外筒部は加工中のレンズが保持具から外れないようにレンズ外周部分であるコバ部を支える役目を有しているため、外筒部に切り欠きがあると、当該切り欠き部分で加工力による応力集中がコバ部に発生し、コバ部の破損(カケ)が発生する。   In other words, when grinding or polishing is performed, the lens holder is mounted with the lens for processing, but the outer cylinder part serves to support the edge part that is the outer periphery of the lens so that the lens being processed does not come off the holder. Therefore, if there is a notch in the outer cylinder part, stress concentration due to the processing force occurs in the notch part in the edge part, and the edge part is damaged (debris).

特に、特許文献1に開示されたレンズ保持具は、コバ部が薄く保持具よりレンズを脱着しにくいような場合を想定しており、その場合、コバ部を支える外筒に切り欠きがあると、その応力集中で薄いコバ部が一層容易に破損してしまう。   In particular, the lens holder disclosed in Patent Document 1 assumes a case where the edge portion is thin and it is more difficult to remove the lens than the holder, and in that case, there is a notch in the outer cylinder that supports the edge portion. The thin edge portion is more easily damaged by the stress concentration.

また、外筒部の切り欠きでコバ部に応力集中が発生すると、コバ部のレンズ変形も発生しやすく、特にコバ部が薄いレンズで利用すれば、応力集中に伴い薄いコバ部が容易に変形を生じる懸念があり、研削や研磨加工を施す球面や平面部分においても形状精度の低下が生じてしまう。   Also, if stress concentration occurs in the edge due to the cutout of the outer cylinder, lens deformation at the edge is likely to occur. Especially when the edge is used with a thin lens, the thin edge easily deforms due to stress concentration. There is a concern that the shape accuracy is reduced, and the shape accuracy is also deteriorated in the spherical surface or the flat surface portion subjected to grinding or polishing.

また、外筒部内でレンズをレンズ受けシートで支える場合、特許文献1に記載されているように両者が密着してレンズを容易に取り出すことができない。このレンズとレンズ受けシートの密着力は、レンズをレンズ受けシートから剥がす方向に力を加えたときに、両者が研磨の際の水により密着していることに起因して発生し、レンズを研磨加工している際にレンズが回転する方向に対しては弱いものである。   Further, when the lens is supported by the lens receiving sheet in the outer cylinder portion, as described in Patent Document 1, the two cannot be easily taken out and the lens cannot be easily taken out. This adhesion force between the lens and the lens receiving sheet is generated when the force is applied in the direction in which the lens is peeled off from the lens receiving sheet. It is weak against the direction in which the lens rotates during processing.

すなわち、レンズをレンズ受けシートから剥がす際には密着してはがれにくいが、研磨加工中の回転に伴う力に対しては保持力が弱く、レンズが保持具内で滑って空転してしまうことが多い。このためレンズのレンズ受けシートと接する保持面では互いの相対運動が発生し、これによるレンズ面へのキズやブツ(レンズ面に打痕のように生じる不良)などの不良が発生しやすいといった技術的課題がある。   That is, when the lens is peeled off from the lens receiving sheet, it is difficult to peel off, but the holding force is weak against the force accompanying the rotation during the polishing process, and the lens may slip and slip in the holder. Many. For this reason, the relative movement of each other occurs on the holding surface of the lens in contact with the lens receiving sheet, and this is likely to cause defects such as scratches and irregularities (defects that occur like dents on the lens surface). There are specific issues.

特にレンズの外径が小さくなると、レンズの回転軸近傍での研磨加工となるため、研磨皿との摩擦によるレンズおよび保持具の従属回転を与えるトルクが非常に小さくなり、所望の回転力でレンズを回すことが難しくなる。
特開平11-10503号公報
In particular, when the outer diameter of the lens is reduced, polishing is performed in the vicinity of the rotation axis of the lens, so that the torque that gives the subordinate rotation of the lens and the holder due to friction with the polishing dish becomes very small, and the lens with the desired rotational force. It becomes difficult to turn.
Japanese Patent Laid-Open No. 11-10503

本発明の目的は、コバ部が薄いレンズ等の被研磨物であっても、研削および研磨加工でコバ部の破損や精度低下を防止しながら、被研磨物を容易に脱着できるとともに、被研磨物の裏面へのキズ不良を防止しながら小径の被研磨物においても容易に回転を与えることができる保持技術を提供することにある。   It is an object of the present invention to be able to easily attach and detach an object to be polished while preventing damage to the edge part and a decrease in accuracy by grinding and polishing even if the object to be polished is a thin lens or the like. An object of the present invention is to provide a holding technique capable of easily rotating even a small-diameter workpiece while preventing defects on the back surface of the article.

本発明の第1の観点は、研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
厚さ方向において表裏をなす第1および第2主面の各々の摩擦係数が異なるシート材と、
前記外筒の内部に位置し、前記シート材を介して前記被研磨物を支える受け材と、
前記受け材を前記外筒内に引き込む方向に付勢する弾性体と、
を含む保持具を提供する。
A first aspect of the present invention is a holder for holding an object to be slidably contacted with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
Sheet materials having different friction coefficients of the first and second main surfaces that are front and back in the thickness direction;
A receiving material that is located inside the outer cylinder and supports the object to be polished via the sheet material,
An elastic body that urges the receiving member in a direction to be pulled into the outer cylinder;
A holding tool is provided.

本発明の第2の観点は、研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
前記被研磨物の被加工面と反対の保持面と接する受けシート材と、
前記受けシート材と接し当該受けシート材よりも摩擦係数が小さい滑りシート材と、
前記外筒の内部に位置し、前記滑りシート材と固着して前記被研磨物を支える支持材と、
前記支持材を前記外筒内に引き込む方向に付勢する弾性体と、
を含む保持具を提供する。
A second aspect of the present invention is a holder for holding an object to be slidably contacted with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
A receiving sheet material in contact with the holding surface opposite to the processing surface of the object to be polished;
A sliding sheet material in contact with the receiving sheet material and having a smaller coefficient of friction than the receiving sheet material;
A support material that is located inside the outer cylinder and is fixed to the sliding sheet material to support the object to be polished,
An elastic body that urges the support member in a direction in which the support member is pulled into the outer cylinder;
A holding tool is provided.

本発明の第3の観点は、研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
前記被研磨物の被加工面と反対の保持面と接する受けシート材と、
前記外筒の内部に位置し、前記受けシート材に固着し前記被研磨物を支える受け材と、
前記受け材と接し前記受けシート材よりも摩擦係数が小さい滑りシート材と、
前記外筒の内部に位置し、前記滑りシート材に固着して前記受け材を介して前記被研磨物を支える支持材と、
前記受け材を前記外筒内に引き込む方向に付勢する弾性体と、
を含む保持具を提供する。
A third aspect of the present invention is a holder for holding an object to be slidably contacted with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
A receiving sheet material in contact with the holding surface opposite to the processing surface of the object to be polished;
A receiving material that is located inside the outer cylinder and is fixed to the receiving sheet material and supports the object to be polished;
A sliding sheet material in contact with the receiving material and having a smaller coefficient of friction than the receiving sheet material;
A support material that is located inside the outer cylinder, is fixed to the sliding sheet material, and supports the object to be polished through the receiving material;
An elastic body that urges the receiving member in a direction to be pulled into the outer cylinder;
A holding tool is provided.

本発明の第4の観点は、研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
厚さ方向において表裏をなす第1および第2主面の各々の摩擦係数が異なるシート材と、
前記外筒の内部に位置し、前記シート材を介して前記被研磨物を支える受け材と、
受け材を前記外筒内に引き込む方向に付勢する弾性体と、
前記外筒と前記受け材の相対的な位置を前記被研磨物の厚さ方向に移動調節可能に支承する規制リングと、
を含む保持具を提供する。
A fourth aspect of the present invention is a holder for holding an object to be slidably contacted with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
Sheet materials having different friction coefficients of the first and second main surfaces that are front and back in the thickness direction;
A receiving material that is located inside the outer cylinder and supports the object to be polished via the sheet material,
An elastic body that urges the receiving material in a direction to be pulled into the outer cylinder;
A regulating ring that supports the relative position of the outer cylinder and the receiving member so as to be movable and adjustable in the thickness direction of the object to be polished;
A holding tool is provided.

本発明の第5の観点は、研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
前記被研磨物の被加工面と反対の保持面と接する受けシート材と、
前記受けシート材と接し当該受けシート材よりも摩擦係数が小さい滑りシート材と、
前記外筒の内部に位置し、前記滑りシート材と固着して前記被研磨物を支える受け材と、
前記受け材を前記外筒内に引き込む方向に付勢する弾性体と、
前記外筒と前記受け材の相対的な位置を前記被研磨物の厚さ方向に移動調節可能に支承する規制リングと、
を含む保持具を提供する。
A fifth aspect of the present invention is a holding tool for holding an object to be slidably contacted with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
A receiving sheet material in contact with the holding surface opposite to the processing surface of the object to be polished;
A sliding sheet material in contact with the receiving sheet material and having a smaller coefficient of friction than the receiving sheet material;
A receiving material that is located inside the outer cylinder and is fixed to the sliding sheet material to support the object to be polished;
An elastic body that urges the receiving member in a direction to be pulled into the outer cylinder;
A regulating ring that supports the relative position of the outer cylinder and the receiving member so as to be movable and adjustable in the thickness direction of the object to be polished;
A holding tool is provided.

本発明の第6の観点は、研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
前記被研磨物の被加工面と反対の保持面と接する受けシート材と、
前記外筒の内部に位置し、前記受けシート材に固着し前記被研磨物を支える受け材と、
前記受け材と接し前記受けシート材よりも摩擦係数が小さい滑りシート材と、
前記外筒の内部に位置し、前記滑りシート材に固着して前記受け材を介して前記被研磨物を支える支持材と、
前記支持材を前記外筒内に引き込む方向に付勢する弾性体と、
前記支持材を介して前記外筒と前記受け材の相対的な位置を前記被研磨物の厚さ方向に移動調節可能に支承する規制リングと、
を含む保持具を提供する。
A sixth aspect of the present invention is a holder for holding an object to be slidably contacted with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
A receiving sheet material in contact with the holding surface opposite to the processing surface of the object to be polished;
A receiving material that is located inside the outer cylinder and is fixed to the receiving sheet material and supports the object to be polished;
A sliding sheet material in contact with the receiving material and having a smaller coefficient of friction than the receiving sheet material;
A support material that is located inside the outer cylinder, is fixed to the sliding sheet material, and supports the object to be polished through the receiving material;
An elastic body that urges the support member in a direction in which the support member is pulled into the outer cylinder;
A regulating ring that supports the relative position of the outer cylinder and the receiving material through the support material so as to be movable and adjustable in the thickness direction of the object to be polished;
A holding tool is provided.

本発明の第7の観点は、被研磨物の研磨工具と摺接する被加工面と反対の保持面を、シート材を介して受け材に支承させる研磨方法であって、
前記シート材の前記保持面に接する第1主面の摩擦係数よりも、前記シート材の前記受け材に接する第2主面の摩擦係数を小さくする研磨方法を提供する。
A seventh aspect of the present invention is a polishing method for supporting a holding surface opposite to a processing surface in sliding contact with a polishing tool of an object to be polished on a receiving material via a sheet material,
A polishing method is provided in which the friction coefficient of the second main surface of the sheet material in contact with the receiving material is smaller than the friction coefficient of the first main surface of the sheet material in contact with the holding surface.

本発明によれば、コバ部が薄いレンズ等の被研磨物であっても、研削および研磨加工でコバ部の破損や精度低下を防止しながら、被研磨物を容易に脱着できるとともに、被研磨物の裏面へのキズ不良を防止しながら小径の被研磨物においても容易に回転を与えることができる保持技術を提供することができる。   According to the present invention, the object to be polished can be easily attached and detached while preventing damage to the edge part and deterioration of accuracy in grinding and polishing processes even if the object has a thin edge such as a lens. It is possible to provide a holding technique that can easily rotate even a small-diameter workpiece while preventing defects on the back surface of the article.

以下、図面を参照しながら、本発明の実施の形態について詳細に説明する。
まず、本発明の各態様につき、構成(手段)および作用を概括的に説明し、その後、図面を参照してさらに詳細に説明する。
[本発明の第1の態様および第2の態様に対する手段・作用]
(手段)
第1の態様では、レンズや平面ガラスの光学素子と工具を互いに擦り合わせ、互いの回転および揺動による相対運動にて光学素子を研削研磨加工する際に用いる光学素子の保持具において、光学素子の外径部を押さえる外筒と、厚さ方向における表裏にてその摩擦係数が異なるシート材と、シート材を介して光学素子を支える受け材と、前記外筒と受け材をその弾性力によって互いに押圧して介在する弾性体とを具備することを特徴とする光学素子の保持具を提供する。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
First, the configuration (means) and operation of each aspect of the present invention will be generally described, and then further detailed with reference to the drawings.
[Means and Actions for the First and Second Aspects of the Present Invention]
(means)
In the first aspect, in the optical element holder used when the optical element of a lens or flat glass and the tool are rubbed with each other, and the optical element is ground and polished by relative movement by rotation and swinging of each other, the optical element An outer cylinder that holds the outer diameter part of the sheet, a sheet material having different friction coefficients on the front and back in the thickness direction, a receiving material that supports the optical element via the sheet material, and the outer cylinder and the receiving material by the elastic force There is provided an optical element holder comprising an elastic body that is pressed against each other.

第2の態様では第1の態様に加え、光学素子の被加工面と反対の保持面に接するシート材の摩擦係数に対して、受け材と接する面の摩擦係数のほうが小さいことを特徴とする光学素子の保持具を提供する。
(作用)
レンズ保持具を構成する受け材と外筒は、圧縮され伸びようとする弾性材の復元力により互いが引きつけ合うように係合されている。この状態で加工を行うレンズを外筒内に挿入し、研削機や研磨機に装着して加工を実施する。このときレンズは加工される球面と反対側に有する球面とがシート材と接し、シート材を介してレンズをその厚さ方向に支え保持する受け材と、レンズの外径部にあたるコバ部と接触し、レンズをレンズの径方向に支える外筒によって保持された状態で加工が行われる。加工が終了するとレンズ保持具よりレンズを取り出す必要があるが、ここでレンズは外筒の内部に挿入されており、特にレンズのコバ部が薄い形状では外筒内部に埋没した状態であるため、容易に取り出すことができない。このため本発明の保持具では、レンズ球面を保持している受け材を外筒に対して押し出すことで、レンズが外筒より繰り出され容易に取り出すことができる。このとき受け材と外筒は圧縮され伸びようとしている弾性材の復元力によって互いに両者が引きつけ合うように力が作用しているため、この引きつける力に勝る力で受け材を外筒より押し出すことで、レンズを外筒内部より送り出すことができる。送り出したレンズを取り出した後は、受け材を押し出すことをやめる(押し出す力を緩める)ことで、通常よりさらに圧縮されていた弾性材の復元力によって両者が互いに引きつけ合い、元の状態に戻すことができる。
In the second aspect, in addition to the first aspect, the friction coefficient of the surface in contact with the receiving material is smaller than the friction coefficient of the sheet material in contact with the holding surface opposite to the processing surface of the optical element. An optical element holder is provided.
(Function)
The receiving member and the outer cylinder constituting the lens holder are engaged so as to attract each other by the restoring force of the elastic material that is compressed and stretched. A lens to be processed in this state is inserted into the outer cylinder and mounted on a grinding machine or a polishing machine for processing. At this time, the lens is in contact with the sheet material and the spherical surface on the opposite side of the lens is in contact with the receiving material for supporting and holding the lens in the thickness direction via the sheet material, and the edge portion corresponding to the outer diameter portion of the lens. Then, processing is performed in a state where the lens is held by an outer cylinder that supports the lens in the radial direction of the lens. When processing is completed, it is necessary to take out the lens from the lens holder, but here the lens is inserted inside the outer cylinder, especially when the edge of the lens is thin, it is buried inside the outer cylinder, It cannot be taken out easily. For this reason, in the holder of this invention, a lens can be drawn | fed out from an outer cylinder and can be taken out easily by pushing out the receiving material holding the lens spherical surface with respect to an outer cylinder. At this time, the receiving material and the outer cylinder are compressed so that they are attracted to each other by the restoring force of the elastic material that is going to stretch, so the receiving material is pushed out from the outer cylinder with a force that exceeds this attracting force. Thus, the lens can be sent out from the inside of the outer cylinder. After taking out the lens that has been sent out, by stopping the pushing out of the receiving material (releasing the pushing force), the two members will be attracted to each other by the restoring force of the elastic material that has been compressed further than usual, and return to the original state. Can do.

またレンズと接しレンズを支える受け材との間に介在するシート材は、厚さ方向でその表裏において摩擦係数が異なる構造となっている。これはレンズと接する面、仮に表面とすれば、表面はレンズを研磨加工する際にレンズと相対的な滑りを生じないように保持する必要があるため、摩擦係数が大きな素材となっている。逆にレンズと反対側、仮に裏面とすると、裏面は受け材と接してレンズを支えるが、ここで受け材と裏面は固着されずに互いが接しているだけである。従来の保持具では、レンズ受けシートと受け材は固着されていることが一般的であるが、本態様では両者は固着されず自在に動けるようになっている。裏面と受け材が固着されておらず、かつレンズと表面も固着されていないため、研磨加工時には何れかの面で両者がすべる事になる。ここで受け材に対するシート材の裏面の摩擦係数が、シート材の表面の摩擦係数より小さいことで、レンズとシート材がすべることなく保持することができる。これによりレンズとシート材での相対運動が生じないため、レンズがシート材と擦れないことから、シート材の摩滅やレンズへのキズ発生を防止することができる。   Further, the sheet material interposed between the lens and the receiving material that supports the lens has a structure in which the coefficient of friction is different between the front and back in the thickness direction. If the surface is in contact with the lens, and if it is a surface, the surface needs to be held so as not to slip relative to the lens when the lens is polished, so that the material has a large friction coefficient. On the other hand, if it is the opposite side of the lens, and if it is the back side, the back side is in contact with the receiving material to support the lens, but here the receiving material and the back side are not fixed but are in contact with each other. In a conventional holder, the lens receiving sheet and the receiving material are generally fixed, but in this embodiment, both are fixed and can move freely. Since the back surface and the receiving material are not fixed, and the lens and the front surface are not fixed, both of them slide on either surface during polishing. Here, since the friction coefficient of the back surface of the sheet material with respect to the receiving material is smaller than the friction coefficient of the surface of the sheet material, the lens and the sheet material can be held without slipping. This prevents relative movement between the lens and the sheet material and prevents the lens from rubbing against the sheet material, thereby preventing wear of the sheet material and generation of scratches on the lens.

またレンズとシート材の間はすべらないように機能させ、逆にシート材と受け材の間で積極的にすべる構造を採用することで、例えば小径のレンズであっても研磨加工でレンズがすべることに伴うキズを発生させることなく、容易にレンズを回転させることも可能となる。   In addition, the lens slides between the lens and the sheet material, and conversely, by adopting a structure that actively slides between the sheet material and the receiving material, for example, even a small-diameter lens slides the lens by polishing. It is also possible to easily rotate the lens without causing scratches.

また前述してきたような厚さの薄いレンズに対しても、シート材と受け材の間で積極的にすべることから、研磨加工で発生する回転力に対して、レンズにキズを発生させることもなく容易に回転させることができ、安定した回転を得ることで高い研磨精度をえることができる。   In addition, even for a thin lens as described above, since the sheet slides positively between the sheet material and the receiving material, the lens may be scratched against the rotational force generated by the polishing process. Can be easily rotated, and high polishing accuracy can be obtained by obtaining a stable rotation.

また回転に関してもシート材の摩擦係数に依存した面接触でのすべり摩擦であるため、玉軸受けのような点接触に伴う転がり摩擦と異なり、研磨加工での圧力や加工力による力の変動に対しても高い剛性を発揮することができる。このため回転運動に伴う振動も抑えられ、より高い研磨精度を得ることができる。
[本発明の第3の態様に対する手段・作用]
(手段)
レンズや平面ガラスの光学素子と工具を互いに擦り合わせ、互いの回転および揺動による相対運動にて光学素子を研削研磨加工する際に用いる光学素子の保持具において、光学素子の外径部を押さえる外筒と、光学素子の被加工面と反対の保持面と接する受けシート材と、前記受けシート材と接し受けシート材よりも摩擦係数が小さい滑りシート材と、滑りシート材と固着して光学素子を支える受け材と、前記外筒と受け材をその弾性力によって互いに押圧して介在する弾性体とを具備することを特徴とする光学素子の保持具を提供する。
(作用)
第3の態様における内容は、第1の態様におけるシート材が1種類でありながら表裏で摩擦係数が異なったシート材であったのに対して、異なる2種類のシート材で構成される点である。レンズを支え保持する受けシート材は、研磨加工中にレンズをすべらせることなく保持することが重要であるのに対して、滑りシート材は逆に受け材と受けシート材を積極的にすべらせる必要があり、全く相反する特性を必要とすることから、本態様に記載するように2種類の異なる素材で構成することで、より高い効果を得ることができる。詳細に関しては実施の形態にて記す。
[本発明の第4の態様に対する手段・作用]
(手段)
第4の態様は、レンズや平面ガラスの光学素子と工具を互いに擦り合わせ、互いの回転および揺動による相対運動にて光学素子を研削研磨加工する際に用いる光学素子の保持具において、光学素子の外径部を押さえる外筒と、光学素子の被加工面と反対の保持面と接する受けシート材と、受けシート材を固着し光学素子を支える受け材と、受け材と接し受けシート材よりも摩擦係数が小さい滑りシート材と、滑りシート材を固着して受け材を介して光学素子を支える支持材と、前記外筒と受け材をその弾性力によって互いに押圧して介在する弾性体とを具備することを特徴とする光学素子の保持具を提供する。
(作用)
第3の態様までの保持具の構成に対して、受けシート材と滑りシート材のそれぞれを支える部材を配置した点である。レンズと接する受けシート材には受け材を、滑りシート材には支持材を配置し、それぞれのシートを剛体の部材にて支える構成とすることで、各シート材が必要とする機能を発現しやすくしている。受けシート材はレンズと密着して研磨加工中でもレンズをすべらせることなく強固に保持する必要があるため、レンズ形状を概略反転させた形状を有する受け材を支えとして高い剛性を確保してレンズを支えることができる。また滑りシート材はレンズを積極的にすべらせ回転させる必要があるため、前項までの態様と同様に剛体である支持材に支えられると共に、受けシート材ではなく受け材と接触して作用することから、より積極的にレンズをすべらせることができる。受けシート材はレンズをすべらせないように保持する部材であるため、これと接して滑りシート材でレンズをすべらせるよりは、剛体である受け材を介して滑りシート材ですべらせる方が容易にレンズを回転させることができる。
In addition, because of the sliding friction due to the surface contact depending on the friction coefficient of the sheet material, unlike the rolling friction due to the point contact such as ball bearings, the fluctuation of the force due to the pressure and processing force in the polishing process However, high rigidity can be exhibited. For this reason, the vibration accompanying rotational movement is also suppressed and higher polishing accuracy can be obtained.
[Means and Actions for the Third Aspect of the Present Invention]
(means)
A lens or flat glass optical element and a tool are rubbed against each other, and the outer diameter portion of the optical element is pressed in a holder for the optical element used when grinding and polishing the optical element by relative movement caused by rotation and swinging of each other. An outer cylinder, a receiving sheet material that is in contact with the holding surface opposite to the processing surface of the optical element, a sliding sheet material that is in contact with the receiving sheet material and has a smaller coefficient of friction than the receiving sheet material, and is optically bonded to the sliding sheet material. Provided is a holder for an optical element, comprising: a receiving material that supports the element; and an elastic body that presses the outer cylinder and the receiving material together by elastic force thereof.
(Function)
The content of the third aspect is that the sheet material in the first aspect is composed of two different types of sheet materials, whereas the sheet material is a sheet material having a different friction coefficient on the front and back sides. is there. It is important for the receiving sheet material that supports and holds the lens to hold the lens without slipping during the polishing process, whereas the sliding sheet material actively slides the receiving material and the receiving sheet material on the contrary. Since it is necessary and completely contradictory characteristics are required, a higher effect can be obtained by using two different materials as described in this embodiment. Details will be described in the embodiment.
[Means and Actions for the Fourth Aspect of the Present Invention]
(means)
According to a fourth aspect of the present invention, there is provided an optical element holder for use in grinding and polishing an optical element by a relative movement caused by rotation and oscillation of each other by rubbing a lens or a flat glass optical element and a tool. An outer cylinder that holds the outer diameter of the optical element, a receiving sheet material that contacts the holding surface opposite to the processing surface of the optical element, a receiving material that fixes the receiving sheet material to support the optical element, and a receiving sheet that contacts the receiving material A sliding sheet material having a small friction coefficient, a supporting material that supports the optical element through the receiving material by fixing the sliding sheet material, and an elastic body that interposes the outer cylinder and the receiving material by pressing each other with its elastic force. An optical element holder is provided.
(Function)
It is the point which has arrange | positioned the member which supports each of a receiving sheet material and a sliding sheet material with respect to the structure of the holder to a 3rd aspect. A receiving material is placed on the receiving sheet material in contact with the lens, and a supporting material is placed on the sliding sheet material, and each sheet material exhibits the functions required by supporting each sheet with a rigid member. It is easy. Since the receiving sheet material is in close contact with the lens and needs to be held firmly without slipping even during polishing, the lens is secured with high rigidity supported by a receiving material having a shape that is roughly inverted from the lens shape. Can support. In addition, since the sliding sheet material needs to slide and rotate the lens positively, it can be supported by a rigid support material as in the previous embodiments, and should act in contact with the receiving material, not the receiving sheet material. Therefore, the lens can slide more actively. Since the receiving sheet material is a member that keeps the lens from sliding, it is easier to slide with the sliding sheet material through the rigid receiving material than to slide the lens with the sliding sheet material in contact with it. The lens can be rotated.

また受け材の裏面形状はレンズ形状に依存しないで設定できるため、受け材と滑りシート材との接触面は平面など簡易な形状で構成することができ、よりすべりやすい面を形成することができる。
[本発明の第5の態様および第6の態様に対する手段・作用]
(手段)
第5の態様では、レンズや平面ガラスの光学素子と工具を互いに擦り合わせ、互いの回転および揺動による相対運動にて光学素子を研削研磨加工する際に用いる光学素子の保持具において、光学素子の外径部を押さえる外筒と、厚さ方向における表裏にてその摩擦係数が異なるシート材と、シート材を介して光学素子を支える受け材と、前記外筒と受け材をその弾性力によって互いに押圧して介在する弾性体と、前記外筒と受け材の相対的な位置を光学素子の厚さ方向に移動調節可能に支承する規制リングとを具備することを特徴とする光学素子の保持具を提供する。
Moreover, since the back surface shape of the receiving material can be set without depending on the lens shape, the contact surface between the receiving material and the sliding sheet material can be configured in a simple shape such as a flat surface, and a more slippery surface can be formed. .
[Means and Actions for Fifth and Sixth Aspects of the Present Invention]
(means)
According to a fifth aspect, in the optical element holder used when the optical element is ground and polished by relative movement by rotating and swinging each other, the optical element of the lens or flat glass and the tool are rubbed together. An outer cylinder that holds the outer diameter part of the sheet, a sheet material having different friction coefficients on the front and back in the thickness direction, a receiving material that supports the optical element via the sheet material, and the outer cylinder and the receiving material by the elastic force An optical element holding device comprising: an elastic body that is pressed against each other; and a regulating ring that supports the relative position of the outer cylinder and the receiving member so as to be movable and adjustable in the thickness direction of the optical element. Provide ingredients.

第6の態様では第5の態様に加え、光学素子の被加工面と反対の保持面に接するシート材の摩擦係数に対して、受け材と接する面の摩擦係数のほうが小さいことを特徴とする光学素子の保持具を提供する。
(作用)
第1の態様および第2の態様の保持具に対して、レンズ受け材と外筒の相対的な位置を調整する規制リングを具備した点が異なる。ここで規制リングとは、レンズを内部に挿入しコバ部を支える外筒を、レンズを保持する受け材に対して、その固定される位置を調整できるものである。具体的には外筒は弾性部材の伸縮力により受け材と互いに引き合い押圧されている。規制リングはこの両者の間に介在し、受け材もしくは外筒に固定位置が調整できるように螺着されている。規制リングの固定位置を調整することで、受け材と外筒が互いに固定される位置がレンズの厚さ方向で変わり、保持すべきレンズのコバ部の寸法に合わせて微調整を行なうことができる。
In the sixth aspect, in addition to the fifth aspect, the friction coefficient of the surface in contact with the receiving material is smaller than the friction coefficient of the sheet material in contact with the holding surface opposite to the processing surface of the optical element. An optical element holder is provided.
(Function)
The point which provided the control ring which adjusts the relative position of a lens receiving material and an outer cylinder differs with respect to the holder of a 1st aspect and a 2nd aspect. Here, the restriction ring is a ring that can adjust the position at which the outer cylinder that inserts the lens and supports the edge portion is fixed with respect to the receiving member that holds the lens. Specifically, the outer cylinder is attracted and pressed to the receiving member by the elastic force of the elastic member. The regulating ring is interposed between the two, and is screwed to the receiving member or the outer cylinder so that the fixing position can be adjusted. By adjusting the fixing position of the restriction ring, the position where the receiving member and the outer cylinder are fixed to each other changes in the thickness direction of the lens, and fine adjustment can be performed according to the size of the edge portion of the lens to be held. .

本発明の保持具では、レンズのコバ部が薄く外筒内部に埋没しやすいようなレンズの保持に最適であるため、薄いコバ部の寸法に合わせて規制リングの取り付け位置を代えることで、受け材すなわちレンズに対してレンズの厚さ方向で外筒位置を変更することができる。
[本発明の第7の態様および第11の態様に対する手段・作用]
(手段)
第7の態様では、レンズや平面ガラスの光学素子と工具を互いに擦り合わせ、互いの回転および揺動による相対運動にて光学素子を研削研磨加工する際に用いる光学素子の保持具において、光学素子の外径部を押さえる外筒と、光学素子の被加工面と反対の保持面と接する受けシート材と、前記受けシート材と接し受けシート材よりも摩擦係数が小さい滑りシート材と、滑りシート材と固着して光学素子を支える受け材と、前記外筒と支持材をその弾性力によって互いに押圧して介在する弾性体と、前記外筒と受け材の相対的な位置を光学素子の厚さ方向に移動調節可能に支承する規制リングとを具備することを特徴とする光学素子の保持具を提供する。
The holder of the present invention is optimal for holding the lens where the lens edge is thin and easily embedded in the outer cylinder. Therefore, by changing the mounting position of the regulating ring according to the dimensions of the thin edge, The outer cylinder position can be changed in the lens thickness direction with respect to the material, that is, the lens.
[Means and Actions for Seventh and Eleventh Aspects of the Present Invention]
(means)
In the seventh aspect, in the optical element holder used when grinding and polishing the optical element by relative movement by rotating and swinging each other, the optical element of the lens or flat glass and the tool are rubbed together. An outer cylinder that holds the outer diameter portion of the optical element, a receiving sheet material that contacts the holding surface opposite to the processing surface of the optical element, a sliding sheet material that contacts the receiving sheet material and has a smaller coefficient of friction than the receiving sheet material, and a sliding sheet A receiving member that supports the optical element by adhering to the material, an elastic body that presses the outer cylinder and the supporting member against each other by its elastic force, and a relative position of the outer cylinder and the receiving material is determined by the thickness of the optical element. There is provided a holder for an optical element, comprising a regulating ring that is supported so as to be movable in the vertical direction.

第11の態様では第7の態様に加え、互いに弾性体により押圧された外筒と受け材および規制リングが、光学素子の厚さ方向に移動可能に支承していることを特徴とする光学素子の保持具を提供する。
(作用)
第5の態様と同様に第3の態様の保持具に対して、レンズ受け材と外筒の相対的な位置を調整する規制リングを具備した点が異なる。ここで規制リングとは、第5の態様に記載する規制リングと同じであり、第5の態様で記載した規制リングの機能を第3の態様の機能に加えた点である。
[本発明の第8の態様に対する手段・作用]
(手段)
第8の態様は、レンズや平面ガラスの光学素子と工具を互いに擦り合わせ、互いの回転および揺動による相対運動にて光学素子を研削研磨加工する際に用いる光学素子の保持具において、光学素子の外径部を押さえる外筒と、光学素子の被加工面と反対の保持面と接する受けシート材と、受けシート材を固着し光学素子を支える受け材と、受け材と接し受けシート材よりも摩擦係数が小さい滑りシート材と、滑りシート材を固着して受け材を介して光学素子を支える支持材と、前記外筒と受け材をその弾性力によって互いに押圧して介在する弾性体と、支持材を介して前記外筒と受け材の相対的な位置を光学素子の厚さ方向に移動調節可能に支承する規制リングとを具備することを特徴とする光学素子の保持具を提供する。
(作用)
第7の態様と同様に第4の態様の保持具に対して、レンズ受け材と外筒の相対的な位置を調整する規制リングを具備した点が異なる。ここで規制リングとは、第5の態様および第7の態様に記載する規制リングと同じであり、第5の態様および第7の態様で記載した規制リングの機能を第4の態様の機能に加えた点である。
[本発明の第9の態様に対する手段・作用]
(手段)
第9の態様は、第1の態様から第8の態様において、外筒および受け材を押圧する弾性力が、圧縮されたバネやゴムにより発生することを特徴とする光学素子の保持具を提供する。
(作用)
あらかじめ圧縮された弾性材が元の長さに戻ろうとする復元力で、受け材と外筒が互いに引き合い係合している。この復元力を得るための部材として、バネやゴムなどの超弾性作用を有する部材を利用している。バネであればその復元力などをバネ定数などで容易に設定できるため有効な手段である。またゴムであれば素材の弾性特性を設定できれば、研削加工や研磨加工で水や研磨材が供給される環境においても安定した力を発揮でき、保持具の構造も簡素化できるメリットがある。
[本発明の第10の態様に対する手段・作用]
(手段)
第10の態様は、第1の態様から第8の態において、外筒および受け材を押圧する弾性力が、伸長されたバネやゴムにより発生することを特徴とする光学素子の保持具を提供する。
(作用)
あらかじめ伸長された弾性材が元の長さに戻ろうとする復元力で、受け材と外筒が互いに引き合い係合している。前記記載の第3の態様では弾性材が圧縮された状態での復元力を利用したが、第4の態様では伸長力を利用している。復元力を得るための部材としては、第3の態様と同じでバネやゴムなどの超弾性作用を有する部材を利用している。
In an eleventh aspect, in addition to the seventh aspect, an optical element characterized in that an outer cylinder pressed by an elastic body, a receiving member, and a regulating ring are supported so as to be movable in the thickness direction of the optical element. Provide holders.
(Function)
Similar to the fifth aspect, the third embodiment is different from the third aspect in that a holding ring for adjusting the relative positions of the lens receiving member and the outer cylinder is provided. Here, the restriction ring is the same as the restriction ring described in the fifth aspect, and is the point that the function of the restriction ring described in the fifth aspect is added to the function of the third aspect.
[Means and Actions for the Eighth Aspect of the Present Invention]
(means)
An eighth aspect is the optical element holder used when the optical element of the lens or flat glass and the tool are rubbed with each other, and the optical element is ground and polished by relative movement by rotation and swinging of each other. An outer cylinder that holds the outer diameter of the optical element, a receiving sheet material that contacts the holding surface opposite to the processing surface of the optical element, a receiving material that fixes the receiving sheet material to support the optical element, and a receiving sheet that contacts the receiving material A sliding sheet material having a small friction coefficient, a supporting material that supports the optical element through the receiving material by fixing the sliding sheet material, and an elastic body that interposes the outer cylinder and the receiving material by pressing each other with its elastic force. And a regulating ring for supporting the relative position of the outer cylinder and the receiving member via the support member so as to be movable and adjustable in the thickness direction of the optical element. .
(Function)
Similar to the seventh embodiment, the fourth embodiment is different from the holder of the fourth embodiment in that a restriction ring for adjusting the relative positions of the lens receiving member and the outer cylinder is provided. Here, the restriction ring is the same as the restriction ring described in the fifth aspect and the seventh aspect, and the function of the restriction ring described in the fifth aspect and the seventh aspect is changed to the function of the fourth aspect. This is an added point.
[Means and Actions for the Ninth Aspect of the Present Invention]
(means)
A ninth aspect provides a holder for an optical element according to any one of the first to eighth aspects, wherein the elastic force that presses the outer cylinder and the receiving member is generated by a compressed spring or rubber. To do.
(Function)
The receiving material and the outer cylinder are attracted and engaged with each other by the restoring force of the elastic material compressed in advance to return to the original length. As a member for obtaining this restoring force, a member having a superelastic action such as a spring or rubber is used. A spring is an effective means because its restoring force can be easily set by a spring constant or the like. In addition, if the elastic characteristics of a material can be set for rubber, there is an advantage that a stable force can be exhibited even in an environment where water or an abrasive is supplied by grinding or polishing, and the structure of the holder can be simplified.
[Means and Actions for Tenth Aspect of the Present Invention]
(means)
A tenth aspect provides an optical element holder according to any one of the first to eighth aspects, wherein the elastic force that presses the outer cylinder and the receiving member is generated by an extended spring or rubber. To do.
(Function)
The receiving material and the outer cylinder are attracted and engaged with each other by a restoring force in which the elastic material previously stretched returns to the original length. In the third aspect described above, the restoring force in a state where the elastic material is compressed is used, but in the fourth aspect, an extension force is used. As a member for obtaining a restoring force, a member having a superelastic action, such as a spring or rubber, is used as in the third embodiment.

以下、本発明の各実施の形態について図面を参照して説明する。
(第1実施の形態)
図1は、本発明の一実施の形態である研磨方法を実施する保持具を備えた研磨装置の構成の一例を示す略断面図であり、図2Aおよび図2Bは、その作用の一例を示す略断面図である。
Embodiments of the present invention will be described below with reference to the drawings.
(First embodiment)
FIG. 1 is a schematic cross-sectional view showing an example of the configuration of a polishing apparatus provided with a holder for performing a polishing method according to an embodiment of the present invention, and FIGS. 2A and 2B show an example of the operation thereof. FIG.

図1では本実施の形態の保持具を用いて凸レンズの研磨加工を実施している様子を示し、図2Aおよび図2Bでは本実施の形態の保持具の構造と使用方法を具体的に示す。
本実施の形態では、一例として、保持具1を用いて凸レンズ等のレンズ2(被研磨物)の研磨加工を実施する研磨装置Mについて説明する。
FIG. 1 shows a state in which the convex lens is polished using the holder of the present embodiment, and FIGS. 2A and 2B specifically show the structure and use method of the holder of the present embodiment.
In the present embodiment, as an example, a polishing apparatus M that performs a polishing process on a lens 2 (object to be polished) such as a convex lens using a holder 1 will be described.

この場合、レンズ2の二つの光学面の一方が研磨対象の被加工面2aとなるとき、反対側の光学面は保持具1に保持される保持面2bとなる。
図1に例示されるように本実施の形態の研磨装置Mは、レンズ2を支持する保持具1と研磨工具としての研磨皿3を備えている。
In this case, when one of the two optical surfaces of the lens 2 becomes the workpiece surface 2 a to be polished, the opposite optical surface becomes the holding surface 2 b held by the holder 1.
As illustrated in FIG. 1, the polishing apparatus M of the present embodiment includes a holder 1 that supports the lens 2 and a polishing dish 3 as a polishing tool.

保持具1を介してレンズ2を研磨するために、研磨装置Mの一部であるかんざし12に自在継手部12aを介して保持具1が傾動自在および回転自在に係合され、保持具1の内部に保持されたレンズ2が、レンズ2の被加工面2aである球面形状を概略反転させた球面形状の研磨作用面3aを有する研磨皿3に押圧される。   In order to polish the lens 2 via the holder 1, the holder 1 is tiltably and rotatably engaged with the hairpin 12 that is a part of the polishing apparatus M via the universal joint portion 12 a. The lens 2 held inside is pressed against a polishing dish 3 having a spherical polishing action surface 3a obtained by roughly reversing the spherical shape of the processing surface 2a of the lens 2.

そして、駆動軸3bによって回転駆動および揺動される研磨皿3と、かんざし12に自在継手部12aを介して傾動自在に支持された保持具1の互いの回転および揺動運動により、レンズ2の被加工面2aの研磨を行なう。   Then, the polishing plate 3 rotated and driven by the drive shaft 3b and the holding tool 1 supported by the handle 12 through the universal joint 12a so as to be tiltable can rotate and swing each other. The workpiece surface 2a is polished.

ここで本実施の形態であるレンズ2を加工中に保持する保持具1について説明する。本実施の形態の保持具1は、レンズ2の球面(保持面2b)と接するシート材6を介してレンズ2を支える受け材8と、レンズ2を内部に挿入しレンズ2の外径部であるコバ部2cを支える外筒7と、受け材8と外筒7を互いに係合するために伸縮自在であるバネ9(弾性体)を挟む螺子10を介して係合されている。   Here, the holder 1 that holds the lens 2 according to the present embodiment during processing will be described. The holder 1 of the present embodiment includes a receiving material 8 that supports the lens 2 via a sheet material 6 that is in contact with the spherical surface (holding surface 2 b) of the lens 2, and an outer diameter portion of the lens 2 that is inserted into the lens 2. The outer cylinder 7 that supports a certain edge portion 2c is engaged via a screw 10 that sandwiches a spring 9 (elastic body) that can be expanded and contracted to engage the receiving member 8 and the outer cylinder 7.

すなわち、外筒7の背面側にはかんざし穴7aが開口され、このかんざし穴7aから露出した受け材8の背面側にかんざし12が自在継手部12aを介して接続されている。
かんざし穴7aに回りには、螺子10が挿通される複数の螺子貫通孔7bが開口され、ここの螺子10の先端は、螺子貫通孔7bを通じて受け材8の背面に螺着されている。
That is, a pin hole 7a is opened on the back side of the outer cylinder 7, and the pin 12 is connected to the back side of the receiving member 8 exposed from the pin hole 7a via the universal joint 12a.
Around the pin hole 7a, a plurality of screw through holes 7b through which the screws 10 are inserted are opened, and the tips of the screws 10 are screwed to the back surface of the receiving member 8 through the screw through holes 7b.

そして、螺子10の大径の螺子頭部10aと外筒7の背面との間にバネ9が圧縮変形した状態で配置され、このバネ9の伸長方向の弾発力(復元力)によって、受け材8は、外筒7の背面側に密着する方向に付勢されている。   The spring 9 is disposed between the large-diameter screw head 10a of the screw 10 and the back surface of the outer cylinder 7 in a state of being compressed and deformed, and is received by the elastic force (restoring force) in the extending direction of the spring 9. The material 8 is urged in a direction in close contact with the back side of the outer cylinder 7.

また、外筒7のレンズ2を保持する側の端部には、研磨皿3の研磨作用面3aと干渉しないようにテーパ部7cが設けられている。
ここでレンズ2を支える受け材8は、レンズ2との間にシート材6を介在して研磨加工の圧力により変形など生じないような真鍮やステンレスといった金属からなる。その表面に介在するシート材6はレンズ2に接触キズなどを入れず、レンズ2との高い摩擦力を確保するためにポリウレタンなどの樹脂で構成されている。
A tapered portion 7c is provided at the end of the outer cylinder 7 on the side holding the lens 2 so as not to interfere with the polishing surface 3a of the polishing dish 3.
Here, the receiving material 8 that supports the lens 2 is made of a metal such as brass or stainless steel that has a sheet material 6 interposed between the lens 2 and is not deformed by the pressure of polishing. The sheet material 6 interposed on the surface is made of a resin such as polyurethane in order to secure a high frictional force with the lens 2 without causing contact scratches or the like on the lens 2.

本実施の形態の場合、シート材6は、レンズ2の保持面2bと接する表材4(第1主面)と受け材8と接する裏材5(第2主面)によって異なる構造を有している。具体的には、シート材6は、厚さ方向で発泡率を変化させたポリウレタン製の傾斜材料であり、レンズ2の保持面2bに接する表材4と、受け材8に接する裏材5とで発泡率が異なっている。   In the case of the present embodiment, the sheet material 6 has different structures depending on the front material 4 (first main surface) in contact with the holding surface 2 b of the lens 2 and the backing material 5 (second main surface) in contact with the receiving material 8. ing. Specifically, the sheet material 6 is a polyurethane gradient material whose foaming rate is changed in the thickness direction, and a surface material 4 that contacts the holding surface 2 b of the lens 2, and a backing material 5 that contacts the receiving material 8. The foaming rate is different.

シート材6は表裏でポリウレタンの発泡率を調整し、接触するものに対する摩擦力を変えている。表面の表材4では発泡率を上げることで軟化させ柔軟性を高め、レンズ2の保持面2bの球面形状になじみやすいような形状適応性の向上と密着力による保持(摩擦)力を高めている。逆に裏面の裏材5では発泡を抑えることで硬化させ剛性を高めるとともに、密着力を下げることで受け材8に対してすべりやすくしている。   The sheet material 6 adjusts the foaming rate of polyurethane on the front and back sides, and changes the frictional force against the contacting material. The front surface 4 is softened by increasing the foaming rate to increase flexibility, and the shape adaptability and the holding (friction) force by the adhesion force are improved so as to be easily adapted to the spherical shape of the holding surface 2b of the lens 2. Yes. On the contrary, the backing material 5 on the back surface is hardened by suppressing foaming to increase rigidity, and it is easy to slide against the receiving material 8 by reducing the adhesion.

すなわち、本実施の形態のシート材6の場合、表材4とレンズ2の保持面2bとの間の摩擦係数μ1よりも、裏材5と受け材8の間の摩擦係数μ2のほうが小さくなるように設定されている。   That is, in the case of the sheet material 6 of the present embodiment, the friction coefficient μ2 between the backing material 5 and the receiving material 8 is smaller than the friction coefficient μ1 between the front material 4 and the holding surface 2b of the lens 2. Is set to

次に本実施の形態の作用に関して図2Aおよび図2Bを用いて説明する。図2Aは本実施の形態の保持具1に被加工物であるレンズ2を装着した状態の断面図である。図2Bは本実施の形態で、加工が完了したレンズ2を保持具1より外すところを示した断面図である。   Next, the operation of this embodiment will be described with reference to FIGS. 2A and 2B. FIG. 2A is a cross-sectional view of a state in which a lens 2 as a workpiece is attached to the holder 1 of the present embodiment. FIG. 2B is a cross-sectional view showing the lens 2 that has been processed is removed from the holder 1 in the present embodiment.

保持具1を構成する受け材8と外筒7は、圧縮された状態から伸びようとするバネ9の復元力により互いが引きつけ合うように係合されている。この状態で加工を行うレンズを外筒7内に挿入し、研磨装置M(あるいは研削機等)が有するかんざし12の自在継手部12aに装着し加圧して加工を実施する。   The receiving member 8 and the outer cylinder 7 constituting the holder 1 are engaged with each other so as to attract each other by the restoring force of the spring 9 that tries to extend from the compressed state. A lens to be processed in this state is inserted into the outer cylinder 7 and mounted on the universal joint portion 12a of the hairpin 12 included in the polishing apparatus M (or a grinding machine or the like) for pressurization.

このときレンズ2は、研磨皿3と摺接して加工される球面(被加工面2a)とは反対側にある球面(保持面2b)とがシート材6と接し、シート材6を介してレンズをその厚さ方向に支え保持する受け材8と、レンズ2の外径部にあたるコバ部2cと接触し、レンズ2をレンズ2の径方向に支える外筒7によって保持された状態で加工が行われる。   At this time, the lens 2 is in contact with the sheet material 6 on the opposite side of the spherical surface (processed surface 2 a) processed in sliding contact with the polishing dish 3, and the lens is interposed via the sheet material 6. Is carried out in a state in which the receiving member 8 that supports and holds the lens 2 in the thickness direction and the edge portion 2c corresponding to the outer diameter portion of the lens 2 are held by the outer cylinder 7 that supports the lens 2 in the radial direction of the lens 2. Is called.

このとき本実施の形態の保持具1を利用するレンズ2は、コバ部2cが図2Aおよび図2Bで示すように厚さが薄い形状を有しているため、コバ部2cの破損を防ぐために外筒7には比較的やわらかい素材を利用する。具体的には金属であれば真ちゅうやアルミニウムを利用し、多くはポリアセタール、ポリイミドといった樹脂を利用することが多い。   At this time, the lens 2 using the holder 1 according to the present embodiment has a thin edge portion 2c as shown in FIGS. 2A and 2B, so that the edge portion 2c is prevented from being damaged. A relatively soft material is used for the outer cylinder 7. Specifically, brass or aluminum is used in the case of a metal, and a resin such as polyacetal or polyimide is often used.

加工が終了すると保持具1よりレンズ2を取り出す必要があるが、ここでレンズ2は外筒7の内部に挿入されており、コバ部2cが薄い形状では外筒7内部に埋没した状態であるため容易に取り出すことができない。特に表材4と接する球面部(保持面2b)では、研磨加工中の加工液や水が入り込んで、表材4と研磨液との表面張力によって強力に密着保持されており、容易に取り出すことができないことが多い。   When the processing is completed, it is necessary to take out the lens 2 from the holder 1. Here, the lens 2 is inserted into the outer cylinder 7, and when the edge portion 2 c is thin, it is buried inside the outer cylinder 7. Therefore, it cannot be taken out easily. In particular, at the spherical surface portion (holding surface 2b) in contact with the surface material 4, the processing liquid and water during the polishing process enter and are strongly adhered and held by the surface tension between the surface material 4 and the polishing liquid, and can be easily removed. There are many cases that cannot be done.

無理にコバ部2cを引っ掛けて取り出そうとすれば、薄いコバ部2cを破損することも多く、作業性が悪い。またコバ部2cが薄いレンズ2では、レンズ2の厚さ方向での外筒7との接触長さが短くなるため、研磨加工中には外筒7よりレンズ2が外れやすくなり、外筒7との隙間は小さく設定されることから加工終了後に容易に取り出すことができない。   If the hook portion 2c is forcibly hooked and taken out, the thin edge portion 2c is often damaged, resulting in poor workability. Further, in the lens 2 having the thin edge portion 2c, the contact length with the outer cylinder 7 in the thickness direction of the lens 2 is shortened. Therefore, the lens 2 is easily detached from the outer cylinder 7 during the polishing process. Since the gap is set small, it cannot be easily taken out after the processing is completed.

これに対して、本実施の形態の保持具1では、図2Aの状態から、レンズ2の保持面2bを保持している受け材8を外筒7に対して相対的に押し出すことで、図2Bのように、レンズ2(コバ部2c)が外筒7より繰り出され容易に取り出すことができる。   On the other hand, in the holder 1 according to the present embodiment, the receiving member 8 holding the holding surface 2b of the lens 2 is pushed from the state of FIG. Like 2B, the lens 2 (edge portion 2c) is drawn out from the outer cylinder 7 and can be easily taken out.

このとき受け材8と外筒7は圧縮され伸びようとしているバネ9の復元力によって互いに両者が引きつけ合うように力が作用しているため、バネ9が引きつける力に勝る力で受け材8を外筒7より押し出すことで、レンズ2を外筒7内部より排出することができる。排出したレンズ2を取り出した後は、受け材8を押し出すことをやめる(押し出す力を緩める)ことで、通常よりさらに圧縮されていたバネ9の復元力によって再び両者が互いに引きつけ合い、図2Aの元の状態に戻すことができる。   At this time, the receiving material 8 and the outer cylinder 7 are exerted so as to attract each other by the restoring force of the spring 9 which is compressed and stretched. By pushing out from the outer cylinder 7, the lens 2 can be discharged from the inside of the outer cylinder 7. After the ejected lens 2 is taken out, by stopping the pushing out of the receiving material 8 (releasing the pushing out force), the two are attracted to each other again by the restoring force of the spring 9 that has been further compressed. It can be restored to its original state.

ここでレンズ2を外筒7より排出すると、図2Bで示すようにレンズ2とシート材6の両方が排出される。これはシート材6が保持具1において、従来の保持具とは違って固着されていないためである。   Here, when the lens 2 is discharged from the outer cylinder 7, both the lens 2 and the sheet material 6 are discharged as shown in FIG. 2B. This is because the sheet material 6 is not fixed to the holder 1 unlike the conventional holder.

研磨加工中はレンズ2と受け材8の間にシート材6が挟持されているが、シート材6の表材4、裏材5のいずれの面も固定されてはいないため、レンズ2を取り出す際にはシート材6が一緒に取り出される構造となっている。   During the polishing process, the sheet material 6 is sandwiched between the lens 2 and the receiving material 8. However, since neither the surface 4 of the sheet material 6 nor the backing material 5 is fixed, the lens 2 is taken out. In some cases, the sheet material 6 is taken out together.

このためシート材6はレンズ2の研磨加工中は、摩擦力が低い(摩擦係数μ2が小さい、(摩擦係数μ2<摩擦係数μ1))裏材5と受け材8との接触面で積極的にすべりを生じながら回転でき、摩擦力の高い(摩擦係数μ1が大きい、(摩擦係数μ1>摩擦係数μ2))表材4とレンズ2とは密着して互いが一体化することですべりが生じない。   For this reason, the sheet material 6 has a low frictional force during the polishing of the lens 2 (the friction coefficient μ2 is small, (friction coefficient μ2 <friction coefficient μ1)), and is positive on the contact surface between the backing 5 and the receiving material 8. Can rotate while sliding and has high frictional force (Friction coefficient μ1 is large (Friction coefficient μ1> Friction coefficient μ2)) The surface material 4 and the lens 2 are in close contact with each other so that no slip occurs. .

もちろんレンズ2の回転は、かんざし12の先端部に設けられた自在継手部12aと保持具1の受け材8との間で行なわれるが、実際には研磨加工による研磨液の介在で湿式状態となる保持具1内でレンズ2が容易にすべって回転するため、これに対してレンズ2と表材4とをすべらせるのではなく、裏材5と受け材8をすべらせることで、レンズ2が表材4と接する面(保持面2b)におけるキズの発生を防止することができる。   Of course, the rotation of the lens 2 is performed between the universal joint portion 12a provided at the distal end portion of the hairpin 12 and the receiving member 8 of the holder 1. Since the lens 2 easily slides and rotates in the holder 1, the lens 2 and the surface material 4 are not slid with respect to the lens 2, but the backing material 5 and the receiving material 8 are slid. Can prevent scratches on the surface (holding surface 2b) in contact with the surface material 4.

またレンズ2とシート材6の間はすべらないように機能させ、逆にシート材6と受け材8の間で積極的にすべる構造を採用することで、例えば小径のレンズ2であっても研磨加工でレンズ2がシート材6に対してすべることに伴うキズを発生させることなく、裏材5と受け材8のすべりによって容易にレンズ2を回転させることも可能となる。   In addition, the lens 2 and the sheet material 6 function so as not to slide, and conversely, by adopting a structure that actively slides between the sheet material 6 and the receiving material 8, for example, even a small-diameter lens 2 is polished. The lens 2 can be easily rotated by the sliding of the backing material 5 and the receiving material 8 without causing scratches due to the lens 2 sliding with respect to the sheet material 6 during processing.

同時に前述してきたような厚さの薄いレンズ2に対しても、シート材6と受け材8の間で積極的にすべることから、研磨加工で発生する回転力に対して、レンズ2にキズを発生させることもなく容易に回転させることができ、安定した回転を得ることで高い研磨精度を得ることができる。   At the same time, since the lens 2 having a small thickness as described above also actively slides between the sheet material 6 and the receiving material 8, the lens 2 is scratched against the rotational force generated in the polishing process. It can be easily rotated without being generated, and high polishing accuracy can be obtained by obtaining a stable rotation.

特に回転に関してはシート材6の摩擦係数に依存した面接触でのすべり摩擦であるため、ボールを利用した玉軸受けのような点接触に伴う転がり摩擦で生じるような『ごろつき』感も皆無であり、研磨加工での圧力や加工力による力の変動に対しても高い剛性を発揮することができる。このため回転運動に伴った振動も抑えられ、より高い研磨精度を得ることができる。   In particular, with respect to rotation, since it is a sliding friction due to surface contact depending on the friction coefficient of the sheet material 6, there is no “looseness” feeling caused by rolling friction associated with point contact like a ball bearing using a ball. Also, high rigidity can be exhibited against fluctuations in force due to pressure and processing force in polishing. For this reason, the vibration accompanying rotational movement is also suppressed, and higher polishing accuracy can be obtained.

また、上述の図1の構成例では、受け材8と外筒7を係合するためにバネ9を使っているが、圧縮されたゴムや風船などの弾性体を利用しても同じような効果が得られるとは明らかである。   Further, in the configuration example of FIG. 1 described above, the spring 9 is used to engage the receiving member 8 and the outer cylinder 7, but the same thing can be achieved by using an elastic body such as a compressed rubber or balloon. It is clear that an effect can be obtained.

またコバ部2cの厚さが薄いレンズ2や、比較的小径のレンズ2に対して有効であるが、その他の通常のサイズのレンズ2に対しても有効な手段であることは明らかである。
本実施の形態によれば、レンズ2を容易に保持具1から取り出すことができるとともに、レンズ2の保持面2bへのキズ発生を防止しながら研磨中の安定した回転と高い加工精度を得ることができる。
(第2実施の形態)
図3Aから図3Cに本発明の第2実施の形態である保持具1Aを例示し、以下に説明する。図3Aでは本発明の保持具を用いて凸レンズの研磨加工を実施している様子を示し、図3B、図3Cでは本発明の保持具の構造と使用方法を具体的に示す。
Further, it is effective for the lens 2 having a thin edge portion 2c and a lens 2 having a relatively small diameter, but it is obvious that it is also effective for other normal size lenses 2.
According to the present embodiment, the lens 2 can be easily taken out from the holder 1, and stable rotation during polishing and high processing accuracy can be obtained while preventing the scratch on the holding surface 2b of the lens 2. Can do.
(Second Embodiment)
3A to 3C illustrate a holder 1A according to a second embodiment of the present invention, which will be described below. FIG. 3A shows a state in which the convex lens is polished using the holder of the present invention, and FIGS. 3B and 3C specifically show the structure and method of use of the holder of the present invention.

本第2実施の形態の保持具1Aの特徴は、レンズ2と接するシート材を2種類のシートを利用して構成した点である。その他の構成に関しては第1実施の形態と同じであり、同じ構成部材に関しては同一番号を付して説明を省略する。   A feature of the holder 1A of the second embodiment is that the sheet material in contact with the lens 2 is configured using two types of sheets. Other configurations are the same as those of the first embodiment, and the same components are denoted by the same reference numerals and description thereof is omitted.

すなわち、保持具1Aにおいては、被加工物であるレンズ2の保持面2bと接する受けシート材13(第1シート材)と、受けシート材13と接し、かつ受け材8と接する滑りシート材14(第2シート材)を介してレンズ2を保持する構成となっている。   That is, in the holder 1A, the receiving sheet material 13 (first sheet material) that contacts the holding surface 2b of the lens 2 that is the workpiece, and the sliding sheet material 14 that contacts the receiving sheet material 13 and contacts the receiving material 8. The lens 2 is held via the (second sheet material).

本第2実施の形態の保持具1Aでは、レンズ2の保持面2bと接して高い摩擦力(摩擦係数μ1)を発揮する受けシート材13と、受けシート材13とレンズ2を、受け材8に対して滑らかにすべらせ回転させる低摩擦力(摩擦係数μ2)の滑りシート材14の2種類のシート材を組み合わせた構成としている。   In the holder 1A of the second embodiment, the receiving sheet material 13 that exhibits a high frictional force (friction coefficient μ1) in contact with the holding surface 2b of the lens 2, the receiving sheet material 13 and the lens 2 is received by the receiving material 8. In contrast, the sliding sheet material 14 having a low frictional force (friction coefficient μ2) for smooth sliding and rotation is combined with two types of sheet materials.

すなわち、この保持具1Aの場合も、受けシート材13および滑りシート材14において、受けシート材13と保持面2bとの間の摩擦係数μ1よりも、滑りシート材14と受け材8との摩擦係数μ2は小さく設定されている。   That is, also in this holder 1A, in the receiving sheet material 13 and the sliding sheet material 14, the friction between the sliding sheet material 14 and the receiving material 8 is larger than the friction coefficient μ1 between the receiving sheet material 13 and the holding surface 2b. The coefficient μ2 is set small.

受けシート材13は、レンズ2の保持面2bを加工中に保持することに特化したシート材であり、摩擦係数が大きく(摩擦係数μ1)、形状適応性が高いシート材となっている。たとえばポリウレタン、ゴム、スポンジのような素材に代表される。   The receiving sheet material 13 is a sheet material specialized for holding the holding surface 2b of the lens 2 during processing, and is a sheet material having a large friction coefficient (friction coefficient μ1) and high shape adaptability. For example, it is represented by materials such as polyurethane, rubber and sponge.

これに対して滑りシート材14は、レンズ2を加工中になめらかに回転させるために、摩擦係数が小さく(摩擦係数μ2)、すべりやすいシート材である。たとえばテフロン(登録商標)やポリアセタール、フッ化エチレンなどのフッ化物樹脂や二硫化モリブデン、カーボンのような固体潤滑剤を含有した樹脂性のシート材である。   On the other hand, the sliding sheet material 14 is a sheet material that has a small friction coefficient (friction coefficient μ2) and is easy to slide in order to smoothly rotate the lens 2 during processing. For example, it is a resinous sheet material containing a solid resin such as Teflon (registered trademark), polyacetal, fluoride resin such as ethylene fluoride, molybdenum disulfide, or carbon.

本実施の形態の保持具1Aでは、この受けシート材13および滑りシート材14の2種類の特性を有するシート材を別々もしくは一体化して利用する。
図3Bの例は受けシート材13と滑りシート材14を接着することなく別々に独立して利用した場合であり、加工が完了したレンズ2を保持具1Aより排出するために、受け材8を外筒7から押し出した状態を示す。受け材8を外筒7から押し出すことで、レンズ2と受けシート材13が保持具1Aより排出される。
In the holder 1A of the present embodiment, the sheet material having the two types of characteristics of the receiving sheet material 13 and the sliding sheet material 14 is used separately or integrally.
The example of FIG. 3B is a case where the receiving sheet material 13 and the sliding sheet material 14 are used separately and independently without bonding, and the receiving material 8 is used to eject the processed lens 2 from the holder 1A. The state pushed out from the outer cylinder 7 is shown. By pushing the receiving material 8 out of the outer cylinder 7, the lens 2 and the receiving sheet material 13 are discharged from the holder 1A.

この場合、受けシート材13はレンズ2、滑りシート材14のいずれとも固着されていないため、単体で排出されることとなる。このとき滑りシート材14は受け材8に接着により固着されている。もちろん滑りシート材14を固着させなくても同様な機能を果たすが、レンズ2を外筒7から排出するたびに、レンズ2、受けシート材13、滑りシート材14の3種が外筒7から排出され、作業性が悪くなるため滑りシート材14は受け材8に固着させておくほうが好ましい。   In this case, since the receiving sheet material 13 is not fixed to either the lens 2 or the sliding sheet material 14, it is discharged alone. At this time, the sliding sheet material 14 is fixed to the receiving material 8 by adhesion. Of course, the same function can be achieved without fixing the sliding sheet material 14, but each time the lens 2 is discharged from the outer cylinder 7, three types of the lens 2, the receiving sheet material 13, and the sliding sheet material 14 are removed from the outer cylinder 7. It is preferable that the sliding sheet material 14 is fixed to the receiving material 8 because it is discharged and the workability deteriorates.

これに対して図3Cの例では、受けシート材13と滑りシート材14が固着された場合を示す。この場合は、上述の図3Bと同様にレンズ2を保持具1Aの外筒7より排出させると、受けシート材13と滑りシート材14が一体となったシートとレンズ2の2種が外筒7から排出される。   On the other hand, the example of FIG. 3C shows a case where the receiving sheet material 13 and the sliding sheet material 14 are fixed. In this case, when the lens 2 is discharged from the outer cylinder 7 of the holder 1A in the same manner as in FIG. 3B described above, two types of the lens 2 and the sheet in which the receiving sheet material 13 and the sliding sheet material 14 are integrated are the outer cylinder. 7 is discharged.

利用状況としては図3B、図3Cのいずれにおいても2種類のものが保持具1Aの外筒7より排出されるため作業性に関しては大差がないが、滑りシート材14はレンズ2を加工している最中は常に受け材8に対してすべっているため摩滅しやすいことになる。このため図3Cにおけるように受けシート材13および滑りシート材14を一体化した構成の方が、受けシート材13および滑りシート材14を一度に容易に交換することができるため、レンズ製造現場での作業性としては優れるといえ、好ましい構成といえる。   3B and 3C, there are no significant differences in workability because two types are discharged from the outer cylinder 7 of the holder 1A, but the sliding sheet material 14 is obtained by processing the lens 2. Since it always slides with respect to the receiving material 8, it will be easy to wear out. For this reason, the structure in which the receiving sheet material 13 and the sliding sheet material 14 are integrated as shown in FIG. 3C allows the receiving sheet material 13 and the sliding sheet material 14 to be easily exchanged at a time. Although it is excellent in workability, it can be said to be a preferable configuration.

いずれにしても作業性の多少の優劣はあるが、図3Bで示すように受けシート材13と滑りシート材14を別体として利用する場合も、図3Cで示すように両者を一体化して利用する場合も、機能面では同じ効果を得ることができるのは明らかであり、作業性の観点で選択を行なえばよいこととなる。   In any case, although there is some superiority or inferiority in workability, when the receiving sheet material 13 and the sliding sheet material 14 are used separately as shown in FIG. 3B, they are integrated and used as shown in FIG. 3C. Even in this case, it is clear that the same effect can be obtained in terms of function, and selection should be made from the viewpoint of workability.

特に本実施の形態では、レンズ2を保持するための受けシート材13と、レンズ2および受けシート材13を受け材8に対して加工中に容易に回転させるための滑りシート材14を自由に選択できるため、レンズ2に適した材料の選択や組み合わせを容易に行なうことができる。特にシート材を複合化する必要もなく、単体の素材を組み合わせるだけでよいため、市販の安価な材料で実施することができる。   Particularly in the present embodiment, the receiving sheet material 13 for holding the lens 2 and the sliding sheet material 14 for easily rotating the lens 2 and the receiving sheet material 13 with respect to the receiving material 8 during processing are freely provided. Since selection is possible, selection and combination of materials suitable for the lens 2 can be easily performed. In particular, it is not necessary to combine the sheet material, and it is only necessary to combine the single materials, so that it can be implemented with commercially available inexpensive materials.

本第2実施の形態の保持具1Aによれば、レンズ2を容易に保持具1Aから取り出すことができるとともに、レンズ2へのキズ発生を防止しながら研磨中の安定した回転と高い加工精度を得ることができ、さらに本機能を発揮するシート材を任意に選択して利用することができる。
(第3実施の形態)
図4Aおよび図4Bに本発明の第3実施の形態を示し以下に説明する。図4Aでは本実施の形態の保持具1Bを用いて凸レンズの研磨加工を実施している様子を示し、図4Bでは本実施の形態の保持具1Bの構造と使用方法を具体的に示す。
According to the holder 1A of the second embodiment, the lens 2 can be easily removed from the holder 1A, and stable rotation during polishing and high processing accuracy can be achieved while preventing the lens 2 from being scratched. Further, a sheet material that exhibits this function can be arbitrarily selected and used.
(Third embodiment)
4A and 4B show a third embodiment of the present invention and will be described below. FIG. 4A shows a state in which the convex lens is polished using the holder 1B of the present embodiment, and FIG. 4B specifically shows the structure and method of use of the holder 1B of the present embodiment.

本実施の形態の保持具1Bの特徴は、シート材に2種類のシートを利用し、かつシート毎にシートを支える部材を別個に設けて構成した点である。その他の構成に関しては前述までの実施の形態と同じであり、同じ構成部材に関しては同一番号を付して説明を省略する。   A feature of the holder 1B of the present embodiment is that two types of sheets are used for the sheet material, and a member for supporting the sheet is separately provided for each sheet. Other configurations are the same as those in the above-described embodiment, and the same components are denoted by the same reference numerals and description thereof is omitted.

すなわち、この保持具1Bの場合には、レンズ2を支持する構造として、受けシート材13を介してレンズ2の保持面2bを支持する受け材8と、この受け材8の背面側を、滑りシート材14を介して支持する支持材8aを備えている。そして、支持材8aの背面に複数の螺子10が螺着されている。   That is, in the case of this holder 1B, as a structure for supporting the lens 2, a receiving material 8 for supporting the holding surface 2b of the lens 2 via the receiving sheet material 13 and a back side of the receiving material 8 are slipped. A support member 8a that supports the sheet member 14 is provided. A plurality of screws 10 are screwed onto the back surface of the support member 8a.

この場合、受けシート材13とレンズ2の保持面2bとの間の摩擦係数μ1よりも、滑りシート材14と受け材8との間の摩擦係数μ2が小さくなるように設定されている。
これにより、レンズ2の保持面2bは、受けシート材13に対して滑らず、受け材8が支持材8aに対して滑る。
In this case, the friction coefficient μ2 between the sliding sheet material 14 and the receiving material 8 is set to be smaller than the friction coefficient μ1 between the receiving sheet material 13 and the holding surface 2b of the lens 2.
Thereby, the holding surface 2b of the lens 2 does not slide with respect to the receiving sheet material 13, and the receiving material 8 slides with respect to the support material 8a.

すなわち、保持具1Bにおいては、被加工物であるレンズ2の保持面2bと接する受けシート材13と、受けシート材13を接着などによって固着してレンズ2および受けシート材13を支える受け材8と、受け材8と接し、受け材8を容易にすべらせる滑りシート材14と、滑りシート材14を接着などにより固着した支持材8aを備えている。さらに支持材8aは前述までの各実施の形態と同様に螺子10、バネ9を介して外筒7と互いに引き合うように係合されている。   That is, in the holder 1B, the receiving sheet material 13 in contact with the holding surface 2b of the lens 2 that is the workpiece, and the receiving material 8 that supports the lens 2 and the receiving sheet material 13 by fixing the receiving sheet material 13 by adhesion or the like. The sliding sheet material 14 is in contact with the receiving material 8 and allows the receiving material 8 to slide easily, and the supporting material 8a is secured to the sliding sheet material 14 by adhesion or the like. Further, the support member 8a is engaged with the outer cylinder 7 through the screw 10 and the spring 9 in the same manner as in the previous embodiments.

以下、本実施の形態の保持具1Bの作用を説明する。
本実施の形態では、上述のように、レンズ2の保持面2bと接して高い摩擦力(摩擦係数μ1)を発揮する受けシート材13と、受けシート材13とレンズ2を滑らかにすべらせ回転させる(摩擦係数μ2)ための滑りシート材14の2種類のシート材を組み合わせた構成とするとともに、各シート毎にシートを支える部材を配した構成となっている。
Hereinafter, the operation of the holder 1B of the present embodiment will be described.
In the present embodiment, as described above, the receiving sheet material 13 that is in contact with the holding surface 2b of the lens 2 and exhibits a high frictional force (friction coefficient μ1), and the receiving sheet material 13 and the lens 2 are smoothly slid and rotated. The sliding sheet material 14 is configured to be combined with two types of sheet materials (friction coefficient μ2), and a member that supports the sheet is provided for each sheet.

受けシート材13は、前述の各実施の形態と同様にポリウレタン、ゴム、スポンジのような素材でレンズ2の保持面2bを保持することに特化したシート材であり、摩擦係数(摩擦係数μ1)が大きく形状適応性が高いシート材となっている。   The receiving sheet material 13 is a sheet material specialized to hold the holding surface 2b of the lens 2 with a material such as polyurethane, rubber, or sponge as in the above-described embodiments, and has a friction coefficient (friction coefficient μ1 ) Is a sheet material with a large shape adaptability.

これに対して滑りシート材14は、テフロン(登録商標)やポリアセタール、フッ化エチレンなどのフッ化物樹脂や二硫化モリブデン、カーボンのような固体潤滑剤を含有した樹脂性のシート材で、レンズ2を加工中になめらかに回転させるために摩擦係数(摩擦係数μ2(<摩擦係数μ1))が小さくすべりやすいシート材である。   On the other hand, the sliding sheet material 14 is a resinous sheet material containing a solid resin such as fluoride resin such as Teflon (registered trademark), polyacetal, and ethylene fluoride, molybdenum disulfide, and carbon. Is a sheet material that has a small friction coefficient (friction coefficient μ2 (<friction coefficient μ1)) and is easy to slide.

この2種類のシート材は相反する特性を有しており、保持具1Bでは、特性の異なるシートをそれぞれ別の場所で機能させるために、受けシート材13には受け材8を、滑りシート材14には支持材8aを固着し、互いが接触しないような構成としている。   These two types of sheet materials have contradictory characteristics. In the holder 1B, in order to allow sheets having different characteristics to function in different places, the receiving sheet material 13 is provided with the receiving material 8 and the sliding sheet material. A support material 8a is fixed to 14 so that they do not contact each other.

これにより、保持具1Bにおいて、受けシート材13は受け材8に固着されることで、レンズ2の保持面2bに対する形状適応性や摩擦係数(摩擦係数μ1)を高めた構造を有しながら、受け材8により支えられることで高い剛性を得ることができる。   Thereby, in the holder 1B, the receiving sheet material 13 is fixed to the receiving material 8, so that the shape adaptability to the holding surface 2b of the lens 2 and the friction coefficient (friction coefficient μ1) are increased. High rigidity can be obtained by being supported by the receiving member 8.

また、滑りシート材14も同様に支持材8aに固着され、受け材8をすべらせるとともに高い剛性を得ることができる。
ここで受け材8や支持材8aは、アルミニウムや真ちゅう、ステンレスといった金属で構成することで、各シートを支えながら高い剛性を有してレンズ2を支えることができる。
Similarly, the sliding sheet material 14 is fixed to the support material 8a, and the receiving material 8 can be slid and high rigidity can be obtained.
Here, the receiving member 8 and the supporting member 8a are made of metal such as aluminum, brass, and stainless steel, so that the lens 2 can be supported with high rigidity while supporting each sheet.

さらに、滑りシート材14は受け材8をすべらせる構造になるため、すべりにくい材質で構成される受けシート材13の材質に関係なく、滑りシート材14は受け材8との間の摩擦(摩擦係数μ2)を低下させることで、より高いすべり性能を得ることが可能となる。同時に滑りシート材14の形状は、レンズ2の形状に影響を受けないため、図4Aおよび図4Bに示すように、受け材8と支持材8aの境界の平坦面に合わせて平面形状など創成が容易な形状で構成することが可能となる。   Further, since the sliding sheet material 14 has a structure in which the receiving material 8 is slid, the sliding sheet material 14 has a friction (friction) with the receiving material 8 regardless of the material of the receiving sheet material 13 made of a material that is difficult to slide. By reducing the coefficient μ2), higher sliding performance can be obtained. At the same time, since the shape of the sliding sheet material 14 is not affected by the shape of the lens 2, as shown in FIG. 4A and FIG. 4B, a planar shape or the like can be created in accordance with the flat surface at the boundary between the receiving material 8 and the support material 8a. It is possible to configure with an easy shape.

本実施の形態の保持具1Bの構成であれば、レンズ2を外筒7から排出した際にも、受けシート材13が受け材8と一体となって剛体として排出されるので、加工作業者の手扱いも容易になり、作業性が高まることが期待できる。   With the configuration of the holder 1B of the present embodiment, when the lens 2 is discharged from the outer cylinder 7, the receiving sheet material 13 is integrally discharged with the receiving material 8 as a rigid body. Can be handled easily, and workability can be expected to increase.

同時にシートのみの交換や基材となる受け材8や支持材8aを含めての交換に対応でき、特に後者であれば受けシート材13を固着した複数の受け材8を事前に用意しておけば、交換の作業性も良好となる。   At the same time, it is possible to cope with the exchange of only the sheet and the exchange including the receiving material 8 and the support material 8a as the base material. In the latter case, a plurality of receiving materials 8 to which the receiving sheet material 13 is fixed can be prepared in advance. In this case, the exchange workability is also improved.

本第3実施の形態の保持具1Bによれば、レンズ2を容易に保持具1Bから取り出すことができるとともに、レンズ2へのキズ発生を防止しながら研磨中の安定した回転と高い加工精度を得ることができ、レンズ2の保持具1Bに対する脱着の作業性も向上する。
(第4実施の形態)
図5Aおよび図5Bに本発明の第4実施の形態である保持具1Cを示す。前記各実施の形態と同様に、同一部品に関しては同一番号付して説明を省略し、図5Aには保持具1Cの通常状態およびレンズ2を保持した状態を示し、図5Bには保持具1Cからレンズ2を取り出すところを示す。
According to the holder 1B of the third embodiment, the lens 2 can be easily removed from the holder 1B, and stable rotation during polishing and high processing accuracy can be achieved while preventing the lens 2 from being scratched. It can be obtained, and the workability of attaching / detaching the lens 2 to / from the holder 1B is improved.
(Fourth embodiment)
5A and 5B show a holder 1C according to the fourth embodiment of the present invention. As in the previous embodiments, the same parts are designated by the same reference numerals and description thereof is omitted. FIG. 5A shows the normal state of the holder 1C and the state where the lens 2 is held, and FIG. 5B shows the holder 1C. The lens 2 is taken out from the lens.

本実施の形態の保持具1Cの特徴は、レンズ2を排出する際に押し出す受け材8の固定位置を、排出されるレンズ2の厚さ方向で自由に調整できるように規制リング15を設けた点である。   A feature of the holder 1C of the present embodiment is that a regulating ring 15 is provided so that the fixing position of the receiving member 8 to be pushed out when the lens 2 is ejected can be freely adjusted in the thickness direction of the lens 2 to be ejected. Is a point.

受け材8と外筒7が、互いに係合するために伸縮自在であるバネ9を介して係合されている。ここでバネ9は前述までの実施の形態と同様に圧縮されて装着されることで受け材8と外筒7を互いに係合している。   The receiving member 8 and the outer cylinder 7 are engaged with each other via a spring 9 that is extendable to engage with each other. Here, the spring 9 is compressed and mounted in the same manner as in the previous embodiments, thereby engaging the receiving member 8 and the outer cylinder 7 with each other.

ここで外筒7の中心部には、図示省略した研磨機に取り付けられたかんざし12を挿入するためにかんざし穴7aがあいており、かんざし穴7aの内面には雌螺子部7dが切られ規制リング15の外周が螺着されている。これにより、規制リング15は回転によって外筒7の軸方向に移動する。   Here, in the center portion of the outer cylinder 7, there is a pin hole 7a for inserting a pin 12 attached to a polishing machine (not shown), and a female screw portion 7d is cut on the inner surface of the pin hole 7a. The outer periphery of the ring 15 is screwed. Thereby, the regulation ring 15 moves in the axial direction of the outer cylinder 7 by rotation.

そして、規制リング15は、バネ9の収縮力によって引き付けられる受け材8と外筒7に挟まれるように、外筒7のない端面から所望の突出した状態に取り付けられる。
ここで規制リング15は受け材8と外筒7とに挟まれて互いの位置を規制するリングであるため、特に材質を規定するものではないが、真ちゅうやアルミニウム、ステンレスといった金属、あるいはポリイミド樹脂などある程度、バネ9の圧縮力に耐えうる樹脂であっても構わない。
The regulating ring 15 is attached in a desired protruding state from the end surface without the outer cylinder 7 so as to be sandwiched between the receiving member 8 attracted by the contraction force of the spring 9 and the outer cylinder 7.
Here, since the regulating ring 15 is a ring that is sandwiched between the receiving material 8 and the outer cylinder 7 and regulates the position of each other, the material is not particularly specified, but a metal such as brass, aluminum, stainless steel, or polyimide resin For example, a resin that can withstand the compressive force of the spring 9 may be used.

以下、本実施の形態の保持具1Cの作用を説明する。
上述の構成の保持具1Cによると外筒7に螺着された規制リング15は、バネ9の収縮力によって受け材8の背面と当てつき、外筒7と受け材8の間に挟まれることになる。受け材8が規制リング15に当て付いて係合されると、規制リング15の外筒7に対する螺着位置によっては、図4Aに示すように外筒7との間に隙間Gが生じることになる。すなわち、この隙間Gだけ、受け材8は外筒7に対して突出する方向に引き込み位置が規制される。
Hereinafter, the operation of the holder 1C of the present embodiment will be described.
According to the holder 1 </ b> C having the above-described configuration, the regulation ring 15 screwed to the outer cylinder 7 is brought into contact with the back surface of the receiving material 8 by the contraction force of the spring 9 and is sandwiched between the outer cylinder 7 and the receiving material 8. become. When the receiving member 8 is brought into contact with and engaged with the restriction ring 15, a gap G is generated between the restriction ring 15 and the outer cylinder 7 as shown in FIG. Become. That is, the receiving position of the receiving member 8 is restricted in the direction protruding from the outer cylinder 7 by the gap G.

ここで規制リング15が外筒7に対して螺着されているため、規制リング15を適宜回動させることで、規制リング15の位置はレンズ2の厚さ方向に移動可能であり、外筒7に対して取り付ける位置を調整することで受け材8と接する位置を変えられ、隙間Gを可変に調整することができる。   Here, since the regulation ring 15 is screwed to the outer cylinder 7, the position of the regulation ring 15 can be moved in the thickness direction of the lens 2 by appropriately rotating the regulation ring 15. 7, the position in contact with the receiving material 8 can be changed, and the gap G can be variably adjusted.

隙間Gを変化させると、外筒7に対する受け材8の相対的な引き込み位置が変化するため、外筒7と受け材8に支持されたレンズ2の位置も変化し外筒7からのレンズ2のコバ部2cの突出量が変化する。   When the gap G is changed, the relative retracted position of the receiving material 8 with respect to the outer cylinder 7 changes, so that the position of the outer cylinder 7 and the lens 2 supported by the receiving material 8 also changes and the lens 2 from the outer cylinder 7 changes. The protrusion amount of the edge portion 2c changes.

本実施の形態の保持具1Cでは前述までの各実施の形態と同様に、コバ部2cが薄く保持具1Cからの取出しが難しいレンズ2に有効な保持具1Cであるため、押圧によるレンズ2の取り出しの機能とあわせてコバ部2cの突出量が調整できるので、コバ部2cの厚さや受け材8の出来栄え(寸法精度)に応じて調整を行なうことができる。   In the holder 1C according to the present embodiment, the edge portion 2c is thin and is effective for the lens 2 that is difficult to be removed from the holder 1C, as in the previous embodiments. Since the protrusion amount of the edge portion 2c can be adjusted together with the take-out function, the adjustment can be performed according to the thickness of the edge portion 2c and the quality of the receiving material 8 (dimensional accuracy).

具体的には受け材8と外筒7の出来栄えに応じ、実際のレンズ2を装着した状態で規制リング15の取り付け位置を変化させることで、隙間Gを変化させ、コバ部2cの厚さ等に応じて、適宜、レンズ2の突出量を調整することができる。   More specifically, the gap G is changed by changing the mounting position of the restriction ring 15 with the actual lens 2 attached in accordance with the performance of the receiving material 8 and the outer cylinder 7, and the thickness of the edge portion 2c, etc. Accordingly, the protruding amount of the lens 2 can be adjusted as appropriate.

本第4実施の形態の保持具1Cによれば前述までの実施の形態と同様な効果に加え、外筒7に取り付けた規制リング15の取り付け位置を調整することで、コバ部2cの薄いレンズ2に対して外筒7の保持位置を容易に調整することができる。   According to the holder 1C of the fourth embodiment, in addition to the same effects as those of the above-described embodiments, by adjusting the attachment position of the restriction ring 15 attached to the outer cylinder 7, a thin lens of the edge portion 2c. 2, the holding position of the outer cylinder 7 can be easily adjusted.

なお、上述の図3A〜図3Cに例示した保持具1Aの構成の外筒7に、規制リング15を設けても、同様の効果が得られる。
同様に、図4A、図4Bに例示した保持具1Bの構成の外筒7に、規制リング15を設けても、同様の効果が得られる。
(第5実施の形態)
図6Aおよび図6Bに本発明の第5実施の形態である保持具1Dを示す。前述までと同様に、同一部品に関しては同一番号付して説明を省略する。図6Aには保持具1Dの通常状態およびレンズ2を保持した状態を示し、図6Bには保持具1Dからレンズ2を取り出すところを示す。
Note that the same effect can be obtained even if the regulating ring 15 is provided in the outer cylinder 7 having the configuration of the holder 1A illustrated in FIGS. 3A to 3C described above.
Similarly, even if the regulating ring 15 is provided on the outer cylinder 7 having the configuration of the holder 1B illustrated in FIGS. 4A and 4B, the same effect can be obtained.
(Fifth embodiment)
6A and 6B show a holder 1D that is the fifth embodiment of the present invention. As before, the same parts are denoted by the same reference numerals and description thereof is omitted. 6A shows a normal state of the holder 1D and a state where the lens 2 is held, and FIG. 6B shows a state where the lens 2 is taken out from the holder 1D.

本実施の形態の保持具1Dでは、保持具1Dの受け材8と外筒7を係合する付勢力が、伸張状態のバネ19(弾性体)の収縮力によって実現される構成となっている。そのためバネ19は、延ばされた状態で固定ピン18によって固定されている。   In the holder 1D of the present embodiment, the biasing force that engages the receiving member 8 of the holder 1D and the outer cylinder 7 is realized by the contraction force of the spring 19 (elastic body) in the extended state. . Therefore, the spring 19 is fixed by the fixing pin 18 in the extended state.

すなわち、外筒7には、かんざし穴7aの回りに複数のバネ孔7eが開口され、さらに、外筒7の内部に収容された受け材8の背面には、個々のバネ孔7eに対応する位置に複数のバネ孔8bが設けられている。   That is, the outer cylinder 7 is provided with a plurality of spring holes 7e around the pin hole 7a, and the back surface of the receiving member 8 accommodated in the outer cylinder 7 corresponds to each spring hole 7e. A plurality of spring holes 8b are provided at the positions.

そして、バネ孔7eの内壁に突設された固定ピン18と、バネ孔8bの内壁に突設された固定ピン18の間に、伸張状態のバネ19が架設されている。そして、このバネ19の収縮力(復元力)により、受け材8の背面を外筒7の内端面に密着させる付勢力が作用する。   An extended spring 19 is installed between the fixed pin 18 protruding from the inner wall of the spring hole 7e and the fixed pin 18 protruding from the inner wall of the spring hole 8b. A biasing force that causes the back surface of the receiving member 8 to be in close contact with the inner end surface of the outer cylinder 7 acts by the contraction force (restoring force) of the spring 19.

以下、本第5の実施の形態の作用を説明する。
この場合、保持具1Dにおいて、受け材8と外筒7を係合するバネ19は、上述のように伸張された状態で両者に固定されているため、元の長さに戻ろうとする復元力が作用している。バネ19の復元力は、その両端に固定された固定ピン18を介して受け材8と外筒7に伝わり、両者を引き付ける力として作用する。このため通常は受け材8と外筒7が、バネ19により引き付けられ図6Aに示すように受け材8が外筒7の内部に引き込まれて接した状態となっている。
The operation of the fifth embodiment will be described below.
In this case, in the holder 1D, the spring 19 that engages the receiving member 8 and the outer cylinder 7 is fixed to both in the stretched state as described above, and therefore, a restoring force that attempts to return to the original length. Is working. The restoring force of the spring 19 is transmitted to the receiving member 8 and the outer cylinder 7 via the fixing pins 18 fixed to both ends thereof, and acts as a force for attracting both. For this reason, the receiving member 8 and the outer cylinder 7 are normally attracted by the spring 19 and the receiving member 8 is drawn into and in contact with the inside of the outer cylinder 7 as shown in FIG. 6A.

この保持具1Dを用いて研磨加工を行った後は、前述までと同様に図6Bに示すように、バネ19の収縮力に抗して、受け材8を外筒7から突出する方向に押圧することにより、レンズ2が外筒7から押し出され容易に取り出すことができる。   After polishing using the holder 1D, as shown in FIG. 6B, the receiving member 8 is pressed in the direction of protruding from the outer cylinder 7 against the contraction force of the spring 19 as described above. By doing so, the lens 2 is pushed out of the outer cylinder 7 and can be easily taken out.

このとき本実施の形態の保持具1Dではバネ19が伸びた状態で装着され、受け材8と外筒7を引き付けて保持しているため、押圧してレンズ2を押し出すためには、バネ19を装着状態より伸びるように押し出すことが必要である。また押圧力を解除すれば、伸びているバネ19が元に戻ろうとして受け材8と外筒7を引き付け両者が接触して係合された状態に戻る。   At this time, in the holder 1D of the present embodiment, the spring 19 is mounted in an extended state, and the receiving member 8 and the outer cylinder 7 are attracted and held. It is necessary to extrude so as to extend from the mounted state. Further, when the pressing force is released, the extending spring 19 pulls back the receiving member 8 and the outer cylinder 7 to return to the original state, and returns to a state where both are brought into contact with each other and engaged.

本第5実施の形態の保持具1Dではバネ19の収縮力を利用しているため、バネ19を受け材8と外筒7の内部に設けられたバネ孔8bおよびバネ孔7eの内部に収容した構成することができ、研磨装置Mなどに保持具1Dを取り付ける際に保持具1Dからの突起物がなく省スペースで設置が容易になる。   In the holder 1D of the fifth embodiment, since the contraction force of the spring 19 is used, the spring 19 is accommodated inside the spring hole 8b and the spring hole 7e provided in the receiving member 8 and the outer cylinder 7. When the holder 1D is attached to the polishing apparatus M or the like, there is no protrusion from the holder 1D, and installation is easy in a small space.

なお、この図6Aおよび図6Bに示した保持具1Dの構成に上述の規制リング15を設けても、同様の効果が得られる。
以上説明したように、本発明の各実施の形態の保持具によれば、コバ部2cが薄いレンズ2や小径のレンズ2であっても、コバ部2cの破損や精度低下を防止しながら、容易に脱着が行なえ、かつ安定した回転運動により高い研磨精度とキズ発生を防止することができる。
Note that the same effect can be obtained even if the above-described restriction ring 15 is provided in the configuration of the holder 1D shown in FIGS. 6A and 6B.
As described above, according to the holder of each embodiment of the present invention, even if the edge portion 2c is a thin lens 2 or a small-diameter lens 2, the edge portion 2c is prevented from being damaged or reduced in accuracy. Desorption can be easily performed, and high polishing accuracy and scratches can be prevented by stable rotational movement.

特に本発明では厚さが薄いレンズ2や、外径が小さいレンズ2、あるいは研磨面(被加工面2a)に高い面精度を要求するレンズ2等の光学素子に対して有効である。
なお、本発明は、上述の実施の形態に例示した構成に限らず、その趣旨を逸脱しない範囲で種々変更可能であることは言うまでもない。
In particular, the present invention is effective for optical elements such as the lens 2 having a small thickness, the lens 2 having a small outer diameter, or the lens 2 that requires high surface accuracy on the polished surface (processed surface 2a).
Needless to say, the present invention is not limited to the configuration exemplified in the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

本発明の第1実施の形態である研磨方法を実施する保持具を備えた研磨装置の構成の一例を示す略断面図である。It is a schematic sectional drawing which shows an example of a structure of the grinding | polishing apparatus provided with the holder which implements the grinding | polishing method which is 1st Embodiment of this invention. その作用の一例を示す略断面図である。It is a schematic sectional drawing which shows an example of the effect | action. その作用の一例を示す略断面図である。It is a schematic sectional drawing which shows an example of the effect | action. 本発明の第2実施の形態である保持具の構成および作用を示す略断面図である。It is a schematic sectional drawing which shows the structure and effect | action of a holder which are 2nd Embodiment of this invention. 本発明の第2実施の形態である保持具の構成および作用を示す略断面図である。It is a schematic sectional drawing which shows the structure and effect | action of a holder which are 2nd Embodiment of this invention. 本発明の第2実施の形態である保持具の構成および作用を示す略断面図である。It is a schematic sectional drawing which shows the structure and effect | action of a holder which are 2nd Embodiment of this invention. 本発明の第3実施の形態である保持具の構成および作用を示す略断面図である。It is a schematic sectional drawing which shows the structure and effect | action of a holder which are 3rd Embodiment of this invention. 本発明の第3実施の形態である保持具の構成および作用を示す略断面図である。It is a schematic sectional drawing which shows the structure and effect | action of a holder which are 3rd Embodiment of this invention. 本発明の第4実施の形態である保持具の構成および作用を示す略断面図である。It is a schematic sectional drawing which shows the structure and effect | action of a holder which are 4th Embodiment of this invention. 本発明の第4実施の形態である保持具の構成および作用を示す略断面図である。It is a schematic sectional drawing which shows the structure and effect | action of a holder which are 4th Embodiment of this invention. 本発明の第5実施の形態である保持具の構成および作用を示す略断面図である。It is a schematic sectional drawing which shows the structure and effect | action of a holder which are 5th Embodiment of this invention. 本発明の第5実施の形態である保持具の構成および作用を示す略断面図である。It is a schematic sectional drawing which shows the structure and effect | action of a holder which are 5th Embodiment of this invention.

符号の説明Explanation of symbols

1 保持具
1A 保持具
1B 保持具
1C 保持具
1D 保持具
2 レンズ
2a 被加工面
2b 保持面
2c コバ部
3 研磨皿
3a 研磨作用面
3b 駆動軸
4 表材
5 裏材
6 シート材
7 外筒
7a かんざし穴
7b 螺子貫通孔
7c テーパ部
7d 雌螺子部
7e バネ孔
8 受け材
8a 支持材
8b バネ孔
9 バネ
10 螺子
10a 螺子頭部
12 かんざし
12a 自在継手部
13 受けシート材
14 滑りシート材
15 規制リング
18 固定ピン
19 バネ
G 隙間
M 研磨装置
μ1 摩擦係数
μ2 摩擦係数
DESCRIPTION OF SYMBOLS 1 Holding tool 1A Holding tool 1B Holding tool 1C Holding tool 1D Holding tool 2 Lens 2a Processed surface 2b Holding surface 2c Edge part 3 Polishing plate 3a Polishing action surface 3b Drive shaft 4 Surface material 5 Backing material 6 Sheet material 7 Outer cylinder 7a Screw hole 7b Screw through hole 7c Tapered portion 7d Female screw portion 7e Spring hole 8 Receiving material 8a Support material 8b Spring hole 9 Spring 10 Screw 10a Screw head 12 Hairpin 12a Universal joint 13 Receiving sheet material 14 Sliding sheet material 15 Control ring 18 Fixing pin 19 Spring G Clearance M Polishing device μ1 Friction coefficient μ2 Friction coefficient

Claims (14)

研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
厚さ方向において表裏をなす第1および第2主面の各々の摩擦係数が異なるシート材と、
前記外筒の内部に位置し、前記シート材を介して前記被研磨物を支える受け材と、
前記受け材を前記外筒内に引き込む方向に付勢する弾性体と、
を含むことを特徴とする保持具。
A holding tool for holding an object to be slid in contact with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
Sheet materials having different friction coefficients of the first and second main surfaces that are front and back in the thickness direction;
A receiving material that is located inside the outer cylinder and supports the object to be polished via the sheet material,
An elastic body that urges the receiving member in a direction to be pulled into the outer cylinder;
A holder characterized by comprising.
請求項1記載の保持具において、前記シート材の、前記被研磨物の被加工面と反対の保持面に接する前記第1主面の摩擦係数に対して、前記受け材と接する前記第2主面の摩擦係数のほうが小さいことを特徴とする保持具。   2. The holder according to claim 1, wherein the second main material is in contact with the receiving material with respect to a friction coefficient of the first main surface of the sheet material that is in contact with a holding surface opposite to a surface to be processed of the workpiece. A holder having a smaller coefficient of friction on the surface. 研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
前記被研磨物の被加工面と反対の保持面と接する受けシート材と、
前記受けシート材と接し当該受けシート材よりも摩擦係数が小さい滑りシート材と、
前記外筒の内部に位置し、前記滑りシート材と固着して前記被研磨物を支える支持材と、
前記支持材を前記外筒内に引き込む方向に付勢する弾性体と、
を含むことを特徴とする保持具。
A holding tool for holding an object to be slid in contact with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
A receiving sheet material in contact with the holding surface opposite to the processing surface of the object to be polished;
A sliding sheet material in contact with the receiving sheet material and having a smaller coefficient of friction than the receiving sheet material;
A support material that is located inside the outer cylinder and is fixed to the sliding sheet material to support the object to be polished,
An elastic body that urges the support member in a direction in which the support member is pulled into the outer cylinder;
A holder characterized by comprising.
研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
前記被研磨物の被加工面と反対の保持面と接する受けシート材と、
前記外筒の内部に位置し、前記受けシート材に固着し前記被研磨物を支える受け材と、
前記受け材と接し前記受けシート材よりも摩擦係数が小さい滑りシート材と、
前記外筒の内部に位置し、前記滑りシート材に固着して前記受け材を介して前記被研磨物を支える支持材と、
前記受け材を前記外筒内に引き込む方向に付勢する弾性体と、
を含むことを特徴とする保持具。
A holding tool for holding an object to be slid in contact with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
A receiving sheet material in contact with the holding surface opposite to the processing surface of the object to be polished;
A receiving material that is located inside the outer cylinder and is fixed to the receiving sheet material and supports the object to be polished;
A sliding sheet material in contact with the receiving material and having a smaller coefficient of friction than the receiving sheet material;
A support material that is located inside the outer cylinder, is fixed to the sliding sheet material, and supports the object to be polished through the receiving material;
An elastic body that urges the receiving member in a direction to be pulled into the outer cylinder;
A holder characterized by comprising.
研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
厚さ方向において表裏をなす第1および第2主面の各々の摩擦係数が異なるシート材と、
前記外筒の内部に位置し、前記シート材を介して前記被研磨物を支える受け材と、
受け材を前記外筒内に引き込む方向に付勢する弾性体と、
前記外筒と前記受け材の相対的な位置を前記被研磨物の厚さ方向に移動調節可能に支承する規制リングと、
を含むことを特徴とする保持具。
A holding tool for holding an object to be slid in contact with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
Sheet materials having different friction coefficients of the first and second main surfaces that are front and back in the thickness direction;
A receiving material that is located inside the outer cylinder and supports the object to be polished via the sheet material,
An elastic body that urges the receiving material in a direction to be pulled into the outer cylinder;
A regulating ring that supports the relative position of the outer cylinder and the receiving member so as to be movable and adjustable in the thickness direction of the object to be polished;
A holder characterized by comprising.
請求項5記載の保持具において、前記シート材の、前記被研磨物の被加工面と反対の保持面に接する前記第1主面の摩擦係数に対して、前記受け材と接する前記第2主面の摩擦係数のほうが小さいことを特徴とする保持具。   The holder according to claim 5, wherein the second main member that contacts the receiving member with respect to a friction coefficient of the first main surface that contacts the holding surface opposite to the processing surface of the object to be polished of the sheet material. A holder having a smaller coefficient of friction on the surface. 研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
前記被研磨物の被加工面と反対の保持面と接する受けシート材と、
前記受けシート材と接し当該受けシート材よりも摩擦係数が小さい滑りシート材と、
前記外筒の内部に位置し、前記滑りシート材と固着して前記被研磨物を支える受け材と、
前記受け材を前記外筒内に引き込む方向に付勢する弾性体と、
前記外筒と前記受け材の相対的な位置を前記被研磨物の厚さ方向に移動調節可能に支承する規制リングと、
を含むことを特徴とする保持具。
A holding tool for holding an object to be slid in contact with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
A receiving sheet material in contact with the holding surface opposite to the processing surface of the object to be polished;
A sliding sheet material in contact with the receiving sheet material and having a smaller coefficient of friction than the receiving sheet material;
A receiving material that is located inside the outer cylinder and is fixed to the sliding sheet material to support the object to be polished;
An elastic body that urges the receiving member in a direction to be pulled into the outer cylinder;
A regulating ring that supports the relative position of the outer cylinder and the receiving member so as to be movable and adjustable in the thickness direction of the object to be polished;
A holder characterized by comprising.
研磨工具に摺接される被研磨物を保持する保持具であって、
前記被研磨物の外周部を押さえる外筒と、
前記被研磨物の被加工面と反対の保持面と接する受けシート材と、
前記外筒の内部に位置し、前記受けシート材に固着し前記被研磨物を支える受け材と、
前記受け材と接し前記受けシート材よりも摩擦係数が小さい滑りシート材と、
前記外筒の内部に位置し、前記滑りシート材に固着して前記受け材を介して前記被研磨物を支える支持材と、
前記支持材を前記外筒内に引き込む方向に付勢する弾性体と、
前記支持材を介して前記外筒と前記受け材の相対的な位置を前記被研磨物の厚さ方向に移動調節可能に支承する規制リングと、
を含むことを特徴とする保持具。
A holding tool for holding an object to be slid in contact with a polishing tool,
An outer cylinder that holds the outer periphery of the object to be polished;
A receiving sheet material in contact with the holding surface opposite to the processing surface of the object to be polished;
A receiving material that is located inside the outer cylinder and is fixed to the receiving sheet material and supports the object to be polished;
A sliding sheet material in contact with the receiving material and having a smaller coefficient of friction than the receiving sheet material;
A support material that is located inside the outer cylinder, is fixed to the sliding sheet material, and supports the object to be polished through the receiving material;
An elastic body that urges the support member in a direction in which the support member is pulled into the outer cylinder;
A regulating ring that supports the relative position of the outer cylinder and the receiving material through the support material so as to be movable and adjustable in the thickness direction of the object to be polished;
A holder characterized by comprising.
請求項1から請求項8のいずれか1項に記載の保持具において、前記弾性体はバネやゴムからなり、前記外筒および前記受け材を押圧する弾性力が、圧縮された前記弾性体の復元力により発生することを特徴とする保持具。   The holder according to any one of claims 1 to 8, wherein the elastic body is made of a spring or rubber, and an elastic force that presses the outer cylinder and the receiving material is compressed by the elastic body. A holding tool generated by a restoring force. 請求項1から請求項8のいずれか1項に記載の保持具において、前記弾性体はバネやゴムからなり、前記外筒および前記受け材を押圧する弾性力が、伸長された前記段設定体の復元力により発生することを特徴とする保持具。   The holder according to any one of claims 1 to 8, wherein the elastic body is made of a spring or rubber, and the step setting body in which an elastic force pressing the outer cylinder and the receiving member is extended. It is generated by the restoring force of the holder. 請求項7から請求項9のいずれか1項に記載の保持具において、互いに弾性体により押圧された前記外筒と前記受け材および前記規制リングが、前記被研磨物の厚さ方向に移動可能に支承していることを特徴とする保持具。   The holder according to any one of claims 7 to 9, wherein the outer cylinder, the receiving member, and the regulating ring that are pressed against each other by an elastic body are movable in a thickness direction of the object to be polished. A holding tool characterized by being supported by. 被研磨物の研磨工具と摺接する被加工面と反対の保持面を、シート材を介して受け材に支承させる研磨方法であって、
前記シート材の前記保持面に接する第1主面の摩擦係数よりも、前記シート材の前記受け材に接する第2主面の摩擦係数を小さくすることを特徴とする研磨方法。
A polishing method for supporting a holding surface opposite to a processing surface in sliding contact with a polishing tool of an object to be polished on a receiving material via a sheet material,
A polishing method, wherein the friction coefficient of the second main surface of the sheet material in contact with the receiving material is made smaller than the friction coefficient of the first main surface of the sheet material in contact with the holding surface.
請求項12記載の研磨方法において、
前記シート材は、互いに異なる材質からなり、前記保持面に接する第1シート材および前記受け材に接する第2シート材からなる多層構造を呈することを特徴とする研磨方法。
The polishing method according to claim 12, wherein
The polishing method according to claim 1, wherein the sheet material is made of different materials and has a multilayer structure including a first sheet material in contact with the holding surface and a second sheet material in contact with the receiving material.
請求項13記載の研磨方法において、
前記第1および第2シート材の間に前記受け材を挟む構造とし、前記受け材を、前記第2シート材を介して支持材にて支承することを特徴とする研磨方法。
The polishing method according to claim 13, wherein
A polishing method, wherein the receiving material is sandwiched between the first and second sheet materials, and the receiving material is supported by a support material via the second sheet material.
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