JP5016958B2 - 光学素子の製造方法 - Google Patents

光学素子の製造方法 Download PDF

Info

Publication number
JP5016958B2
JP5016958B2 JP2007072429A JP2007072429A JP5016958B2 JP 5016958 B2 JP5016958 B2 JP 5016958B2 JP 2007072429 A JP2007072429 A JP 2007072429A JP 2007072429 A JP2007072429 A JP 2007072429A JP 5016958 B2 JP5016958 B2 JP 5016958B2
Authority
JP
Japan
Prior art keywords
optical element
substrate
manufacturing
metal
plasmon resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007072429A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008232806A5 (enrdf_load_stackoverflow
JP2008232806A (ja
Inventor
亮 黒田
聡 西馬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007072429A priority Critical patent/JP5016958B2/ja
Publication of JP2008232806A publication Critical patent/JP2008232806A/ja
Publication of JP2008232806A5 publication Critical patent/JP2008232806A5/ja
Application granted granted Critical
Publication of JP5016958B2 publication Critical patent/JP5016958B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2007072429A 2007-03-20 2007-03-20 光学素子の製造方法 Expired - Fee Related JP5016958B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007072429A JP5016958B2 (ja) 2007-03-20 2007-03-20 光学素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007072429A JP5016958B2 (ja) 2007-03-20 2007-03-20 光学素子の製造方法

Publications (3)

Publication Number Publication Date
JP2008232806A JP2008232806A (ja) 2008-10-02
JP2008232806A5 JP2008232806A5 (enrdf_load_stackoverflow) 2010-05-27
JP5016958B2 true JP5016958B2 (ja) 2012-09-05

Family

ID=39905784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007072429A Expired - Fee Related JP5016958B2 (ja) 2007-03-20 2007-03-20 光学素子の製造方法

Country Status (1)

Country Link
JP (1) JP5016958B2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6067290B2 (ja) * 2011-09-13 2017-01-25 旭化成株式会社 メタマテリアル転写用積層体及びメタマテリアル被転写基材の製造方法
JP5957877B2 (ja) * 2011-12-26 2016-07-27 旭硝子株式会社 メタマテリアルの製造方法およびメタマテリアル
JP2014190834A (ja) 2013-03-27 2014-10-06 Fujifilm Corp 光電場増強デバイスおよびその製造方法
JP6790498B2 (ja) * 2016-06-24 2020-11-25 凸版印刷株式会社 表示体
US11220735B2 (en) * 2018-02-08 2022-01-11 Medtronic Minimed, Inc. Methods for controlling physical vapor deposition metal film adhesion to substrates and surfaces

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060130543A (ko) * 2003-08-06 2006-12-19 유니버시티 오브 피츠버그 오브 더 커먼웰쓰 시스템 오브 하이어 에듀케이션 표면 플라즈몬-강화 나노-광 소자 및 그의 제조 방법

Also Published As

Publication number Publication date
JP2008232806A (ja) 2008-10-02

Similar Documents

Publication Publication Date Title
Suresh et al. Fabrication of large-area flexible SERS substrates by nanoimprint lithography
Wang et al. Trends in nanophotonics‐enabled optofluidic biosensors
JP5397577B2 (ja) 表面プラズモン共鳴センサ及び当該センサ用チップ
Jonsson et al. Locally functionalized short-range ordered nanoplasmonic pores for bioanalytical sensing
US7705280B2 (en) Multispectral plasmonic crystal sensors
Guillot et al. Lithographied nanostructures as nanosensors
US7612883B2 (en) Dynamic plasmonics-enabled signal enhancement, a device comprising the same, and a method using the same
CN101571536B (zh) 单个纳米颗粒及其阵列基生物分子检测器的制备工艺
US7915053B2 (en) Substrate for target substance detecting device, target substance detecting device, target substance detecting apparatus and method using the same, and kit therefor
Ahmed et al. Large-scale functionalized metasurface-based SARS-CoV-2 detection and quantification
KR20160138059A (ko) 향상된 검정 감도를 위한 디지털 lspr
US20230341384A1 (en) Resonant nanophotonic biosensors
Nakamoto et al. Development of a mass-producible on-chip plasmonic nanohole array biosensor
JP2010256161A (ja) プラズモン励起センサおよびそれを用いたアッセイ法
JP2010145408A (ja) バイオチップ及び生体物質検出装置
JP5016958B2 (ja) 光学素子の製造方法
JP4840588B2 (ja) 分析用チップ及びその製造方法、分析装置並びに分析方法
Murugan et al. Recent advances in grating coupled surface plasmon resonance technology
Mukherji et al. Label—Free integrated optical biosensors for multiplexed analysis
JP2008020412A (ja) バイオアッセイ用基板、及び、バイオアッセイ方法
Zhao et al. Scalable fabrication of quasi-one-dimensional gold nanoribbons for plasmonic sensing
WO2012051451A2 (en) Highly efficient plasmonic devices, molecule detection systems, and methods of making the same
Valsecchi et al. Low-cost leukemic serum marker screening using large area nanohole arrays on plastic substrates
JP2009092405A (ja) 標的物質検出用素子、それを用いた標的物質検出装置、キット及び検出方法
WO2014168237A1 (ja) 構造体の複製方法及び当該複製方法を含む局在型表面プラズモン共鳴センサ用チップの製造方法、並びに、構造体、局在型表面プラズモン共鳴センサ用チップ及び局在型表面プラズモン共鳴センサ

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100323

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100412

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120207

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120409

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120605

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120611

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150615

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150615

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees