JP5009957B2 - Drainer drying system - Google Patents

Description

  The present invention relates to a drainage drying system that allows the drainage solution used in the final removal of adhering moisture from a cleaned workpiece to be continuously used stably over a long period of time.

  Various kinds of precision parts (referred to as “work” in this specification) such as electronic parts, metal parts, precision machine parts and optical parts including glass and lenses are attached with various inorganic and / or organic contaminants. It is necessary to ship the product after cleaning and removing the contaminant.

  In this case, in the past, the contaminants adhering to the workpiece that needs to be cleaned are washed with pure water or an aqueous cleaning agent containing a surfactant to obtain a cleaned workpiece. There was also a time when a process of draining the adhering water by immersing in a draining tank in which a fluorocarbon solvent was stored was performed.

  However, today, the use of chlorofluorocarbon solvents has been severely restricted from the viewpoint of increasing interest in the ozone hole problem and environmental problems and ensuring safety.

  Against such a background, in order to drain the water adhering to the cleaned workpiece, as disclosed in the following Patent Documents 1 and 2, flammable that is an alternative solvent for chlorofluorocarbon solvents. No fluorinated solvents are mainly used.

Japanese Patent Laid-Open No. 10-290901

JP 2006-15214 A

  Among these prior art documents, the above-mentioned Patent Document 1 discloses a flammability obtained by mixing isopropyl alcohol with hydrofluoroether (hereinafter, abbreviated as “HFE”) which is one of fluorine-based solvents. Disclosed is a draining and drying apparatus that includes a cleaning tank in which a non-reactive liquid mixture is stored and an HFE steam tank formed on the liquid surface of the cleaning tank, and drains and dries the cleaned workpiece with moisture attached thereto. Yes.

  And according to the drainage drying apparatus of the said patent document 1, the isopropyl alcohol which took in HFE and a water | moisture content was immersed in the wash | cleaned workpiece | work which the water | moisture adhered to the liquid mixture of isopropyl alcohol and HFE. And can be separated.

  In other words, moisture is removed from the cleaned workpiece with moisture due to the physical properties of isopropyl alcohol, and the isopropyl alcohol that has taken in moisture floats on the mixed liquid by specific gravity, and the floating liquid is passed through the overflow. Thus, it can flow down to the separation tank.

  On the other hand, in Patent Document 2 described above, a draining tank that stores a draining solution that is a mixed solution of a fluorine-based solvent and an alcohol solvent, and a draining solution that overflows from the draining tank are stored. Disclosed is a draining and drying apparatus comprising a separation tank for levitating and separating a high separation liquid, and an alcohol recovery apparatus for recovering an alcohol solvent concentrated by removing water from the separation liquid using a pervaporation membrane. Yes.

  And according to the drainage drying apparatus of the said patent document 2, by immersing the wash | cleaned workpiece | work in the draining tank which stores a draining solution, adhering water | moisture content is peeled off by receiving buoyancy by the specific gravity difference with a draining solution, and draining. It floats on the liquid level of the tank and can flow down to the separation tank together with the draining solution overflowing from the draining tank.

  The separated water and drained solution that flowed down into the separation tank are separated due to the difference in specific gravity, and a separated liquid having a high water concentration is floated and separated on the liquid surface, and the separated liquid is sent to an alcohol recovery device for pervaporation. Moisture is removed through the membrane, and it can be recovered as an alcoholic solvent concentrated by increasing the alcohol concentration and returned to the draining tank.

  That is, according to the draining and drying apparatus of Patent Document 2, the consumption of the alcoholic solvent contained in the draining solution is suppressed by efficiently recovering the alcoholic solvent from the drainage of the draining solution, and excellent. Drainability can be maintained.

  However, even if any of the draining and drying apparatuses disclosed in Patent Documents 1 and 2 is used, when the draining process is repeatedly performed from the cleaned workpiece that is sequentially immersed, the adhering moisture is alcohol in the draining solution. There is a problem that it dissolves in a solvent and becomes cloudy, which deteriorates the draining performance of the alcohol solvent and cannot be used.

  In addition, in order not to deteriorate the draining performance of the draining solution, the concentration of the alcohol solvent that is a component must always be checked, and a new alcohol solvent when the concentration is reduced or when the concentration is decreased. As a result of the need for additional supply, there is also a problem that complicates draining.

  In the present invention, in view of the problems seen in the above prior art, the washed workpiece is not directly immersed in the present draining solution, which is a mixed solution of a fluorine-based solvent and an alcohol-based solvent, but after the rough water is drained. It is an object of the present invention to provide a draining and drying system capable of performing draining work efficiently by delaying a decrease in the concentration of the alcohol-based solvent contained in the draining solution.

  The present invention has been made in order to achieve the above-described object. The workpiece after cleaning is immersed in the workpiece that needs to be cleaned with an aqueous cleaning solution, and the workpiece is immersed and at least subjected to ultrasonic vibration. A rough water draining device for storing a rough water draining solution as a fluorine-based solvent alone for peeling off the rough water by peeling off adhering moisture from the surface of the workpiece, and the fluorine draining solution comprising the fluorine-based solvent and an alcohol-based solvent. Residual moisture still adhering by applying ultrasonic vibration by re-immersing the work after rough water draining taken out from the rough drainer and re-immersing the workpiece while heating at a temperature below the boiling point of the system solvent And a final drainer for dissolving the product in the alcohol solvent and the stored drainer solution to the boiling point of the fluorinated solvent contained therein. Wherein the supermarkets layer by placing the workpiece after the final dewatering taken out of the drainage device and most important, comprising at least a vapor drying apparatus for vapor drying.

  In this case, the coarse draining device includes a jet tank that ejects the coarse drainage solution from the jet pipe to the washed workpiece immersed in the stored coarse drainage solution and separates the attached moisture. It is preferable that the workpiece taken out from the jet tank is re-immersed in the coarse water draining solution and ultrasonic vibration is applied to further reduce the amount of adhering moisture to form an ultrasonic vibration tank that separates and peels off.

  According to the present invention, in the rough draining device, since the rough draining solution for draining the workpiece after washing is stored as a fluorine-based solvent alone that can be separated even if a large amount of moisture is brought in, By immersing in the rough draining solution and applying ultrasonic vibration, about 90% of the water adhering to the workpiece can be drained. Further, in the water draining apparatus, the work from which about 90% of the adhering water has been roughly drained is re-immersed in the water draining solution and is subjected to ultrasonic vibration, so that the residual water of the work is surely drained. be able to.

  In other words, according to the present invention, the main draining device for the workpiece is subjected to the main draining after the pretreatment for roughly 90% of the adhering moisture amount without draining the washed workpiece immediately. In the main draining solution, the work in which the amount of adhering water is reduced to about 1/10 of the original is brought in.

  Therefore, according to the present invention, if the alcoholic solvent contained in the draining solution dissolves only the water that has been reduced to about 1/10 of the amount of adhering moisture when the workpiece after washing is drained immediately. As a result, the decrease in the concentration of the alcohol-based solvent can be slowed accordingly, so that the draining solution can last for a long time, and the draining operation of the workpiece can be carried out smoothly by reducing the maintenance work.

FIG. 2 is an explanatory diagram showing a system configuration example according to the present invention.

  As is clear from the system configuration example according to the present invention shown in FIG. 1, the draining and drying system 11 is a post-cleaning system in which moisture is adhered when a work (not shown) that needs to be cleaned is cleaned with an aqueous cleaning solution. A rough water draining device 12 for storing a rough water draining solution 17 for immersing the work, applying at least ultrasonic vibration to peel off adhering moisture from the surface of the work and draining the rough water as a fluorinated solvent alone, a fluorinated solvent and an alcohol The water draining solution 24 composed of a system solvent is stored while being heated at a temperature that does not reach the boiling point of the fluorinated solvent contained therein, and the work after the water draining removed from the rough water draining device 12 is re-immersed. The main water draining device 22 for dissolving the residual water still attached by applying ultrasonic vibration in the alcohol-based solvent and draining the final water, and the stored main draining solution 3 is a vapor drying apparatus in which the work after the final drainage taken out from the draining apparatus 22 is placed on the vapor layer 35 generated by heating up to the boiling point temperature of the fluorine-containing solvent contained therein, and vapor dried. 32 as a whole.

  In this case, the rough draining device 12 jets the rough draining solution 17 from the jet pipe 14 to the washed workpiece immersed in the stored rough draining solution 17 and separates the attached water from the jet tank 13. And the ultrasonic vibration tank 15 that re-immerses the work taken out from the jet tank 13 in the stored coarse draining solution 17 to give ultrasonic vibrations and further peels the adhering water finely. Has been. In this case, since the rough draining solution 17 is a fluorinated solvent that can be separated even if a large amount of water is brought in (for example, “Asahi Clin AE3000” manufactured by Asahi Glass Co., Ltd. made of HFE) as a simple substance. By immersing in the rough draining solution 17 and applying ultrasonic vibration, about 90% of the water adhering to the workpiece can be drained.

  Of these, the jet tank 13 has an appropriate volume and is formed so that the coarse draining solution 17 can be stored as a fluorinated solvent alone at room temperature, and the inner surface of the jet tank 13 is immersed and washed. A jet pipe 14 is provided for ejecting a coarse draining solution 17 which is a fluorinated solvent alone toward the work and peeling off adhering water.

  The ultrasonic vibration tank 15 has an appropriate volume and is formed so that the coarse draining solution 17 can be stored as a fluorinated solvent alone at room temperature. An ultrasonic transducer 16 is provided for applying ultrasonic vibration to the workpiece and peeling off the attached water.

  Further, the jet tank 13 and the ultrasonic vibration tank 15 allow the coarse water draining solution 17 mixed with water overflowing from the ultrasonic vibration tank 15 side to flow into the jet tank 13 side through the guide plate 18. Installed.

Moreover, the water-mixed coarse draining solution 17 overflowed from the jet tank 13 side is introduced into the first moisture separation tank 19 having the cooling coil 20 to separate and remove the moisture, and the crude draining solution 17 made of a fluorine-based solvent alone. And recirculated to the jet tank 13 and the ultrasonic vibration tank 15 so that they can be reused .

  On the other hand, the water draining device 22 has an appropriate volume and is composed of a water draining solution composed of a fluorinated solvent and an alcohol solvent (for example, “Asahi Klin AE3100E manufactured by Asahi Glass Co., Ltd., in which ethanol having a boiling point of 78.23 ° C. is mixed with HFE”). )) 24 can be stored while being heated through the heater 25 to a temperature that does not reach the boiling point of the fluorinated solvent contained therein, for example, at least 40 ° C., of which On the bottom surface, an ultrasonic vibrator 23 is provided for applying ultrasonic vibration to the immersed workpiece after draining the rough water to peel off adhering water.

  Further, the vapor drying apparatus 32 has a proper draining solution (for example, “Asahi Clin AE3100E” manufactured by Asahi Glass Co., Ltd. in which ethanol is mixed with HFE) 33 having an appropriate volume and made of a fluorine-based solvent and an alcohol-based solvent. The temperature of the boiling point of the fluorinated solvent contained in the water (53.7 ° C. if the draining solution 33 is “Asahi Clin AE3100E” manufactured by Asahi Glass Co., Ltd., for example) is heated via the heater 36 to obtain a predetermined liquid surface 33a. A float 37 is provided so that the position can be maintained and stored.

  For this reason, the vapor drying apparatus 32 can form the vapor layer 35 in the space 34 located above the stored main draining solution 33, so that the work after the final draining is placed in the vapor layer 35. By disposing, the workpiece can be vapor-dried.

  In addition, the main draining solution 24 mixed with water overflowing from the main draining device 22 side is introduced into the second moisture separation tank 26 having the cooling coil 27 to separate and remove the moisture, and from the fluorine-based solvent and the alcohol-based solvent. After being regenerated as the main draining solutions 24 and 33, the pipes are piped so that they can be recycled to the main draining device 22 and the vapor drying device 32 and reused. In the figure, reference numeral 28 denotes an alcohol concentration meter, and 29 denotes a pump.

  Further, the vapor drying device 32 includes a cooling coil 37 for cooling and condensing the vapor layer 35. In addition, the droplets collected by condensation are introduced into the third moisture separation tank 39 so that the moisture can be separated and removed from the droplets, regenerated as the main draining solution 24, and used again. It has become. Note that reference numerals 42, 43, and 44 in the figure indicate cooling coils necessary for condensing vapor generated in the system, and 52, 53, and 54 indicate filters for filtration, respectively.

  Next, the operation and effect of the present invention configured as described above will be described. First, the cleaned workpiece in a state where it is washed with an aqueous cleaning solution and attached with moisture constitutes the rough draining device 12. It is immersed in the rough draining solution 17 stored in the jet tank 13.

  Since the jet tank 13 can eject the rough draining solution 17 to the work immersed in the rough draining solution 17 via the jet pipe 14, the first stage is obtained by peeling the adhering moisture from the surface of the submerged work. Roughly drain the water.

The work that has been subjected to the rough water draining in the first stage in this manner is taken out from the jet tank 13 and immersed in the rough water draining solution 17 of the ultrasonic vibration tank 15, and the superstructure provided on the inner bottom surface of the ultrasonic vibration tank 17. The ultrasonic vibration generated by the ultrasonic vibrator 16 is applied to the immersion work, and the water remaining on the surface is refined and peeled to remove the next rough water, and then taken out from the ultrasonic vibration tank 17. It is.

  Moisture adhering to the workpiece after cleaning passes through such first-stage coarse drainage and subsequent-stage coarse drainage, so that about 90% of the amount can be peeled off from the workpiece surface and coarsely drained. Since the rough draining solution 17 for roughly draining the workpiece after washing is stored in the rough draining device 12 as a fluorinated solvent that can be separated even if a large amount of moisture is brought in, the rough draining solution 17 is stored. By immersing in 17 and applying ultrasonic vibration, about 90% of the water adhering to the workpiece can be roughly drained. Also, in the water draining device 12, the work from which about 90% of the attached water has been roughly drained is re-immersed in the water draining solution and ultrasonic vibration is applied to ensure that the remaining water on the work is finally drained. can do.

  In this way, the work in which about 90% of the adhering moisture amount has been drained from the work surface is immersed in the main draining solution 24 of the main draining device 22. That is, in the main draining solution 24, since the work is immersed in a state in which about 90% of the amount of water adhering after cleaning is roughly drained, the amount is about 1/10 of the adhering water amount after cleaning. Will be brought into the draining solution 24.

  In addition, the main draining device 22 stores the main draining solution 24 heated to, for example, about 40 ° C., which is a temperature that does not reach the boiling point of the fluorinated solvent contained in the main draining solution 24, and after the rough draining Since the ultrasonic vibrator 23 for applying ultrasonic vibration to the workpiece is provided, residual alcohol still adhering to the workpiece surface is refined and removed while the alcoholic solvent contained in the draining solution 24 is removed. It can be dissolved and finally drained.

  The work finally drained in this manner is taken out from the main draining device 22 and then carried into the vapor drying device 32 and placed in the vapor layer 35 in the space 34 located above the liquid surface 33a. Then, the draining solution 24 adhering to the workpiece is vapor-dried and then taken out as a product.

  For this reason, according to the present invention, in the rough draining device 12, the rough draining solution 17 for rough draining the workpiece after cleaning is stored as a single fluorine-based solvent that can be separated even if a large amount of moisture is brought in. Therefore, about 90% of the water adhering to the workpiece can be roughly drained by immersing the workpiece in the rough draining solution 17 and applying ultrasonic vibration.

  Further, in the main water draining tank 22, the work from which about 90% of the adhering water has been roughly drained can be re-immersed in the main water draining solution 24, and the ultrasonic vibration generated by the ultrasonic vibrator 23 can be applied. The residual water that has been micronized and peeled off from the work can be dissolved in an alcohol-based solvent contained in the water draining solution 24 and finally drained.

  That is, the workpiece after washing is not drained immediately, but is drained after a pre-treatment for roughly 90% of the attached water content to be drained, so that in the draining solution 24 in the draining device 22. In this case, a work in a state where the amount of adhering moisture is reduced to about 1/10 of the original is brought in.

  Therefore, it is sufficient that the alcoholic solvent contained in the draining solution 24 dissolves only the water that has been reduced to about 1/10 of the amount of water adhering when the workpiece after washing is drained immediately. Since the decrease in the concentration of the solvent can be slowed, the draining solution 24 can be carried out for a long time, and the draining operation of the workpiece can be performed smoothly while maintaining the efficiency and reducing the maintenance work.

  The above is the description of the present invention with reference to the drawings, and the gist of the present invention is not limited thereto. For example, in the illustrated example, the rough water draining device 12 is configured by two stages of the jet tank 13 and the ultrasonic vibration tank 15, but is formed only by the jet tank 13 or the ultrasonic vibration tank 15 as desired. You can also In addition, as a fluorine-based solvent used in the present invention, HFE can be suitably used regardless of the manufacturer, but a single solvent or a composite solvent mainly composed of hydrofluorocarbon, hydrochlorofluorocarbon or the like is used as desired. You can also. Further, as the alcohol solvent contained in the draining solution 24, a solvent having high water solubility such as isopropyl alcohol having a boiling point of 82.4 ° C. can be used in addition to ethanol.

DESCRIPTION OF SYMBOLS 11 Drainer drying system 12 Rough drainer 13 Jet tank 14 Jet pipe 15 Ultrasonic vibration tank 16 Ultrasonic vibrator 17 Rough water drain solution 18 Guide plate 19 First moisture separation tank 20 Cooling coil 21 Pump 22 Main drainer 23 Ultrasonic vibration Child 24 Draining solution 25 Heater 26 Second moisture separation tank 27 Cooling coil 28 Alcohol concentration meter 29 Pump 32 Vapor drying device 33 Draining solution 33a Liquid surface 34 Space part 35 Vapor layer 36 Heater 38 Cooling coil 39 Third moisture separation tank 42, 43, 44 Cooling coil 52, 53, 54 Filter

Claims (2)

Rough water draining is performed by immersing the workpiece after washing with water that is attached when washing a workpiece that needs to be washed with an aqueous cleaning solution, and removing the attached moisture from the surface of the workpiece by applying ultrasonic vibration at least. A rough draining device for storing the solution as a single fluorine-based solvent;
The work after draining the rough water drained from the rough water draining apparatus is stored while heating the water draining solution comprising a fluorine solvent and an alcohol solvent at a temperature not reaching the boiling point of the fluorine solvent contained therein. This water draining device that dissolves the remaining water still adhering to the alcoholic solvent by re-immersing and ultrasonically vibrating to finally drain the water,
The work after the final draining taken out from the draining apparatus is placed on the vapor layer generated by heating the stored draining solution to the boiling point of the fluorinated solvent contained therein, and dried by vapor. A drainage drying system comprising at least a vapor drying device. The coarse draining device includes a jet tank for ejecting the coarse drainage solution from the jet pipe to the washed workpiece immersed in the stored coarse drainage solution and peeling off the adhering moisture, and the stored coarse drainer. The draining device according to claim 1, wherein the workpiece taken out from the jet tank is re-immersed in a solution to form ultrasonic vibrations to further reduce the adhered water and to separate and peel off the workpieces. Drying system.

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