JP4962142B2 - 共重合体および感放射線性樹脂組成物 - Google Patents
共重合体および感放射線性樹脂組成物 Download PDFInfo
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- JP4962142B2 JP4962142B2 JP2007142861A JP2007142861A JP4962142B2 JP 4962142 B2 JP4962142 B2 JP 4962142B2 JP 2007142861 A JP2007142861 A JP 2007142861A JP 2007142861 A JP2007142861 A JP 2007142861A JP 4962142 B2 JP4962142 B2 JP 4962142B2
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- RGWHHWWMFUXNAX-UHFFFAOYSA-N bis(1-adamantyl)methanone Chemical class C1C(C2)CC(C3)CC2CC13C(=O)C1(C2)CC(C3)CC2CC3C1 RGWHHWWMFUXNAX-UHFFFAOYSA-N 0.000 description 1
- UESKLPHTGBBMEL-UHFFFAOYSA-M bis(4-tert-butylphenyl)iodanium 1,1-difluoro-2-(4-tetracyclo[6.2.1.13,6.02,7]dodecanyl)ethanesulfonate Chemical compound C12C(C3)CCC3C2C2CC(CC(F)(F)S(=O)(=O)[O-])C1C2.C1=CC(C(C)(C)C)=CC=C1[I+]C1=CC=C(C(C)(C)C)C=C1 UESKLPHTGBBMEL-UHFFFAOYSA-M 0.000 description 1
- DJBAOXYQCAKLPH-UHFFFAOYSA-M bis(4-tert-butylphenyl)iodanium;1,1,2,2,3,3,4,4,4-nonafluorobutane-1-sulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F.C1=CC(C(C)(C)C)=CC=C1[I+]C1=CC=C(C(C)(C)C)C=C1 DJBAOXYQCAKLPH-UHFFFAOYSA-M 0.000 description 1
- MIOPJNTWMNEORI-UHFFFAOYSA-N camphorsulfonic acid Chemical compound C1CC2(CS(O)(=O)=O)C(=O)CC1C2(C)C MIOPJNTWMNEORI-UHFFFAOYSA-N 0.000 description 1
- 150000001716 carbazoles Chemical class 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 150000001733 carboxylic acid esters Chemical class 0.000 description 1
- 239000012986 chain transfer agent Substances 0.000 description 1
- 150000003997 cyclic ketones Chemical class 0.000 description 1
- 150000001924 cycloalkanes Chemical class 0.000 description 1
- UKJLNMAFNRKWGR-UHFFFAOYSA-N cyclohexatrienamine Chemical group NC1=CC=C=C[CH]1 UKJLNMAFNRKWGR-UHFFFAOYSA-N 0.000 description 1
- KXGVEGMKQFWNSR-LLQZFEROSA-N deoxycholic acid Chemical class C([C@H]1CC2)[C@H](O)CC[C@]1(C)[C@@H]1[C@@H]2[C@@H]2CC[C@H]([C@@H](CCC(O)=O)C)[C@@]2(C)[C@@H](O)C1 KXGVEGMKQFWNSR-LLQZFEROSA-N 0.000 description 1
- 229960003964 deoxycholic acid Drugs 0.000 description 1
- KXGVEGMKQFWNSR-UHFFFAOYSA-N deoxycholic acid Natural products C1CC2CC(O)CCC2(C)C2C1C1CCC(C(CCC(O)=O)C)C1(C)C(O)C2 KXGVEGMKQFWNSR-UHFFFAOYSA-N 0.000 description 1
- 239000012933 diacyl peroxide Substances 0.000 description 1
- QVQGTNFYPJQJNM-UHFFFAOYSA-N dicyclohexylmethanamine Chemical compound C1CCCCC1C(N)C1CCCCC1 QVQGTNFYPJQJNM-UHFFFAOYSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- ORPDKMPYOLFUBA-UHFFFAOYSA-M diphenyliodanium;1,1,2,2,3,3,4,4,4-nonafluorobutane-1-sulfonate Chemical compound C=1C=CC=CC=1[I+]C1=CC=CC=C1.[O-]S(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ORPDKMPYOLFUBA-UHFFFAOYSA-M 0.000 description 1
- SBQIJPBUMNWUKN-UHFFFAOYSA-M diphenyliodanium;trifluoromethanesulfonate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C=1C=CC=CC=1[I+]C1=CC=CC=C1 SBQIJPBUMNWUKN-UHFFFAOYSA-M 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 208000018459 dissociative disease Diseases 0.000 description 1
- QSVAYRBPFFOQMK-UHFFFAOYSA-N ditert-butyl hexanedioate Chemical compound CC(C)(C)OC(=O)CCCCC(=O)OC(C)(C)C QSVAYRBPFFOQMK-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 1
- IJUHLFUALMUWOM-UHFFFAOYSA-N ethyl 3-methoxypropanoate Chemical compound CCOC(=O)CCOC IJUHLFUALMUWOM-UHFFFAOYSA-N 0.000 description 1
- 229940117360 ethyl pyruvate Drugs 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 229940100608 glycol distearate Drugs 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000004128 high performance liquid chromatography Methods 0.000 description 1
- 239000012456 homogeneous solution Substances 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical class I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 150000002432 hydroperoxides Chemical class 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000622 liquid--liquid extraction Methods 0.000 description 1
- SMEROWZSTRWXGI-HVATVPOCSA-N lithocholic acid Chemical compound C([C@H]1CC2)[C@H](O)CC[C@]1(C)[C@@H]1[C@@H]2[C@@H]2CC[C@H]([C@@H](CCC(O)=O)C)[C@@]2(C)CC1 SMEROWZSTRWXGI-HVATVPOCSA-N 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- HSDFKDZBJMDHFF-UHFFFAOYSA-N methyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OC HSDFKDZBJMDHFF-UHFFFAOYSA-N 0.000 description 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 1
- 229940017219 methyl propionate Drugs 0.000 description 1
- CWKLZLBVOJRSOM-UHFFFAOYSA-N methyl pyruvate Chemical compound COC(=O)C(C)=O CWKLZLBVOJRSOM-UHFFFAOYSA-N 0.000 description 1
- HEPOEAALKWFVLE-UHFFFAOYSA-N n -((perfluorooctanesulfonyl)oxy)-5-norbornene-2,3-dicarboximide Chemical compound C1=CC2CC1C1C2C(=O)N(OS(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C1=O HEPOEAALKWFVLE-UHFFFAOYSA-N 0.000 description 1
- YCMDNBGUNDHOOD-UHFFFAOYSA-N n -((trifluoromethylsulfonyl)oxy)-5-norbornene-2,3-dicarboximide Chemical compound C1=CC2CC1C1C2C(=O)N(OS(=O)(=O)C(F)(F)F)C1=O YCMDNBGUNDHOOD-UHFFFAOYSA-N 0.000 description 1
- ZQJAONQEOXOVNR-UHFFFAOYSA-N n,n-di(nonyl)nonan-1-amine Chemical compound CCCCCCCCCN(CCCCCCCCC)CCCCCCCCC ZQJAONQEOXOVNR-UHFFFAOYSA-N 0.000 description 1
- FRQONEWDWWHIPM-UHFFFAOYSA-N n,n-dicyclohexylcyclohexanamine Chemical compound C1CCCCC1N(C1CCCCC1)C1CCCCC1 FRQONEWDWWHIPM-UHFFFAOYSA-N 0.000 description 1
- COFKFSSWMQHKMD-UHFFFAOYSA-N n,n-didecyldecan-1-amine Chemical compound CCCCCCCCCCN(CCCCCCCCCC)CCCCCCCCCC COFKFSSWMQHKMD-UHFFFAOYSA-N 0.000 description 1
- CLZGJKHEVKJLLS-UHFFFAOYSA-N n,n-diheptylheptan-1-amine Chemical compound CCCCCCCN(CCCCCCC)CCCCCCC CLZGJKHEVKJLLS-UHFFFAOYSA-N 0.000 description 1
- DIAIBWNEUYXDNL-UHFFFAOYSA-N n,n-dihexylhexan-1-amine Chemical compound CCCCCCN(CCCCCC)CCCCCC DIAIBWNEUYXDNL-UHFFFAOYSA-N 0.000 description 1
- OOHAUGDGCWURIT-UHFFFAOYSA-N n,n-dipentylpentan-1-amine Chemical compound CCCCCN(CCCCC)CCCCC OOHAUGDGCWURIT-UHFFFAOYSA-N 0.000 description 1
- LABYRQOOPPZWDG-UHFFFAOYSA-M naphthalene-1-sulfonate;triphenylsulfanium Chemical compound C1=CC=C2C(S(=O)(=O)[O-])=CC=CC2=C1.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 LABYRQOOPPZWDG-UHFFFAOYSA-M 0.000 description 1
- 229960002715 nicotine Drugs 0.000 description 1
- SNICXCGAKADSCV-UHFFFAOYSA-N nicotine Natural products CN1CCCC1C1=CC=CN=C1 SNICXCGAKADSCV-UHFFFAOYSA-N 0.000 description 1
- 235000001968 nicotinic acid Nutrition 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 229960003512 nicotinic acid Drugs 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- UMRZSTCPUPJPOJ-KNVOCYPGSA-N norbornane Chemical compound C1C[C@H]2CC[C@@H]1C2 UMRZSTCPUPJPOJ-KNVOCYPGSA-N 0.000 description 1
- IOQPZZOEVPZRBK-UHFFFAOYSA-N octan-1-amine Chemical compound CCCCCCCCN IOQPZZOEVPZRBK-UHFFFAOYSA-N 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 150000002896 organic halogen compounds Chemical class 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- JLTDJTHDQAWBAV-UHFFFAOYSA-N phenyldimethylamine Natural products CN(C)C1=CC=CC=C1 JLTDJTHDQAWBAV-UHFFFAOYSA-N 0.000 description 1
- 150000004885 piperazines Chemical class 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920000259 polyoxyethylene lauryl ether Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- QLNJFJADRCOGBJ-UHFFFAOYSA-N propionamide Chemical compound CCC(N)=O QLNJFJADRCOGBJ-UHFFFAOYSA-N 0.000 description 1
- 229940080818 propionamide Drugs 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- PBMFSQRYOILNGV-UHFFFAOYSA-N pyridazine Chemical compound C1=CC=NN=C1 PBMFSQRYOILNGV-UHFFFAOYSA-N 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 150000003222 pyridines Chemical class 0.000 description 1
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 1
- 238000006862 quantum yield reaction Methods 0.000 description 1
- PMZDQRJGMBOQBF-UHFFFAOYSA-N quinolin-4-ol Chemical compound C1=CC=C2C(O)=CC=NC2=C1 PMZDQRJGMBOQBF-UHFFFAOYSA-N 0.000 description 1
- MCJGNVYPOGVAJF-UHFFFAOYSA-N quinolin-8-ol Chemical compound C1=CN=C2C(O)=CC=CC2=C1 MCJGNVYPOGVAJF-UHFFFAOYSA-N 0.000 description 1
- 239000007870 radical polymerization initiator Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229930187593 rose bengal Natural products 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- XKXIQBVKMABYQJ-UHFFFAOYSA-M tert-butyl carbonate Chemical group CC(C)(C)OC([O-])=O XKXIQBVKMABYQJ-UHFFFAOYSA-M 0.000 description 1
- WIURVMHVEPTKHB-UHFFFAOYSA-N tert-butyl n,n-dicyclohexylcarbamate Chemical compound C1CCCCC1N(C(=O)OC(C)(C)C)C1CCCCC1 WIURVMHVEPTKHB-UHFFFAOYSA-N 0.000 description 1
- VKUZRUNYENZANE-UHFFFAOYSA-N tert-butyl n-(1-adamantyl)-n-[(2-methylpropan-2-yl)oxycarbonyl]carbamate Chemical compound C1C(C2)CC3CC2CC1(N(C(=O)OC(C)(C)C)C(=O)OC(C)(C)C)C3 VKUZRUNYENZANE-UHFFFAOYSA-N 0.000 description 1
- WFLZPBIWJSIELX-UHFFFAOYSA-N tert-butyl n-[10-[(2-methylpropan-2-yl)oxycarbonylamino]decyl]carbamate Chemical compound CC(C)(C)OC(=O)NCCCCCCCCCCNC(=O)OC(C)(C)C WFLZPBIWJSIELX-UHFFFAOYSA-N 0.000 description 1
- HXINNZFJKZMJJJ-UHFFFAOYSA-N tert-butyl n-[12-[(2-methylpropan-2-yl)oxycarbonylamino]dodecyl]carbamate Chemical compound CC(C)(C)OC(=O)NCCCCCCCCCCCCNC(=O)OC(C)(C)C HXINNZFJKZMJJJ-UHFFFAOYSA-N 0.000 description 1
- VDSMPNIBLRKWEG-UHFFFAOYSA-N tert-butyl n-[6-[(2-methylpropan-2-yl)oxycarbonylamino]hexyl]carbamate Chemical compound CC(C)(C)OC(=O)NCCCCCCNC(=O)OC(C)(C)C VDSMPNIBLRKWEG-UHFFFAOYSA-N 0.000 description 1
- NMEQKHOJGXGOIL-UHFFFAOYSA-N tert-butyl n-[7-[(2-methylpropan-2-yl)oxycarbonylamino]heptyl]carbamate Chemical compound CC(C)(C)OC(=O)NCCCCCCCNC(=O)OC(C)(C)C NMEQKHOJGXGOIL-UHFFFAOYSA-N 0.000 description 1
- YLKUQZHLQVRJEV-UHFFFAOYSA-N tert-butyl n-[8-[(2-methylpropan-2-yl)oxycarbonylamino]octyl]carbamate Chemical compound CC(C)(C)OC(=O)NCCCCCCCCNC(=O)OC(C)(C)C YLKUQZHLQVRJEV-UHFFFAOYSA-N 0.000 description 1
- XSIWKTQGPJNJBV-UHFFFAOYSA-N tert-butyl n-[9-[(2-methylpropan-2-yl)oxycarbonylamino]nonyl]carbamate Chemical compound CC(C)(C)OC(=O)NCCCCCCCCCNC(=O)OC(C)(C)C XSIWKTQGPJNJBV-UHFFFAOYSA-N 0.000 description 1
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 1
- RAOIDOHSFRTOEL-UHFFFAOYSA-O thiolan-1-ium Chemical compound C1CC[SH+]C1 RAOIDOHSFRTOEL-UHFFFAOYSA-O 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 1
- ODHXBMXNKOYIBV-UHFFFAOYSA-N triphenylamine Chemical compound C1=CC=CC=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 ODHXBMXNKOYIBV-UHFFFAOYSA-N 0.000 description 1
- FAYMLNNRGCYLSR-UHFFFAOYSA-M triphenylsulfonium triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 FAYMLNNRGCYLSR-UHFFFAOYSA-M 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
- 238000000108 ultra-filtration Methods 0.000 description 1
- PXXNTAGJWPJAGM-UHFFFAOYSA-N vertaline Natural products C1C2C=3C=C(OC)C(OC)=CC=3OC(C=C3)=CC=C3CCC(=O)OC1CC1N2CCCC1 PXXNTAGJWPJAGM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Materials For Photolithography (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Description
基板として表面に膜厚770ÅのARC29A(ブルワー・サイエンス(Brewer Science)社製)膜を形成したシリコーンウエハーを用い、組成物溶液を基板上にスピンコートにより塗布し、表1に示した条件で、PBを行って形成した膜厚0.15μmのレジスト被膜に、Nikon社製フルフィールド縮小投影露光装置S306C(開口数0.75)を用いて、マスクパターンを介して露光した。その後、表1に示した条件で、PEBを行ったのち、2.38質量%のテトラメチルアンモニウムヒドロキシド水溶液により、23℃で30秒間現像し、水洗し、乾燥して、ポジ型のレジストパターンを形成した。このとき、直径0.10μmのホール・アンド・スペースパターン(1H1S)を1対1の線幅に形成する露光量を最適露光量とし、この最適露光量を感度とした。
実施例1〜3、参考例1〜4及び比較例1に関して、前記「感度」にて形成される孤立ホールの直径が100nmとなる任意の寸法の孤立ホールのマスクを見つけ出し、そのときの、孤立ホールの直径が100nm±10%となる焦点深度の範囲を測定した。
ホール幅0.10μmのホールパターン(1H1S)の方形状断面の下辺寸法Lbと上辺寸法Laとを走査型電子顕微鏡により測定し、0.85≦La/Lb≦1を満足し、かつパターン形状が裾を引いていない場合を、パターン形状が“良好”とし、0.85>La/Lbのとき、パターン形状が“不良”とした。
一般式(1)においてR1:−CH3、n1=4である化合物(化合物a)を40.97g(50モル%)、一般式(2)で表されるノルボルネンラクトンメタクリレート(化合物b)を59.03g(50モル%)およびアゾビスイソ酪酸ジメチル4.36gを、2−ブタノン250gに溶解して均一溶液としたモノマー溶液を準備した。また、2−ブタノン100gを投入した1000ミリリットル三口フラスコ内を攪拌しながら80℃に加熱し、前記モノマー溶液を滴下漏斗を用いて、12ミリリットル/5分の速度で滴下した。滴下開始時を重合開始時点として、80℃で重合を6時間実施した。重合終了後、反応溶液を30℃以下に冷却して、ヘキサンと2−プロパノールの1:1混合溶媒2,250g中へ投入し、析出した白色粉末をろ別した。その後、白色粉末をヘキサンと2−プロパノールの1:1混合溶媒450gと混合してスラリーとし攪拌する操作を2回繰り返して洗浄したのち、濾別し、50℃にて17時間乾燥して、白色粉末の樹脂(78g、収率78質量%)を得た。
一般式(1)においてR1:−CH2CH3、n=4である化合物(化合物c)を21.54g(50モル%)、一般式(2)で表されるノルボルネンラクトンメタクリレート(化合物b)を28.46g(50モル%)およびアゾビスイソ酪酸ジメチル2.10gを、2−ブタノン125gに溶解して均一溶液としたモノマー溶液を準備した。また、2−ブタノン50gを投入した500ミリリットル三口フラスコ内を攪拌しながら80℃に加熱し、前記モノマー溶液を滴下漏斗を用いて、5ミリリットル/5分の速度で滴下した。滴下開始時を重合開始時点として、80℃で重合を6時間実施した。重合終了後、反応溶液を30℃以下に冷却して、ヘキサンと2−プロパノールの1:1混合溶媒1,125g中へ投入し、析出した白色粉末をろ別した。その後、白色粉末をヘキサンと2−プロパノールの1:1混合溶媒225gと混合してスラリーとし攪拌する操作を2回繰り返して洗浄したのち、濾別し、50℃にて17時間乾燥して、白色粉末の樹脂(78g、収率78質量%)を得た。
化合物aを10.05g(25モル%)、化合物bを28.99g(50モル%)、一般式(3)においてR2:−CH3、n2=4である化合物(化合物d)を10.97g(25モル%)、およびアゾビスイソ酪酸ジメチル2.14gを、2−ブタノン100gに溶解して均一溶液としたモノマー溶液を準備した。また、2−ブタノン50gを投入した500ミリリットル三口フラスコ内を攪拌しながら80℃に加熱し、前記モノマー溶液を滴下漏斗を用いて、5ミリリットル/5分の速度で滴下した。滴下開始時を重合開始時点として、80℃で重合を6時間実施した。重合終了後、反応溶液を30℃以下に冷却して、メタノール1000g中へ投入し、析出した白色粉末を濾別した。その後、白色粉末をメタノール200gと混合してスラリーとし攪拌する操作を2回繰り返して洗浄したのち、濾別し、50℃にて17時間乾燥して、白色粉末の樹脂(39g、収率78質量%)を得た。
化合物cを10.58g(25モル%)、化合物bを27.96g(50モル%)、一般式(3)においてR2:−CH2CH3、n2=4である化合物(化合物e)を11.46g(25モル%)、およびアゾビスイソ酪酸ジメチル2.07gを、2−ブタノン100gに溶解して均一溶液としたモノマー溶液を準備した以外は合成例3と同様にして、白色粉末の樹脂(35g、収率70質量%)を得た。
化合物bを56.92g(50モル%)、化合物cを43.08g(50モル%)およびアゾビスイソ酪酸ジメチル4.21gを、2−ブタノン200gに溶解して均一溶液としたモノマー溶液を用いた以外は、合成例2と同様にして、白色粉末の樹脂を得た(73g、収率73質量%)。
表2に示す成分からなる各組成物について、各種評価を行った。評価結果を表3に示す。表2において、樹脂(A-1)〜(A-4)および(R-1)以外の成分は以下の通りである。
B−1:1−(4−n−ブトキシナフチル)テトラヒドロチオフェニウムノナフルオロ−n−ブタンスルホネート 式(6)
D−1:3−ピペリジノ−1,2−プロパンジオール 式(8)
D−2:N−t−ブトキシカルボニル−4−ヒドロキシピペリジン 式(9)
E−1:リトコール酸t−ブトキシカルボニルメチル 式(10)
C−1:プロピレングリコールモノメチルエーテルアセテート
C−2:シクロヘキサノン
Claims (2)
- 下記一般式(1)、(2)および(3)で表される繰返し単位のみからなり、共重合体を構成する全繰返し単位に対して、前記一般式(1)で表される繰返し単位の含有率が10〜60モル%であり、前記一般式(2)で表される繰返し単位の含有率が10〜60モル%であり、前記一般式(3)で表される繰返し単位の含有率が20〜60モル%であり、ゲルパーミエーションクロマトグラフィ(GPC)によるポリスチレン換算重量平均分子量が1,000〜100,000である共重合体。
- 請求項1に記載の共重合体、光酸発生剤および溶剤を含む感放射線性樹脂組成物。
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