JP4939149B2 - Multi-element spatial light modulator and video display device having the same - Google Patents

Description

  The present invention relates to a spatial light modulator capable of modulating light into an intermediate state between two states of light and dark, and an image display device including the same.

  Conventionally, in a spatial light modulator (SLM), liquid crystal is generally used as a pixel. In the SLM using such a general liquid crystal, for example, the light gradation between the bright state indicated by “1” and the dark state indicated by “0” is controlled by the magnitude of the applied voltage. In this SLM, it is desired to reduce the pixel size (pixel pitch) and increase the response speed. However, in the SLM using liquid crystal, there is a problem that it is difficult to reduce the pixel size (pixel pitch) to several μm or less, and the response time with respect to the applied voltage is relatively slow, about several tens μs.

On the other hand, a magneto-optic SLM (MOSLM) that can reduce the pixel size and shorten the response time is known (see, for example, Patent Document 1). MOSLM is composed of a magnetic thin film and utilizes a magneto-optic effect (Faraday effect). In MOSLM, two states corresponding to the direction of magnetization (predetermined direction and the opposite direction) are rotated by the direction of the applied magnetic field or rotated by a piezoelectric element.
JP 2006-84871 A (paragraphs 0002-0003, FIG. 5)

  However, since the MOSLM has a structure that takes two states corresponding to the magnetization direction in one pixel, the light gradation of one pixel is, for example, two gradations, a bright state indicated by “1” and a dark state indicated by “0”. (Corresponding to ON and OFF). If it is desired to produce a light gray level light gray level, the light intensity in the light middle level is generated for each pixel by temporally modulating the magnetization direction of each pixel. In this case, the high speed response of MOSLM must be sacrificed. Originally, the MOSLM is not intended for such control, and this may cause a problem such as deterioration of other performances.

  The present invention has been made in view of the problems as described above, and provides a multi-element spatial light modulator capable of modulating light into a bright and dark intermediate state with a high-speed response, and an image display device including the same. Objective.

In order to achieve the above object, a multi-element spatial light modulator according to claim 1 of the present invention is a reversal in which the magnetization direction is reversed depending on the direction and magnitude of a current supplied to each pixel on which light is incident. A light modulation element comprising a layer, a fixed layer having a fixed magnetization direction, and an intermediate layer that separates the inversion layer and the fixed layer, and controlling the direction and size of the light modulation element A multi-element spatial light modulator that supplies a current , reverses the magnetization direction of the inversion layer, modulates and emits light incident on the pixel, and the light modulation element is a CPP-GMR element or a TMR A plurality of light modulation elements including a first light modulation element and a second light modulation element are disposed in the pixel, and the first light modulation element, the second light modulation element, Corresponds to the magnitude of the flowing current. The shape viewed from the direction in which the current flows is different so that the magnitudes of external magnetic fields whose directions are reversed are different, and the multi-element spatial light modulator includes the first light modulation element arranged in the pixel or wherein by controlling the magnitude of current supplied to reverse the magnetization direction of the inversion layer of the second light modulator device, inverts the magnetization direction of the inversion layer of the first light modulation element or the second optical modulation element And an intermediate state between a light bright state and a dark state can be assigned.

According to this configuration, in the multi-element spatial light modulator, the magnetization characteristics when the magnetization reversal occurs between the first light modulation element and the second light modulation element in the pixel are different from each other . By changing the current flowing through the two light modulation elements, the combination of the light modulation elements whose magnetization direction is rotated by the magneto-optic Kerr effect is changed. That is, a state in which the magnetization directions of at least the first light modulation element and the second light modulation element are previously aligned in a predetermined direction is assigned to, for example, a light bright state, and a state in which the magnetization directions are aligned in the opposite direction is, for example, a light dark state In this case, a state in which only the magnetization direction of at least the first light modulation element or the second light modulation element is rotated from the initial state can be assigned to the intermediate state of light. Therefore, there is no need for time modulation as in the conventional MOSLM, and light can be modulated into an intermediate state between light and dark with high speed response.
Further, according to such a configuration, in a multi-element spatial light modulator, when a CPP (Current Perpendicular to the Plane) -GMR (Giant Magneto-Resistance) element is used as the light modulation element, the current is perpendicular to the film surface. Therefore, it is suitable for miniaturization of the spatial light modulator because of its structure compared with a CIP (Current In Plane) -GMR element in which a current flows in the film surface. In addition, when a TMR (Tunneling Magnetoresistive) element is used as the light modulation element, the change in magnetoresistance is several times larger than that of the CIP-GMR element, so that the reliability can be improved.

The multi-element spatial light modulator according to claim 2 is the multi-element spatial light modulator according to claim 1, wherein the current flows between the first light modulation element and the second light modulation element. The shape of the surface perpendicular to the direction is rectangular, and the aspect ratios of the squares are different from each other.

According to such a configuration, the multi-element spatial light modulator has shape magnetic anisotropy because the shapes of the first light modulation element and the second light modulation element are different. Therefore, the first light modulation element and the second light modulation element are different in magnitude of the external magnetic field when magnetization is reversed by the external magnetic field. Here, if the area of the surface perpendicular to the direction of current flow in the light modulation element is the same, for example, the current value corresponding to the magnitude of the external magnetic field at the time of magnetization reversal can be changed by changing the rectangular aspect ratio. It can be easily determined. In this case, it becomes easy to manufacture a light modulation element that realizes a smooth gradation.

Further, the multi-element spatial light modulator according to claim 3 is the multi-element spatial light modulator according to claim 1 or 2 , wherein the direction and the magnitude of the pulse current or the direct current flowing in the light modulation element. And a current control unit that reverses the magnetization direction of the inversion layer in the light modulation element by controlling injection of the light into the light modulation element.

  According to such a configuration, the multi-element spatial light modulator can shorten the time required for the state change by using spin injection magnetization reversal for the state change. In particular, in the case of a GMR element composed of a ferromagnetic layer / intermediate layer (nonmagnetic metal layer) / ferromagnetic layer and a TMR element composed of a ferromagnetic layer / intermediate layer (insulator layer) / ferromagnetic layer, the intermediate layer Therefore, the response time required for the spin injection magnetization reversal can be shortened to about several ps (picoseconds). Note that the operation speed of these elements is, for example, about 10 ns.

A video display device according to a fourth aspect includes the multi-element spatial light modulator according to any one of the first to third aspects.

  According to such a configuration, the video display device can emit the light incident from the light source by modulating the light into a light / dark intermediate state with a high-speed response by the multi-element spatial light modulator. Image quality can be improved. This video display device may be a transmissive type or a reflective type, and may display not only a planar video but also a stereoscopic video.

According to the first aspect of the present invention, it is possible to modulate light into an intermediate state between light and dark with high speed response.
In addition, according to the first aspect of the invention, the degree of miniaturization and the reliability can be increased.
According to the second aspect of the present invention, it becomes easy to manufacture a light modulation element having desired performance.
According to the invention of claim 3 , the response can be speeded up.
According to the invention of claim 4 , the image quality of the displayed video can be improved.

  The best mode for carrying out the multi-element spatial light modulator and the video display device of the present invention (hereinafter referred to as “embodiment”) will be described in detail below with reference to the drawings.

  FIG. 1 is a configuration diagram showing an example of a video display apparatus according to an embodiment of the present invention, and FIG. 2 is a plan view schematically showing the multi-element spatial light modulator shown in FIG. FIG. 3 is an explanatory diagram showing the operation principle of the multi-element spatial light modulator shown in FIG. 1, and FIG. 4 is a configuration diagram schematically showing the pixel shown in FIG.

  As shown in FIG. 1, the video display device 1 includes a laser light source 2, a screen 3, polarizing filters 4 (4 a and 4 b), and a multi-element spatial light modulator 10. In the present embodiment, the video display device 1 is a reflective display device, and the light emitted from the laser light source 2 is incident on the multi-element spatial light modulator 10 via the polarizing filter 4a, and the reflected light is transmitted. The image is displayed by being emitted to the screen 3 through the polarizing filter 4b. Of course, the video display device may be of a transmissive type.

  The multi-element spatial light modulator 10 modulates and emits light incident from the laser light source 2 by the intensity of magnetization that changes based on the direction and magnitude of the current flowing through each pixel 20 in each pixel 20. It is. As shown in FIGS. 1 and 2, the multi-element spatial light modulator 10 includes an upper electrode 11, a lower electrode 12, and a light modulation element 13. In the present embodiment, the multi-element spatial light modulator 10 is further configured to include the upper electrode selection unit 14, the lower electrode selection unit 15, the current source 16, and the current control unit 17. May be configured differently from the multi-element spatial light modulator 10.

  The upper electrode 11 and the lower electrode 12 are made of metal, alloy, or the like disposed above and below the light modulation element 13 to drive the light modulation element 13, and are disposed above and below at right angles to each other in plan view. Electrode. Among these, the upper electrode 11 is configured using a general transparent electrode material such as indium oxide (ITO) so that incident light can efficiently reach the light modulation element 13. The lower electrode 12 is made of a general electrode metal material such as Ta or Cr.

  The light modulation element 13 is composed of, for example, a CPP-GMR element or a TMR element. As shown in FIG. 4, the light modulation element 13 includes two types of light modulation elements 13a and 13b having different shape magnetic anisotropies. As shown in FIGS. 4 and 1, one pixel 20 is composed of a set of light modulation elements 13 a and 13 b at the intersection of the upper electrode 11 and the lower electrode 12. That is, one pixel is composed of one set (one pair) of light modulation elements 13a and 13b. Further, the multi-element spatial light modulator 10 of the present embodiment is composed of pixels 20 two-dimensionally arranged in a 4 × 4 matrix as shown in FIG.

The upper electrode selection unit 14 selects the pixels arranged in the vertical direction shown in FIG. 2 from the plurality of pixels 20 in a matrix form, and the lower electrode selection unit 15 selects the pixels arranged in the horizontal direction. One pixel 20 is specified by the upper electrode selection unit 14 and the lower electrode selection unit 15.
The current source 16 supplies a pulse current to the pixel 20. In addition, you may comprise so that a direct current may be supplied.

  The current control unit 17 controls the upper electrode selection unit 14, the lower electrode selection unit 15, and the current source 16. The current control means 17 controls the direction and magnitude of the current flowing through each pixel 20 and spins the pixels 20 to invert the magnetizations of the light modulation elements 13a and 13b.

  Next, spin injection performed by the current control means 17 will be described with reference to FIG. As shown in FIG. 3, the light modulation element 13 includes a fixed layer 101, an intermediate layer 102, and an inversion layer 103. Here, for simplicity, the two types of light modulation elements 13a and 13b are described as one light modulation element 13 without being distinguished.

The fixed layer 101 is a layer whose magnetization direction is fixed in a predetermined direction (left arrow).
The intermediate layer 102 is a tunnel barrier layer located in the middle between the fixed layer 101 and the inversion layer 103.
As shown in FIG. 3A, the inversion layer 103 is a layer in which the magnetization direction is aligned in advance in the direction opposite to the direction in the fixed layer 101 (right arrow) in the initial state.

  The light emitted from the laser light source 2 includes various polarization components, but is filtered by the polarization filter 4a so as to include only a polarization component in a certain direction. The filtered light enters the light modulation element 13 through the transparent upper electrode 11 and is reflected by the light modulation element 13.

  In the initial state shown in FIG. 3A, for example, no current is flowing from the current source 16. Alternatively, a current flows from the current source 16 in the direction from the lower electrode 12 to the upper electrode 11. In this initial state, the reflected light does not change the plane of polarization in accordance with the magnetization direction of the inversion layer 103 (right arrow). That is, the reflected light has the same polarization component as the incident light, passes through the polarizing filter 4b (same characteristics as the polarizing filter 4a), reaches the screen 3, and is displayed. As a result, a bright image is displayed on the screen 3.

  On the other hand, in the inverted state shown in FIG. 3B, for example, a current is passed from the current source 16 in the direction from the upper electrode 11 to the lower electrode 12. Due to this current, electrons are injected from the fixed layer 101 to the inversion layer 103 via the intermediate layer 102 while maintaining the spin, so that the magnetization direction of the inversion layer 103 is the same as that of the fixed layer 101 (left arrow). Rotate (reverse) so that In this inverted state, the plane of polarization of the reflected light is rotated by the magneto-optical Kerr effect according to the magnetization direction (left arrow) of the inversion layer 103. That is, the reflected light has a polarization component different from that of the incident light and does not pass through the polarizing filter 4b, and therefore cannot reach the screen 3. As a result, the screen 3 becomes dark.

  The current control means 17 can control the direction and magnitude of the magnetization direction of the inversion layer 103 by performing spin injection by changing the magnitude and direction of the current flowing through the light modulation element 13 in this way. Then, due to the magneto-optical Kerr effect of the light modulation element 13, it is possible to assign two bright and dark states of light to the initial state and the reversed state (spin injection magnetization reversed state). Note that the initial state may be assigned to the dark state and the bright state may be assigned to the inverted state.

  Next, the configuration of the light modulation elements 13 (13a, 13b) constituting the multi-element spatial light modulator 10 will be described with reference to FIG. 4A and 4B are configuration diagrams schematically showing the pixel shown in FIG. 2, where FIG. 4A is a plan view, FIG. 4B is a cross-sectional view taken along line B-B in FIG. CC sectional view is shown, respectively. Although FIG. 4 shows a region of one pixel, the multi-element spatial light modulator 10 manufactures a region of each pixel 20 at a time.

On the lower electrode 12, a fixed layer 101, an intermediate layer 102, and an inversion layer 103 are stacked. The lower electrode 12 is formed, for example, by laminating a metal material on a substrate such as silicon (Si), silicon oxide (SiO ₂ ), magnesium oxide (MgO), or glass by vapor deposition or sputtering, and then by photolithography or the like. The metal layer is formed by patterning into a desired shape. As a method of laminating each layer on the lower electrode 12, a molecular beam epitaxy (MBE) method or a sputtering method can be used.

  The fixed layer 101 is a layer whose magnetization direction is fixed, and is made of, for example, a conductive ferromagnetic material such as a Heusler alloy. The pinned layer 101 may be configured as a two to three layer structure combined with a spin pinned layer such as IrMn.

The intermediate layer 102 has a thickness (several nm or less) that allows spin-polarized electrons to tunnel. When the light modulation element 13 is composed of a CPP-GMR element, the intermediate layer 102 is composed of a nonmagnetic material. As the nonmagnetic material, a conductive metal or alloy such as Au, Al, Cu, or Cu alloy is preferable. Of these, Cu is particularly preferable because of its low electrical resistance and high barrier effect. When the light modulation element 13 is composed of a TMR element, the intermediate layer 102 is composed of an insulator such as oxide Al ₂ O ₃ , for example.

  The inversion layer 103 is a layer whose magnetization direction is previously aligned in the opposite direction to the magnetization direction of the fixed layer 101. The magnetization direction of the inversion layer 103 is not fixed and can be easily rotated (inverted) by spin injection. The inversion layer 103 is made of a ferromagnetic material that produces a magneto-optical Kerr effect and has a relatively high polarization rate. Here, since the value of the current required for magnetization reversal increases as the polarization rate decreases, the polarization rate is preferably 50% or more.

  When used in the reflective image display device 1 as in the present embodiment, the inversion layer 103 is preferably made of a material having high transparency to light, and the fixed layer 101 and the intermediate layer described above. 102 is preferably made of a material having a high reflectance with respect to incident light. Further, when the video display device is a transmissive type, it is preferable that the fixed layer 101, the intermediate layer 102, and the inversion layer 103 are made of a material having high transparency to light.

After the three-layer structure of the fixed layer 101, the intermediate layer 102, and the inversion layer 103 is laminated on the lower electrode 12, the three layers are patterned into a desired shape by a photolithography method or the like, and the light modulation element 13a, 13b is formed. Furthermore, each pixel 20 (16 pixels in this embodiment) is formed by sealing the space between the light modulation elements 13 a and 13 b with a sealing material such as SiO ₂ and laminating the upper electrode 11. To do.

  The light modulation elements 13a and 13b have a rectangular surface shape perpendicular to the direction of current flow, and the rectangular aspect ratios are different from each other. As shown in FIG. 4A, the light modulation elements 13a and 13b have the same rectangular area, and the square shapes are square and rectangular, respectively. Therefore, the light modulation element 13a has a smaller shape magnetic anisotropy than the light modulation element 13b.

  Since the optical modulation element 13a and the optical modulation element 13b have different shape magnetic anisotropy, the magnitude of the external magnetic field is different when the magnetization is reversed by the external magnetic field (the response to the external magnetic field is different). The respective magnetization characteristics at this time are shown in FIG.

  FIG. 5 is a graph showing an example of individual magnetization characteristics of the light modulation element shown in FIG. 4, where (a) shows the case where the shape of the light modulation element is square, and (b) shows the case where the shape is rectangular. Yes. In FIG. 5, although the magnetization characteristics are schematically shown as straight lines, they are actually curves that form a hysteresis loop. For example, a straight line portion parallel to the vertical axis actually has a predetermined inclination. ing.

As shown in FIG. 5A, the external magnetic field H _EX is gradually reduced from a state where the magnitude of the external magnetic field H _EX is “H ₁ ” in the predetermined direction (assumed to be +), and the direction of the external magnetic field H _EX is changed to the opposite direction ( In the range until the size is gradually increased and becomes “H ₂ ”, the light modulation element 13 a has a magnetization J magnitude of about “J ₁ ”. . When the magnitude of the external magnetic field H _EX is “H ₂ ”, the magnitude of the magnetization J changes to about “J ₂ ”. Thereafter, even if the magnitude of the external magnetic field H _EX is increased to “H ₃ ”, the magnitude of the magnetization J does not change substantially. That is, when the direction of the external magnetic field H _EX is changed from “+” to “−”, the light modulation element 13a has the magnitude of the external magnetic field H _EX when the magnetization J is reversed as “H ₂ ”. It is.

Further, the external magnetic field H _EX is gradually reduced from the state of “H ₃ ”, the direction of the external magnetic field H _EX is reversed to “+”, and the magnitude is gradually increased to become “H ₄ ”. In the range up to this point, the magnitude of the magnetization J of the light modulation element 13a does not change substantially. When the magnitude of the external magnetic field H _EX is “H ₄ ”, the magnitude of the magnetization J changes to about “J ₁ ”. Thereafter, the magnitude of the magnetization J does not change substantially even if the magnitude of the external magnetic field H _EX is increased to “H ₁ ”. That is, when the direction of the external magnetic field H _EX is changed from “−” to “+”, the light modulation element 13 a has the magnitude of the external magnetic field H _EX when the magnetization J is reversed as “H ₄ ”. It is.

When the external magnetic field H _EX is similarly changed in the light modulation element 13b, as shown in FIG. 5B, the direction of the external magnetic field H _EX is changed from “+” to “−”. The magnitude of the external magnetic field H _EX when the magnetization J is reversed is “H ₅ ”. Further, when the direction of the external magnetic field H _EX is changed from “−” to “+”, the light modulation element 13b has the magnitude of the external magnetic field H _EX when the magnetization J is reversed as “H ₆ ”. It is.

As shown in FIGS. 5A and 5B, the direction of magnetization of the light modulation element 13a is reversed with a smaller magnetic field than the light modulation element 13b. That is, it can be seen that the shape magnetic anisotropy is small. The size of the optical modulator 13a, respectively magnetization J of 13b has been described as "J _1, J _2", the value is not necessarily equal in FIGS. 5 (a) and 5 (b). These “J ₁ , J ₂ ” indicate that in each of the light modulation elements 13a and 13b, there are two states, a state in which the magnetization direction is a predetermined direction and a state in which the magnetization direction is rotated. Is for.

  FIG. 6 is a graph showing an example of magnetization characteristics of two light modulation elements, where (a) shows a case where both of the light modulation elements have a square shape, and (b) shows a combination of a rectangle and a square. Show.

As shown in FIG. 6A, if there are two light modulation elements 13a of the same type in a pixel, each light modulation element 13a has the same magnetization reversal response to the external magnetic field _HEX . The magnetization directions of the light modulation elements 13a are the same. That is, when viewed as the whole pixel, the magnitude of the magnetization J is simply a superposition of the values shown in FIG. In FIG. 6A, the magnitudes of magnetization before and after inversion in the entire pixel are “J ₁ and J ₃ ”, respectively. These “J ₁ , J ₃ ” are for indicating that there are two states, ie, a state in which the direction of magnetization is a predetermined direction and a state in which the magnetization is rotated, and the values thereof are particularly It is not limited.

On the other hand, when different types of light modulation elements 13a and 13b exist in the pixel 20 as in the present embodiment, each light modulation element 13a and 13b has a different magnetization reversal response to the external magnetic field H _EX, so that the external Depending on the magnitude of the magnetic field H _EX , the magnetization direction of the light modulation element 13a may not match the magnetization direction of the light modulation element 13b. That is, when viewed as the entire pixel 20, the magnitude of the magnetization J is simply a superposition of the value shown in FIG. 5A and the value shown in FIG. 5B. The graph at this time is shown in FIG. In FIG. 6B, for example, when the direction of the external magnetic field H _EX is changed from “+” to “−”, the magnitude of magnetization before and after inversion in the entire pixel 20 is “J ₁ ”. , J ₃ ”and, as an intermediate state between them, the magnitude of the magnetization J when only the light modulation element 13 a is reversed in magnetization is set to“ J ₂ ”. FIG. 7 shows how the magnetization directions of the light modulation elements 13a and 13b in the pixel 20 change when the external magnetic field _HEX is changed.

FIG. 7 is a diagram schematically showing the directions of magnetization of the two light modulation elements corresponding to FIG. 6B, where FIG. 7A is from H ₁ to H ₂ , and FIG. 7B is H _2. from to H _5, from (c) is H ₅ to H _4, shows (d) are respectively a state from H ₄ to H _6. As shown in FIGS. 7A and 7C, a state where the magnetization directions of the light modulation elements 13a and 13b are the same occurs twice, as shown in FIGS. 7B and 7D. In addition, a state where the magnetization directions of the light modulation elements 13a and 13b are different from each other occurs twice. That is, there are a total of four combinations of the magnetization directions of the light modulation elements 13a and 13b.

Among these, in the state where the magnetization directions of the light modulation elements 13a and 13b generated twice are different from each other, the magnitude of the magnetization J is the same (J ₂ ) as shown in FIG. Then, three values “J ₁ , J ₂ , J ₃ ” exist as the magnitude of magnetization. In other words, in the multi-element spatial light modulator 10, in the pixel 20, there are three types of states: a state in which the magnetization direction is aligned in a predetermined direction, a state in which the magnetization direction is aligned in the rotated direction, and a state in which a part is rotated. A magnetized state exists. In the multi-element spatial light modulator 10, light gradations are assigned to these three types of magnetization states. For example, the state aligned in a predetermined direction may be “bright”, the state aligned in the rotated direction may be “dark”, and the state partially rotated may be “bright / dark intermediate state”. Note that “J ₁ , J ₂ , J ₃ ” shown in FIG. 6B is for indicating that there are three types of magnetization states, and the values are not particularly limited.

  According to the present embodiment, the pixel 20 includes two types of light modulation elements 13a and 13b having different shape magnetic anisotropies, and the incident light is made bright and dark by combining the spin injection magnetization reversal and the magneto-optical Kerr effect. It can be modulated to an intermediate state. Further, according to the present embodiment, the intermediate state of light can be realized with a faster response than time modulation by MOSLM. Further, it is possible to realize a submicron pixel size by a known fine processing technique.

  As mentioned above, although this invention was demonstrated based on this embodiment, this invention is not limited to this. For example, the multi-element spatial light modulator 10 has been described as including two types of light modulation elements 13 a and 13 b in the pixel 20, that is, one pair, but the present invention is not limited to this. For example, as shown in FIG. 8A, four pairs of light modulation elements 13a and 13b may be included in one pixel 20A. Further, as shown in FIG. 8B, 16 pairs of light modulation elements 13a and 13b may be included in one pixel 20A. Further, the number of pairs is not particularly limited. Also, the number of vertical and horizontal numbers is not particularly limited as long as it is a matrix.

In the present embodiment, the light modulation elements 13a and 13b in the pixel 20 have a rectangular shape in the plane perpendicular to the current flow direction. However, the present invention is not limited to this. For example, as shown in FIG. 9A, the pixel 20C may include light modulation elements 13c and 13d whose planar shape is a polygon (an octagon in the figure).
Further, as illustrated in FIG. 9B, the pixel 20D may include light modulation elements 13e and 13f whose planar shapes are a circle and an ellipse.
Further, as shown in FIG. 9C, the pixel 20E may include two types of light modulation elements 13c and 13b having different planar shapes.
In the present embodiment, the two types of light modulation elements 13a and 13b have the same surface area perpendicular to the direction of current flow. For example, as shown in FIG. The light modulation elements 13g and 13b having different surface areas may be provided.

  In this embodiment, the pixel 20 includes the two types of light modulation elements 13a and 13b. However, the present invention is not limited to this. For example, as shown in FIG. 10A, the pixel 20G may include three types of light modulation elements 13h, 13i, and 13j having different planar shapes. In this case, as shown in FIG. 10A, three types of light modulation elements may be arranged on a straight line, or as shown in FIG. 10B, only two types of light modulation elements are arranged on a straight line. You may arrange in. Further, four or more types of light modulation elements 13 may be included in one pixel 20. 8 to 10 schematically show surfaces perpendicular to the direction of current flow in the pixels 20A to 20H.

In order to confirm the effect of the present invention, the multi-element spatial light modulator 10 according to the present embodiment was manufactured.
The multi-element spatial light modulator 10 of this embodiment includes two elements per pixel, that is, a CPP made of a material shown in Table 1 and including two pairs of light modulator elements 13 (13a, 13b) in one pixel 20. -Manufactured using a GMR element. The numbers in parentheses in Table 1 indicate the thickness [nm (nanometer)].

  The physical characteristics of the multi-element spatial light modulator 10 are shown in FIG. FIG. 11 is a graph showing element resistance when a CPP-GMR element is used as the light modulation element. FIG. 11A shows element resistance against an external magnetic field, and FIG. 11B shows element resistance against injected current.

  In the graph shown in FIG. 11A, three substantially equal values (4.11Ω, 4.16Ω, and 4.22Ω) are generated as the element resistance R corresponding to the change in the external magnetic field H. That is, three types of magnetization states are generated. From this, it can be seen that two types of light modulation elements 13a and 13b having different magnetic anisotropies could be manufactured.

  Similarly, in the graph shown in FIG. 11B, there are three substantially equal values (3.86Ω, 3.91Ω, 3.96) as the element resistance dV / dI corresponding to the change in the injection current I having a pulse width of 20 ms. Ω). From this, it can be seen that the three-stage magnetization state can be controlled by the injection current I having a pulse width of 20 ms. As a result, it can be seen that incident light can be modulated into bright, dark, and intermediate states.

Next, in the light modulation element 13, the surface perpendicular to the direction of current flow was manufactured with the same area and different aspect ratio, and the difference in shape magnetic anisotropy of the light modulation element 13 was confirmed.
FIG. 12 is an explanatory diagram of the shape magnetic anisotropy when a CPP-GMR element is used as the light modulation element. FIG. 12A schematically shows the shape of the surface perpendicular to the current flow direction of the light modulation element. FIG. 4B is a graph showing the magnetization characteristics of the light modulation element, and FIG. 4C is a graph showing the external magnetic field during magnetization reversal with respect to the change in the lateral width of the light modulation element.

As shown in FIG. 12 (a), the vertical length of the rectangular shape of the planar shape of the light modulation element 13 is 100 [nm], the horizontal length is a variable X [nm], and the horizontal length is different (vertical and horizontal). Four types of light modulation elements (with different ratios) were prepared. As shown in FIG. 12 (b), the magnitude of the external magnetic field H _EX when changed to "J ₄ 'from the value of magnetization by changing the external magnetic field H _EX is" J ₁ "and" H _S " . In the graph shown in FIG. 12B, the change in magnetization is simplified and shown as a straight line. In practice, the magnitude of the external magnetic field H _EX "H _S" is the magnitude of the external magnetic field H _EX when the value of magnetization of the "J _1", the external magnetic field H when the value of magnetization of the "J ₄ ' _{This is} the value obtained by averaging the magnitude of _EX . This is reflected in the graph shown in FIG.

As shown in FIG. 12C, when the horizontal length of the planar square of the light modulation element 13 is 180 [nm], the external magnetic field H _S at the time of magnetization reversal is 8000 [A / m]. (100 [Oe]). When the lateral length of the light modulation element was 350 [nm], the external magnetic field H _S at the time of magnetization reversal was 12000 [A / m] (150 [Oe]). As a result, when the aspect ratio is changed from “1.8” to “3.5”, the magnitude “H _S ” of the external magnetic field at the time of magnetization reversal changes to “1.5” times. confirmed. Thus, it can be seen that the light modulation element 13 having shape magnetic anisotropy that realizes various magnetization states and current characteristics can be designed.

It is the block diagram which showed an example of the video display apparatus concerning embodiment of this invention. FIG. 2 is a plan view schematically showing the multi-element spatial light modulator shown in FIG. 1. FIGS. 2A and 2B are explanatory diagrams illustrating an operation principle of the multi-element spatial light modulator illustrated in FIG. 1, in which FIG. 1A illustrates an initial state and FIG. It is a block diagram which shows typically the pixel shown in FIG. 2, (a) is a top view, (b) is the BB sectional drawing of (a), (c) is CC line of (a). Cross-sectional views are shown respectively. FIG. 5 is a graph showing an example of individual magnetization characteristics of the light modulation element shown in FIG. 4, where (a) shows a case where the shape of the light modulation element is a square, and (b) shows a case where the shape is a rectangle. It is a graph which shows an example of the magnetization characteristic of two light modulation elements, (a) has shown the case where both the shapes of a light modulation element are square, (b) has shown the case of the combination of a rectangle and a square, respectively. FIG. 7 is a diagram schematically illustrating the magnetization directions of two light modulation elements corresponding to FIG. 6B, where FIG. 6A is from H ₁ to H ₂ , and FIG. 6B is from H ₂ to H _5. (C) shows the state from H ₅ to H ₄ , and (d) shows the state from H ₄ to H ₆ , respectively. It is a top view which shows typically the example of a structure of the pixel containing two or more pairs which consist of two types of light modulation elements, (a) has shown the state of 4 pairs, (b) has each shown the state of 16 pairs. It is a top view which shows typically the shape of two types of light modulation elements, (a) is a polygon, (b) is a circle and an ellipse, (c) is a combination of two types of polygons , (D) show cases where the areas of the two types of light modulation elements are different. It is a top view which shows typically the structural example of the pixel containing 3 types of light modulation elements, (a) is the case where 3 types of light modulation elements are arrange | positioned on a straight line, (b) is 2 types of light modulation elements Are respectively shown in a straight line. It is a graph which shows element resistance at the time of using a CPP-GMR element as a light modulation element, (a) has shown element resistance with respect to an external magnetic field, (b) has shown element resistance with respect to injection current, respectively. It is explanatory drawing of the shape magnetic anisotropy at the time of using a CPP-GMR element as a light modulation element, (a) is a top view which shows typically the shape of the surface perpendicular | vertical to the current flow direction of a light modulation element, (B) is a graph showing the magnetization characteristics of the light modulation element, and (c) is a graph showing the external magnetic field at the time of magnetization reversal with respect to the change in the lateral width of the light modulation element.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Image display apparatus 2 Laser light source 3 Screen 4 (4a, 4b) Polarizing filter 10 Multi-element spatial light modulator 11 Upper electrode 12 Lower electrode 13 Light modulation element 14 Upper electrode selection part 15 Lower electrode selection part 16 Current source 17 Current control Means 20 Pixel 101 Fixed layer 102 Intermediate layer 103 Inversion layer 104 Sealant

Claims (4)

An inversion layer in which the magnetization direction is inverted depending on the direction and magnitude of a current supplied to each pixel on which light is incident, a fixed layer in which the magnetization direction is fixed, an intermediate layer that separates the inversion layer and the fixed layer, A light modulation element configured by stacking , supplying a current whose direction and size are controlled to the light modulation element, reversing the magnetization direction of the inversion layer, and modulating light incident on the pixel A multi-element spatial light modulator that emits
The light modulation element is composed of a CPP-GMR element or a TMR element,
The pixel includes a plurality of the light modulation elements including a first light modulation element and a second light modulation element,
The first light modulation element and the second light modulation element are different from each other in the direction in which the current flows so that the magnitude of the external magnetic field that reverses the magnetization direction of the inversion layer corresponds to the magnitude of the flowing current. The shape looked different,
The multi-element spatial light modulator is
Controlling the magnitude of the current supplied so as to reverse the magnetization direction of the inversion layer of the first light modulation element or the second light modulation element arranged in the pixel; multi-element spatial light modulator inversion layer by reversing the magnetization direction, and wherein the assigned intermediate states of the bright state and the dark state of the light of the second light modulation element. The said 1st light modulation element and the said 2nd light modulation element are comprised by the shape of a surface perpendicular | vertical to the direction through which the said current flows in a square, The aspect ratio of the said square differs from each other, It is characterized by the above-mentioned. The multi-element spatial light modulator as described. By controlling the direction and magnitude of the pulse current or a direct current flowing in the light modulation element, by spin injection to the light modulation device, a current control means for reversing the magnetization direction of the inversion layer in the optical modulator The multi-element spatial light modulator according to claim 1 or 2 , further comprising: An image display device comprising the multi-element spatial light modulator according to any one of claims 1 to 3 .

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