JP4934336B2 - Heater design / production / enforcement method and heater design / production / enforcement method - Google Patents

Description

  The present invention is, for example, in a manufacturing apparatus including a pipe that requires heating and heat insulation of a semiconductor manufacturing apparatus or the like, a heater design / manufacturing / construction for shortening a construction period of a heater for heating a pipe from the outside and completion. The present invention relates to a method and a heater used therefor.

  2. Description of the Related Art Conventionally, for example, in a semiconductor manufacturing apparatus or the like, unnecessary gas generated in a semiconductor manufacturing process is evacuated by a vacuum pump and discharged to the outside. Prior to discharge to the outside, unnecessary or harmful particles and components in the exhaust gas are cleaned and removed by a scrubber (cleaning dust collector), and the purified gas is discharged. The vacuum pump and the scrubber are connected by a pipe, and the exhaust gas passes through the pipe. Exhaust gas having a high temperature such as about 180 ° C. sucked by a vacuum pump may be liquefied or solidified when the temperature drops while passing through the pipe. In that case, the liquid may enter the pump and the pump may not operate normally. Further, if the gas is powdered and laminated in the pipe, the pipe may be narrowed.

  For this reason, measures are taken to prevent the temperature of the gas from decreasing by covering the outer periphery of the pipe with a heater and heating the pipe. As this heater, a plurality of fixed-length heaters having a predetermined length designed according to the length of the pipe are prepared, and they are continuously covered with the outer circumference of the pipe so that the pipe is not exposed. It has become.

  The work for installing the heater is usually performed at the final stage of the entire construction process from layout to completion of the manufacturing apparatus. This conventional process will be described with reference to FIG. FIG. 9 is a process diagram showing a conventional process from layout to completion of a manufacturing apparatus, showing a flow of the entire process on the side, and showing processes such as heater design / production and delivery in the vertical direction. In the horizontal process, the “layout” is a process for designing the configuration of the entire apparatus used in a system such as a semiconductor manufacturing apparatus, a pump, a scrubber (hereinafter referred to as a dust collector), and the “piping design” The process of designing the configuration of piping that connects between the devices, “pipe construction”, is a process of actually constructing the pipe on site. “Heater design / manufacturing” is a process of designing and manufacturing a heater to be fitted to the pipe, and “heater construction” is a process of attaching the heater to the pipe on site. After “heater construction” is completed, the manufacturing equipment can be “started to use”.

  In the vertical process for attaching the heater, “pipe measurement” is a process of measuring pipes on site after “piping work” is completed, and “heater ordering”, that is, heater ordering is performed together with pipe measurement. Next, “heater design / production” is performed, and the manufactured heater is delivered before the start of “heater construction”, and the heater is attached to the piping. In the case of this conventional example, the construction period from the start of “piping work” to the completion of “heater work” may take about 6 weeks as an example.

  In the conventional example, data such as piping dimensions are obtained at the site of piping work, but piping dimension data may be obtained at the “piping design” stage. In this case, “pipe measurement” at the site becomes unnecessary, “heater order” is made at the “piping design” stage, and “heater design” can be started at the “piping work” stage. As a result, the work period from the start of the “piping work” to the completion of the “heater work” can be shortened by about one week, and the process that took six weeks can be made five weeks.

  As described above, “heater design / production” could not be started until the dimensions of the piping were clarified. For this reason, if the previous stage of “Heater Design / Production” is delayed, “Heater Design / Production” is inevitably squeezed, and the entire construction period is lengthened, or the heater's built-in period is shortened, Or there was a problem that the work load increased. In the latter conventional example, the work period from the start of "plumbing work" to the start of use of the system is shortened by one week, but it is difficult to significantly shorten the work period during this period. Met.

  On the ordering side of this type of manufacturing equipment, there was a request to start the system operation as soon as possible, and there was a strong request to shorten the above construction period that was unavoidable due to the heater installation work on the piping. Until now, we have not been able to fully meet this demand.

  The present invention has been made in view of the above circumstances, by greatly shortening the work period from "plumbing work" to "start of use" of a manufacturing apparatus including piping that requires heating and heat retention, It is an object of the present invention to provide a heater design / manufacturing / construction method and a heater used therefor, which can shorten the entire construction period and obtain a sufficient heater period.

  The heater design / manufacturing / construction method according to the present invention is arranged in this order from the layout of the manufacturing equipment, the piping design / manufacturing and the piping work in the order from the layout to the completion of the manufacturing equipment including the piping that requires heating and heat insulation. In the heater design / manufacturing / construction method for constructing the heater on the outer periphery of the pipe, at least one adjustment heater that can expand and contract along the longitudinal direction of the pipe, and a fixed-length heater having a predetermined length It is used in combination as necessary, and the design and production of the heater is started before the piping work, and the length of the adjusting heater is adjusted to fit into the piping. In other words, the adjusting heater that can be expanded and contracted is combined with the fixed-length heater so as to be attached to the length of the pipe on site.

  Here, the “heater” includes both types of mantle heaters and silicone heaters.

  The design and production of the heater can be started at the time of layout.

  The adjustment heater includes a cylindrical heat insulating material fitted on the outer periphery of the pipe, in which a plurality of holes deforming along the pipe are formed, and heat generated in the heat insulating material so as to be close to the pipe side. And a jacket that covers the heat insulating material and the heat generating portion on the outer periphery of the pipe.

  The adjustment heater includes a heat insulating material formed of a plurality of ring-shaped heat insulating members fitted on the outer periphery of the pipe, a heat generating part attached to the heat insulating material so as to be close to the pipe side, and a heat insulating material and a heat generating part. You may comprise so that it may have a jacket which coat | covers so that the space | interval of a ring-shaped heat insulation member may contact | separate mutually.

  In addition, the adjustment heater can be connected to and separated from each other by a space between the heat insulating material that is crowned on the outer periphery of the pipe along the longitudinal direction of the pipe and that is composed of a pair of heat insulating members each containing a heat generating portion. It is also possible to have a jacket covering the heat insulating member so that the pair of heat insulating members have mutually complementary concave and convex portions that are relatively movable in the longitudinal direction.

  The heater design / production / construction method of the present invention uses a heater for adjustment in combination with a fixed-length heater to start the design / production of the heater before piping work and adjust the length of the heater for adjustment. Thus, the heater can be designed and manufactured prior to the piping work even if the route and the total length of the piping are not accurately known. Therefore, the design and production of the heater can be started without having to wait until the dimensions of the piping become clear as in the prior art, and the construction period from "pipe work" to "start of use" is greatly shortened. It is possible to prevent the delay of the entire construction period and to obtain a sufficient built-in period. In addition, since it is not necessary to accurately determine the heater dimensions from the length of the pipe, the heater design can be simplified to shorten the heater design / production period, thereby further shortening the construction period.

  In addition, if the design and production of the heater is started at the time of layout, the entire construction period can be further shortened. This shortens the construction period, which previously required about 5 weeks, to about 2 weeks. can do.

  Hereinafter, the best embodiment of the heater design / production / construction method of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a conceptual diagram illustrating an example of a route of a pipe from a manufacturing apparatus 1 such as a semiconductor manufacturing apparatus to a dust collector 4. As shown in FIG. 1, the manufacturing apparatus 1, the vacuum pump 2, and the dust collector 4 are connected by a pipe 6. In FIG. 1, the relationship between the pipe 6, the elbow 8, and the heaters 10 and 12 is schematically and transparently shown. Elbows 8 (8a, 8b, 8c, 8d) are attached to the bent portion of the pipe 6. These elbows 8 are composed of a heat insulating material to which a heater is attached, that is, a mantle heater, and each is a fixed-length heater 10 having a similar shape and several prescribed lengths. Further, the length between the vacuum pump 2 and the elbow 8a, between the elbow 8a and the elbow 8b, between the elbow 8b and the elbow 8c, and between the elbow 8c and the elbow 8d, is expanded and contracted with the fixed length heater 10. The adjusting heater 12 is combined and arranged.

  An example of the fixed length heater 10 and the adjustment heater 12 will be described with reference to FIG. FIG. 8 is a diagram illustrating an example of the fixed length heater 10 and the adjustment heater 12. The length of the heater is shown in mm at the top of FIG. In FIG. 8, the adjustment heater 12a indicates that its length can be adjusted between 150 mm and 200 mm, and the fixed length heater 10a indicates that it has a constant length of 200 mm. Similarly, the adjustment heater 12b can adjust the entire length in a size of 200 to 250 mm, and the fixed length heater 10b has a constant length of 250 mm.

  For example, when the space between the vacuum pump 2 and the elbow 8a in FIG. 1 is 380 mm, when a heater is installed on the installed pipe 6 on site, the following is performed. That is, as shown in the lowermost stage of FIG. 8, when the length of the pipe to be fitted with the heater is 380 mm, the length is variable between a fixed length heater 10a having a length of 200 mm and 150 to 200 mm. The piping 6 can be covered by combining the adjustment heater 12a. In this case, the length of the adjustment heater 12a is adjusted to 180 mm by shortening the length of 20 mm indicated by a broken line in FIG. The heater shown in FIG. 8 is an example and is not limited thereto. For example, the fixed-length heater 10 and the adjustment heater 12 can be set to a large size (for example, 500 mm, 1000 mm) of a certain length and a variable size in the vicinity of these dimensions. Therefore, for example, in FIG. 1, when the dimension of the pipe 6 between the elbow 8b and the elbow 8c is 950 mm, it can be dealt with by combining a fixed heater 10c of 500 mm and an adjustment heater 12c variable between 400 and 500 mm. can do. Needless to say, a plurality of heaters 10 and 12 may be used as needed in the straight path of the pipe 6.

  Thus, it is not necessary for the heater to have the heater length accurately determined in accordance with the length of the pipe 6, and the adjustment heater 12 that can be shortened in advance or in advance, and the fixed length. By using in combination with the heater 10, any length of the pipe 6 can be accommodated. In other words, if the layout (arrangement) of the vacuum pump 2 and the dust collector 4 and the like can be confirmed without actually measuring the length of the pipe 6 on site or obtaining the data of the designed pipe 6, the outline of the pipe 6 will be described. The necessary elbow 8 and heaters 10 and 12 can be prepared. The predicted route 22 of the pipe 6 is, for example, as shown by a one-dot chain line in FIG. Even if the predicted route 22 is slightly different from the actual length, the use of the adjustment heater 12 can solve the problem of the pipe length error. Accordingly, it is possible to start designing and manufacturing the heater at the stage where the layout of the vacuum pump 2 and the dust collector 4 is determined in advance, that is, the “layout” stage.

  In FIG. 1, when the gap between the elbow 8 d and the dust collector 4 is narrow in this way, one adjustment heater 12 is arranged.

  Next, the entire process will be described with reference to FIG. FIG. 7 is a process diagram similar to FIG. 9, showing the process when the heater design / production / construction method of the present invention is used. In this process, it is possible to grasp the approximate length of the route of the pipe 6 as described above in the “layout” which is the first stage of examining the system of the manufacturing apparatus.・ "Production" can be started. Since it is not necessary to design the heater as a dedicated product according to the length of the pipe as in the prior art, the design work can be greatly simplified and the heater design process can be shortened. As a result, at the end of the “piping work”, the heater can be delivered and the “heater work” can be started immediately after the “piping work”. In this way, the “heater design / manufacturing” period, which was previously required between “piping work” and “heater work”, is eliminated by proceeding with “heater design / manufacturing” in parallel with “layout”. Can do. As a result, the time period from “plumbing” to “start of use”, which previously took 5 to 6 weeks, can be significantly reduced to about 2 weeks.

  Note that the above construction period is an example, and it is a matter of course that the construction period is long and short depending on the layout state and the total length of the pipe 6. Therefore, in some cases, “heater design / production” can be completed in a short period of time before the “piping design” process.

  Next, the adjustment heater of the first embodiment used in the heater design / production / construction method of the present invention will be described with reference to FIGS. 2 and 3. FIG. 2 shows the adjustment heater 12A of the first embodiment, FIG. 2 (a) is a perspective view showing disassembled parts and a state in which they are assembled, and FIG. 2 (b) is an illustration of the adjustment heater 12A. The length is shortened. As shown in FIG. 2, the heat insulating material 14 used for the adjustment heater 12A has a substantially cylindrical shape made of a heat-resistant foam, cotton-like organic fiber, inorganic fiber, or the like, and its longitudinal direction and circumference A large number of, for example, diamond-shaped holes 14a are formed along the direction. Further, a separation portion 14c is formed along the axial direction of the cylinder, and the heat insulating material 14 can be opened and closed by the separation portion 14c.

  Since the pipe 6 is accommodated in the through hole 14 b that penetrates the cylinder of the heat insulating material 14 in the axial direction, the diameter of the through hole 14 b is larger than the outer diameter of the pipe 6. A nichrome wire 18 (FIG. 3) not shown in FIG. 2 is attached to the inside of the heat insulating material 14. The jacket 16 covering the heat insulating material 14 is formed of a glass cloth, a silicone sheet or the like, and has a double structure including an outer cloth 16a and an inner cloth 16b for housing the heat insulating material 14. The jacket 16 has a mating portion 24 along the axial direction. The heat insulating material 14 is covered with a jacket 16 together with the nichrome wire 18 to constitute an adjustment heater 12A as shown in FIG. The aforementioned aligning portion 24 may not be linear as shown in FIG. Since the adjustment heater 12A has a structure in which a heat insulating material 14 such as cotton is covered with an outer cover 16, it can play a sufficient role even if it is not geometrically accurate as shown. The structure of the adjustment heater 12A will be described in more detail with reference to FIG.

  FIG. 3 is a partially enlarged cross-sectional view showing a cross section of the adjustment heater 12 </ b> A fitted on the pipe 6. The nichrome wires 18 are held on the heater cloth 20 at a predetermined interval. The nichrome wire 18 and the heater cloth 20 are collectively referred to as a heat generating portion 19. The heat insulating material 14 and the heat generating portion 19 are covered with a jacket 16. The part which becomes the outer side of the heat insulating material 14 among the jackets 16 is the outer cloth 16a, and the part which becomes the inner side of the heat insulating material 14 becomes the inner cloth 16b.

  When the adjustment heater 12 </ b> A is attached to the pipe 6, it is opened by the mating portion 24 and is fitted on the outer periphery of the pipe 6. After the attachment, the mating portion 24 is fixed so as not to open with Velcro (registered trademark) 26 (FIG. 2A) attached to the outer side of the jacket 16 or the like. The magic tape (registered trademark) 26 is preferably provided at a plurality of locations along the mating portion 24. In FIG. 2A, only a part of the magic tape (registered trademark) 26 is exemplarily shown by virtual lines.

  In order to shorten the length of the adjustment heater 12A, the mantle heater 12A may be pressed and compressed from the longitudinal direction as shown in FIG. The outer cloth 16a and the inner cloth 16b of the extra portion of the outer jacket 16 are stitched together to regulate the shortened heat insulating material 14 so as to maintain its length. The surplus portion of the jacket 16 may then be compressed as it is, or may be fitted to the ends of the heaters 10 and 12 if there are other adjacent fixed-length heaters 10 or adjustment heaters 12. In addition, the hole 14a of the heat insulating material 14 does not need to be a rhombus, and can be an arbitrary shape such as a circle, an ellipse, or a rectangle.

  Next, an adjustment heater 12B according to a second embodiment of the present invention will be described with reference to FIG. FIG. 4 shows the adjustment heater 12B of the second embodiment, FIG. 4 (a) is a perspective view showing disassembled parts and a state in which they are assembled, and FIG. 4 (b) is an illustration of the adjustment heater 12B. The length is shortened. The adjustment heater 12 </ b> B includes an outer cover 56 similar to the outer cover 16 used in the adjustment heater 12 </ b> A of the first embodiment, and a heat insulating material 54 covered with the outer cover 56. A matching portion 64 and a separation portion 54c are also formed in the jacket 56 and the heat insulating material 54, respectively. The heat insulating material 54 is composed of a plurality of ring-shaped heat insulating members 54 a made of the same material as in the first embodiment and arranged in the outer cover 56 so as to be separated from each other. Inside these heat insulating members 54a, the same heat generating part (not shown) as in the first embodiment is arranged. Similarly to the first embodiment, the heat generating portion is configured by sewing a nichrome wire on a heater cloth (not shown) with a heat insulating thread at a predetermined interval. In order to reduce the adjusting heater 12B in the longitudinal direction, it is only necessary to apply a force in the axial direction to narrow the interval between the ring-shaped heat insulating members 54a. Thereby, the full length of the adjustment heater 12B can be shortened to a desired length. The pipe 6 can be attached by opening the mating part 64 and the separating part 54c. In FIG. 4, the illustration of Velcro (registered trademark) is omitted.

  Next, a third embodiment of the present invention will be described with reference to FIGS. FIG. 5 shows an adjustment silicone heater according to a third embodiment of the present invention, FIG. 6 is a partial cross-sectional view of the silicone heater of FIG. 5, and FIG. 6 (b) shows a state where the entire length is assembled to the longest, and FIG. 6 (c) shows a state where the entire length is shortened. An adjustment silicone heater (hereinafter simply referred to as an adjustment heater) 12C includes an outer sheath 106 similar to that of the first embodiment and a heat insulating material 103 including a pair of heat insulating members 103a and 103b. Each of the heat insulating members 103a and 103b is formed of, for example, a heat resistant resin such as silicone rubber, and the annular main body portion 107 (107a and 107b) and an uneven portion having a shape that complements each other toward each other. 108 (108a, 108b). The concavo-convex portion 108 has a dimensional relationship in which the convex portion 110 of one heat insulating member 103a or 103b is accommodated in the concave portion 112 of the other heat insulating member 103b or 103a. Accordingly, the heat insulating members 103a and 103b can approach or be separated from each other. Each of these heat insulating members 103a and 103b is integrally embedded with a nichrome wire (not shown) so that the surfaces of the heat insulating members 103a and 103b generate heat. Each nichrome wire is connected by a relay wire (not shown).

  The pair of heat insulating members 103 a and 103 b are accommodated in a cover, that is, the outer jacket 106 in a state of being combined with each other. Each heat insulating member 103a, 103b has a slit 114 (114a, 114b) as a separating portion in the axial direction, and is arranged in the outer cover 106 in alignment with the matching portion 124 of the outer cover 106. Since the heat insulating material 103 is formed from a relatively elastic member such as silicone, even if the opposite side of the slit 114 is not separated, the portion of the slit 114 is expanded to cover the pipe 6. Can be fitted. Of course, a slit may be formed on the opposite side of the slit 114 so that each of the heat insulating members 103a and 103b is divided. Further, since the inner surface of the heat insulating material 103 is a surface formed according to the outer surface of the pipe 6, this portion is not covered with the jacket 106, and the pipe 6 is directly in contact with the outer surface of the pipe 6. It is put on.

  As shown in FIG. 6B, the adjustment heater 12C has the heat insulating members 103a and 103b in a state where the convex portion 110 of one heat insulating member 103a or 103b is inserted into the concave portion 112 of the other heat insulating member 103b or 103a. When they are separated from each other to the maximum, the total length of the adjustment heater 12C is maximized. On the other hand, as shown in FIG. 6C, when the heat insulating members 103a and 103b are moved closer to each other by sliding the convex portion 110 and the concave portion 112, the total length of the adjustment heater 12C is shortened. Of course, it is easy to change the overall length to a desired length by setting the interval between the heat insulating members 103a and 103b to an arbitrary position. In the state in which the heat insulating material 103 is shortened, an excessive portion is generated at the end portion of the outer cover 106 as shown in FIG. 6C, but this portion may be cut off or inside the heat insulating material 103. It may be folded. Also in the third embodiment, the illustration of Velcro (registered trademark) is omitted.

  As mentioned above, although preferable embodiment of this invention was described, it cannot be overemphasized that it is not limited to the said embodiment and various deformation | transformation and a change are possible. For example, in the third embodiment, a set of two heat insulating members 103 a and 103 b is used, but a set of three heat insulating members arranged along the pipe 6 may be used. In that case, an uneven part of a shape complementary to the uneven part of the corresponding heat insulating member is formed at both ends of the intermediate heat insulating member.

The conceptual diagram which shows an example of the path | route of piping from a manufacturing apparatus to a dust collector by the heater design, manufacture, and construction method of this invention The adjustment heater of the 1st Embodiment of this invention is shown, (a) is a disassembled component and the perspective view which shows the state which assembled them, (b) is the state which shortened the length of the adjustment heater. Show. Partial expanded sectional view which shows the cross section of the heater for adjustment of FIG. 2 fitted by piping The adjustment heater of the 2nd Embodiment of this invention is shown, (a) is a disassembled component and the perspective view which shows the state which assembled them, (b) is the state which shortened the length of the adjustment heater. Show. The heater for adjustment of the 3rd Embodiment of this invention is shown. FIG. 6 is a partial cross-sectional view of the adjustment heater of FIG. 5, (a) shows the disassembled parts and outer casing, (b) shows the assembled state so that the total length becomes the longest, and (c) shortens the total length. Shows the state. The same process diagram as FIG. 9 showing the process when the heater design / production / construction method of the present invention is used. The figure which shows an example of the fixed length heater and adjustment heater which are used for the heater design, manufacture and construction method of the present invention Process diagram showing the process from layout of manufacturing equipment to start of use

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Semiconductor manufacturing apparatus 6 Piping 8, 10 Fixed length heater 12 Adjustment heater 14, 54, 103 Heat insulating material 14a Hole 16, 56, 106 Outer sheath 18 Nichrome wire 19 Heat generating part 54a Ring-shaped heat insulating member 103a, 103b Heat insulating member 108 Unevenness Part

Claims (5)

When the layout of the manufacturing equipment, the piping design / manufacturing and the piping work are performed in this order during the construction period from the layout of the manufacturing equipment including piping that requires heating and heat insulation to the completion, the heater is placed on the outer periphery of the piping. In the heater design / production / construction method for construction,
Use of the pipe and at least one adjusting heaters having a stretched or squeezed capable cylindrical structure in the longitudinal direction of the through hole having fitted to the through hole in, combined if necessary with a fixed length heater having a predetermined length The heater design / manufacturing / construction method is characterized in that the design / manufacture of the heater is started before the piping work, and the length of the adjusting heater is adjusted to fit the pipe.   The heater design / production / construction method according to claim 1, wherein the design / production of the heater is started at the time of the layout. The adjustment heater is disposed in the heat insulating material so as to be close to the pipe side, and a cylindrical heat insulating material fitted on the outer periphery of the pipe, in which a plurality of holes deforming along the pipe are formed. 3. The heater design / manufacturing / constructing method according to claim 1, further comprising: an exothermic heat generating portion and an outer sheath covering the heat insulating material and the heat generating portion on an outer periphery of the pipe. heater to be more design, manufacturing and construction to. The adjustment heater is a heat insulating material composed of a plurality of ring-shaped heat insulating members fitted on the outer periphery of the pipe, a heat generating part attached to the heat insulating material so as to be close to the pipe side, and the heat insulating material. 3. The heater design / manufacture according to claim 1, further comprising: an outer cover that covers the heat generating portion so that a space between the ring-shaped heat insulating members can be contacted and separated from each other. heater to be more design, manufacturing and construction to construction methods. The adjustment heater is covered with an outer periphery of the pipe along the longitudinal direction of the pipe, each of which includes a heat insulating material including a pair of heat generating members, and the distance between the heat insulating members is in contact with each other. A cover for covering the heat insulating member so as to be separable, and the one set of heat insulating members has mutually complementary concave and convex portions that are relatively movable in the longitudinal direction. heaters are more design, manufacturing and construction to claim 1 or 2 heater design, manufacture and construction method of any one of claims to.

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