JP4931330B2 - マイクロ流体構造、特にバイオチップを製造する方法および該方法によって得られた構造 - Google Patents
マイクロ流体構造、特にバイオチップを製造する方法および該方法によって得られた構造 Download PDFInfo
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- JP4931330B2 JP4931330B2 JP2003503354A JP2003503354A JP4931330B2 JP 4931330 B2 JP4931330 B2 JP 4931330B2 JP 2003503354 A JP2003503354 A JP 2003503354A JP 2003503354 A JP2003503354 A JP 2003503354A JP 4931330 B2 JP4931330 B2 JP 4931330B2
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- B29C33/424—Moulding surfaces provided with means for marking or patterning
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- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
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- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
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- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
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- B29K2995/0093—Other properties hydrophobic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
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- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
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Description
−少なくともマイクロウェルおよび該マイクロウェルを相互接続するマイクログルーブ(micro-grooves)またはマイクロチャネルを含む3次元形状を規定するための手段を用いて3次元マイクロモールド(micro-mould)を製造すること;及び
−ポリマー材料から作製される膜を成形するための該3次元マイクロモールドのみを使用すること(該膜は、少なくとも該マイクロウェルおよび該マイクログルーブまたはマイクロチャネルを組み込み、該膜は、3次元マイクロ流体構造を構成する)。
−マイクロウェルおよびマイクログルーブを規定するための手段を少なくとも含む、3次元形状を規定するための手段を用いて、3次元マイクロモールドを製造すること、
−ポリマー材料から作製される膜を成形するための3次元マイクロモールドのみを使用すること(ここで、該マイクロウェルは膜を横切り、該マイクログルーブは1つの膜表面上に位置し、かつ該マイクロウェルを相互接続する)、および
−該マイクロウェルの1つの自由端(free end)を閉じそしてマイクログルーブを閉じて、該マイクロウェルを相互接続する埋め込まれたチャネルを形成するために、該膜の1つの表面および基体の1つの表面を接触させること。
−高度に並行化した技術が絶対的に必要である薬理学および高出力スクリーニング;3次元マイクロ流体構造において、単一細胞を含むオープンウェルは、製薬産物(ごく少数の速く高度に並行化した産物)のアドレスを可能にする地下マイクロ流体ネットワークに接続されている、
−遺伝子移入(現在では、トランスフェクション技術は効率的ではなく、本発明の細胞チップは、鍵となるデバイスであり得、これは、トランスフェクションの分析および最適化のためのアレイとして単一細胞を単離し得る)、
−エキソビボ(ex-vivo)培養物および誘導されたニューロンの成長(基礎研究のための)、ならびに
−細胞バイオセンサー(細胞に対する環境効果および汚染効果の測定)。
Claims (12)
- マイクロ流体構造物を製造する方法であって、
−基体13の表面上に第1レジスト層11をスピンコーティングして、該第1レジスト層11をベークする、第1工程;
−少なくともマイクログルーブ9の形状9aを規定するために、マスクを通して該第1レジスト層11をUV暴露に供する、第2工程;
−該第1レジスト層11を現像することなく、該第1レジスト層11上に第2レジスト層15をスピンコーティングして、第2レジスト層15をベークする、第3工程;
−少なくとも垂直のマイクロウェル7の形状7aを規定するためにマスクを通して該第2レジスト層15をUV暴露に供する、第4工程;
−3次元マイクロモールド20を得るために前記第1レジスト層11及び第2レジスト層15を現像する、第5工程;及び
−前記マイクロモールドと前記マイクロモールド上にプレスされたプレートとの間にポリマー材料を注入し、該ポリマー材料をベイキングする最終工程、
を包含する方法。 - 第1レジスト層11及び第2レジスト層15がSU8から得られる、請求項1に記載の方法。
- 1つの膜表面上に、該膜を横切るマイクロウェルおよびマイクログルーブを有する膜を形成するために、1時間、70℃の温度で該ポリマー材料をベーキングすることを包含する、請求項1または2に記載の方法。
- 膜と基体との間で自然の接着を得るために、疎水性特性を有するポリマー材料を使用することを包含する、請求項1〜3のいずれかに記載の方法。
- 膜を形成するためにポリマー材料にポリジメチルシロキサン(PDMS)を使用することを包含する、請求項4に記載の方法。
- 酸素プラズマ処理によって膜のマイクロチャネルまたはマイクログルーブおよびマイクロウェルを親水性にすることを包含する、請求項1から5のいずれかに記載の方法。
- 酸素プラズマ処理を適用する前に膜をガラス基体と接触させ、ガラス基体と接触している該膜の表面の疎水性特性を維持することを包含する、請求項6に記載の方法。
- 該方法は、誘導結合型プラズマ反応性イオンエッチング(Inductive Coupled Plasma Reactive Ion Etching)(ICP RIE)によってシリコンマイクロモールドを得ることを包含し、該エッチングは3次元であり、少なくともマイクログルーブまたはマイクロチャネルを形成するための第1エッチングおよびマイクロウェルを形成するための第2エッチングを必要とする、請求項1〜7のいずれかに記載の方法。
- 得られたシリコンマイクロモールドをCHF3プラズマ処理に暴露して、得られたシリコンマイクロモールドの表面と該シリコンマイクロモールド中に成形される膜との間の接着を最小化することを包含する、請求項8に記載の方法。
- 前記マイクロ流体構造物がバイオチップである、請求項1〜9のいずれか一項に記載の方法。
- 請求項1〜10のいずれかに記載の方法によって製造されるマイクロ流体構造物であり、ポリマー材料から作製され、少なくともマイクロウェルおよび該マイクロウェルを相互接続するマイクログルーブまたはマイクロチャネルを含む膜を備え、該膜が3次元マイクロ構造を構成し、膜のマイクロウェルが30μm〜100μmの寸法を有し、該膜が40μm〜300μmの厚さを有し、マイクロチャネルが10μm〜300μmのサイズの長方形の断面を有し、そしてマイクロウェルの数が100〜10000/cm2の範囲で構成される点で特徴付けられる、マイクロ流体構造物。
- 該マイクロ流体構造物について使用される材料が、生物学的物質および該マイクロ流体構造物によって処理される生きている細胞と生体適合性であるか、または特定のコーティングによって適合性とされる点で特徴付けられる、請求項11に記載のマイクロ流体構造物。
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PCT/EP2001/007058 WO2002100542A1 (en) | 2001-06-08 | 2001-06-08 | Method of manufacturing a microfluidic structure, in particular a biochip, and structure obtained by said method_________________ |
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JP2004536595A JP2004536595A (ja) | 2004-12-09 |
JP4931330B2 true JP4931330B2 (ja) | 2012-05-16 |
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US (1) | US20040238484A1 (ja) |
EP (1) | EP1397211B1 (ja) |
JP (1) | JP4931330B2 (ja) |
AT (1) | ATE349276T1 (ja) |
CA (1) | CA2449193C (ja) |
DE (1) | DE60125598T2 (ja) |
WO (1) | WO2002100542A1 (ja) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1530626A1 (en) * | 2002-08-19 | 2005-05-18 | Bioprocessors Corporation | Determination and/or control of reactor environmental conditions |
WO2004044552A2 (en) * | 2002-11-12 | 2004-05-27 | Nanoink, Inc. | Methods and apparatus for ink delivery to nanolithographic probe systems |
CN1249437C (zh) * | 2003-02-17 | 2006-04-05 | 中国科学院力学研究所 | 用于生物分子芯片微量加样和反应的方法及其装置 |
JP2005007529A (ja) * | 2003-06-19 | 2005-01-13 | Dainippon Screen Mfg Co Ltd | マイクロ流体デバイスおよびマイクロ流体デバイスの製造方法 |
DE10331714B4 (de) * | 2003-07-11 | 2006-05-24 | Micronas Gmbh | Verfahren zur Strukturierung der Oberfläche eines Substrats |
JP2005034060A (ja) * | 2003-07-15 | 2005-02-10 | Sumitomo Bakelite Co Ltd | 生化学研究用器具 |
US7351380B2 (en) * | 2004-01-08 | 2008-04-01 | Sandia Corporation | Microfluidic structures and methods for integrating a functional component into a microfluidic device |
US7569127B1 (en) * | 2004-02-06 | 2009-08-04 | University Of Central Florida Research Foundation, Inc. | Interconnecting microfluidic package and fabrication method |
JP5373828B2 (ja) * | 2004-07-08 | 2013-12-18 | アズビル株式会社 | バイオチップ用基板 |
EP1614460A1 (en) * | 2004-07-08 | 2006-01-11 | Yamatake Corporation | Substrate for biochips |
US8257964B2 (en) | 2006-01-04 | 2012-09-04 | Cell ASIC | Microwell cell-culture device and fabrication method |
US9354156B2 (en) | 2007-02-08 | 2016-05-31 | Emd Millipore Corporation | Microfluidic particle analysis method, device and system |
US9388374B2 (en) | 2005-07-07 | 2016-07-12 | Emd Millipore Corporation | Microfluidic cell culture systems |
US9637715B2 (en) | 2005-07-07 | 2017-05-02 | Emd Millipore Corporation | Cell culture and invasion assay method and system |
ES2865180T3 (es) * | 2005-07-07 | 2021-10-15 | Univ California | Aparato para formación de cultivo celular |
US8355136B2 (en) | 2005-12-16 | 2013-01-15 | Indiana University Research And Technology Corporation | Sub-micron surface plasmon resonance sensor systems |
AU2006329841A1 (en) * | 2005-12-16 | 2007-07-05 | Indiana University Research & Technology Corporation | Sub-micron surface plasmon resonance sensor systems |
KR100724019B1 (ko) * | 2005-12-20 | 2007-06-04 | 한국과학기술연구원 | 입체 마이크로 몰딩 얼라이너 장치 및 이를 이용한 바이오 엑츄에이터의 제조 방법 |
KR101369442B1 (ko) * | 2006-03-29 | 2014-03-04 | 다우 코닝 코포레이션 | 소프트 식각법을 사용하는 나노 단위 특징부의 형성 방법 |
KR100785016B1 (ko) | 2006-05-22 | 2007-12-12 | 삼성전자주식회사 | 단일 마이크로 챔버에서 핵산의 농축 및 증폭을 수행하는방법 및 장치 |
KR100790881B1 (ko) | 2006-07-06 | 2008-01-02 | 삼성전자주식회사 | 미세유체 반응칩 및 이의 제조방법 |
KR100758285B1 (ko) | 2006-09-27 | 2007-09-12 | 한국전자통신연구원 | 바이오 센서, 그 제조방법 및 이를 구비한 바이오 감지장치 |
WO2009089189A2 (en) | 2008-01-03 | 2009-07-16 | Cellasic | Cell culture array system for automated assays and methods of operation and manufacture thereof |
JP2010029178A (ja) * | 2008-07-01 | 2010-02-12 | Osaka Univ | 細胞ピッキングシステム、スクリーニング方法および哺乳類細胞を取得する方法 |
EP2147697A1 (en) * | 2008-07-21 | 2010-01-27 | Centre National De La Recherche Scientifique-CNRS | Process and device for applying electric fields into conductive material |
EP2156860A1 (en) * | 2008-08-20 | 2010-02-24 | Centre National De La Recherche Scientifique-CNRS | Method for producing insulated electrodes for applying electric fields into conductive material |
JP5777045B2 (ja) | 2008-09-02 | 2015-09-09 | 国立研究開発法人産業技術総合研究所 | 細胞検出方法及び該方法に用いるマイクロアレイチップ |
US9353342B2 (en) | 2010-01-21 | 2016-05-31 | Emd Millipore Corporation | Cell culture and gradient migration assay methods and devices |
US10526572B2 (en) | 2011-04-01 | 2020-01-07 | EMD Millipore Corporaticn | Cell culture and invasion assay method and system |
JP6232383B2 (ja) | 2011-12-03 | 2017-11-15 | イー・エム・デイー・ミリポア・コーポレイシヨン | マイクロ流体の細胞培養のためのマイクロインキュベーションシステムおよび方法 |
WO2013116449A1 (en) * | 2012-02-02 | 2013-08-08 | Corning Incorporated | Automatic continuous perfusion cell culture microplate consumables |
US20150118707A1 (en) * | 2013-10-25 | 2015-04-30 | Ponnambalam Selvaganapathy | Method and device for detecting metabollically active cells |
CN105381826B (zh) * | 2015-11-25 | 2017-08-11 | 太原理工大学 | 一种微流控三维凝胶芯片模型的制备方法 |
Citations (4)
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---|---|---|---|---|
US5932315A (en) * | 1997-04-30 | 1999-08-03 | Hewlett-Packard Company | Microfluidic structure assembly with mating microfeatures |
US6039897A (en) * | 1996-08-28 | 2000-03-21 | University Of Washington | Multiple patterned structures on a single substrate fabricated by elastomeric micro-molding techniques |
WO2000060352A2 (en) * | 1999-04-01 | 2000-10-12 | Whatman Plc | Fluidic devices |
WO2001024933A1 (de) * | 1999-10-06 | 2001-04-12 | Evotec Oai Ag | Strukturiertes reaktionssubstrat und verfahren zu dessen herstellung |
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SE470347B (sv) * | 1990-05-10 | 1994-01-31 | Pharmacia Lkb Biotech | Mikrostruktur för vätskeflödessystem och förfarande för tillverkning av ett sådant system |
DE19947496C2 (de) * | 1999-10-01 | 2003-05-22 | Agilent Technologies Inc | Mikrofluidischer Mikrochip |
US7323143B2 (en) * | 2000-05-25 | 2008-01-29 | President And Fellows Of Harvard College | Microfluidic systems including three-dimensionally arrayed channel networks |
US6766817B2 (en) * | 2001-07-25 | 2004-07-27 | Tubarc Technologies, Llc | Fluid conduction utilizing a reversible unsaturated siphon with tubarc porosity action |
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2001
- 2001-06-08 CA CA2449193A patent/CA2449193C/en not_active Expired - Fee Related
- 2001-06-08 AT AT01953170T patent/ATE349276T1/de not_active IP Right Cessation
- 2001-06-08 EP EP01953170A patent/EP1397211B1/en not_active Expired - Lifetime
- 2001-06-08 WO PCT/EP2001/007058 patent/WO2002100542A1/en active IP Right Grant
- 2001-06-08 US US10/480,082 patent/US20040238484A1/en not_active Abandoned
- 2001-06-08 DE DE60125598T patent/DE60125598T2/de not_active Expired - Lifetime
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6039897A (en) * | 1996-08-28 | 2000-03-21 | University Of Washington | Multiple patterned structures on a single substrate fabricated by elastomeric micro-molding techniques |
US5932315A (en) * | 1997-04-30 | 1999-08-03 | Hewlett-Packard Company | Microfluidic structure assembly with mating microfeatures |
WO2000060352A2 (en) * | 1999-04-01 | 2000-10-12 | Whatman Plc | Fluidic devices |
WO2001024933A1 (de) * | 1999-10-06 | 2001-04-12 | Evotec Oai Ag | Strukturiertes reaktionssubstrat und verfahren zu dessen herstellung |
JP2003511654A (ja) * | 1999-10-06 | 2003-03-25 | エボテック・オーアーイー・アーゲー | 構造化された反応基体およびその製造方法 |
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DE60125598D1 (de) | 2007-02-08 |
US20040238484A1 (en) | 2004-12-02 |
EP1397211B1 (en) | 2006-12-27 |
CA2449193A1 (en) | 2002-12-19 |
DE60125598T2 (de) | 2007-10-04 |
CA2449193C (en) | 2010-04-20 |
EP1397211A1 (en) | 2004-03-17 |
WO2002100542A1 (en) | 2002-12-19 |
JP2004536595A (ja) | 2004-12-09 |
ATE349276T1 (de) | 2007-01-15 |
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