JP4925936B2 - Suck back valve - Google Patents

Description

  The present invention relates to a suck-back valve used in, for example, a process of supplying a liquid such as a chemical solution to a semiconductor wafer in a semiconductor manufacturing apparatus, and more specifically, after closing the flow of fluid, The present invention relates to a suck back valve for preventing dripping.

  Conventionally, a suckback valve generally has a mechanism for sucking fluid by changing the volume of the valve by displacing the diaphragm (see, for example, Patent Document 1), and further upstream of the suckback valve. In this case, an on / off valve for closing the fluid flow is arranged. As for the operation of such a valve, first, the on / off valve arranged on the upstream side is closed, and then the suck-back valve is continuously operated to drain liquid from the end of the pipe connected to the downstream side. It was something to prevent.

  However, in such a suck back valve, since the on / off valve and the suck back valve are individually controlled, it is difficult to match the timing of the closing of the on / off valve and the suck back operation, and the timing does not match. There is a problem that a predetermined suck back amount cannot be obtained and dripping occurs. Moreover, not only is it time-consuming to adjust the timing, but there is a risk that the timing of closing the ON / OFF valve and sucking back will be out of order when the air pressure for operating the valve fluctuates even after the adjustment has been made. Therefore, there was a problem that it was necessary to adjust frequently. In addition, since the suck-back valve and the on / off valve each need an independent drive unit, there is a problem that it takes a lot of space to install both valves and a problem that the number of parts is large and assembly takes time. there were.

  As means for solving the above-mentioned conventional problems, there is a suck back valve in which an on / off valve and a suck back valve are arranged on the same axis as shown in FIG. reference). The structure includes a joint 104 having a fluid passage 103 in which a first port 101 is formed at one end and a second port 102 is formed at the other end, and a second diaphragm that is a flexible member that is displaced by a pilot pressure. A suck-back mechanism 106 for sucking the pressure fluid in the fluid passage 103 under the negative pressure action of 105 and a second diaphragm 105 are provided coaxially, and the fluid passage 103 is displaced by being displaced in conjunction with the second diaphragm 105. The suck back mechanism 106 includes a first diaphragm 108 that is displaced under the action of a pilot pressure, and a first diaphragm 108 that is displaceably provided in the main body 109. A stem 110 that is integrally displaced with the second diaphragm, and a second diaphragm that is coupled to one end of the stem 110 and is displaced together with the stem 110. 105 and a spring member 111 that biases the stem 110 in a predetermined direction. The on / off valve 107 includes an elastic member 112 that is deformed by the elastic force of the spring member 114. The elastic member 112 is a second member. It was provided so as to be able to come into contact with the diaphragm 105.

  When the pilot pressure is supplied and the first diaphragm 108 and the stem 110 are displaced downward, the second diaphragm 105 moves the on / off valve 107 against the elastic force of the spring member 114. By pressing the elastic member 112 downward, the elastic member 112 of the on / off valve 107 is separated from the seating portion 113 to bring the first port 101 and the second port 102 into communication. When the supply of pilot pressure is stopped and the atmosphere is released, the second diaphragm 105 is displaced upward by the elastic force of the spring member 111, and at the same time, the elastic member 112 of the on / off valve 107 is also elastic of the spring member 114. It is deformed by the generated force, and is pressed against the seating portion 113 to close the fluid. Even after the elastic member 112 is pressed against the seating portion 113, the second diaphragm 105 is displaced upward. As a result, the volume inside the valve increases and negative pressure action occurs, and the liquid on the downstream side of the valve is sucked and sucked. Back operation is performed. This operation prevents dripping from the end of the pipe connected to the downstream side, and closes the fluid and sucks back at the same time, so that it is possible to save the trouble of adjusting the timing at which both valves operate Met.

  However, the suck back valve is configured such that the second diaphragm 105 is elastic because the second diaphragm 105 presses and separates the elastic member 112 of the on / off valve 107 downward to open and close the on / off valve 107. There is a limit to take a large stroke to press the member 112 downward, and the fluid passage 103 is opened with a small stroke, and the contact portion between the second diaphragm 105 and the elastic member 112 obstructs the fluid passage 103. Therefore, there is a problem that the opening area cannot be made large and the usable flow rate is limited. Further, since the elastic member 112 and the second diaphragm 105 generate dust by repeatedly pressing and separating in the fluid passage 103 during operation, it is not suitable for applications where it is desired to suppress the amount of dust generation in the fluid passage 103 as much as possible. There was a problem. Further, since the valve body of the on / off valve 107 is the elastic member 112, the rubber generally used as the elastic member may be used for a long period of time or in a high-temperature fluid. There has been a problem that the sealing performance of the fluid may deteriorate due to compression set or the like. At this time, since the closing of the fluid by the on / off valve 107 is delayed, the suck back mechanism 106 completes its operation before the valve is completely closed, and it may not be possible to prevent dripping from the end of the pipe. There is also a problem that the amount of suck back changes due to a change in the stroke of the suck back mechanism 106 due to a shift of the contact position of the second diaphragm 105 downward, and an opening area when the on / off valve 107 is fully opened. There has been a problem that it becomes difficult to supply a constant flow rate over a long period of time.

No. 08-010399 JP-A-10-252918

  The present invention has been made in view of the above-mentioned problems of the prior art, prevents dripping from the end of the pipe after closing the fluid flow, and eliminates the need for adjusting the timing of valve closing and suckback operation, An object of the present invention is to provide a suck back valve capable of always performing a stable closing operation and suck back operation and suppressing dust generation.

  The suck back valve of the present invention is provided with a first valve chamber in which an inlet channel communicates with a lower portion and a second valve chamber with an outlet channel communicated with an upper portion, the first valve chamber, the second valve chamber, A main body in which a valve seat is formed at the peripheral edge of the opening on the first valve chamber side of the communication flow path that communicates with the valve, a first valve body that is pressed against or separated from the valve seat, and the second valve chamber A second valve body that sucks back the fluid by changing the volume of the first valve member, a first movable member that is positioned below the first valve chamber and holds the first valve body, and outside the communication channel A second movable member positioned above the second valve chamber connected to the first movable member by a connecting rod disposed; and a hood disposed in the upper part of the main body, and a collar part and a center of the collar part A sucking back valve comprising: a piston having a rod portion that is suspended from the lower end and is connected to the second valve body at a lower end thereof; Therefore, the connected first movable member and the second movable member are urged upward by a predetermined force, the flange portion of the piston is provided so as to be able to contact the second movable member, and the flange portion is It can be interlocked with the second movable member when it is in contact with the second movable member, the piston moves up and down, and the first valve body contacts and separates from the valve seat portion to open and close the valve. The first feature is that the fluid is sucked back by separating the flange from the second movable member.

  A membrane portion is extended in the outer diameter direction of the first valve body to form a first diaphragm, and a peripheral portion of the first diaphragm is formed by the main body and a first diaphragm presser installed below the main body. The second feature is to be clamped and fixed.

  Further, a membrane portion is extended in the outer diameter direction of the second valve body to form a second diaphragm, and a peripheral portion of the second diaphragm is formed by the main body and a second diaphragm presser installed above the main body. The third feature is to be clamped and fixed.

  A fourth feature is that the means for urging the first movable member and the second movable member connected by the connecting rod upward is a spring.

  Further, a bonnet having a recess having a lower surface opened and a cylinder portion having an opening at the center of the recess ceiling surface is provided in the upper portion of the main body, the second movable member is disposed in the recess, and the flange portion of the piston is The cylinder portion is slidably contacted with the inner peripheral surface of the cylinder portion in an airtight manner, the piston is urged upward with a predetermined force by a spring, and the cylinder surface is provided with a ceiling surface, an inner peripheral surface and the flange portion on the outer surface of the bonnet A fifth feature is that an air supply port communicating with the space surrounded by the upper surface is provided.

  A sixth feature is that an adjustment screw is provided in the upper part of the bonnet so as to pass through the ceiling surface of the cylinder part and be screwed in an airtight state.

  Also, a drive part for moving a stem up and down is provided in the upper part of the main body with a bonnet having a recess with a lower surface opened, a cylinder part with an opening at the center of the concave part ceiling, and a through hole penetrating through the center of the cylinder part ceiling surface. Is provided at the top of the bonnet, the second movable member is disposed in the recess, the piston is urged upward by a spring with a predetermined force, and the stem penetrates the through hole of the bonnet. A seventh feature is that the tip is disposed or integrally connected so as to be able to contact the upper portion of the flange of the piston.

  In addition, an eighth feature is that the driving unit includes a stepping motor and a speed reducer.

  The ninth feature is that the drive section is composed of a solenoid.

  The drive unit is an operation lever that is manually swung in the axial direction of the stem, and the operation lever is connected to the upper portion of the stem that is exposed through the upper portion of the bonnet. Is converted into the vertical movement of the stem.

  An eleventh feature is that it is used in a step of applying a photoresist solution in a semiconductor manufacturing apparatus.

  A twelfth feature is that it is used in a step of filling a container with a food or beverage fluid in a food production apparatus or a step of injecting a reagent in a pharmaceutical production apparatus into a container.

  By the means for solving the above, the suck back valve of the present invention has the following excellent effects.

(1) A suck-back operation is performed after the valve closing operation, and dripping at the end of the pipe communicating with the outlet channel is prevented.
(2) Since the suck back operation is performed after the valve closing operation, the fluid closing and the suck back operation can be performed in a series of operations. Therefore, it is necessary to adjust the timing of the valve closing and the suck back operation. In addition, the operation timing does not go wrong after the valve is installed.
(3) Since the suck-back operation cannot be performed until the valve is completely closed, there is no malfunction of the suck-back operation, and stable valve closing and suck-back operations are performed over a long period of time. be able to.
(4) Since the first valve body that opens and closes the valve and the second valve body that performs the suck-back operation do not come into contact with each other, dust generation is suppressed and a decrease in yield in semiconductor manufacturing can be suppressed.
(5) The valve can be configured to have a large opening / closing stroke. Since there is no obstacle to the communication flow path when the valve is fully opened, a large flow rate can be allowed to flow, and the valve itself can be provided compactly.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, it is needless to say that the present invention is not limited to the embodiments.

  FIG. 1 is a longitudinal sectional view showing a state where a suck back valve according to a first embodiment of the present invention is in a closed state and a suck back operation is performed. FIG. 2 is a longitudinal sectional view of FIG. 1 viewed from the side (flow channel direction). FIG. 3 is a longitudinal sectional view showing a state where the suck back valve of FIG. 1 is in a closed state and a suck back operation is not performed. 4 is a longitudinal sectional view showing the suck back valve of FIG. 1 in an open state. FIG. 5 is a longitudinal sectional view showing a second embodiment of the present invention. FIG. 6 is a longitudinal sectional view showing a third embodiment of the present invention. FIG. 7 is a longitudinal sectional view showing a fourth embodiment of the present invention.

  In FIG. 1, reference numeral 1 denotes a main body made of polytetrafluoroethylene (hereinafter referred to as PTFE), and a substantially mortar-shaped first valve formed by a first diaphragm 2 which will be described later and communicated with an inlet channel 18 at the center of the lower part. It has a chamber 20 and a substantially mortar-shaped second valve chamber 21 formed by a second diaphragm 3 which will be described later and communicated with the outlet channel 19 at the upper center. The first valve chamber 20 and the second valve chamber 21 are communicated with each other through a communication channel 22, and a peripheral portion of the opening on the first valve chamber 20 side of the communication channel 22 is a valve seat portion 23. . A recess 24 for receiving a first diaphragm retainer 4 described later is provided below the first valve chamber 20 of the main body 1, and an annular groove 44 in which a peripheral edge 31 of the first diaphragm 2 described later is fitted on the ceiling surface of the recess 24. Is provided. A concave portion 25 for receiving a second diaphragm presser 5 described later is provided above the second valve chamber 21 of the main body 1, and an annular groove 45 into which a peripheral edge 39 of the second diaphragm 3 described later is fitted is formed on the bottom surface of the concave portion 25. Is provided.

  Reference numeral 9 denotes a base made of polyvinylidene fluoride (hereinafter referred to as PVDF) joined to the lower surface of the main body. Inside the pedestal 9, there are provided a cylindrical recess 13 whose upper surface is opened and a cylindrical spring receiving portion 14 whose center is opened at the bottom of the recess 13. Further, a stepped portion 28 is provided at the upper portion of the recess 13 to which the lower portion of the first diaphragm retainer 4 to be described later is fitted.

  Reference numeral 2 denotes a first diaphragm made of PTFE, which has a first valve body 29 in pressure contact with and spaced from the valve seat portion 23 of the main body 1 at the center of the upper surface. The outer periphery of the first valve body 29 is provided with a membrane portion 30 extending in the outer diameter direction, and the outer peripheral edge of the membrane portion 30 is provided with a peripheral edge portion 31 fitted into the annular groove 44 of the main body 1. The lower part of the first valve body 29 is connected to the upper part of a cylindrical part 34 of the first movable member 6 to be described later by screwing.

  The configuration of the first valve body 29 is not particularly limited as long as the first valve body 29 can open and close the flow path by being pressed against and separated from the valve seat portion 23 in this embodiment and other embodiments. In order to suppress dust, it is preferable to adopt the configuration of the first diaphragm 2 in which the film portion 30 is extended in the outer diameter direction of the first valve body 29.

  Reference numeral 4 denotes a PVDF first diaphragm retainer, and the first diaphragm retainer 4 is formed in an annular shape with a through hole 32 provided in the center. The upper part of the first diaphragm holder 4 is fitted into the recess 24 of the main body 1 and the lower part is fitted into the stepped part 28 of the base 9, and the peripheral edge 31 of the first diaphragm 2 is clamped and fixed by the main body 1 and the first diaphragm holder 4. is doing. At this time, since the peripheral edge 31 of the first diaphragm 2 is fitted in the annular groove 44 of the main body 1 and is pressed by the first diaphragm presser 4, the seal between the main body 1 and the first diaphragm 2 in the first valve chamber 20 is Since it is performed not on the membrane portion 30 but on the peripheral edge portion 31 fitted in the annular groove 44, it is possible to perform a reliable seal without applying a load to the membrane portion 30 of the first diaphragm 2 in a long-term use. It is possible to suppress breakage such as cracks in the diaphragm, particularly the film portion 30.

  Reference numeral 6 denotes a first movable member made of PVDF, which is accommodated in the recessed portion 13 of the base 9 so as to be movable up and down. The first movable member 6 includes a flange part 33 and a cylindrical part 34 protruding upward from the center of the flange part 33, and the cylindrical part 34 passes through the through hole 32 of the first diaphragm retainer 4 and is located at the lower center of the first diaphragm 2. Connected with. Further, the first movable member 6 is accommodated in the spring receiving portion 14 of the base 9 and is biased upward by the first spring 11 sandwiched between the lower surface of the first movable member 6 and the bottom surface of the spring receiving portion 14.

  Reference numeral 10 denotes a PVDF bonnet joined to the upper surface of the main body 1. Inside the bonnet 10, there are provided a cylindrical concave portion 15 whose bottom surface is opened, and a cylindrical cylinder portion 16 whose central portion of the concave portion 15 is opened. The upper surface of the cylinder portion 16 communicates with an air supply port 17 provided on the side surface of the bonnet 10. A stepped portion 35 is provided at the lower portion of the recess 15 to which the upper portion of the second diaphragm retainer 5 to be described later is fitted. Further, a through hole 36 having a thread groove formed in the inner surface through the center of the ceiling surface of the cylinder portion 16 is provided in the upper portion of the bonnet 10, and the adjustment screw 26 can protrude downward from the ceiling surface of the cylinder portion 16 in an airtight state. Are screwed together. Further, a lock nut 27 is screwed onto the adjustment screw 26, and the adjustment screw 26 is fixed by tightening the lock nut 27.

  Reference numeral 3 denotes a PTFE second diaphragm having a second valve body 37 that changes the volume in the second valve chamber by being displaced vertically in the center of the lower surface. A film part 38 extending in the outer diameter direction is provided on the outer periphery of the second valve body 37, and a peripheral part 39 fitted to the annular groove 45 of the main body 1 is provided on the outer peripheral edge of the film part 38. The upper part of the second valve body 37 is connected to the lower part of the rod part 43 of the piston 7 to be described later by screwing.

  In this embodiment and other embodiments, the second valve body 37 that sucks back fluid and activates the suck back is particularly limited, such as a piston shape (not shown), as long as it is configured to suck back fluid. However, in order to suppress dust generation in the flow path, it is preferable to adopt the configuration of the second diaphragm 3 in which the film portion 38 is extended in the outer diameter direction of the second valve body 37.

  Reference numeral 5 denotes a PVDF second diaphragm retainer, and the second diaphragm retainer 5 is formed in an annular shape with a through hole 40 provided in the center. The second diaphragm retainer 5 has a lower portion fitted in the recess 25 of the main body 1 and an upper portion fitted in the step portion 35 of the bonnet 10, and the peripheral edge 39 of the second diaphragm 3 is sandwiched and fixed by the main body 1 and the second diaphragm retainer 5. is doing. At this time, since the peripheral edge 39 of the second diaphragm 3 is fitted into the annular groove 45 of the main body 1 and pressed by the second diaphragm presser 5, the seal between the main body 1 and the second diaphragm 3 in the second valve chamber 21 is Since it is performed not on the membrane portion 38 but on the peripheral edge portion 39 fitted in the annular groove 45, it is possible to perform reliable sealing without applying a load to the membrane portion 38 of the second diaphragm 3 in a long-term use. It is possible to suppress breakage such as cracks in the diaphragm, particularly the film portion 38.

  Reference numeral 8 denotes a second movable member made of PVDF, which is accommodated in the recess 15 of the bonnet 10 so as to be movable up and down. The second movable member 8 is formed in an annular shape with a through hole 41 provided in the center. The second movable member 8 and the first movable member 6 are connected to a connecting rod 47 that is vertically inserted into a through hole 46 provided through the main body 1, the first diaphragm retainer 4, and the second diaphragm retainer 5. The first movable member 6 and the second movable member 8 are integrally operated (see FIG. 2). Further, the second movable member 8 together with the first movable member 6 is biased upward by the first spring 11, and at this time, the first movable member presses the first valve body 29 against the valve seat portion 23, and the second movable member 8 is provided so that the upper surface of 8 is in contact with the ceiling surface of the recess 15 of the bonnet 10. It is desirable that the upper surface of the second movable member 8 and the concave surface 15 of the bonnet 10 are not in contact with each other and a slight gap is provided.

  In this embodiment and other embodiments, the connecting rod 47 needs to be disposed at a position outside the communication flow path 22 so as not to exist in the communication flow path 22. Specifically, the main body 1 penetrates the main body 1 at a position where it does not interfere with the flow path from the inlet flow path 18 to the outlet flow path 19 through the communication flow path 22 and the first and second diaphragms 2 and 3. A through-hole 46 (a through-hole penetrating through the main body 1, the first diaphragm retainer 4 and the second diaphragm retainer 5 depending on the structure of the suck back valve) is disposed. The position and shape of the connecting rod 47 are not particularly limited as long as the first movable member 6 and the second movable member 8 are connected.

  Reference numeral 7 denotes a PVDF piston, which is provided with a flange portion 42 having an outer diameter larger than the inner diameter of the through hole 41 of the second movable member 8 and a rod portion 43 depending from the center of the lower surface of the flange portion 42. An O-ring is mounted on the outer periphery of the flange portion 42, and is fitted into the inner peripheral surface of the cylinder portion 16 of the bonnet 10 so as to be slidable in the vertical direction. Further, the rod portion 43 is connected to the upper center of the second diaphragm 3 while passing through the second spring 12, the through hole 41 of the second movable member 8, and the through hole 40 of the second diaphragm retainer 5. Further, on the outer periphery of the rod portion 43, a second spring 12 penetrating the through hole 41 of the second movable member 8 and sandwiched between the lower surface of the flange portion 42 of the piston 7 and the upper surface of the second diaphragm retainer 5 is disposed. Is biased upward by the second spring 12. At this time, the lower surface of the flange portion 42 of the piston 7 and the upper surface of the second movable member 8 are arranged so as to provide a certain gap.

  In the present embodiment and other embodiments, the material of the first and second diaphragms 2 and 3 is preferably made of fluororesin, and PTFE, PVDF, tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (hereinafter referred to as PFA). And the like) are preferable.

  In this embodiment and other embodiments, the material of the suck back valve main body 1, pedestal 9, bonnet 10, first and second diaphragm holders 4 and 5, first and second movable members 6 and 8 are suck back valves. As long as it has the necessary physical properties, it is not particularly limited, but a fluororesin such as PTFE, PVDF, PFA, and polychlorotrifluoroethylene can be cited as a suitable material, such as polypropylene, polyvinyl chloride, polystyrene, and ABS resin. If there is no concern about corrosion due to resin or fluid, any of metals such as stainless steel may be used.

  Next, the operation of the suck back valve according to the first embodiment having the above-described configuration will be described.

  The suck back valve of the present invention is used in a step of applying a photoresist solution in a semiconductor manufacturing apparatus, and the photoresist solution is caused to flow into a flow path in which the suck back valve is piped. When the suck back valve is closed (the state shown in FIGS. 1 and 2), the first movable member 6 and the second movable member 8 connected by the connecting rod 47 are urged upward by the first spring 11, and the first The movable member 6 urges the first diaphragm 2 upward to press the first valve body 29 against the valve seat portion 23 to block the communication flow path 22. At this time, the upper surface of the second movable member 8 is positioned in a state of being spaced apart from the ceiling surface of the recess 15 of the bonnet 10. The piston 7 is urged upward by the second spring 12, and the upper surface of the piston 7 is in contact with the tip of the adjustment screw 26 protruding from the ceiling surface of the cylinder portion 16 (the adjustment screw 26 is moved from the ceiling surface of the cylinder portion 16). When not protruding, the cylinder portion 16 abuts on the ceiling surface).

  Moreover, it is preferable that the means for urging the first movable member 6 and the second movable member 8 connected by the connecting rod 47 upward is a spring. The biasing method of the spring is not particularly limited as long as the first movable member 6 and the second movable member 8 can be biased upward as described above, and the first spring 11 is connected to the bottom surface of the spring receiving portion 14 and the first movable member. It may be sandwiched between the lower surface of the member 6 and accommodated in the spring receiving portion 14 (see FIG. 1), or may be sandwiched between the upper surface of the second diaphragm retainer 5 and the lower surface of the second movable member 8 (not shown). You may install so that the 1st movable member 6 or the 2nd movable member 8 may be pulled up from upper direction (not shown).

  Here, when compressed air is supplied from the air supply port 17, the piston 7 is lowered by the pressure of the compressed air, and the lower surface of the flange portion 42 of the piston 7 and the upper surface of the second movable member 8 come into contact with each other (state in FIG. 3). . When the piston 7 further descends, the piston 7 presses the second movable member 8 downward, and the piston 7 descends in conjunction with the piston 7 and the second movable member 8 in contact with each other. Since the second movable member 8 is integrated with the first movable member 6 by the connecting rod 47, the first movable member 6 also moves downward, and the first diaphragm 2 connected to the first movable member 6 also moves downward. The first valve element 29 is displaced from the valve seat portion 23 and the communication channel 22 is opened, and the photoresist liquid flowing in from the inlet channel 18 flows out of the outlet channel 19 through the communication channel 22. . When the lower surface of the second movable member 8 comes into contact with the upper surface of the second diaphragm retainer 5, the associated descent of the piston 7 and the second movable member 8 stops, and the valve is fully opened. At this time, the second diaphragm 3 connected to the rod portion 43 is also displaced downward by the lowering of the piston 7 (state of FIG. 4). The lowering of the piston 7 is stopped by the lower surface of the second movable member 8 coming into contact with the upper surface of the second diaphragm retainer 5, but the lower surface of the first movable member 6 is in contact with the bottom surface of the recess 13 of the base 9. The descent may be stopped by contact.

  As shown in FIG. 1, the piston 7 of the present invention may be operated by providing an air supply port 17 in the cylinder portion 16 and supplying compressed air as a working fluid. The pistons 7 may be operated by moving the stems 54, 63 up and down by providing drive units 51, 61, 71 for moving the stems 54, 63 up and down. The drive units 51, 61, 71 may be driven by an electric drive composed of a stepping motor 52 and a speed reducer 53 as shown in FIG. 5, or may be driven by a magnetic drive formed of a solenoid 62 as shown in FIG. Alternatively, an operation lever 72 that is manually swung in the axial direction of the stem 74 as shown in FIG.

  Next, when the supply of compressed air to the air supply port 17 is stopped and released to the atmosphere, the first movable member 6 is pushed upward by the repulsive force of the first spring 11 and is connected to the rod portion 43. The first valve element 29 of the diaphragm 2 is also raised, the first valve element 29 is pressed against the valve seat 23 of the main body 1, the communication flow path 22 is shut off, the flow of the photoresist solution is stopped, and the valve is fully closed. It becomes a state. At this time, the second movable member 8 integrated with the first movable member 6 and the connecting rod 47 and the piston 7 in contact with the second movable member 8 are also raised (state of FIG. 3). Ascending the first movable member 6 and the second movable member 8 is stopped when the first valve body 29 and the valve seat portion 23 of the first diaphragm 2 are in pressure contact with each other, but the piston 7 is driven by the repulsive force of the second spring 12. The second movable member 8 moves away from the movable member 8 and further stops and stops at a position where the upper surface of the piston 7 and the tip of the adjustment screw 26 come into contact with each other. The second diaphragm 3 connected to the tip of the rod portion 43 is also displaced upward by the ascent of the piston 7 (state of FIG. 1). When the valve is fully closed, the volume of the second valve chamber 21 is increased by the displacement of the second valve body 37 of the second diaphragm 3 as the piston 7 is moved away from the second movable member 8. Then, the photoresist solution on the downstream side of the outlet flow path 19 of the suck back valve is sucked back. The suck back operation is performed by this sucking back, and dripping at the end of the pipe communicating with the outlet channel 19 (nozzle for dropping the photoresist solution) is prevented.

  Due to the above-described operation, the suck back operation is performed immediately after the valve is closed, so that adjustment of the timing of the suck back operation is not necessary, and the timing of the suck back operation does not go wrong. Further, since the suck-back operation is not performed until the valve is completely closed, there is no malfunction of the suck-back operation, and stable valve closing and suck-back operations can always be performed. . Further, since the first valve body 29 and the second valve body 37 do not come into contact with each other and the first valve body 29 is pressed against the valve seat portion 23 to close the valve, dust generation is suppressed. It is possible to suppress a decrease in yield in manufacturing a semiconductor whose amount is to be suppressed as much as possible. For this reason, when the dripping occurs from the tip of the nozzle after the valve is closed, the yield of the product is deteriorated, and it is suitably used in a process of applying a photoresist solution that may cause defective products due to dust generation due to the valve operation. Further, the valve can be designed to have a large opening / closing stroke. When the valve is fully open, the second valve element 37 is in a position that does not hinder the flow of fluid, and therefore there is nothing to block the communication flow path, so a large flow rate is allowed to flow. be able to. An on / off valve mechanism that opens and closes the valve by displacing the first valve body 29 and a suck back mechanism that performs a sack back operation by displacing the second valve body 37 are integrated into a compact and compact sack. Since the back valve is formed, the space for installing the suck back valve is small.

  The suck back amount is determined by the amount of movement until the piston 7 is separated from the second movable member 8 and comes into contact with the tip of the adjustment screw 26 when the valve is fully closed, and the movement amount of the piston 7 is determined by the adjustment screw 26. It is possible to change the amount of suck back by adjusting according to.

  Further, the spring constant of the second spring 12 needs to be designed to be smaller than the spring constant of the first spring 11 so that the suck-back operation is not started before the fluid is shut off, and the compression supplied to the cylinder portion 16. The force urged downward by the air must be stronger than the resultant force of the repulsive force of the first spring 11 and the second spring 12.

  Next, a suck back valve according to a second embodiment of the present invention will be described.

  In FIG. 5, reference numeral 51 denotes a drive unit including a stepping motor 52 and a speed reducer 53 installed on the top of the bonnet 10. The drive unit 51 moves the stem 54 up and down when the stepping motor 52 is driven. A through hole 55 penetrating the center of the ceiling surface of the cylinder portion 16 is provided in the upper portion of the bonnet 10, and a stem 54 is provided so as to be able to contact the upper surface of the flange portion 42 of the piston 7 through the through hole 55. The lower end portion of the stem 54 and the upper portion of the flange portion 42 of the piston 7 may be integrally connected. In this case, the vertical movement of the piston 7 is performed by the stepping motor 52.

  Next, the operation of the suck back valve according to the second embodiment having the above-described configuration will be described.

  When the suck back valve is in the closed state (the state shown in FIG. 5), the first movable member 6 and the second movable member 8 connected by the connecting rod (not shown) are urged upward by the first spring 11, and the first One movable member 6 urges the first diaphragm 2 upward to press the first valve body 29 against the valve seat portion 23 to block the communication flow path 22. The piston 7 is urged upward by the second spring 12, and the upper surface of the piston 7 and the lower end of the stem 54 are in contact with each other.

  Here, when the stepping motor 52 is driven to cause the stem 54 to protrude downward, the piston 7 in contact with the lower end of the stem 54 is pushed downward, and the lower surface of the piston 7 flange 42 and the upper surface of the second movable member 8 are in contact with each other. Touch. When the piston 7 is further pushed down, the piston 7 also presses the second movable member 8 downward, and the piston 7 and the second movable member 8 are lowered in conjunction with each other. The first movable member 6 integrated with the second movable member 8 is also moved downward by the connecting rod, the first diaphragm 2 connected to the first movable member 6 is also displaced downward, and the first valve body 29 is moved downward. Is separated from the valve seat 23 and the communication channel 22 is opened. When the lower surface of the second movable member 8 comes into contact with the upper surface of the second diaphragm retainer 5, the associated descent of the piston 7 and the second movable member 8 stops, and the valve is fully opened. The second diaphragm 3 connected to the rod portion 43 is also displaced downward by the lowering of the piston 7 at this time.

  Next, when the stepping motor 52 is driven to move the stem 54 upward, the first movable member 6 is pushed upward by the repulsive force of the first spring 11 in accordance with the movement of the stem 54, and the first diaphragm 2 is moved. The first valve body 29 is also raised, the first valve body 29 is pressed against the valve seat portion 23 of the main body 1, the communication flow path 22 is shut off, and the valve is closed. At this time, the second movable member 8 integrated with the first movable member 6 and the connecting rod also rises, and the piston 7 also rises in conjunction with the second movable member 8 in contact. Ascending the first movable member 6 and the second movable member 8 by the first valve body 29 and the valve seat portion 23 of the first diaphragm 2 being in pressure contact with each other, but when the stem 54 is moved further up to the upper limit, The piston 7 separates from the second movable member 8 by the repulsive force of the second spring 12 and further rises, and stops at a position where the upper surface of the piston 7 and the lower end of the stem 54 abut. The second diaphragm 3 connected to the tip of the rod portion 43 is also displaced upward by the ascent of the piston 7 at this time. The volume of the second valve chamber 21 is increased by the displacement of the second valve element 37 of the second diaphragm 3 as the piston 7 is moved away from the second movable member 8, so that the outlet flow path 19 of the suck back valve is increased. The fluid on the downstream side is sucked back. The suck back operation is performed by this sucking back, and the dripping at the end of the pipe communicating with the outlet channel 19 is prevented. The suck back amount is determined by the amount of movement until the piston 7 moves away from the second movable member 8 and comes into contact with the lower end of the stem 54 when the valve is closed, but the stepping motor 52 is used to move the stem 54 up and down. Since the upper limit of the stem 54 can be controlled with high accuracy, the suck back amount of the fluid can be controlled with high accuracy.

  Next, a suck back valve according to a third embodiment of the present invention will be described.

  In FIG. 6, reference numeral 61 denotes a drive unit including a solenoid 62 installed on the top of the bonnet 10. The drive unit 61 moves the stem 63 up and down by energizing and shutting off the current of the solenoid 62. A through hole 64 penetrating the center of the ceiling surface of the cylinder portion 16 is provided in the upper portion of the bonnet 10, and a stem 63 is provided so as to be able to contact the upper surface of the flange portion 42 of the piston 7 through the through hole 64. The lower end portion of the stem 63 and the upper portion of the flange portion 42 of the piston 7 may be integrally connected.

  Next, the operation of the suck back valve according to the third embodiment having the above-described configuration will be described.

  When the current to the solenoid 62 is interrupted (state shown in FIG. 6), the first movable member 6 and the second movable member 8 connected by a connecting rod (not shown) are urged upward by the first spring 11. The first movable member 6 urges the first diaphragm 2 upward to press the first valve body 29 against the valve seat portion 23 to block the communication flow path 22. The piston 7 is urged upward by the second spring 12, and the upper surface of the piston 7 and the lower end of the stem 63 are in contact with each other.

  Here, when a current is supplied to the solenoid 62, the stem 63 protrudes downward, the piston 7 that is in contact with the lower end of the stem 63 is pushed downward, and the lower surface of the piston 7 collar 42 contacts the upper surface of the second movable member 8. . The second movable member 8 is also pushed down. When the piston 7 is further pushed down, the piston 7 also presses the second movable member 8 downward, and the piston 7 and the second movable member 8 are lowered in conjunction with each other. The first movable member 6 integrated with the second movable member 8 is also moved downward by the connecting rod, the first diaphragm 2 connected to the first movable member 6 is also displaced downward, and the first valve body 29 is moved downward. Is separated from the valve seat 23 and the communication channel 22 is opened. When the lower surface of the second movable member 8 comes into contact with the upper surface of the second diaphragm retainer 5, the associated descent of the piston 7 and the second movable member 8 stops, and the valve is fully opened. The second diaphragm 3 connected to the rod portion 43 is also displaced downward by the lowering of the piston 7 at this time.

  Next, when the current supply to the solenoid 62 is interrupted, the force that biases the stem 53 downward is lost, and the first movable member 6 is pushed upward by the repulsive force of the first spring 11, so that the first diaphragm 2 The first valve body 29 also rises, the first valve body 29 is pressed against the valve seat portion 23 of the main body 1, the communication flow path 22 is shut off, and the valve is fully closed. At this time, the second movable member 8 integrated with the first movable member 6 and the connecting rod also rises, and the piston 7 also rises in conjunction with the second movable member 8 in contact. Ascending the first movable member 6 and the second movable member 8 is stopped when the first valve body 29 and the valve seat portion 23 of the first diaphragm 2 are in pressure contact with each other, but the piston 7 is driven by the repulsive force of the second spring 12. The second movable member 8 moves away from the movable member 8 and further rises, and stops at a position where the upper surface of the piston 7 and the cylinder surface 16 contact each other. The second diaphragm 3 connected to the tip of the rod portion 43 is also displaced upward by the ascent of the piston 7 at this time. The volume of the second valve chamber 21 is increased by the displacement of the second valve element 37 of the second diaphragm 3 as the piston 7 is moved away from the second movable member 8, so that the outlet flow path 19 of the suck back valve is increased. The fluid on the downstream side is sucked back. The suck back operation is performed by this sucking back, and the dripping at the end of the pipe communicating with the outlet channel 19 is prevented. The suck back amount is determined by the amount of movement until the piston is separated from the second movable member 8 and comes into contact with the lower end of the stem 63 when the valve is closed.

  Next, a suck back valve according to a fourth embodiment of the present invention will be described.

  In FIG. 7, reference numeral 71 denotes a drive unit including an operation lever 72 that is manually installed in the upper part of the bonnet 10 and is pivoted in the axial direction of the stem 74. The drive unit 71 converts the swing of the operation lever 72 around the fulcrum shaft into a linear motion of the stem 74 to move the stem up and down. The upper part of the bonnet 10 is provided with a recess 75 opened in the center of the ceiling surface of the cylinder part 16 and a through hole 76 penetrating the center of the recess 75.

  The stem 74 passes through the through-hole 76 of the bonnet 10, and is disposed in the recess 75 so that the upper portion of the stem 74 is exposed from the bonnet 10 and can move up and down and cannot rotate. The lower end of the stem 74 is the flange 42 of the piston 7. It is provided so as to be able to contact the upper surface. The lower portion of the stem 74 is provided in a bowl shape, and the stem 74 is biased downward by sandwiching a spring 77 between the upper surface of the bowl-shaped portion and the concave surface 75 of the bonnet 10. The stem 74 and the piston 7 may be integrally connected.

  The operating lever 72 is provided with a handle portion 78 extending in one side surface direction. When the handle portion 78 is oriented in the horizontal direction, the first contact surface 79 is provided on the lower surface, and the side surface opposite to the handle portion 78 is provided. The first contact surface 79 has a second contact surface 80 having an angle of 85 °, and the intersection of the first contact surface 79 and the second contact surface 80 is smoothly connected by an arc surface. ing. The operation lever 72 is formed with a rectangular notch 81 extending over the first contact surface 79 and the second contact surface 80, and the upper portion of the stem 74 is inserted into the notch 81, and The joint pin 73 is integrated by being inserted into a through hole provided in a surface perpendicular to the second contact surface 80 and a through hole (valve shaft hole) provided in the upper portion of the stem 74. The operation lever 72 swings about the fulcrum shaft (joint pin 73) with the joint pin 73 as a fulcrum shaft, and the shortest distance from the center of the fulcrum shaft (joint pin 73) to the second contact surface 80. The distance is formed so as to be longer than the shortest distance from the center of the fulcrum shaft (joint pin 73) to the first contact surface 79, and the difference between the distances is designed to be greater than or equal to the stroke in which the piston 7 moves up and down. .

  Next, the operation of the suck back valve of the fourth embodiment configured as described above will be described.

  When the suck back valve is in the closed state, the operating lever 72 is in a state where the handle portion 78 is raised upward (the handle portion 78 is oriented in the vertical direction) (not shown). At this time, the first movable member 6 and the second movable member 8 connected by a connecting rod (not shown) are urged upward by the first spring 11, and the first movable member 6 moves the first diaphragm 2 upward. By energizing, the first valve body 29 is pressed against the valve seat portion 23 to block the communication flow path 22. The piston 7 is urged upward by the second spring 12, and the upper surface of the piston 7 and the lower end of the stem 74 are in contact with each other.

  Here, when the operating lever 72 is swung around the fulcrum shaft and the handle portion 78 is tilted (the handle portion 78 of the operating lever 72 is oriented in the horizontal direction), the second contact surface 80 and the bonnet 10 The upper surfaces are separated from each other, and the surface that comes into contact with the upper surface of the bonnet 10 moves on the arc surface, so that the first contact surface 79 and the upper surface of the bonnet 10 come into contact with each other. At this time, since the distance from the fulcrum shaft of the operation lever 72 is farther in the second contact surface 80 than in the first contact surface 79, the position of the fulcrum shaft of the operation lever 72 is the upper surface of the bonnet 10 by the difference in this distance. The stem 74 that is engaged with the operation lever 72 by the joining pin 73 that is a fulcrum shaft is also lowered. When the stem 74 is lowered, the piston 7 that is in contact with the lower end of the stem 74 is pushed downward, and the lower surface of the piston 7 collar 42 and the upper surface of the second movable member 8 are in contact with each other. When the piston 7 is further pushed down, the piston 7 also presses the second movable member 8 downward, and the piston 7 and the second movable member 8 are lowered in conjunction with each other. The first movable member 6 integrated with the second movable member 8 is also moved downward by the connecting rod, the first diaphragm 2 connected to the first movable member 6 is also displaced downward, and the first valve body 29 is moved downward. Is separated from the valve seat 23 and the communication channel 22 is opened. When the lower surface of the second movable member 8 comes into contact with the upper surface of the second diaphragm retainer 5, the associated descent of the piston 7 and the second movable member 8 stops, and the valve is fully opened. The second diaphragm 3 connected to the rod portion 43 is also displaced downward by the downward movement of the piston 7 (state of FIG. 7).

  Next, when the operating lever 72 is swung around the fulcrum shaft to raise the handle 78 (the handle 78 is oriented in the vertical direction), the first contact surface 79 and the upper surface of the bonnet 10 Instead, the second contact surface 80 and the upper surface of the bonnet 10 are in contact with each other, and the distance from the fulcrum shaft of the operation lever 72 to the upper surface of the bonnet 10 is increased. The stem 74 engaged with the lever 72 rises while compressing the spring 77. When the stem 74 is raised, the first movable member 6 is pushed upward by the repulsive force of the first spring 11 in accordance with the movement of the stem 74, and the first valve body 29 of the first diaphragm 2 is also raised. The body 29 is brought into pressure contact with the valve seat portion 23 of the main body 1, the communication flow path 22 is blocked, and the valve is closed. At this time, the second movable member 8 integrated with the first movable member 6 and the connecting rod also rises, and the piston 7 also rises in conjunction with the second movable member 8 in contact. Ascending the first movable member 6 and the second movable member 8 stops when the first valve body 29 and the valve seat portion 23 of the first diaphragm 2 are in pressure contact with each other. The piston 7 separates from the second movable member 8 by the repulsive force of the second spring 12 and further rises, and stops at a position where the upper surface of the piston 7 and the lower end of the stem 74 abut. The second diaphragm 3 connected to the tip of the rod portion 43 is also displaced upward by the ascent of the piston 7 at this time. The volume of the second valve chamber 21 is increased by the displacement of the second valve element 37 of the second diaphragm 3 as the piston 7 is moved away from the second movable member 8, so that the outlet flow path 19 of the suck back valve is increased. The fluid on the downstream side is sucked back. The suck back operation is performed by this sucking back, and the dripping at the end of the pipe communicating with the outlet channel 19 is prevented. The suck back amount is determined by the amount of movement until the piston is separated from the second movable member 8 and comes into contact with the lower end of the stem 84 when the valve is closed.

  The suck back valve of the present invention is used in an apparatus for supplying a chemical solution or the like to a semiconductor wafer in a semiconductor manufacturing apparatus, and is particularly preferably used in a step of applying a photoresist liquid. This is a structure that minimizes dust generation due to the operation of the valve, so even if a photoresist solution is flowed, it is possible to suppress the generation of defective products due to dust generation and to prevent dripping from the nozzle tip after the valve is closed. Since it can prevent the deterioration of the yield of a product by preventing reliably, it is suitable. Moreover, it is used suitably also for the process of filling a container with the food / beverage fluid in a food manufacturing apparatus, the process of inject | pouring a reagent into a container in a pharmaceutical manufacturing apparatus. This suppresses dust generation due to valve operation as much as possible, so that it is possible to prevent dust generation from becoming a source of sanitary problems even when a fluid or fluid is passed, and a large opening / closing stroke is taken. Therefore, even a food or fluid with relatively high viscosity or a reagent can be flowed without problems, which is preferable. Here, the food / beverage fluid is a flowable liquid food (pudding, jelly, etc.) or beverage, and the reagent is a pre-manufactured chemical and a post-manufactured chemical used for pharmaceutical production.

It is a longitudinal cross-sectional view which shows the state in which the suck back valve which is 1st embodiment of this invention is a closed state, and the suck back operation | movement was performed. It is the longitudinal cross-sectional view which looked at FIG. 1 from the side surface (flow path direction). It is a longitudinal cross-sectional view which shows the state in which the suck back valve | bulb of FIG. 1 is a closed state, and the suck back operation | movement is not performed. It is a longitudinal cross-sectional view which shows the suck back valve | bulb of FIG. 1 in an open state. It is a longitudinal cross-sectional view which shows 2nd embodiment of this invention. It is a longitudinal cross-sectional view which shows 3rd embodiment of this invention. It is a longitudinal cross-sectional view which shows 4th embodiment of this invention. It is a longitudinal cross-sectional view which shows the conventional suck back valve.

Explanation of symbols

1 Main Body 2 First Diaphragm 3 Second Diaphragm 4 First Diaphragm Press 5 Second Diaphragm Press 6 First Movable Member 7 Piston 8 Second Movable Member 9 Base 10 Bonnet 11 First Spring 12 Second Spring 13 Concave 14 Spring Receiving Part DESCRIPTION OF SYMBOLS 15 Recessed part 16 Cylinder part 17 Air supply port 18 Inlet flow path 19 Outlet flow path 20 First valve chamber 21 Second valve chamber 22 Communication flow path 23 Valve seat part 24 Recessed part 25 Recessed part 26 Adjustment screw 27 Lock nut 28 Stepped part 29 First One valve body 30 Membrane part 31 Peripheral part 32 Through hole 33 Gutter part 34 Column part 35 Step part 36 Through hole 37 Second valve body 38 Membrane part 39 Peripheral part 40 Through hole 41 Through hole 42 Gutter part 43 Rod part 44 Annular groove 45 annular groove 46 through hole 47 connecting rod 51 drive unit 52 stepping motor 53 speed reducer 54 stem 55 Through hole 61 Drive part 62 Solenoid 63 Stem 64 Through hole 71 Drive part 72 Operation lever 73 Joining pin 74 Stem 75 Recessed part 76 Through hole 77 Spring 78 Handle part 79 First contact surface 80 Second contact surface 81 Notch

Claims (12)

A first valve chamber that communicates with the inlet channel at the lower portion and a second valve chamber that communicates with the outlet channel at the upper portion are provided, and the communication channel that communicates between the first valve chamber and the second valve chamber. A main body in which a valve seat is formed on the peripheral edge of the opening on the first valve chamber side;
A first valve body pressed against or separated from the valve seat portion;
A second valve body for sucking back fluid by changing the volume in the second valve chamber;
A first movable member positioned below the first valve chamber and holding the first valve body;
A second movable member positioned above the second valve chamber connected to the first movable member by a connecting rod disposed outside the communication channel;
In a suck back valve comprising a bonnet disposed in the upper part of the main body, a piston having a flange part and a rod part hanging from the center of the flange part and connected to the second valve body at the lower end,
The first movable member and the second movable member connected by the connecting rod are biased upward with a predetermined force,
The flange portion of the piston is provided so as to be in contact with the second movable member, and can be interlocked with the second movable member when the flange portion is in contact with the second movable member, and the piston is moved up and down. The valve is opened and closed by moving and the first valve body abuts and separates from the valve seat, and the fluid is sucked back by separating the flange from the second movable member. Suck back valve.   A membrane portion extends in the outer diameter direction of the first valve body to form a first diaphragm, and a peripheral portion of the first diaphragm is clamped and fixed between the main body and a first diaphragm presser installed below the main body. The suck back valve according to claim 1, wherein   A membrane portion extends in the outer diameter direction of the second valve body to form a second diaphragm, and a peripheral portion of the second diaphragm is clamped and fixed between the main body and a second diaphragm presser installed above the main body. The suck back valve according to claim 1 or 2, wherein the suck back valve is provided.   The sack according to any one of claims 1 to 3, wherein the means for biasing the first movable member and the second movable member connected by the connecting rod upward is a spring. Back valve. A bonnet having a concave portion having a lower surface opened and a cylinder portion having an opening at the center of the concave portion is provided on the upper portion of the main body.
The second movable member is disposed in the recess,
The flange portion of the piston is slidably contacted with the inner circumferential surface of the cylinder portion in an airtight state, and the piston is biased upward with a predetermined force by a spring.
The air supply port connected to the space part enclosed by the said cylinder part ceiling surface and inner peripheral surface, and this collar upper surface was provided in the said bonnet outer surface, The Claim 1 thru | or 4 characterized by the above-mentioned. The suck back valve according to any one of claims.   6. The suck back valve according to claim 5, further comprising an adjusting screw that penetrates the ceiling surface of the cylinder portion and is screwed in an airtight state on the upper portion of the bonnet. A bonnet having a recess having a lower surface opened, a cylinder part having an opening at the center of the recessed part ceiling surface, and a through hole penetrating through the center of the cylinder part ceiling surface is provided in the upper part of the main body,
A drive unit for moving the stem up and down is provided at the top of the bonnet,
The second movable member is disposed in the recess,
The piston is biased upward with a predetermined force by a spring,
5. The stem according to claim 1, wherein the stem penetrates the through hole of the bonnet and the tip of the stem is arranged so as to be in contact with the upper portion of the flange of the piston or integrally connected thereto. The suck back valve according to claim 1.   The suck back valve according to claim 7, wherein the driving unit includes a stepping motor and a speed reducer.   The suck back valve according to claim 7, wherein the driving unit is a solenoid. The drive unit is an operating lever that is manually swung in the axial direction of the stem;
The suck back valve according to claim 7, wherein the operating lever is connected to the stem upper portion exposed through the upper portion of the bonnet, and the swing of the operating lever is converted into the vertical movement of the stem.   11. The suck back valve according to claim 1, wherein the suck back valve is used in a step of applying a photoresist solution in a semiconductor manufacturing apparatus.   The suck-back valve according to any one of claims 1 to 10, wherein the suck-back valve is used in a step of filling a container with a food and drink fluid in a food production apparatus or a step of injecting a reagent in a pharmaceutical production apparatus into the container. Characteristic suck back valve.

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