JP4925339B2 - High-speed inversion pulse power supply - Google Patents

Description

  The present invention relates to a high-speed inversion pulse power supply device used for electroplating or the like.

  In certain types of electroplating, it is known that when a periodically reversing current is passed, the physical properties of the coating are improved, and copper plating has long been put into practical use as PR copper plating. This copper PR plating reverses the polarity with a period of several seconds or more. However, in recent years, when the polarity is reversed at a high speed with a period of several milliseconds, plating of certain precious metal plating and printed circuit board through-hole plating is possible. It has been found that there is a significant improvement effect in quality, and a power supply device as shown in Patent Document 1 for performing such plating has been proposed.

  The power supply device disclosed in Patent Document 1 includes a first DC power supply device, a second DC power supply device, one output terminal of the first DC power supply device, and the other output of the second DC power supply device. A series circuit of a first reactor provided between the end and one end of the load, a first main switching element that is turned on and off at high speed, one output end of the second DC power supply device, and the first A second reactor provided between the other output end of the DC power supply device and the other end of the load, and a second main switching element that complementarily turns off and on in response to the on and off of the first main switching element. Between the output of the first reactor and the other output terminal of the first DC power supply device in a complementary manner corresponding to on / off of the first main switching element. Auxiliary switching element and second rear A second auxiliary switching element that is turned off and on in a complementary manner in response to the on and off of the second main switching element, between the output of the tor and the other output terminal of the second DC power supply device, First and second clamps connected in parallel to the second auxiliary switching element, connected in series to the first and second clamp diodes and the first and second clamp diodes, respectively, and charged with a steady-state peak voltage. First and second clamp circuits each including a first capacitor, a first or second voltage detector for detecting both ends of the first or second auxiliary switching element, and the first or second voltage detector. And a control device that turns on the first or second auxiliary switching element when the detection signal is equal to or higher than a predetermined voltage.

  In this configuration, the output of the first DC power supply is short-circuited by the first reactor while the first auxiliary switching element is on, and the output of the second DC power supply is second while the second auxiliary switching element is on. Shorted by the reactor, energy is accumulated in each reactor. When the first main switching element is turned on, the first auxiliary switching element is turned off, the energy stored in the first reactor is supplied to the load as a positive current, and when the second main switching element is turned on, the second auxiliary switching element is turned on. The element is turned off, and the energy stored in the second reactor is supplied to the load as a negative current.

In this method, the current passed through the reactor is transferred to the load, and the rise of the current at each energization is good, but the current flows to the transformer, auxiliary switching element, reactor, and semiconductor element even during energization. There is a problem that the apparatus cannot be made small because a large reactor is required even if the usage rate is low.
JP 2002-1229397 A

  The present invention has been made in order to solve the above problems and to provide a high-speed inversion pulse power supply device capable of outputting a good inversion pulse waveform with any pulse width.

  A high-speed inversion pulse power supply device of the present invention made to solve the above problem includes a power supply for supplying positive current composed of a DC-DC converter and a semiconductor switch for opening and closing the output of the DC-DC converter, One end of a primary coil of a plurality of pulse transformers having a voltage time product sufficient to pass pulse power is individually connected to one pole of a DC power source through a first semiconductor switch, and the primary of the pulse transformer The other end of the coil is connected to the other pole of the DC power supply through a second semiconductor switch, and between the primary coil of each pulse transformer and the connection point of each first semiconductor switch and the other pole of the DC power supply. Connect each of the first diodes as a polarity that does not allow current to flow during normal operation, and connect a second diode between the connection point of the primary coil of the pulse transformer and the second semiconductor switch and one pole of the DC power supply. Connect as a polarity that does not flow current at all times, connect the secondary coil of each pulse transformer in series as an output, connect a semiconductor switch that opens and closes the output in series with the series circuit of the secondary coil of the pulse transformer A power supply for supplying negative current configured as described above, and the output of the power supply for supplying positive current and the output of the power supply for supplying negative current are connected in parallel with opposite polarities. It is.

  Here, the second semiconductor switch is continuously turned on during the negative polarity energization period, and at the start of the negative polarity energization, the plurality of first semiconductor switches are simultaneously turned on, and after the negative load current rises, It is preferable to provide control means for generating a drive signal for sequentially turning on and off the first semiconductor switch so that the load current is constant.

  Further, a high-speed inversion pulse power supply device according to the invention of claim 3 made to solve the same problem includes a second DC-DC converter separately from the DC-DC converter constituting the power supply for supplying positive current. And the output of the second DC-DC converter is connected in series with the secondary coil of the pulse transformer of the high-speed inversion pulse power supply device according to claim 1. Here, the second semiconductor switch is continuously turned on during the negative polarity energization period, and at the start of the negative polarity energization, the plurality of first semiconductor switches are simultaneously turned on, and after the negative load current rises, It is preferable to provide control means for controlling the second DC-DC converter so that the first semiconductor switch is turned off and the load current becomes constant.

  In the first aspect of the invention, if the plurality of first semiconductor switches are turned on at the same time when the negative polarity energization is started, a high total voltage of the secondary voltages of the plurality of pulse transformers is applied to the load. As a result, the negative load current rises quickly. Also, if the first semiconductor switch is sequentially turned on and off so that the current becomes constant after the load current rises, the output voltage will not be as high as one secondary voltage of the pulse transformer. The on-time of the first semiconductor switch is not extremely shortened, and the switching frequency of each first semiconductor switch is lowered, so that the switching loss of the first semiconductor switch is kept low and the output current ripple is reduced. There is an advantage of becoming smaller.

  In the invention of claim 3, since the second DC-DC converter is provided, if a plurality of first semiconductor switches are simultaneously turned on at the start of negative polarity energization, a plurality of pulse transformers are provided. Thus, a high total voltage of the secondary voltage and the output voltage of the second DC-DC converter is applied to the load, and the negative load current rises quickly. Since the load current is supplied from the second DC-DC converter after the load current rises, there is an advantage that the pulse transformer can have a small voltage time product.

  Thus, when switching from the positive polarity energization period to the negative polarity energization period, the sum of the secondary voltages of the plurality of pulse transformers or the sum of the secondary voltages of the plurality of pulse transformers and the output of the DC-DC converter is high. When the voltage is applied, the negative load current rises quickly, and when switching from the negative polarity energization period to the positive polarity energization period, the negative load current is caused by the high sum of the reverse voltages induced on the secondary side of the pulse transformer. Since it decays within a short time and shifts to a positive current, the polarity switching time is short, and a good inversion pulse waveform with little fluctuation in current during the positive current conduction period and the negative current conduction period is output. There are advantages.

Next, the best mode for carrying out the present invention will be specifically described with reference to the drawings.
FIG. 1 is a connection diagram of a main circuit showing a first embodiment of the present invention, in which a DC power source for converting AC power supplied from an AC input terminal 3 by a rectifier 1 and a capacitor 2 into DC power is provided. is there. The positive poles of the semiconductor switches 4a and 4b are connected to the positive pole of the DC power supply, and the negative poles of the semiconductor switches 4a and 4b are connected to the negative poles of the semiconductor switches 5a and 5b, respectively. The positive pole is connected.

  A primary coil of the transformer 6 is connected between the connection point of the semiconductor switches 4a and 5a and the connection point of the semiconductor switches 4b and 5b, and a center tap is provided on the secondary coil of the transformer 6 and both ends. Are connected to the anodes of the diodes 7a and 7b, respectively, to form a rectifier circuit. These semiconductor switches 4a, 4b, 5a and 5b, the transformer 6 and the diodes 7a and 7b constitute a so-called DC-DC converter, and this DC-DC converter functions as a power source for supplying a positive current to the load. The center tap of the transformer 6 is connected to the output terminal 8 b, and the cathodes of the diodes 7 a and 7 b are connected to the output terminal 8 a via the semiconductor switch 9.

  Further, the positive pole of the DC power source is connected to the positive poles of the plurality of semiconductor switches 10a and 10b as the first semiconductor switch and the cathode of the diode 11 as the second diode, and the minus of the semiconductor switches 10a and 10b. The poles are connected to the cathodes of diodes 12a and 12b, which are first diodes each having an anode connected to the negative pole of the DC power supply. Furthermore, the anode of the diode 11 is connected to the plus pole of the semiconductor switch 13 which is the second semiconductor switch having the minus pole connected to the minus pole of the DC power supply.

  Primary coils of pulse transformers 14a and 14b are connected between the negative poles of the semiconductor switches 10a and 10b and the positive pole of the semiconductor switch 13, respectively. The secondary coils of the pulse transformers 14a and 14b are connected in series. In addition, one end is connected to the output terminal 8 b and the other end is connected to the output terminal 8 a via the semiconductor switch 15. Here, one end of the secondary coil of the pulse transformers 14a and 14b connected to the output terminal 8b is connected to one or both of the semiconductor switches 10a and 10b and the semiconductor switch 13 to turn on the pulse transformers 14a and 14b. The voltage induced when the voltage is applied to the primary coil is on the positive side, and the semiconductor switch 15 has a polarity capable of turning on and off the current caused by the induced voltage.

  The semiconductor switches 4a, 4b, 5a, and 5b, the semiconductor switch 9, the semiconductor switches 10a and 10b, the semiconductor switch 13, the semiconductor switch 15, the diodes 7a and 7b, the diode 11, and the diodes 12a and 12b constituting the above circuit are high-speed. It is desirable to use an element. Since the drive signals are simultaneously applied to the semiconductor switches 4a and 5b and the semiconductor switches 4b and 5a, respectively, the drive signals are provided in an insulated manner. Further, the pulse transformers 14a and 14b are assumed to have a voltage time product sufficient to pass pulse power. The pulse transformers 14a and 14b can increase the voltage time product by cutting the iron core and inserting a gap in the cut surface.

  The semiconductor switches 4a, 4b, 5a and 5b, the semiconductor switch 9, the semiconductor switches 10a and 10b, the semiconductor switch 13 and the semiconductor switch 15 are each supplied with a drive signal from a control device (not shown). During the positive polarity energization period, a drive signal is continuously given to the semiconductor switch 9 during that period, and a drive signal is alternately given to the semiconductor switches 4a and 5b and the semiconductor switches 4b and 5a. Further, during the negative polarity energization period, a drive signal is continuously given to the semiconductor switch 15 and the semiconductor switch 13 during that period, and at the same time when the negative polarity energization period starts, the negative load current rises. After that, the drive signal is alternately given until the end of the negative polarity energization period.

  Although not shown, a current sensor for detecting the output current is provided, and during the positive polarity energization period, the current detection signal detected by the current sensor is compared with the set reference signal on the positive polarity side. The widths of drive signals given to the semiconductor switches 4a and 5b and the semiconductor switches 4b and 5a are controlled so as to be the set current. Similarly, during the negative polarity energization period, the current detection signal and the negative reference signal are compared, and after the negative load current rises, the semiconductor switch is set so that the negative current becomes the set current. The width of the drive signal given to 10a and 10b is controlled by the pulse width.

  At the end of the negative polarity energization period, the drive signal is continuously applied to the semiconductor switch 15 and the drive signal is stopped from being applied to the semiconductor switches 10a and 10b and the semiconductor switch 13. The current detection signal and the reference signal on the positive polarity side are compared, and when the load current reaches the current set to the positive polarity, the drive signal is not given to the semiconductor switch 15 and the negative polarity energization period is completely ended. The drive signal is continuously given to the semiconductor switch 9, and the drive signal is alternately given to the semiconductor switches 4a and 5b and the semiconductor switches 4b and 5a to shift to the positive polarity energization period.

  The operation of the high-speed inversion pulse power supply device configured as described above will be described below. Basically, positive polarity pulses and negative polarity pulses are alternately output. However, in the case of plating, since a film is formed during the positive polarity energization period, the normal positive polarity energization time is usually the number of negative polarity energization periods. More than double. FIG. 2 shows a waveform of a main part when one negative pulse is outputted while two positive pulses are outputted. A is a drive signal of the semiconductor switch 9, and B is a semiconductor. The drive signal of the switch 15, C is the drive signal of the semiconductor switches 4a and 5b, D is the drive signal of the semiconductor switches 4b and 5a, E and F are the drive signals of the semiconductor switches 10a and 10b, respectively, and G is the drive signal of the semiconductor switch 13 Where H is the output voltage and J is the output current.

  AC power supplied from the AC input terminal 3 is converted into DC power by the rectifier 1 and stored in the capacitor 2. The left portion before the time t1 in FIG. 2 is a positive polarity energization period, a drive signal is given to the semiconductor switch 9, and a drive signal is alternately given to the semiconductor switches 4a and 5b and the semiconductor switches 4b and 5a. Thereby, the semiconductor switches 4a and 5b and the semiconductor switches 4b and 5a are turned on alternately, and an alternating current flows through the primary coil of the transformer 6. The AC power induced in the secondary coil of the transformer 6 is rectified by the diodes 7 a and 7 b and output to the output terminals 8 a and 8 b through the semiconductor switch 9. Since the output voltage is positive on the output terminal 8a side and negative on the output terminal 8b side, a positive current can be applied by connecting an anode plate to the output terminal 8a and an object to be plated connected to the output terminal 8b and immersing in the plating solution. And a plating film is formed. At this time, the semiconductor switches 4a, 4b, 5a and 5b are subjected to pulse width control so that the current becomes the set current on the positive polarity side.

  When the positive current supply period ends and the time point t1 in FIG. 2 has passed, the drive signals are not supplied to the semiconductor switches 4a, 4b, 5a, 5b and the semiconductor switch 9, and the drive signals are supplied to the semiconductor switch 15 and the semiconductor switch 13. It becomes a negative polarity energization period. Since the drive signals are simultaneously applied to the semiconductor switches 10a and 10b, a voltage is simultaneously applied to the primary coils of the pulse transformers 14a and 14b. As a result, the total voltage induced in the secondary coils of the pulse transformers 14a and 14b is output to the output terminals 8a and 8b through the semiconductor switch 15, but the voltage is negative on the output terminal 8a side and output. Since the terminal 8b side becomes positive, the negative polarity energization occurs, and the negative load current rises within a short time due to the high total voltage induced in the secondary coil. With this negative current conduction, the plating film is peeled off from the object to be plated.

  When the current rises, the drive signals are not simultaneously applied to the semiconductor switches 10a and 10b, and the drive signals are alternately applied by controlling the pulse width so that the current becomes the set current on the negative polarity side. Current flows through the primary coils of the pulse transformers 14a and 14b through the semiconductor switches 10a and 10b and the semiconductor switch 13 while the semiconductor switches 10a and 10b are on, and the semiconductor switch 13 when the semiconductor switches 10a and 10b are off. Current flows through the diodes 12a and 12b. Since the voltage output at this time is not as high as one voltage induced in the secondary coils of the pulse transformers 14a and 14b, the pulse width is not extremely shortened, and the ripples of the output voltage and output current are reduced. There is an advantage of becoming smaller. Moreover, since the switching frequency of each semiconductor switch 10a, 10b becomes low, there is an advantage that the switching loss is reduced.

  During this negative polarity energization period, a one-way voltage is applied to the primary coils of the pulse transformers 14a and 14b and the iron core is saturated. The pulse transformers 14a and 14b pass the pulse power during this period. Since it has a sufficient voltage-time product, it does not reach saturation. Magnetic energy is accumulated in the pulse transformers 14a and 14b by the excitation current during this period. When the predetermined negative polarity energization period elapses and the time point t2 is reached, the drive signals are not applied to the semiconductor switches 10a and 10b and the semiconductor switch 13, and the semiconductor switches 10a and 10b and the semiconductor switch 13 are all turned off.

  The current flowing in the primary coils of the pulse transformers 14a and 14b flows into the capacitor 2 through the diodes 12a and 12b and the diode 11, and the magnetic energy stored in the pulse transformers 14a and 14b is recovered, so that the magnetic flux in the iron core is reset. Thus, the next pulse power can be passed. At this time, a voltage having a reverse polarity is generated in the primary coils of the pulse transformers 14a and 14b in the direction in which the current continues to flow, and this reverse polarity voltage is induced in the secondary coils of the pulse transformers 14a and 14b. And add to the load. The load current attenuates within a short time due to the voltage having a high reverse polarity of the total voltage induced in the secondary coil, and further reverses to become a positive current. When this load current reaches the positive polarity set current at time t3, the drive signal is not applied to the semiconductor switch 15, and the drive signal is applied to the semiconductor switch 9, the semiconductor switches 4a, 4b, 5a, and 5b. In this manner, the positive polarity energization period is started again, and thereafter the positive polarity energization and the negative polarity energization are similarly repeated.

  FIG. 3 is a connection diagram of a main circuit showing an embodiment of the invention of claim 3 and is basically the same as that shown in FIG. 1 except that a control device (not shown) and a current sensor for detecting an output current are provided. The same portions are denoted by the same reference numerals. The difference is that two semiconductor switches 4c and 5c connected in series between the positive and negative poles of the DC power supply, a transformer 16 and diodes 17a and 17b are provided, and the primary coil of the transformer 16 is connected to the semiconductor switch 4c. 5c and the connection point of the semiconductor switches 4b and 5b, a center tap is provided on the secondary coil of the transformer 16, and the anodes of the diodes 17a and 17b are connected to both ends, respectively. 1 has one end of the secondary coil of the pulse transformer 14a, 14b connected to the output terminal 8b in the configuration shown in FIG. 1 disconnected from the output terminal 8b and connected, and the cathodes of the diodes 17a, 17b were connected to the output terminal 8b. That is.

  The semiconductor switches 4b, 4c, 5b and 5c, the transformer 16 and the diodes 17a and 17b constitute a so-called DC-DC converter, and the output of the DC-DC converter is connected to the pulse transformers 14a and 14b connected in series. It is further connected in series with the secondary coil and functions as a part of a power source that supplies a negative current to the load. The semiconductor switches 4b and 5b constitute a DC-DC converter that functions as the positive power source, and are shared. However, a dedicated semiconductor switch may be provided separately. Needless to say. Since the drive signals are simultaneously applied to the semiconductor switches 4c and 5b and the semiconductor switches 4b and 5c, the drive signals are provided in an insulated manner.

  The semiconductor switches 4a, 4b, 4c, 5a, 5b, and 5c, the semiconductor switch 9, the semiconductor switches 10a and 10b, the semiconductor switch 13, and the semiconductor switch 15 are each supplied with a drive signal from a control device (not shown). During the positive polarity energization period, a drive signal is continuously given to the semiconductor switch 9 during that period, and a drive signal is alternately given to the semiconductor switches 4a and 5b and the semiconductor switches 4b and 5a. It is the same as that of the structure shown. During this time, the current detection signal is compared with the set reference signal on the positive polarity side, and the width of the drive signal applied to the semiconductor switches 4a, 4b, 5a, 5b is pulsed so that the positive polarity current becomes the set current. The same applies to the width control.

  During the negative polarity energization period, a drive signal is continuously given to the semiconductor switch 15 and the semiconductor switch 13 during that period, and a drive signal is alternately given to the semiconductor switches 4c and 5b and the semiconductor switches 4b and 5c. At the start of the negative polarity energization period, a drive signal is given to the semiconductor switches 10a and 10b until a negative load current rises. After the negative load current rises, the widths of the drive signals given to the semiconductor switches 4c and 5b and the semiconductor switches 4b and 5c are controlled so that the negative current becomes the set current. At the end of the negative polarity energization period, the semiconductor switch 15 and the semiconductor switches 4b, 4c, 5b, 5c and the semiconductor switch 13 are stopped from giving drive signals, the current detection signal is monitored, and the semiconductor switch is turned off when the load current becomes zero. 9 and the semiconductor switches 4a and 5b and the semiconductor switches 4b and 5a are alternately supplied with drive signals to shift to the positive polarity energization period.

  The operation of the high-speed inversion pulse power supply device configured as described above will be described below. FIG. 4 shows a waveform of a main part when one negative pulse is outputted while two positive pulses are outputted. A is a drive signal of the semiconductor switch 9, and B is a semiconductor. The drive signal of the switch 15, C is the drive signal of the semiconductor switches 4a and 5b, D is the drive signal of the semiconductor switches 4b and 5a, K is the drive signal of the semiconductor switches 4c and 5b, L is the drive signal of the semiconductor switches 4b and 5c, E and F are drive signals for the semiconductor switches 10a and 10b, G is a drive signal for the semiconductor switch 13, H is an output voltage, and J is an output current.

  The left part before the time t1 in FIG. 4 is a positive polarity energization period, and a drive signal is given to the semiconductor switch 9 and the semiconductor switches 4a, 4b, 5a, and 5b as in the configuration shown in FIG. The output terminal 8a side outputs a positive voltage, and the output terminal 8b side outputs a negative voltage. After the time t1 in FIG. 4, the drive signal is not applied to the semiconductor switch 9, the semiconductor switches 4a, 4b, 5a, and 5b, the drive signal is applied to the semiconductor switch 15, and the semiconductor switches 4c and 5b and the semiconductor switch 4b, A drive signal is alternately applied to 5c, and a negative polarity energization period is entered. Thereby, the semiconductor switches 4c and 5b and the semiconductor switches 4b and 5c are alternately turned on, an alternating current flows through the primary coil of the transformer 16, and the alternating current power induced in the secondary coil of the transformer 16 is caused by the diodes 17a and 17b. Rectified.

  Further, since a drive signal is given to the semiconductor switch 13 and a drive signal is also given to the semiconductor switches 10a and 10b at the same time, a voltage is simultaneously applied to the primary coils of the pulse transformers 14a and 14b. A voltage is simultaneously induced in the next coil. The sum of the voltage induced in the secondary coils of the pulse transformers 14a and 14b and the voltage rectified by the diodes 17a and 17b through the semiconductor switch 15 is output to the output terminals 8a and 8b. Will stand up in a short time. Since the output voltage is negative on the output terminal 8a side and positive on the output terminal 8b side, it is negatively energized.

  When the current rises, the drive signal is not given to the semiconductor switches 10a and 10b, and the current flowing through the primary coils of the pulse transformers 14a and 14b through the semiconductor switches 10a and 10b and the semiconductor switch 13 Flows through 12a, 12b. The semiconductor switches 4c and 5b and the semiconductor switches 4b and 5c are continuously supplied with drive signals alternately, and a DC-DC converter including the semiconductor switches 4b, 4c, 5b, and 5c is operated to set a negative current. The width of the drive signal for driving the semiconductor switches 4c and 5b is subjected to pulse width control so as to obtain the generated current. As a result, only the voltage of the DC-DC converter is output to the output terminals 8a and 8b.

  It is shown in FIG. 1 that the iron cores of the pulse transformers 14a and 14b do not reach saturation during the negative polarity energization period, and that magnetic energy is accumulated in the pulse transformers 14a and 14b by the excitation current during this period. It is the same as that of the structure shown. When a predetermined negative polarity energization period elapses and t2 is reached, a drive signal is continuously applied to the semiconductor switch 15, but no drive signal is applied to the semiconductor switches 4c and 5b and the semiconductor switches 4b and 5c. As a result, the DC-DC converter constituted by the semiconductor switches 4b, 4c, 5b, 5c and the like does not operate, and the voltage of the DC-DC converter is not output.

  Further, the drive signal is not given to the semiconductor switch 13, and the current flowing in the primary coils of the pulse transformers 14 a and 14 b flows into the capacitor 2 through the diodes 12 a and 12 b and the diode 11. Thereby, the magnetic flux of the iron cores of the pulse transformers 14a and 14b is reset as in the configuration shown in FIG. 1, and a reverse polarity voltage is induced in the secondary coils of the pulse transformers 14a and 14b and applied to the load. The load current is attenuated within a short time due to the voltage having a high reverse polarity, which is the sum of the voltages induced in the secondary coil. However, when the load current becomes zero, it is blocked by the diodes 17a and 17b. Current does not flow. When the load current becomes zero at time t3, the drive signal is not applied to the semiconductor switch 15, and the drive signal is applied to the semiconductor switch 9, the semiconductor switches 4a, 4b, 5a, and 5b. In this manner, the positive polarity energization period is started again, and thereafter the positive polarity energization and the negative polarity energization are similarly repeated.

  As described above, according to each of the embodiments described above, a positive current is supplied from a DC-DC converter constituted by the semiconductor switches 4a, 4b, 5a, 5b, etc. in the positive polarity energization period, The positive current is controlled to be constant. When switching from the positive polarity energization period to the negative polarity energization period, the secondary voltage of the pulse transformers 14a and 14b or the secondary voltage of the pulse transformers 14a and 14b and the semiconductor switches 4b, 4c, 5b, 5c, etc. Since a high voltage in total with the output voltage of the DC-DC converter constituted by the above is applied to the load, the negative load current rises quickly, and thereafter the negative current is controlled to be constant. In addition, when switching from the negative polarity energization period to the positive polarity energization period, a reverse voltage having a high total of voltages induced on the secondary sides of the pulse transformers 14a and 14b is applied to the load, so that the negative load current is short. It decays in time and shifts to a positive current.

As a result, a good inversion pulse waveform is output in which the polarity switching time is short, and the current fluctuation during the positive polarity energization period and the negative polarity energization period is small.
In the above-described embodiment, two pulse transformers 14a and 14b and two semiconductor switches 10a and 10b are provided. However, three or more pulse transformers 14a and 14b and semiconductor switches 10a and 10b may be provided. However, the semiconductor switch 9 may be connected to the center tap side of the transformer 6, and the semiconductor switch 15 is connected to the output terminal 8b side or the secondary coil of the pulse transformers 14a and 14b connected in series. Needless to say, it may be connected to any connection point.

FIG. 3 is a connection diagram of a main circuit showing the configuration of the invention of claim 1. It is a wave form diagram of the principal part at the time of operation. FIG. 5 is a connection diagram of a main circuit showing the configuration of the invention of claim 2. It is a wave form diagram of the principal part at the time of operation.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Rectifier 2 Capacitor 3 AC input terminal 4a, 4b, 4c, 5a, 5b, 5c Semiconductor switch 6 Transformer 7a, 7b Diode 8a, 8b Output terminal 9, 10a, 10b Semiconductor switch 11, 12a, 12b Diode 13 Semiconductor switch 14a , 14b Pulse transformer 15 Semiconductor switch 16 Transformer 17a, 17b Diode

Claims (4)

  A primary current supply power source composed of a DC-DC converter and a semiconductor switch that opens and closes the output of the DC-DC converter, and a plurality of pulse transformers having a voltage time product sufficient to pass pulse power One end of each coil is individually connected to one pole of a DC power source via a first semiconductor switch, and the other end of the primary coil of the pulse transformer is collectively connected to the other pole of the DC power source via a second semiconductor switch. Connect the first diode between the primary coil of each pulse transformer and the connection point of each first semiconductor switch and the other pole of the DC power supply as a polarity that does not flow current during normal operation. A second diode is connected between the connection point of the primary coil and the second semiconductor switch and one pole of the DC power supply as a polarity that does not allow current to flow in a steady state, and the secondary coil of each pulse transformer A power supply for negative current supply configured by connecting in series as an output, connecting a series circuit of secondary coils of the pulse transformer and a semiconductor switch for opening and closing the output in series, and providing the positive current supply A high-speed inversion pulse power supply device characterized in that the output of the power supply and the output of the power supply for supplying negative current are connected in parallel with the polarity reversed.   During the negative polarity energization period, the second semiconductor switch is continuously turned on, and at the start of the negative polarity energization, the plurality of first semiconductor switches are simultaneously turned on, and after the negative polarity load current rises, the load current is 2. The high-speed inversion pulse power supply device according to claim 1, further comprising control means for generating a drive signal for sequentially turning on and off the first semiconductor switch so as to be constant.   2. The high-speed inversion pulse power supply device according to claim 1, wherein a second DC-DC converter is provided separately from the DC-DC converter constituting the power supply for supplying positive current, and the output of the second DC-DC converter A high-speed inversion pulse power supply device connected in series with a secondary coil of a pulse transformer.   The second semiconductor switch is continuously turned on during the negative polarity energization period, and at the start of the negative polarity energization, the plurality of first semiconductor switches are simultaneously turned on, and after the negative polarity load current rises, the first semiconductor switch is turned on. 4. The high-speed inversion pulse power supply device according to claim 3, further comprising control means for controlling the second DC-DC converter so as to turn off the semiconductor switch and make the load current constant.

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