JP4920508B2 - Transfer machine - Google Patents

Description

  The present invention relates to a transfer machine for electronic component substrates (hereinafter referred to as “electronic component substrates”) such as liquid crystal, organic EL, and semiconductor, and more particularly, to transfer of a cassette containing a plurality of electronic component substrates. The present invention relates to a transfer machine that prevents charging of a transported object such as a cassette due to repeated operations.

For example, an electronic component substrate is processed through a number of processing steps in an electronic component manufacturing factory. However, since these processing steps have different processing times, it is difficult to directly transfer the processing device to the processing device. .
Therefore, a plurality of electronic component substrates are temporarily stored in the cassette stocker while being stored in a cassette while waiting for the next process. In addition, this cassette is manufactured using stainless steel, which increases in strength with the recent increase in size of electronic component substrates.

  The cassette stocker is provided with a plurality of shelves and a transfer machine for transferring the cassettes to the plurality of shelves in order to efficiently store the cassettes. As shown in FIGS. 1 and 2, the transfer machine includes an arm that expands and contracts, and a hand (fork plate) provided at the tip of the arm, and a synthetic resin plate is disposed on the upper surface of the hand. The cassette is placed on the synthetic resin plate to prevent direct contact between the metal cassette and the metal hand, and the sliding of the cassette is improved to prevent the cassette from being worn and sliding. I try to suppress it.

  The transfer machine places a cassette on a hand having a synthetic resin plate disposed on the upper surface and repeats transfer between, for example, a transport vehicle and a shelf or a manufacturing apparatus. Static electricity is generated by repeating this transfer operation. If this static electricity is charged on a transported object such as a cassette, and it reaches a voltage or charge level that exceeds the allowable level, it is easy to discharge between the metal transfer machine or the shelf, and it is dangerous. There was a problem of adversely affecting the stored electronic component substrate.

  The present invention has been made in view of the above-described problems of the conventional transfer machine, and it is an object of the present invention to provide a transfer machine that prevents charging of a conveyed product due to repeated transfer operations.

To achieve the above object, transfer machine of the present invention is a transfer device for transferring by placing the conveyed objects on the hand, the contact margin in the transferred object to prevent charging of the conveyed object by the transfer operation 3 the antistatic member constituted by an electrostatic brushes with to 5 mm, from both lateral sides of the longitudinal direction of the intermediate position of the hand, is provided by the bristles upwards synthetic resin plate and the non-contact which is disposed on the upper surface of the hand It is characterized by that.

  According to the transfer machine of the present invention, in the transfer machine for transferring a transfer object on the hand, an antistatic member for preventing charging of the transfer object due to the transfer operation is provided in the hand. It is possible to prevent charging of the conveyed product due to repetition of the above, and to prevent charging of the conveyed product during conveyance or manufacturing process by the transfer machine.

And by forming the antistatic member with an electrostatic brush having a contact allowance of 3 to 5 mm with respect to the conveyed product, while reducing the dust generation without damaging the conveyed product or conversely wearing it. The antistatic member can be easily attached and inexpensive.

  Hereinafter, embodiments of the transfer machine of the present invention will be described with reference to the drawings.

1 to 3 show an embodiment of the transfer machine of the present invention.
In this transfer machine, a transported object 1 such as a cassette is placed on a hand 2 and transferred from, for example, a transport vehicle to a cassette stocker (both not shown).
In this transfer machine, the hand 2 is provided with an antistatic member 3 for preventing charging of the conveyed product 1 due to the transfer operation.

As shown in FIG. 3 (c), the transfer machine is mounted on a stacker crane 4 that travels along a cassette stocker, and a base portion 5 provided on the stacker crane 4 so as to be movable up and down, and the base portion. 5 is provided with an arm 6 (fork) that expands and contracts from the cassette stocker side, and a hand 2 (fork plate) provided at the tip of the arm 6.
On the upper surface of the hand 2, a synthetic resin plate 2P divided into one sheet or a plurality of sheets (9 sheets in the illustrated embodiment) is disposed along the hand 2, and is integrated with the hand 2 with mounting screws or bolts. Thus, wear of the cassette to be transferred is prevented and dust generation is also suppressed.

Conveying antistatic member 3, in the present real施例consists electrostatic brush in which the bristles facing upwards, on a part of the outer periphery of the hand 2 of the transfer machine (or guide frame 21), the bristles are placed It arrange | positions so that the thing 1 may be contacted.
The antistatic member 3 has a brush bristle contact amount of 3 to 5 mm with respect to the transported object 1, thereby reducing dust generation so that the transported object 1 is not worn or conversely worn. is doing.
It has been experimentally confirmed that the contact allowance of the antistatic member 3 can be prevented if the transported object 1 can make a slight contact with certainty.
When it is pushed by the conveyed product 1 with a contact allowance larger than this, there is a problem that dust is generated from the rubbing or the brush hair is broken. The degree to do is good.

An experiment was conducted to see how the static electricity charged on the conveyed product 1 changes by attaching an electrostatic brush to the hand 2 of the transfer machine.
The measuring method is as follows. In addition, the measurement was performed at the corner point on the stacker crane side after the transfer machine unloaded the transported material 1 on the shelf as shown in FIG.

Before attaching the electrostatic brush, as shown in FIG. 3C, the transported object 1 was unloaded with the stacker crane 4 and the state of electrostatic charge was measured.
As a result, as shown in the following Table 1 and FIG. 4A, the electrostatic charge voltage gradually increases when charging the conveyed product 1 as the cassettes are unloaded.

Thereafter, an electrostatic brush was attached to the transfer machine hand 2 of the stacker crane 4 to confirm whether or not the static electricity of the charged transported object 1 was removed.
When the electrostatic brush is attached to the hand 2 of the transfer machine, and the unloading of the transported object 1 is repeated, the electrostatic voltage charged on the transported object 1 is good as shown in Table 1 and FIG. It has been found that the value gradually decreases to below 0.6, which is a normal reference value.

Thus, in the transfer machine according to the present embodiment, in the transfer machine for transferring the transfer object 1 on the hand 2, the antistatic member 3 for preventing charging of the transfer object 1 due to the transfer operation is provided in the hand 2. As a result, charging of the conveyed product 1 due to repeated transfer operations can be prevented, and charging of the conveyed product 1 during conveyance or during the manufacturing process can be prevented by the transfer machine.
In this case, by forming the antistatic member 3 with an electrostatic brush having a contact allowance of 3 to 5 mm with respect to the conveyed object 1, dust is generated without damaging the conveyed object 1 or conversely. The antistatic member 3 can be easily and inexpensively attached.

5 shows a reference example of transfer machine.
This transfer machine uses an antistatic resin plate 7 as an antistatic member attached to the hand 2 instead of the electrostatic brush.
The antistatic resin plate 7, a part of the synthetic resin plate 2P that arranged so as to be along the upper surface of the hand 2 (hand corner portion of the drawing), or by replacing the whole to be mounted to the hand 2 To do. This attachment is performed with attachment screws or bolts as in the case of the conventional synthetic resin plate 2P.
Moreover, since the structure of a transfer machine is the same as the said Example, description of the same code | symbol is attached | subjected to the same member, and the detailed description is abbreviate | omitted.

  This antistatic resin plate 7 is constructed by adding carbon to a base polymer of a permanent antistatic high-tech material. Although it does not specifically limit as a base polymer, For example, a polyacetal, a polyetherimide material, a reinforced PTEE (polytetrafluoroethylene) material, a polyamideimide material, etc. can be used, More specifically, for example, “Semitron ESD225”, “Semitron ESD410, 420”, “Semitron ESD500”, “Semitron ESD520HR” (all trade names), etc., manufactured by Nippon Polypenco Co., Ltd. can be used.

  As described above, the antistatic resin plate 7 is disposed at least on the upper surface of the hand in contact with the cassette, so that the static electricity generated by repeated transfer operations can be charged to the cassette simply by placing the cassette on the hand. Without causing the static electricity generated, the static electricity can be removed by energizing the hand side through the antistatic resin plate 7.

While the transfer machine of the present invention have been described based on the example of its, the present invention is not limited to the configuration described in the above embodiment, the configuration described in the Examples and Reference Examples as appropriate The configuration can be changed as appropriate within a range that does not depart from the gist, such as a combination.

  The transfer machine according to the present invention has the characteristics of preventing charging of the conveyed product due to repetition of the transfer operation and preventing charging of the conveyed product during the transfer or manufacturing process by the transfer machine. For example, it can be suitably used as a cassette transfer machine in a clean room.

One Example of the transfer machine of this invention is shown, (a) is a top view, (b) is a side view. The transfer machine is shown, (a) is a side view with the hand extended, and (b) is a front view of the same. (A) is a plan view of a hand carrying a cassette, (b) is a two-sided view of an electrostatic brush, (c) is an explanatory diagram showing transfer of the cassette, and (d) is a measurement state of static electricity of the cassette. It is a perspective view. The relationship between the number of cassette transfer operations and the electrostatic voltage is shown, (a) is a graph showing a state before the antistatic member is attached, and (b) is a graph showing a state after the antistatic member is attached. Shows a reference example of transfer machine, (a) shows the plan view, (b) a side view.

1 Transported goods (cassette)
2 Hand 21 Guide frame 2P Synthetic resin plate 3 Antistatic member 4 Stacker crane 5 Base part 6 Arm 7 Antistatic resin plate

Claims (1)

In the transfer machine for transferring the transfer object on the hand, an antistatic member constituted by an electrostatic brush having a contact allowance to the transfer object of 3 to 5 mm for preventing charging of the transfer object due to the transfer operation , A transfer machine, characterized in that, from both lateral side surfaces at an intermediate position in the longitudinal direction of the hand , a hair tip is provided in a non-contact manner with a synthetic resin plate disposed on the upper surface of the hand .

Images